CN112444339B - Differential pressure sensor test fixture and differential pressure sensor test system - Google Patents
Differential pressure sensor test fixture and differential pressure sensor test system Download PDFInfo
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- CN112444339B CN112444339B CN202011243232.1A CN202011243232A CN112444339B CN 112444339 B CN112444339 B CN 112444339B CN 202011243232 A CN202011243232 A CN 202011243232A CN 112444339 B CN112444339 B CN 112444339B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
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- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a differential pressure sensor testing tool and a differential pressure sensor testing system. The differential pressure sensor testing tool comprises a shell and a circuit board, wherein the shell is provided with an accommodating cavity, the circuit board is arranged in the accommodating cavity and divides the accommodating cavity into two sub-accommodating cavities, the circuit board is provided with a communication hole for communicating the two sub-accommodating cavities, and the differential pressure sensor is fixed on the circuit board corresponding to the communication hole and is electrically connected to the circuit board; the shell is provided with a vent hole and a circulation hole, the vent hole is communicated with one sub-accommodating cavity, and the circulation hole is communicated with the other sub-accommodating cavity. The technical scheme of the invention can improve the universality of the test tool so as to be simultaneously suitable for differential pressure sensors with different packaging structures.
Description
Technical Field
The invention relates to the technical field of differential pressure sensors, in particular to a differential pressure sensor testing tool and a differential pressure sensor testing system.
Background
The differential pressure sensor is generally an mems (micro electro Mechanical systems) differential pressure sensor, which is a sensor that measures a difference between two pressures by using a micro-nano processing chip, and is generally used for measuring a pressure difference between front and rear sides of a certain device or component. Because differential pressure sensor has the defect that sensitivity is big, fragile, need to detect it in order to guarantee its normal use after leaving the factory, in the correlation technique, generally adopt test fixture to test differential pressure sensor's performance. The MEMS differential pressure sensor commonly used at present has two packaging forms of a shell packaging structure and a plastic packaging structure, and differential pressure sensors in different packaging forms need test tools in different structures, so that the test tools are diversified, the universality of the test tools is poor, and the waste of test resources is caused.
Disclosure of Invention
The invention mainly aims to provide a differential pressure sensor testing tool and a differential pressure sensor testing system, aiming at improving the universality of the testing tool and simultaneously being suitable for differential pressure sensors with different packaging structures.
In order to achieve the above object, the differential pressure sensor testing tool provided by the present invention is used for testing a differential pressure sensor, and comprises: the shell is provided with an accommodating cavity; the circuit board is arranged in the accommodating cavity and divides the accommodating cavity into two sub-accommodating cavities, a communication hole for communicating the two sub-accommodating cavities is formed in the circuit board, and the differential pressure sensor is fixed on the circuit board corresponding to the communication hole and is electrically connected to the circuit board; the shell is provided with a vent hole and a circulation hole, the vent hole is communicated with one of the sub-accommodating cavities, and the circulation hole is communicated with the other sub-accommodating cavity.
In an optional embodiment, the communication hole is opened corresponding to the flow hole.
In an optional embodiment, the circuit board is detachably and fixedly connected to the inner wall of the housing, and a first sealing member is disposed between the circuit board and the inner wall of the housing and used for sealing a gap between the circuit board and the inner wall of the housing.
In an optional embodiment, the housing includes a main body shell and a cover body, the cover body is detachably covered on the main body shell, and encloses with the main body shell to form the accommodating cavity; the circuit board is arranged in the main body shell to divide the containing cavity into two sub-containing cavities, the vent hole is formed in the cover body, and the circulation hole is formed in the bottom of the main body shell.
In an optional embodiment, a second sealing element is arranged at a covering position of the cover body and the main body shell, and is used for sealing a gap between the cover body and the main body shell.
In an optional embodiment, the differential pressure sensor test tool further comprises an air pipe, wherein the air pipe is inserted into the vent hole, is communicated with the air source, and is used for adjusting the air pressure in the sub-containing cavity communicated with the vent hole.
