CN112326095A - Monocrystalline silicon pressure transmitter with good waterproof performance - Google Patents
Monocrystalline silicon pressure transmitter with good waterproof performance Download PDFInfo
- Publication number
- CN112326095A CN112326095A CN202011211330.7A CN202011211330A CN112326095A CN 112326095 A CN112326095 A CN 112326095A CN 202011211330 A CN202011211330 A CN 202011211330A CN 112326095 A CN112326095 A CN 112326095A
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- Prior art keywords
- pipe
- monocrystalline silicon
- pressure
- connecting seat
- diaphragm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
Abstract
The invention discloses a monocrystalline silicon pressure transmitter with good waterproof performance, and particularly relates to the technical field of pressure transmitters, which comprises a connecting seat connected with a pipeline system, wherein two ends of the connecting seat are connected with the pipeline system through flanges, a connecting pipeline is installed on the connecting seat, and the end part of the connecting pipeline extends into the connecting seat, and the monocrystalline silicon pressure transmitter is characterized in that: the connecting device is characterized in that a sensing pipe fitting for pressure sensing is arranged inside the connecting pipeline, a pressure sensing chamber is arranged at the end part, far away from the connecting seat, of the connecting pipeline, and a diaphragm assembly communicated with the sensing pipe fitting is arranged inside the pressure sensing chamber. According to the invention, the air pressure in the induction pipe is changed by utilizing the lifting piston, so that the plurality of lower elastic membranes are deformed, pressure is generated on the sealing liquid in the cavity, the upper elastic membrane is driven to deform, and the force generated by the deformation of the upper elastic membrane acts on the monocrystalline silicon wafer to obtain pressure data, so that the waterproof performance of the pressure transmitter is improved, and the service life is prolonged.
Description
Technical Field
The invention relates to the technical field of pressure transmitters, in particular to a monocrystalline silicon pressure transmitter with good waterproof performance.
Background
The pressure transmitter is a device for converting pressure into pneumatic signal or electric signal for control and remote transmission, which can convert physical pressure parameters of gas, liquid and the like sensed by a load cell sensor into standard electric signals to be supplied to secondary instruments such as an indicating alarm instrument, a recorder, a regulator and the like for measurement, indication and process regulation. However, the connecting part of the transmitter and the pipeline is easy to have the phenomenon of poor sealing, so that the structures of a circuit board, a monocrystalline silicon wafer and the like in the shell are damaged after external impurities such as dust, gas, oil and the like enter the shell, and the service life of the transmitter is influenced.
Disclosure of Invention
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a monocrystalline silicon pressure transmitter that waterproof performance is good, includes the connecting seat of being connected with pipe-line system, flange and pipe-line system connection are passed through at the connecting seat both ends, install the inside that connecting tube and connecting tube end extended to the connecting seat on the connecting seat, its characterized in that: the connecting device is characterized in that a sensing pipe fitting for pressure sensing is arranged inside the connecting pipeline, a pressure sensing chamber is arranged at the end part, far away from the connecting seat, of the connecting pipeline, and a diaphragm assembly communicated with the sensing pipe fitting is arranged inside the pressure sensing chamber.
In a preferred embodiment, the connection pipeline comprises a mounting pipe inserted on the connection seat, the inside of the mounting pipe is communicated with the inside of the connection seat, the mounting pipe is composed of an upper pipe fixedly connected with the pressure sensing chamber and a lower pipe fixedly connected with the connection seat, the upper pipe and the lower pipe are detachably mounted through a connection flange, and a baffle plate with a through hole in the middle is fixedly arranged on the inner wall of the bottom end of the lower pipe.
In a preferred embodiment, the response pipe fitting includes induction tube and the piston that is located the inside liftable of induction tube, the sealed laminating of induction tube outer wall and the inner wall of upper tube and low tube, the induction tube top extends to the inside of forced induction room, the laminating of induction tube bottom has the sealed rubber ring that the middle part was equipped with the through-hole, the induction tube cavity top has set firmly a plurality of elastic diaphragm down.
In a preferred embodiment, the bottom of the sealing rubber ring is attached to the baffle.
