CN203807153U - Device for producing hyperpure hydrogen by using integrated low-temperature adsorption method - Google Patents
Device for producing hyperpure hydrogen by using integrated low-temperature adsorption method Download PDFInfo
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- CN203807153U CN203807153U CN201420104440.7U CN201420104440U CN203807153U CN 203807153 U CN203807153 U CN 203807153U CN 201420104440 U CN201420104440 U CN 201420104440U CN 203807153 U CN203807153 U CN 203807153U
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Abstract
The utility model discloses a device for producing hyperpure hydrogen by using an integrated low-temperature adsorption method, and belongs to the technical field of purification of chemical gases. A coiled tube type three-flow heat exchanger of the device adopts a coiled tube structure and is arranged in a coiled tube shield, an interlayer cavity is arranged between a sleeve and a core tube, the interlayer cavity at the upper end of a coiled tube is connected with a material inlet tube, the core tube is connected with a product outlet tube, the interlayer cavity at the lower end of the coiled tube is connected with a lower end inlet of a low-temperature adsorber through a connecting tube and a precooling coiled tube, the core tube is connected with an upper end outlet of the low-temperature adsorber, the upper end of the coiled tube shield is connected with a blow-down tube, and a liquid nitrogen inlet and outlet tube is inserted into the bottom of a vacuum insulation Dewar flask from the top of the vacuum insulation Dewar flask. The whole device is put into an insulation Dewar flask with excellent thermal insulation performance, the gases flowing in and out of the device are all at the temperatures close to the normal temperature, the energy consumption is very low, the structure is compact, the size of the device is small and is generally not more than half cubic meter, furthermore, any pressure is selected in the operation according to the working conditions, the output gas is the hyperpure hydrogen after the gas enters the device, and the operation is simple.
Description
Technical field
The utility model relates to a kind of employing integral type low-temperature adsorption and produces ultra-pure hydrogen device, belongs to chemical gases purification technique field.
Background technology
Along with the high-tech industries such as national defense industry and semi-conductor, microelectronics are to more high-performance, the more requirement of high integration development, more and more higher to much using in process of production gas purity requirement.The purity of hydrogen is extensive on producing, the impact of the product defectses such as photoconductive fiber of super large-scale integration, polysilicon solar cell, excellent performance is increasing.So the purity of hydrogen is proposed to more and more higher requirement, the hydrogen purity of using is now by 4N, 5N, rise to 6N and more than.The purification process of hydrogen is also many: have pressure-variable adsorption, Temp .-changing adsorption, getter to inhale to put, catalyzed conversion, the reduction of heavy metal chemical combination, membrane filtration etc.Various purification process are different, also have relative merits separately, and more than really can reaching 6N, applicable industrial method surely belongs to Cyroadsorption and produces ultra-pure hydrogen method.This method be hydrogen_cooling to liquid nitrogen temperature (196 ℃), use Special adsorbent to remove the remaining impurity in hydrogen, make it reach purifying object, more than the hydrogen that makes to produce in this way can reach 6N.Because this method is to carry out under the condition of very low temperature, so production unit is had to higher requirement, the bad meeting of equipment causes energy dissipation, and product cost improves, and e-quipment and pipe frosting flowing water etc., also make production environment degenerate.
Summary of the invention
In order to solve problems of the prior art, the utility model provides a kind of employing integral type low-temperature adsorption to produce ultra-pure hydrogen device, this device should all concentrate in together the regeneration of the cold recovery of the evaporation of the precooling of unstripped gas, nitrogen, cryogenic absorption, gas product and adsorber, produces the ultra-pure hydrogen that meets product standard.
The technical solution adopted in the utility model is: a kind of employing integral type low-temperature adsorption is produced ultra-pure hydrogen device, it comprises vacuum insulation vacuum jacketed flask and Cyroadsorption device, it also comprises coil tube type three stream interchanger, described Cyroadsorption device and coil tube type three stream interchanger are arranged in vacuum insulation vacuum jacketed flask, and coil tube type three stream interchanger are positioned at the top of Cyroadsorption device, described coil tube type three stream interchanger adopt coil tube type structure and are arranged in coil pipe cover, the core pipe of coil pipe is provided with sleeve pipe outward, between sleeve pipe and core pipe, be provided with interlayer cavity, the interlayer cavity of coil pipe upper end connects feed(raw material)inlet pipe, core pipe connects products export pipe, the interlayer cavity of coil pipe lower end is connected the lower end import of low-temperature adsorber with desuperheating coil through pipe connecting, core pipe connects the upper end outlet of low-temperature adsorber, described coil pipe cover upper end connects blow-down pipe, lower end adopts Open architecture, a liquid nitrogen inlet/outlet pipe is inserted into the bottom of vacuum insulation vacuum jacketed flask from the top of vacuum insulation vacuum jacketed flask.
The outside of described Cyroadsorption device is provided with absorption regeneration electric heater.
Described Cyroadsorption device and desuperheating coil are immersed in liquid nitrogen.
