CN112313554B - 用于提供超分辨率成像的准确度的反馈并改进超分辨率成像的准确度的系统、装置和方法 - Google Patents

用于提供超分辨率成像的准确度的反馈并改进超分辨率成像的准确度的系统、装置和方法 Download PDF

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CN112313554B
CN112313554B CN201980040709.5A CN201980040709A CN112313554B CN 112313554 B CN112313554 B CN 112313554B CN 201980040709 A CN201980040709 A CN 201980040709A CN 112313554 B CN112313554 B CN 112313554B
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马修·C·普特曼
约翰·B·普特曼
瓦迪姆·潘斯基
约瑟夫·R·苏卡尔
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Nano Electronic Imaging Co ltd
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CN201980040709.5A 2018-07-03 2019-05-21 用于提供超分辨率成像的准确度的反馈并改进超分辨率成像的准确度的系统、装置和方法 Active CN112313554B (zh)

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US16/027,056 US10169852B1 (en) 2018-07-03 2018-07-03 Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US16/027,056 2018-07-03
PCT/US2019/033293 WO2020009749A1 (en) 2018-07-03 2019-05-21 Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging

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Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019097524A1 (en) * 2017-11-20 2019-05-23 Scopio Labs Ltd. Accelerating digital microscopy scans using empty/dirty area detection
US10599951B2 (en) * 2018-03-28 2020-03-24 Kla-Tencor Corp. Training a neural network for defect detection in low resolution images
US10169852B1 (en) 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) * 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate
KR102712777B1 (ko) * 2018-10-29 2024-10-04 삼성전자주식회사 전자 장치 및 전자 장치의 제어 방법
WO2020102812A1 (en) * 2018-11-16 2020-05-22 Google Llc Generating super-resolution images using neural networks
KR20240038156A (ko) 2018-12-31 2024-03-22 에이에스엠엘 네델란즈 비.브이. E-빔 이미지 향상을 위한 완전 자동화 sem 샘플링 시스템
KR102643362B1 (ko) * 2019-04-18 2024-03-07 주식회사 히타치하이테크 하전 입자선 장치
US11067786B2 (en) * 2019-06-07 2021-07-20 Leica Microsystems Inc. Artifact regulation methods in deep model training for image transformation
EP3757872A1 (en) * 2019-06-28 2020-12-30 Visiopharm A/S Scanning/pre-scanning quality control of slides
KR102837524B1 (ko) * 2020-02-03 2025-07-22 나노트로닉스 이미징, 인코포레이티드 딥 포토메트릭 러닝(dpl) 시스템, 장치 및 방법
WO2021206687A1 (en) 2020-04-07 2021-10-14 Purdue Research Foundation Image upsampling
CN111553840B (zh) * 2020-04-10 2023-06-27 北京百度网讯科技有限公司 图像超分辨的模型训练和处理方法、装置、设备和介质
US11335443B1 (en) 2020-09-07 2022-05-17 OpenNano Pte. Ltd. Phenotypic patient data derivation from economic data
US20230345115A1 (en) * 2020-09-21 2023-10-26 Molecular Devices, Llc Method and system of developing an imaging configuration to optimize performance of a microscopy system
CN112653834B (zh) * 2020-12-01 2022-04-08 广东鼎诚电子科技有限公司 超分辨率扫描成像方法、系统和存储介质
CN114943642B (zh) * 2021-02-09 2025-03-14 华为技术有限公司 图像处理方法、装置、系统及电子设备
TW202238110A (zh) * 2021-02-23 2022-10-01 以色列商奧寶科技有限公司 使用混合成像系統之自動光學檢測
US20220270212A1 (en) * 2021-02-25 2022-08-25 Kla Corporation Methods for improving optical inspection and metrology image quality using chip design data
WO2022197001A1 (en) 2021-03-16 2022-09-22 +Samsung Electronics Co., Ltd. Method and electronic device for removing artifact in high resolution image
CN113191495A (zh) * 2021-03-26 2021-07-30 网易（杭州）网络有限公司 超分模型的训练及人脸识别方法、装置、介质及电子设备
CN113112405B (zh) * 2021-04-12 2022-04-12 广州超视计生物科技有限公司 超分辨率显微镜图像的自适应校正方法及sim-odt双模态系统
KR102730875B1 (ko) * 2021-07-27 2024-11-15 한국과학기술원 서로 다른 공간 해상도를 갖는 방사선 영상을 위한 영상 업샘플링 방법 및 물질 분별 방법
US20240013365A9 (en) * 2021-10-04 2024-01-11 Kla Corporation Unsupervised or self-supervised deep learning for semiconductor-based applications
CN116152690B (zh) * 2021-11-17 2025-11-28 瑞昱半导体股份有限公司 视频分类系统与方法以及神经网络训练系统与方法
US12423772B2 (en) * 2022-02-17 2025-09-23 Fei Company Systems and methods for hybrid enhancement of scanning electron microscope images
TWI788251B (zh) * 2022-04-01 2022-12-21 偉詮電子股份有限公司 超解析度影像的重建方法以及超解析度影像的重建系統
CN115482509B (zh) * 2022-10-13 2025-10-10 中国铁塔股份有限公司 烟火识别方法、装置、电子设备及存储介质
US12536613B2 (en) * 2022-12-06 2026-01-27 Samsung Electronics Co., Ltd. Method and system with image super-resolution
JPWO2024203900A1 (https=) * 2023-03-24 2024-10-03
JP2024140962A (ja) * 2023-03-28 2024-10-10 シスメックス株式会社 分析方法、検体分析装置およびプログラム
US12511731B2 (en) * 2023-05-09 2025-12-30 Orbotech Ltd. System and method for three-dimensional imaging of samples using a machine learning algorithm
US12293010B1 (en) 2024-07-08 2025-05-06 AYL Tech, Inc. Context-sensitive portable messaging based on artificial intelligence
CN119540623B (zh) * 2024-11-12 2025-09-26 河海大学 一种融合历史高分土地覆盖数据的深度时空超分辨率制图方法

