CN112435939A - Semiconductor degumming machine auxiliary device capable of preventing blade from dripping due to residual colloid - Google Patents
Semiconductor degumming machine auxiliary device capable of preventing blade from dripping due to residual colloid Download PDFInfo
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- CN112435939A CN112435939A CN202011323527.XA CN202011323527A CN112435939A CN 112435939 A CN112435939 A CN 112435939A CN 202011323527 A CN202011323527 A CN 202011323527A CN 112435939 A CN112435939 A CN 112435939A
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- side wall
- lateral wall
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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Abstract
The invention relates to the technical field of semiconductor degumming and discloses an auxiliary device of a semiconductor degumming machine, which can prevent a blade from dripping after colloid is remained on the blade. Because the lateral wall of activity shell is soft plastic, there is slight deformation shrink when rotatory, make the lateral wall of carousel slightly slide down, can make the lateral wall of main shaft drive the slide lapse downwards, the lateral wall of slide is at the in-process that stretches out and draws back from top to bottom, can make its lateral wall scrape in the lateral wall department of loose axle, because be in the state of rolling each other between the lateral wall of slide and the lateral wall of loose axle, can transversely strike off the colloid, avoid the colloid to drip again and cause the colloid to solidify in thing lateral wall department.
Description
Technical Field
The invention relates to the technical field of semiconductor photoresist removal, in particular to an auxiliary device of a semiconductor photoresist remover, which can prevent a blade from dripping due to residual colloid.
Background
The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, most of today's electronic products, such as computers, mobile phones or core units in digital recorders, are very closely related to semiconductors, common semiconductor materials include silicon, germanium, gallium arsenide and the like, and semiconductors can be classified according to their manufacturing techniques: integrated circuit devices, discrete devices, optoelectronic semiconductors, logic ICs, analog ICs, memory, and the like.
During the manufacturing of semiconductors, glue is often used for connection, for example, the packaging of semiconductors is performed, the packaging process comprises wafer cutting, die bonding, wire bonding, inspection and cutting and the like, redundant residual glue after the glue sealing is required to be removed in the packaging process, if the residual glue is not removed in time, the glue is solidified, the performance and the appearance of the semiconductors are easily affected, when the residual glue is removed by using a blade, the situation that the glue is remained and dripped on the blade easily occurs, and the use is inconvenient.
Disclosure of Invention
Technical scheme (I)
In order to solve the above problems, the present invention provides the following technical solutions: a semiconductor degumming machine auxiliary device capable of avoiding blade residual colloid from dripping comprises a movable shell, wherein the bottom end of the movable shell is movably connected with a movable ball, a connecting block penetrates through the side wall of the movable shell, a sliding plate is movably connected with the side wall of the connecting block, a sliding sheet is movably connected with the side wall of the sliding plate, a movable sheet is fixedly connected with the side wall of the sliding sheet, a main shaft penetrates through the inner axis of the movable shell, a connecting shell is fixedly connected with the upper end of the outer side wall of the movable shell, a rotary disc penetrates through the inner side wall of the movable shell, the bottom end of the side wall of the rotary disc is movably connected with a connecting rod, a main shaft penetrates through the axis of the side wall of the rotary disc, a connecting disc is fixedly connected with the bottom end of the main shaft, a movable block is movably connected with the side wall of the movable block, the bottom end of the side wall of the rotary disc, the lateral wall of connection pad is provided with the arc, and the lateral wall department of arc has run through movable post, the top fixedly connected with loose axle of movable post.
Preferably, the lateral wall of activity shell is made by elasticity plastic material, and its lateral wall can take place deformation a little when rotatory.
Preferably, the lateral wall sliding connection of connecting rod is in the inside wall department of activity shell, and the lateral wall of activity shell can receive the support of connecting rod when taking place position deformation.
Preferably, a connecting band is fixedly connected between the side wall of the connecting disc and the side wall of the connecting rod, so that the relationship between the connecting disc and the side wall of the connecting rod can be limited to a certain extent.
