CN112379580A - Developing solution constant temperature pipeline system - Google Patents
Developing solution constant temperature pipeline system Download PDFInfo
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- CN112379580A CN112379580A CN202011245802.0A CN202011245802A CN112379580A CN 112379580 A CN112379580 A CN 112379580A CN 202011245802 A CN202011245802 A CN 202011245802A CN 112379580 A CN112379580 A CN 112379580A
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- constant temperature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/24—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element having a resistance varying with temperature, e.g. a thermistor
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- General Physics & Mathematics (AREA)
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- Automation & Control Theory (AREA)
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Abstract
The invention relates to a developing solution constant-temperature pipeline system, which comprises a constant-temperature box, a water outlet pipe, a water return pipe and a developing solution pipe, one end of the lower part of the constant temperature box is connected with the water outlet pipe, the other end of the lower part of the constant temperature box is connected with the water return pipe, a water replenishing valve is fixed on the front surface of the constant temperature box, a first liquid separation switch is fixed at one end of the water outlet pipe, the second liquid dividing switch is matched with the water outlet pipe, a spray head is fixed at the end part of the developing liquid pipe and arranged below the second liquid dividing switch, the developing solution constant-temperature pipeline system can automatically control the temperature in the constant-temperature box, can remind workers to replenish water in the constant-temperature box in time through the warning device, can adjust the pressure pump, the water circulation speed can be controlled, the temperature of the input developing solution is approximately consistent with that of the sprayed developing solution, and the stability of the developing solution is further improved.
Description
Technical Field
The invention relates to the technical field of semiconductor spin coating development, in particular to a developing solution constant-temperature pipeline system.
Background
As is well known, the existing developer solution constant temperature pipeline system is an auxiliary device for semiconductor spin coating development, and is widely used in the technical field of semiconductor spin coating development.
For example, the patent publication "CN 105319872B" is named as: the invention discloses a developing solution constant temperature maintaining pipeline system, which belongs to the field of semiconductor spin coating development, and particularly relates to a developing solution constant temperature maintaining pipeline system.A heat preservation water circulation system has an outlet which enters a developing unit through a water inlet pipe and is connected to a liquid collecting block, a developing solution pipe connected with a developing solution source enters the developing unit and is sequentially connected with the liquid collecting block, a water-liquid separation type liquid medicine valve and a liquid separating block, a developing solution pipe between the liquid collecting block and the water-liquid separation type liquid medicine valve and a developing solution pipe between the liquid separating block and the water-liquid separation type liquid medicine valve are both provided with heat preservation water sleeves, and heat preservation water provided by the heat preservation water circulation system flows between the heat preservation water sleeves and the developing solution pipe; the heat preservation water flowing out of the liquid separation block enters one cavity of the nozzle and is communicated with the heat preservation water circulation system through a water return pipe, and the developing solution flowing out of the liquid separation block enters the other cavity of the nozzle and is sprayed to the surface of the wafer. The invention ensures that the developing solution pipe is completely soaked in the heat insulation water after entering the developing unit, thereby avoiding the developing solution pipe from being exposed outside and reducing the influence of other factors on the developing solution.
The existing developing solution constant-temperature maintaining pipeline system finds that the developing solution pipe is in the constant-temperature maintaining pipeline system, the temperature of the developing solution at the initial developing solution pipe after passing through a long pipeline is different from the temperature of the developing solution during spraying, and therefore the use limitation of the developing solution constant-temperature maintaining pipeline system is high.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a developing solution constant-temperature pipeline system capable of accelerating warm water circulation.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme: the developing solution constant temperature pipeline system comprises a constant temperature box, a water outlet pipe, a water return pipe and a developing solution pipe, wherein one end of the lower part of the constant temperature box is connected with the water outlet pipe, the other end of the lower part of the constant temperature box is connected with the water return pipe, a water replenishing valve is fixedly arranged on the front surface of the constant temperature box, the water replenishing valve extends into the constant temperature box, a heater and a first temperature sensor are fixedly arranged in the constant temperature box, the first temperature sensor is connected with the heater, the first temperature sensor is arranged on the periphery of the heater, a pressure pump is fixedly arranged at one end of the upper part of the constant temperature box and is connected with the constant temperature box through a pipeline, a pressure relief valve is fixedly arranged on the constant temperature box and is fixedly arranged above the water replenishing valve, a first solution dividing switch is fixedly arranged at one end of the water outlet pipe, and, the end part of the developing liquid pipe is fixedly provided with a second liquid dividing switch, the second liquid dividing switch is matched with the water outlet pipe, and the end part of the developing liquid pipe is fixedly provided with a spray head.
