CN112415658A - Curved waveguide with metal film - Google Patents
Curved waveguide with metal film Download PDFInfo
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- CN112415658A CN112415658A CN202011428458.9A CN202011428458A CN112415658A CN 112415658 A CN112415658 A CN 112415658A CN 202011428458 A CN202011428458 A CN 202011428458A CN 112415658 A CN112415658 A CN 112415658A
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- metal film
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- 239000002184 metal Substances 0.000 title claims abstract description 49
- 239000010410 layer Substances 0.000 claims abstract description 55
- 230000003287 optical effect Effects 0.000 claims abstract description 44
- 239000012792 core layer Substances 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000005452 bending Methods 0.000 claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 210000000438 stratum basale Anatomy 0.000 claims 3
- 230000005540 biological transmission Effects 0.000 abstract description 21
- 238000005253 cladding Methods 0.000 abstract description 16
- 230000002708 enhancing effect Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a bending waveguide with a metal film, which comprises a substrate layer and an optical waveguide layer, wherein the substrate layer is used as a substrate of the optical waveguide layer, the optical waveguide layer comprises an upper cladding layer, a core layer and a lower cladding layer, the upper cladding layer and the lower cladding layer respectively cover the top surface and the bottom surface of the core layer, the core layer is continuous on a plane where the substrate layer is located and forms an included angle, the outer side surface of the core layer at the vertex of the included angle is of a planar structure and is coated with the metal film, and the plane where the metal film is located is perpendicular to an angular bisector of the included angle. The bending waveguide with the metal film provided by the invention realizes the functions of changing the light beam propagation direction in the optical waveguide and enhancing the reflection efficiency to reduce the light transmission loss.
Description
Technical Field
The invention relates to the technical field of backplane optical interconnection, in particular to a curved waveguide with a metal film.
Background
In recent years, the internet industry has been rapidly developed, and various network services generate a huge amount of data, which brings new challenges to data transmission and processing, especially in the fields of data centers, supercomputers and the like. The traditional electrical interconnection technology has limited bandwidth, and today, high-speed data transmission is urgently needed, the upper limit of the bandwidth cannot meet the requirement of transmission speed, in addition, the high power consumption of the electrical interconnection technology also brings burden to a power system, and the optical interconnection technology has the advantages of high transmission bandwidth, electromagnetic interference resistance, low transmission loss and the like, and can become a supplement or alternative scheme of the electrical interconnection technology in the future.
In an integrated optical circuit, an optical waveguide is a transmission channel of an optical signal and is used for connecting various optical components, the waveguide can be divided into a curved waveguide and a straight waveguide according to different geometrical shapes of the waveguide, and the curved waveguide can be used for connecting non-collinear optical components and is mainly used for changing the transmission direction of the optical signal. Because the transmission of optical signals in the optical waveguide needs to meet the total internal reflection condition, the problem of transmission loss of light needs to be considered in the design of the curved waveguide, and the curved waveguide plays an important role in improving the optical integration degree, so that the design of the curved structure to change the transmission direction of the optical signals in the waveguide with low loss has important research significance. There are many researches on introducing a curved structure into a waveguide to change an optical path, and an S-shaped curved structure is generally used, but the radius of curvature of the waveguide of the structure is large for the curved transmission loss, so that the requirement on the manufacturing accuracy is high, and when the radius of curvature is large, the layout of other optical waveguides and optical components is affected.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a curved waveguide with a metal film, which can be used in an optical backplane integrated optical circuit, and the technical scheme is as follows:
in one aspect, the invention provides a bending waveguide with a metal film, which includes a substrate layer and an optical waveguide layer, wherein the substrate layer is used as a substrate of the optical waveguide layer, the optical waveguide layer includes an upper cladding layer, a core layer and a lower cladding layer, the upper cladding layer and the lower cladding layer respectively cover the top surface and the bottom surface of the core layer, the core layer is continuous on a plane where the substrate layer is located and forms an included angle, the outer side surface of the core layer at the vertex of the included angle is of a planar structure and is coated with the metal film, and the plane where the metal film is located is perpendicular to a bisector of the included angle.
Further, the core layer forms a 90-degree included angle on the plane where the substrate layer is located.
Furthermore, the inner side surface of the core layer at the vertex of the included angle forms an included angle of 90 degrees, and the inner side surface and the plane where the metal film is located form an included angle of 45 degrees.
Furthermore, the cross sections of the core layer at the two sides of the included angle vertex are the same in size and shape.
