CN203333287U - Continuous adsorption regeneration device for hydrogen in polycrystalline silicon tail gas recovery system - Google Patents
Continuous adsorption regeneration device for hydrogen in polycrystalline silicon tail gas recovery system Download PDFInfo
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- CN203333287U CN203333287U CN2013203964391U CN201320396439U CN203333287U CN 203333287 U CN203333287 U CN 203333287U CN 2013203964391 U CN2013203964391 U CN 2013203964391U CN 201320396439 U CN201320396439 U CN 201320396439U CN 203333287 U CN203333287 U CN 203333287U
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Abstract
The utility model discloses a continuous adsorption regeneration device for hydrogen in a polycrystalline silicon tail gas recovery system. Two gas inlets and a gas outlet are respectively formed at the tops of two adsorption towers; the two gas inlets are respectively connected with the gas outlets of an electric heater and a nitrogen cooler in parallel connection through a pipeline, and the gas inlets of the two devices in parallel connection are respectively connected with a nitrogen inlet pipe; the gas outlets at the tops of the two adsorption towers are connected with a pure hydrogen outlet pipe through a pipeline and connected with a hydrogen compressor through a hydrogen backflow pipe; a gas outlet of the hydrogen compressor is connected with the nitrogen inlet pipe; a gas inlet and two gas outlets are also formed in a tower kettle of the adsorption tower, wherein the gas inlet is connected with a tail gas inlet pipe, and the two gas outlets are connected with a waste gas electric heater and a waste gas cooler in series connection; and the waste gas electric heater and the waste gas cooler in series connection are connected with a waste gas outlet pipe. By integrating the heating, cooling and replacement, the device disclosed by the utility model realizes alternate adsorption and desorption regeneration of the two adsorption towers in continuous operation, and three adsorption tower devices are completely replaced to perform continuous operation.
Description
Technical field
The utility model relates to the continuous adsorption regenerating unit of hydrogen in a kind of polysilicon tail gas recovery system, belongs to technical field of adsorptive separation engineering.
Background technology
A large amount of tail gas be can produce in polysilicon production process, HCl, SiH mainly contained in tail gas
2cl
2, SiHCl
3, SiCl
4and H
2etc. the production of polysilicon raw material, need enter exhaust gas recovery system and be reclaimed respectively.In " siemens " production of polysilicon technique of improvement, exhaust gas recovery system mainly is divided into pressurization condensing unit, hydrogen chloride absorption unit, HCl separation unit, silicon tetrachloride rectification cell and the several parts of hydrogen recovery unit, the hydrogenchloride that wherein hydrogen recovery unit generally adopts active carbon adsorption technology to remove to be mingled with in hydrogen and a small amount of silicon tetrachloride.After impurity and Hydrogen Separation in hydrogen, be adsorbed onto the adsorbent surface in adsorption bed.In operating process, the concentration of each impurity is the highest in the concentration of adsorption bed upstream, and through mass transfer zone, concentration can further increase.With adsorption time, increase, mass transfer zone can move gradually downstream, until pass at the absorption tailstock, causes impurity still to be present in air-flow.Therefore, before adsorption bed is saturated, finish absorption, adsorption bed is carried out to desorption and regeneration, recycle.
Hydrogen recovery unit commonly used is to adopt three adsorption towers to realize in turn absorption, intensification desorb, cooling function, by continual adsorption process, obtains continuous flow of pure hydrogen.A hydrogen part after purification is got back to polycrystalline silicon reducing furnace, and a part refluxes for the pulse cleaning adsorption tower.The adsorption tower type of heating is generally heating tube heating or hot hydrogen blowback, but the heating of heating tube method is inhomogeneous, is not easy to reach the regeneration temperature of regulation, and impurity is resolved not exclusively.Although hot hydrogen heating means heat transfer efficiency is high, the usage quantity of hydrogen is large, and inflammable and explosive, has potential safety hazard.The type of cooling of three towers is generally a large amount of recycle hydrogens and purges cooling, wastes equally a large amount of purified hydrogen, and regeneration cost is high.If use suitable parsing regenerating unit instead, not only can optimize the hydrogen recovery process, improve adsorption tower efficiency, intensification desorb and cooling stages in the regeneration stage can also be incorporated in a tower, reduce tower quantity.