In a preferred embodiment, the diaphragm assembly comprises a diaphragm pipe fixed at the bottom of the pressure sensing chamber, the diaphragm pipe is sleeved outside the top end of the sensing pipe, an upper elastic diaphragm is arranged at the top end of the diaphragm pipe in a sealing mode, a monocrystalline silicon wafer fixed on the inner wall of the pressure sensing chamber is arranged at the top of the upper elastic diaphragm, and the distance between the monocrystalline silicon wafer and the upper elastic diaphragm is set to be 1 mm.
In a preferred embodiment, the space between the diaphragm tube, the upper elastic diaphragm, the upper lower elastic diaphragm and the top end of the induction tube forms a cavity, and the cavity is filled with sealing liquid.
In a preferred embodiment, the top of the pressure sensing chamber is provided with a display screen and a pressure relief valve.
The invention has the technical effects and advantages that:
the piston through utilizing the lift changes the atmospheric pressure in the induction pipe, makes a plurality of elastic diaphragm down produce deformation, produces pressure to the sealing liquid in the cavity, drives the elastic diaphragm and produces deformation and utilize the power of elastic diaphragm deformation to act on single crystal silicon, acquires pressure data, has promoted pressure transmitter's waterproof performance, has prolonged life.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic diagram of a detailed structure a in fig. 1 according to the present invention.
The reference signs are: the device comprises a connecting base 1, a connecting pipeline 2, an induction pipe 3, a pressure induction chamber 4, a diaphragm assembly 5, an installation pipe 6, an upper pipe 7, a lower pipe 8, a baffle 9, an induction pipe 10, a piston 11, a sealing rubber ring 12, an elastic diaphragm 13, a diaphragm pipe 14, an upper elastic diaphragm 15, a monocrystalline silicon wafer 16, a cavity 17, a display screen 18 and a pressure release valve 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-2, the monocrystalline silicon pressure transmitter with good waterproof performance comprises a connecting seat 1 connected with a pipeline system, wherein two ends of the connecting seat 1 are connected with the pipeline system through flanges, a connecting pipeline 2 is installed on the connecting seat 1, the end part of the connecting pipeline 2 extends into the connecting seat 1, an induction pipe 3 for pressure induction is arranged in the connecting pipeline 2, a pressure induction chamber 4 is installed at the end part of the connecting pipeline 2 far away from the connecting seat 1, a diaphragm assembly 5 communicated with the induction pipe 3 is arranged in the pressure induction chamber 4, the connecting seat 1 is installed on the pipeline system through the flanges, and the induction pipe 3 and the diaphragm assembly 5 are used for completing pressure induction;
the connecting pipeline 2 comprises a mounting pipe 6 inserted on the connecting seat 1, the interior of the mounting pipe 6 is communicated with the interior of the connecting seat 1, the mounting pipe 6 consists of an upper pipe 7 fixedly connected with the pressure sensing chamber 4 and a lower pipe 8 fixedly connected with the connecting seat 1, the upper pipe 7 and the lower pipe 8 are detachably mounted through a connecting flange, a baffle plate 9 with a through hole in the middle is fixedly arranged on the inner wall of the bottom end of the lower pipe 8, and the mounting pipe 6 is convenient to dismount by adopting the structural design of the upper pipe 7 and the lower pipe 8 so as to dismount and maintain the sensing pipe 3 in the mounting pipe 6;
the induction pipe fitting 3 comprises an induction pipe 10 and a piston 11 which is positioned in the induction pipe 10 and can be lifted, the outer wall of the induction pipe 10 is in sealing fit with the inner walls of an upper pipe 7 and a lower pipe 8, the top end of the induction pipe 10 extends into a pressure induction chamber 4, a sealing rubber ring 12 with a through hole in the middle is attached to the bottom end of the induction pipe 10, a plurality of lower elastic diaphragms 13 are fixedly arranged at the top end of an inner cavity of the induction pipe 10, the bottom of the sealing rubber ring 12 is attached to a baffle 9, the sealing rubber ring 12 and the baffle 9 provide a sealing function, and in the using process, the pressure in the connecting seat 1 enters the induction pipe 10 through the baffle 9 with the through hole to push the piston 11 to lift, so that the plurality of upper elastic diaphragms 13 are deformed in corresponding radian;
