CN112461126B - Measuring system and method of double-reading head absolute grating ruler and related equipment - Google Patents

Measuring system and method of double-reading head absolute grating ruler and related equipment Download PDF

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CN112461126B
CN112461126B CN202011222872.4A CN202011222872A CN112461126B CN 112461126 B CN112461126 B CN 112461126B CN 202011222872 A CN202011222872 A CN 202011222872A CN 112461126 B CN112461126 B CN 112461126B
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position information
measurement
reading head
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CN112461126A (en
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王晗
黎家耀
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Guangdong University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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Abstract

The application discloses measurement system, method and relevant equipment of a double-reading head absolute grating ruler, wherein the system comprises: the device comprises a double-reading-head module, a grating scale to be measured, a reference scale, a measurement operation module and an upper computer; the double-reading-head module is used for receiving the measurement value of the double reading head; the measurement operation module is used for calculating first position information of the reference scale or second position information of the grating scale to be measured according to the measured value and sending the first position information or the second position information to the upper computer; the upper computer is used for receiving the first position information and the second position information and calibrating the second position information according to the first position information. According to the system, the reference scale is arranged, the measurement function is calibrated by using a method of carrying out algorithm fitting calibration on the upper computer before measurement, the measurement precision of the double-reading-head is improved, the problem of large error when the large-length absolute grating scale is used for measurement is solved, and the effect of reducing the manufacturing cost and obtaining high-precision data is achieved.

