CN112325637B - Inside reinforced multicavity graphite crucible - Google Patents
Inside reinforced multicavity graphite crucible Download PDFInfo
- Publication number
- CN112325637B CN112325637B CN202011214969.0A CN202011214969A CN112325637B CN 112325637 B CN112325637 B CN 112325637B CN 202011214969 A CN202011214969 A CN 202011214969A CN 112325637 B CN112325637 B CN 112325637B
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- CN
- China
- Prior art keywords
- crucible
- groove
- silicon nitride
- roasting
- graphite crucible
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 38
- 239000010439 graphite Substances 0.000 title claims abstract description 38
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 40
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000000945 filler Substances 0.000 claims abstract description 24
- 239000011148 porous material Substances 0.000 claims abstract description 20
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 16
- 239000011229 interlayer Substances 0.000 claims abstract description 15
- 239000010410 layer Substances 0.000 claims description 13
- 238000010304 firing Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 239000000835 fiber Substances 0.000 claims description 7
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 230000008646 thermal stress Effects 0.000 description 6
- 238000005245 sintering Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- -1 ferrous metals Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
- F27B14/12—Covers therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
Abstract
The invention discloses an internally reinforced multi-cavity graphite crucible, which comprises a cylindrical crucible body and a crucible cover with an air hole on the upper surface, wherein a circular blind groove with a plurality of roasting cavities is arranged on the top surface of the crucible body, at least one annular groove is formed on the inner wall of each roasting cavity, a silicon nitride ceramic ring is formed in the annular groove, the inner surface of the silicon nitride ceramic ring and the inner wall of the roasting cavity are positioned on the same plane, a plurality of vertically arranged air guide grooves are formed on the plane, the upper part of each air guide groove is connected with a hollow interlayer of the crucible cover, and a high heat conduction pore filler is filled in the interlayer of the crucible cover; and a through groove is arranged at the center of the crucible body, and a silicon nitride reinforcing seat is arranged at the lower part of the through groove. The graphite crucible provided by the invention has the advantages of compact structure and convenience in operation, the structural stability of the multi-cavity graphite crucible in the continuous roasting process can be ensured, the thermal deformation is reduced, and the service life of the graphite crucible is prolonged.
Description
Technical Field
The invention relates to the technical field of graphite crucibles in graphite products, in particular to an internally reinforced multi-cavity graphite crucible.
Background
Graphite is used as a high-temperature-resistant and corrosion-resistant material, has small thermal expansion coefficient, certain strain resistance to rapid heating and quenching in the high-temperature use process, and simultaneously has small temperature coefficient of resistance and low thermal inertia, and can be rapidly heated and cooled. Are commonly used to prepare crucible containers for smelting or sintering non-ferrous metals, alloys, and polycrystalline silicon materials such as copper, brass, gold, silver, zinc, and lead.
When the graphite crucible works, a qualified pressed compact is usually put into the graphite crucible, and then the graphite crucible filled with the product is put into a hearth of a sintering furnace in a vertically stacked mode, and vacuum sintering is performed. The single graphite crucible can only be used for processing single products at a time during sintering, especially when polysilicon material processing is performed, but in practice, the reaction conditions are not generally changed when batch processing of single product types is performed in the graphite crucible. For the above reasons, there are also graphite crucibles in which a plurality of firing chambers are provided on one crucible body and sintering treatment is performed on a plurality of products in the firing chambers, but when one of the firing chambers is defective or damaged, the single firing chamber cannot be used, and the reaction conditions of the other firing chambers are easily changed, which affects the heat treatment effect, so that it is necessary to perform overall reinforcement treatment on the graphite crucible, and to improve the strength and stability of the corresponding firing chamber while improving the overall strength of the crucible.
Disclosure of Invention
The invention aims to solve the technical problem of providing an internally reinforced multi-cavity graphite crucible so as to solve the problem in the prior art.
