CN109773989B - Semiconductor crystal bar processing equipment - Google Patents
Semiconductor crystal bar processing equipment Download PDFInfo
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- CN109773989B CN109773989B CN201910196834.7A CN201910196834A CN109773989B CN 109773989 B CN109773989 B CN 109773989B CN 201910196834 A CN201910196834 A CN 201910196834A CN 109773989 B CN109773989 B CN 109773989B
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- 239000013078 crystal Substances 0.000 title claims abstract description 23
- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 238000005498 polishing Methods 0.000 claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000002699 waste material Substances 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to the technical field of semiconductors, in particular to a semiconductor crystal bar processing device. The technical problem to be solved by the invention is to provide a semiconductor crystal bar processing device which is simple to operate and can effectively reduce the working time and save the power. In order to solve the technical problem, the invention provides a semiconductor crystal bar processing device, which comprises a first rack, a bottom plate, a supporting rod, a driving mechanism, a first collecting box, a second rack, a first mounting plate, a first elastic part, a second elastic part, a fixed block, a baffle, a first sleeve body, a second sleeve body, a third sleeve body, a movable plate, a first outer gear, a second outer gear, a first sleeve, a circular slice, a second collecting box, a grinding mechanism, an air cylinder, a pressing mechanism and a polishing mechanism, wherein the first rack is arranged on the first rack; the top of the bottom plate is fixedly connected with a first rack, a supporting rod, a driving mechanism, a polishing mechanism and a second rack in sequence. The invention achieves the effects of simple operation, effectively reducing working time and saving power.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a semiconductor crystal bar processing device.
Background
The polycrystalline silicon material is added into a quartz crucible, heated to be in a molten state, and then made into a single crystal silicon rod by using a multiple pulling method. When the silicon single crystal rod is pulled, the silicon single crystal rod has a pointed end at the bottom, and the pulled silicon single crystal rod has different vertical diameters, and therefore, the silicon single crystal rod needs to be handled. In the prior art, the sharp head of the single crystal silicon rod is cut off firstly, then the sharp head is taken and ground to enable the diameters of the sharp head and the sharp head to be the same, and finally the sharp head of the cut single crystal silicon rod is collected and ground, so that the operation is complicated and the time is wasted. And wasting power.
In summary, there is a need to develop a semiconductor crystal bar processing apparatus that is simple in operation, can effectively reduce working time and save power, so as to overcome the disadvantages of complex operation, waste of working time and waste of power in the prior art.
Disclosure of Invention
The invention aims to overcome the defects of complex operation, waste of working time and waste of power in the prior art, and the technical problem to be solved is to provide the semiconductor crystal bar processing equipment which is simple to operate and can effectively reduce the working time and save the power.
The invention is achieved by the following specific technical means:
in order to solve the technical problem, the invention provides a semiconductor crystal bar processing device, which comprises a first rack, a bottom plate, a supporting rod, a driving mechanism, a first collecting box, a second rack, a first mounting plate, a first elastic part, a second elastic part, a fixed block, a baffle, a first sleeve body, a second sleeve body, a third sleeve body, a movable plate, a first outer gear, a second outer gear, a first sleeve, a circular slice, a second collecting box, a grinding mechanism, an air cylinder, a pressing mechanism and a polishing mechanism, wherein the first rack is arranged on the first rack; the top of the bottom plate is fixedly connected with a first rack, a support rod, a driving mechanism, a polishing mechanism and a second rack in sequence, the top of the first rack is fixedly connected with a first mounting plate, the top of the first mounting plate is fixedly connected with an air cylinder and a fixed block, and the air cylinder is close to the first rack; a moving plate is fixedly connected to the output end of the cylinder, and a third sleeve body, a second sleeve body and a first elastic piece are fixedly connected to one side, away from the cylinder, of the moving plate in sequence from top to bottom; the bottom of the third sleeve body and the top of the second sleeve body are both provided with a first sliding chute along the circumferential direction, and the first sleeve is connected with the third sleeve body and the second sleeve body in a sliding manner through the first sliding chute; a first external gear and a second external gear are fixedly connected to the periphery of the first sleeve, and the first external gear is positioned above the second external gear; the end part of the first elastic part is fixedly connected with a baffle, one side of the baffle, which is far away from the first elastic part, is fixedly connected with a first sleeve body, and the first sleeve body, the second sleeve body, the first sleeve body and the third sleeve body are all positioned on the same vertical line; one side of the first sleeve body, which is far away from the first elastic part, is fixedly connected with a second elastic part, and the end part of the second elastic part is fixedly connected with the fixed block; a through hole is formed in one side, close to the fixed block, of the first mounting plate in the vertical direction; the top of the supporting rod is fixedly connected with a second collecting box, the top of the second collecting box is in contact with the bottom of the first mounting plate, and the second collecting box is positioned right below the through hole; a grinding mechanism is fixedly connected in the second collecting box, and the input end of the grinding mechanism extends out of the second collecting box; one output end of the driving mechanism is meshed with the input end of the grinding mechanism, and the other output end of the driving mechanism is fixedly connected with a circular slice; one input end of the polishing mechanism is meshed with one output end of the driving mechanism, a first collecting box is arranged on the top of the bottom plate between the two input ends of the polishing mechanism, and the first collecting box is positioned right below the output end of the polishing mechanism; the upper part of one side of the second rack is fixedly connected with a pressing mechanism, and the pressing mechanism is positioned above the polishing mechanism;
