CN112349698B - LCP packaging substrate, manufacturing method and multi-chip system-in-package structure - Google Patents

LCP packaging substrate, manufacturing method and multi-chip system-in-package structure Download PDF

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CN112349698B
CN112349698B CN202011039824.1A CN202011039824A CN112349698B CN 112349698 B CN112349698 B CN 112349698B CN 202011039824 A CN202011039824 A CN 202011039824A CN 112349698 B CN112349698 B CN 112349698B
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layer
metal circuit
lcp
chip
circuit layer
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CN112349698A (en
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廖翱
高阳
易明生
戴广乾
曾策
边方胜
马宁
谢国平
卢军
林玉敏
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CETC 29 Research Institute
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
    • H01L23/49894—Materials of the insulating layers or coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76895—Local interconnects; Local pads, as exemplified by patent document EP0896365
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838—Geometry or layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5386—Geometry or layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/552—Protection against radiation, e.g. light or electromagnetic waves

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  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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Abstract

The invention discloses an LCP packaging substrate, a manufacturing method and a multi-chip system-in-package structure, wherein the LCP packaging substrate comprises: n patterned metal circuit layers distributed from the surface to the bottom surface; the insulating medium layer is positioned between the adjacent graphical metal circuit layers; the insulating medium layer between the second patterned metal circuit layer and the third patterned metal circuit layer consists of an LCP substrate and a non-LCP material substrate; the insulating medium layer is positioned between the first patterned metal circuit layer and the second patterned metal circuit layer, and the openings of the insulating medium layer face to the plurality of blind grooves of the first patterned metal circuit layer; the blind grooves comprise chip mounting blind grooves and surrounding frame welding blind grooves; and the plurality of blind holes penetrate through and are connected with the adjacent patterned metal circuit layers. The LCP packaging substrate with the near-airtight packaging structure can meet the system-level packaging requirements of multiple chips, high airtight requirements, high electromagnetic shielding and high reliable interconnection.

Description

LCP packaging substrate, manufacturing method and multi-chip system-in-package structure
Technical Field
The invention relates to the technical field of integrated circuits and chip packaging, in particular to an LCP packaging substrate, a manufacturing method and a multi-chip system-in-package structure, which are used for high-reliability system-in-package for high-frequency applications such as radio frequency, microwave, millimeter wave and the like.
Background
As semiconductor and integrated circuit technologies advance, system integration requirements further increase, and current electronic circuit designs and manufacturing are developed toward smaller sizes and higher integration densities, and considerable work is performed in the field of multi-chip packaging. In an advanced package form, a plurality of Radio Frequency (RF) chips, digital Integrated Circuit (IC) chips, micro chip devices, etc. are assembled on a package substrate by the SIP technology and then integrated into one package. The multi-chip packaging form shortens the pin distance between the chips, greatly improves the packaging density and can meet the requirements of system-level packaging to a certain extent.
Depending on the material of the package substrate, the package method can be generally divided into two types: one is a multilayer ceramic package using a cavity structure, and the other is a plastic package using a multilayer PCB substrate as a chip substrate material.
The ceramic packaging substrate has the advantages of high integration density, high reliability, high air tightness, high heat conductivity, excellent corrosion resistance and the like. However, due to the thermal mismatch between the ceramic material and the PCB material, the large-sized package cannot be performed, and the ceramic package has a problem of high manufacturing cost.
The plastic packaging substrate has the characteristics of low cost, relatively simple process and high interconnection density, and can realize secondary high-density interconnection with a PCB motherboard in the forms of BGA and the like. The biggest defects of the PCB are that the common PCB material has high moisture absorption rate and poor water vapor blocking performance, and cannot realize airtight packaging; meanwhile, the dielectric properties (dielectric constant and dielectric loss) of common resin materials are limited, and the common resin materials cannot be applied to radio frequency/microwave transmission. These deficiencies limit the use of plastic packages for highly reliable, high performance chip packaging, the main area of application of which is consumer electronics today.
The Liquid Crystal Polymer (LCP) material has the outstanding advantages of excellent dielectric transmission property, extremely low moisture absorption rate, water permeability and oxygen transmission rate, plane thermal expansion coefficient matched with copper, high heat resistance, chemical corrosion resistance and the like, conforms to the strict requirements of a radio frequency/microwave chip on a packaging substrate material, and is a new generation substrate material with high reliability, huge potential in the high-performance chip packaging application field and wide application prospect.
Chinese patents CN106486427A and CN206259334U disclose a package housing based on an LCP substrate and a method for manufacturing the same, in which the LCP substrate is used as a substrate layer for chip mounting, and technologies such as chip assembly, metal enclosure frame, cover plate welding and the like are used as auxiliary materials, so as to provide a solution for chip hermetic package. In this package form, a specific structure and a manufacturing method are not given as a package substrate; the packaging form of the packaging structure lacks an external interconnection interface, and the secondary cascade of a packaging body cannot be realized; LCP base plate does not possess the circuit subregion characteristic, can not provide the good electromagnetic shield basis for the multi-chip complex system, and the circuit crosstalk problem is difficult to avoid.