The technical problems solved by the invention are realized by adopting the following technical scheme:
the internally reinforced multi-cavity graphite crucible comprises a crucible body, wherein the crucible body is a cylindrical crucible body, a circular blind groove is formed in the top surface of the crucible body, and the upper part of the circular blind groove is sealed by a crucible cover which is matched with the step surface of the circular blind groove;
the circular blind groove is internally provided with a plurality of roasting cavities, the roasting cavities are of blind groove structures with circular cross sections, the depth of each roasting cavity is consistent with the depth of a material to be sintered, the roasting cavities are uniformly arranged on the annular surface of the circular blind groove, at least one annular groove is formed on the inner wall of each roasting cavity, a silicon nitride ceramic ring is formed in the groove of each annular groove, the inner surface of each silicon nitride ceramic ring and the inner wall of each roasting cavity are positioned on the same plane, and a plurality of vertically arranged air guide grooves are formed on the plane; a through groove is formed in the center of the crucible body, a silicon nitride reinforcing seat is arranged at the lower part of the through groove, and the silicon nitride reinforcing seat is provided with an annular nesting part nested with the through groove and a disc-shaped lower surface which is arranged at the outer side of the annular nesting part and is attached to the bottom surface of the crucible body;
the crucible cover is provided with a hollow interlayer, an air hole is arranged in the middle of the top surface, and a high-heat-conductivity pore filler is filled in the hollow interlayer, wherein the heat conductivity coefficient of the high-heat-conductivity pore filler is higher than that of the crucible cover, and the porosity of the high-heat-conductivity pore filler is 30-40%; the crucible cover is provided with a notch at the position corresponding to the air guide groove on the lower surface, and the notch is communicated with the interlayer.
As a further limitation, the number of the plurality of roasting cavities formed in the circular blind groove is preferably 4-6, and the inner diameter of each roasting cavity is 1/4 of the inner diameter of the circular blind groove.
By way of further limitation, the ring height of the silicon nitride ceramic ring is 1/5 to 1/3 of the firing chamber depth and the ring thickness is 2 to 3mm.
By way of further limitation, the through slot has an inner diameter of 1/4 of the inner diameter of the circular blind slot.
By way of further limitation, a silicon nitride fiber layer is lined between the silicon nitride ceramic ring and the annular groove as an interface layer.
As a further definition, a silicon nitride fiber layer is lined between the silicon nitride reinforcing seat and the through groove as an interface layer.
As a further limitation, an interlayer is formed between the lower disc-shaped surface of the silicon nitride reinforcing seat and the bottom surface of the crucible body, and a filler having the same content as the filler of the high heat conduction pore in the crucible cover is formed in the interlayer.
By way of further limitation, the highly thermally conductive pore filler is expanded graphite.
The beneficial effects are that: the internally reinforced multi-cavity graphite crucible has the advantages of compact structure and reasonable design, has a better structural shaping effect, improves the deformation resistance of the graphite crucible through the dual pressure relief effect of the roasting cavity and the through groove, improves the high temperature and high pressure resistance and the thermal shock resistance of the graphite crucible through the material filling of the high heat conduction pore filler, rapidly transmits the heat in the roasting cavity through the crucible cover and the bottom of the through groove through the difference of the heat conductivity coefficients between materials, reduces the temperature difference between the roasting cavity and other areas of the crucible body, improves the deformation resistance of the crucible body based on thermal stress, and can effectively resist the problem that the multi-cavity graphite crucible is easy to outwards expand to deform and lose efficacy due to the physical reinforcement of the silicon nitride ceramic ring arranged at a proper position.
Drawings
FIG. 1 is a schematic cross-sectional view of a preferred embodiment of the present invention.