Description

Measuring system and method of double-reading head absolute grating ruler and related equipment
Technical Field
The present application relates to the field of grating ruler technology, and in particular, to a system and a method for measuring a dual-reading head absolute grating ruler, and a related device.
Background
With the development of manufacturing industry, the requirements on the precision of mechanical motion in the manufacturing industry are more and more strict. However, the grating ruler is a core component about the precision of mechanical motion, and the purpose of ensuring the precision of mechanical motion within a required range is achieved by measuring mechanical translational motion parameters and feeding relevant information back to a control system. The grating ruler can be divided into an incremental type and an absolute type according to the output form of the signal code. The position information output by the incremental grating ruler and the position information output by the previous step have exact functional relation; and the position information output by the absolute grating ruler has an exact functional relation with the preset mechanical zero point. At present, many absolute grating rulers are used, angle information is usually carved in a code form by adopting a binary code coding mode, the absolute grating rulers consist of ruled lines arranged according to a certain rule, each corresponding position is provided with a unique binary system or other binary codes, therefore, different digital codes can be output at different positions, and the position codes output after processing are single-value functions of displacement. Compared with the incremental grating ruler, the absolute grating ruler has the advantages of fixed zero point, output code which is a single-value function of displacement, strong anti-interference capability, no loss of position information after power failure, no need of recalibration during restarting, no accumulated error and the like. The absolute grating ruler has the defects that the manufacturing process is complex, miniaturization is not easy to realize, and certain errors are caused by splicing gratings when large-length measurement is carried out. When the large-length absolute grating ruler realized by splicing is used for measurement, certain errors which cannot be eliminated are caused at the splicing opening, the errors are accumulated, errors can be accumulated every time when the absolute grating ruler passes through one splicing opening, and the requirement of precision machining is difficult to achieve.
Disclosure of Invention
The application aims to provide a measuring system and method of a double-reading-head absolute grating ruler and related equipment, and solves the problem that when the long-length absolute grating ruler is used for measurement, the error is large.
In view of the above, a first aspect of the present application provides a measurement system of a dual-reading head absolute grating ruler, including: the device comprises a first reading head module, a second reading head module, a grating scale to be measured, a reference scale, a measurement operation module and an upper computer;
the first reading head module is used for receiving the measurement value of the first reading head;
the second read head module is used for receiving the measurement value of the second read head;
the measurement operation module is used for calculating first position information of the reference scale or second position information of the grating scale to be measured according to the measured value and sending the first position information or the second position information to the upper computer;
and the upper computer is used for receiving the first position information and the second position information and calibrating the second position information according to the first position information.
Further, the method also comprises the following steps: and the control module is used for responding to the mode switching instruction of the upper computer and sending the replacement information of the replacement reference scale or the grating scale to be detected.
Further, the method also comprises the following steps: and the transmission module is used for realizing data transmission among the units and/or the modules.
Further, the transmission module is specifically a USB transmission module.
The second aspect of the present application provides a method for measuring a dual-reading head absolute grating scale, which is characterized in that the method is applied to the measurement system of the dual-reading head absolute grating scale described in the first aspect, and the method is executed by an upper computer, and includes the steps of:
the calibration step comprises:
receiving first position information and standard position information of a reference ruler;
fitting the first position information and the standard position information;
obtaining a functional relation between the first position information and the standard position information according to a fitting result;
the measuring step includes:
receiving second position information;
and calibrating the second position information according to the functional relation to obtain the actual position information of the grating ruler to be measured.
A third aspect of the present application provides a measurement apparatus for a dual-reading head absolute grating scale, where the apparatus includes a processor and a memory:
the memory is used for storing program codes and transmitting the program codes to the processor;
the processor is configured to execute the steps of the measurement method of the dual-reading-head absolute grating ruler according to the second aspect.
A fourth aspect of the present application provides a computer-readable storage medium, which is used for storing program codes, where the program codes are used for executing the measurement method of the dual-reading-head absolute grating ruler according to the second aspect.
A fifth aspect of the present application provides a computer program product including instructions, which when run on a computer, causes the computer to execute the measurement method of the dual-reading-head absolute grating ruler according to the second aspect.
Compared with the prior art, the embodiment of the application has the advantages that:
in an embodiment of the present application, a measurement system for a dual-reading head absolute grating scale is provided, including: the device comprises a first reading head module, a second reading head module, a grating scale to be measured, a reference scale, a measurement operation module and an upper computer; the first reading head module is used for receiving the measurement value of the first reading head; the second reading head module is used for receiving the measurement value of the second reading head; the measurement operation module is used for calculating first position information of the reference scale or second position information of the grating scale to be measured according to the measured value and sending the first position information or the second position information to the upper computer; the upper computer is used for receiving the first position information and the second position information and calibrating the second position information according to the first position information.
The measuring system of the double-reading-head absolute grating ruler provided by the embodiment of the application calibrates the measuring function by setting the reference ruler and utilizing the method of carrying out algorithm fitting calibration on the upper computer before measurement, improves the measuring precision of the double-reading-head measurement, solves the problem of larger error when the large-length absolute grating ruler is used for measurement, and achieves the effect of reducing the manufacturing cost and acquiring high-precision data.
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In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic system diagram of a measurement system of a dual-reading head absolute grating scale according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a dual-reading head measurement in an embodiment of the present application;
fig. 3 is a flowchart of a method for measuring a dual-reading head absolute grating scale according to an embodiment of the present disclosure.
Detailed Description
The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The application provides a measurement system of a double-reading-head absolute grating ruler in a first aspect.
Referring to fig. 1, fig. 1 is a schematic system diagram of a measurement system of a dual-reading head absolute grating ruler according to an embodiment of the present disclosure, including:
the device comprises a first reading head module, a second reading head module, a grating scale to be measured, a reference scale, a measurement operation module and an upper computer; the first reading head module is used for receiving the measurement value input by the first reading head; the second reading head module is used for receiving the measured value input by the second reading head. The reference scale module is used for receiving standard position information input by the reference scale. It can be understood that the grating scale to be measured and the reference scale used by the system are simultaneously installed on the measuring platform, displacement measurement is carried out on the same displacement platform, and a large number of standard position information sampling readings (sampling 500-1000 points) are carried out within the range of the reference scale.
And the measurement operation module is used for calculating first position information of the reference scale or second position information of the grating scale to be measured according to the measured value and sending the first position information or the second position information to the upper computer.
It should be noted that the measurement principle of the dual reading head is shown in fig. 2:
the measurement system reads from left to right, when first reading head is not in the splice mouth department of big length grating, uses the measured value of first reading head to calculate, and the expression of output calculated value is:
Figure BDA0002762676850000041
wherein X 1 As measured by a first reading head, D 12 For a fixed spacing of two reading heads, K i The difference of the readings of the two reading heads when crossing the ith grating scale is the difference of the readings output by the two reading heads when the two reading heads are adjacent to the ith grating scale.
When the first reading head measures the splicing welding position of the long grating, the output measured value is 0, the reading head is selected and switched at the moment, and the reading X of the reading head 2 is selected 2 Calculating, and outputting an expression of a calculated value as follows:
Figure BDA0002762676850000042
the error of the welded junction at the splicing part can be eliminated by the calculation of the principle, and the high-precision measurement of the large-length absolute grating ruler is realized.
The upper computer is used for receiving the first position information and the second position information and calibrating the second position information according to the first position information.
It can be understood that in the calibration mode, the first position information obtained by collecting and calculating the double reading heads and the standard position information obtained by the reference scale are collected and transmitted to the upper computer through the hardware part of the system, the two groups of data are fitted by using a related algorithm, the functional relation between the two groups of data is concluded, and the functional relation is stored and recorded in the upper computer to complete the calibration of the system. And in the measurement mode, unloading the reference scale, measuring the grating scale to be measured by using the double-reading head, transmitting second position information obtained by collecting and calculating through the system hardware part to an upper computer, and calculating according to a functional relation obtained in the initial calibration mode to obtain a final measurement result.
The measuring system of the double-reading-head absolute grating ruler provided by the embodiment of the application calibrates the measuring function by setting the reference ruler and utilizing the method of carrying out algorithm fitting calibration on the upper computer before measurement, improves the measuring precision of the double-reading-head measurement, solves the problem of larger error when the large-length absolute grating ruler is used for measurement, and achieves the effect of reducing the manufacturing cost and acquiring high-precision data.
On the basis of the above embodiment, further, the method further includes: and the control module is used for responding to the mode switching instruction of the upper computer and sending the replacement information of the replacement reference scale or the grating scale to be detected. It should be noted that the control module is configured to receive an instruction for performing a measurement mode or a calibration mode sent by the upper computer, and send replacement information for replacing the reference scale or the grating scale to be measured, so that a user can assemble and disassemble the reference scale or the grating scale to be measured according to the replacement information.
Further, the method also comprises the following steps: and the transmission module is used for realizing data transmission among the units and/or the modules. The transmission module is specifically a USB transmission module, that is, the interface 1, the interface 2, and the interface 3 in fig. 2 are all USB interfaces.
Referring to fig. 3, a second aspect of the present application provides a measurement method for a dual-reading head absolute grating ruler, which is applied to the measurement system of the dual-reading head absolute grating ruler of the first aspect, and executed by an upper computer, and includes a calibration step 10 and a measurement step 20:
the calibration step 10 comprises:
101. and receiving the first position information and the standard position information of the reference ruler.
First, first position information of a double-reading-head measuring reference ruler and calculated by the double-reading-head measuring reference ruler and standard position information of the reference ruler need to be received.
102. Fitting the first position information and the standard position information.
Two sets of data were fitted using a correlation algorithm.
103. And obtaining a functional relation between the first position information and the standard position information according to the fitting result.
And according to the fitting result, inducing to obtain a functional relation between the two groups of data, and storing and recording the functional relation in the upper computer to finish the calibration of the system.
The measuring step 20 includes:
201. second location information is received.
And after the measurement mode is converted, unloading the reference scale, measuring by using the double-reading head, and measuring and calculating by using the double-reading head to obtain second position information.
202. And calibrating the second position information according to the functional relation to obtain the actual position information of the grating ruler to be measured.
And calculating through the function mode obtained in the calibration step to obtain a final measurement result.
A third aspect of the present application provides a measurement apparatus for a dual-reading head absolute grating scale, where the apparatus includes a processor and a memory:
the memory is used for storing program codes and transmitting the program codes to the processor;
the processor is configured to execute the steps of the measurement method of the dual-reading-head absolute grating ruler according to the second aspect.
A fourth aspect of the present application provides a computer-readable storage medium, which is used for storing program codes, where the program codes are used for executing the measurement method of the dual-reading-head absolute grating ruler according to the second aspect.
A fifth aspect of the present application provides a computer program product including instructions, which when run on a computer, causes the computer to execute the measurement method of the dual-reading-head absolute grating ruler described in the second aspect.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit may be implemented in the form of hardware, or may also be implemented in the form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application, which are essential or part of the technical solutions contributing to the prior art, or all or part of the technical solutions, may be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in the embodiments of the present application. And the aforementioned storage medium includes: a U disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.
The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.

