CN112481599A - Novel arrangement mode and working method of vacuum cold trap of continuous coating line - Google Patents
Novel arrangement mode and working method of vacuum cold trap of continuous coating line Download PDFInfo
- Publication number
- CN112481599A CN112481599A CN202011299797.1A CN202011299797A CN112481599A CN 112481599 A CN112481599 A CN 112481599A CN 202011299797 A CN202011299797 A CN 202011299797A CN 112481599 A CN112481599 A CN 112481599A
- Authority
- CN
- China
- Prior art keywords
- cold trap
- valve
- chamber
- trap coil
- coating process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 63
- 239000011248 coating agent Substances 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000005086 pumping Methods 0.000 claims abstract description 27
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000002955 isolation Methods 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 230000000750 progressive effect Effects 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 17
- 238000010257 thawing Methods 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000005057 refrigeration Methods 0.000 abstract description 3
- 239000007888 film coating Substances 0.000 abstract 2
- 238000009501 film coating Methods 0.000 abstract 2
- 230000000737 periodic effect Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000077 insect repellent Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention provides a novel arrangement mode and a working method of a vacuum cold trap of a continuous coating line, wherein the arrangement mode comprises the steps that a cold trap system is arranged on one side outside a coating process chamber and is communicated with the coating process chamber through a pipeline; the cold trap system comprises a cold trap and a cold trap coil pipe connected with the cold trap; fixing the cold trap coil pipe in a cold trap coil pipe chamber through a heating fixing device; one end of the cold trap coil pipe chamber is connected with the coating process chamber, and the other end of the cold trap coil pipe chamber is connected with a pre-stage pumping system. The invention has the advantages of simple structure, low cost, convenient maintenance, no occupation of the space of the process chamber, no influence on the film coating process, adjustable length of the refrigeration coil and the like, is suitable for film coating lines with different width specifications, avoids the need of breaking the whole production line for periodic defrosting, ensures the production continuity and the process stability, reduces the maintenance cost, greatly improves the production efficiency and has great significance for actual production.
Description
Technical Field
The invention relates to the field of cold trap equipment of a coated glass production line, in particular to a novel arrangement mode and a working method of a vacuum cold trap of a continuous coating line.
Background
The vacuum magnetron sputtering coating is widely applied in the field of glass coating, and the core of Low-emissivity coated glass (Low-E) is that a multilayer composite film is prepared on a glass substrate by using a magnetron sputtering coating technology, so that the Low-emissivity coated glass has high transmittance and Low emissivity, and further has energy-saving and heat-insulating properties. The magnetron sputtering equipment comprises a cavity, a transmission part, a coating process, a vacuum obtaining part, a cooling part and the like. Vacuum gain plays an important role in the overall coating equipment.
The cold trap is used as an important component of vacuum obtaining equipment, and has important significance for quickly obtaining high vacuum, improving production rhythm, reducing water molecular weight in the cavity and improving film forming quality. The magnetron sputtering coating process has high requirement on vacuum degree, and the background can generally reach 10-4Pa. When the vacuum degree reaches 10-2During Pa, water vapor often becomes a key factor restricting the reduction of the vacuum degree, and meanwhile, the existence of the water vapor can also generate certain influence on the coating process, such as: affecting film adhesion and related optical and mechanical properties. Therefore, a cold trap is added to the common equipment for improving background vacuum, film forming quality, air extraction speed and production cycle.
At present, a cold trap used by a continuous magnetron sputtering vacuum coating line is directly placed in a process chamber, and when vacuum is obtained before coating, the cold trap directly carries out low-temperature refrigeration to trap water vapor, so that high vacuum can be quickly obtained. When the power of the cold trap is fixed and the background vacuum of the process chamber is fixed, the length of the coil of the cold trap is often determined, namely the surface area of the coil is basically determined. The surface area of the cold trap coil directly limits the maximum refrigerating capacity of the cold trap, when the surface of the coil absorbs water vapor and frosts to reach a certain thickness, the refrigerating effect of the cold trap is greatly reduced, the water vapor trapping capacity is greatly reduced, and at the moment, the surface of the cold trap coil is defrosted to enable the cold trap to continue to be efficiently used. Limited coil area requires that cold trap equipment must be defrosted regularly to guarantee cold trap work efficiency and work effect, but defrosting directly in the process chamber can reduce the vacuum degree of the chamber rapidly in a short time, thereby causing the problems of product quality reduction, damage to the process chamber vacuum pump, and the like.