the diaphragm assembly 5 comprises a diaphragm tube 14 fixed at the bottom of the pressure sensing chamber 4, the diaphragm tube 14 is sleeved outside the top end of the sensing tube 10, an upper elastic diaphragm 15 is arranged at the top end of the diaphragm tube 14 in a sealing manner, a monocrystalline silicon piece 16 fixed on the inner wall of the pressure sensing chamber 4 is arranged at the top of the upper elastic diaphragm 15, the distance between the monocrystalline silicon piece 16 and the upper elastic diaphragm 15 is set to be 1mm, the upper elastic diaphragm 15 receives pressure conducted by the lower elastic diaphragm 13 and acts pipeline pressure on the monocrystalline silicon piece 16, monocrystalline silicon generates strain, strain is generated on the monocrystalline silicon, strain resistors directly diffused on the upper surface generate change proportional to the measured pressure, and then a bridge circuit obtains a corresponding voltage output signal;
the diaphragm tube 14, the upper elastic diaphragm 15, the lower elastic diaphragm 13 positioned above the upper elastic diaphragm and the space between the top ends of the induction tubes 10 form a cavity 17, sealing liquid is filled in the cavity 17, and the sealing liquid surges under the action of pipeline pressure and applies force to the upper elastic diaphragm 15 to deform the upper elastic diaphragm;
the top of the pressure sensing chamber 4 is provided with a display screen 18 and a pressure relief valve 19, the pressure relief valve 19 is used for pressure relief, and the display screen 18 displays pressure data of the pipeline;
on the basis, when the pressure measuring device is used, the pressure in the pipeline firstly pushes the piston 11 to lift in the induction pipe 10, then the lower elastic diaphragms 13 above the piston deform, and the lower elastic diaphragms 13 above the piston deform, so that the sealing liquid is driven to surge when the lower elastic diaphragms 13 above the piston deform, the upper elastic diaphragms 15 deform and act on the monocrystalline silicon wafers 16, and pressure data measurement is realized;
in the process, the sealing rubber ring 12 and the baffle 9 which are arranged at first provide a sealing effect, the piston 11 and the lower elastic membranes 13 are arranged, so that liquid below cannot flow into the sensing pipe fitting 3 above, the upper elastic membranes 15 are deformed by using the sealing liquid above, pressure is applied to the monocrystalline silicon wafer 16 through the force generated when the upper elastic membranes 15 are deformed, pressure data are obtained, the waterproof performance of the pressure transmitter is improved, and the service life is prolonged.
The points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be a direct connection, and "upper," "lower," "left," and "right" are only used to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed;
secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the invention, only the structures related to the disclosed embodiments are referred to, other structures can refer to common designs, and the same embodiment and different embodiments of the invention can be combined with each other without conflict;
and finally: the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (7)
1. The utility model provides a monocrystalline silicon pressure transmitter that waterproof performance is good, includes the connecting seat of being connected with pipe-line system, flange and pipe-line system connection are passed through at the connecting seat both ends, install the inside that connecting tube and connecting tube end extended to the connecting seat on the connecting seat, its characterized in that: the connecting device is characterized in that a sensing pipe fitting for pressure sensing is arranged inside the connecting pipeline, a pressure sensing chamber is arranged at the end part, far away from the connecting seat, of the connecting pipeline, and a diaphragm assembly communicated with the sensing pipe fitting is arranged inside the pressure sensing chamber.
2. The monocrystalline silicon pressure transmitter with good waterproof performance of claim 1, characterized in that: the connecting pipeline comprises an installation pipe inserted on the connecting seat, the inside of the installation pipe is communicated with the inside of the connecting seat, the installation pipe comprises an upper pipe fixedly connected with the pressure sensing chamber and a lower pipe fixedly connected with the connecting seat, the upper pipe and the lower pipe are detachably installed through a connecting flange, and a baffle plate with a through hole in the middle is fixedly arranged on the inner wall of the bottom end of the lower pipe.
3. The monocrystalline silicon pressure transmitter with good waterproof performance of claim 1, characterized in that: the induction pipe fitting includes induction pipe and the piston that is located the inside liftable of induction pipe, the sealed laminating of inner wall of induction pipe outer wall and top tube and low tube, the induction pipe top extends to the inside of forced induction room, the laminating of induction pipe bottom has the sealed rubber ring that the middle part is equipped with the through-hole, induction pipe inner chamber top has set firmly a plurality of elastic diaphragm down.
