CN112492479B - Miniature microphone dust keeper and MEMS microphone - Google Patents
Miniature microphone dust keeper and MEMS microphone Download PDFInfo
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- CN112492479B CN112492479B CN202011400342.4A CN202011400342A CN112492479B CN 112492479 B CN112492479 B CN 112492479B CN 202011400342 A CN202011400342 A CN 202011400342A CN 112492479 B CN112492479 B CN 112492479B
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
The invention provides a miniature microphone dustproof device and an MEMS (micro-electromechanical systems) microphone, wherein the miniature microphone dustproof device comprises a supporting carrier and a dustproof film arranged on the supporting carrier; the dustproof film comprises a fixed part fixed on the support carrier and a filter screen arranged in the center of the fixed part; the filter screen comprises at least two subarea areas, and each subarea area comprises a circumferential beam distributed along the preset circumferential direction of the corresponding subarea area and/or a radius beam distributed along the preset radius direction of the corresponding subarea area; the circumferential beam and/or the radius beam are used for adjusting the bending rigidity of the corresponding subarea area and configuring the concave-convex shape of the subarea area. The invention can adjust the bending rigidity of the dustproof film through the circumferential beam and/or the radius beam, so that the dustproof film forms any concave-convex shape and the crease resistance is improved.
Description
Technical Field
The invention relates to the technical field of electronic products, in particular to a miniature microphone dustproof device and an MEMS (micro-electromechanical systems) microphone provided with the miniature microphone dustproof device.
Background
The existing MEMS microphone is usually provided with a dustproof structure, the dustproof structure mainly comprises a supporting piece and a dustproof film, and pollutants such as external dust and particles are prevented from entering the microphone through the dustproof structure, so that the acoustic performance of a microphone product is ensured.
However, because the dustproof film is extremely thin and the ratio of the plane size to the thickness is large, the dustproof film is easy to deform and has irregular folds when being subjected to external forces such as thermal stress and the like in the processing or using process; in addition, in the dustproof film processing process, thermal stress is not easy to avoid, so that the traditional dustproof film is easy to generate poor appearance phenomena such as folds and the like during packaging, and the performance of a product and the user experience are influenced.
At present, in order to relieve the compressive force received by a support carrier, a stress relieving structure is usually arranged on a dustproof film, but because the bending rigidity of the film is uniform in the radial direction or the circumferential direction, a high-order buckling mode can be generated randomly, namely the lines of the folds of the dustproof film are random and complex shapes; therefore, the conventional stress relief structure cannot completely prevent the buckling of the dustproof film, and the effect of inhibiting the buckling and the wrinkling of the dustproof film is poor.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a micro microphone dust-proof device and a MEMS microphone, so as to solve the problem that the existing dust-proof film is easily subjected to external force to form irregular wrinkles, which results in poor dust-proof performance.
The invention provides a dustproof device of a miniature microphone, which comprises a supporting carrier and a dustproof film arranged on the supporting carrier; the dustproof film comprises a fixed part fixed on the support carrier and a filter screen arranged in the center of the fixed part; the filter screen comprises at least two subarea areas, and each subarea area comprises a circumferential beam distributed along the preset circumferential direction of the corresponding subarea area and/or a radius beam distributed along the preset radius direction of the corresponding subarea area; the circumferential beam and/or the radius beam are used for adjusting the bending rigidity of the corresponding subarea area and configuring the concave-convex shape of the subarea area.
In addition, the preferable technical scheme is that the preset process of presetting the circumferential direction and the radius direction comprises the following steps: defining any point on the dustproof film as the radius center of the subarea area; taking the parallel direction of the connecting line direction of the radius center and any point in the subarea area as the preset radius direction of the subarea area; and taking the radius center as the circle center, and taking the radius beams with any length distributed along the preset radius direction as the circumferential direction of the radius as the preset circumferential direction of the subarea area.
In addition, the preferable technical scheme is that the angle range of the radius beam is 0-360 degrees.