During actual production, the whole coating line needs to be broken in the air regularly to perform high-temperature defrosting on the cold trap coil, particularly in a high-humidity area, the air humidity is high, the cold trap coil is extremely easy to frost, the air breaking defrosting needs to be performed frequently, the single air breaking defrosting maintenance is performed, then the vacuum pumping is performed until the background pressure intensity needs to be at least half a day, and the production efficiency is greatly reduced.
Aiming at the problems of the cold trap of the existing equipment, based on the characteristic of high-efficiency water vapor trapping of low-temperature refrigeration of the cold trap, a distribution mode and a working method are needed, wherein the cold trap and a coating production process chamber are separately arranged, and the coil pipe of the cold trap can independently break the air to defrost.
Disclosure of Invention
The invention provides a novel arrangement mode and a working method of a vacuum cold trap of a continuous coating line, aiming at solving the problems that a coating production line needs to be broken and empty and the production efficiency is reduced because a cold trap coil needs to be broken and defrosted frequently in the prior art.
In a first aspect of the invention, the invention provides an arrangement mode of a novel continuous coating line vacuum cold trap, wherein a cold trap system is arranged outside a coating process chamber and is communicated with the coating process chamber through a pipeline;
the cold trap system comprises a cold trap and a cold trap coil pipe connected with the cold trap; fixing the cold trap coil pipe in a cold trap coil pipe chamber through a heating fixing device; a composite vacuum gauge is arranged on the cold trap coil cavity and used for detecting the vacuum degree of the cold trap coil cavity;
one end of the cold trap coil pipe chamber is connected with the coating process chamber, and the other end of the cold trap coil pipe chamber is connected with a pre-stage pumping system;
a first valve and a second valve are respectively arranged on a pipeline connecting the cold trap coil chamber with the pre-stage pumping system and a pipeline connecting the cold trap coil chamber with the coating process chamber;
and a third valve is arranged on a pipeline connecting the cold trap coil chamber with the external atmosphere.
Furthermore, an insulating layer is uniformly arranged on the inner wall of the cold trap coil chamber.
Furthermore, the insulating layer is made of polytetrafluoroethylene.
Further, the backing stage pumping system comprises a screw pump, a fourth valve, a roots pump and a fifth valve which are connected step by step.
Further, the first valve, the second valve, the third valve, the fourth valve, and the fifth valve are selected from one of an angle valve and a butterfly valve.
Further, the width of the cross section of the cold trap coil pipe cavity is 400-1200 mm, and the height is 300-1000 mm; the length of the cold trap coil pipe cavity is 1500-5000 mm.
Furthermore, the cold trap coil pipe is a copper pipe, and the diameter of the cold trap coil pipe is 8-16 mm.
Furthermore, at least one gas isolation chamber is arranged on the coating process chamber.
In a second aspect of the present invention, the present invention provides a novel continuous coating line, which uses the above arrangement.
In a third aspect of the present invention, the present invention further provides a working method of the above novel continuous coating line, the working method includes the following steps:
opening a first valve, and pre-pumping a cold trap coil pipe chamber by using a pre-pumping system;
when the vacuum degree in the cold trap coil chamber reaches 5Pa, opening a second valve to enable the cold trap coil chamber to be communicated with a coating process chamber, and performing high-vacuum air suction on the cold trap coil chamber by using a vacuum pumping system in the coating process chamber to enable the cold trap coil chamber to obtain vacuum;
thirdly, the cold trap is started to refrigerate the cold trap coil, the cold trap coil in the cavity of the cold trap coil efficiently adsorbs water vapor, and background vacuum is rapidly reduced for the coating process chamber;
and fourthly, when more moisture and more frost are absorbed in the cold trap coil, closing the first valve and the second valve, opening the third valve, breaking the cavity of the cold trap coil, adjusting the cold trap to a heating working mode, and opening the heating fixing device to defrost the cold trap coil at high temperature.