In an optional embodiment, the differential pressure sensor testing tool further includes an electrical connector, the electrical connector is disposed on the housing, and at least a portion of the electrical connector extends into one of the sub-accommodating cavities, an extending portion of the electrical connector is electrically connected to the circuit board, and an exposed end of the electrical connector is electrically connected to the measuring instrument, so as to test electrical properties of the differential pressure sensor.
In an optional embodiment, the differential pressure sensor testing tool further comprises a temperature sensor, wherein the temperature sensor is arranged on the shell, at least partially extends into the sub-accommodating cavity communicated with the vent hole, and is used for detecting the temperature of the differential pressure sensor.
The invention also provides a differential pressure sensor testing system, comprising: differential pressure sensor and differential pressure sensor test fixture, differential pressure sensor test fixture includes: the shell is provided with an accommodating cavity; the circuit board is arranged in the accommodating cavity and divides the accommodating cavity into two sub-accommodating cavities, a communication hole for communicating the two sub-accommodating cavities is formed in the circuit board, and the differential pressure sensor is fixed on the circuit board corresponding to the communication hole and is electrically connected to the circuit board; the shell is provided with a vent hole and a circulation hole, the vent hole is communicated with one sub-accommodating cavity, and the circulation hole is communicated with the other sub-accommodating cavity; the differential pressure sensor is fixed on a circuit board of the differential pressure sensor testing tool and is electrically connected to the circuit board.
In an optional embodiment, the differential pressure sensor is packaged in a housing, and the differential pressure sensor is fixed on the surface of the circuit board and covers the communication hole.
In an optional embodiment, the differential pressure sensor is packaged in a plastic package mode, and the differential pressure sensor is fixedly inserted into the communication hole.
According to the technical scheme, the differential pressure sensor testing tool comprises a shell and a circuit board, wherein the circuit board is arranged in an accommodating cavity of the shell and divides the accommodating cavity into two sub-accommodating cavities, the circuit board is provided with communication holes communicated with the two sub-accommodating cavities, the shell is provided with vent holes and circulation holes, the vent holes are communicated with one sub-accommodating cavity, and the circulation holes are communicated with the other sub-accommodating cavity. When adopting this differential pressure sensor test fixture to the differential pressure sensor test, correspond the intercommunicating pore with differential pressure sensor and be fixed in the circuit board to electric connection is in the circuit board, lets in the gas of certain pressure to sub-holding intracavity through the venthole, and at this moment, because the gas in another sub-holding chamber passes through the venthole and circulates with external air phase, differential pressure sensor can measure the pressure differential between two sub-holding chambeies like this, and through the atmospheric pressure in adjustment and the communicating sub-holding intracavity of venthole, alright realize the test to the differential pressure sensor degree of accuracy. Because the differential pressure sensor is directly fixed on the circuit board, the differential pressure sensor can be applied to differential pressure sensors in different packaging forms, so that the universality of the testing tool is improved, and the waste of testing resources is avoided. Moreover, the differential pressure sensor testing tool is simple in structure and low in manufacturing cost.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic cross-sectional view of an embodiment of a differential pressure sensor test system of the present invention;
FIG. 2 is a schematic cross-sectional view of another embodiment of a differential pressure sensor testing system of the present invention;
FIG. 3 is a schematic cross-sectional view of an embodiment of a differential pressure sensor testing tool of the present invention;
fig. 4 is a schematic structural view of a view angle of the differential pressure sensor testing tool of the present invention.
The reference numbers illustrate:
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a differential pressure sensor testing tool 100 which is used for testing a differential pressure sensor 200, wherein the differential pressure sensor 200 is an MEMS differential pressure sensor 200, the packaging form of the MEMS differential pressure sensor 200 comprises a shell packaging form and a plastic packaging form, wherein the shell packaging structure and the plastic packaging structure form are both the existing structures, the specific structure arrangement of the shell packaging structure and the plastic packaging structure form can refer to the existing structures, and the details are not repeated.