Preferably, the lateral wall top fixed connection of slide board is in the lateral wall department of gleitbretter, and the lateral wall bottom swing joint of gleitbretter is in the lateral wall department of slide board, and when sliding between the lateral wall bottom of gleitbretter and the lateral wall of slide board, the tie point on its top does not change.
Preferably, the side wall of the movable shaft is rotatably connected to the side wall of the sliding plate, and the side wall of the movable shaft rotates at the side wall of the sliding plate.
Preferably, the side wall of the movable column is rotatably connected to the side wall of the arc-shaped plate, and along with the rotation of the connecting disc, the side wall of the connecting disc and the side wall of the arc-shaped plate slide mutually, so that the side wall of the movable column can be driven to rotate.
(II) advantageous effects
Compared with the prior art, the invention provides the auxiliary device of the semiconductor photoresist remover, which can avoid the dripping of residual colloid on the blade and has the following beneficial effects:
1. this can avoid the blade to remain the colloid and semiconductor that drips removes quick-witted auxiliary device, lateral wall through the gleitbretter board is crooked and shrink for the bottom side of gleitbretter is stretched out the position outside the lateral wall of slide and is driven the lateral wall of movable plate and to the bottom side perk, because the lateral wall of movable plate slides to the bottom at the lateral wall department of gleitbretter and colludes, the lateral wall bottom of movable plate scrapes to the bottom, can utilize the repeated colloid of scraping in the lateral wall bottom of movable plate at the rotatory in-process of movable shell.
2. This can avoid the blade to remain the colloid and semiconductor that drips removes quick-witted auxiliary device of glue, because the lateral wall of activity shell is soft plastic body, there is slight deformation shrink when rotatory, make the lateral wall slight gliding of carousel, can make the lateral wall of main shaft drive the slide lapse downwards, the lateral wall of slide is at the in-process that stretches out and draws back from top to bottom, can make its lateral wall scrape in the lateral wall department of loose axle, because be in the state of rolling each other between the lateral wall of slide and the lateral wall of loose axle, can transversely strike off the colloid, avoid the colloid to drip again and cause the colloid to solidify in thing lateral wall department.
Drawings
FIG. 1 is a top view of the structural connection between the side wall of the movable housing and the slide plate of the present invention;
FIG. 2 is a schematic view of the structural connection between the movable housing and the turntable according to the present invention;
FIG. 3 is a schematic view of the structural connection between the side wall and the movable plate of the skateboard of the present invention;
fig. 4 is a schematic diagram of the connection between the turntable and the connecting disc according to the related structure of the invention.
In the figure: 1. a movable shell; 2. a main shaft; 3. connecting blocks; 4. a slide plate; 5. sliding blades; 6. a movable plate; 7. a movable shaft; 8. a connecting shell; 9. a turntable; 10. a connecting rod; 11. a movable ball; 12. a movable block; 13. a slider; 14. a connecting disc; 15. an arc-shaped plate; 16. a movable column.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, an auxiliary device of a semiconductor degumming machine capable of preventing a blade from dripping due to colloid residue comprises a movable shell 1, a movable ball 11 movably connected to the bottom end of the movable shell 1, a connecting block 3 penetrating through the side wall of the movable shell 1, a sliding plate 4 movably connected to the side wall of the connecting block 3, a sliding plate 5 movably connected to the side wall of the sliding plate 4, a movable plate 6 fixedly connected to the side wall of the sliding plate 5, a main shaft 2 penetrating through the inner axis of the movable shell 1, a connecting shell 8 fixedly connected to the upper end of the outer side wall of the movable shell 1, a rotary table 9 penetrating through the inner side wall of the movable shell 1, a connecting rod 10 movably connected to the bottom end of the side wall of the rotary table 9, a main shaft 2 penetrating through the axis of the side wall of the rotary table 9, a connecting disc 14 fixedly connected to the bottom end of the main shaft 2, a movable block 12 movably connected to the, the lateral wall bottom fixed connection of carousel 9 is in the top of main shaft 2, and the bottom fixed connection of main shaft 2 is on the top of slide 4, and the lateral wall of connection pad 14 is provided with arc 15, and the lateral wall department of arc 15 has run through movable column 16, and movable column 16's top fixedly connected with loose axle 7.