the driving mechanism comprises a motor, a first rotating shaft, a first bevel gear and a first gear; the motor is fixedly connected to the top of the bottom plate, a first rotating shaft is fixedly connected to the output end of the motor, and the top of the first rotating shaft is fixedly connected with the circular slice; a first gear and a first bevel gear are fixedly connected to the first rotating shaft, and the first gear is positioned above the first bevel gear; the first gear is meshed with the input end of the polishing mechanism, and the first bevel gear is meshed with the output end of the driving mechanism;
the grinding mechanism comprises a first bearing seat, a second rotating shaft, a second bevel gear, a grinding roller and a grinding plate; a grinding plate is fixedly connected to the bottom in the second collecting box, and a groove is formed in the grinding plate; the lower parts of two sides of the second collecting box are respectively fixedly connected with a first bearing seat and a second bearing seat, and the second bearing seat is close to the driving mechanism; the second rotating shaft is pivoted with the first bearing seat and the second bearing seat and fixedly connected with a second bevel gear through the second bearing seat; the second bevel gear is meshed with the first bevel gear; the second rotating shaft is fixedly connected with a grinding roller, and the grinding roller is positioned in the second collecting box and is positioned right above the groove;
the pressing mechanism comprises a second mounting plate, a third bearing seat, a third rotating shaft, a second gear, a third bevel gear, a fourth bevel gear, a first belt pulley, a second belt pulley, a flat belt, a cam, a roller, a lifting rod, a third elastic piece, a fixing plate, a cylinder body and a pressing plate; one side of the second rack, which is close to the polishing mechanism, is fixedly connected with a second mounting plate and a cylinder body, and the second mounting plate is positioned above the cylinder body; a third bearing seat is fixedly connected to the bottom of the second mounting plate, a third rotating shaft is pivoted with the third bearing seat, a third bevel gear and a second gear are fixedly connected to the third rotating shaft, the third bevel gear is positioned above the second gear, and the second gear and the first outer gear are positioned on the same horizontal line; the fourth bevel gear and the first belt pulley are connected to the second rack through bearings, the fourth bevel gear is located on the front side of the first belt pulley, and the fourth bevel gear is meshed with the third bevel gear; the second belt pulley and the cam are connected to the second rack through a bearing seat, the second belt pulley is positioned on the rear side of the cam, and the second belt pulley is in transmission connection with the first belt pulley through a flat belt; a fixed plate is fixedly connected in the cylinder body, one end of a third elastic element is fixedly connected with the top of the fixed plate, and the other end of the third elastic element is fixedly connected with a lifting rod; the lifting rod penetrates through the third elastic piece and the fixed plate to be fixedly connected with a pressing plate, and the pressing plate is positioned in the cylinder body; the upper end of the lifting rod is fixedly connected with a roller which is in contact fit with the cam;
the grinding mechanism comprises a fourth bearing seat, a fifth bearing seat, a fourth rotating shaft, a fifth rotating shaft, a third gear, a fourth gear, a fifth gear, a third external gear, a grinding sleeve and a second sleeve; the second sleeve is fixedly connected to the side part of the second rack, a second sliding groove is formed in the top of the second sleeve along the circumferential direction, and the grinding sleeve is connected with the second sleeve in a sliding mode through the second sliding groove and located right below the cylinder body; a third external gear is fixedly connected to the periphery of the grinding sleeve, a fourth bearing seat and a fifth bearing seat are fixedly connected to the top of the bottom plate, and the first collecting box is located between the fourth bearing seat and the fifth bearing seat; the fourth rotating shaft is pivoted with the fourth bearing seat, a third gear is fixedly connected to the top of the fourth rotating shaft, and the third gear is meshed with the first gear and the third external gear; the fifth rotating shaft is pivoted with the fifth bearing seat, a fourth gear and a fifth gear are fixedly connected to the fifth rotating shaft, and the fourth gear is positioned below the fifth gear and is meshed with the third external gear; the fifth gear and the second external gear are positioned on the same horizontal line.
Further, the elastic member coefficients of the first elastic member and the second elastic member are both 1.5N/mm.
Furthermore, the first frame and the second frame are both made of stainless steel.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, the tip for cutting off the silicon single crystal rod, the tip grinding and the silicon single crystal rod grinding can be operated together, so that the operation is simple, and the working time can be effectively reduced; meanwhile, a plurality of power elements are driven by one power element to work, so that power is saved. Thereby achieving the effects of simple operation, effectively reducing the working time and saving the power.
Drawings
Fig. 1 is a schematic front view of the present invention.
FIG. 2 is a schematic front view of a second sleeve body according to the present invention.
