CN112509907A - Dielectric barrier glow discharge ion source structure - Google Patents
Dielectric barrier glow discharge ion source structure Download PDFInfo
- Publication number
- CN112509907A CN112509907A CN202011370557.6A CN202011370557A CN112509907A CN 112509907 A CN112509907 A CN 112509907A CN 202011370557 A CN202011370557 A CN 202011370557A CN 112509907 A CN112509907 A CN 112509907A
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- China
- Prior art keywords
- glass sleeve
- ion source
- metal wire
- dielectric barrier
- glow discharge
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- 230000004888 barrier function Effects 0.000 title claims abstract description 17
- 239000011521 glass Substances 0.000 claims abstract description 55
- 239000002184 metal Substances 0.000 claims abstract description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000007254 oxidation reaction Methods 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 19
- 239000003292 glue Substances 0.000 description 2
- 238000001871 ion mobility spectroscopy Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000002285 radioactive effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
- H01J49/123—Duoplasmatrons
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses a dielectric barrier glow discharge ion source structure. The metal wire is packaged in the glass tube, so that the metal wire is not easy to oxidize; the double coaxial structure is adopted, the two glass tubes are parallel and closely contacted, and the consistency of the parallelism and the distance of the metal wire electrodes is ensured; the medium between the two metal wires is only a thin glass tube wall, so that the miniaturization is easy, the oxidation is not easy, and the service life is long. The ion source has the advantages of simple structure, convenient manufacture, small volume, difficult oxidation, small limit voltage value of the required driving circuit and low energy consumption.
Description
Technical Field
The invention relates to the technical field of ion sources of detection instruments, in particular to a dielectric barrier glow discharge ion source structure which can be widely applied to a portable substance detector based on an ion mobility spectrometry principle.
Background
Currently common ion sources include: radioactive ionization, photo-and ultraviolet ionization, corona discharge, glow discharge, dielectric barrier discharge, and the like. Radioactive ionization, such as Ni63, has high ionization energy, long working time and stable product ions, but has the problems of radiation pollution and troublesome post-treatment; the photoionization has higher requirements on the light-emitting equipment, and the used light-emitting device has large volume, short service life and low ionization energy; the corona discharge generally uses a metal electrode, but the metal electrode is exposed in an ionization region with strong oxidizing property, the surface of the metal electrode is easy to oxidize, and the continuous discharge of the metal electrode is influenced; the traditional glow discharge has the problem of difficult maintenance under atmospheric pressure; dielectric barrier discharge has been widely used in large-scale industrial fields such as ozone generation, pollutant treatment, substance surface modification and cleaning, illumination, thin film deposition, etc. due to its inherent characteristics (use under atmospheric pressure, simple device structure, stable discharge performance, high concentration of product ions), and shows the maturity and market value of the technology.
However, the conventional dielectric barrier discharge ion source adopts a parallel or coaxial structure, the structure size is large, and the metal electrode is generally exposed in the air and is easily corroded by the strong oxidizing gas ionized by the air. Meanwhile, because the volume is large and the interval between the discharge electrodes is wide, the limit discharge voltage required by the driving circuit is higher, so that the service life of key components of the driving circuit is shortened or components with higher specification parameters are required, and the cost is high.
Disclosure of Invention
In view of the above, the invention provides a dielectric barrier glow discharge ion source structure, which is simple and reliable, has a small volume, a small driving circuit limit discharge voltage and a long service life, and can be widely applied to various instruments based on ion mobility spectrometry.
The dielectric barrier glow discharge ion source structure comprises a first metal wire, a second metal wire, a first glass sleeve, a second glass sleeve and a base; the first metal wire is wrapped in the first glass sleeve, and the second metal wire is wrapped in the second glass sleeve; the first glass sleeve and the second glass sleeve are parallel and closely contacted and are fixed on the base; the base is provided with two parallel through holes, and the first metal wire and the second metal wire respectively penetrate through the two through holes to be connected with the conducting wire.
Preferably, the glass tube further comprises an insulating wire, and the insulating wire is used for winding and fixing the first glass sleeve and the second glass sleeve.
Preferably, the first glass sleeve or the second glass sleeve extends into the through hole of the base for fixation.
Preferably, the end face of the base is provided with a loop groove at each of the two through holes, and a protrusion is arranged between the two through holes and used for isolating the first metal wire from the second metal wire.
Preferably, insulating glue is coated among the first glass sleeve, the second glass sleeve and the base.
Preferably, the first glass sleeve and the second glass sleeve are made of quartz glass.
Preferably, the first and second wires are made of a corrosion resistant stainless steel material.