Wherein: 1. a crucible cover; 2. a crucible cover body; 3. an upper highly thermally conductive void filler; 4. an air guide groove connecting hole; 5. air holes; 6. a crucible body; 7. an air guide groove; 8. a roasting cavity; 9. a through groove; 10. a silicon nitride ceramic ring; 11. an annular nesting portion; 12. a lower highly thermally conductive void filler; 13. a disk-shaped lower surface; 14. silicon nitride reinforcing seat.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to the preferred embodiment of an internally reinforced multichamber graphite crucible of fig. 1, in this embodiment, the multichamber graphite crucible comprises a crucible body 6 and a crucible cover 1, wherein the crucible body 6 is a cylindrical crucible body, and the outer edge of the cylindrical crucible body is more uniformly subjected to thermal shock after receiving thermal stress, and the cylindrical crucible body is deformed and fails in a manner that the lower part of the cylindrical crucible body is outwards annularly expanded, rather than in a manner that brittle fracture or other cracks occur at the lower corner position like a square crucible.
A circular blind groove is formed in the middle of the upper surface of a crucible body 6, a stepped groove is formed in the outer side of the circular blind groove, surface sealing is conducted on the stepped groove through a crucible cover 1, an interlayer is formed in a crucible cover body 2 of the crucible cover 1, expanded graphite with 35-38% of porosity is filled in the interlayer to serve as a high-heat-conductivity pore filler, the heat conductivity coefficient of the expanded graphite is higher than that of the crucible cover 1 in the embodiment, an air hole 5 is formed in the middle of the upper surface of the crucible cover 1, corresponding to a roasting cavity 8, and an air guide groove connecting hole 4 is formed in the lower surface of the crucible cover 1.
Six roasting cavities 8 and through grooves 9 are formed in the area of the circular blind groove of the crucible body 6, wherein the through grooves 9 are formed in the middle of the circular blind groove, the inner diameter of the through grooves is 1/4 of the inner diameter of the circular blind groove, and the through grooves are arranged concentrically with the circular blind groove; the roasting cavity 8 is a circular roasting cavity, the ring surface of the circular blind groove is uniformly provided, the inner diameter of the roasting cavity 8 is 1/4 of the inner diameter of the circular blind groove, the depth of the roasting cavity 8 is consistent with the depth of a material to be sintered, an annular groove is arranged in the middle of the roasting cavity 8, a silicon nitride fiber layer is lined on the inner surface of the annular groove, a silicon nitride ceramic ring 10 is formed on the surface of the annular groove by taking the silicon nitride fiber layer as an interface layer, the ring height of the silicon nitride ceramic ring 10 is 1/4 of the depth of the roasting cavity 8, the ring thickness is 2-3 mm, the silicon nitride ceramic ring 10 is provided with a surface matched with the inner surface of the roasting cavity 8, the surface comprises six air guide grooves 7 which are vertically arranged on the inner surface of the roasting cavity 8, the air guide grooves 7 are uniformly arranged on the cross section ring surface of the roasting cavity 8 and penetrate through the roasting cavity 8 in the height direction, and the air guide grooves 7 are communicated with the air guide groove connecting holes 4 when the crucible cover 1 is covered on the surface of the crucible body 6.
A silicon nitride reinforcing seat 14 is arranged at the bottom of the through groove 9, an annular nested part 11 matched with the through groove 9 is arranged at the upper part of the silicon nitride reinforcing seat 14, the annular nested part 11 is matched with the inner surface of the through groove 9, and a silicon nitride fiber layer is formed between the annular nested part 11 and the through groove 9 as an interface layer; the lower part of the silicon nitride reinforcing seat 14 corresponding to the annular nesting part 11 is provided with a disk-shaped lower surface 13, and the disk-shaped lower surface 13 and the annular nesting part 11 are integrally formed. An annular blind groove is formed on the bottom surface of the crucible body 6 corresponding to the outer side of the through groove 9, the annular blind groove area is closed by the disc-shaped lower surface 13, and 35-38% of expanded graphite is filled in the part corresponding to the annular blind groove on the inner side of the disc-shaped lower surface 13 to serve as a high heat conduction pore filler and serve as a lower high heat conduction pore filler 12.
