CN208471537U - A kind of recycling crude argon purifying plant again - Google Patents
A kind of recycling crude argon purifying plant again Download PDFInfo
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- CN208471537U CN208471537U CN201821041450.5U CN201821041450U CN208471537U CN 208471537 U CN208471537 U CN 208471537U CN 201821041450 U CN201821041450 U CN 201821041450U CN 208471537 U CN208471537 U CN 208471537U
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- argon
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- precooler
- oxygen
- argon gas
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Abstract
The utility model discloses a kind of recycling crude argon purifying plants again, argon gas compressor, the first argon gas precooler, oxygen-eliminating device, the second argon precooler, purifier and psa unit including passing sequentially through pipeline connection；Wherein, Hydrogen Line is connected on the pipeline between the first argon gas precooler and the oxygen-eliminating device；The psa unit is made of the first contactor being arranged in parallel and the second contactor, is selectively adsorbed by first contactor and is fallen oxygen, carbon dioxide, nitrogen gas component；Adsorbent foreign gas in first contactor is desorbed by second contactor.The recycling crude argon of the utility model purifying plant again simplifies technique and in-site installation construction, eliminates Deep Cooling Method and denitrogenate unit, the cost and manufacturing schedule of the complete set of equipments substantially reduced.
Description
Technical field
The utility model relates to a kind of gas recovery device more particularly to a kind of recycling crude argon purifying plants again.
Background technique
Vertical pulling method is to produce the main method of monocrystalline silicon, and the monocrystalline silicon in the whole world 70%~80% is produced by vertical pulling method.Most
Common vertical pulling method production monocrystalline silicon technique is using i.e. as vacuum technology is again as the decompression crystal pulling technique of flowing atmosphere technique；Subtract
Pressure technique is that high purity argon, while vacuum pump are passed through to continuous constant speed into single crystal growing furnace burner hearth in silicon single crystal pulling process
Constantly from the outside pump Argon of burner hearth, keep in burner hearth vacustat in 20 supports or so, this existing vacuum technology of technique
The characteristics of, and have the characteristics of flowing atmosphere technique.The vacuum pump of decompression crystal pulling technique generally uses slide valve pump, and slide valve pump is with oil
To keep the oil-sealed rotary pump of sealing.Argon gas carries the Si oxide generated during crystal-pulling due to high temperature and impurity is waved
Object is sent out, and atmosphere is discharged by pumping for vacuum pump.
By the analysis to discharge argon gas, major impurity ingredient is oxygen, nitrogen, carbon monoxide, carbon dioxide, methane
Equal alkane；Recycling this part argon gas has very big realistic meaning.The well-known technique of argon gas recovery purifying: it is returned to from single crystal growing furnace
The argon gas of receipts carries out thick oil removing, then the high-precision oil removing dedusting after compression is cooling；Then the hydro carbons such as methane are made by high-temperature catalytic
Water and carbon dioxide are produced with oxygen reaction with carbon monoxide, guarantees that slightly excessively (impurity oxygen is inadequate for oxygen in catalysis reaction
Oxygen is then added)；By making excessive oxygen generate water with the hydrogen reaction being added after cooling under the action of catalyst, and guarantee anti-
Answer hydrogen excessive, impurity component is water, carbon dioxide, hydrogen and nitrogen in argon gas after processing；Finally adsorbed by argon gas room temperature
Unit adsorbs water and carbon dioxide, obtains containing only nitrogen and hydrogen is the crude argon of impurity.Argon gas room temperature absorbing unit is by two
A absorber forms, and the adsorbent equipped with absorption water and carbon dioxide in absorber, an absorber carries out absorption work, another
It includes pressure release that a absorber, which carries out, heats, blows cold reproduction operation.When argon gas room temperature absorbing unit and psa unit pass through
Between cyclelog auto-controll operation switch.
As in patent 201210078306X monocrystalline silicon production in the method and apparatus of argon gas recovery purifying, cryogenic rectification portion
Divide and use air cycle refrigeration, energy consumption is high, and process is complicated, the excess hydrogen emptying of addition, and utilization rate is low.For another example patent is " a kind of
The argon gas recovery purifying equipment and argon gas recovery purifying method of double tower coupling " (application number: in 201410618341.5), use air
Compression, double-column process, energy consumption is without advantage, and structure is complicated, increases equipment investment.Therefore, those skilled in the art is dedicated to out
It is more succinct to send out process, more convenient operation, the lower argon gas recyclable device of energy consumption.
