CN108663152A - Pressure-sensitive film, the production method of pressure-sensitive film and pressure sensor - Google Patents
Pressure-sensitive film, the production method of pressure-sensitive film and pressure sensor Download PDFInfo
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- CN108663152A CN108663152A CN201710202277.6A CN201710202277A CN108663152A CN 108663152 A CN108663152 A CN 108663152A CN 201710202277 A CN201710202277 A CN 201710202277A CN 108663152 A CN108663152 A CN 108663152A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/10—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the capsule type
- G01L7/106—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the capsule type with optical transmitting or indicating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/10—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the capsule type
- G01L7/102—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the capsule type construction or mounting of capsules
Abstract
The invention discloses a kind of pressure-sensitive film, the production method of pressure-sensitive film and a kind of pressure sensors.The production method of pressure-sensitive film includes：Preparation includes one-dimensional or the first solution of two-dimensional metallic nano-particle；Preparation includes the second solution of the polymer compatible with the metal nanoparticle；And mix first solution with second solution, the moisture of mixed solution is removed, the pressure-sensitive film is obtained, wherein before mixing first solution with second solution, plastic agent is added into second solution.A kind of absorption spectrum can be made to pressure-sensitive pressure-sensitive film according to the production method of pressure-sensitive film of the present invention, which can be used in pressure sensor, improve the anti-electromagnetic interference capability of sensor.
Description
Technical field
The present invention relates to physical quantity detection field, relate more specifically to the production method of a kind of pressure-sensitive film, pressure-sensitive film
And a kind of pressure sensor.
Background technology
Existing pressure sensor is mostly to realize pressure detecting using electromagnetic induction principle, in using for sensor
Cheng Zhong, due to being interfered by the machine in electromagnetic equipment around or application, it will usually lead to the electromagnetic signal failure of sensor,
Lead to the problem of pressure detecting inaccuracy.
Therefore, there is an urgent need for a kind of stronger pressure sensing material of anti-interference ability and devices.
Invention content
In view of this, the purpose of the present invention is to provide a kind of absorption spectrums to pressure-sensitive pressure-sensitive film and its making
Method, the present invention also aims to provide a kind of pressure sensor, anti-electromagnetic interference capability is stronger.
According to an aspect of the present invention, a kind of production method of pressure-sensitive film is provided, including：Preparation includes one-dimensional or two-dimentional
First solution of metal nanoparticle；Preparation includes the second solution of the polymer compatible with the metal nanoparticle；And
First solution is mixed with second solution, the moisture of mixed solution is removed, obtains the pressure-sensitive film, wherein
Before first solution is mixed with second solution, plastic agent is added into second solution.
Preferably, the plastic agent is the polyethylene glycol of predetermined molecular weight range.
Preferably, the metal nanoparticle is the nanometer sheet or nanometer rods of any metal in gold, platinum, palladium.
Preferably, the polymer is any one of polyvinyl alcohol, polyvinylpyrrolidone, dimethyl silicone polymer.
Preferably, the preparation includes one-dimensional or the first solution of two-dimensional metallic nano-particle includes：Prepare seed metallization
Solution；Prepare corresponding metal growth solution；The seed metallization solution is added into the metal growth solution, gold is carried out
Belong to seed growth；And centrifugal treating and supernatant is removed, obtain first solution.
Preferably, the seed metallization solution for preparing includes：Gold chloride and cetyl trimethylammonium bromide solution are mixed
It closes；Sodium borohydride solution is added and continues to stir scheduled duration, obtains the seed metallization solution.
Preferably, described to prepare corresponding metal growth solution and include：Gold chloride, cetyl trimethylammonium bromide is molten
Liquid and silver nitrate solution mixing；Ascorbic acid solution is added, obtains the metal growth solution.
Preferably, before the seed metallization solution being added into the metal growth solution, by the seed metallization
Solution left standstill 20 to 60 minutes.
Preferably, the preparation includes that the second solution of the polymer compatible with the metal nanoparticle includes：By institute
The powder for stating polymer is added into water；It heats and continues to stir so that the polymer completely dissolves in water.
Preferably, the mass ratio of the polymer and water is 1: 9.
According to another aspect of the invention, a kind of pressure-sensitive film is provided, according to the production method system of above-mentioned pressure-sensitive film
.