By adopting the technical scheme, compared with the prior art, the invention has the following technical effects:
the arrangement mode and the working method of the novel vacuum cold trap of the continuous coating line provided by the invention realize vacuum obtaining and independent air breaking of the cold trap coil chamber by arranging the pre-stage pumping system, reasonably connecting pipes and matching valves, so that the defrosting work of the cold trap coil can be independently broken without breaking the whole line of the continuous coating line and influencing the production efficiency of the coating line.
Drawings
FIG. 1 is a schematic diagram of the arrangement provided by the present invention;
FIG. 2 is a schematic cross-sectional view of the connection between the coil chamber of the cold trap and the coating process chamber in the arrangement provided by the present invention;
FIG. 3 is a schematic cross-sectional view of the cold trap coil chamber in the direction of the arrow in FIG. 2;
FIG. 4 is a schematic diagram of the connection of the backing pumping system to the cold trap coil chamber in the arrangement provided by the present invention;
wherein the reference numerals are: 1-a pre-stage pumping system, 11-a screw pump, 12-a roots pump, 13-a fourth valve, 14-a fifth valve, 2-a cold trap coil chamber, 21-a heating fixing device, 22-a heat insulation layer, 3-a cold trap, 4-a first valve, 5-a third valve, 6-a second valve, 7-a gas isolation chamber, 8-a coating process chamber, 9-a composite vacuum gauge and 10-a cold trap coil.
Detailed Description
The invention provides a novel arrangement mode and a working method of a vacuum cold trap of a continuous coating line.
The present invention will be better understood from the following detailed and specific description, taken in conjunction with the accompanying drawings and the specific examples, which, however, do not limit the scope of the invention.
Example 1
Referring to fig. 1 to 4, the present embodiment provides an arrangement of a novel continuous coating line vacuum cold trap, which includes installing a cold trap system outside a coating process chamber 8, and communicating with the coating process chamber 8 through a pipeline;
the cold trap system comprises a cold trap 3 and a cold trap coil 10 connected with the cold trap 3; fixing the cold trap coil 10 in the cold trap coil chamber 2 through a heating fixing device 21; a composite vacuum gauge 9 is arranged on the cold trap coil cavity 2 and used for detecting the vacuum degree of the cold trap coil cavity 2; the cold trap coil 10 is laid in the cold trap coil chamber 2 in a continuous laying and radiating manner in a skirt mosquito-repellent incense type;
one end of the cold trap coil pipe chamber 2 is connected with the coating process chamber 8, and the other end is connected with a pre-pump pumping system 1;
a first valve 4 and a second valve 6 are respectively arranged on a pipeline connecting the cold trap coil chamber 2 with the pre-stage pumping system 1 and a pipeline connecting the cold trap coil chamber 2 with the coating process chamber 8;
a third valve 5 is arranged on the pipeline connecting the cold trap coil chamber 2 with the outside atmosphere.
The steps of the cold trap coil chamber 2 for vacuum production are as follows: firstly, opening a first valve 4, and roughly pumping a cold trap coil pipe chamber 2 by using a pre-stage pumping system 1; then, the second valve 6 is opened to communicate the cold trap coil chamber 2 with the coating process chamber 8, and the cold trap coil chamber 2 is pumped to high vacuum through a vacuum pumping system of the coating process chamber 8.