Fig. 3 is a schematic perspective view of a first sleeve according to the present invention.
Fig. 4 is a front view of the driving mechanism of the present invention.
FIG. 5 is a schematic front view of a polishing mechanism according to the present invention.
FIG. 6 is a left side view of the second collection box of the present invention.
Fig. 7 is a schematic front view of the pressing mechanism of the present invention.
Fig. 8 is a schematic front view of the grinding mechanism of the present invention.
The labels in the figures are: 1-a first frame, 2-a bottom plate, 3-a strut, 4-a drive mechanism, 41-a motor, 42-a first rotating shaft, 43-a first bevel gear, 44-a first gear, 5-a first collection box, 6-a second frame, 7-a first mounting plate, 8-a first elastic member, 9-a second elastic member, 10-a fixed block, 11-a through hole, 12-a baffle, 13-a first sleeve body, 14-a second sleeve body, 15-a third sleeve body, 16-a moving plate, 17-a single crystal silicon rod, 18-a first chute, 19-a first external gear, 20-a second external gear, 21-a first sleeve, 22-a circular slice, 23-a second collection box, 24-a grinding mechanism, 2401-a first bearing seat, 2402-second bearing seat, 2403-second rotating shaft, 2404-second bevel gear, 2405-grinding roller, 2406-grinding plate, 2407-groove, 25-cylinder, 26-pressing mechanism, 2601-second mounting plate, 2602-third bearing seat, 2603-third rotating shaft, 2604-second gear, 2605-third bevel gear, 2606-fourth bevel gear, 2607-first pulley, 2608-second pulley, 2609-flat belt, 2610-cam, 2611-roller, 2612-lifting rod, 2613-third elastic member, 2614-fixing plate, 2615-cylinder, 2616-pressing plate, 27-grinding mechanism, 2701-fourth bearing seat, 2702-third bearing seat, 2703-fourth rotating shaft, 2704-fifth rotating shaft, 2705-third gear, 2706-fourth gear, 2707-fifth gear, 2708-third external gear, 2709-grinding sleeve, 2710-second chute, 2711-second sleeve.
Detailed Description
The invention is further described below with reference to the figures and examples.
Examples
A semiconductor crystal bar processing device is shown in figures 1-8 and comprises a first rack 1, a bottom plate 2, a support rod 3, a driving mechanism 4, a first collecting box 5, a second rack 6, a first mounting plate 7, a first elastic part 8, a second elastic part 9, a fixed block 10, a baffle 12, a first sleeve body 13, a second sleeve body 14, a third sleeve body 15, a moving plate 16, a first external gear 19, a second external gear 20, a first sleeve 21, a circular slice 22, a second collecting box 23, a grinding mechanism 24, an air cylinder 25, a pressing mechanism 26 and a grinding mechanism 27; the top of the bottom plate 2 is fixedly connected with a first frame 1, a support rod 3, a driving mechanism 4, a polishing mechanism 27 and a second frame 6 in sequence, the top of the first frame 1 is fixedly connected with a first mounting plate 7, the top of the first mounting plate 7 is fixedly connected with an air cylinder 25 and a fixed block 10, and the air cylinder 25 is close to the first frame 1; a moving plate 16 is fixedly connected to the output end of the cylinder 25, and a third sleeve body 15, a second sleeve body 14 and a first elastic piece 8 are fixedly connected to one side, away from the cylinder 25, of the moving plate 16 in sequence from top to bottom; the bottom of the third sleeve body 15 and the top of the second sleeve body 14 are both provided with a first sliding chute 18 along the circumferential direction, and the first sleeve 21 is connected with the third sleeve body 15 and the second sleeve body 14 in a sliding manner through the first sliding chute 18; a first external gear 19 and a second external gear 20 are fixedly connected to the periphery of the first sleeve 21, and the first external gear 19 is positioned above the second external gear 20; a baffle plate 12 is fixedly connected to the end part of the first elastic part 8, a first sleeve body 13 is fixedly connected to one side, away from the first elastic part 8, of the baffle plate 12, and the first sleeve body 13, the second sleeve body 14, the first sleeve 21 and the third sleeve body 15 are all located on the same vertical line; a second elastic part 9 is fixedly connected to one side of the first sleeve 13 far away from the first elastic part 8, and the end part of the second elastic part 9 is fixedly connected with a fixed block 10; a through hole 11 is formed in one side, close to the fixed block 10, of the first mounting plate 7 in the vertical direction; the top of the supporting rod 3 is fixedly connected with a second collecting box 23, the top of the second collecting box 23 is contacted with the bottom of the first mounting plate 7, and the second collecting box 23 is positioned under the through hole 11; a grinding mechanism 24 is fixedly connected in the second collection box 23, and the input end of the grinding mechanism 24 extends out of the second collection box 23; one output end of the driving mechanism 4 is meshed with the input end of the grinding mechanism 24, and the other output end of the driving mechanism 4 is fixedly connected with a circular slice 22; one input end of the polishing mechanism 27 is meshed with one output end of the driving mechanism 4, a first collecting box 5 is placed on the top of the bottom plate 2 between the two input ends of the polishing mechanism 27, and the first collecting box 5 is positioned right below the output end of the polishing mechanism 27; a pressing mechanism 26 is fixed on the upper part of one side of the second frame 6, and the pressing mechanism 26 is positioned above the grinding mechanism 27.