In this embodiment, the crucible body 6 has a better overall strength, the interior of the roasting cavity 8 is increased by the silicon nitride ceramic ring 10, and when the roasting cavity 8 is physically reinforced and receives thermal stress impact by the arrangement of the silicon nitride ceramic ring 10, the deformation part of the roasting cavity 8 can be buffered and propped against to prevent deformation transition and recover according to the shape of the silicon nitride ceramic ring 10 after cooling; the silicon nitride reinforcing seat 14 is used for carrying out the reinforcing and deformation recovery modification on the through groove 9.
The air guide groove 7 is arranged and can be internally provided with an upper high heat conduction pore filler 3 in an interlayer space in the crucible cover body 2, the upper high heat conduction pore filler 3 can be used for pressure relief and thermal buffering through the high heat conduction pore filler and the air holes 5 corresponding to thermal stress impact in the roasting cavity 8, and meanwhile, the upper high heat conduction pore filler 3 can be used for dynamically adjusting the pressure between different roasting cavities 8 so as to ensure the consistency of the roasting environment states when the same materials are roasted in the roasting cavities 8.
The arrangement of the through groove 9 can adjust the thermal stress of the crucible body 6 to form an annular thermal stress opposite impact space, so that heat in different roasting cavities 8 has an inner thermal deformation space when being diffused outwards, radial temperature gradient in the crucible body 6 is reduced, the overall temperature uniformity of the crucible body 6 is effectively improved, deformation quantity of a single roasting cavity 8 is reduced, and the progress of failure deformation of the single roasting cavity is consistent.
And since experience generally holds that: the deformation failure of the cylindrical crucible is firstly that the outside of the lower part of the crucible body 6 is changed into two directions of the inside of the through groove 9 and the outside of the crucible body 6 through the arrangement of the through groove 9, the single-side deformation quantity can be reduced, so that the time required by the deformation failure is prolonged, the whole service life of the crucible body 6 is prolonged, a part of proper inner deformation is absorbed by the lower part high heat conduction pore filler 12 area, and the other part is buffered and modified and repaired by the silicon nitride reinforcing seat 14.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be appreciated by those skilled in the art that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it is to be understood that various changes, modifications and/or variations may be made by those skilled in the art after reading the technical content of the present invention, and that all such equivalents are intended to fall within the scope of protection defined in the claims appended hereto.
Claims (8)
1. The internally reinforced multi-cavity graphite crucible comprises a crucible body and is characterized in that the crucible body is a cylindrical crucible body, a circular blind groove is formed in the top surface of the crucible body, and the upper part of the circular blind groove is sealed by a crucible cover matched with the step surface of the circular blind groove;
the circular blind groove is internally provided with a plurality of roasting cavities, the roasting cavities are of blind groove structures with circular cross sections, the depth of each roasting cavity is consistent with the depth of a material to be sintered, the roasting cavities are uniformly arranged on the annular surface of the circular blind groove, at least one annular groove is formed on the inner wall of each roasting cavity, a silicon nitride ceramic ring is formed in the groove of each annular groove, the inner surface of each silicon nitride ceramic ring and the inner wall of each roasting cavity are positioned on the same plane, and a plurality of vertically arranged air guide grooves are formed on the plane; a through groove is formed in the center of the crucible body, a silicon nitride reinforcing seat is arranged at the lower part of the through groove, and the silicon nitride reinforcing seat is provided with an annular nesting part nested with the through groove and a disc-shaped lower surface which is arranged at the outer side of the annular nesting part and is attached to the bottom surface of the crucible body;
the crucible cover is provided with a hollow interlayer, an air hole is arranged in the middle of the top surface, and a high-heat-conductivity pore filler is filled in the hollow interlayer, wherein the heat conductivity coefficient of the high-heat-conductivity pore filler is higher than that of the crucible cover, and the porosity of the high-heat-conductivity pore filler is 30-40%; the crucible cover is provided with a notch at the position corresponding to the air guide groove on the lower surface, and the notch is communicated with the hollow interlayer.
2. The internally reinforced multichamber graphite crucible as in claim 1 wherein the number of baking chambers formed in said circular blind slot is 4-6 and the inner diameter of said baking chambers is 1/4 of the inner diameter of the circular blind slot.
