CN112361952A - Flexible strain sensor and measuring system for monitoring bearing movement - Google Patents
Flexible strain sensor and measuring system for monitoring bearing movement Download PDFInfo
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- CN112361952A CN112361952A CN202011270878.9A CN202011270878A CN112361952A CN 112361952 A CN112361952 A CN 112361952A CN 202011270878 A CN202011270878 A CN 202011270878A CN 112361952 A CN112361952 A CN 112361952A
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- sensor
- inductance
- interdigital
- flexible
- inductance coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
- G01M13/04—Bearings
Abstract
The invention belongs to the technical field of sensors, and discloses a wireless passive flexible strain sensor and a measuring system for monitoring bearing movement. The sensor adopts flexible substrate, and the front of flexible substrate is provided with inductance coils and interdigital capacitance, interdigital capacitance sets up the inboard at inductance coils, and one utmost point of interdigital capacitance links to each other with inductance coils's inner circle, the position that corresponds with inductance coils outer lane and another utmost point of interdigital capacitance on the flexible substrate is provided with a via hole respectively, the back of flexible substrate is provided with the line that is used for connecting inductance coils outer lane and another utmost point of interdigital capacitance, inductance coils and interdigital capacitance form an LC resonant circuit. The invention carries out strain measurement based on LC principle, and can directly monitor bearing movement.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a wireless passive flexible strain sensor and a measuring system for monitoring bearing movement.
Background
In the past two decades, strain sensors have been widely used in aerospace, automotive, construction, biomedical, and other fields. Because it can accurately detect mechanical deformation or structural changes, it is very suitable for stress, strain and damage measurement, structural health monitoring, material fatigue test and wearable equipment. The sensitive units of the traditional strain sensors mainly use rigid materials (such as metal thin films) and have made remarkable progress, but the metal materials are limited by rigidity, so that the traditional strain sensors are not suitable for detecting structural changes of complex curved surfaces. Strain sensors based on flexible materials have therefore come into play.
The bearing is a precise mechanical element and a basis piece which is very light in weight in various mechanical equipment. With the advance of science and technology towards high precision, new requirements are put forward on the working performance, service life, reliability and economic indexes of various machines, and higher updating requirements are put forward on the performance and quality synchronization of bearings. The application demand for the health condition monitoring of the precision bearing is gradually increased, however, no professional sensor is available at present for monitoring the motion change of the bearing in real time.
Disclosure of Invention
The invention provides a wireless passive flexible strain sensor for monitoring bearing movement and a measurement system thereof, which aim at the severe environment of high-speed rotation of a precision bearing, research a capacitive strain sensitive structure with high centrifugal force inhibition, and realize real-time and accurate monitoring of strain parameters in a rotating environment.
In order to solve the technical problems, the invention adopts the technical scheme that: the utility model provides a wireless passive flexible strain sensor, sensor adopt flexible basement, and the front of flexible basement is provided with inductance coils and interdigital electric capacity, interdigital electric capacity sets up in inductance coils's inboard, and one utmost point of interdigital electric capacity links to each other with inductance coils's inner circle, the position that corresponds with inductance coils outer lane and another utmost point of interdigital electric capacity on the flexible basement is provided with a via hole respectively, the back of flexible basement is provided with the line that is used for connecting inductance coils outer lane and another utmost point of interdigital electric capacity, inductance coils and interdigital electric capacity form an LC resonant circuit.
According to the wireless passive flexible strain sensor, a Polydimethylsiloxane (PDMS) film is adopted as a flexible substrate, and the thickness of the film is 0.2 mm. The interdigital capacitor area of the sensor is 5 x 5mm2The interdigital pair number is 30 pairs, the length is 3.5mm, the line width is 20 mu m, and the space is 20 mu m.
The preparation method of the wireless passive flexible strain sensor comprises the following steps: and printing an inductance coil and an interdigital capacitor on the flexible substrate by using the nano-silver conductive ink by using a micro-nano material deposition system.
The invention also provides a measuring system for monitoring the movement of the bearing, which comprises the wireless passive flexible strain sensor, a reading antenna, a double-inductance resonator and a vector network analyzer, wherein the surface of the bearing to be measured is covered by a ferrite film, the wireless passive flexible strain sensor is attached to the bearing, the double-inductance resonator is respectively connected with the sensor and the reading antenna in an electromagnetic coupling mode, the reading antenna is connected with a port of the vector network analyzer, the network analyzer generates an excitation signal through the antenna, and the double-inductance resonator transmits a signal and is coupled with the sensor, so that the frequency change and the return loss signal generated by the sensor are read.
The double-inductance resonator is formed by connecting two same plane spiral inductors end to end, the number of turns of the two inductors is the same as that of the inductors of the sensor, and the substrate is made of ceramic.
The ferrite film covered on the surface of the bearing to be tested is a flexible functional magnetic sheet prepared from ferrite soft magnetic powder with high magnetic permeability, the thickness of the flexible functional magnetic sheet is 0.1mm, and the applicable frequency of the flexible functional magnetic sheet is 10 MHz-6 GMHz.