In addition, it is preferable that a mixing ratio of the circumferential beam and the radial beam is adjusted according to a position of the divisional area on the dust-proof film.
In addition, the preferable technical scheme is that the circumferential beams positioned on the same subarea area are distributed in a Z shape and/or the radius beams positioned on the same subarea area are distributed in a Z shape.
In addition, the preferable technical proposal is that a supporting boundary is arranged at the edge of each subarea area or the joint of two adjacent subarea areas; the bending stiffness of the support border is greater than the bending stiffness of the zoned area.
In addition, the preferable technical scheme is that the filter screen comprises a first partition area which is positioned at the center of the dustproof film and is circular, and a second partition area and a third partition area which are distributed around the first partition area and are fan-shaped; the second partition area and the third partition area are spaced apart from each other.
In addition, the supporting boundary of the fixing part is preferably circular, arc-shaped or straight.
According to another aspect of the present invention, there is provided a MEMS microphone, comprising the above-mentioned miniature microphone dust-proof device; the miniature microphone dustproof device is arranged at the sound hole of the MEMS microphone; alternatively, the miniature microphone dust-proof device is arranged at the chip of the MEMS microphone.
By utilizing the miniature microphone dustproof device and the MEMS microphone, the filter screen is divided into a plurality of subarea areas, each subarea area comprises the circumferential beams distributed along the preset circumferential direction and/or the radius beams distributed along the preset radius direction, and the dustproof membrane can realize relatively strong and weak bending rigidity in different subarea areas through the combination of the circumferential beams and the radius beams, so that the capacity of resisting external stress of the dustproof membrane is improved.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Drawings
Other objects and results of the present invention will become more apparent and more readily appreciated as the same becomes better understood by reference to the following description taken in conjunction with the accompanying drawings. In the drawings:
fig. 1 is a top view of a dust-proof device for a micro microphone according to a first embodiment of the invention;
FIG. 2 is a partial schematic view of a first partition area according to a first embodiment of the invention;
FIG. 3 is a schematic view of a radius beam disposed in a first zone area according to an embodiment of the present invention;
FIG. 4 is a first radial beam and circumferential beam combination for a second zone of interest in accordance with a first embodiment of the present invention;
FIG. 5 is a second radial beam and circumferential beam combination view of a second zone of interest in accordance with a first embodiment of the present invention;
fig. 6 is a top view of a dust-proof device for a miniature microphone according to a second embodiment of the present invention;
fig. 7 is a cross-sectional view of a micro microphone dust-proof device according to a second embodiment of the invention at a different position.
Wherein the reference numerals include: support carrier 1, filter mesh 2, first zoned area 3, radius beam 31, second zoned area 4, circumferential beam 41, radius beam 42, circumferential beam 43, radius beam 44, first zoned area 5, second zoned area 6, third zoned area 7, second zoned area 8.
The same reference numbers in all figures indicate similar or corresponding features or functions.
Detailed Description
In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that such embodiment(s) may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
To describe the structure of the miniature microphone dust-proof device of the present invention in detail, specific embodiments of the present invention will be described below with reference to the accompanying drawings.
Fig. 1 shows a top view structure of a dust-proof device for a miniature microphone according to an embodiment of the invention.
As shown in fig. 1, a dust-proof device for a miniature microphone according to a first embodiment of the present invention includes a support carrier 1 and a dust-proof film disposed on the support carrier 1; the dustproof film comprises a fixing part fixed on the support carrier 1 and a filter screen 2 arranged at the center of the fixing part, the filter screen 2 can be in a regular shape or an irregular shape, the filter screen 2 comprises at least two subarea areas, in the embodiment, the subarea areas comprise 9 subarea areas in different shapes, and each subarea area further comprises a circumferential beam distributed along the preset circumferential direction of the corresponding subarea area and/or a radius beam distributed along the preset radius direction of the corresponding subarea area; the circumferential beam and/or the radius beam are used for adjusting the bending rigidity of the corresponding subarea area and configuring the concave-convex shape of the subarea area.