The driving mechanism 4 comprises a motor 41, a first rotating shaft 42, a first bevel gear 43 and a first gear 44; the motor 41 is fixedly connected to the top of the bottom plate 2, the output end of the motor 41 is fixedly connected with the first rotating shaft 42, and the top of the first rotating shaft 42 is fixedly connected with the circular slice 22; a first gear 44 and a first bevel gear 43 are fixedly connected to the first rotating shaft 42, and the first gear 44 is positioned above the first bevel gear 43; the first gear 44 is engaged with the input of the grinding mechanism 27 and the first bevel gear 43 is engaged with the output of the drive mechanism 4.
The grinding mechanism 24 comprises a first bearing seat 2401, a second bearing seat 2402, a second rotating shaft 2403, a second bevel gear 2404, a grinding roller 2405 and a grinding plate 2406; a grinding plate 2406 is fixedly connected to the bottom in the second collecting box 23, and a groove 2407 is formed in the grinding plate 2406; the lower parts of two sides of the second collection box 23 are respectively fixedly connected with a first bearing seat 2401 and a second bearing seat 2402, and the second bearing seat 2402 is close to the driving mechanism 4; the second rotating shaft 2403 is pivoted with the first bearing seat 2401 and the second bearing seat 2402, and a second bevel gear 2404 is fixedly connected through the second bearing seat 2402; the second bevel gear 2404 is engaged with the first bevel gear 43; the second rotating shaft 2403 is fixedly connected with a grinding roller 2405, and the grinding roller 2405 is positioned in the second collecting box 23 and is positioned right above the groove 2407.
The pressing mechanism 26 includes a second mounting plate 2601, a third bearing housing 2602, a third shaft 2603, a second gear 2604, a third bevel gear 2605, a fourth bevel gear 2606, a first pulley 2607, a second pulley 2608, a flat belt 2609, a cam 2610, a roller 2611, a lifting rod 2612, a third elastic member 2613, a fixing plate 2614, a cylinder 2615 and a pressing plate 2616; a second mounting plate 2601 and a cylinder 2615 are fixedly connected to one side of the second frame 6 close to the grinding mechanism 27, and the second mounting plate 2601 is positioned above the cylinder 2615; a third bearing seat 2602 is fixedly connected to the bottom of the second mounting plate 2601, a third rotating shaft 2603 is pivotally connected to the third bearing seat 2602, a third bevel gear 2605 and a second gear 2604 are fixedly connected to the third rotating shaft 2603, the third bevel gear 2605 is located above the second gear 2604, and the second gear 2604 and the first external gear 19 are located on the same horizontal line; a fourth bevel gear 2606 and the first belt pulley 2607 are both connected to the second frame 6 through bearings, the fourth bevel gear 2606 is positioned in front of the first belt pulley 2607, and the fourth bevel gear 2606 is meshed with the third bevel gear 2605; the second belt pulley 2608 and the cam 2610 are connected to the second frame 6 through a bearing seat, the second belt pulley 2608 is positioned at the rear side of the cam 2610, and the second belt pulley 2608 is in transmission connection with the first belt pulley 2607 through a flat belt 2609; a fixed plate 2614 is fixedly connected in the cylinder 2615, one end of a third elastic member 2613 is fixedly connected with the top of the fixed plate 2614, and the other end of the third elastic member 2613 is fixedly connected with a lifting rod 2612; the lifting rod 2612 is fixedly connected with a pressing plate 2616 through a third elastic piece 2613 and a fixing plate 2614, and the pressing plate 2616 is positioned in a cylinder 2615; a roller 2611 is fixed on the upper end of the lifting rod 2612, and the roller 2611 is in contact fit with the cam 2610.
The grinding mechanism 27 includes a fourth bearing 2701, a fifth bearing 2702, a fourth rotating shaft 2703, a fifth rotating shaft 2704, a third gear 2705, a fourth gear 2706, a fifth gear 2707, a third external gear 2708, a grinding sleeve 2709 and a second sleeve 2711; the second sleeve 2711 is fixedly connected to the side part of the second frame 6, a second sliding groove 2710 is formed in the top of the second sleeve 2711 along the circumferential direction, and the grinding sleeve 2709 is in sliding connection with the second sleeve 2711 through the second sliding groove 2710 and is positioned right below the cylinder 2615; a third external gear 2708 is fixedly connected to the periphery of the grinding sleeve 2709, a fourth bearing 2701 and a fifth bearing 2702 are fixedly connected to the top of the bottom plate 2, and the first collection box 5 is located between the fourth bearing 2701 and the fifth bearing 2702; the fourth rotating shaft 2703 is pivoted with the fourth bearing block 2701, a third gear 2705 is fixedly connected to the top of the fourth rotating shaft 2703, and the third gear 2705 is engaged with the first gear 44 and the third external gear 2708; the fifth rotating shaft 2704 is pivotally connected to the fifth bearing block 2702, a fourth gear 2706 and a fifth gear 2707 are fixedly connected to the fifth rotating shaft 2704, and the fourth gear 2706 is located below the fifth gear 2707 and is meshed with the third external gear 2708; the fifth gear 2707 is located on the same horizontal line as the second external gear 20.
