CN112414582A

CN112414582A - Micro-nano temperature sensor based on rare earth nano particles and surface plasmon polariton

Info

Publication number: CN112414582A
Application number: CN202011431842.4A
Authority: CN
Inventors: 李慧; 刘月臣; 任常愚; 姜洪喜; 丁红伟; 李娜; 石宏新; 金永君; 田雪松
Original assignee: Heilongjiang University of Science and Technology
Current assignee: Heilongjiang University of Science and Technology
Priority date: 2020-12-02
Filing date: 2020-12-02
Publication date: 2021-02-26
Anticipated expiration: 2040-12-02
Also published as: CN112414582B

Abstract

The invention relates to a micro-nano temperature sensor based on rare earth nanoparticles and surface plasmon polaritons. At present, the traditional thermometers include thermocouple thermometers, thermal resistance thermometers, semiconductor thermometers, capacitance thermometers, etc., however, these thermometers have a common point in the use process that the thermometers need to be in direct contact with the measured object, and the purpose of measuring the temperature is achieved by heat balance between the thermometers and the measured object through heat conduction. A micro-nano temperature sensor based on rare earth nanoparticles and surface plasmon polaritons comprises a 980nm laser (1), a grating (2) arranged behind the 980nm laser (1) and a temperature control box (4) arranged behind the grating (2), wherein the temperature control box (4) contains waveguides (3) with rare earth nanoparticles and surface plasmon polaritons, and rectangular cavities of the waveguides (3) with the rare earth nanoparticles and the surface plasmon polaritons are respectively coupled with the grating (2) and a spectrometer (5) through single-mode fibers (6).

Description

Micro-nano temperature sensor based on rare earth nano particles and surface plasmon polariton

Technical Field

The invention relates to a micro-nano temperature measurement sensor. The sensitivity of the temperature measurement determines the accuracy of the temperature measurement, the core part of which is the temperature sensor.

Background

Temperature is a very basic thermodynamic state parameter, and its measurement is of great importance in industrial production, scientific research, life medicine, and even in people's daily life. Conventional thermometers include thermocouple thermometers, thermal resistance thermometers, semiconductor thermometers, capacitance thermometers, thermal noise thermometers, and the like. However, the common point of these thermometers is that the thermometer needs to be in direct contact with the measured object, and the heat balance between the two is achieved through heat conduction to achieve the purpose of temperature measurement, which is called thermal contact temperature detection. Today, with rapid development of technology, both scientific research, industrial production and life medicine place higher and more complex demands on temperature control and measurement. In many cases, such thermometers fail to meet measurement requirements at all. For example, temperature measurement in corrosive environments, electromagnetic interference environments, temperature measurement of tiny electronic components, cells, fast moving objects, and the like. Therefore, it is of great practical significance to develop a non-contact temperature sensor that has high spatial and temperature resolution and can achieve fast response. With the development of miniaturization of devices, micro-nano structure devices play a crucial role. With the development of nanotechnology, Surface Plasmon Polaritons (SPP) have been rapidly developed. The surface plasmon has the advantage of breaking through the limit of diffraction limit, is considered to be one of effective carriers for realizing a new generation of integrated nano-photonic devices, and is an important component of nano-photonics. The rare earth fluorescent material plays an important role in photoelectric devices, and in the field of temperature sensing, the rare earth fluorescent temperature measurement has obvious advantages: (1) non-destructive of the object; (2) the accuracy is high; (3) can be measured in a strong electromagnetic field environment. At present, the fluorescence intensity ratio is mainly used for measuring the environmental temperature, and the method is convenient and quick, has no pollution to the environment, and has small measurement error and high repeatability. The surface plasma of the metal-rare earth nanoparticle-metal structure can also be well applied to temperature sensing, and compared with the traditional temperature sensor, the surface plasma sensor has the advantages of small size, easiness in integration and high sensitivity.

Disclosure of Invention

The invention aims to solve the technical problem of providing a high-sensitivity micro-nano temperature sensor.

In order to solve the problems, the technical scheme adopted by the invention is as follows:

a micro-nano temperature sensor based on rare earth nanoparticles and surface plasmon polaritons is characterized in that: it includes 980nm laser instrument (1), sets up grating (2) behind 980nm laser instrument (1) and setting are in temperature control box (4) behind the grating, temperature control box (4) in contain tombarthite nanoparticle and surface plasmon polariton structure's waveguide (3), tombarthite nanoparticle and surface plasmon polariton structure's waveguide (3) the rectangular cavity respectively with grating (2) with spectrometer (5) are through single mode fiber (6) coupling connection.

The micro-nano temperature sensor based on the rare earth nano particles and the surface plasmon polaritons is characterized in that the 980nm laser (1) is connected with the grating (2) through a single-mode optical fiber (6).