Wherein, predetermine circumferencial direction and predetermine the predetermined process of radial direction and include: defining any point on the dustproof film as the radius center of the subarea area; taking the parallel direction of the connecting line direction of the radius center and any point in the subarea area as the preset radius direction of the subarea area; the radius center is used as the circle center, the circumferential direction which takes the radius beams with any length distributed along the preset radius direction as the radius is used as the preset circumferential direction of the subarea area, the radius beams are distributed along the preset radius direction, and the circumferential beams are distributed along the preset half shaft direction.
Specifically, fig. 2 and 3 respectively show a partial structure of a first divisional area and a schematic structure provided with a radius beam according to a first embodiment of the present invention.
As shown in fig. 1 to 3 in common, in the first embodiment, the filter screen disposed on the support carrier comprises 9 zones distributed irregularly, including a first zone area 3 and a second zone area 4, the first zone area 3 being herein understood as the nth zone areaKA partition area for dividing the arbitrary point O of the filter screen into a preset radius direction and a preset circumference directionkDefined as the center of the radius, the center of the radius OkAnd an arbitrary point P in the first divisional area 3kThe parallel direction of the sides of the connecting line is taken as the preset radius direction, and the radius beams 31 can be arranged in parallel along the preset radius directionAnd (4) placing.
Wherein, due to the radius center and PkThe length of the radius beam 31 can be determined according to the arrangement density of the circumferential beams or the shape of the corresponding subarea area.
Fig. 4 shows a first schematic structure of a combination of a radius beam and a circumferential beam of a second zone of section according to a first embodiment of the invention.
As shown in fig. 4, in the micro microphone dust-proof device in the first embodiment, the second partition area of the filter screen includes the radius beams 42 distributed in parallel and the circumferential beams 4141 distributed between the adjacent radius beams 42, and since the arrangement density of the radius beams 42 is adjustable, when the distance between the two adjacent radius beams 42 is small, the circumferential beams 41 between the two adjacent radius beams can also be regarded as a distributed beam structure perpendicular to the radius beams 42, and in this embodiment, the circumferential beams 41 are distributed in a straight line.
Further, in the second combined schematic structure of the radius beams 44 and the circumferential beams 43 in the second divisional area according to the first embodiment of the invention shown in fig. 5, under the condition that the distribution of the radius beams 44 is not changed, the distribution positions of the circumferential beams 43 can be adjusted so that the circumferential beams 43 are distributed in a zigzag shape.
It should be noted that the distribution density, relative position, size, etc. of the radius beams and the circumference beams can be adjusted according to the application environment or production requirement of the dustproof film, for example, the circumference beams located on the same subarea area can be arranged to be distributed in a zigzag shape and/or the radius beams located on the same subarea area can be arranged to be distributed in a zigzag shape.
In addition, since the shape of the filter screen may be various such as circular, longitudinal, polygonal, or irregular, there are various variations in dividing the area of the filter screen, and the number of the divisional areas and the shape and size of each may be flexibly adjusted.
Fig. 6 and 7 show a top view structure and a cross-sectional structure along each position of the miniature microphone dust-proofing apparatus according to the second embodiment of the present invention, respectively.
As shown in fig. 6 and 7, in the micro microphone dust-proof device according to the second embodiment of the present invention, the filter screen of the dust-proof film disposed on the supporting carrier has a circular structure, and includes a first partition area 5 located at the center of the dust-proof film and having a circular shape, and a second partition area and a third partition area 7 distributed around the first partition area 5 and having a sector shape; wherein the second subarea area (including the second subarea area 6 and the second subarea area 8, the same applies below) and the third subarea area 7 are arranged at a distance from each other. The distribution structures and mixing ratios of the radius beams and/or the circumferential beams of the first, second and third subarea areas 5, 7 may be different or partially the same.