In described Cyroadsorption device, fill gac.
Adopt above-mentioned technical scheme, coil tube type three stream interchanger adopt multilayer to arrange, and are placed on the top in device, for the cold recovery of gas product after the emptying nitrogen of the pre-cold-peace of unstripped gas, purifying.Cyroadsorption device is placed on the bottom of device Inner, is immersed in liquid nitrogen, and in-built modified activated carbon absorbent, with removing the impurity in gas.Absorption regeneration is placed on Cyroadsorption device with electric heater, heat modification acticarbon when regenerating.Vacuum insulation vacuum jacketed flask is the outer container of complete assembly, and all devices is all mounted in it, and plays cold insulation heat insulating function and reduces energy waste.
The beneficial effects of the utility model are: Cyroadsorption device and coil tube type three stream interchanger that this employing integral type low-temperature adsorption is produced ultra-pure hydrogen device are arranged in vacuum insulation vacuum jacketed flask, coil tube type three stream interchanger adopt coil tube type structure and are arranged in coil pipe cover, between sleeve pipe and core pipe, be provided with interlayer cavity, the interlayer cavity of coil pipe upper end connects feed(raw material)inlet pipe, core pipe connects products export pipe, the interlayer cavity of coil pipe lower end is connected the lower end import of low-temperature adsorber with desuperheating coil through pipe connecting, core pipe connects the upper end outlet of low-temperature adsorber, coil pipe cover upper end connects blow-down pipe, a liquid nitrogen inlet/outlet pipe is inserted into the bottom of vacuum insulation vacuum jacketed flask from the top of vacuum insulation vacuum jacketed flask.Whole device is all placed in the adiabatic vacuum jacketed flask that heat-insulating property is fabulous, the gas of in-out apparatus all approaches normal temperature, energy consumption is very little, and compact construction, volume is small and exquisite, and general volume is no more than half cubic metre, can also be according to operating mode, select any pressure operation, after gas enters, be exactly out ultra-pure hydrogen, simple to operate.
Accompanying drawing explanation
Fig. 1 is the structure iron that integral type cryogenic absorption is produced ultra-pure hydrogen device.
Fig. 2 is the A enlarged view in Fig. 1.
In figure: 1, vacuum insulation vacuum jacketed flask, 2, liquid nitrogen, 3, absorption regeneration electric heater, 4, Cyroadsorption device, 5, coil tube type three stream interchanger, 5a, core pipe, 5b, sleeve pipe, 6, pipe connecting, 6a, desuperheating coil, 7, coil pipe cover, a, feed(raw material)inlet pipe, b, products export pipe, c, liquid nitrogen inlet/outlet pipe, d, blow-down pipe.
Embodiment
Fig. 1,2 shows the structure iron that integral type cryogenic absorption is produced ultra-pure hydrogen device.In figure, adopt integral type low-temperature adsorption to produce ultra-pure hydrogen device and comprise vacuum insulation vacuum jacketed flask 1, Cyroadsorption device 4 and coil tube type three stream interchanger 5, Cyroadsorption device 4 and coil tube type three stream interchanger 5 are arranged in vacuum insulation vacuum jacketed flask 1, and coil tube type three stream interchanger 5 are positioned at the top of Cyroadsorption device 4.Coil tube type three stream interchanger 5 adopt coil tube type structure and are arranged in coil pipe cover 7, the core pipe 5a of coil pipe is provided with sleeve pipe 5b outward, between sleeve pipe 5b and core pipe 5a, be provided with interlayer cavity, the interlayer cavity of coil pipe upper end connects feed(raw material)inlet pipe a, core pipe 5a connects products export pipe b, the interlayer cavity of coil pipe lower end is connected the lower end import of low-temperature adsorber 4 with desuperheating coil 6a through pipe connecting 6, core pipe 5a connects the upper end outlet of low-temperature adsorber 4.The outside of Cyroadsorption device 4 is provided with electric heater 3 for absorption regeneration.Coil pipe cover 7 upper ends connect blow-down pipe d, and lower end adopts open architecture, and a liquid nitrogen inlet/outlet pipe c is inserted into the bottom of vacuum insulation vacuum jacketed flask 1 from the top of vacuum insulation vacuum jacketed flask 1.Cyroadsorption device 4 and desuperheating coil 6a are immersed in liquid nitrogen 2.
When this device is used, the unstripped gas inlet tube a of raw hydrogen above device enters this device, coil pipe interlayer cavity through coil tube type three stream interchanger 5, carry out heat exchange precooling with the low temperature nitrogen of evaporation and the gas product in core pipe 5a, by pipe connecting 6 and desuperheating coil 6a, be cooled to liquid nitrogen temperature (196 ℃) again, then enter imurity-removal in the Cyroadsorption device 4 that modified activated carbon absorbent is housed, the core pipe 5a of the coil pipe three stream interchanger 5 on the ultra-pure hydrogen access to plant top after purifying carries out cold recovery, finally the product gas outlet pipe b above device out, send and use point to use or directly fill steel cylinder.Liquid nitrogen is to enter device from the liquid nitrogen inlet/outlet pipe c on device top, and the low temperature nitrogen that heat exchange is evaporated through also heat exchange, is finally discharged from the blow-down pipe d on device top from the coil pipe gap of coil tube type three stream interchanger 5.