Wherein, the lateral wall of activity shell 1 is made by elasticity plastic material, and the lateral wall of activity shell 1 is when rotatory, and its lateral wall can take place deformation a little.
Wherein, the lateral wall sliding connection of connecting rod 10 is in the inside wall department of activity shell 1, and when the lateral wall of activity shell 1 took place the position deformation, can receive the support of connecting rod 10.
Wherein, a connecting belt is fixedly connected between the side wall of the connecting disc 14 and the side wall of the connecting rod 10, and the relation between the connecting disc 14 and the side wall of the connecting rod 10 can be limited to a certain extent.
Wherein, slide 4's lateral wall top fixed connection is in slide 5's lateral wall department, and slide 5's lateral wall bottom swing joint is in slide 4's lateral wall department, and when sliding between slide 5's lateral wall bottom and slide 4's the lateral wall, the tie point on its top is unchangeable.
Wherein, the side wall of the movable shaft 7 is rotatably connected to the side wall of the sliding plate 4, and the side wall of the movable shaft 7 rotates at the side wall of the sliding plate 4.
Wherein, the lateral wall of activity post 16 rotates to be connected in the lateral wall of arc 15, and along with the rotation of connection pad 14, mutual slip between the lateral wall department of connection pad 14 and the lateral wall of arc 15 can drive the lateral wall of activity post 16 and be rotatory state.
The working principle is as follows: when the device is used, as shown in fig. 1-4, the bottom end of the movable shell 1 can be opposite to the side wall of an object to be processed for isolated scraping, the side wall of the movable shell 1 is pressed downwards and rotated to drive the side wall of the sliding plate 4 to scrape the side wall of the object, the side wall of the sliding plate 4 can directly drive the side wall of the sliding plate 4 to twist when rotating, when the side wall of the movable shell 1 shown in fig. 1 rotates clockwise, the side wall of the sliding plate 4 can be dragged clockwise along the inner side wall of the movable shell 1, and the side wall of the sliding plate 4 rotates around the side wall of the main shaft 2;
as shown in fig. 2-3, when the side wall of the sliding plate 4 is obliquely dragged in a slope shape, the side wall of the sliding plate 4 tends to press downward, and the side wall of the sliding plate 4 bends and contracts, so that the bottom side of the sliding plate 5 is extended out of the side wall of the sliding plate 4 and drives the side wall of the movable plate 6 to tilt toward the bottom side, and since the side wall of the movable plate 6 slides to the bottom at the side wall of the sliding plate 5 to hook, the bottom end of the side wall of the movable plate 6 scrapes toward the bottom, the glue can be repeatedly scraped by using the bottom end of the side wall of the movable plate 6 in the rotating process of the movable shell;
as shown in fig. 2 and 4, when activity shell 1 is rotatory, can drive the rotation of carousel 9, the lateral wall of carousel 9 drives main shaft 2 rotatory, because the lateral wall of activity shell 1 is soft plastic, there is slight deformation shrink when rotatory, make the lateral wall of carousel 9 slightly slide down, can make the lateral wall of main shaft 2 drive slide 4 lapse downwards, slide 4's lateral wall is at the in-process that stretches out and draws back from top to bottom, can make its lateral wall scrape in the lateral wall department of loose axle 7, because be in the state of rolling each other between slide 4's lateral wall and the lateral wall of loose axle 7, can transversely strike off the colloid, avoid the colloid to drip again and cause the colloid to solidify in thing lateral wall department.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a can avoid the blade to remain the colloid and semiconductor degumming machine auxiliary device that drips, includes activity shell (1), its characterized in that: the bottom end of the movable shell (1) is movably connected with a movable ball (11), the side wall of the movable shell (1) penetrates through a connecting block (3), the side wall of the connecting block (3) is movably connected with a sliding plate (4), the side wall of the sliding plate (4) is movably connected with a sliding sheet (5), the side wall of the sliding sheet (5) is fixedly connected with a movable sheet (6), the inner axle center of the movable shell (1) penetrates through a main shaft (2), the upper end of the outer side wall of the movable shell (1) is fixedly connected with a connecting shell (8), a rotary table (9) penetrates through the inner side wall of the movable shell (1), the bottom end of the side wall of the rotary table (9) is movably connected with a connecting rod (10), the axle center of the side wall of the rotary table (9) penetrates through the main shaft (2), the bottom end of the main shaft (2) is fixedly connected with a connecting disc (, the lateral wall department swing joint of movable block (12) has slider (13), the lateral wall bottom fixed connection of carousel (9) is in the top of main shaft (2), and the bottom fixed connection of main shaft (2) is in the top of slide (4), the lateral wall of connection pad (14) is provided with arc (15), and the lateral wall department of arc (15) runs through has activity post (16), the top fixedly connected with loose axle (7) of activity post (16).