In accordance with a further aspect of the present invention, a kind of pressure sensor is provided, including：Support construction, including fixed part and work
Dynamic portion；First light transmission block and the second light transmission block, between the fixed part and the movable part, the first light transmission block and institute
Fixed part contact is stated, the second light transmission block is contacted with the movable part；Above-mentioned pressure-sensitive film is folded in first light transmission
Between block and the second light transmission block；And optical transmitter module and light detection module, the support construction are located at the light emitting
Between module and the light detection module, wherein the fixed part is equipped with first through hole corresponding with the pressure-sensitive film position,
The movable part is equipped with the second through-hole corresponding with the pressure-sensitive film position, the first through hole, the first light transmission block, institute
State the access that pressure-sensitive film, the second light transmission block and second through-hole form light, the light that the optical transmitter module is sent out
The optical tests module is reached by the access.
Preferably, the pressure sensor further includes：Guide post, described guide post one end are fixed with the fixed part, separately
One end passes through the movable part, the movable part to be moved along the guide post；Clump weight is connect with the movable part.
Pressure-sensitive film according to the present invention and preparation method thereof, by with the one-dimensional of local surface plasma resonance behavior or
A kind of laminated film is made with polymer material in two-dimensional metallic nano-particle.Wherein, there are two modes of resonance for metal nanoparticle tool
Formula, one are lateral resonance peak of the incident light along the Polarized Excitation perpendicular to its axial direction, another for along its axial electronic
Caused longitudinal resonance peak.The ratio at longitudinal resonance peak and lateral resonance peak can be with axial direction and the incident light side of metal nanoparticle
To angle variation and change.Pressure-sensitive film before compression, in metal nanoparticle be uniformly distributed in thin polymer film
In, distribution of orientations of the metal nanoparticle in thin polymer film is regarded as random；When applying pressure to pressure-sensitive film,
Film will produce deformation, and metal nanoparticle can become distribution of orientations, the variation meeting that metal nanoparticle is orientated from mixed and disorderly distribution
The variation for causing its two kinds of resonance p-ratios, the size of pressure-sensitive film pressure can be obtained by the variation of the ratio.
Pressure-sensitive film according to the present invention and pressure sensor including the pressure-sensitive film, using pressure to film absorption light
The influence of spectrum can be achieved the grasp to pressure change by the variation of detector absorption spectrum, be set based on electromagnetic induction with existing
Meter pressure sensing instrument is compared, and is avoided that interference of the periphery electromagnetism to detection data, is improved the accuracy of pressure detecting.
The production method of pressure-sensitive film according to the present invention, before first solution is mixed with second solution,
Plastic agent is added into second solution.By adjusting the dosage of the plastic agent, the hard of pressure-sensitive film obtained can be controlled
Degree is conveniently applied to be easier to grasp the correspondence of film pressure and absorption spectrum.
Description of the drawings
By referring to the drawings to the description of the embodiment of the present invention, above-mentioned and other purposes of the invention, feature and
Advantage will be apparent from.
Fig. 1 shows the block diagram of the production method of the pressure-sensitive film of the embodiment of the present invention；
Fig. 2 a show the schematic diagram of the single gold nanorods and incident light angle of the embodiment of the present invention；
Fig. 2 b show the analog result of single gold nanorods extinction spectra under different orientation of the embodiment of the present invention；
Fig. 2 c show that the gold nanorods longitudinal resonance peak of the embodiment of the present invention becomes with the ratio at lateral resonance peak with its orientation
The relational graph of change；
Fig. 3 a show the schematic diagram that the preceding gold nanorods of pressure-sensitive film compression of the embodiment of the present invention are orientated；
Fig. 3 b show the embodiment of the present invention pressure-sensitive film be pressurized after gold nanorods be orientated schematic diagram；
Fig. 4 shows the schematic diagram of the pressure sensor of the embodiment of the present invention.
Specific implementation mode
Hereinafter reference will be made to the drawings is more fully described the present invention.In various figures, identical element is using similar attached
Icon is remembered to indicate.For the sake of clarity, the various pieces in attached drawing are not necessarily to scale.In addition, may not show in figure
Go out certain well known parts.