Chinese patent CN102593077A discloses a liquid crystal polymer package structure, which is formed by hot-melting and combining a high-melting-point LCP composite cover plate and a low-melting-point LCP tube shell. The packaging structure is too simple and does not relate to the specific structural characteristics and the implementation method of the substrate.
Chinese patent CN104282632B discloses a package housing based on LCP substrate and a method for manufacturing the same, which uses LCP multi-layer substrate as a carrier to perform hermetic package of chips. The LCP packaging substrate structure is divided according to a surface sealing layer, a chip mounting layer, a welding layer, an interconnection layer and the like, all the structural characteristics of the components are limited, and an implementation method is provided. In the substrate structure, the holes of the circuit interconnection layer are positioned at the periphery of the chip sealing area, and the periphery of the chip is non-airtight due to the existence of the through holes, so that the effective airtight packaging area of the substrate is reduced, and the circuit interconnection design of each layer is limited; the surface layer is defined as a sealing area, is separately designed with the inner bonding layer and is not electrically connected with each other or only connected with the ground, and the structure is only suitable for simple packaging of a single chip and is not suitable for complex system-level application occasions with multi-chip packaging and multi-electromagnetic shielding requirements. The disclosed realization method adopts a mode of multiple lamination and hot pressing. The LCP adhesive film material is thermoplastic in nature and theoretically cannot be laminated multiple times, so the process of making the structure is difficult and impractical.
Chinese patent CN107324273B discloses a method for packaging MEMS device based on LCP multi-layer stacking technology, which adopts a multi-layer LCP stacking and laminating method to prepare a cap for MEMS device, and directly applies LCP material to single-chip plastic package. In the invention, the LCP material only plays a role of a packaging cover cap, and the application field does not relate to a packaging substrate and can not carry out wiring design.
Chinese patent CN102683220B discloses a method for manufacturing a multilayer organic liquid crystal polymer substrate structure, which can embed active and passive devices into the multilayer organic liquid crystal polymer substrate simultaneously to realize hermetic package of chips. The active device with the salient points is connected to an LCP substrate by using a flip chip bonding technology, then an LCP bonding film is windowed and laminated, and finally, the LCP bonding film is interconnected through metallized through holes to finally form a packaging structure body. The packaging structure adopts the manufacturing route of the chip embedded substrate, mainly faces to single chip packaging, and is not applicable to multi-chip packaging with high electromagnetic shielding requirements; the interconnection holes of the substrate are manufactured through one-time drilling metallization, the interconnection function of the substrate is simple, and the complex interconnection requirement required by multi-chip packaging cannot be met.
Chinese patent CN106252339B discloses a high-density rf multi-chip package structure, which uses a multi-layer substrate and a housing as a carrier, and stacks a plurality of chips and devices in a vertical direction for three-dimensional high-density hybrid integration. The multi-chip package is essentially hybrid integration in the form of a multi-chip package body, has limited electromagnetic shielding performance, relates to selection of multiple temperature gradients and solders, and is difficult to realize the process.
Chinese patent CN103165479B discloses a method for manufacturing a multi-chip system-in-package structure, which integrates multiple chips on an interposer by vertically stacking multiple chips to form a system-in-package structure. The structure is suitable for high-density integration of IC chips, but is not suitable for electromagnetic shielding requirements of multiple radio frequency chips.
Chinese patent CN103930989B discloses a radio frequency package on package (rp) circuit, which forms a two-stage package of a radio frequency package on package (PoP) circuit by vertically stacking two rf packages. The structure packaging body does not relate to the electromagnetic shielding problem of the chip in the single packaging body in detail, the function of the substrate is simple, and the aspect of the substrate structure is not described in detail.
U.S. patent US2019/0080817Al discloses a method for manufacturing an LCP resin multi-layer substrate, which can improve flatness and avoid manufacturing problems such as warping caused by glue shortage by using a special LCP paste as an LCP multi-layer substrate bonding layer and a thickness adjusting layer. This interconnect hole of base plate structure adopts the electrically conductive thick liquids to fill the preparation, because the binder composition of electrically conductive thick liquids, can volatilize under the high temperature and cause the base plate to rise the layer, bubble and explode the board risk even, and the base plate of this kind of mode preparation can't bear high temperature application occasion. And the adhesion force between the LCP paste and the LCP layer and between the LCP paste and the conductive paste is much poorer than that of the conventional LCP adhesive film laminating method theoretically. The multilayer LCP substrate manufactured by the method is not suitable for radio frequency chip packaging application occasions with high interconnection hole reliability.