Compared with the prior art, the invention has the following beneficial effects: the invention provides a wireless passive flexible strain sensor and a measuring system for monitoring bearing movement, wherein strain measurement is carried out based on an LC principle, the sensor is attached to a bearing and can measure the strain of the bearing, the transmission end and the receiving end of a double-inductance resonator are respectively connected with the sensor and a reading antenna in an electromagnetic coupling mode, and the reading antenna is connected with a port of a vector network analyzer. The network analyzer generates an excitation signal through an antenna, the double-inductance resonator transmits the signal and is coupled with the sensor, and therefore frequency change and return loss signals generated by the sensor are read. The invention has simple and reasonable structure, aims at the application requirement of the health condition monitoring of the precision bearing, utilizes a wireless and passive method to carry out measurement, improves the stability of the measurement, reduces the power consumption, is beneficial to realizing the miniaturization of the strain sensor, is convenient to process and has low cost.
Drawings
FIG. 1 is a schematic diagram of a front view of a wireless passive flexible strain sensor for monitoring bearing movement according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a backside structure of a wireless passive flexible strain sensor for monitoring bearing movement according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a measurement system for monitoring bearing movement according to a second embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a dual-inductor resonator applied in the second embodiment of the present invention;
in the figure: the sensor comprises a flexible substrate 1, an inductance coil 2, an interdigital capacitor 3, a via hole 4, a connecting line 5, an engine 6, a shaft 7, a bearing 8, a wireless passive flexible strain sensor 9, a dual-inductance resonator 10, a reading antenna 11, a network analyzer 12 and a planar spiral inductor 13.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments; all other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-2, an embodiment of the present invention provides a wireless passive flexible strain sensor, where the sensor employs a flexible substrate 1, an inductance coil 2 and an interdigital capacitor 3 are disposed on a front surface of the flexible substrate 1, the inductance coil 2 is a planar spiral inductor, the interdigital capacitor 3 is disposed on an inner side of the inductance coil 2, one pole of the interdigital capacitor 3 is connected to an inner ring of the inductance coil, a via hole 4 is disposed at a position on the flexible substrate 1 corresponding to an outer ring of the inductance coil 2 and another pole of the interdigital capacitor 3, a connecting line 5 for connecting the outer ring of the inductance coil and another pole of the interdigital capacitor 3 is disposed on a back surface of the flexible substrate 1, and the inductance coil 2 and the interdigital capacitor 3 form an LC resonant circuit.
Specifically, in this embodiment, a Polydimethylsiloxane (PDMS) film is used as the flexible substrate, and the thickness of the film is 0.2 mm. The interdigital capacitor area of the sensor is 5 x 5mm2The interdigital pair number is 30 pairs, the length is 3.5mm, the line width is 20 mu m, and the space is 20 mu m. Only 7 pairs are shown in the figure for simplicity.
Specifically, the preparation method of the wireless passive flexible strain sensor provided by the embodiment includes: and printing an inductance coil and an interdigital capacitor on the flexible substrate by using the nano-silver conductive ink by using a micro-nano material deposition system. Specifically, the preparation process comprises the following steps:
(1) preparing a PDMS mixed solution: 10mL of PDMS monomer (Daokning SYLRARD 184) and 1mL of curing agent are measured by using a disposable syringe, and the volume ratio of the monomer to the curing agent is 10: and 1, pouring the mixture into disposable plastic cups in sequence, stirring the mixture for ten minutes by using a stirring rod until the mixture is uniformly mixed, and then putting the mixture into a vacuum drying box for vacuumizing until bubbles in the mixed solution are completely discharged.
(2) Spin coating and curing: putting a 2-inch clean silicon wafer on a spin coater, pouring photoresist AZ6130 as a sacrificial layer, wherein the parameters of the spin coater are as follows: rotating at low speed of 500r/min for 15s and at high speed of 2000r/min for 30s, and then heating on a heating table at 100 ℃ for 1 minute; then spin-coating the mixed solution, wherein the parameters of a spin coater are as follows: the low speed is 500r/min to 15s, and the high speed is 1200r/min to 30 s; then heated on a 75 ℃ heating table for 30min until the film is cured.
(3) The film was subjected to oxygen plasma treatment using a plasma resist remover.
(4) An ink-jet printing sensor, wherein a high-precision micro-nano material deposition system is used for drawing and designing LC patterns, then a software operation system is used for automatically printing, nano silver particle ink is selected as the ink, the printing speed is adjusted to be 200 mu m/s, and the printing is repeated for 6-8 times; the wafer was then placed on a heated platen and annealed at 150 c for 10 minutes.
(5) And (3) after the silicon wafer is cooled, removing the PDMS film by using tweezers, and carrying out oxygen plasma treatment on the reverse side. Two holes were positioned and machined using a laser-beam drill, with a hole diameter of 150 μm.
(6) The ink jet printing system is again used to wire the vias.