The inner wall of the cold trap coil chamber 2 is uniformly provided with an insulating layer 22, and the insulating layer 22 is made of polytetrafluoroethylene. The temperature in the cold trap coil cavity 2 is prevented from being too low, and the tightness of the cold trap coil cavity 2 and other parts of connecting pipelines and valves is prevented from being reduced.
The pre-stage pumping system 1 comprises a progressive cavity pump 11, a fourth valve 13, a roots pump 12 and a fifth valve 14 connected in series. The cold trap coil chamber 2 is rough pumped by a pre-pumping system 1.
The first valve 4, the second valve 6, the third valve 5, the fourth valve 13 and the fifth valve 14 are selected from one of an angle valve and a butterfly valve, and the valves are selected to function as valves according to the diameter of a pipeline and cost considerations.
The width of the section of the cold trap coil pipe chamber 2 is 400-1200 mm, and the height is 300-1000 mm; the length of the cold trap coil pipe cavity 2 is 1500-5000 mm; the cold trap coil 10 is a copper pipe, and the diameter is 8-16 mm. Because the arrangement mode enables the cold trap coil pipe chamber 2 to be arranged outside the coating process chamber 8 and does not occupy the space of the coating process chamber 8, the length of the cold trap coil pipe chamber 2 can be set according to requirements, and the cold trap coil pipe 10 and the cold trap coil pipe chamber 2 with different lengths can be selected according to the requirements of production processes and vacuum degrees of different coated glass production lines.
The coating process chamber 8 is provided with at least one gas isolation chamber 7, and the gas isolation chamber 7 is used for gas isolation among different process chambers, so that the quality of coating production is ensured.
Example 2
The embodiment provides a novel continuous coating line and a working method thereof, the novel continuous coating line adopts the arrangement mode of the embodiment 1, the working method comprises at least one cycle, and the cycle comprises the following steps:
step one, opening a first valve 4, and pre-pumping a cold trap coil pipe chamber 2 by using a pre-pumping system 1;
step two, when the internal vacuum degree of the cold trap coil cavity 2 reaches 5Pa, opening a second valve 6 to communicate the cold trap coil cavity 2 with a coating process chamber 8, and performing high-vacuum air extraction on the cold trap coil cavity 2 by using a vacuum-pumping system in the coating process chamber 8 to ensure that the cold trap coil cavity 2 is vacuumized;
step three, the cold trap 3 is started to refrigerate the cold trap coil pipe 10, the cold trap coil pipe 10 in the cold trap coil pipe cavity 2 efficiently adsorbs water vapor, and the background vacuum of the coating process chamber 8 is rapidly reduced;
and step four, when more water vapor is adsorbed on the cold trap coil 10 and more frost is formed, closing the first valve 4 and the second valve 6, opening the third valve 5, breaking the cavity 2 of the cold trap coil, adjusting the cold trap 3 to a heating working mode, and opening the heating fixing device 21 to defrost the cold trap coil 10 at a high temperature.
The embodiments of the present invention have been described in detail, but the embodiments are merely examples, and the present invention is not limited to the embodiments described above. Any equivalent modifications and substitutions to those skilled in the art are also within the scope of the present invention. Accordingly, equivalent changes and modifications made without departing from the spirit and scope of the present invention should be covered by the present invention.
Claims (10)
1. A novel arrangement mode of vacuum cold traps of a continuous coating line is characterized in that a cold trap system is arranged outside a coating process chamber (8) and is communicated with the coating process chamber (8) through a pipeline;
the cold trap system comprises a cold trap (3) and a cold trap coil (10) connected with the cold trap (3); fixing the cold trap coil (10) in a cold trap coil chamber (2) through a heating fixing device (21); a composite vacuum gauge (9) is arranged on the cold trap coil pipe chamber (2) and used for detecting the vacuum degree of the cold trap coil pipe chamber (2);
one end of the cold trap coil pipe chamber (2) is connected to the coating process chamber (8), and the other end is connected to a pre-pumping system (1);
a first valve (4) and a second valve (6) are respectively arranged on a pipeline connecting the cold trap coil chamber (2) and the pre-stage pumping system (1) and a pipeline connecting the cold trap coil chamber (2) and the coating process chamber (8);
and a third valve (5) is arranged on a pipeline connecting the cold trap coil chamber (2) with the outside atmosphere.