In the prior art, no technical solution for realizing a package substrate and a system-in-package structure which meet the system-in-package requirements of multi-chip, high-airtightness, high-electromagnetic shielding and high-reliability interconnection by utilizing LCP is available.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in view of the above problems, an LCP package substrate, a manufacturing method thereof, and a multi-chip system-in-package structure based on the LCP package substrate are provided to meet the system-in-package requirements of multi-chip, high hermetic sealing, high electromagnetic shielding, and high reliable interconnection.
The invention provides an LCP packaging substrate, which comprises:
the n patterned metal circuit layers are distributed from the surface to the bottom surface and sequentially comprise a first patterned metal circuit layer, a second patterned metal circuit layer, … and an nth patterned metal circuit layer; the nth layer of graphical metal circuit layer is provided with a structure for welding BGA solder balls;
n-1 insulating medium layers positioned between adjacent graphical metal circuit layers; the insulating medium layer between the second patterned metal circuit layer and the third patterned metal circuit layer consists of an LCP substrate and a non-LCP material substrate;
the insulating medium layer is positioned between the first patterned metal circuit layer and the second patterned metal circuit layer, and the openings of the insulating medium layer face to the plurality of blind grooves of the first patterned metal circuit layer; the blind grooves comprise chip mounting blind grooves and surrounding frame welding blind grooves;
and the plurality of blind holes penetrate through and are connected with the adjacent patterned metal circuit layers.
Furthermore, the first patterned metal circuit layer comprises a surrounding metal layer and a plurality of groups of chip I/O welding and signal transmission line layers in the surrounding metal layer, each group of chip I/O welding and signal transmission line layers is in a rectangular or special-shaped island shape, and each group of chip I/O welding and signal transmission line layers is connected with the surrounding metal layer through an electric insulation area; the surrounding metal layer has an electrical property of a grounding layer and a process property of an airtight welding layer; a coating layer is arranged on the upper surface of the first graphical metal circuit layer;
each group of chip I/O welding and signal transmission line layers comprise chip I/O bonding pads, signal transmission lines and one or more chip mounting blind slots; the transmission of signals in the circuit layer for I/O welding and signal transmission of each group of chips is completed through chip I/O bonding pads and signal transmission lines in the circuit layer for I/O welding and signal transmission of the group of chips or through corresponding parts in each layer of blind holes and the lower patterned metal circuit layer; the I/O welding of two or more groups of chips and the signal transmission between the signal transmission layers are completed by the blind holes of each layer and the corresponding parts in the lower graphical metal circuit layer.
Furthermore, the bottom of the chip mounting blind slot is a large-area metal grounding layer in the second layer of graphical metal circuit layer and is provided with a coating layer; the chip mounting blind slot is a chip I/O pad or pattern around the opening of the first patterned metal circuit layer.
Further, the number and the size of the chip mounting blind slots are determined according to the number and the size of the mounted chips.
Furthermore, the bottom of the enclosure welding blind slot is a large-area metal grounding layer in the second layer of graphical metal circuit layer and is provided with a coating layer; the shape of the enclosing frame welding blind groove is special-shaped.
Furthermore, all the blind holes can be aligned or stacked in a staggered manner in the vertical direction, so that the interconnection requirement of any layer in the n layers of graphical metal circuit layers can be met; the diameter of each blind hole is the same, the depth-diameter ratio of the blind holes is less than or equal to 1, and the blind holes are filled with solid electrolytic copper.
Further, the lower surface of the nth patterned metal circuit layer is provided with a coating layer; a welding pad or a pattern for external secondary cascade I/O welding of the LCP packaging substrate and a lower surface solder mask are arranged on the coating layer on the lower surface of the n-th patterned metal circuit layer; the windowing of the lower surface solder mask is circular and distributed in a grid array manner, and is used for welding BGA solder balls.
The invention also provides a manufacturing method of the LCP packaging substrate, which is used for manufacturing the LCP packaging substrate and comprises the following steps:
s1, manufacturing the LCP mixed multilayer interconnection substrate with any layers by adopting an HDI lamination process; the LCP mixed optional layer interconnected multilayer substrate comprises a second layer of graphical metal circuit layer to an n-1 th graphical metal circuit layer, a surface large-area metal copper layer for manufacturing the first graphical metal circuit layer, a bottom large-area metal copper layer for manufacturing the nth graphical metal circuit layer, an insulating medium layer positioned between adjacent graphical metal circuit layers and a plurality of blind holes; the LCP mixed arbitrary layer interconnection multilayer substrate comprises an insulated medium layer between a second layer of graphical metal circuit layer and a third layer of graphical metal circuit layer, and consists of an LCP substrate and a non-LCP material substrate;
s2, manufacturing a first patterned metal circuit layer on the surface layer large-area metal copper layer, and manufacturing an nth patterned metal circuit layer on the bottom layer large-area metal copper layer; removing copper in a chip mounting blind groove and a frame welding blind groove slotting region in the first layer of graphical metal circuit layer;
s3, grooving the grooving areas of the chip mounting blind groove and the surrounding frame welding blind groove by adopting a laser processing method to form the chip mounting blind groove and the surrounding frame welding blind groove, and performing decontamination treatment on the bottom and the side wall of the chip mounting blind groove and the surrounding frame welding blind groove;
s4, coating layer manufacturing is carried out on the first layer of graphical metal circuit layer, the fourth layer of graphical metal circuit layer, the chip mounting blind groove and the bottom of the enclosure welding blind groove, and after a lower surface solder mask layer is manufactured on the coating layer of the nth layer of graphical metal circuit layer, the LCP packaging substrate is obtained;
and S5, if the LCP packaging substrate is manufactured in a splicing mode through the steps S1-S4, milling the LCP packaging substrate manufactured in the splicing mode to form a single LCP packaging substrate.