Many specific details of the present invention, such as the structure of component, material, size, processing work is described hereinafter
Skill and technology, to be more clearly understood that the present invention.But it just as the skilled person will understand, can not press
The present invention is realized according to these specific details.
The embodiment of the present invention provides a kind of production method of pressure-sensitive film, and Fig. 1 shows the production method of the pressure-sensitive film
Block diagram.
In step S111, preparation includes one-dimensional or the first solution of two-dimensional metallic nano-particle.
Metal nanoparticle can be any metal in gold, platinum, palladium or other noble metals, and nanoparticle morphology can be with
It is nanometer sheet, nanometer rods or other one-dimensional or two-dimensional nano particles.It below will be by taking the metal nanoparticle be gold nanorods as an example
The method for preparing the first solution is described in detail.
The step of preparing the first solution may include：First prepare seed metallization solution and prepares corresponding metal grow it is molten
Then liquid the seed metallization solution is added into the metal growth solution, seed metallization growth is carried out, then at centrifugation
Supernatant is managed and removed, first solution is obtained.
Wherein, preparing seed metallization solution may include：First gold chloride and cetyl trimethylammonium bromide solution are mixed
It closes, sodium borohydride solution is then added and continues to stir scheduled duration, obtain the seed metallization solution.
Preparing corresponding metal growth solution may include：First by gold chloride, cetyl trimethylammonium bromide solution with
And silver nitrate solution mixing, ascorbic acid solution is then added, obtains the metal growth solution.
It, can be first molten by the seed metallization before the seed metallization solution is added into the metal growth solution
Liquid stands 20 to 60 minutes.
In an exemplary tests, the preparation process of above-mentioned the first solution comprising gold nanorods can be：First prepare
Gold seeds, by the dense of the chlorauric acid solution of a concentration of 0.2~0.8mM (M=mol/L, similarly hereinafter) of 0.5~4mL and 0.5~4mL
Degree is that the cetyl trimethylammonium bromide solution of 0.05~0.4M is mixed, then while agitating into mixed solution
Inject 30~600 μ L a concentration of 0.005~0.03M sodium borohydride solution, stirring continue 1~5min, wait for solution colour from
Yellow becomes brown color, and gold seeds solution is made.When preparing growth solution, first in a concentration of 0.05~0.4M of 40mL 16
The silver nitrate solution of predetermined amount is added in alkyl trimethyl ammonium bromide solution, is e.g. added a concentration of the 0.005 of 0.1~2mL
Then the chlorauric acid solution of a concentration of 0.5~4mM of 40mL is added in the silver nitrate solution of~0.03M.Solution is uniformly mixed backward
The ascorbic acid solution of a concentration of 0.03~0.2M of 0.2~2mL is wherein added dropwise, waits for that solution colour gradually becomes nothing from dark yellow
Corresponding growth solution is made in color.Finally, the above-mentioned gold seeds solution of 50~300 μ L is injected into above-mentioned growth solution, is stirred
Mixed solution is put into 30~60min of standing in 20~40 DEG C of water bath after 1~5min, carries out seed growth.Seed is given birth to
After growth process, supernatant is removed after solution is centrifuged 20~40min, obtains the first solution for including gold nanorods.It needs
Illustrate, it, can be first by gold seeds solution left standstill before being added the gold seeds solution into above-mentioned growth solution
20~60min.
In step S121, preparation includes the second solution of the polymer compatible with above-mentioned metal nanoparticle.
The polymer can be polyvinyl alcohol, polyvinylpyrrolidone, dimethyl silicone polymer etc., preferably with above-mentioned metal
The good high molecular material of nano-particle compatibility.Below by the method to preparing the second solution by taking polymer is polyvinyl alcohol as an example
It is described in detail.
The process for preparing the second solution may include：The powder of the polymer is added into water, then heats and holds
Continuous stirring so that the polymer completely dissolves in water.
Specifically, correspond to above-mentioned example to test, preparing the second solution can be：Pva powder is added to water
In, the mass ratio of polyvinyl alcohol and water is, for example, 1: 9.Under mechanical stirring, the above process is obtained into mixed liquor and is heated to 75
~95 DEG C.4~12h is persistently stirred, until polyvinyl alcohol completely dissolves in water, then solution is cooled to room temperature, is contained
The second solution that the weight percent of polyvinyl alcohol is 10%.