2. An arrangement according to claim 1, characterized in that an insulation layer (22) is provided evenly on the inner wall of the cold trap coil chamber (2).
3. An arrangement according to claim 2, characterised in that the material of the insulation layer (22) is polytetrafluoroethylene.
4. An arrangement according to claim 1, wherein the pre-stage pumping system (1) comprises a progressive connection of a screw pump (11), a fourth valve (13), a roots pump (12) and a fifth valve (14).
5. An arrangement according to claim 4, wherein the first valve (4), second valve (6), third valve (5), fourth valve (13) and fifth valve (14) are selected from one of an angle valve and a butterfly valve.
6. The arrangement according to claim 1, wherein the cold trap coil chamber (2) has a cross-section of 400-1200 mm wide and 300-1000 mm high; the length of the cold trap coil pipe cavity (2) is 1500-5000 mm.
7. An arrangement according to claim 1, wherein the cold trap coil (10) is a copper tube with a diameter of 8-16 mm.
8. An arrangement according to claim 1, characterized in that at least one gas isolation chamber (7) is provided on the coating process chamber (8).
9. A novel continuous coating line is characterized in that the vacuum coating line adopts the arrangement mode as claimed in any one of claims 1 to 8.
10. The working method of the novel continuous coating line according to claim 9, characterized by comprising the following steps:
step one, opening the first valve (4), and pre-pumping a cold trap coil pipe chamber (2) by using the pre-pumping system (1);
step two, when the internal vacuum degree of the cold trap coil cavity (2) reaches 5Pa, opening a second valve (6) to communicate the cold trap coil cavity (2) with the coating process chamber (8), and performing high-vacuum air extraction on the cold trap coil cavity (2) by using a vacuum-pumping system in the coating process chamber (8) to ensure that the cold trap coil cavity (2) is vacuumized;
step three, starting a cold trap (3) to refrigerate a cold trap coil (10), efficiently adsorbing water vapor by the cold trap coil (10) in a cold trap coil cavity (2), and rapidly reducing background vacuum of a coating process chamber (8);
and step four, when more water vapor is adsorbed on the cold trap coil (10) and more frost is formed, closing the first valve (4) and the second valve (6), opening the third valve (5), breaking the cavity (2) of the cold trap coil, adjusting the cold trap (3) to a heating working mode, and opening the heating fixing device (21) to defrost the cold trap coil (10) at a high temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011299797.1A CN112481599A (en) | 2020-11-18 | 2020-11-18 | Novel arrangement mode and working method of vacuum cold trap of continuous coating line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011299797.1A CN112481599A (en) | 2020-11-18 | 2020-11-18 | Novel arrangement mode and working method of vacuum cold trap of continuous coating line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112481599A true CN112481599A (en) | 2021-03-12 |
Family
ID=74931827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011299797.1A Pending CN112481599A (en) | 2020-11-18 | 2020-11-18 | Novel arrangement mode and working method of vacuum cold trap of continuous coating line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112481599A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115466936A (en) * | 2022-09-13 | 2022-12-13 | 安徽其芒光电科技有限公司 | Vacuum-pumping mechanism for vacuum coating equipment and vacuum coating equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006007149A (en) * | 2004-06-29 | 2006-01-12 | Shin Meiwa Ind Co Ltd | Cold trap for vacuum film forming apparatus and exhausting system for vacuum film forming apparatus |