Referring to fig. 1 to 3, in an embodiment of the differential pressure sensor testing tool 100 of the present invention, the differential pressure sensor testing tool 100 includes: the shell 10, the shell 10 has holding cavities; the circuit board 20 is arranged in the accommodating cavity and divides the accommodating cavity into two sub-accommodating cavities 10a, the circuit board 20 is provided with a communication hole 21 for communicating the two sub-accommodating cavities 10a, and the differential pressure sensor 200 is fixed on the circuit board 20 corresponding to the communication hole 21 and is electrically connected to the circuit board 20; the housing 10 is provided with a vent hole and a circulation hole 131, the vent hole is communicated with one sub-accommodating cavity, and the circulation hole 131 is communicated with the other sub-accommodating cavity 10 a.
Specifically, the material of shell 10 can select for metal shell 10, and sound construction is reliable, and its inside is formed with the holding chamber. The circuit board 20 is fixed on the inner wall of the accommodating cavity and divides the accommodating cavity into two sub-accommodating cavities 10a, and the fixing mode of the circuit board 20 can be a snap fixing mode, a screw fixing mode or other reasonable and effective fixing modes. The circuit board 20 is provided with a communication hole 21 penetrating through two surfaces of the circuit board, the communication hole 21 is communicated with the two sub-accommodating cavities 10a, the differential pressure sensor 200 is fixed on the circuit board 20 corresponding to the communication hole 21, that is, when the differential pressure sensor 200 is packaged in a shell, the shell is a metal shell 10, the differential pressure sensor 200 is welded on the circuit board 20 by adopting solder paste and covers the communication hole 21, and at the moment, an external pad of the differential pressure sensor 200 is electrically abutted to a welding point on the surface of the circuit board 20, so that the electrical connection between the differential pressure sensor 200 and the circuit board 20 can be realized. When the differential pressure sensor 200 is packaged in a plastic package structure, the differential pressure sensor 200 is fixed to the hole wall of the communication hole 21 by solder paste in an inserting manner, and at this time, the pins of the differential pressure sensor 200 are electrically connected to the solder points on the surface of the circuit board 20, so that the differential pressure sensor 200 is electrically connected to the circuit board 20. Further, the housing 10 is provided with a vent hole and a circulation hole 131, the vent hole is communicated with one sub-accommodation cavity 10a and used for introducing gas into the sub-accommodation cavity 10a to adjust the internal air pressure thereof, and the circulation hole 131 is communicated with the other sub-accommodation cavity 10a and is communicated with the external air to sense the external air pressure, so that the differential pressure sensor 200 can measure the pressure difference between the two sub-accommodation cavities 10a, and the accuracy of the differential pressure sensor 200 can be tested by adjusting the air pressure in the sub-accommodation cavity 10a communicated with the vent hole.
It can be understood that, according to the technical scheme of the present invention, the differential pressure sensor testing tool 100 includes a housing 10 and a circuit board 20, the circuit board 20 is disposed in an accommodating cavity of the housing 10 and divides the accommodating cavity into two sub-accommodating cavities 10a, the circuit board 20 is provided with a communication hole 21 communicating the two sub-accommodating cavities 10a, the housing 10 is provided with a vent hole and a circulation hole 131, the vent hole is communicated with one sub-accommodating cavity 10a, and the circulation hole 131 is communicated with the other sub-accommodating cavity 10 a. When the differential pressure sensor testing tool 100 is used for testing the differential pressure sensor 200, the differential pressure sensor 200 is fixed on the circuit board 20 corresponding to the communication hole 21 and is electrically connected to the circuit board 20, gas with a certain pressure is introduced into the sub accommodating cavity 10a through the vent hole, at the moment, the gas in the other sub accommodating cavity 10a flows with the outside air through the flow hole 131, so that the differential pressure sensor 200 can measure the pressure difference between the two sub accommodating cavities 10a, and the accuracy of the differential pressure sensor 200 can be tested by adjusting the air pressure in the sub accommodating cavity 10a communicated with the vent hole. Because the differential pressure sensor 200 is directly fixed on the circuit board 20, the differential pressure sensor 200 can be applied to differential pressure sensors 200 in different packaging forms, so that the universality of the testing tool is improved, and the waste of testing resources is avoided. Moreover, the differential pressure sensor testing tool 100 is simple in structure and low in manufacturing cost.
