CN112374460A - Method and device for obtaining ultrapure hydrogen - Google Patents

Method and device for obtaining ultrapure hydrogen Download PDF

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Publication number
CN112374460A
CN112374460A CN202011250724.3A CN202011250724A CN112374460A CN 112374460 A CN112374460 A CN 112374460A CN 202011250724 A CN202011250724 A CN 202011250724A CN 112374460 A CN112374460 A CN 112374460A
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gas
ultrapure hydrogen
hydrogen
obtaining
temperature adsorption
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李青青
孙宁
苗珑耀
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Suzhou Xinglu Air Separation Plant Science And Technology Development Co ltd
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Suzhou Xinglu Air Separation Plant Science And Technology Development Co ltd
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/508Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by selective and reversible uptake by an appropriate medium, i.e. the uptake being based on physical or chemical sorption phenomena or on reversible chemical reactions
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/52Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with liquids; Regeneration of used liquids
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0415Purification by absorption in liquids
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/042Purification by adsorption on solids
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465Composition of the impurity
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465Composition of the impurity
    • C01B2203/047Composition of the impurity the impurity being carbon monoxide
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465Composition of the impurity
    • C01B2203/0475Composition of the impurity the impurity being carbon dioxide
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465Composition of the impurity
    • C01B2203/0495Composition of the impurity the impurity being water

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The invention relates to a method and a device for obtaining ultrapure hydrogen. The method for obtaining the ultrapure hydrogen comprises the following steps: and sequentially filtering particle impurities in the industrial hydrogen, adsorbing and removing carbon dioxide and water at normal temperature, washing and removing carbon monoxide and argon by using liquid nitrogen, and adsorbing nitrogen and oxygen at low temperature to obtain the ultrapure hydrogen. The device for obtaining the ultrapure hydrogen mainly comprises: a filter for filtering particulate impurities from the industrial hydrogen; a normal temperature adsorption system for adsorbing and removing carbon dioxide and water at normal temperature; a liquid nitrogen washing tower for washing and removing carbon monoxide and argon by liquid nitrogen; a cryoadsorption system for cryo-adsorbing nitrogen and oxygen to obtain ultrapure hydrogen. The device for obtaining ultrapure hydrogen further comprises a cooler, a heat exchanger and two heaters. The method has the advantages of simple process, low cost, environmental protection, high efficiency, low operation requirement, good purification effect and capability of stably obtaining high-flow ultrapure hydrogen.