Furthermore, the depth-diameter ratio of the blind hole is less than or equal to 1.
The invention also provides a multi-chip system-in-package structure, comprising: the LCP packaging substrate, the BGA solder balls, the chip, the metal frame and the metal cover plate are arranged on the substrate;
the BGA solder balls are welded on the bottom surface of the LCP packaging substrate and used as an external secondary cascade I/O interface of the multi-chip system-level packaging structure;
metal spacer bars are distributed in the metal surrounding frame; the metal surrounding frame and the metal spacer ribs are welded on the surface of the surrounding frame welding blind groove of the LCP packaging substrate, and the metal cover plate is welded on the metal surrounding frame and the metal spacer ribs, so that a plurality of cavity structures with near-airtight packaging performance and electromagnetic shielding performance are formed between the LCP packaging substrate and the metal cover plate through the metal surrounding frame and the metal spacer ribs; each cavity structure comprises one or more chip mounting blind slots; each chip mounting blind slot is used for mounting a chip, when the mounted chip has no electromagnetic shielding requirement, the mounted chip is mounted in the same cavity structure, and when the mounted chip has the electromagnetic shielding requirement, the mounted chip is mounted in different cavity structures; the chip is adhered in the chip mounting blind groove through the conductive adhesive and is electrically interconnected with the chip I/O welding and signal transmission circuit layer in the first layer of graphical metal circuit layer in a gold wire bonding mode.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. the invention utilizes the excellent high-frequency transmission characteristic, extremely low moisture absorption and water permeability and oxygen transmission rate of a Liquid Crystal Polymer (LCP) material to realize the composite packaging substrate for multi-chip near-airtight packaging.
2. On the basis of a conventional arbitrary layer of interconnection substrate, the insulation medium layer between the second layer of graphical metal circuit layer and the third layer of graphical metal circuit layer is made of LCP substrate and non-LCP material substrate, so that arbitrary layer interconnection wiring of a multilayer graphical circuit can be realized, and particularly arbitrary layer interconnection wiring of more than 6 layers of graphical circuits can be realized.
3. The packaging substrate comprises a plurality of blind grooves for mounting the chips, and is matched with the electromagnetic compatibility and process compatibility design of the surface layer and the second layer of circuits of the substrate, so that the composite packaging substrate can meet the requirements of multi-chip, high electromagnetic shielding and high-reliability system-level packaging.
4. This packaging substrate contains encloses the blind groove of frame welding, compares direct when enclosing the frame at top layer welding metal, and shielding metal encloses arranging of frame highly lower to have better shielding effect.
5. The multi-chip system-level packaging structure realized by the packaging substrate realizes external secondary cascade by the high-density grid array BGA welding balls, has good compatibility with a PCB motherboard, and can carry out system-level packaging with large size and high integration density.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of an LCP package substrate according to embodiment 1 of the present invention;
wherein: 1-LCP package substrate; 11-patterning a metal circuit layer; 111-a first patterned metal line layer; 112-a second patterned metal wiring layer; 113-a third patterned metal wiring layer; 114-fourth to n-1 patterned metal circuit layers; 115-nth patterned metal circuit layer; 12-a blind groove; 121-chip mounting blind slots; 122-welding blind grooves by enclosing frames; 13-a coating layer; 14-blind holes; 15-insulating dielectric layer; 151-LCP substrate; 152-a substrate of non-LCP material; 16-signal transmission paths within the substrate; and 17-lower surface solder mask.
Fig. 2 is a schematic structural diagram of a first patterned metal circuit layer in embodiment 1 of the present invention;
21, 22 and 23-chip I/O welding and signal transmission circuit layers; 211. 221, 231-chip mounting blind slot position; 212. 222, 232-chip I/O bonding pads and signal transmission lines; 213. 223, 233-electrically insulating regions; 24-surrounding metal layer; 16-signal transmission path within substrate.
Fig. 3 is a schematic structural diagram of an nth patterned metal circuit layer in embodiment 1 of the present invention;
18-lower surface solder mask layer; 31-grid array type resistance welding windowing; 32-package substrate external secondary cascade I/O bonding pads or patterns.