Summary of the invention
The purpose of this utility model is the deficiency that overcomes existing continuous adsorption tower regeneration techniques, proposed the continuous adsorption regenerating unit of hydrogen in the polysilicon tail gas recovery system, comprised that two the first adsorption tower 1(that are used alternatingly are called for short " tower ") and the second adsorption tower 2(abbreviation " two towers ").
Concrete technical scheme is as follows:
Continuous adsorption tower regenerating unit in a kind of polysilicon tail gas recovery system, comprise two adsorption towers that are used alternatingly, two groups of electric heaters, and nitrogen cooler, gaseous effluent cooler, the tail gas inlet pipe, pure hydrogen escape pipe, nitrogen enters tracheae, waste gas escape pipe, hydrogen gas compressor; Two adsorption tower tops arrange two inlet mouths and an air outlet respectively, and two inlet mouths are connected with the nitrogen cooler air outlet with electric heater in parallel respectively by pipeline, and two parallel arrangement inlet mouths enter tracheae with nitrogen respectively and are connected; Two air outlet, adsorption tower tops are connected with pure hydrogen escape pipe by pipeline, and are connected with hydrogen gas compressor by hydrogen gas return line, and the hydrogen gas compressor air outlet enters tracheae with nitrogen and is connected; The tower reactor of adsorption tower also arranges respectively an inlet mouth and two air outlets, inlet mouth is connected with the tail gas inlet pipe, two air outlets are connected with waste gas electric heater, the gaseous effluent cooler of series connection, and the waste gas electric heater of series connection, gaseous effluent cooler are connected with the waste gas escape pipe.
Each adsorption tower arranges corresponding valve, comprise a tower tail gas intake valve and two tower tail gas intake valves, the pure hydrogen air outlet valve of one tower and the pure hydrogen air outlet valve of two towers, one tower nitrogen air inlet low temperature valve, a tower nitrogen air inlet thermal valve, two tower nitrogen air inlet low temperature valves and two tower nitrogen air inlet thermal valves, a tower waste gas goes out give vent to anger thermal valve, two tower waste gas of air-cooled valve, a tower waste gas and goes out air-cooled valve and the two tower waste gas thermal valve of giving vent to anger.
The tail gas inlet pipe is connected with a tower tail gas intake valve, two tower tail gas intake valves at the bottom of the first adsorption tower, the second adsorption tower tower respectively, and the pure hydrogen air outlet valve of a tower, the pure hydrogen air outlet valve of two towers of the first adsorption tower, the second adsorption tower tower top are connected with pure hydrogen escape pipe respectively; Pure hydrogen escape pipe is connected with hydrogen gas compressor by hydrogen gas return line, and the hydrogen gas compressor air outlet enters tracheae with nitrogen and is connected; Nitrogen enters tracheae and is connected respectively with the nitrogen cooler inlet mouth with nitrogen electric heater in parallel, nitrogen electric heater air outlet is connected by pipeline respectively with a tower nitrogen air inlet thermal valve, the two tower nitrogen air inlet thermal valves of two adsorption tower tower tops, and the nitrogen cooler air outlet is connected respectively by pipeline with a tower nitrogen air inlet low temperature valve, two tower nitrogen air inlet low temperature valves; At the bottom of the tower of two adsorption towers, a tower waste gas goes out air-cooled valve and two tower waste gas go out the air-cooled valve parallel connection, thermal valve and the two tower waste gas thermal valve parallel connection of giving vent to anger of giving vent to anger of one tower waste gas, then a tower waste gas goes out air-cooled valve, two tower waste gas and goes out air-cooled valve, a tower waste gas the give vent to anger pipeline of thermal valve of thermal valve, two tower waste gas of giving vent to anger and be connected with the waste gas electric heater; Electric heater and gaseous effluent cooler and waste gas escape pipe are connected in series.