Utility model content
The features such as the purpose of this utility model is more, energy consumption height for moving component in the recycling of existing argon gas, investment is big, with
And aiming at the problem that Deep Cooling Method denitrogenates that unit making is long in time limit, investment is big, the process is more complicated, a kind of recycling crude argon is provided again
Purifying plant denitrogenates method by changing, keeps argon gas recyclable device easier, more for economy.
To achieve the above object, the utility model uses following technical scheme:
The utility model provides a kind of recycling crude argon purifying plant again, the argon gas compression including passing sequentially through pipeline connection
Machine, the first argon gas precooler, oxygen-eliminating device, the second argon precooler, purifier and psa unit；Wherein, first argon
It is connected with Hydrogen Line on pipeline between gas precooler and the oxygen-eliminating device, is that the oxygen-eliminating device mentions by the Hydrogen Line
For the hydrogen needed for reacting；The psa unit is made of the first contactor being arranged in parallel and the second contactor,
It is selectively adsorbed by first contactor and falls oxygen, carbon dioxide, nitrogen gas component, and by the pure argon after absorption
By discharge at the top of first contactor；It will be adsorbent in first contactor by second contactor
Foreign gas desorbs, and foreign gas is discharged by the bottom inverse put of second contactor.
Further, on the recycling crude argon again purifying plant, further include be set to the argon gas compressor with
Crude argon surge tank between the first argon gas precooler, the argon gas compressor connect the crude argon by pipeline and buffer
The lower part of tank, the first argon gas precooler connect the top of the crude argon surge tank by pipeline.
Further, on the recycling crude argon again purifying plant, further include be set to the oxygen-eliminating device with it is described
Cooler between second argon precooler.
It further, further include being set in turn in first argon gas on the recycling crude argon again purifying plant
Oil strainer and active carbon adsorber between precooler and the oxygen-eliminating device, the crude argon after the cooling of the first argon gas precooler
First successively after oil strainer and active carbon adsorber oil removing, it is re-fed into oxygen-eliminating device and hydrogen hybrid reaction removes oxygen, and pass through
Crude argon oil content after the oil strainer and active carbon adsorber oil removing is less than 1ppm.
Further, on the recycling crude argon again purifying plant, the outlet at bottom of the purifier passes through pipeline
The bottom inlet of the psa unit is connected, the top exit of the psa unit is connected to pure argon user.
The utility model by adopting the above technical scheme, compared with prior art, has the following technical effect that
The recycling crude argon of the utility model purifying plant again, by the way that the crude argon dried is sent into psa unit,
Selectively oxygen, carbon dioxide, nitrogen gas component, the straight argon after absorption are fallen in absorption to first contactor under operating pressure
Gas is gone out by the first contactor top row；Second contactor desorbs the foreign gas adsorbed in adsorbent, and passes through the
The discharge of two contactor bottom inverse puts；Purifying plant simplifies technique and in-site installation construction to the recycling crude argon again, eliminates
Deep Cooling Method denitrogenates unit, the cost and manufacturing schedule of the complete set of equipments substantially reduced.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of recycling crude argon purifying plant again of the utility model；
Wherein, each appended drawing reference are as follows:
1- argon gas compressor, 2- crude argon surge tank, the first argon gas of 3- precooler, 4- oxygen-eliminating device, 5- cooler, 6- second
Argon gas precooler, 7- purifier, 8- psa unit, 9- Hydrogen Line, the first contactor of 10-, the absorption of 11- second are held
Device.
Specific embodiment
The utility model is described in more detail below by specific embodiment, for a better understanding of this reality
With novel, but following embodiments are not intended to limit the scope of the utility model.