Has the advantages that:
the metal wires are packaged in the glass tubes and are not easily oxidized, the double coaxial structure is adopted, the two glass tubes are parallel and closely contacted, the consistency of the parallel and interval of the metal wire electrodes is ensured, and the medium between the two metal wires is only a thin glass tube wall, so that the metal wire electrode is easy to miniaturize, is not easily oxidized and has long service life. The ion source has the advantages of simple structure, convenient manufacture, small volume, difficult oxidation, small limit voltage value of the required driving circuit and low energy consumption.
Drawings
FIG. 1 is a schematic view of an ion source according to the present invention.
Fig. 2 is a front sectional view of fig. 1.
The device comprises a base, a first metal wire, a second metal wire, a first glass sleeve, a second glass sleeve, an insulating wire and a second glass sleeve, wherein the base comprises 1-the first metal wire, 2-the second metal wire, 3-the first glass sleeve, 4-the second glass sleeve, 5-the insulating wire and 6-the base.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention provides a dielectric barrier glow discharge ion source structure, which comprises an ion generating structure and a supporting base 6 as shown in figures 1 and 2. The ion generating structure mainly comprises a first metal wire 1, a second metal wire 2, a first glass sleeve 3 and a second glass sleeve 4. The first wire 1 is wrapped from the head by a first glass sleeve 3 for a part, the second wire 2 is wrapped from the head by a second glass sleeve 4 for a part to be bent, and the first glass sleeve 3 and the second glass sleeve 4 are arranged in parallel and in close contact. The supporting base 6 is used for supporting and fixing the ion generating structure and is provided with 2 parallel through holes, the glass sleeve is arranged on the supporting base 6, and the first metal wire 1 and the second metal wire 2 respectively penetrate through the through holes in the supporting base and are connected with the driving circuit.
The ion generating structure adopts a double-coaxial structure, and the metal wires are wrapped in the two parallel glass sleeves, so that on one hand, the glass sleeves can effectively prevent the metal wires from being corroded by contacting with air, the discharge life is prolonged, on the other hand, the parallel glass sleeves can ensure the parallelism of the two metal wires, and the consistency of the electrode spacing is ensured; meanwhile, the glass sleeves are in close contact, so that the medium between the two metal wires is thin and free of other impurities, the corrosion of the metal wires is further prevented, and the service life of the metal wires is prolonged. In addition, the two parallel sleeves can be wound and fixed in a spiral mode by adopting an insulating wire (5), and the two glass sleeves are ensured to be parallel and closely contacted.
The supporting base 6 is made of insulating materials, and the glass sleeve can be fixed on the supporting base 6 in a mode of directly inserting into the through hole or other modes. In addition, the distance between the two through holes can be adjusted to be wider, and the metal electrodes can be prevented from being broken down. Two parallel circular grooves are formed in the surface of the supporting base and used for placing an O-shaped ring to be sealed with other parts, and a section of protrusion is arranged between the two through holes and used for isolating the two metal wires. And insulating glue and the like can be adopted between the glass sleeve and the supporting base for insulating and sealing.
In order to ensure the reliability of the ion generating structure, based on the mature glass forming process in the market, in the embodiment, the glass sleeve is made of quartz glass, and the ion generating structure takes the quartz glass as a dielectric material; the metal wire is used as a discharge electrode, and corrosion-resistant stainless steel is adopted to enhance the oxidation resistance of the ion generation structure.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A dielectric barrier glow discharge ion source structure is characterized by comprising a first metal wire (1), a second metal wire (2), a first glass sleeve (3), a second glass sleeve (4) and a base (6); wherein the first metal wire (1) is wrapped in the first glass sleeve (3), and the second metal wire (2) is wrapped in the second glass sleeve (4); the first glass sleeve (3) and the second glass sleeve (4) are in parallel and close contact and are fixed on the base (6); two parallel through holes are formed in the base (6), and the first metal wire (1) and the second metal wire (2) penetrate through the two through holes respectively to be connected with the conducting wire.
2. The dielectric barrier glow discharge ion source structure according to claim 1, further comprising an insulating wire (5), wherein the insulating wire (5) winds and fixes the first glass sleeve (3) and the second glass sleeve (4).
3. The structure of a dielectric barrier glow discharge ion source according to claim 1 or 2, wherein the first glass sleeve (3) or the second glass sleeve (4) is fixed by extending into the through hole of the base (6).
4. A dielectric barrier glow discharge ion source structure according to claim 1 or 2, wherein a loop groove is provided at two through holes at the end face of the base (6), and a protrusion is provided between the two through holes for isolating the first wire (1) from the second wire (2).
5. The structure of a dielectric barrier glow discharge ion source according to claim 1, wherein an insulating paste is applied between the first glass sleeve (3), the second glass sleeve (4) and the base (6).