In an alternative embodiment, the communication hole 21 is opened corresponding to the flow hole 131. So set up, differential pressure sensor 200 can be comparatively sensitive and more accurately respond to ambient pressure to make differential pressure sensor 200's measuring result comparatively accurate, be favorable to the test to the differential pressure sensor 200 degree of accuracy.
In an alternative embodiment, the circuit board 20 is detachably and fixedly attached to the inner wall of the housing 10, and a first sealing member 60 is disposed between the circuit board 20 and the inner wall of the housing 10 for sealing a gap between the circuit board 20 and the inner wall of the housing 10.
Here, the first sealing element 60 may be a sealing ring, and is disposed between the inner wall of the housing 10 and the circuit board 20, so as to seal a gap between the inner wall of the housing 10 and the circuit board 20, so as to prevent gas in the two sub-receiving cavities 10a from flowing, thereby ensuring that a pressure difference value measured by the differential pressure sensor 200 is relatively accurate, and improving the test accuracy of the differential pressure sensor 200.
Referring to fig. 1 and 2, in an embodiment of the present invention, in order to facilitate the mounting operation of the circuit board 20, a step surface 132 is formed on an inner wall of the housing 10, the step surface 132 has a ring-shaped structure, and the circuit board 20 is fixed to the step surface 132 by screws, which is simple and effective.
Further, in order to secure the mounting stability of the circuit board 20, the stepped surface 132 is provided with a mounting groove (not labeled) in which the circuit board 20 is mounted and fixed to the bottom wall of the mounting groove by a screw.
Further, in order to ensure the mounting stability of the second sealing element 70, a positioning groove (not labeled) adapted to the second sealing ring is formed in the bottom wall of the mounting groove, and the second sealing element 70 is disposed in the positioning groove and abutted against the surface of the circuit board 20 to ensure the sealing property between the inner wall of the housing 10 and the circuit board 20.
Referring to fig. 1 and 2 again, in an embodiment of the present invention, the housing 10 includes a main body housing 13 and a cover 11, the cover 11 detachably covers the main body housing 10, and forms an accommodating cavity together with the main body housing 13; the circuit board 20 is disposed in the main body case 13 to divide the accommodating chamber into two sub-accommodating chambers 10a, the vent hole is opened in the cover 11, and the circulation hole 131 is opened in the bottom of the main body case 13.
Specifically, the housing 10 is a separate structure and includes a main body case 13 and a cover 11, and the cover 11 is substantially flat and covers the main body case 13, so that the circuit board 20 can be easily mounted and dismounted. Wherein the connection mode of main part shell 13 and lid 11 can be for buckle connection, screw connection or other reasonable and effectual connection mode, and the two encloses jointly after connecting and closes the holding chamber that has formed. The inner wall of the main body case 13 is formed with a stepped surface 132, and the circuit board 20 is fixedly mounted on the stepped surface 132, and the fixed mounting method may be screw fixing or snap fixing. The vent hole is opened in the cover 11 and communicated with the upper sub-receiving cavity 10a, and the vent hole 131 is opened in the bottom of the main body case 13 and communicated with the lower sub-receiving cavity 10a, so that the air pressure in the upper sub-receiving cavity 10a can be adjusted through the vent hole to test the accuracy of the differential pressure sensor 200.
With such a configuration, when the differential pressure sensor 200 needs to be tested, the differential pressure sensor 200 is fixed to the circuit board 20, then the differential pressure sensor 200 is mounted on the step surface 132 of the main body case 13, and finally the cover 11 and the main body case 13 are fixed to each other, so that the assembly operation can be completed, and then the test can be performed. After the test is completed, the cover 11 is removed, the circuit board 20 is then removed from the main body case 13 together with the differential pressure sensor 200, and finally the differential pressure sensor 200 is removed from the circuit board 20 for use.