The concrete operation method of hydrogen continuous adsorption regenerating unit of the present utility model is as follows: adsorption process completes at activated carbon adsorber the first adsorption tower 1 or the second adsorption tower 2 that are equipped with for removal of impurities.To send into one of them adsorption tower from the tail gas of hydrogen chloride absorption tower, for example, at the bottom of the tower of the second adsorption tower 2, by two tower tail gas intake valves 18, entered, on the activated carbon of the impurity absorption such as hydrogenchloride and chlorosilane in adsorption tower, hydrogen after purification leaves from the pure hydrogen air outlet valve 15 of the second adsorption tower 2 tower top two tower, by pure hydrogen escape pipe 21 separating devices, stores or uses.
When the sorbent material in the second adsorption tower 2 is about to reach capacity, second adsorption tower 2 of stopping using, will proceed to from the tail gas of hydrogen chloride absorption tower the first adsorption tower 1 be used alternatingly, and the sorbent material in the second saturated adsorption tower 2 is carried out to desorption and regeneration.The parsing regeneration of adsorption tower is that the hot nitrogen that the second adsorption tower 2 uses are heated by nitrogen electric heater 3 is that two tower nitrogen air inlet thermal valves 16 enter from the direction contrary with the tail gas import, and the countercurrent purge adsorption bed is realized the desorb of impurity.The nitrogen that contains impurity leaves the second adsorption tower 2 from the two tower waste gas thermal valve 19 of giving vent to anger, and now waste gas electric heater 6 cuts out, and waste gas enters follow-up off gas treatment unit by waste gas escape pipe 23 after gaseous effluent cooler 7 is cooling.
After the second adsorption tower 2 has been removed impurity, now the adsorption bed excess Temperature is unfavorable for re-using, and therefore before the second adsorption tower 2 restarts absorption, wants cooling bed body.The nitrogen gas stream that nitrogen is entered to tracheae 22 with the heat-eliminating medium in nitrogen cooler 4 is carried out cooling, and then cold nitrogen enters the second adsorption tower 2 by two tower nitrogen air inlet low temperature valves 14 and purges cooling adsorption bed.Cold nitrogen waste gas goes out air-cooled valve 17 out from two tower waste gas, after 6 heating of waste gas electric heater, by waste gas escape pipe 23, enters follow-up off gas treatment unit, and now gaseous effluent cooler 7 cuts out.
Before tower can be used for absorption, do not contain nitrogen to hydrogen in the saturated and pure hydrogen production of next adsorption process for making adsorbent beds, also will be with hydrogen exchange nitrogen wherein, this is to complete by continuous transformation purge step.In order to reach this purpose, the high-purity hydrogen reclaimed from the first adsorption tower 1 is by hydrogen gas return line 24 shuntings, after hydrogen gas compressor 5 compression, borrow nitrogen to enter tracheae 22 and enter the second adsorption tower 2 by the nitrogen electric heater 3 of closing from two tower nitrogen air inlet thermal valves 16 and carry out pressurized with hydrogen to adsorption bed.After in the second adsorption tower 2, nitrogen is adsorbed by hydrogen exchange, the nitrogen of generation goes out air-cooled valve 17, the two tower waste gas thermal valve 19 of giving vent to anger with unnecessary hydrogen through two tower waste gas is discharged by waste gas escape pipe 23, makes the adsorbent decompression of adsorption bed.After repeatedly repeating supercharging-decompression cycle, nitrogen is replaced fully, and the second adsorption tower 2 has been regenerated, and can be used for next sorption cycle.The first adsorption tower 1 reaches capacity and need to enter regeneration during the stage, and the second adsorption tower 2 enters absorption phase.
The regeneration stages operating method of the first adsorption tower 1 contrasts the second adsorption tower 2 same position valve switch situations with valve switch situation on the second adsorption tower 2, the first adsorption towers 1.