Fig. 4 is a flow chart of a method for manufacturing an LCP package substrate of embodiment 2 of the present invention.
Fig. 5a to 5d are schematic structural diagrams of steps in the flow of the LCP package substrate manufacturing method of embodiment 2 of the present invention:
FIG. 5a is a schematic structural diagram of an LCP hybrid arbitrary layer interconnection multi-layer substrate;
fig. 5b is a schematic structural diagram after the first and nth patterned metal wiring layers are manufactured.
FIG. 5c is a schematic structural diagram after fabrication of a blind trench;
fig. 5d is a schematic structural diagram of the LCP package substrate obtained after the coating layer and the lower surface solder mask are manufactured.
Fig. 6 is a schematic diagram of a multi-chip system-in-package structure based on an LCP package substrate according to embodiment 3 of the present invention;
wherein: 61-multi-chip system-in-package structure; 1-LCP package substrate; 2-BGA solder balls; 3-chip; 4-gold wire; 5-a metal enclosure frame; 51-metal spacer bars; 6-a metal cover plate; 7-a cavity structure; 121-chip mounting blind slots; 122-welding blind grooves by enclosing frames; 151-LCP substrate; 152-a substrate of non-LCP material; 16-signal transmission path within substrate.
Detailed Description
The features and properties of the present invention are described in further detail below with reference to examples.
Example 1
As shown in fig. 1, an LCP package substrate of this embodiment includes:
n patterned metal circuit layers distributed from the surface to the bottom surface, a first patterned metal circuit layer, a second patterned metal circuit layer, … and an nth patterned metal circuit layer; the nth layer of patterned metal circuit layer is provided with a structure for welding BGA solder balls;
n-1 insulating medium layers positioned between adjacent graphical metal circuit layers; the insulating medium layer between the second patterned metal circuit layer and the third patterned metal circuit layer consists of an LCP substrate and a non-LCP material substrate;
the insulating medium layer is positioned between the first patterned metal circuit layer and the second patterned metal circuit layer, and the openings of the insulating medium layer face to the plurality of blind grooves of the first patterned metal circuit layer; the blind grooves comprise chip mounting blind grooves and surrounding frame welding blind grooves;
and the plurality of blind holes penetrate through and are connected with the adjacent patterned metal circuit layers.
1. n patterned metal circuit layers:
as shown in fig. 2, the first patterned metal circuit layer 111 includes an outer surrounding metal layer 24 and a plurality of sets of chip I/O bonding and signal transmission line layers 21, 22, 23 in the surrounding metal layer 24, each set of chip I/O bonding and signal transmission line layers 21, 22, 23 is shaped as a rectangular or special-shaped island, and each set of chip I/O bonding and signal transmission line layers 21, 22, 23 is connected to the surrounding metal layer 24 through an electrical insulation region 213, 223, 233; the surrounding metal layer 24 is an electrical ground layer and a process layer; a coating layer 13 is arranged on the upper surface of the first patterned metal circuit layer 111;
each set of chip I/O bonding and signal transmission line layers 21, 22, 23 includes chip I/O pads and signal transmission lines 212, 222, 223, and one or more chip mounting blind slots 121(211, 221, 231); the transmission of signals in each set of circuit layers 21, 22 and 23 for chip I/O soldering and signal transmission is completed through the chip I/O pads and the signal transmission lines 212, 222 and 223 in the set of circuit layers 21, 22 and 23 for chip I/O soldering and signal transmission, or through the corresponding parts of the blind holes 14 and the lower patterned metal circuit layers (the second patterned metal circuit layer 112 to the nth patterned metal circuit layer 115); the signal transmission between two or more sets of chip I/O bonding and signal transmission layers is performed by the blind holes 14 of each layer and the corresponding portions of the lower patterned metal wiring layer (the second patterned metal wiring layer 112 to the nth patterned metal wiring layer 115), such as the transmission path 16 in fig. 2.
The second patterned metal circuit layer 112, the third patterned metal circuit layer 113, the fourth patterned metal circuit layer to the (n-1) th patterned metal circuit layer 114, including multiple sets of chip I/O bonding and signal transmission line layers, electrical insulation regions and surrounding metal layers, are conventional patterned metal circuit layers, and the specific structure thereof is not described herein again.
As shown in fig. 3, the lower surface of the nth patterned metal wiring layer 115 has a coating layer; the LCP packaging substrate 1 is provided with a bonding pad or a pattern 32 for external secondary cascade I/O welding and a lower surface solder mask layer 18 on the coating layer of the lower surface of the n-th patterned metal circuit layer 115; the windows 31 of the lower solder mask 18 are circular and distributed in a grid array for soldering the BGA solder balls 2.