Further, the core layer is of a strip structure.
Further, the thickness of the core layer is equal to the length of the metal film in the vertical direction thereof.
Further, the plane of the metal film is perpendicular to the plane of the base layer.
Further, the projection of the metal film on the end face of the core layer is the same as the size and shape of the end face of the core layer.
Further, the distance from the two ends of the core layer to the vertex of the included angle is equal.
Further, the thickness of the metal film is in the range of 0.2 to 2 nm.
The technical scheme provided by the invention has the following beneficial effects:
a. the light beam propagation direction in the optical waveguide is changed, and the reflection efficiency is enhanced;
b. the layout space is saved, and the layout of the optical back plate integrated optical assembly is more reasonable.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a curved waveguide with a metal film according to an embodiment of the present invention;
fig. 2 is a schematic optical path diagram of a curved waveguide with a metal film according to an embodiment of the present invention.
Wherein the reference numerals are respectively: 1-a substrate layer, 11-an outer side, 12-an inner side, 13-a metal film, 2-an optical waveguide layer.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, apparatus, article, or device that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or device.
In one embodiment of the present invention, a bending waveguide with a metal film is provided, referring to fig. 1, including a substrate layer 2 and an optical waveguide layer 1, where the substrate layer 2 serves as a substrate of the optical waveguide layer 1, the optical waveguide layer 1 includes an upper cladding layer, a core layer and a lower cladding layer, the upper cladding layer and the lower cladding layer respectively cover a top surface and a bottom surface of the core layer, the core layer is continuous on a plane where the substrate layer 2 is located and forms an included angle, an outer side surface 11 of the core layer at a vertex of the included angle is a planar structure and is coated with a metal film 13, a plane where the metal film 13 is located is perpendicular to a bisector of the included angle, and the metal film 13 is equivalent to form a plane mirror for changing a light beam transmission direction and enhancing light reflection efficiency.
In one embodiment of the invention, the core layer forms a 90 ° angle in the plane of the substrate layer 2, see fig. 2, so that the inner side 12 of the core layer at the vertex of its included angle forms a 90 ° angle, and the inner side 12 forms a 45 ° angle with the plane of the metal film 13.
The core layer is of a strip structure, the distances from two ends of the core layer to the vertex of the included angle are equal, and the cross sections of the core layer at the two sides of the vertex of the included angle are the same in size and shape;
the plane of the metal film 13 is perpendicular to the plane of the substrate layer 2, the projection of the metal film 13 on the end face of the core layer has the same size and shape as the end face of the core layer, the length (i.e. the height) of the metal film 13 in the vertical direction is equal to the thickness of the core layer, and the thickness of the metal film 13 is 0.2-2nm, preferably 1 nm. The inner side surface 12 and the outer side surface 11 refer to an outer side surface and an inner side surface of the core layer, and are preferably perpendicular to the base layer 2.
In one embodiment of the present invention, the bending waveguide includes a substrate layer and an optical waveguide layer, the optical waveguide layer is formed by covering a middle core layer with upper and lower cladding layers, the cladding layers covering the core layer are made of the same material, the core layer is a strip structure forming a 90 ° right angle, and the outer side of the 90 ° right angle is a 45 ° plane structure, and a metal film is coated on the outer side of the plane to form a plane mirror, so as to increase the reflection efficiency. The light beam is input from one end of the waveguide, when the light beam passes through a right-angle corner, the transmission direction of the light beam is changed through a 45-degree plane structure, and the changed transmission direction and the original transmission direction are in the same plane and form an angle of 90 degrees, so that the functions of changing the transmission direction of the light beam by a 45-degree plane mirror, enhancing the light reflection efficiency and reducing the light transmission loss are realized. The thickness (i.e., height) of the core layer of the entire waveguide is the same in the same plane, and the widths of the waveguide core layers in the two directions forming a right angle are the same.
In one embodiment of the present invention, the optical waveguide layer includes a cladding layer and a core layer, wherein the core layer is wrapped in the cladding layer, the core layer is a special 90 ° right-angle bending waveguide, the outside of the right angle is designed to be a 45 ° plane, and a metal film is coated on the outside of the plane, and the coating of a metal film on the outside of the 45 ° plane can increase the reflection effect of the plane and improve the reflection efficiency of the planar structure. A beam of light is injected into one end of the optical waveguide, and the parallel beam of light is incident on a 45-degree plane coated with a metal film in the process of transmission in the optical waveguide, wherein the incident angle is 45 degrees, the reflection angle is equal to the incident angle and is also 45 degrees according to the reflection law of the light, and the included angle between the reflected light and the incident light is 90 degrees, so that the propagation direction of the beam of light in the optical waveguide is changed by 90 degrees.