Description

Method and device for obtaining ultrapure hydrogen
Technical Field
The invention relates to the technical field of gas purification, in particular to a method and a device for purifying industrial hydrogen to obtain ultrapure hydrogen.
Background
The ultra-pure hydrogen is widely used in the fields of electronic information, semiconductors, LEDs, polycrystalline silicon photovoltaic power generation and the like. The methods for obtaining ultrapure hydrogen (6N) are currently in common use: (1) palladium tube diffusion method; (2) pressure swing adsorption; (3) ultra-low temperature adsorption method. The palladium tube diffusion method and the pressure swing adsorption method require high pressure of front-end hydrogen and are not easy to obtain stable and large-flow ultrapure hydrogen; the ultralow temperature adsorption method has low operating pressure, and can easily obtain stable and large-flow ultrapure hydrogen, but the adsorbent is selective for impurity gas, so that the impurity is difficult to completely remove to obtain the ultrapure hydrogen.
Disclosure of Invention
The invention aims to provide a method which has low operation requirement and good purification effect and can stably obtain high-flow ultrapure hydrogen.
In order to achieve the purpose, the invention adopts the technical scheme that:
a method for obtaining ultrapure hydrogen gas, which is used for purifying industrial hydrogen to obtain the ultrapure hydrogen gas, wherein the method for obtaining the ultrapure hydrogen gas comprises the following steps: filtering particle impurities in the industrial hydrogen to obtain primary intermediate gas, adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas, washing and removing carbon monoxide and argon in the secondary intermediate gas by using liquid nitrogen to obtain tertiary intermediate gas, and adsorbing nitrogen and oxygen in the tertiary intermediate gas at low temperature to obtain ultrapure hydrogen.
Preferably, the primary intermediate gas is cooled and then adsorbed at normal temperature.
Preferably, the secondary intermediate gas is cooled and then washed by liquid nitrogen; reheating the ultrapure hydrogen, and sending the reheated ultrapure hydrogen as a product; waste liquid nitrogen generated by washing liquid nitrogen is reheated and used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
Preferably, the reheated waste nitrogen is heated again to be used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
Preferably, liquid nitrogen is used to provide the required refrigeration for the cryoadsorption.
The invention also provides a device which has lower operation requirement and good purification effect and can stably obtain high-flow ultrapure hydrogen, and the technical scheme is as follows:
an apparatus for obtaining ultrapure hydrogen gas for purification of industrial hydrogen to obtain ultrapure hydrogen gas, comprising:
a filter for filtering particulate impurities from the industrial hydrogen to obtain a primary intermediate gas;
the normal temperature adsorption system is used for adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas;
a liquid nitrogen washing tower which is used for washing and removing carbon monoxide and argon in the secondary intermediate gas by liquid nitrogen to obtain a tertiary intermediate gas;
and the low-temperature adsorption system is used for low-temperature adsorption of the nitrogen and the oxygen in the three-stage intermediate gas to obtain ultrapure hydrogen.
Preferably, the means for obtaining ultrapure hydrogen further comprises a cooler for cooling the primary intermediate gas.
Preferably, the device for obtaining ultrapure hydrogen further comprises a heat exchanger for cooling the secondary intermediate gas, reheating the ultrapure hydrogen, reheating the waste liquid nitrogen generated by the liquid nitrogen washing tower to obtain the waste nitrogen which is connected to the normal-temperature adsorption system and the low-temperature adsorption system and used as regeneration gas.
Preferably, the apparatus for obtaining ultrapure hydrogen further comprises:
the first heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the normal-temperature adsorption system to be used as regenerated gas;
and the second heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the low-temperature adsorption system to be used as regeneration gas.
Preferably, the low-temperature adsorption system is connected with liquid nitrogen for providing required cold for the low-temperature adsorption system.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages: the method has the advantages of simple process, low cost, environmental protection, high efficiency, low operation requirement, good purification effect and capability of stably obtaining high-flow ultrapure hydrogen.
Drawings
FIG. 1 is a flow chart of the method for obtaining ultrapure hydrogen of the present invention.
Fig. 2 is a schematic view of the apparatus for obtaining ultrapure hydrogen of the present invention.
In the above drawings: 1. a filter; 2. a cooler; 3. a normal temperature adsorption cylinder; 4. a first electric heater; 5. a heat exchanger; 6. a liquid nitrogen washing tower; 7. a low temperature adsorption cylinder; 8. a second electric heater.
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings to which the invention is attached.
The first embodiment is as follows: as shown in fig. 1, a method for obtaining ultrapure hydrogen gas for purifying industrial hydrogen to obtain ultrapure hydrogen gas comprises the following steps in sequence: filtering, cooling, normal temperature adsorption, cooling, liquid nitrogen washing and low temperature adsorption. The specific process is as follows:
first, industrial hydrogen (crude hydrogen) as a raw material is filtered to remove particulate impurities (including oil, dust, etc.) in the industrial hydrogen, to obtain a primary intermediate gas. Cooling the primary intermediate gas obtained by removing the particle impurities, and then adsorbing at normal temperature to remove carbon dioxide and water in the primary intermediate gas to obtain a secondary intermediate gas. And after cooling the secondary intermediate gas, washing and removing carbon monoxide and argon in the secondary intermediate gas by using liquid nitrogen to obtain a tertiary intermediate gas. And finally, adsorbing nitrogen and oxygen in the three-stage intermediate gas at low temperature to obtain ultrapure hydrogen, reheating the ultrapure hydrogen, and sending the reheated ultrapure hydrogen as a product.