2. Insulating medium layer
As can be seen from the above, the insulating dielectric layer between the second patterned metal circuit layer and the third patterned metal circuit layer is composed of an LCP substrate and a non-LCP material substrate. In this embodiment, the insulating dielectric layer 15 between the first patterned metal circuit layer and the second patterned metal circuit layer, and the insulating dielectric layer 15 between the third patterned metal circuit layer 113 and the nth patterned metal circuit layer 115 are all made of non-LCP material substrates, and in practical applications, these insulating dielectric layers may also be made of LCP materials and non-LCP materials, as well as the insulating dielectric layers between the second patterned metal circuit layer and the third patterned metal circuit layer. The non-LCP material substrate refers to a substrate composed of a non-LCP thermosetting dielectric material, such as epoxy resin, epoxy resin mixture, polyimide, polyphenylene oxide, and the like.
3. Blind groove
(1) The bottom of the chip mounting blind slot 121 is a large-area metal grounding layer in the second patterned metal circuit layer 112 and has a coating layer; the chip mounting blind slot 121 is a chip I/O pad or pattern (i.e. a chip I/O pad or pattern in the chip I/O pad and signal transmission line 212, 222, 223) around the opening of the first patterned metal wiring layer 111; the number and size of the chip mounting blind slots 121 are determined according to the number and size of the mounted chips.
(2) The bottom of the enclosure welding blind slot 122 is a large-area metal grounding layer in the second patterned metal circuit layer 112 and has a coating layer; the shape of the enclosing frame welding blind groove is special-shaped.
4. Blind hole
All the blind holes 14 can be stacked in a vertical direction in an aligned or staggered manner for realizing the interconnection requirement of any layer in the n layers of patterned metal circuit layers 11. In addition, the diameter of each blind hole 14 is the same, the depth-diameter ratio of the blind hole is less than or equal to 1, and the blind hole 14 is filled with solid electroplated copper. The diameters of the two types of blind holes 14 are the same, on one hand, the blind holes can be uniformly manufactured for filling solid electroplated copper at the later stage; more importantly, the high-temperature packaging substrate can be uniformly deformed in the later high-temperature assembling process, so that the interconnection reliability of the whole packaging substrate is improved. And the depth-diameter ratio of the blind hole is less than or equal to 1, so that the process of filling the blind hole with solid electroplated copper can be better realized, and the occurrence of the void defect of the electroplated copper is avoided.
Example 2
As shown in fig. 4, the present embodiment provides a method for manufacturing the LCP package substrate 1 according to embodiment 1, which includes the following steps:
s1, as shown in FIG. 5a, manufacturing the LCP mixed multilayer interconnection substrate with any layers by adopting an HDI lamination process; the LCP mixed multilayer substrate with any layers interconnected comprises a second layer of graphical metal circuit layer 112 to an n-1 th layer of graphical metal circuit layer 114, a surface layer large-area metal copper layer for manufacturing a first layer of graphical metal circuit layer 111, a bottom layer large-area metal copper layer for manufacturing an n-th layer of graphical metal circuit layer 115, an insulating medium layer 15 and a plurality of blind holes 14, wherein the insulating medium layer 15 is positioned between adjacent graphical metal circuit layers 11; the LCP mixed arbitrary layer interconnection multilayer substrate comprises an insulated medium layer between a second layer of graphical metal circuit layer and a third layer of graphical metal circuit layer, and is composed of an LCP substrate and a non-LCP material substrate, wherein the depth-diameter ratio of a blind hole is less than or equal to 1;
s2, as shown in fig. 5b, the first patterned metal wiring layer 111 is formed on the surface layer large-area metal copper layer, and the nth patterned metal wiring layer 115 is formed on the bottom layer large-area metal copper layer by the conventional process flow of pasting → exposing → developing → etching of the printed board; removing copper in the slotting regions of the chip mounting blind slot 121 and the surrounding frame welding blind slot 122 in the first patterned metal circuit layer 111; the grooving regions of the chip mounting blind groove 121 and the surrounding frame welding blind groove 122 are positions determined according to design, the regions are non-metal regions, and copper layers in the grooving regions of the chip mounting blind groove 121 and the surrounding frame welding blind groove 122 can be removed by adopting an etching copper process, so that subsequent laser grooving treatment is facilitated;
s3, as shown in fig. 5c, grooving the blind groove areas of the chip mounting blind groove 121 and the enclosure welding blind groove 122 by using a laser processing means to form the chip mounting blind groove 121 and the enclosure welding blind groove 122, and performing decontamination treatment on the bottoms and the side walls of the chip mounting blind groove 121 and the enclosure welding blind groove 122; in the laser processing means, a laser light source is solid ultraviolet laser or gas carbon dioxide laser;
s4, as shown in fig. 5d, a coating layer is formed on the first patterned metal circuit layer 111, the nth patterned metal circuit layer 115, the chip mounting blind slot 121 and the bottom of the frame welding blind slot 122, and a lower solder mask layer 17 is formed on the coating layer 13 of the nth patterned metal circuit layer 115, so as to obtain the LCP package substrate 1. The coating layer 13 material includes, but is not limited to, electroplated gold, electroless nickel gold, and electroless nickel palladium gold.