This device can be as required, and design operates under different pressure, the raw hydrogen access to plant of normal temperature, and through such a process, going out after device is slightly lower than the ultra-pure hydrogen product of unstripped gas temperature (general low 5～10 ℃).After sorbent material absorption is saturated, then the regeneration of electricity consumption heater heats, periodical operation.
From upper, several operating unit assemblings that the utility model is produced ultra-pure hydrogen Cyroadsorption are placed in a thermally insulated container, make its compact construction, and floor space is little, and cold damage is few, simple to operate.
Claims (4)
1. one kind adopts integral type low-temperature adsorption to produce ultra-pure hydrogen device, it comprises vacuum insulation vacuum jacketed flask (1) and Cyroadsorption device (4), it is characterized in that: further comprising coil tube type three stream interchanger (5), described Cyroadsorption device (4) and coil tube type three stream interchanger (5) are arranged in vacuum insulation vacuum jacketed flask (1), and coil tube type three stream interchanger (5) are positioned at the top of Cyroadsorption device (4), described coil tube type three stream interchanger (5) adopt coil tube type structure and are arranged in coil pipe cover (7), the outer sleeve pipe (5b) that is provided with of core pipe (5a) of coil pipe, between sleeve pipe (5b) and core pipe (5a), be provided with interlayer cavity, the interlayer cavity of coil pipe upper end connects feed(raw material)inlet pipe (a), core pipe (5a) connects products export pipe (b), the interlayer cavity of coil pipe lower end is connected the lower end import of low-temperature adsorber (4) through pipe connecting (6) and desuperheating coil (6a), core pipe (5a) connects the upper end outlet of low-temperature adsorber (4), described coil pipe cover (7) upper end connects blow-down pipe (d), lower end adopts open architecture, a liquid nitrogen inlet/outlet pipe (c) is inserted into the bottom of vacuum insulation vacuum jacketed flask (1) from the top of vacuum insulation vacuum jacketed flask (1).
2. employing integral type low-temperature adsorption according to claim 1 is produced ultra-pure hydrogen device, it is characterized in that: the outside of described Cyroadsorption device (4) is provided with electric heater for absorption regeneration (3).
3. employing integral type low-temperature adsorption according to claim 1 is produced ultra-pure hydrogen device, it is characterized in that: described Cyroadsorption device (4) and desuperheating coil (6a) are immersed in liquid nitrogen (2).
4. employing integral type low-temperature adsorption according to claim 1 is produced ultra-pure hydrogen device, it is characterized in that: in described Cyroadsorption device (4), fill gac.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420104440.7U CN203807153U (en) | 2014-03-10 | 2014-03-10 | Device for producing hyperpure hydrogen by using integrated low-temperature adsorption method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420104440.7U CN203807153U (en) | 2014-03-10 | 2014-03-10 | Device for producing hyperpure hydrogen by using integrated low-temperature adsorption method |
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| Publication Number | Publication Date |
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| CN203807153U true CN203807153U (en) | 2014-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420104440.7U Withdrawn - After Issue CN203807153U (en) | 2014-03-10 | 2014-03-10 | Device for producing hyperpure hydrogen by using integrated low-temperature adsorption method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103848398A (en) * | 2014-03-10 | 2014-06-11 | 中昊光明化工研究设计院有限公司 | Device for producing hyper-pure hydrogen by use of integrated low-temperature adsorption method |
| CN110354636A (en) * | 2019-07-05 | 2019-10-22 | 四川远方高新装备零部件股份有限公司 | A kind of pressure-variable adsorption splitter and its electric-control system |
| CN113639573A (en) * | 2021-08-31 | 2021-11-12 | 北京航天试验技术研究所 | Brazed plate heat exchanger with filtering adsorption and normal-para hydrogen conversion functions |
-
2014
- 2014-03-10 CN CN201420104440.7U patent/CN203807153U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103848398A (en) * | 2014-03-10 | 2014-06-11 | 中昊光明化工研究设计院有限公司 | Device for producing hyper-pure hydrogen by use of integrated low-temperature adsorption method |
| CN110354636A (en) * | 2019-07-05 | 2019-10-22 | 四川远方高新装备零部件股份有限公司 | A kind of pressure-variable adsorption splitter and its electric-control system |
| CN113639573A (en) * | 2021-08-31 | 2021-11-12 | 北京航天试验技术研究所 | Brazed plate heat exchanger with filtering adsorption and normal-para hydrogen conversion functions |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140903 Effective date of abandoning: 20150805 |
|
| RGAV | Abandon patent right to avoid regrant |