In order to better perform the spraying function of the end spray head of the developer pipe, the spray head is arranged below the second liquid separation switch.
In order to realize better control effect, a PLC (programmable logic controller) is fixed on the thermostat, the PLC is arranged on the periphery of the pressure release valve, and the heater is connected with the PLC.
In order to realize better protection effect, an exhaust valve is fixed on the other side above the constant temperature box.
In order to facilitate the understanding of the liquid amount in the incubator, the invention has the improvement that a liquid level sensor is arranged in the incubator and is connected with the PLC.
In order to facilitate understanding of the water temperature at the liquid outlet, the invention has the improvement that a second temperature sensor is fixed on the second liquid dividing switch and is connected with the PLC.
In order to remind workers of timely water replenishing, the constant temperature box is improved in that a warning device is fixed on the constant temperature box, the warning device is arranged on the periphery of the PLC, and the warning device is connected with the PLC.
In order to warn workers through light and sound, the warning device is improved to comprise a buzzer and a warning lamp, wherein the buzzer is arranged on the periphery of the warning lamp.
In order to facilitate understanding of the pressure in the incubator, the invention improves that a pressure gauge is fixed on the pipeline.
In order to better realize the constant temperature function, the pipe section of the developing liquid pipe positioned in the water outlet pipe is a straight section, and the water return pipe is a multi-bending pipe section.
(III) advantageous effects
Compared with the prior art, the invention provides a developing solution constant-temperature pipeline system, which has the following beneficial effects:
this developer solution constant temperature pipe-line system, temperature in can the automatic control thermostated container can remind the staff in time to carry out the moisturizing in the thermostated container through warning device, through adjusting the force pump, can control water circulation speed, makes the developer solution temperature of input and spun developer solution temperature nearly unanimous, the stability of further improvement developer solution.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1 according to the present invention;
FIG. 3 is a cross-sectional view of a structural incubator of the present invention.
In the figure: 1. a thermostat; 2. a water outlet pipe; 3. a water return pipe; 4. a developer tube; 5. a water replenishing valve; 6. a heater; 7. a first temperature sensor; 8. a pressure pump; 9. a pipeline; 10. a pressure relief valve; 11. a PLC controller; 12. an exhaust valve; 13. a first liquid separation switch; 14. a spray head; 15. a liquid level sensor; 16. a second temperature sensor; 17. an alarm; 18. a buzzer; 19. a warning light; 20. a pressure gauge; 21. and a second liquid dividing switch.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the developer solution constant temperature pipeline system includes a constant temperature box 1, a water outlet pipe 2, a water return pipe 3 and a developer solution pipe 4.
One end of the lower portion of the constant temperature box 1 is connected with the water outlet pipe 2, and the other end of the lower portion of the constant temperature box 1 is connected with the water return pipe 3. Outlet pipe 2 and return pipe 3 are both connected to the lower surface of incubator 1, so that both ends are located on the lower surface of incubator 1, which is also an advantageous location for designing a corresponding water pipe.
A water replenishing valve 5 is fixed on the front face of the constant temperature box 1, and the water replenishing valve 5 extends into the constant temperature box 1. And the water replenishing valve 5 is used for replenishing water to the constant temperature box 1 in time. The control of the water replenishing valve 5 can be realized by matching with a corresponding liquid level sensor of the thermostat 1.
A heater 6 and a first temperature sensor 7 are fixed in the incubator 1, the first temperature sensor 7 is connected with the heater 6, and the first temperature sensor 7 is arranged on the periphery side of the heater 6. The first temperature sensor 7 may be a thermistor or a thermocouple or the like. Fig. 3 shows that the heater 6 is disposed at a position below the circumferential side of the first temperature sensor 7.
A pressure pump 8 is fixed at one end above the thermostat 1, and the pressure pump 8 is connected with the thermostat 1 through a pipeline 9. The pressure pump 8 is used to monitor and display the corresponding pressure.
A pressure relief valve 10 is fixed on the constant temperature box 1, and the pressure relief valve 10 is fixed above the water supply valve 5. The pressure relief valve 10 is directly arranged above the water replenishing valve 5, so that the pressure relief effect can be better realized. Meanwhile, the water replenishing valve 5 and the pressure release valve 10 can also realize better circulation effect, and the warm water in the constant temperature box 1 is driven to rapidly flow when the pressure is released.