Embodiment 1
As shown in Figure 1, present embodiments providing a kind of recycling crude argon purifying plant again, including pass sequentially through pipeline connection
Argon gas compressor 1, the first argon gas precooler 3, oxygen-eliminating device 4, the second argon precooler 6, purifier 7 and psa unit 8；
Wherein, it is connected with Hydrogen Line 9 on the pipeline between the first argon gas precooler 3 and oxygen-eliminating device 4, is deoxygenation by Hydrogen Line 9
Hydrogen needed for device 4 provides reaction；The outlet at bottom of purifier 7 connects the bottom inlet of psa unit 8 by pipeline, becomes
Pressure absorbing unit 8 is made of the first contactor 10 being arranged in parallel and the second contactor 11, is selected by the first contactor 10
Oxygen, carbon dioxide, nitrogen gas component are adsorbed to selecting property, and by the pure argon after absorption by 10 top of the first contactor
Discharge, pure argon purity are 99%-99.99%, are connected to pure argon user；By the second contactor 11 by the first contactor
Adsorbent foreign gas desorbs in 10, and foreign gas is discharged by the bottom inverse put of the second contactor 11.
In the present embodiment, purifying plant includes being set to argon gas compressor 1 and the first argon gas is pre- to the recycling crude argon again
Crude argon surge tank 2 between cold 3, argon gas compressor 1 connect the lower part of crude argon surge tank 2, the first argon gas by pipeline
Precooler 3 connects the top of crude argon surge tank 2 by pipeline.Recycling argon gas after pressurization is first after crude argon surge tank buffering
First time pre-cooling is carried out into the first forecooler, the crude argon temperature after first time precooling treatment is 5-8 DEG C.
In the present embodiment, purifying plant further includes being set to oxygen-eliminating device 4 and the second argon precooler 6 to the recycling crude argon again
Between cooler 5.It is cooled to for 200-300 DEG C of high temperature argon by the cooler for the temperature after reacting oxygen-eliminating device 4
40 DEG C, then 5-8 DEG C is cooled to through the second argon gas precooler.
In the present embodiment, the recycling crude argon again purifying plant further include be set in turn in the first argon gas precooler 3 with
Oil strainer and active carbon adsorber (not shown) between oxygen-eliminating device 4, used oil strainer and activated carbon adsorption
Device is this field conventional equipment, and details are not described herein, and the crude argon after the cooling of the first argon gas precooler 3 is first successively filtered through oil
After device and active carbon adsorber oil removing, it is re-fed into oxygen-eliminating device and hydrogen hybrid reaction removes oxygen, and through oil strainer and activity
Crude argon oil content after charcoal absorber oil removing is less than 1ppm.
In the present embodiment, second contactor will absorption by the way of decompression or normal pressure desorption or heating parsing
The foreign gas adsorbed in agent desorbs, and foreign gas is discharged from the bottom inverse put of the second contactor.
Embodiment 2
The present embodiment provides a kind of concrete applications of recycling crude argon purifying plant again, and purifying plant includes successively connecting again for this
Logical argon gas compressor 1, crude argon surge tank 2, the first argon gas precooler 3, oxygen-eliminating device 4, cooler 5, the second argon gas precooler
6, purifier 7, psa unit 8.
Using this, purifying plant includes: to the step of crude argon is purified again is recycled again
Crude argon atmospheric pressure is very low when recycling, and is mixed into air about 5%, first passes around argon gas compressor 1 and is pressurized to 0.7MPa
(A), for stabilization of export pressure, crude argon surge tank 2 is configured, the crude argon come out from crude argon surge tank 2 is in the first argon gas
Cooled in precooler 3 5-8 DEG C enter oxygen-eliminating device 4 be added hydrogen mix after, in oxygen-eliminating device 4, oxygen and hydrogen generation
Reaction generates water and discharges heat, and temperature rises to about 200~300 DEG C.High temperature argon is cooled to 40 DEG C through subcooler 5, then
It is cooled to 5-8 DEG C with the second argon gas precooler 6, removes water to dew point < -70 DEG C and carbon dioxide < 1ppm into purifier 7 is de-.It is surplus
Under argon gas mainly become are as follows: Ar, N2, H2 etc..Dry crude argon enters psa unit 8 (containing two contactors),
The first contactor 10 adsorbs under operating pressure, and the Special adsorbent loaded in the first contactor 10 selectively adsorbs
Oxygen, carbon dioxide, nitrogen gas component, and as product gas pure argon by with the purity of 99%-99.99% by contactor
Top row goes out；The decompression (vacuumizing) of second contactor 11 or normal pressure desorb or heating parses, adsorbent foreign gas
It desorbs, is discharged by 11 bottom inverse put of the second contactor, after purging, adsorbent is regenerated；Suction after completing regeneration
Attached container can be transferred to absorption again after boost pressure, and two contactors are used alternatingly, and achieve the purpose that continuous purification argon gas.