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7447382B2 (en) * 2004-06-30 2008-11-04 Intel Corporation Computing a higher resolution image from multiple lower resolution images using model-based, robust Bayesian estimation
US7570796B2 (en) 2005-11-18 2009-08-04 Kla-Tencor Technologies Corp. Methods and systems for utilizing design data in combination with inspection data
US7676077B2 (en) 2005-11-18 2010-03-09 Kla-Tencor Technologies Corp. Methods and systems for utilizing design data in combination with inspection data
US8031940B2 (en) * 2006-06-29 2011-10-04 Google Inc. Recognizing text in images using ranging data
JP4699406B2 (ja) 2007-02-28 2011-06-08 シャープ株式会社 画像処理装置、画像処理方法、画像処理装置制御プログラム、及び該プログラムを記録したコンピュータ読み取り可能な記録媒体
JP2009246935A (ja) * 2008-03-14 2009-10-22 Sanyo Electric Co Ltd 画像処理装置およびそれを搭載した撮像装置
US20090297017A1 (en) * 2008-03-25 2009-12-03 Hudgings Janice A High resolution multimodal imaging for non-destructive evaluation of polysilicon solar cells
US8014633B2 (en) * 2008-04-15 2011-09-06 Sony Corporation Method and apparatus for suppressing ringing artifacts within super-resolution image processing
US8866920B2 (en) * 2008-05-20 2014-10-21 Pelican Imaging Corporation Capturing and processing of images using monolithic camera array with heterogeneous imagers
US8385422B2 (en) * 2008-08-04 2013-02-26 Kabushiki Kaisha Toshiba Image processing apparatus and image processing method
US8958484B2 (en) * 2009-08-11 2015-02-17 Google Inc. Enhanced image and video super-resolution processing
JP2011059897A (ja) * 2009-09-08 2011-03-24 Fujifilm Corp 画像解析装置、画像解析方法およびプログラム
US8237786B2 (en) * 2009-12-23 2012-08-07 Applied Precision, Inc. System and method for dense-stochastic-sampling imaging
JP5645052B2 (ja) * 2010-02-12 2014-12-24 国立大学法人東京工業大学 画像処理装置
JP5645051B2 (ja) * 2010-02-12 2014-12-24 国立大学法人東京工業大学 画像処理装置
US9569664B2 (en) 2010-10-26 2017-02-14 California Institute Of Technology Methods for rapid distinction between debris and growing cells
US8989514B2 (en) * 2011-02-03 2015-03-24 Voxeleron Llc Method and system for image analysis and interpretation
JP2012185808A (ja) * 2011-02-17 2012-09-27 Panasonic Corp 画像処理装置、画像処理方法、及びコンピュータプログラム、並びに撮像装置
WO2012119094A2 (en) * 2011-03-03 2012-09-07 California Institute Of Technology Light guided pixel
WO2013043751A1 (en) * 2011-09-19 2013-03-28 Pelican Imaging Corporation Systems and methods for controlling aliasing in images captured by an array camera for use in super resolution processing using pixel apertures
WO2013069564A1 (ja) * 2011-11-08 2013-05-16 富士フイルム株式会社 撮像装置およびその制御方法
US9075013B2 (en) * 2012-04-29 2015-07-07 Periodic Structures, Inc. Apparatus and methods for microscopy having resolution beyond the Abbe limit
US9743891B2 (en) * 2012-07-09 2017-08-29 The Trustees Of The University Of Pennsylvania Super-resolution tomosynthesis imaging systems and methods
US9494785B2 (en) * 2012-12-07 2016-11-15 Purdue Research Foundation Single image super-resolution microscopy and telescope systems
US20140177706A1 (en) * 2012-12-21 2014-06-26 Samsung Electronics Co., Ltd Method and system for providing super-resolution of quantized images and video
CN105074818B (zh) * 2013-02-21 2019-08-13 杜比国际公司 音频编码系统、用于产生比特流的方法以及音频解码器
US9106784B2 (en) * 2013-03-13 2015-08-11 Pelican Imaging Corporation Systems and methods for controlling aliasing in images captured by an array camera for use in super-resolution processing
JP2015025758A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
JP2015052663A (ja) 2013-09-06 2015-03-19 キヤノン株式会社 画像処理方法、画像処理装置、撮像装置およびプログラム
JP6236259B2 (ja) * 2013-09-06 2017-11-22 株式会社東芝 画像処理装置、画像処理方法、及び画像処理プログラム
US9774865B2 (en) * 2013-12-16 2017-09-26 Samsung Electronics Co., Ltd. Method for real-time implementation of super resolution
JP2015197818A (ja) 2014-04-01 2015-11-09 キヤノン株式会社 画像処理装置およびその方法