In the method for obtaining the ultrapure hydrogen, the polluted nitrogen gas generated by washing the liquid nitrogen is reheated to become polluted nitrogen gas which is then used as the regeneration gas for normal-temperature adsorption and low-temperature adsorption, and the reheated polluted nitrogen gas can also be used as the regeneration gas for normal-temperature adsorption and low-temperature adsorption after being heated. Liquid nitrogen is used for providing cold energy for low-temperature adsorption.
Example two: as shown in fig. 2, the apparatus for obtaining ultrapure hydrogen gas, which is used for purifying industrial hydrogen to obtain ultrapure hydrogen gas, mainly comprises a filter 1, a normal temperature adsorption system, a liquid nitrogen washing tower 6, a low temperature adsorption system, a cooler 2, a heat exchanger 5, a first heater, and a second heater. The first heater and the second heater are both electric heaters, namely a first electric heater 4 and a second electric heater 8.
The filter 1 is used for filtering particulate impurities (including oil, dust and the like) in the industrial hydrogen to obtain primary intermediate gas, a gas inlet of the filter is connected with the industrial hydrogen (crude hydrogen), and a gas outlet of the filter outputs the primary intermediate gas.
The air inlet of the cooler 2 is connected with the air outlet of the filter 1, the cooler 2 is used for cooling first-stage intermediate gas, and the cooled first-stage intermediate gas is output from the air outlet of the cooler 2.
The gas inlet of the normal temperature adsorption system is connected with the gas outlet of the cooler 2, the normal temperature adsorption system adopts molecular sieve adsorption and is used for adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas, and the secondary intermediate gas is output from the gas outlet of the normal temperature adsorption system. The normal temperature adsorption system comprises two normal temperature adsorption cylinders 3 for alternately performing adsorption and regeneration, and the air inlet and the air outlet of the normal temperature adsorption cylinder 3 are respectively the air inlet and the air outlet of the normal temperature adsorption system.
And the liquid nitrogen washing tower 6 is used for washing and removing carbon monoxide and argon in the secondary intermediate gas by liquid nitrogen to obtain a tertiary intermediate gas. The gas outlet of the normal temperature adsorption system is connected to the gas inlet at the lower part of the liquid nitrogen washing tower 6 after passing through the heat exchanger 5, and the liquid nitrogen washing tower 6 is also provided with a liquid inlet at the upper part, a gas outlet at the top and a gas outlet at the bottom. Liquid nitrogen is input into a liquid inlet of the liquid nitrogen washing tower 6, after the liquid nitrogen washing is carried out in the liquid nitrogen washing tower 6, the liquid nitrogen becomes polluted nitrogen and is output from a gas outlet at the bottom, and the second-stage intermediate gas is subjected to carbon monoxide and argon removal to become third-stage intermediate gas and is output from a gas outlet at the top.
And the gas inlet of the low-temperature adsorption system is connected with the gas outlet at the top of the liquid nitrogen washing tower 6, and the low-temperature adsorption system is used for low-temperature adsorption of nitrogen and oxygen in the three-stage intermediate gas to obtain ultrapure hydrogen (6N) and outputting the ultrapure hydrogen from the gas outlet of the low-temperature adsorption system. The low-temperature adsorption system is also connected with liquid nitrogen for providing required cold for the low-temperature adsorption system. The low-temperature adsorption system comprises two low-temperature adsorption cylinders 7 for alternately carrying out adsorption and regeneration, and an air inlet and an air outlet of each low-temperature adsorption cylinder 7 are respectively an air inlet and an air outlet of the low-temperature adsorption system. The outlet of the cryoadsorption system is also connected to a heat exchanger 5.
An air outlet at the bottom of the liquid nitrogen washing tower 6 is divided into two paths after passing through the heat exchanger 5, and the two paths are respectively connected to an air inlet of the normal-temperature adsorption system and an air inlet of the low-temperature adsorption system, so that the polluted nitrogen is reheated and then sent to the normal-temperature adsorption system and the low-temperature adsorption system to be used as regenerated gas.
The first electric heater 4 is arranged between the heat exchanger 5 and an air inlet of the normal-temperature adsorption system and used for heating the reheated waste nitrogen and connecting the heated waste nitrogen into the normal-temperature adsorption system as regenerated gas. The second electric heater 8 is arranged between the heat exchanger 5 and an air inlet of the low-temperature adsorption system and used for heating the reheated waste nitrogen and connecting the heated waste nitrogen to the low-temperature adsorption system to serve as regeneration gas. The waste nitrogen generated after the regeneration of the normal temperature adsorption system and the low temperature adsorption system can be discharged.
Therefore, the heat exchanger 5 in the scheme is used for cooling the secondary intermediate gas, reheating the ultrapure hydrogen and reheating the waste liquid nitrogen generated by the liquid nitrogen washing tower 6 to form waste nitrogen which is connected to a normal-temperature adsorption system and a low-temperature adsorption system and used as regeneration gas.
By utilizing the device, the industrial hydrogen firstly passes through the filter 1 to remove particle impurities, then is cooled by the cooler 2, enters the normal temperature adsorption system to remove impurities such as carbon dioxide and water, then enters the liquid nitrogen washing tower 6 after being cooled by the heat exchanger 5 to remove impurities such as carbon monoxide and argon, finally enters the low temperature adsorption system to be adsorbed, and the ultrapure hydrogen (6N) obtained after adsorption is reheated by the heat exchanger 5 and then is sent out as a product.
The method and the device for obtaining the ultrapure hydrogen can be used for producing the large-flow ultrapure hydrogen with the purity being more than or equal to 6N, and compared with the prior art, the method and the device have the characteristics of simple process, low cost, environmental protection and high efficiency.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims (10)