The spring constants of the first spring 8 and the second spring 9 are each 1.5N/mm.
The first frame 1 and the second frame 6 are both made of stainless steel.
When the sharp end at the bottom of the prepared single crystal silicon rod 17 needs to be cut off, the single crystal silicon rod 17 is firstly placed in the third sleeve 15, the first sleeve 21, the second sleeve 14 and the first sleeve 13, then the air cylinder 25 is started, so that the moving plate 16 and the third sleeve 15, the first sleeve 21, the second sleeve 14 and the first sleeve 13 thereon horizontally move towards the direction close to the circular slice 22, and further the single crystal silicon rod 17 horizontally moves towards the direction close to the circular slice 22. Meanwhile, the driving mechanism 4 is started to drive the round slice 22 to rotate, when the single crystal silicon rod 17 is positioned right above the through hole 11, the round slice 22 cuts off the tip at the bottom of the single crystal silicon rod 17, and the cut tip falls into the second collection box 23 through the through hole 11.
Meanwhile, the grinding mechanism 24 is driven to work by the work of the driving mechanism 4, and the tip of the single crystal silicon rod 17 falling into the second collection box 23 is ground by the grinding mechanism 24, so that the tip can be recycled.
At the same time, the air cylinder 25 is restarted so that the single crystal silicon rod 17 is positioned directly below the output end of the pressing mechanism 26, and the first external gear 19 is engaged with the input end of the pressing mechanism 26, and the second external gear 20 is engaged with the output end of the grinding mechanism 27.
Meanwhile, the driving mechanism 4 also drives the grinding mechanism 27 to work, the grinding mechanism 27 drives the second external gear 20 to rotate, the first sleeve 21 is driven to rotate, the first external gear 19 is driven to rotate, the pressing mechanism 26 is driven to work, the output end of the pressing mechanism 26 presses the single crystal silicon rod 17 into the output end of the grinding mechanism 27, the single crystal silicon rod is ground, and the grinding mechanism is further ground to be more round and then falls into the first collecting box 5.
As shown in fig. 4, the driving mechanism 4 includes a motor 41, a first rotating shaft 42, a first bevel gear 43, and a first gear 44; the motor 41 is fixedly connected to the top of the bottom plate 2, the output end of the motor 41 is fixedly connected with the first rotating shaft 42, and the top of the first rotating shaft 42 is fixedly connected with the circular slice 22; a first gear 44 and a first bevel gear 43 are fixedly connected to the first rotating shaft 42, and the first gear 44 is positioned above the first bevel gear 43; the first gear 44 is engaged with the input of the grinding mechanism 27 and the first bevel gear 43 is engaged with the output of the drive mechanism 4.
When the prepared silicon single crystal rod 17 needs to be processed, the motor 41 is started first, and then the first rotating shaft 42 is driven to rotate, and then the first bevel gear 43, the first gear 44 and the circular slice 22 are driven to rotate, so that the circular slice 22 can cut off the sharp end of the silicon single crystal rod 17. Meanwhile, the first bevel gear 43 rotates to drive the grinding mechanism 24 to work, so that the sharp end of the cut single crystal silicon rod 17 can be ground and recycled. Meanwhile, the rotation of the first gear 44 can start the grinding mechanism 27 to work, so as to start the pressing mechanism 26 to work, and thus grind the silicon single crystal rod 17.
As shown in fig. 5 and 6, the grinding mechanism 24 includes a first bearing housing 2401, a second bearing housing 2402, a second rotating shaft 2403, a second bevel gear 2404, a grinding roller 2405 and a grinding plate 2406; a grinding plate 2406 is fixedly connected to the bottom in the second collecting box 23, and a groove 2407 is formed in the grinding plate 2406; the lower parts of two sides of the second collection box 23 are respectively fixedly connected with a first bearing seat 2401 and a second bearing seat 2402, and the second bearing seat 2402 is close to the driving mechanism 4; the second rotating shaft 2403 is pivoted with the first bearing seat 2401 and the second bearing seat 2402, and a second bevel gear 2404 is fixedly connected through the second bearing seat 2402; the second bevel gear 2404 is engaged with the first bevel gear 43; the second rotating shaft 2403 is fixedly connected with a grinding roller 2405, and the grinding roller 2405 is positioned in the second collecting box 23 and is positioned right above the groove 2407.