Claims (7)

1. A measurement system of a double-reading head absolute grating ruler is characterized by comprising: the device comprises a first reading head module, a second reading head module, a grating scale to be measured, a reference scale, a measurement operation module and an upper computer;
the first reading head module is used for receiving the measurement value of the first reading head;
the second read head module is used for receiving the measurement value of the second read head;
the measurement operation module is used for calculating first position information of the reference scale and second position information of the to-be-measured grating scale according to the measured value and sending the first position information and the second position information to the upper computer;
the upper computer is used for receiving the first position information, the second position information and standard position information of a reference scale and fitting the first position information and the standard position information; obtaining a functional relation between the first position information and the standard position information according to a fitting result; and calibrating the second position information according to the functional relation to obtain the actual position information of the grating ruler to be measured.
2. The measurement system of the dual-reading head absolute grating scale of claim 1, further comprising: and the control module is used for responding to the mode switching instruction of the upper computer and sending the replacement information of the replacement reference scale or the grating scale to be detected.
3. The measurement system of the dual-reading head absolute grating scale of claim 1, further comprising: and the transmission module is used for realizing data transmission between the upper computer and the module.
4. The system of claim 3, wherein the transmission module is a USB transmission module.
5. A measurement method of a dual-reading head absolute grating ruler is characterized in that the measurement method is applied to the measurement system of the dual-reading head absolute grating ruler of any one of claims 1 to 4, is executed by an upper computer, and comprises a calibration step and a measurement step:
the calibration step comprises:
receiving first position information and standard position information of a reference ruler;
fitting the first position information and the standard position information;
obtaining a functional relation between the first position information and the standard position information according to a fitting result;
the measuring step includes:
receiving second position information;
and calibrating the second position information according to the functional relation to obtain the actual position information of the grating ruler to be measured.
6. A measuring device of a dual-reading head absolute grating ruler is characterized by comprising a processor and a memory:
the memory is used for storing program codes and transmitting the program codes to the processor;
the processor is configured to execute the measurement method of the dual-reading head absolute grating scale according to claim 5 according to instructions in the program code.
7. A computer-readable storage medium for storing a program code for executing the measurement method of the dual-reading-head absolute grating scale according to claim 5.
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