Further, in an embodiment of the present invention, a second sealing member 70 is disposed at a covering position of the cover 11 and the main body housing 13, for sealing a gap between the cover 11 and the main body housing 13.
Here, the second sealing element 70 may be a sealing ring, and is disposed at a covering position of the cover body 11 and the main body casing 13 for sealing a gap therebetween, so as to ensure that the sub-receiving cavity 10a has good sealing performance, which can ensure that a pressure difference value measured by the differential pressure sensor 200 is accurate, thereby improving the testing accuracy of the differential pressure sensor 200.
Further, in order to ensure the installation stability and reliability of the second sealing element 70, an annular limiting groove (not labeled) is formed on the surface of the main body shell 13 facing the cover 11, the size of the annular limiting groove is matched with the size of the second sealing element 70, the second sealing element 70 is installed in the annular limiting groove and abuts against the cover 11, so that the sealing property between the cover 11 and the main body shell 13 can be effectively ensured, and the installation stability is good.
Referring to fig. 1 to 4, in an embodiment of the present invention, the differential pressure sensor testing tool 100 further includes an air tube 50, wherein the air tube 50 is inserted into the vent hole, and is communicated with an air source, for adjusting an air pressure in the sub-receiving cavity 10a communicated with the vent hole. Such an arrangement may facilitate the testing operation of differential pressure sensor 200.
Further, in an embodiment of the present invention, the differential pressure sensor testing tool 100 further includes an electrical connector 30, the electrical connector 30 is disposed on the outer shell 10 and at least partially extends into a sub-receiving cavity 10a, the extending portion of the electrical connector 30 is electrically connected to the circuit board 20, and the exposed end of the electrical connector 30 is used for electrically connecting to a measuring instrument to test the electrical performance of the differential pressure sensor 200.
Specifically, the cover 11 is provided with a mounting through hole, the electrical connector 30 is inserted into the mounting through hole, and at least a portion of the electrical connector 30 extends into the sub-receiving cavity 10a, the extending portion of the electrical connector 30 is electrically connected to the circuit board 20 through a wire, the exposed end of the electrical connector 30 is electrically connected to the measuring instrument through a wire, and the measuring instrument is a multimeter, and is used for testing electrical properties such as voltage, resistance and the like when the differential pressure sensor 200 works, and detecting whether the electrical properties meet the standard value. Of course, in other embodiments, the electrical connector 30 may be disposed at any position of the main body housing 13, and still be within the scope of the present invention.
Further, in an embodiment of the present invention, the differential pressure sensor testing tool 100 further includes a temperature sensor 40, wherein the temperature sensor 40 is disposed on the housing 10, and at least partially extends into the sub-accommodating cavity 10a communicated with the vent hole, and is configured to detect a temperature of the differential pressure sensor 200.
Specifically, the cover 11 is provided with a through hole communicating with the sub-receiving cavity 10a, and the temperature sensor 40 is inserted into the through hole, and at least partially extends into the sub-receiving cavity 10a communicating with the vent hole, so as to test the temperature of the differential pressure sensor 200 during operation, and detect whether the temperature meets the standard temperature range.
The invention also provides a differential pressure sensor testing system, which comprises a differential pressure sensor 200 and the differential pressure sensor testing tool 100, wherein the specific structure refers to the foregoing embodiment. Since all technical solutions of all the foregoing embodiments are adopted, at least all beneficial effects brought by the technical solutions of the foregoing embodiments are achieved, and no further description is given here.
Referring to fig. 1 and 2, the differential pressure sensor 200 is fixed to the circuit board 20 of the differential pressure sensor test tool 100 and electrically connected to the circuit board 20. The differential pressure sensor 200 is fixed on the circuit board 20 corresponding to the communication hole 21, and the fixing mode can be solder paste fixing, so that the differential pressure sensor can be firmly installed and the sealing performance can be ensured by adopting the fixing mode, and the accuracy of the differential pressure sensor 200 test is improved.