Alternating temperature pressure swing regeneration device combines the method for alternating temperature desorb and the alternative hydrogen blowback of nitrogen, the nitrogen device had both replaced hydrogen device to carry out the purging to impurity, the hot nitrogen produced heats adsorption bed with the form of thermal source again, and the regeneration cost of adsorption bed is declined to a great extent, and security is risen.The transformation displacement of hydrogen has guaranteed regeneration effect, and in purified hydrogen, a nitrogen content is low.
Apparatus of the present invention will heat, cooling, replace integrated, a kind of new adsorption tower reclaiming outfit has been proposed, the adsorption tower of realizing two operate continuouslys replaces sorption and desorption regeneration, substituted three adsorption tower devices fully and carried out operate continuously, this can be handling significant with stability for adsorption tower.
The accompanying drawing explanation
Fig. 1 is embodiment schematic flow sheet of the present utility model
Accompanying drawing explanation: 1. the first adsorption tower, 2. the second adsorption tower, 3. nitrogen electric heater, 6. waste gas electric heater, 4. nitrogen cooler, 7. gaseous effluent cooler, 20. tail gas inlet pipe, 21. pure hydrogen escape pipe, 22. nitrogen enters tracheae, 23. waste gas escape pipe, 24. hydrogen gas return line, 5. hydrogen gas compressor, 8. a tower nitrogen air inlet low temperature valve, 10. a tower nitrogen air inlet thermal valve, 14. two tower nitrogen air inlet low temperature valves, 16. two tower nitrogen air inlet thermal valves, 11. a tower waste gas goes out air-cooled valve, the thermal valve 13. a tower waste gas is given vent to anger, 17. two tower waste gas go out air-cooled valve, the thermal valve 19. two tower waste gas are given vent to anger, a 12. tower tail gas intake valve, 18. two tower tail gas intake valves, 9. the pure hydrogen air outlet valve of a tower, 15. the pure hydrogen air outlet valve of two towers
Embodiment
Below in conjunction with accompanying drawing, device provided by the utility model is described in further detail:
As shown in Figure 1, tail gas inlet pipe 20 is connected with a tower tail gas intake valve 12, two tower tail gas intake valves 18 at the bottom of the first adsorption tower 1, the second adsorption tower 2 towers respectively, and the pure hydrogen air outlet valve 9 of a tower of the first adsorption tower 1, the second adsorption tower 2 tower tops, the pure hydrogen air outlet valve 15 of two towers are connected with pure hydrogen escape pipe 21 respectively; Pure hydrogen escape pipe 21 is connected with hydrogen gas compressor 5 by hydrogen gas return line 24, and hydrogen gas compressor 5 air outlets enter tracheae 22 with nitrogen and are connected.Nitrogen enters tracheae 22 and is connected respectively with nitrogen cooler 4 inlet mouths with nitrogen electric heater 3 in parallel, nitrogen electric heater 3 air outlets are connected by pipeline respectively with a tower nitrogen air inlet thermal valve 10, the two tower nitrogen air inlet thermal valves 16 of two adsorption tower tower tops, and nitrogen cooler 4 air outlets are connected respectively by pipeline with a tower nitrogen air inlet low temperature valve 8, two tower nitrogen air inlet low temperature valves 14.At the bottom of the tower of two adsorption towers, a tower waste gas goes out air-cooled valve 11 and two tower waste gas go out air-cooled valve 17 parallel connections, tower waste gas thermal valve 13 and two tower waste gas thermal valve 19 parallel connections of giving vent to anger of giving vent to anger, and then pipeline in parallel is connected with waste gas electric heater 6 in twos; Electric heater 6 and gaseous effluent cooler 7 are connected in series with waste gas escape pipe 23.