When the tip of the silicon single crystal rod 17 is cut down, the tip falls into the groove 2407 on the grinding plate 2406 in the second collection box 23, at this time, the first bevel gear 43 rotates to drive the second bevel gear 2404 to rotate, further drive the second rotating shaft 2403 to rotate, further drive the grinding roller 2405 to rotate, further the grinding roller 2405 grinds the tip of the silicon single crystal rod 17 in the groove 2407, thereby grinding the tip, further recycling the tip, and saving resources.
As shown in fig. 7, the pressing mechanism 26 includes a second mounting plate 2601, a third bearing housing 2602, a third rotating shaft 2603, a second gear 2604, a third bevel gear 2605, a fourth bevel gear 2606, a first pulley 2607, a second pulley 2608, a flat belt 2609, a cam 2610, a roller 2611, an elevating rod 2612, a third elastic member 2613, a fixing plate 2614, a cylinder 2615 and a pressing plate 2616; a second mounting plate 2601 and a cylinder 2615 are fixedly connected to one side of the second frame 6 close to the grinding mechanism 27, and the second mounting plate 2601 is positioned above the cylinder 2615; a third bearing seat 2602 is fixedly connected to the bottom of the second mounting plate 2601, a third rotating shaft 2603 is pivotally connected to the third bearing seat 2602, a third bevel gear 2605 and a second gear 2604 are fixedly connected to the third rotating shaft 2603, the third bevel gear 2605 is located above the second gear 2604, and the second gear 2604 and the first external gear 19 are located on the same horizontal line; a fourth bevel gear 2606 and the first belt pulley 2607 are both connected to the second frame 6 through bearings, the fourth bevel gear 2606 is positioned in front of the first belt pulley 2607, and the fourth bevel gear 2606 is meshed with the third bevel gear 2605; the second belt pulley 2608 and the cam 2610 are connected to the second frame 6 through a bearing seat, the second belt pulley 2608 is positioned at the rear side of the cam 2610, and the second belt pulley 2608 is in transmission connection with the first belt pulley 2607 through a flat belt 2609; a fixed plate 2614 is fixedly connected in the cylinder 2615, one end of a third elastic member 2613 is fixedly connected with the top of the fixed plate 2614, and the other end of the third elastic member 2613 is fixedly connected with a lifting rod 2612; the lifting rod 2612 is fixedly connected with a pressing plate 2616 through a third elastic piece 2613 and a fixing plate 2614, and the pressing plate 2616 is positioned in a cylinder 2615; a roller 2611 is fixed on the upper end of the lifting rod 2612, and the roller 2611 is in contact fit with the cam 2610.
When the single crystal silicon rod 17 is positioned directly below the cylinder 2615, the first external gear 19 now engages the second gear 2604 while the second external gear 20 engages the output of the grinding mechanism 27. Therefore, at this time, the driving mechanism 4 works to drive the polishing mechanism 27 to work, and further drive the second external gear 20 to rotate, and further drive the first sleeve 21 to rotate, and further drive the first external gear 19 to rotate, and further drive the second gear 2604 to rotate, and further drive the third rotating shaft 2603 to rotate, and further drive the third bevel gear 2605 to rotate, and further drive the fourth bevel gear 2606 to rotate, and further drive the first belt pulley 2607 to rotate, and further drive the second belt pulley 2608 to rotate, and further drive the cam 2610 to rotate. When the small end portion of the cam 2610 contacts with the roller 2611, the lifting rod 2612 is pressed downwards, and then the pressing plate 2616 is driven to move downwards, so that the single crystal silicon rod 17 is pressed from the third sleeve body 15, the first sleeve 21 and the second sleeve body 14 to the output end of the polishing mechanism 27, and then polished.
As shown in fig. 8, the grinding mechanism 27 includes a fourth bearing 2701, a fifth bearing 2702, a fourth rotating shaft 2703, a fifth rotating shaft 2704, a third gear 2705, a fourth gear 2706, a fifth gear 2707, a third external gear 2708, a grinding sleeve 2709 and a second sleeve 2711; the second sleeve 2711 is fixedly connected to the side part of the second frame 6, a second sliding groove 2710 is formed in the top of the second sleeve 2711 along the circumferential direction, and the grinding sleeve 2709 is in sliding connection with the second sleeve 2711 through the second sliding groove 2710 and is positioned right below the cylinder 2615; a third external gear 2708 is fixedly connected to the periphery of the grinding sleeve 2709, a fourth bearing 2701 and a fifth bearing 2702 are fixedly connected to the top of the bottom plate 2, and the first collection box 5 is located between the fourth bearing 2701 and the fifth bearing 2702; the fourth rotating shaft 2703 is pivoted with the fourth bearing block 2701, a third gear 2705 is fixedly connected to the top of the fourth rotating shaft 2703, and the third gear 2705 is engaged with the first gear 44 and the third external gear 2708; the fifth rotating shaft 2704 is pivotally connected to the fifth bearing block 2702, a fourth gear 2706 and a fifth gear 2707 are fixedly connected to the fifth rotating shaft 2704, and the fourth gear 2706 is located below the fifth gear 2707 and is meshed with the third external gear 2708; the fifth gear 2707 is located on the same horizontal line as the second external gear 20.