A PLC (programmable logic controller) 11 is fixed on the incubator 1, and the PLC 11 is arranged on the peripheral side of the pressure release valve 10. The PLC controller 11 is a control center of the oven 1, and electrical control of a plurality of related circuits is realized by the PLC controller 11.
The heater 6 is connected with the PLC controller 11. The heater 6 is operated and stopped, and a signal is supplied from the PLC controller 11.
An exhaust valve 12 is fixed on the other side above the thermostat 1, and the exhaust valve 12 is further positioned above the pressure release valve 10.
One end of the water outlet pipe 2 is fixed with a first liquid dividing switch 13, and the developing liquid pipe 4 enters the water outlet pipe 2 through the first liquid dividing switch 13. In which fig. 2 shows an enlarged structure of the first tapping switch 13. The water outlet pipe 2 passes through the first liquid separating switch 13. The first tapping switch 13 is arranged right at the corner between two sections of the outlet pipe 2.
The end part of the developing liquid pipe 4 is fixed with a second liquid distribution switch 21, the second liquid distribution switch 21 is matched with the water outlet pipe 2, and the end part of the developing liquid pipe 4 is fixed with a spray head 14. As shown in FIG. 1, the developing solution pipe 4 with this structure is directly a straight pipe and is located in the water outlet pipe 2 for constant temperature, which is beneficial to the corresponding constant temperature effect. Meanwhile, the developing tube 4 is positioned on the transverse position, so that the constant temperature effect is better.
The spray head 14 is arranged below the second liquid separation switch 21, and the arrangement enables the spray head 14 to more directly utilize the developer solution after being subjected to constant temperature, and the spray head 14 arranged vertically downwards can fully utilize the corresponding gravity action as shown in fig. 1.
Referring to fig. 3, a liquid level sensor 15 is disposed in the incubator 1, and the liquid level sensor 15 is connected to the PLC controller 11 to facilitate understanding of the liquid amount in the incubator 1. As already mentioned, the fill level sensor 15 can be coupled to the water replenishment valve 5.
Referring to fig. 1, a second temperature sensor 16 is fixed on the second tapping switch 21, and the second temperature sensor 16 is connected to the PLC controller 11, so as to facilitate understanding of the water temperature at the tapping hole (mainly, understanding of the temperature of the warm water provided by the constant temperature pipe section when the developer solution pipe 4 leaves the constant temperature pipe section). The water temperature of the liquid outlet can be fed back to the PLC 11 in a wireless communication mode.
Be fixed with alarm 17 on thermostated container 1, alarm 17 sets up 11 week sides of PLC controller, alarm 17 with PLC controller 11 is connected, in order to remind the staff in time to mend water, and when especially outside moisturizing device can't provide corresponding water source for replenishing valve 5, alarm 17 can provide the assurance for entire system's safe operation.
The alarm 17 comprises a buzzer 18 and a warning lamp 19, wherein the buzzer 18 is arranged on the periphery of the warning lamp 19 and used for warning staff through light and sound.
A pressure gauge 20 is fixed to the pipe 9 to facilitate understanding of the pressure inside the incubator 1. The pressure gauge 20 is also used in conjunction with the corresponding pressure pump 8.
In this embodiment, the section of the developer solution tube 4 in the water outlet tube 2 is a straight section, and the water return tube 3 is a multi-bend section, where the multi-bend section is formed by bending more than three sections. The dividing position of the water outlet pipe 2 and the water return pipe 3 can be just selected as the position of the second liquid dividing switch 21. At this time, the developer tube 4 is located in the straight tube section of the transverse part of the water outlet tube 2, so that the constant temperature effect on the developer tube 4 is more stable and reliable. The water return pipe 3 is specially designed to be a corresponding multi-bending pipe section (instead of a simple two-section structure of ninety degrees like the water outlet pipe 2), and is specifically designed to be a four-section bending pipe section, so that the return speed is reduced, and the constant temperature process is slower and gentler.