The design scheme of the bent waveguide with the metal film provided by the invention aims at the defect of limitation of curvature radius of the S-shaped bent waveguide, and provides a right-angle bent waveguide structure based on a 45-degree planar micro-mirror, wherein the outer side of a 90-degree right angle is designed into a 45-degree planar structure, so that the transmission direction of light can be changed, and the loss is reduced relative to the S-shaped bent structure. The mechanism can reduce relative loss, and make the layout of the optical backplane integrated optical assembly more reasonable, thereby promoting the development of backplane optical interconnection technology.
The bent waveguide with the metal film provided by the invention introduces a 45-degree plane at the right-angle turning position of the waveguide by using the plane reflection principle, can effectively change the transmission direction of incident beams by 90 degrees, and reduces the bending loss relative to an S-shaped bent waveguide; the structure is coated with a layer of metal film on the outer side of a 45-degree plane to increase the light reflection efficiency and further reduce the loss.
In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of other elements or steps than those listed in a claim.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The utility model provides a bending waveguide with metallic film, its characterized in that, includes stratum basale (2) and optical waveguide layer (1), stratum basale (2) conduct the substrate of optical waveguide layer (1), optical waveguide layer (1) includes overcladding, sandwich layer and undercladding, the overcladding with the undercladding covers respectively the top surface and the bottom surface of sandwich layer, the sandwich layer is in it is continuous and form the contained angle on the plane at stratum basale (2) place, lateral surface (11) of sandwich layer at its contained angle summit is planar structure and coating have metallic film (13), the plane at metallic film (13) place with the angular bisector of contained angle is perpendicular.
2. The curved waveguide with metal film according to claim 1, characterized in that the core layer forms a 90 ° angle in the plane of the substrate layer (2).
3. The curved waveguide with metal film according to claim 2, wherein the inner side (12) of the core layer at the vertex of its angle forms an angle of 90 °, said inner side (12) forming an angle of 45 ° with the plane of the metal film (13).
4. The curved waveguide with metal film as claimed in claim 1, wherein said core layer has the same size and shape of cross section at both sides of the vertex of the included angle.
5. The curved waveguide with metal film as claimed in claim 1, wherein the core layer is a stripe structure.
6. The curved waveguide with a metal film according to claim 1, wherein the thickness of the core layer is equal to the length of the metal film (13) in the vertical direction thereof.
7. The curved waveguide with metal film according to claim 1, characterized in that the plane of the metal film (13) is perpendicular to the plane of the substrate layer (2).
8. The curved waveguide with metal film as claimed in claim 4, wherein the projection of the metal film (13) on the core end face is the same size shape as the core end face.
9. The curved waveguide with metal film as claimed in claim 1, wherein the distance from both ends of the core layer to the vertex of the included angle is equal.
10. The curved waveguide with metal film according to claim 1, characterized in that the thickness of the metal film (13) is in the range of 0.2-2 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011428458.9A CN112415658A (en) | 2020-12-09 | 2020-12-09 | Curved waveguide with metal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011428458.9A CN112415658A (en) | 2020-12-09 | 2020-12-09 | Curved waveguide with metal film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112415658A true CN112415658A (en) | 2021-02-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011428458.9A Pending CN112415658A (en) | 2020-12-09 | 2020-12-09 | Curved waveguide with metal film |
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| Country | Link |
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| CN (1) | CN112415658A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1336739A (en) * | 2001-07-07 | 2002-02-20 | 浙江大学 | Inner total reflective waveguide array grating device based on silicon on insulator (SOI) and its manufacture |
| CN106253057A (en) * | 2016-09-30 | 2016-12-21 | 青岛海信宽带多媒体技术有限公司 | A kind of Laser Devices |
-
2020
- 2020-12-09 CN CN202011428458.9A patent/CN112415658A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1336739A (en) * | 2001-07-07 | 2002-02-20 | 浙江大学 | Inner total reflective waveguide array grating device based on silicon on insulator (SOI) and its manufacture |
| CN106253057A (en) * | 2016-09-30 | 2016-12-21 | 青岛海信宽带多媒体技术有限公司 | A kind of Laser Devices |
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Application publication date: 20210226 |
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