When the monocrystalline silicon rod 17 is extruded into the grinding sleeve 2709 from the third sleeve 15, the first sleeve 21 and the second sleeve 14, the diameter of the grinding sleeve 2709 decreases downwards, so that the monocrystalline silicon rod 17 is ground by the rotating grinding sleeve 2709, the diameters of the upper part and the lower part of the monocrystalline silicon rod 17 are the same, and the ground monocrystalline silicon rod 17 falls into the first collection box 5 through the second sleeve 2711.
The above examples are merely representative of preferred embodiments of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, various changes, modifications and substitutions can be made without departing from the spirit of the present invention, and these are all within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (3)
1. A semiconductor crystal bar processing device comprises a first rack (1), a bottom plate (2), a first collecting box (5), a second rack (6) and a second collecting box (23), and is characterized by further comprising a supporting rod (3), a driving mechanism (4), a first mounting plate (7), a first elastic piece (8), a second elastic piece (9), a fixed block (10), a baffle (12), a first sleeve body (13), a second sleeve body (14), a third sleeve body (15), a moving plate (16), a first outer gear (19), a second outer gear (20), a first sleeve (21), a circular slice (22), a grinding mechanism (24), an air cylinder (25), a pressing mechanism (26) and a grinding mechanism (27); the top of the bottom plate (2) is fixedly connected with a first rack (1), a support rod (3), a driving mechanism (4), a polishing mechanism (27) and a second rack (6) in sequence, the top of the first rack (1) is fixedly connected with a first mounting plate (7), the top of the first mounting plate (7) is fixedly connected with an air cylinder (25) and a fixed block (10), and the air cylinder (25) is close to the first rack (1); a moving plate (16) is fixedly connected to the output end of the cylinder (25), and a third sleeve body (15), a second sleeve body (14) and a first elastic piece (8) are fixedly connected to one side, far away from the cylinder (25), of the moving plate (16) from top to bottom in sequence; the bottom of the third sleeve body (15) and the top of the second sleeve body (14) are both provided with a first sliding chute (18) along the circumferential direction, and the first sleeve (21) is connected with the third sleeve body (15) and the second sleeve body (14) in a sliding way through the first sliding chute (18); a first external gear (19) and a second external gear (20) are fixedly connected to the periphery of the first sleeve (21), and the first external gear (19) is positioned above the second external gear (20); a baffle (12) is fixedly connected to the end part of the first elastic part (8), a first sleeve body (13) is fixedly connected to one side, away from the first elastic part (8), of the baffle (12), and the first sleeve body (13), the second sleeve body (14), the first sleeve (21) and the third sleeve body (15) are all located on the same vertical line; a second elastic part (9) is fixedly connected to one side of the first sleeve body (13) far away from the first elastic part (8), and the end part of the second elastic part (9) is fixedly connected with the fixed block (10); one side of the first mounting plate (7) close to the fixed block (10) is provided with a through hole (11) along the vertical direction; a second collecting box (23) is fixedly connected to the top of the supporting rod (3), the top of the second collecting box (23) is in contact with the bottom of the first mounting plate (7), and the second collecting box (23) is located right below the through hole (11); a grinding mechanism (24) is fixedly connected in the second collection box (23), and the input end of the grinding mechanism (24) extends out of the second collection box (23); one output end of the driving mechanism (4) is meshed with the input end of the grinding mechanism (24), and the other output end of the driving mechanism (4) is fixedly connected with a circular slice (22); one input end of the polishing mechanism (27) is meshed with one output end of the driving mechanism (4), a first collecting box (5) is arranged on the top of the bottom plate (2) between the two input ends of the polishing mechanism (27), and the first collecting box (5) is positioned right below the output end of the polishing mechanism (27); a pressing mechanism (26) is fixedly connected to the upper part of one side of the second frame (6), and the pressing mechanism (26) is positioned above the grinding mechanism (27);
the driving mechanism (4) comprises a motor (41), a first rotating shaft (42), a first bevel gear (43) and a first gear (44); the motor (41) is fixedly connected to the top of the bottom plate (2), the output end of the motor (41) is fixedly connected with a first rotating shaft (42), and the top of the first rotating shaft (42) is fixedly connected with the circular slice (22); a first gear (44) and a first bevel gear (43) are fixedly connected to the first rotating shaft (42), and the first gear (44) is positioned above the first bevel gear (43); the first gear (44) is meshed with the input end of the grinding mechanism (27), and the first bevel gear (43) is meshed with the output end of the driving mechanism (4);