The advantage of purifying plant is that the convenience of liquid argon offer is had using recycling scene to the utility model recycling crude argon again,
Cooling capacity is provided with liquid argon, it is not necessary to expanding machine be separately provided, purify crude argon using well-known technique, recycle cryogenic rectification method removing
Nitrogen, hydrogen recycle the excess hydrogen of addition, improve the rate of recovery of argon gas and the utilization rate of hydrogen, simplify cryogenic rectification
Process and operation, reduce operation energy consumption.
Specific embodiment of the utility model is described in detail above, but it is merely an example, this is practical new
Type is not restricted to particular embodiments described above.To those skilled in the art, any pair of the utility model carries out
Equivalent modifications and substitution also all among the scope of the utility model.Therefore, in the spirit and model for not departing from the utility model
Lower made equal transformation and modification are enclosed, should all be covered in the scope of the utility model.
Claims (5)
1. a kind of recycling crude argon purifying plant again, which is characterized in that the argon gas compressor including passing sequentially through pipeline connection
(1), the first argon gas precooler (3), oxygen-eliminating device (4), the second argon precooler (6), purifier (7) and psa unit (8)；
Wherein, Hydrogen Line (9) are connected on the pipeline between the first argon gas precooler (3) and the oxygen-eliminating device (4), pass through institute
Stating Hydrogen Line (9) is hydrogen needed for the oxygen-eliminating device (4) provide reaction；The psa unit (8) is by being arranged in parallel
The first contactor (10) and the second contactor (11) composition, selectively adsorb by first contactor (10)
Oxygen, carbon dioxide, nitrogen gas component, and by the pure argon after absorption by discharge at the top of first contactor (10)；
Adsorbent foreign gas in first contactor (10) is desorbed by second contactor (11), impurity
Gas is discharged by the bottom inverse put of second contactor (11).
2. recycling crude argon according to claim 1 purifying plant again, which is characterized in that further include being set to the argon gas
Crude argon surge tank (2) between compressor (1) and the first argon gas precooler (3), the argon gas compressor (1) pass through pipe
Road connects the lower part of the crude argon surge tank (2), and the first argon gas precooler (3) connects the crude argon by pipeline and delays
Rush the top of tank (2).
3. recycling crude argon according to claim 1 purifying plant again, which is characterized in that further include being set to the deoxygenation
Cooler (5) between device (4) and the second argon precooler (6).
4. recycling crude argon according to claim 3 purifying plant again, which is characterized in that further include be set in turn in it is described
Oil strainer and active carbon adsorber between first argon gas precooler (3) and the oxygen-eliminating device (4).
5. recycling crude argon according to claim 1 purifying plant again, which is characterized in that the bottom of the purifier (7)
Outlet connects the bottom inlet of the psa unit (8) by pipeline, and the top exit of the psa unit (8) connects
Logical pure argon user.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821041450.5U CN208471537U (en) | 2018-06-29 | 2018-06-29 | A kind of recycling crude argon purifying plant again |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821041450.5U CN208471537U (en) | 2018-06-29 | 2018-06-29 | A kind of recycling crude argon purifying plant again |
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| Publication Number | Publication Date |
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| CN208471537U true CN208471537U (en) | 2019-02-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821041450.5U Active CN208471537U (en) | 2018-06-29 | 2018-06-29 | A kind of recycling crude argon purifying plant again |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115744845A (en) * | 2022-10-20 | 2023-03-07 | 上海联风能源科技有限公司 | Argon gas recovery purification efficiency increasing system |
| CN117504525A (en) * | 2023-09-18 | 2024-02-06 | 上海联风气体有限公司 | Dirty argon separation system and method capable of reducing cryogenic dirty argon discharge |
-
2018
- 2018-06-29 CN CN201821041450.5U patent/CN208471537U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115744845A (en) * | 2022-10-20 | 2023-03-07 | 上海联风能源科技有限公司 | Argon gas recovery purification efficiency increasing system |
| CN117504525A (en) * | 2023-09-18 | 2024-02-06 | 上海联风气体有限公司 | Dirty argon separation system and method capable of reducing cryogenic dirty argon discharge |
| CN117504525B (en) * | 2023-09-18 | 2024-04-12 | 上海联风气体有限公司 | Dirty argon separation system and method capable of reducing cryogenic dirty argon discharge |
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