In step S131, first solution is mixed with second solution, the moisture of mixed solution is removed, obtains
The pressure-sensitive film.
In the present embodiment, before step S131, step S122 can be first carried out, i.e., modeling is added into second solution
Property agent.
Plastic agent can be the polyethylene glycol of predetermined molecular weight range, e.g. polyethylene glycol 400 (PEG400).Pass through tune
The dosage of the plastic agent is saved, the hardness of final pressure-sensitive film obtained can be controlled.
It is corresponding with above-mentioned example experiment, after being mixed into polyethylene glycol in the second solution obtained above, above-mentioned steps
S131 is specifically as follows：The first solution of 200~800 a concentration of 2~5mg/mL of μ L is added to second solution, is stirred by magnetic force
It mixes and pours into beaker after mixing.Mixed solution is placed at room temperature, after moisture evaporating completely, one is obtained in beaker bottom
Layer film tears film to get to the pressure-sensitive film of the present embodiment from beaker bottom.
The embodiment of the present invention also provides a kind of pressure-sensitive film, is made according to the production method of above-mentioned pressure-sensitive film.
According to above-mentioned pressure-sensitive film and preparation method thereof, by with the one-dimensional of local surface plasma resonance behavior or
A kind of laminated film is made in two-dimensional metallic nano-particle and polymer material, specifically, in the above-described embodiments, by by Jenner
Rice stick and polyvinyl alcohol carry out compound obtaining pressure-sensitive film.Wherein, there are two resonance modes for gold nanorods tool, and one is incident light
Along perpendicular to the lateral resonance peak of its axial Polarized Excitation, wavelength is smaller, and crest location is located at 512 rans；Separately
One is the longitudinal resonance peak caused by its axial electronic, and wavelength is larger, and the draw ratio of crest location and gold nanorods has
It closes.
Fig. 2 a show the schematic diagram of single gold nanorods and incident light angle in the present embodiment, plurality of arrow show into
The direction of light, included angle A, that is, axial direction of single gold nanorods 311 and the angle of incident light are penetrated, different size of included angle A corresponds to gold
The different orientation of nanometer rods 311.
Fig. 2 b show the analog result of single gold nanorods extinction spectra under different orientation, in the direction of the arrow more in figure
The size of the corresponding included angle A of curve is successively decreased, when the included angle A of gold nanorods and incident light is reduced from 90 degree to 0 degree, it is longitudinal altogether
The intensity at peak of shaking is gradually reduced.
Fig. 2 c show gold nanorods longitudinal resonance peak with the ratio at lateral resonance peak with the relational graph of its change in orientation, longitudinal direction
The ratio of formant and lateral resonance peak can gradually increase with the axial increase with the included angle A of incident light direction of gold nanorods.
The signal that before the pressure-sensitive film compression of the present embodiment and gold nanorods are orientated after being pressurized is shown respectively in Fig. 3 a and Fig. 3 b
Figure.Pressure-sensitive film 310 before compression, in gold nanorods 311 be uniformly distributed in thin polymer film 312, gold nanorods 311
Distribution of orientations in thin polymer film 312 is regarded as random；When applying pressure to pressure-sensitive film 310, polymer thin
Film 312 will produce deformation, and gold nanorods 311 can become distribution of orientations from mixed and disorderly distribution, and the variation that gold nanorods 311 are orientated can draw
The variation for playing above two resonance p-ratio, the size of 310 pressure of pressure-sensitive film is may determine that by the variation of the ratio.
Therefore, pressure-sensitive film production method according to the present invention and its pressure-sensitive film obtained, utilize its absorption spectrum pair
Pressure-sensitive characteristic can replace tradition using the pressure-responsive unit application of electromagnetic induction principle in voltage sensitive sensor,
To avoid the electromagnetism on periphery to the interference of detection data, the accuracy of pressure detecting is improved.
In the production method of above-described embodiment, before mixing first solution with second solution, to described
Plastic agent is added in second solution.By adjusting the dosage of the plastic agent, the hardness of pressure-sensitive film obtained can be controlled, from
And be easier to grasp the correspondence of film pressure and absorption spectrum, conveniently it is applied to.