In addition, as shown in fig. 3 to 4, an embodiment of the present invention further provides a measurement system for monitoring bearing movement, including the wireless passive flexible strain sensor 9 shown in fig. 1 to 2, further including a reading antenna 10, a dual-inductor resonator 11, and a vector network analyzer 12. The rotation speed of a shaft 7 and a bearing 8 is controlled by an engine 6, the bearing 8 is installed on the shaft 7, in order to enable electromagnetic signals of a wireless passive flexible strain sensor 9 not to be interfered, the bearing 8 needs to be covered by a ferrite film, the surface of the bearing 8 to be measured is covered by the ferrite film, the wireless passive flexible strain sensor 9 is attached to the bearing, a double-inductance resonator 10 is respectively connected with the wireless passive flexible strain sensor 9 and a reading antenna 11 in an electromagnetic coupling mode, and the reading antenna 11 is connected with a port of a vector network analyzer 12. The network analyzer generates an excitation signal through an antenna, the double-inductance resonator transmits the signal and is coupled with the sensor, and therefore frequency change and return loss signals generated by the sensor are read.
As shown in fig. 4, the dual-inductor resonator 10 in the measurement system is formed by connecting two identical planar spiral inductors end to end, the number of turns of the two identical planar spiral inductors is the same as that of the inductance of the wireless passive flexible strain sensor 9, the substrate of the planar spiral inductor 13 is made of ceramic, and the planar spiral inductor is used for transmitting LC sensor signals.
Specifically, in this embodiment, the ferrite thin film covered on the surface of the bearing 8 is a flexible functional magnetic sheet prepared from ferrite soft magnetic powder with high magnetic permeability, the thickness is 0.1mm, the applicable frequency is 10MHz to 6GMH, and the function of enhancing electromagnetic signals is provided.
The invention has simple and reasonable structure, aims at the application requirement of the health condition monitoring of the precision bearing, utilizes a wireless and passive method to carry out measurement, improves the stability of the measurement, reduces the power consumption, is beneficial to realizing the miniaturization of the strain sensor, is convenient to process and has low cost.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (6)
1. The utility model provides a wireless passive flexible strain sensor, its characterized in that, the sensor adopts flexible base (1), and the front of flexible base (1) is provided with inductance coils (2) and interdigital electric capacity (3), interdigital electric capacity (3) set up the inboard in inductance coils (2), and one utmost point of interdigital electric capacity (3) links to each other with inductance coils's inner circle, flexible base (1) is gone up and is provided with a via hole (4) respectively with inductance coils (2) outer lane and the position that another utmost point of interdigital electric capacity (3) corresponds, the back of flexible base (1) is provided with line (5) that are used for connecting inductance coils outer lane and interdigital electric capacity (3) another utmost point, inductance coils (2) and interdigital electric capacity (3) form an LC resonance circuit.
2. The wireless passive flexible strain sensor of claim 1, wherein the flexible substrate is a polydimethylsiloxane film having a thickness of 0.2 mm, and the interdigital capacitance area of the sensor is 5 x 5mm2The interdigital pair number is 30 pairs, the length is 3.5mm, the line width is 20 mu m, and the space is 20 mu m.
3. The wireless passive flexible strain sensor of claim 1, wherein the method of manufacturing comprises: and printing an inductance coil and an interdigital capacitor on the flexible substrate by using the nano-silver conductive ink by using a micro-nano material deposition system.
4. A measuring system for monitoring bearing movement, comprising the wireless passive flexible strain sensor of claim 1, further comprising a reading antenna, a dual-inductance resonator and a vector network analyzer, wherein the surface of a bearing to be measured is covered by a ferrite film, the wireless passive flexible strain sensor is attached to the bearing, the dual-inductance resonator is respectively connected with the sensor and the reading antenna in an electromagnetic coupling mode, the reading antenna is connected with a port of the vector network analyzer, the network analyzer generates an excitation signal through the antenna, and the dual-inductance resonator transmits a signal and is coupled with the sensor, so that frequency change and return loss signals generated by the sensor are read.
5. A measuring system for monitoring bearing movement according to claim 4 wherein the double inductance resonator is connected end to end by two identical planar spiral inductors, the number of turns of the two inductors being the same as the inductance of the sensor, the substrate being ceramic.
6. A measuring system for monitoring bearing movement according to claim 4, characterized in that the ferrite thin film covered on the surface of the bearing to be measured is a flexible functional magnetic sheet prepared by ferrite soft magnetic powder with high magnetic permeability, the thickness is 0.1mm, and the applicable frequency is 10 MHz-6 GMH.
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| CN202011270878.9A CN112361952A (en) | 2020-11-13 | 2020-11-13 | Flexible strain sensor and measuring system for monitoring bearing movement |
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| CN202011270878.9A CN112361952A (en) | 2020-11-13 | 2020-11-13 | Flexible strain sensor and measuring system for monitoring bearing movement |
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Cited By (2)
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| CN113125154A (en) * | 2021-04-07 | 2021-07-16 | 重庆大学 | Integrated intelligent bearing |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
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| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
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Inventor after: Cui Min Inventor after: Zhang Lei Inventor after: Tan Qiulin Inventor after: Fan Zhihong Inventor before: Zhang Lei Inventor before: Tan Qiulin Inventor before: Fan Zhihong |