The micro-nano temperature sensor based on the rare earth nanoparticles and the surface plasmon polaritons is characterized in that the waveguide (3) of the rare earth nanoparticles and the surface plasmon polaritons is composed of a silicon dioxide substrate, a rectangular cavity etched on metal gold and an annular cavity, and the rare earth nanoparticles are uniformly placed in the cavity.

Adopt the produced effect of above-mentioned technical scheme to lie in:

1. the micro-nano temperature sensor based on the rare earth nanoparticles and the surface plasmon polaritons comprises silicon dioxide, metal gold, a 980nm laser, fluoride rare earth nanoparticles synthesized by a hydrothermal method, a grating, a single-mode fiber and a spectrometer. Silicon dioxide is used as a substrate, metal gold with a certain thickness is sprayed on the substrate, a rectangular waveguide is etched on the metal gold at a position away from the bottom edge by a certain width through a photoetching method, two rectangular cavities with the same width and height and a circular cavity are coupled on the side of the rectangular waveguide, and a circular cavity is coupled between the two side-coupled rectangular cavities and is equidistant to the two side-coupled cavities. And (3) placing the synthesized rare earth nanoparticles into the etched structure, and encapsulating the structure in a temperature control box. Two ends of the horizontal rectangular cavity are respectively connected with the grating and the spectrometer through two single-mode fibers, and the grating is connected with the 980nm laser.

An 2.980 nm laser is coupled to a grating through a single-mode fiber, the grating is coupled to side coupling rectangular and disc resonant cavities of the rare earth nanoparticles and the surface plasmons and then enters a rare earth nanoparticle and surface plasmons structure, SPR is generated through a long and narrow rectangular waveguide, the light emitting characteristic of the rare earth nanoparticles is enhanced, the light emitting performance of the rare earth particles can be improved, and the temperature range of measurement can be enlarged. When the optical fiber is transmitted to the resonant cavity, the optical fiber resonates with the vertical rectangular waveguide to form a bright mode (continuous state), the disc cavity does not resonate to generate a dark mode (discrete state), the bright mode and the dark mode interfere with each other to generate a Fano line type of visible light wavelength, the Fano line type is measured by the spectrometer 5, and the Fano line types at different temperatures can be obtained by adjusting the temperature of the temperature control box 4.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a Fano-line graph at different temperatures;

in the figure: 1. the device comprises a 980nm laser, 2, a grating, 3, a waveguide of a rare earth nano particle and surface plasmon polariton structure, 4, a temperature control box, 5, a spectrometer, 6 and a single-mode optical fiber.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail and fully with reference to the accompanying drawings and specific embodiments.

The temperature sensor based on rare earth nano particle-surface plasmon polariton is shown in fig. 1, the embodiment adopts an etching mode, a layer of metal gold is plated on silicon dioxide, the structure is obtained through etching, the size of the silicon dioxide is respectively 2mm x 2mm in x and y directions, the length rectangular waveguide is 50nm in y direction, the x direction is 4mm, the x direction of two rectangular cavities coupled at the side is 50nm, the y direction is 460nm, the diameter of a disc is 300nm, and the distance between a straight waveguide and a side coupling cavity is 20 nm. Synthesis of NaLuF4 by hydrothermal method: er3+/Yb3+ nano-particles, rare earth nano-particles are placed on the etched metal structure by a vapor deposition method. And 980nm laser is coupled to the micro-nano structure through a grating, the output end of the micro-nano structure is coupled to a spectrometer through an optical fiber, and the transmission spectrum of the micro-nano structure is measured. The temperature is regulated by a temperature control box. When the rare earth element is Er3+ ion, the Fano line type peak of the transmission spectrum at normal temperature is 540nm, the wave trough is 558nm, and as shown in figure 2, when the temperature is changed by 1K, the wavelength is shifted by 2 nm. The temperature sensing with high sensitivity can be well realized.

Claims

1. A micro-nano temperature sensor based on rare earth nanoparticles and surface plasmon polaritons is characterized in that: the laser comprises a 980nm laser, a grating arranged behind the 980nm laser and a temperature control box arranged behind the grating, wherein the temperature control box contains waveguides of rare earth nanoparticles and surface plasmon polariton structures, and rectangular cavities of the waveguides of the rare earth nanoparticles and the surface plasmon polariton structures are respectively connected with the grating and a spectrometer through single-mode fiber coupling.

2. The micro-nano temperature sensor based on the rare earth nanoparticles and the surface plasmon according to claim 1, which is characterized in that: the 980nm laser is connected with the grating through a single-mode optical fiber.

3. The micro-nano temperature sensor based on the rare earth nanoparticles and the surface plasmon according to claim 1, which is characterized in that: the rare earth nano particles and the waveguide with the surface plasmon polariton structure are composed of a silicon dioxide substrate, a rectangular cavity etched on metal gold and an annular cavity, and the rare earth nano particles are uniformly placed in the cavity.