And S5, if the LCP packaging substrate is manufactured in a splicing mode through the steps S1-S4, milling the LCP packaging substrate manufactured in the splicing mode to form a single LCP packaging substrate.
That is, when a single LCP substrate is directly used to manufacture the LCP package substrate through steps S1 to S4, the resulting LCP package substrate 1 is the desired structure; when the LCP package substrate is manufactured through steps S1 to S4 in a form of a mosaic, the resulting LCP package substrate 1 needs to be milled to have a desired structure.
Example 3
As shown in fig. 6, based on the LCP package substrate described in embodiments 1-2, this embodiment provides a multi-chip system-in-package structure 61, which includes: the LCP package substrate 1 of embodiments 1-2, as well as BGA solder balls 2, chip 3, metal enclosure frame 5, and metal lid 6;
the BGA solder balls 2 are welded on the bottom surface of the LCP packaging substrate 1 and are used as external secondary cascade I/O interfaces of the multi-chip system-in-package structure 61;
the metal surrounding frame 5 is distributed with metal spacing ribs 51; the metal surrounding frame 5 and the metal spacer 51 are welded on the surface of the surrounding frame welding blind groove 122 of the LCP packaging substrate 1, and the metal cover plate 6 is welded on the metal surrounding frame 5 and the metal spacer 51, so that a plurality of cavity structures 7 having a near-airtight packaging performance and an electromagnetic shielding performance are formed between the LCP packaging substrate 1 and the metal cover plate 6 through the metal surrounding frame 5 and the metal spacer 51; each cavity structure 7 contains one or more chip mounting blind slots 122 therein; each chip mounting blind slot 122 is used for mounting one chip 3, and when the mounted chip 3 has no electromagnetic shielding requirement, the mounted chip 3 can be mounted in the same cavity structure 7, and when the mounted chip 3 has the electromagnetic shielding requirement, the mounted chip 3 is mounted in different cavity structures 7; the chip 3 is adhered in the chip mounting blind slot 122 through conductive glue, and is electrically interconnected with the chip I/O welding and signal transmission circuit layers 21, 22 and 23 in the first layer of graphical metal circuit layer 111 in a gold wire 4 bonding mode;
the transmission of signals in each set of circuit layers 21, 22 and 23 for chip I/O soldering and signal transmission is completed through the chip I/O pads and the signal transmission lines 212, 222 and 223 in the set of circuit layers 21, 22 and 23 for chip I/O soldering and signal transmission, or through the corresponding parts of the blind holes 14 and the lower patterned metal circuit layers (the second patterned metal circuit layer 112 to the nth patterned metal circuit layer 115); the signal transmission between the two or more sets of chip I/O bonding and signal transmission layers 21, 22, 23 is performed by the blind holes 14 and the corresponding portions of the lower patterned metal circuit layers (the second patterned metal circuit layer 112 to the nth patterned metal circuit layer 115), as shown by the transmission paths 16 in fig. 6.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (9)

1. An LCP package substrate, comprising:
the n patterned metal circuit layers are distributed from the surface to the bottom surface and sequentially comprise a first patterned metal circuit layer, a second patterned metal circuit layer, … and an nth patterned metal circuit layer; the nth layer of patterned metal circuit layer is provided with a structure for welding BGA solder balls;
n-1 insulating medium layers positioned between adjacent graphical metal circuit layers; the insulating medium layer between the second patterned metal circuit layer and the third patterned metal circuit layer consists of an LCP substrate and a non-LCP material substrate;
the insulating medium layer is positioned between the first patterned metal circuit layer and the second patterned metal circuit layer, and the openings of the insulating medium layer face to the plurality of blind grooves of the first patterned metal circuit layer; the blind grooves comprise chip mounting blind grooves and surrounding frame welding blind grooves;
a plurality of blind holes penetrating and connecting the adjacent patterned metal circuit layers;
the first layer of graphical metal circuit layer comprises a surrounding metal layer and a plurality of groups of chip I/O welding and signal transmission line layers in the surrounding metal layer, each group of chip I/O welding and signal transmission line layers is in a rectangular or special-shaped isolated island shape, and each group of chip I/O welding and signal transmission line layers are connected with the surrounding metal layer through an electric insulation area; the surrounding metal layer has an electrical property of a grounding layer and a process property of an airtight welding layer; a coating layer is arranged on the upper surface of the first graphical metal circuit layer;
each group of chip I/O welding and signal transmission line layers comprise chip I/O bonding pads, signal transmission lines and one or more chip mounting blind slots; the transmission of signals in the circuit layer for I/O welding and signal transmission of each group of chips is completed through chip I/O bonding pads and signal transmission lines in the circuit layer for I/O welding and signal transmission of the group of chips or through corresponding parts in each layer of blind holes and the lower patterned metal circuit layer; the I/O welding of two or more groups of chips and the signal transmission between the signal transmission layers are completed by the blind holes of each layer and the corresponding parts in the lower graphical metal circuit layer.