Under normal running, the first adsorption tower 1 and the second adsorption tower 2 are alternately in absorption working stage and desorption and regeneration stage.As the first adsorption tower 1, in the absorption working stage, the pure hydrogen air outlet valve 9 of a tower and a tower tail gas intake valve 12 are opened, and other valve cuts out.From the hydrogen chloride absorption tower, tail gas out enters the first adsorption tower 1 from tail gas inlet pipe 20 by a tower tail gas intake valve 12, hydrogenchloride in tail gas and chlorosilane are adsorbed charcoal absorption in tower, and hydrogen is purified by the pure hydrogen air outlet valve 9 of a tower and sends into hydrogen storage tank from pure hydrogen escape pipe 21.
The second adsorption tower 2 is in resolving the regeneration stage, and two tower nitrogen air inlet thermal valves 16 and the two tower waste gas thermal valve 19 of giving vent to anger is opened, and other valve cuts out.Entering tracheae 22 for the nitrogen of adsorption tower of regenerating from nitrogen enters, after electric heater 3 is heated to 250 ℃, from the second adsorption tower 2, two tower nitrogen air inlet thermal valve 16 positions enter, reverse purging the second adsorption tower 2, control nitrogen flow, evenly purge fully the charcoal absorption bed, adsorption bed reaches rapidly 230 ℃ of regeneration temperatures, and impurity is resolved fully.Close electric heater 6, the hot nitrogen that contains impurity is given vent to anger thermal valve 19 leaves the second adsorption tower 2 from two tower waste gas, by usining the shell-and-tube gaseous effluent cooler 7 of cold water as heat-eliminating medium, is cooled to 40 ℃, then from waste gas escape pipe 23, sends into the off gas treatment unit.After impurity purges out the second adsorption tower 2 fully, close two tower nitrogen air inlet thermal valves 16, open two tower nitrogen air inlet low temperature valves 14, close electric heater 3, nitrogen enters nitrogen in tracheae 22 and enters shell-and-tube nitrogen cooler 4, shell-and-tube nitrogen cooler 4 adopts the toluene of-70 ℃ nitrogen to be cooled to-60 ℃ as heat-eliminating medium, and cold nitrogen two tower nitrogen air inlet low temperature valves 14 from the second adsorption tower 2 enter, cooling the second adsorption tower 2.Adjust the flow of toluene, make nitrogen remain on-60 ℃.Control nitrogen flow, keep the stable of flow.Blanked-off pipe shell-type gaseous effluent cooler 7, cold nitrogen is heated to 40 ℃ through electric heater 6 after being gone out air-cooled valve 17 and left the second adsorption tower 2 by two tower waste gas, from waste gas escape pipe 23, sends into the off gas treatment unit.
Now in the second adsorption tower 2, be full of nitrogen, only need to reclaim on a small quantity pure hydrogen and replaced.Pure hydrogen from the hydrogen recovery pipeline is shunted by hydrogen gas return line 24, after hydrogen gas compressor 5 pressurizations, borrow nitrogen to enter tracheae 22 by the nitrogen electric heater 3 of closing, enter to the second adsorption tower 2 and carry out pressurized with hydrogen from two tower nitrogen air inlet thermal valves 16, with go out air-cooled valve 17, two tower waste gas thermal valve 19 to the waste gas escape pipe 23 of giving vent to anger by two tower waste gas, discharge, the second adsorption tower 2 tower internal pressures reduce.Through after 5 supercharging-decompression cycle, nitrogen is replaced fully, and the second 2 regeneration stages of adsorption tower stopped.Close all valves on the second adsorption tower 2, after the first adsorption tower 1 absorption phase stops, open two tower tail gas intake valves 18 and the pure hydrogen air outlet valve 15 of two towers, by two tower tail gas intake valves 18, tail gas is proceeded to the second adsorption tower 2, close the pure hydrogen air outlet valve 9 of a tower and a tower tail gas intake valve 12, open a tower nitrogen air inlet thermal valve 10, tower waste gas thermal valve 13, the first adsorption towers 1 of giving vent to anger and enter the regeneration stage.