3. The internally reinforced multichamber graphite crucible according to claim 1 wherein the ring height of the silicon nitride ceramic ring is 1/5-1/3 of the depth of the firing chamber and the ring thickness is 2-3 mm.
4. The internally reinforced multichamber graphite crucible of claim 1 wherein said through slot has an inner diameter that is 1/4 of the inner diameter of the circular blind slot.
5. The internally reinforced multichamber graphite crucible according to claim 1 wherein a silicon nitride fiber layer is lined between said silicon nitride ceramic ring and said annular recess as an interface layer.
6. The internally reinforced multichamber graphite crucible as in claim 1 wherein a layer of silicon nitride fiber is lined between said silicon nitride reinforcing seat and said through slot as an interface layer.
7. The internally reinforced multichamber graphite crucible as recited in claim 1 wherein an interlayer is formed between the lower disk-shaped surface of said silicon nitride reinforcing seat and the bottom surface of said crucible body and wherein a filler having the same content as the high thermal conductivity pore filler in said crucible cover is formed in the interlayer.
8. The internally reinforced multichamber graphite crucible of claim 1 wherein said highly thermally conductive pore filler is expanded graphite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011214969.0A CN112325637B (en) | 2020-11-04 | 2020-11-04 | Inside reinforced multicavity graphite crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011214969.0A CN112325637B (en) | 2020-11-04 | 2020-11-04 | Inside reinforced multicavity graphite crucible |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112325637A CN112325637A (en) | 2021-02-05 |
| CN112325637B true CN112325637B (en) | 2024-04-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011214969.0A Active CN112325637B (en) | 2020-11-04 | 2020-11-04 | Inside reinforced multicavity graphite crucible |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201395646Y (en) * | 2009-03-11 | 2010-02-03 | 周宇 | Silicon nitride ceramic integral crucible |
| CN203657465U (en) * | 2013-12-20 | 2014-06-18 | 邵宏 | Energy-saving vacuum double-cavity maintaining furnace |
| CN105091582A (en) * | 2015-08-20 | 2015-11-25 | 无锡中强电碳有限公司 | Special-shaped graphite crucible |
| CN106637410A (en) * | 2016-12-30 | 2017-05-10 | 珠海鼎泰芯源晶体有限公司 | Crucible device |
| CN207688640U (en) * | 2018-01-03 | 2018-08-03 | 青岛中冶坩埚有限公司 | It is a kind of double along graphite crucible |
| CN209263638U (en) * | 2018-12-20 | 2019-08-16 | 成都阿泰克特种石墨有限公司 | A kind of light-duty graphite crucible of combined energy-saving |
| CN210198074U (en) * | 2019-04-04 | 2020-03-27 | 爱克斯瑞真空技术（苏州）有限公司 | X-ray tube anode head casting target crucible device |
-
2020
- 2020-11-04 CN CN202011214969.0A patent/CN112325637B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201395646Y (en) * | 2009-03-11 | 2010-02-03 | 周宇 | Silicon nitride ceramic integral crucible |
| CN203657465U (en) * | 2013-12-20 | 2014-06-18 | 邵宏 | Energy-saving vacuum double-cavity maintaining furnace |
| CN105091582A (en) * | 2015-08-20 | 2015-11-25 | 无锡中强电碳有限公司 | Special-shaped graphite crucible |
| CN106637410A (en) * | 2016-12-30 | 2017-05-10 | 珠海鼎泰芯源晶体有限公司 | Crucible device |
| CN207688640U (en) * | 2018-01-03 | 2018-08-03 | 青岛中冶坩埚有限公司 | It is a kind of double along graphite crucible |
| CN209263638U (en) * | 2018-12-20 | 2019-08-16 | 成都阿泰克特种石墨有限公司 | A kind of light-duty graphite crucible of combined energy-saving |
| CN210198074U (en) * | 2019-04-04 | 2020-03-27 | 爱克斯瑞真空技术（苏州）有限公司 | X-ray tube anode head casting target crucible device |
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| CN112325637A (en) | 2021-02-05 |
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