4. The monocrystalline silicon pressure transmitter with good waterproof performance of claim 2 or 3, characterized in that: the bottom of the sealing rubber ring is attached to the baffle.
5. The monocrystalline silicon pressure transmitter with good waterproof performance of claim 3, characterized in that: the diaphragm assembly comprises a diaphragm pipe fixed at the bottom of the pressure sensing chamber, the diaphragm pipe is sleeved outside the top end of the sensing pipe, an upper elastic diaphragm is arranged at the top end of the diaphragm pipe in a sealing mode, a monocrystalline silicon wafer fixed on the inner wall of the pressure sensing chamber is arranged at the top of the upper elastic diaphragm, and the distance between the monocrystalline silicon wafer and the upper elastic diaphragm is set to be 1 mm.
6. The monocrystalline silicon pressure transmitter with good waterproof performance of claim 5, wherein: the diaphragm pipe, the upper elastic diaphragm, the lower elastic diaphragm positioned above the upper elastic diaphragm and the space between the top ends of the induction pipes form a cavity, and sealing liquid is filled in the cavity.
7. The monocrystalline silicon pressure transmitter with good waterproof performance of claim 1, characterized in that: and the top of the pressure sensing chamber is provided with a display screen and a pressure release valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011211330.7A CN112326095B (en) | 2020-11-03 | 2020-11-03 | Monocrystalline silicon pressure transmitter with good waterproof performance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011211330.7A CN112326095B (en) | 2020-11-03 | 2020-11-03 | Monocrystalline silicon pressure transmitter with good waterproof performance |
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| CN112326095A true CN112326095A (en) | 2021-02-05 |
| CN112326095B CN112326095B (en) | 2022-05-20 |
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| Application Number | Title | Priority Date | Filing Date |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2859490Y (en) * | 2004-12-03 | 2007-01-17 | 浙江天信仪表有限公司 | High temperature gas pressure taking device |
| CN103148974A (en) * | 2013-01-30 | 2013-06-12 | 上海安可泰环保科技有限公司 | Pressure sensing device applied in high-voltage environment |
| CN204740090U (en) * | 2015-05-29 | 2015-11-04 | 杜宪杰 | Membrane box -shaped pressure measurement |
| CN205317397U (en) * | 2015-11-27 | 2016-06-15 | 上海立格仪表有限公司 | Formula hart bus measuring instrument can be enlargied in piston response |
| CN206787756U (en) * | 2017-06-12 | 2017-12-22 | 四川职业技术学院 | A kind of pressure sensor with pressure-limiting function |
| CN108593195A (en) * | 2018-05-04 | 2018-09-28 | 中北大学 | High temperature hydraulic pressure sensor-packaging structure |
| CN208000174U (en) * | 2018-04-11 | 2018-10-23 | 江西鑫台铭智能科技有限公司 | A kind of high temperature pressure transmitter |
-
2020
- 2020-11-03 CN CN202011211330.7A patent/CN112326095B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2859490Y (en) * | 2004-12-03 | 2007-01-17 | 浙江天信仪表有限公司 | High temperature gas pressure taking device |
| CN103148974A (en) * | 2013-01-30 | 2013-06-12 | 上海安可泰环保科技有限公司 | Pressure sensing device applied in high-voltage environment |
| CN204740090U (en) * | 2015-05-29 | 2015-11-04 | 杜宪杰 | Membrane box -shaped pressure measurement |
| CN205317397U (en) * | 2015-11-27 | 2016-06-15 | 上海立格仪表有限公司 | Formula hart bus measuring instrument can be enlargied in piston response |
| CN206787756U (en) * | 2017-06-12 | 2017-12-22 | 四川职业技术学院 | A kind of pressure sensor with pressure-limiting function |
| CN208000174U (en) * | 2018-04-11 | 2018-10-23 | 江西鑫台铭智能科技有限公司 | A kind of high temperature pressure transmitter |
| CN108593195A (en) * | 2018-05-04 | 2018-09-28 | 中北大学 | High temperature hydraulic pressure sensor-packaging structure |
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| CN112326095B (en) | 2022-05-20 |
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