EP3175302B1 (en) * 2014-08-01 2021-12-29 The Regents of the University of California Device and method for iterative phase recovery based on pixel super-resolved on-chip holography
US9384386B2 (en) * 2014-08-29 2016-07-05 Motorola Solutions, Inc. Methods and systems for increasing facial recognition working rang through adaptive super-resolution
US10437034B2 (en) * 2014-10-14 2019-10-08 Nanotronics Imaging, Inc. Unique oblique lighting technique using a brightfield darkfield objective and imaging method relating thereto
JP5937661B2 (ja) * 2014-11-13 2016-06-22 みずほ情報総研株式会社 情報予測システム、情報予測方法及び情報予測プログラム
WO2016118884A1 (en) * 2015-01-22 2016-07-28 The Regents Of The University Of California Device and method for nanoparticle sizing based on time-resolved on-chip microscopy
CA2914892C (en) 2015-04-30 2023-09-19 Farnoud Kazemzadeh A system, method and apparatus for ultra-resolved ultra-wide field-of-view multispectral and hyperspectral holographic microscopy
US10088663B2 (en) * 2015-05-13 2018-10-02 The Regents Of The University Of California Device and method for tunable vapor condensed nanolenses
JP2017028024A (ja) * 2015-07-17 2017-02-02 富士通株式会社 部品搭載基板、部品内蔵基板、部品搭載基板の製造方法および部品内蔵基板の製造方法
WO2017055609A1 (en) * 2015-09-30 2017-04-06 Piksel, Inc Improved video stream delivery via adaptive quality enhancement using error correction models
US9965901B2 (en) 2015-11-19 2018-05-08 KLA—Tencor Corp. Generating simulated images from design information
US20170168285A1 (en) * 2015-12-14 2017-06-15 The Regents Of The University Of California Systems and methods for image reconstruction
US11580375B2 (en) 2015-12-31 2023-02-14 Kla-Tencor Corp. Accelerated training of a machine learning based model for semiconductor applications
US10648924B2 (en) 2016-01-04 2020-05-12 Kla-Tencor Corp. Generating high resolution images from low resolution images for semiconductor applications
WO2017196885A1 (en) * 2016-05-10 2017-11-16 The Regents Of The University Of California Method and device for high-resolution color imaging using merged images from holographic and lens-based devices
US10346740B2 (en) * 2016-06-01 2019-07-09 Kla-Tencor Corp. Systems and methods incorporating a neural network and a forward physical model for semiconductor applications
US11024009B2 (en) 2016-09-15 2021-06-01 Twitter, Inc. Super resolution using a generative adversarial network
JP7249326B2 (ja) * 2017-07-31 2023-03-30 アンスティテュ パストゥール 単一分子局在化顕微鏡法によって取得された回折限界画像からの高密度超解像度画像の再構築を改善する方法、装置、及びコンピュータプログラム
US11222415B2 (en) * 2018-04-26 2022-01-11 The Regents Of The University Of California Systems and methods for deep learning microscopy
US10169852B1 (en) 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) * 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate
US11137719B2 (en) * 2018-12-11 2021-10-05 University Of North Carolina At Chapel Hill Methods, systems, and computer readable media for improved digital holography and display incorporating same
US11776108B2 (en) * 2020-08-05 2023-10-03 KLA Corp. Deep learning based defect detection
US11448603B1 (en) * 2021-09-02 2022-09-20 Axiomatique Technologies, Inc. Methods and apparatuses for microscopy and spectroscopy in semiconductor systems

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US20200013155A1 (en) 2020-01-09
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JP2022050565A (ja) 2022-03-30
KR20210025104A (ko) 2021-03-08
CN117350918A (zh) 2024-01-05
EP3818407A4 (en) 2022-04-13
TWI829694B (zh) 2024-01-21
WO2020009749A1 (en) 2020-01-09
US10467740B1 (en) 2019-11-05
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JP7011866B2 (ja) 2022-01-27
EP3818407B1 (en) 2025-01-08
US20230419444A1 (en) 2023-12-28
JP7431458B2 (ja) 2024-02-15
KR102605314B1 (ko) 2023-11-22
US10169852B1 (en) 2019-01-01
EP3818407A1 (en) 2021-05-12
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