Hydrogen is sent into hydrogen storage tank by the pure hydrogen air outlet valve 15 of two towers from pure hydrogen escape pipe 21 by the second adsorption tower 2 purifying.Entering tracheae 22 for the nitrogen of adsorption tower of regenerating from nitrogen enters, after electric heater 3 is heated to 250 ℃, from the first adsorption tower 1, tower nitrogen air inlet thermal valve 10 positions enter, reverse purging the first adsorption tower 1, control nitrogen flow, evenly purge fully the charcoal absorption bed, adsorption bed reaches rapidly 230 ℃ of regeneration temperatures, and impurity is resolved fully.Close electric heater 6, the hot nitrogen that contains impurity is given vent to anger thermal valve 13 leaves the first adsorption tower 1 from a tower waste gas, by usining the shell-and-tube gaseous effluent cooler 7 of cold water as heat-eliminating medium, is cooled to 40 ℃, then from waste gas escape pipe 23, sends into the off gas treatment unit.After impurity purges out the first adsorption tower 1 fully, close a tower nitrogen air inlet thermal valve 10, open a tower nitrogen air inlet low temperature valve 8, close electric heater 3, nitrogen enters nitrogen in tracheae 22 and enters shell-and-tube nitrogen cooler 4, shell-and-tube nitrogen cooler 4 adopts the toluene of-70 ℃ nitrogen to be cooled to-60 ℃ as heat-eliminating medium, and cold nitrogen tower nitrogen air inlet low temperature valve 8 from the first adsorption tower 1 enters, cooling the first adsorption tower 1.Adjust the flow of toluene, make nitrogen remain on-60 ℃.Control nitrogen flow, keep the stable of flow.Blanked-off pipe shell-type gaseous effluent cooler 7, cold nitrogen is heated to 40 ℃ through electric heater 6 after being gone out air-cooled valve 11 and left the second adsorption tower 2 by a tower waste gas, from waste gas escape pipe 23, sends into the off gas treatment unit.
Now in the first adsorption tower 1, be full of nitrogen, only need to reclaim on a small quantity pure hydrogen and replaced.Pure hydrogen from the hydrogen recovery pipeline is shunted by hydrogen gas return line 24, after hydrogen gas compressor 5 pressurizations, borrow 22 nitrogen to enter tracheae by the nitrogen electric heater 3 of closing, enter to the first adsorption tower 1 and carry out pressurized with hydrogen from a tower nitrogen air inlet thermal valve 10, with go out air-cooled valve 11, tower waste gas thermal valve 13 to the waste gas escape pipe 23 of giving vent to anger by a tower waste gas, discharge, the first adsorption tower 1 tower internal pressure reduces.Through after 5 supercharging-decompression cycle, nitrogen is replaced fully, and the first 1 regeneration stage of adsorption tower stopped.Close all valves on the first adsorption tower 1, after the second adsorption tower 2 absorption phase stop, open a tower tail gas intake valve 12 and the pure hydrogen air outlet valve 9 of a tower, tail gas is proceeded to the first adsorption tower 1, close two tower tail gas intake valves 18 and the pure hydrogen air outlet valve 15 of two towers, open two tower nitrogen air inlet thermal valves 16, two tower waste gas thermal valve 19, the second adsorption towers 2 of giving vent to anger and again enter the regeneration stage.
The continuous adsorption regenerating unit of hydrogen in the polysilicon tail gas recovery system the utility model proposes, by preferred embodiment, be described, person skilled obviously can be within not breaking away from the utility model content, spirit and scope to structure as herein described with equipment is changed or suitably change and combination, realize the utility model technology.Special needs to be pointed out is, all similar replacements and change apparent to those skilled in the artly, they are deemed to be included in the utility model spirit, scope and content.