The embodiment of the present invention also provides a kind of pressure sensor, and Fig. 4 shows showing for the pressure sensor of the embodiment of the present invention
It is intended to, which includes：Support construction 410, the first light transmission block 421 and the second light transmission block 422, pressure-sensitive film 310, light
Transmitting module 431 and light detection module 432.Support construction 410 includes fixed part 411 and movable part 412, fixed part 411 and work
Predetermined distance between dynamic portion 412, the first light transmission block 421 and the second light transmission block 422 are located at fixed part 411 and movable part 412
Between, wherein the first light transmission block 421 is contacted with fixed part 411, the second light transmission block 422 is contacted with movable part 412.The present embodiment
Pressure-sensitive film 310 can be the pressure-sensitive film in above-described embodiment, be folded in the first light transmission block 421 and the second light transmission block 422
Between.Optical transmitter module 431 and light detection module 432 are also spaced from each other, and support construction 410 is located at optical transmitter module 431 and light
Between detection module 432, in the present embodiment, optical transmitter module 431 is located at the side of the movable part 412 close to support construction 410,
Light detection module 432 is located at the side of the fixed part 411 close to support construction 410, it is of course possible to understanding, above-mentioned light emitting
Module 431 and the position of light detection module 432 can also be exchanged.
First light transmission block 421 and the second light transmission block 422 can be sapphire materials, have both light transmission and transmit the energy of pressure
Power.Optical transmitter module 431 and light detection module 432 be, for example, corresponding transmitting and detection ultraviolet-visible light light emitting devices and
Optical detection device.
Further, the pressure sensor of the present embodiment further includes guide post 440 and clump weight 450.Guide post 440 can be with
It is multiple, one end and the fixed part 411 of each guide post 440 are fixed, and the other end passes through movable part 412, and movable part 412 can edge
Guide post 440 moves back and forth.Clump weight 450 is connect with movable part 412, is e.g. mounted on movable part 412 towards light emitting mould
In the one side of block 431.
Fixed part 411 be equipped with first through hole 461 corresponding with 310 position of pressure-sensitive film, movable part 412 be equipped with it is pressure-sensitive thin
Corresponding second through-hole 462 in 310 position of film, in addition the present embodiment be additionally provided on clump weight 450 and 310 position pair of pressure-sensitive film
The third through-hole 463 answered.Above-mentioned first through hole 461, the first light transmission block 421, pressure-sensitive film 310, the second light transmission block 422,
Two through-holes 462 and third through-hole 463 form the access of light, and arrow shows the irradiation for the light that optical transmitter module 431 is sent out in figure
Direction can reach optical tests module 432 by the access.
When applying pressure to pressure sensor, the pressure that support construction 410 is subject to passes through the first light transmission block 421 and second
Light transmission block 422 is transferred on pressure-sensitive film 310, and pressure-sensitive film 310 will produce deformation, and interior metal nanoparticle can be from mixed and disorderly point
Cloth becomes distribution of orientations, and the variation that metal nanoparticle is orientated can cause its longitudinal resonance peak and the ratio at lateral resonance peak
Variation, the variation by observing 432 absorption spectrum of optical tests module can obtain the size of 310 pressure of pressure-sensitive film.With
The existing pressure sensing instrument based on electromagnetic induction design is compared, and pressure sensor of the invention is avoided that periphery electromagnetism to detection
The interference of data improves the accuracy of pressure detecting.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
As described above according to the embodiment of the present invention, there is no all details of detailed descriptionthe for these embodiments, also not
Limit the specific embodiment that the invention is only described.Obviously, as described above, can make many modifications and variations.This explanation
These embodiments are chosen and specifically described to book, is in order to preferably explain the principle of the present invention and practical application, belonging to making
Technical field technical staff can utilize modification of the invention and on the basis of the present invention to use well.The present invention is only by right
The limitation of claim and its full scope and equivalent.
Claims (13)
1. a kind of production method of pressure-sensitive film, which is characterized in that including：
Preparation includes one-dimensional or the first solution of two-dimensional metallic nano-particle；
Preparation includes the second solution of the polymer compatible with the metal nanoparticle；And
First solution is mixed with second solution, the moisture of mixed solution is removed, obtains the pressure-sensitive film,
Wherein, before mixing first solution with second solution, plastic agent is added into second solution.