To sum up, this developer solution constant temperature pipe-line system, when using, set for certain temperature value, heater 6 heats under PLC controller 11's control, first temperature sensor 7 gives PLC controller 11 with the signal transmission and makes heater 6 stop heating, advance outlet pipe 2 and wet return 3 and realize the hydrologic cycle, developer pipe 4 gets into constant temperature circulation system and makes developer solution spout from shower nozzle 14 through first minute liquid switch 13 and through second minute liquid switch 21, second minute liquid switch 21 control developer pipe 4 terminal temperature, developer pipe 4 terminal temperature is big with the initial difference in temperature, increase the circulation rate of warm water in the constant temperature circulation system through the pressurization of force pump 8, make developer pipe 4 temperature keep unanimous.
The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a developer solution constant temperature pipe-line system, includes thermostated container (1), outlet pipe (2), wet return (3) and developer solution pipe (4), its characterized in that: thermostat (1) below one end with outlet pipe (2) is connected, thermostat (1) below the other end with wet return (3) are connected, thermostat (1) openly is fixed with water supply valve (5), water supply valve (5) extend to in thermostat (1), thermostat (1) internal fixation has heater (6) and first temperature sensor (7), first temperature sensor (7) with heater (6) are connected, first temperature sensor (7) set up heater (6) week side, thermostat (1) top one end is fixed with force pump (8), force pump (8) pass through pipeline (9) with thermostat (1) is connected, be fixed with relief valve (10) on thermostat (1), relief valve (10) are fixed water supply valve (5) top, outlet pipe (2) one end is fixed with first minute liquid switch (13), developer tube (4) pass through first minute liquid switch (13) gets into outlet pipe (2), developer tube (4) end fixing has second minute liquid switch (21), second minute liquid switch (21) with outlet pipe (2) phase-match, developer tube (4) end fixing has shower nozzle (14).
2. The developer solution constant temperature piping system according to claim 1, characterized in that: the spray head (14) is arranged below the second liquid separation switch (21).
3. The developer solution constant temperature piping system according to claim 1, characterized in that: a PLC (programmable logic controller) (11) is fixed on the thermostat (1), the PLC (11) is arranged on the peripheral side of the pressure release valve (10), and the heater (6) is connected with the PLC (11).
4. The developer solution constant temperature piping system according to claim 1, characterized in that: an exhaust valve (12) is fixed on the other side above the constant temperature box (1).
5. The developer solution constant temperature piping system according to claim 3, characterized in that: a liquid level sensor (15) is arranged in the thermostat (1), and the liquid level sensor (15) is connected with the PLC (11).
6. The developer solution constant temperature piping system according to claim 3, characterized in that: and a second temperature sensor (16) is fixed on the second liquid separation switch (21), and the second temperature sensor (16) is connected with the PLC (11).
7. The developer solution constant temperature piping system according to claim 3, characterized in that: be fixed with alarm (17) on thermostated container (1), alarm (17) set up PLC controller (11) week side, alarm (17) with PLC controller (11) are connected.
8. The developer solution constant temperature piping system according to claim 7, characterized in that: the alarm (17) comprises a buzzer (18) and an alarm lamp (19), wherein the buzzer (18) is arranged on the periphery of the alarm lamp (19).
9. The developer solution constant temperature piping system according to claim 1, characterized in that: and a pressure gauge (20) is fixed on the pipeline (9).
10. The developer solution constant temperature piping system according to claim 1, characterized in that: the developing liquid pipe (4) is positioned in the pipe section in the water outlet pipe (2) and is a straight section, and the water return pipe (3) is a multi-bending pipe section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011245802.0A CN112379580A (en) | 2020-11-10 | 2020-11-10 | Developing solution constant temperature pipeline system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011245802.0A CN112379580A (en) | 2020-11-10 | 2020-11-10 | Developing solution constant temperature pipeline system |
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| Publication Number | Publication Date |
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| CN112379580A true CN112379580A (en) | 2021-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011245802.0A Pending CN112379580A (en) | 2020-11-10 | 2020-11-10 | Developing solution constant temperature pipeline system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114077169A (en) * | 2021-11-17 | 2022-02-22 | 沈阳芯达半导体设备有限公司 | Developer heat exchange system |
-
2020
- 2020-11-10 CN CN202011245802.0A patent/CN112379580A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114077169A (en) * | 2021-11-17 | 2022-02-22 | 沈阳芯达半导体设备有限公司 | Developer heat exchange system |
| CN114077169B (en) * | 2021-11-17 | 2023-07-21 | 沈阳芯达半导体设备有限公司 | Developer solution heat exchange system |
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