6. A dielectric barrier glow discharge ion source structure according to claim 1, wherein the first glass sleeve (3) and the second glass sleeve (4) are made of quartz glass.
7. A dielectric barrier glow discharge ion source structure according to claim 1, wherein the first wire (1) and the second wire (2) are made of a corrosion-resistant stainless steel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011370557.6A CN112509907A (en) | 2020-11-30 | 2020-11-30 | Dielectric barrier glow discharge ion source structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011370557.6A CN112509907A (en) | 2020-11-30 | 2020-11-30 | Dielectric barrier glow discharge ion source structure |
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| Publication Number | Publication Date |
|---|---|
| CN112509907A true CN112509907A (en) | 2021-03-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011370557.6A Pending CN112509907A (en) | 2020-11-30 | 2020-11-30 | Dielectric barrier glow discharge ion source structure |
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| CN (1) | CN112509907A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114040557A (en) * | 2021-11-04 | 2022-02-11 | 中船重工安谱（湖北）仪器有限公司 | Array type dielectric barrier glow discharge device |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07142037A (en) * | 1993-11-15 | 1995-06-02 | Ushio Inc | Dielectric barrier discharge lamp |
| CN1254250A (en) * | 1998-10-26 | 2000-05-24 | 松下电工株式会社 | Plasma processing device and plasma processing method using said device |
| CN101277576A (en) * | 2007-03-26 | 2008-10-01 | 中国科学院光电研究院 | System for processing thin-film material surface using bi-medium to block electric discharge |
| CN101274213A (en) * | 2007-12-29 | 2008-10-01 | 大连理工大学 | Device for treating exhaust air in combination of dielectric barrier discharge plasma oxidation/solution absorption and method |
| US20110168881A1 (en) * | 2008-10-03 | 2011-07-14 | Sturgeon Ralph E | Plasma-based direct sampling of molecules for mass spectrometric analysis |
| CN105536453A (en) * | 2016-01-22 | 2016-05-04 | 山东派力迪环保工程有限公司 | Row-type double dielectric barrier plasma discharge plate |
| CN107124812A (en) * | 2017-06-26 | 2017-09-01 | 苏州大学 | Atmospheric pressure glow plasma generating device and textile material processing device |
| CN108905545A (en) * | 2018-09-11 | 2018-11-30 | 北京振戎融通通信技术有限公司 | Can automatic cleansing medium barrier discharge pipe low temperature plasma exhaust treatment component |
| CN213691957U (en) * | 2020-11-30 | 2021-07-13 | 中船重工安谱（湖北）仪器有限公司 | Dielectric barrier glow discharge ion source structure |
-
2020
- 2020-11-30 CN CN202011370557.6A patent/CN112509907A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07142037A (en) * | 1993-11-15 | 1995-06-02 | Ushio Inc | Dielectric barrier discharge lamp |
| CN1254250A (en) * | 1998-10-26 | 2000-05-24 | 松下电工株式会社 | Plasma processing device and plasma processing method using said device |
| CN101277576A (en) * | 2007-03-26 | 2008-10-01 | 中国科学院光电研究院 | System for processing thin-film material surface using bi-medium to block electric discharge |
| CN101274213A (en) * | 2007-12-29 | 2008-10-01 | 大连理工大学 | Device for treating exhaust air in combination of dielectric barrier discharge plasma oxidation/solution absorption and method |
| US20110168881A1 (en) * | 2008-10-03 | 2011-07-14 | Sturgeon Ralph E | Plasma-based direct sampling of molecules for mass spectrometric analysis |
| CN105536453A (en) * | 2016-01-22 | 2016-05-04 | 山东派力迪环保工程有限公司 | Row-type double dielectric barrier plasma discharge plate |
| CN107124812A (en) * | 2017-06-26 | 2017-09-01 | 苏州大学 | Atmospheric pressure glow plasma generating device and textile material processing device |
| CN108905545A (en) * | 2018-09-11 | 2018-11-30 | 北京振戎融通通信技术有限公司 | Can automatic cleansing medium barrier discharge pipe low temperature plasma exhaust treatment component |
| CN213691957U (en) * | 2020-11-30 | 2021-07-13 | 中船重工安谱（湖北）仪器有限公司 | Dielectric barrier glow discharge ion source structure |
Non-Patent Citations (1)
| Title |
|---|
| 詹花茂;李成榕;许金豹;李明;: "用于材料表面处理的空气中的均匀介质阻挡放电", 高电压技术, no. 03, 31 March 2008 (2008-03-31) * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114040557A (en) * | 2021-11-04 | 2022-02-11 | 中船重工安谱（湖北）仪器有限公司 | Array type dielectric barrier glow discharge device |
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