the grinding mechanism (24) comprises a first bearing seat (2401), a second bearing seat (2402), a second rotating shaft (2403), a second bevel gear (2404), a grinding roller (2405) and a grinding plate (2406); a grinding plate (2406) is fixedly connected to the bottom in the second collecting box (23), and a groove (2407) is formed in the grinding plate (2406); the lower parts of two sides of the second collecting box (23) are respectively fixedly connected with a first bearing seat (2401) and a second bearing seat (2402), and the second bearing seat (2402) is close to the driving mechanism (4); the second rotating shaft (2403) is pivoted with the first bearing seat (2401) and the second bearing seat (2402), and a second bevel gear (2404) is fixedly connected through the second bearing seat (2402); the second bevel gear (2404) is meshed with the first bevel gear (43); a grinding roller (2405) is fixedly connected to the second rotating shaft (2403), and the grinding roller (2405) is positioned in the second collecting box (23) and is positioned right above the groove (2407);
the pressing mechanism (26) comprises a second mounting plate (2601), a third bearing seat (2602), a third rotating shaft (2603), a second gear (2604), a third bevel gear (2605), a fourth bevel gear (2606), a first belt pulley (2607), a second belt pulley (2608), a flat belt (2609), a cam (2610), a roller (2611), a lifting rod (2612), a third elastic member (2613), a fixing plate (2614), a cylinder body (2615) and a pressing plate (2616); a second mounting plate (2601) and a cylinder body (2615) are fixedly connected to one side, close to the grinding mechanism (27), of the second frame (6), and the second mounting plate (2601) is located above the cylinder body (2615); a third bearing seat (2602) is fixedly connected to the bottom of the second mounting plate (2601), a third rotating shaft (2603) is pivoted with the third bearing seat (2602), a third bevel gear (2605) and a second gear (2604) are fixedly connected to the third rotating shaft (2603), the third bevel gear (2605) is positioned above the second gear (2604), and the second gear (2604) and the first external gear (19) are positioned on the same horizontal line; the fourth bevel gear (2606) and the first belt pulley (2607) are both connected to the second frame (6) through bearings, the fourth bevel gear (2606) is positioned in front of the first belt pulley (2607), and the fourth bevel gear (2606) is meshed with the third bevel gear (2605); the second belt pulley (2608) and the cam (2610) are connected to the second frame (6) through a bearing seat, the second belt pulley (2608) is located on the rear side of the cam (2610), and the second belt pulley (2608) is in transmission connection with the first belt pulley (2607) through a flat belt (2609); a fixed plate (2614) is fixedly connected in the cylinder body (2615), one end of a third elastic member (2613) is fixedly connected with the top of the fixed plate (2614), and the other end of the third elastic member (2613) is fixedly connected with a lifting rod (2612); the lifting rod (2612) passes through the third elastic piece (2613) and the fixed plate (2614) to be fixedly connected with a pressing plate (2616), and the pressing plate (2616) is positioned in the cylinder body (2615); the upper end of the lifting rod (2612) is fixedly connected with a roller (2611), and the roller (2611) is in contact fit with the cam (2610);
the grinding mechanism (27) comprises a fourth bearing seat (2701), a fifth bearing seat (2702), a fourth rotating shaft (2703), a fifth rotating shaft (2704), a third gear (2705), a fourth gear (2706), a fifth gear (2707), a third external gear (2708), a grinding sleeve (2709) and a second sleeve (2711); the second sleeve (2711) is fixedly connected to the side part of the second rack (6), a second sliding groove (2710) is formed in the top of the second sleeve (2711) along the circumferential direction, and the grinding sleeve (2709) is in sliding connection with the second sleeve (2711) through the second sliding groove (2710) and is located right below the cylinder body (2615); a third external gear (2708) is fixedly connected to the periphery of the grinding sleeve (2709), a fourth bearing seat (2701) and a fifth bearing seat (2702) are fixedly connected to the top of the bottom plate (2), and the first collecting box (5) is located between the fourth bearing seat (2701) and the fifth bearing seat (2702); the fourth rotating shaft (2703) is pivoted with the fourth bearing seat (2701), a third gear (2705) is fixedly connected to the top of the fourth rotating shaft (2703), and the third gear (2705) is meshed with the first gear (44) and the third external gear (2708); the fifth rotating shaft (2704) is pivoted with the fifth bearing seat (2702), a fourth gear (2706) and a fifth gear (2707) are fixedly connected to the fifth rotating shaft (2704), and the fourth gear (2706) is positioned below the fifth gear (2707) and meshed with the third external gear (2708); the fifth gear (2707) and the second external gear (20) are located on the same horizontal line.
2. A semiconductor ingot processing apparatus according to claim 1, wherein the first elastic member (8) and the second elastic member (9) each have an elastic member coefficient of 1.5N/mm.
3. The semiconductor crystal bar processing device according to claim 2, wherein the first frame (1) and the second frame (6) are made of stainless steel.
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| CN110788999B (en) * | 2019-11-06 | 2021-09-21 | 南京六合高新建设发展有限公司 | Rare earth ceramic rod processing device |
| CN112575372B (en) * | 2020-12-05 | 2021-12-21 | 城固县鑫弘矿业有限责任公司 | Laminated external expanding type silicon rod forming equipment |
| CN112643464B (en) * | 2020-12-21 | 2022-03-11 | 安徽迈德福新材料有限责任公司 | Grinding device for electrode roller machining and using method thereof |
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