| CN101059302A (en) * | 2006-04-21 | 2007-10-24 | 北美冻干技术股份公司 | Freeze-dryer water-trapping system |
| CN206270270U (en) * | 2016-06-28 | 2017-06-20 | 苏州阳屹沃尔奇检测技术有限公司 | A kind of cone calorimetry cold-trap |
| CN108465262A (en) * | 2018-03-02 | 2018-08-31 | 广州协义自动化科技有限公司 | A kind of electrically heated defrosting cold-trap |
| CN210134160U (en) * | 2019-05-30 | 2020-03-10 | 光驰科技(上海)有限公司 | Water vapor pumping device of continuous sputtering coating equipment |
-
2020
- 2020-11-18 CN CN202011299797.1A patent/CN112481599A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006007149A (en) * | 2004-06-29 | 2006-01-12 | Shin Meiwa Ind Co Ltd | Cold trap for vacuum film forming apparatus and exhausting system for vacuum film forming apparatus |
| CN101059302A (en) * | 2006-04-21 | 2007-10-24 | 北美冻干技术股份公司 | Freeze-dryer water-trapping system |
| CN206270270U (en) * | 2016-06-28 | 2017-06-20 | 苏州阳屹沃尔奇检测技术有限公司 | A kind of cone calorimetry cold-trap |
| CN108465262A (en) * | 2018-03-02 | 2018-08-31 | 广州协义自动化科技有限公司 | A kind of electrically heated defrosting cold-trap |
| CN210134160U (en) * | 2019-05-30 | 2020-03-10 | 光驰科技(上海)有限公司 | Water vapor pumping device of continuous sputtering coating equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115466936A (en) * | 2022-09-13 | 2022-12-13 | 安徽其芒光电科技有限公司 | Vacuum-pumping mechanism for vacuum coating equipment and vacuum coating equipment |
| CN115466936B (en) * | 2022-09-13 | 2023-04-18 | 安徽其芒光电科技有限公司 | Vacuum coating equipment and vacuum coating mechanism for same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2016303866B2 (en) | Vacuum adiabatic body and refrigerator | |
| CN115014036B (en) | Vacuum heat insulator and refrigerator | |
| US6094922A (en) | Vacuum-insulated refrigerant line for allowing a vaccum chamber system with water-vapor cryocoil compressor to be locatable outside cleanroom | |
| CN112481599A (en) | Novel arrangement mode and working method of vacuum cold trap of continuous coating line | |
| JP2015525190A (en) | Vacuum insulating glass (VIG) window unit with reduced seal height variation and method for manufacturing the same | |
| KR20140129552A (en) | Edge-sealing method and vacuum exhauster of vacuum insulation glass for sustainable use | |
| US20100011784A1 (en) | Cryopump louver extension | |
| CN111962037B (en) | Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof | |
| CN102072363A (en) | Multi-layer single vacuum compound heat-insulation pipe | |
| CN210134160U (en) | Water vapor pumping device of continuous sputtering coating equipment | |
| CN102278570A (en) | High vacuum packaging device of vacuum insulation panel | |
| CN219951193U (en) | Vacuum coating equipment | |
| CN110172672A (en) | The vacuum system and its working method of OLED evaporated device | |
| CN115388606B (en) | Vacuum insulator and refrigerator | |
| US20090155114A1 (en) | Compressor structure for a refrigeration system | |
| CN102797943B (en) | Vacuumizing technology for vacuum low-temperature thermal insulation pipeline | |
| CN108943915B (en) | Vacuum heat insulation plate, refrigerator and pretreatment method of melamine foam layer | |
| CN1573200A (en) | Baking method | |
| JP7012002B2 (en) | Device manufacturing equipment and device manufacturing system | |
| CN210620921U (en) | Vacuum system of OLED evaporation equipment | |
| CN219930231U (en) | Vacuum coating equipment for improving vacuum pipeline | |
| CN111829250A (en) | Box structure with vacuum heat-insulating layer and refrigerator | |
| CN111971516A (en) | Vacuum insulation body and refrigerator | |
| CN111936810A (en) | Vacuum insulator and refrigerator | |
| CN218432817U (en) | Vacuum pumping device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210312 |
|
| RJ01 | Rejection of invention patent application after publication |