1. A method for obtaining ultrapure hydrogen gas for purification of industrial hydrogen to obtain ultrapure hydrogen gas, characterized in that: the method for obtaining the ultrapure hydrogen comprises the following steps: filtering particle impurities in the industrial hydrogen to obtain primary intermediate gas, adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas, washing and removing carbon monoxide and argon in the secondary intermediate gas by using liquid nitrogen to obtain tertiary intermediate gas, and adsorbing nitrogen and oxygen in the tertiary intermediate gas at low temperature to obtain ultrapure hydrogen.
2. The method of obtaining ultrapure hydrogen according to claim 1, characterized in that: and cooling the primary intermediate gas and then performing normal-temperature adsorption.
3. The method of obtaining ultrapure hydrogen according to claim 1, characterized in that: cooling the secondary intermediate gas and then washing with liquid nitrogen; reheating the ultrapure hydrogen, and sending the reheated ultrapure hydrogen as a product; waste liquid nitrogen generated by washing liquid nitrogen is reheated and used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
4. The method of obtaining ultrapure hydrogen according to claim 4, wherein: and heating the reheated sewage nitrogen to be used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
5. The method of obtaining ultrapure hydrogen according to claim 1, characterized in that: and liquid nitrogen is used for providing the required cold for the low-temperature adsorption.
6. An apparatus for obtaining ultrapure hydrogen gas, for purifying industrial hydrogen to obtain ultrapure hydrogen gas, characterized in that: the device for obtaining the ultrapure hydrogen comprises:
a filter for filtering particulate impurities from the industrial hydrogen to obtain a primary intermediate gas;
the normal temperature adsorption system is used for adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas;
a liquid nitrogen washing tower which is used for washing and removing carbon monoxide and argon in the secondary intermediate gas by liquid nitrogen to obtain a tertiary intermediate gas;
and the low-temperature adsorption system is used for low-temperature adsorption of the nitrogen and the oxygen in the three-stage intermediate gas to obtain ultrapure hydrogen.
7. The apparatus for obtaining ultrapure hydrogen according to claim 6, wherein: the apparatus for obtaining ultrapure hydrogen further comprises a cooler for cooling the primary intermediate gas.
8. The apparatus for obtaining ultrapure hydrogen according to claim 6, wherein: the device for obtaining the ultrapure hydrogen further comprises a heat exchanger which is used for cooling the secondary intermediate gas, reheating the ultrapure hydrogen and reheating the waste liquid nitrogen generated by the liquid nitrogen washing tower to enable the waste liquid nitrogen to become waste nitrogen which is connected to the normal-temperature adsorption system and the low-temperature adsorption system and used as regeneration gas.
9. The apparatus for obtaining ultrapure hydrogen according to claim 8, wherein: the device for obtaining ultrapure hydrogen further comprises:
the first heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the normal-temperature adsorption system to be used as regenerated gas;
and the second heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the low-temperature adsorption system to be used as regeneration gas.
10. The apparatus for obtaining ultrapure hydrogen according to claim 6, wherein: and the low-temperature adsorption system is connected with liquid nitrogen for providing required cold energy for the low-temperature adsorption system.
CN202011250724.3A 2020-11-11 2020-11-11 Method and device for obtaining ultrapure hydrogen Pending CN112374460A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1014585A (en) * 1961-12-13 1965-12-31 Foster Wheeler Ltd Improvements in or relating to the purification of hydrogen by scrubbing with liquidnitrogen
US5836172A (en) * 1996-12-24 1998-11-17 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for the purification of a cryogenic fluid by filtration and/or adsorption
CN105466154A (en) * 2015-12-21 2016-04-06 七台河宝泰隆煤化工股份有限公司 Air separation technique
US20160146535A1 (en) * 2013-06-26 2016-05-26 Casale Sa Process for purification of a synthesis gas containing hydrogen and impurities
CN107364832A (en) * 2017-07-26 2017-11-21 深圳市海格金谷工业科技有限公司 A kind of low temperature hydrogen purification devices and control method
WO2018020091A1 (en) * 2016-07-25 2018-02-01 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and apparatus for scrubbing at cryogenic temperature in order to produce a mixture of hydrogen and nitrogen
CN213834533U (en) * 2020-11-11 2021-07-30 苏州市兴鲁空分设备科技发展有限公司 Device for obtaining ultrapure hydrogen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1014585A (en) * 1961-12-13 1965-12-31 Foster Wheeler Ltd Improvements in or relating to the purification of hydrogen by scrubbing with liquidnitrogen
US5836172A (en) * 1996-12-24 1998-11-17 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for the purification of a cryogenic fluid by filtration and/or adsorption
US20160146535A1 (en) * 2013-06-26 2016-05-26 Casale Sa Process for purification of a synthesis gas containing hydrogen and impurities
CN105466154A (en) * 2015-12-21 2016-04-06 七台河宝泰隆煤化工股份有限公司 Air separation technique
WO2018020091A1 (en) * 2016-07-25 2018-02-01 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and apparatus for scrubbing at cryogenic temperature in order to produce a mixture of hydrogen and nitrogen
CN107364832A (en) * 2017-07-26 2017-11-21 深圳市海格金谷工业科技有限公司 A kind of low temperature hydrogen purification devices and control method
CN213834533U (en) * 2020-11-11 2021-07-30 苏州市兴鲁空分设备科技发展有限公司 Device for obtaining ultrapure hydrogen

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