2. the production method of pressure-sensitive film according to claim 1, which is characterized in that the plastic agent is predetermined molecular weight
The polyethylene glycol of range.
3. the production method of pressure-sensitive film according to claim 1, which is characterized in that the metal nanoparticle be gold,
The nanometer sheet or nanometer rods of any metal in platinum, palladium.
4. the production method of pressure-sensitive film according to claim 1, which is characterized in that the polymer be polyvinyl alcohol,
Any one of polyvinylpyrrolidone, dimethyl silicone polymer.
5. the production method of pressure-sensitive film according to claim 1, which is characterized in that the preparation includes one-dimensional or two-dimentional
First solution of metal nanoparticle includes：
Prepare seed metallization solution；
Prepare corresponding metal growth solution；
The seed metallization solution is added into the metal growth solution, seed metallization growth is carried out；And
Centrifugal treating simultaneously removes supernatant, obtains first solution.
6. the production method of pressure-sensitive film according to claim 5, which is characterized in that described to prepare seed metallization solution packet
It includes：
Gold chloride is mixed with cetyl trimethylammonium bromide solution；
Sodium borohydride solution is added and continues to stir scheduled duration, obtains the seed metallization solution.
7. the production method of pressure-sensitive film according to claim 6, which is characterized in that described to prepare corresponding metal growth
Solution includes：
Gold chloride, cetyl trimethylammonium bromide solution and silver nitrate solution are mixed；
Ascorbic acid solution is added, obtains the metal growth solution.
8. the production method of pressure-sensitive film according to claim 5, which is characterized in that the seed metallization solution to be added
To before in the metal growth solution, by the seed metallization solution left standstill 20 to 60 minutes.
9. the production method of pressure-sensitive film according to claim 1, which is characterized in that the preparation includes and the metal
Second solution of the compatible polymer of nano-particle includes：
The powder of the polymer is added into water；
It heats and continues to stir so that the polymer completely dissolves in water.
10. the production method of pressure-sensitive film according to claim 9, which is characterized in that the quality of the polymer and water
Ratio is 1: 9.
11. a kind of pressure-sensitive film, which is characterized in that the making side of the pressure-sensitive film according to any one of claim 1-10
Method is made.
12. a kind of pressure sensor, which is characterized in that including：
Support construction, including fixed part and movable part；
First light transmission block and the second light transmission block, between the fixed part and the movable part, the first light transmission block and institute
Fixed part contact is stated, the second light transmission block is contacted with the movable part；
Pressure-sensitive film according to claim 11 is folded between the first light transmission block and the second light transmission block；With
And
Optical transmitter module and light detection module, the support construction be located at the optical transmitter module and the light detection module it
Between,
Wherein, the fixed part be equipped with first through hole corresponding with the pressure-sensitive film position, the movable part be equipped with it is described
Corresponding second through-hole in pressure-sensitive film position, the first through hole, the first light transmission block, the pressure-sensitive film, described second
Light transmission block and second through-hole form the access of light, and the light that the optical transmitter module is sent out passes through described in access arrival
Optical tests module.
13. pressure sensor according to claim 12, which is characterized in that further include：
Guide post, described guide post one end are fixed with the fixed part, and the other end passes through the movable part, and the movable part is along institute
State guide post movement；
Clump weight is connect with the movable part.
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| CN111253598A (en) * | 2020-01-17 | 2020-06-09 | 清华大学 | Thin film piezoresistive material, preparation method thereof and electronic device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109738112A (en) * | 2019-01-30 | 2019-05-10 | 中山大学 | A kind of pressure detection means based on nano-sensor |
| CN110220635A (en) * | 2019-07-12 | 2019-09-10 | 南昌航空大学 | Fluorescence type fluid pressure measurement method |
| CN110487453A (en) * | 2019-08-23 | 2019-11-22 | 中山科立特光电科技有限公司 | A kind of device using optical instrument measurement slight pressure |
| CN111253598A (en) * | 2020-01-17 | 2020-06-09 | 清华大学 | Thin film piezoresistive material, preparation method thereof and electronic device |
| CN111253598B (en) * | 2020-01-17 | 2022-03-11 | 清华大学 | Thin film piezoresistive material, preparation method thereof and electronic device |
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