In an alternative embodiment, the differential pressure sensor 200 is packaged in the form of a housing 10, and the differential pressure sensor 200 is fixed on the surface of the circuit board 20 and covers the communication hole 21.
When the differential pressure sensor 200 is packaged as a shell, the shell is a metal shell 10, the differential pressure sensor 200 is soldered to the circuit board 20 by solder paste and covers the through hole 21, and at this time, the external pad of the differential pressure sensor 200 electrically abuts against the solder point on the surface of the circuit board 20, so that the differential pressure sensor 200 can be electrically connected to the circuit board 20. It should be noted that the differential pressure sensor 200 may be fixed to the surface of the circuit board 20 facing the cover plate, and may also be fixed to the surface of the circuit board 20 facing the flow hole 131, which is not limited herein and is within the protection scope of the present invention.
In an alternative embodiment, the differential pressure sensor 200 is packaged in a plastic package, and the differential pressure sensor 200 is inserted and fixed in the communication hole 21.
When the differential pressure sensor 200 is packaged in a plastic package structure, the differential pressure sensor 200 has a fixing portion, the fixing portion is substantially cylindrical, the fixing portion is inserted and fixed to the hole wall of the communication hole 21 through solder paste, and at this time, the pins at the outer edge of the differential pressure sensor 200 are electrically connected to the solder points on the surface of the circuit board 20, so that the differential pressure sensor 200 can be electrically connected to the circuit board 20. And a tin paste fixing mode is adopted, so that better sealing performance can be ensured.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings, or any other related technical fields, which are directly or indirectly applied to the present invention, are included in the scope of the present invention.
Claims (10)
1. The utility model provides a differential pressure sensor test fixture for test differential pressure sensor, its characterized in that includes:
the shell is provided with an accommodating cavity; and
the circuit board is arranged in the accommodating cavity and divides the accommodating cavity into two sub-accommodating cavities, a communication hole for communicating the two sub-accommodating cavities is formed in the circuit board, and the differential pressure sensor is fixed on the circuit board corresponding to the communication hole and is electrically connected to the circuit board;
the shell is provided with a vent hole and a circulation hole, the vent hole is communicated with one sub-accommodating cavity, and the circulation hole is communicated with the other sub-accommodating cavity;
the shell comprises a main body shell and a cover body, wherein the cover body is detachably covered on the main body shell and encloses with the main body shell to form the accommodating cavity;
the circuit board is arranged in the main body shell to divide the containing cavity into two sub-containing cavities, the vent hole is formed in the cover body, and the circulation hole is formed in the bottom of the main body shell.
2. The differential pressure sensor test tool of claim 1, wherein the communication holes are formed corresponding to the flow holes.
3. The differential pressure sensor test tool of claim 1, wherein the circuit board is removably and fixedly attached to the inner wall of the housing, and a first seal is disposed between the circuit board and the inner wall of the housing for sealing a gap between the circuit board and the inner wall of the housing.
4. The differential pressure sensor test tool of claim 1, wherein a second seal is disposed at a covering position of the cover body and the main body shell, and is used for sealing a gap between the cover body and the main body shell.
5. The differential pressure sensor test tool of claim 1, further comprising an air pipe inserted into the vent hole and communicated with an air source for adjusting air pressure in the sub-receiving cavity communicated with the vent hole.
6. The differential pressure sensor test tool of any one of claims 1 to 5, further comprising an electrical connector disposed on the housing and at least partially extending into one of the sub-receiving cavities, wherein the extending portion of the electrical connector is electrically connected to the circuit board, and the exposed end of the electrical connector is electrically connected to a measurement instrument for testing the electrical performance of the differential pressure sensor.
7. The differential pressure sensor testing tool according to any one of claims 1 to 5, further comprising a temperature sensor disposed in the housing and at least partially extending into a sub-receiving cavity communicating with the vent hole for detecting a temperature of the differential pressure sensor.