2. The LCP package substrate of claim 1, wherein the bottom of the chip mounting blind slot is a large-area metal ground layer in the second patterned metal circuit layer and has a coating layer; the chip mounting blind slot is a chip I/O pad or pattern around the opening of the first patterned metal circuit layer.
3. The LCP package substrate of claim 1, wherein the number and size of the chip mounting blind slots are determined according to the number and size of the mounted chips.
4. The LCP package substrate of claim 1, wherein the bottom of the enclosure solder blind slot is a large-area metal ground layer in the second patterned metal circuit layer, and has a coating layer; the shape of the enclosing frame welding blind groove is special-shaped.
5. The LCP package substrate of claim 1, wherein all blind vias are vertically aligned or staggered for stacking, for implementing any of the n patterned metal circuit layers; the diameter of each blind hole is the same, the depth-diameter ratio of the blind holes is less than or equal to 1, and the blind holes are filled with solid electrolytic copper.
6. The LCP package substrate of claim 1, wherein the nth patterned metal circuit layer has a coating layer on a lower surface thereof; a welding pad or a pattern for external secondary cascade I/O welding of the LCP packaging substrate and a lower surface solder mask are arranged on the coating layer on the lower surface of the n-th patterned metal circuit layer; the windowing of the lower surface solder mask is circular and distributed in a grid array manner, and is used for welding BGA solder balls.
7. A method for manufacturing an LCP package substrate, wherein the method is used for manufacturing the LCP package substrate of any one of claims 1 to 6, comprising the steps of:
s1, manufacturing the LCP mixed multilayer interconnection substrate with any layers by adopting an HDI lamination process; the LCP mixed optional layer interconnected multilayer substrate comprises a second layer of graphical metal circuit layer to an n-1 th graphical metal circuit layer, a surface large-area metal copper layer for manufacturing the first graphical metal circuit layer, a bottom large-area metal copper layer for manufacturing the nth graphical metal circuit layer, an insulating medium layer positioned between adjacent graphical metal circuit layers and a plurality of blind holes; the LCP mixed arbitrary layer interconnection multilayer substrate comprises an insulated medium layer between a second layer of graphical metal circuit layer and a third layer of graphical metal circuit layer, and consists of an LCP substrate and a non-LCP material substrate;
s2, manufacturing a first patterned metal circuit layer on the surface layer large-area metal copper layer, and manufacturing an nth patterned metal circuit layer on the bottom layer large-area metal copper layer; removing copper in a chip mounting blind groove and a frame welding blind groove slotting region in the first layer of graphical metal circuit layer;
s3, grooving the grooving areas of the chip mounting blind groove and the surrounding frame welding blind groove by adopting a laser processing method to form the chip mounting blind groove and the surrounding frame welding blind groove, and performing decontamination treatment on the bottom and the side wall of the chip mounting blind groove and the surrounding frame welding blind groove;
s4, coating layer manufacturing is carried out on the first layer of graphical metal circuit layer, the nth layer of graphical metal circuit layer, the chip mounting blind slot and the bottom of the enclosure welding blind slot, and after a lower surface solder mask layer is manufactured on the coating layer of the nth layer of graphical metal circuit layer, the LCP packaging substrate is obtained;
and S5, if the LCP packaging substrate is manufactured through the steps S1-S4 in a splicing mode, milling the LCP packaging substrate manufactured in the splicing mode to form a single LCP packaging substrate.
8. The method for manufacturing the LCP package substrate of claim 7, wherein the ratio of the blind hole depth to the blind hole depth is less than or equal to 1.
9. A multi-chip system-in-package structure, comprising: the LCP package substrate of any one of claims 1-6, and BGA solder balls, chips, metal enclosure frames and metal lid plates;
the BGA solder balls are welded on the bottom surface of the LCP packaging substrate and used as an external secondary cascade I/O interface of the multi-chip system-level packaging structure;
metal partition ribs are distributed in the metal enclosure frame; the metal surrounding frame and the metal spacer ribs are welded on the surface of the surrounding frame welding blind groove of the LCP packaging substrate, and the metal cover plate is welded on the metal surrounding frame and the metal spacer ribs, so that a plurality of cavity structures with near-airtight packaging performance and electromagnetic shielding performance are formed between the LCP packaging substrate and the metal cover plate through the metal surrounding frame and the metal spacer ribs; each cavity structure comprises one or more chip mounting blind slots; each chip mounting blind slot is used for mounting a chip, when the mounted chip has no electromagnetic shielding requirement, the mounted chip is mounted in the same cavity structure, and when the mounted chip has the electromagnetic shielding requirement, the mounted chip is mounted in different cavity structures; the chip is adhered in the chip mounting blind groove through the conductive adhesive and is electrically interconnected with the chip I/O welding and signal transmission circuit layer in the first layer of graphical metal circuit layer in a gold wire bonding mode.
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