2. The auxiliary device of claim 1, wherein the auxiliary device comprises a plurality of blades, and the blades are arranged in a row, and the blades are arranged in the rows: the side wall of the movable shell (1) is made of elastic plastic materials.
3. The auxiliary device of claim 1, wherein the auxiliary device comprises a plurality of blades, and the blades are arranged in a row, and the blades are arranged in the rows: the side wall of the connecting rod (10) is connected to the inner side wall of the movable shell (1) in a sliding mode.
4. The auxiliary device of claim 1, wherein the auxiliary device comprises a plurality of blades, and the blades are arranged in a row, and the blades are arranged in the rows: and a connecting belt is fixedly connected between the side wall of the connecting disc (14) and the side wall of the connecting rod (10).
5. The auxiliary device of claim 1, wherein the auxiliary device comprises a plurality of blades, and the blades are arranged in a row, and the blades are arranged in the rows: the lateral wall top fixed connection of slide sheet (4) is in the lateral wall department of gleitbretter (5), and the lateral wall bottom swing joint of gleitbretter (5) is in the lateral wall department of slide sheet (4).
6. The auxiliary device of claim 1, wherein the auxiliary device comprises a plurality of blades, and the blades are arranged in a row, and the blades are arranged in the rows: the side wall of the movable shaft (7) is rotatably connected with the side wall of the sliding plate (4).
7. The auxiliary device of claim 1, wherein the auxiliary device comprises a plurality of blades, and the blades are arranged in a row, and the blades are arranged in the rows: the side wall of the movable column (16) is rotatably connected into the side wall of the arc-shaped plate (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011323527.XA CN112435939A (en) | 2020-11-23 | 2020-11-23 | Semiconductor degumming machine auxiliary device capable of preventing blade from dripping due to residual colloid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011323527.XA CN112435939A (en) | 2020-11-23 | 2020-11-23 | Semiconductor degumming machine auxiliary device capable of preventing blade from dripping due to residual colloid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112435939A true CN112435939A (en) | 2021-03-02 |
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ID=74693732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011323527.XA Withdrawn CN112435939A (en) | 2020-11-23 | 2020-11-23 | Semiconductor degumming machine auxiliary device capable of preventing blade from dripping due to residual colloid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112435939A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113113831A (en) * | 2021-04-06 | 2021-07-13 | 广东镭锳光电科技有限公司 | Pulse laser capable of automatically adjusting output of annular light spot |
| CN114734371A (en) * | 2022-04-06 | 2022-07-12 | 深圳市比华德科技有限公司 | Semiconductor manufacturing equipment for avoiding high-temperature explosion based on electronic industry |
-
2020
- 2020-11-23 CN CN202011323527.XA patent/CN112435939A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113113831A (en) * | 2021-04-06 | 2021-07-13 | 广东镭锳光电科技有限公司 | Pulse laser capable of automatically adjusting output of annular light spot |
| CN113113831B (en) * | 2021-04-06 | 2022-03-18 | 广东镭锳光电科技有限公司 | Pulse laser capable of automatically adjusting output of annular light spot |
| CN114734371A (en) * | 2022-04-06 | 2022-07-12 | 深圳市比华德科技有限公司 | Semiconductor manufacturing equipment for avoiding high-temperature explosion based on electronic industry |
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Application publication date: 20210302 |
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| WW01 | Invention patent application withdrawn after publication |