8. A differential pressure sensor testing system, comprising:
a differential pressure sensor; and
the differential pressure sensor test tool of any one of claims 1 to 7, wherein the differential pressure sensor is fixed to a circuit board of the differential pressure sensor test tool and electrically connected to the circuit board.
9. The differential pressure sensor testing system of claim 8, wherein the differential pressure sensor is encapsulated in a housing, the differential pressure sensor being secured to the surface of the circuit board and covering the communication hole.
10. The differential pressure sensor testing system of claim 8, wherein the differential pressure sensor is encapsulated in a plastic package, and the differential pressure sensor is inserted and fixed in the communication hole.
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| CN202011243232.1A CN112444339B (en) | 2020-11-09 | 2020-11-09 | Differential pressure sensor test fixture and differential pressure sensor test system |
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| CN202011243232.1A CN112444339B (en) | 2020-11-09 | 2020-11-09 | Differential pressure sensor test fixture and differential pressure sensor test system |
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| CN112444339B true CN112444339B (en) | 2022-06-21 |
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| CN113848002B (en) * | 2021-09-24 | 2023-10-03 | 青岛歌尔智能传感器有限公司 | Pressure sensor's test fixture, testing arrangement |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107036740A (en) * | 2017-04-14 | 2017-08-11 | 苏州敏芯微电子技术股份有限公司 | A kind of microsensor encapsulating structure and its manufacture craft |
| CN209623939U (en) * | 2019-04-25 | 2019-11-12 | 上海文襄汽车传感器有限公司 | A kind of pressure sensor |
| CN110631759A (en) * | 2019-09-29 | 2019-12-31 | 苏州敏芯微电子技术股份有限公司 | Differential pressure sensor packaging structure and electronic equipment |
| CN110954262A (en) * | 2019-12-04 | 2020-04-03 | 上海矽睿科技有限公司 | Water-resistant and oil-proof packaged differential pressure sensor |
| CN111533082A (en) * | 2020-05-28 | 2020-08-14 | 青岛歌尔智能传感器有限公司 | Packaging structure of micro-electro-mechanical system sensor, packaging method of packaging structure and electronic equipment |
| CN211425746U (en) * | 2019-12-13 | 2020-09-04 | 歌尔微电子有限公司 | Differential pressure sensor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8359927B2 (en) * | 2009-08-12 | 2013-01-29 | Freescale Semiconductor, Inc. | Molded differential PRT pressure sensor |
| US10203255B2 (en) * | 2016-08-25 | 2019-02-12 | Measurement Specialties, Inc. | Differential pressure sensor incorporating common mode error compensation |
| CN111362227A (en) * | 2018-12-25 | 2020-07-03 | 无锡华润矽科微电子有限公司 | MEMS sensor packaging structure |
-
2020
- 2020-11-09 CN CN202011243232.1A patent/CN112444339B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107036740A (en) * | 2017-04-14 | 2017-08-11 | 苏州敏芯微电子技术股份有限公司 | A kind of microsensor encapsulating structure and its manufacture craft |
| CN209623939U (en) * | 2019-04-25 | 2019-11-12 | 上海文襄汽车传感器有限公司 | A kind of pressure sensor |
| CN110631759A (en) * | 2019-09-29 | 2019-12-31 | 苏州敏芯微电子技术股份有限公司 | Differential pressure sensor packaging structure and electronic equipment |
| CN110954262A (en) * | 2019-12-04 | 2020-04-03 | 上海矽睿科技有限公司 | Water-resistant and oil-proof packaged differential pressure sensor |
| CN211425746U (en) * | 2019-12-13 | 2020-09-04 | 歌尔微电子有限公司 | Differential pressure sensor |
| CN111533082A (en) * | 2020-05-28 | 2020-08-14 | 青岛歌尔智能传感器有限公司 | Packaging structure of micro-electro-mechanical system sensor, packaging method of packaging structure and electronic equipment |
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