Claims (3)
1. continuous adsorption tower regenerating unit in a polysilicon tail gas recovery system, comprise two adsorption towers that are used alternatingly, two groups of electric heaters, nitrogen cooler, gaseous effluent cooler, tail gas inlet pipe, pure hydrogen escape pipe, nitrogen enters tracheae, waste gas escape pipe, hydrogen gas compressor; It is characterized in that: two adsorption tower tops arrange two inlet mouths and an air outlet respectively, and two inlet mouths are connected with electric heater, nitrogen cooler air outlet in parallel respectively by pipeline, and two parallel arrangement inlet mouths enter tracheae with nitrogen respectively and are connected; Two air outlet, adsorption tower tops are connected with pure hydrogen escape pipe by pipeline, and are connected with hydrogen gas compressor by hydrogen gas return line, and the hydrogen gas compressor air outlet enters tracheae with nitrogen and is connected; The tower reactor of adsorption tower also arranges respectively an inlet mouth and two air outlets, inlet mouth is connected with the tail gas inlet pipe, two air outlets are connected with waste gas electric heater, the gaseous effluent cooler of series connection, and the waste gas electric heater of series connection, gaseous effluent cooler are connected with the waste gas escape pipe.
2. device as claimed in claim 1, it is characterized in that each adsorption tower arranges corresponding valve, comprise a tower tail gas intake valve and two tower tail gas intake valves, the pure hydrogen air outlet valve of one tower and the pure hydrogen air outlet valve of two towers, one tower nitrogen air inlet low temperature valve, a tower nitrogen air inlet thermal valve, two tower nitrogen air inlet low temperature valves and two tower nitrogen air inlet thermal valves, a tower waste gas goes out give vent to anger thermal valve, two tower waste gas of air-cooled valve, a tower waste gas and goes out air-cooled valve and the two tower waste gas thermal valve of giving vent to anger.
3. device as claimed in claim 2, it is characterized in that: the tail gas inlet pipe is connected with a tower tail gas intake valve, two tower tail gas intake valves at the bottom of the first adsorption tower, the second adsorption tower tower respectively, and the pure hydrogen air outlet valve of a tower, the pure hydrogen air outlet valve of two towers of the first adsorption tower, the second adsorption tower tower top are connected with pure hydrogen escape pipe respectively; Pure hydrogen escape pipe is connected with hydrogen gas compressor by hydrogen gas return line, and the hydrogen gas compressor air outlet enters tracheae with nitrogen and is connected; Nitrogen enters tracheae and is connected respectively with the nitrogen cooler inlet mouth with nitrogen electric heater in parallel, nitrogen electric heater air outlet is connected by pipeline respectively with a tower nitrogen air inlet thermal valve, the two tower nitrogen air inlet thermal valves of two adsorption tower tower tops, and the nitrogen cooler air outlet is connected respectively by pipeline with a tower nitrogen air inlet low temperature valve, two tower nitrogen air inlet low temperature valves; At the bottom of the tower of two adsorption towers, a tower waste gas goes out air-cooled valve and two tower waste gas go out the air-cooled valve parallel connection, thermal valve and the two tower waste gas thermal valve parallel connection of giving vent to anger of giving vent to anger of one tower waste gas, then a tower waste gas goes out air-cooled valve, two tower waste gas and goes out air-cooled valve, a tower waste gas the give vent to anger pipeline of thermal valve of thermal valve, two tower waste gas of giving vent to anger and be connected with the waste gas electric heater; Electric heater and gaseous effluent cooler and waste gas escape pipe are connected in series.
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| CN2013203964391U CN203333287U (en) | 2013-07-04 | 2013-07-04 | Continuous adsorption regeneration device for hydrogen in polycrystalline silicon tail gas recovery system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109847731A (en) * | 2019-01-31 | 2019-06-07 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas recycle activated carbon adsorber regeneration technology and regenerative system |
| CN114522508A (en) * | 2022-04-24 | 2022-05-24 | 北京中科富海低温科技有限公司 | Hydrogen adsorber regeneration system and method thereof |
-
2013
- 2013-07-04 CN CN2013203964391U patent/CN203333287U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109847731A (en) * | 2019-01-31 | 2019-06-07 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas recycle activated carbon adsorber regeneration technology and regenerative system |
| CN114522508A (en) * | 2022-04-24 | 2022-05-24 | 北京中科富海低温科技有限公司 | Hydrogen adsorber regeneration system and method thereof |
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