Specifically, C denotes a center point of the first divided area 5, B denotes a center point of the second divided area 6, a denotes a center point of the second divided area 8, and the AB-axis curve distribution shown in fig. 7 denotes a sectional view in the direction of the AB arc in fig. 6, in which the curved line part denotes the sectional shapes of the second divided area 8 and the second divided area 6, and the solid line part denotes the sectional shape of the third divided area 7; similarly, the CD-axis curve represents a cross-sectional view in the direction of the CD straight line in fig. 6, in which the curved line portion represents the cross-sectional shape of the corresponding divisional area, and the solid line portion represents the cross-sectional shape of the first divisional area 5; the CE axis curve represents a cross-sectional view along the direction of the CE line in fig. 6, wherein the vertical dotted line represents the contact position of the first divisional area 5 with the other, and the shapes of both sides of the dotted line correspond to the cross-sectional shapes of the divisional areas on both sides, respectively.
It can be seen that in the second embodiment, the first divisional area 5 is located below the horizontal plane where the center point of the dust-proof film is located; the second subarea area is positioned below the horizontal plane where the central point of the dustproof film is positioned and above the horizontal plane where the central point of the first subarea area 5 is positioned; the third subarea area 7 is positioned above the horizontal plane where the center point of the second subarea area is positioned; wherein, although the radius beam perpendicular to the support boundary has a convex shape, it has a displacement downward characteristic by which upward displacement of the convex shape in the area of the inner area of the filter screen is offset, suppressing the absolute value of the displacement of the dust-proof film.
In the specific application process, various parameters such as the shapes, the sizes, the mixing proportion and the like of the circumferential beam and the radius beam can be adjusted according to the position of the partition area on the dustproof film, the production requirement and the relative strength of the bending rigidity on the dustproof film, so that the dustproof film is distributed in any concave-convex shape, and further bears larger external stress without fold deformation.
In one embodiment of the invention, a supporting boundary is arranged at the edge of each subarea or the joint of two adjacent subarea areas, the bending rigidity of the supporting boundary is greater than that of the subarea areas on two sides, and each subarea area with a clear boundary is further formed; in addition, in order to reduce the structural strength of the joint position of the filter screen and the fixing part and reduce the stress transmission, the support boundary of the joint position of the filter screen and the fixing part can be set to be in a circular shape, an arc shape or a straight line shape, namely the support boundary of the fixing part is in various shapes such as a circular shape, an arc shape or a straight line.
Corresponding to the micro microphone dustproof device, the invention also provides an MEMS microphone, which comprises the micro microphone dustproof device; the miniature microphone dustproof device can be arranged at the sound hole of the MEMS microphone; or the miniature microphone dustproof device can be arranged at each chip in the MEMS microphone, and the microphone internal components or the inside and the outside of the microphone are effectively isolated through the miniature microphone dustproof device, so that dust or particle foreign matters are prevented from entering the inside of a product or entering the chip of the product.
In addition, the micro microphone dust-proof device and the MEMS microphone can be applied to terminal products such as sound box equipment and portable phones.
According to the MEMS microphone with the dustproof device for the miniature microphone, the filter screen is divided into a plurality of subarea areas, each subarea area comprises the circumferential beams distributed along the preset circumferential direction and/or the radius beams distributed along the preset radius direction, the dustproof film can realize relatively strong and weak bending rigidity in different subarea areas through the combination of the circumferential beams and the radius beams, the upward displacement of the convex part at the central position can be offset by utilizing the downward displacement of the dustproof film, the absolute displacement of the dustproof film is further reduced, the design freedom of the dustproof device for the miniature microphone is higher, and the performance is more stable.
The micro microphone dust-proofing device and the MEMS microphone according to the present invention are described above by way of example with reference to the accompanying drawings. It will be appreciated by those skilled in the art that various modifications may be made to the above-described miniature microphone dust-proofing apparatus and MEMS microphone of the present invention without departing from the spirit of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.
Claims (8)
1. A dustproof device for a miniature microphone comprises a supporting carrier and a dustproof film arranged on the supporting carrier; it is characterized in that the preparation method is characterized in that,
the dustproof film comprises a fixed part fixed on the support carrier and a filter screen arranged at the center of the fixed part;
the filter screen comprises at least two subarea areas, wherein each subarea area comprises a circumferential beam distributed along the preset circumferential direction of the corresponding subarea area and/or a radius beam distributed along the preset radius direction of the corresponding subarea area; wherein the content of the first and second substances,
the circumferential beam and/or the radius beam are used for adjusting the bending rigidity of the corresponding subarea area and configuring the concave-convex shape of the subarea area; wherein, the preset process of presetting the circumferential direction and presetting the radius direction comprises:
defining any point on the dustproof film as the radius center of the subarea area;
taking the parallel direction of the connecting line direction of the radius center and any point in the subarea area as the preset radius direction of the subarea area;
and taking the radius center as a circle center, and taking the radius beams with any length distributed along the preset radius direction as the radius circumferential direction as the preset circumferential direction of the subarea area.
2. The miniature microphone dust keeper of claim 1,
the angle range of the radius beam is 0-360 degrees.
3. The miniature microphone dust keeper of claim 1,
and the mixing proportion of the circumferential beam and the radius beam is adjusted according to the position of the subarea area on the dustproof film.
4. The miniature microphone dust keeper of claim 1,
the circumferential beams positioned on the same subarea area are distributed in a Z shape; and/or the presence of a gas in the atmosphere,
the radius beams positioned on the same subarea area are distributed in a Z shape.
5. The miniature microphone dust keeper of claim 1,
a supporting boundary is arranged at the edge of each subarea area or the joint of two adjacent subarea areas;
the support border has a greater bending stiffness than the zoned area.
6. The miniature microphone dust keeper of claim 1,
the filter screen comprises a first partition area, a second partition area and a third partition area, wherein the first partition area is positioned in the center of the dustproof film and is circular, and the second partition area and the third partition area are distributed around the first partition area and are fan-shaped;
the second divisional area and the third divisional area are spaced apart from each other.
7. The miniature microphone dust keeper of claim 1,
the supporting boundary of the fixing part is circular, arc or straight line.
8. A MEMS microphone comprising the miniature microphone dust-proof device of any one of claims 1 to 7; wherein the content of the first and second substances,
the miniature microphone dustproof device is arranged at the sound hole of the MEMS microphone; or, the miniature microphone dust-proof device is arranged at the chip of the MEMS microphone.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011400342.4A CN112492479B (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
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| CN202011400342.4A CN112492479B (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
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| CN112492479A CN112492479A (en) | 2021-03-12 |
| CN112492479B true CN112492479B (en) | 2022-05-06 |
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| CN111131984A (en) * | 2019-12-31 | 2020-05-08 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN111711903A (en) * | 2020-06-24 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
| CN111711902A (en) * | 2020-06-24 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
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| JP2005328336A (en) * | 2004-05-14 | 2005-11-24 | Pioneer Electronic Corp | Damper for loudspeaker device, loudspeaker device using its damper, and manufacturing method for loudspeaker device |
| EP2308242A1 (en) * | 2008-07-28 | 2011-04-13 | Nxp B.V. | Membrane for an acoustic transducer |
| US9277303B2 (en) * | 2014-01-22 | 2016-03-01 | Bose Corporation | Treatment for loudspeaker suspension element fabric |
| CN205830021U (en) * | 2016-07-22 | 2016-12-21 | 吴海斌 | A kind of micro-electro-mechanical microphone |
| GB201708348D0 (en) * | 2017-04-28 | 2017-07-12 | Cirrus Logic Int Semiconductor Ltd | MEMS devices and processes |
| CN111148000B (en) * | 2019-12-31 | 2021-10-22 | 瑞声科技（南京）有限公司 | MEMS microphone and array structure |
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| CN210040562U (en) * | 2019-07-26 | 2020-02-07 | 中国电子科技集团公司第五十四研究所 | Uniform blocking high-precision auxiliary reflecting surface device with two-stage pose adjusting function |
| CN111131984A (en) * | 2019-12-31 | 2020-05-08 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN111711903A (en) * | 2020-06-24 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
| CN111711902A (en) * | 2020-06-24 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
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