CN112305410A - Chip automatic detection device - Google Patents
Chip automatic detection device Download PDFInfo
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- CN112305410A CN112305410A CN202011211186.7A CN202011211186A CN112305410A CN 112305410 A CN112305410 A CN 112305410A CN 202011211186 A CN202011211186 A CN 202011211186A CN 112305410 A CN112305410 A CN 112305410A
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- intracavity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2896—Testing of IC packages; Test features related to IC packages
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2898—Sample preparation, e.g. removing encapsulation, etching
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses an automatic chip detection device, which comprises an equipment base, wherein a working cavity with an upward opening is arranged on the left side of the upper end in the equipment base, a supporting plate capable of sliding up and down is arranged in the working cavity, the upper end surface of the supporting plate is in contact connection with a chip, a lifting sleeve rod capable of sliding up and down in the working cavity is fixedly connected to the center of the lower end surface of the supporting plate, and the left wall and the right wall of the upper end in the working cavity are symmetrical and communicated with a closed rod cavity; the invention can rapidly complete the detection of the electrical characteristics of the chips, realizes the one-to-one corresponding effect by placing the corresponding probes and the marking pens according to the number of the chips and the arrangement mode thereof, and also carries out the vacuum cleaning on the wafer again while packaging the wafer.
Description
Technical Field
The invention relates to the technical field of chips, in particular to an automatic chip detection device.
Background
The chip is a mode of making the circuit miniaturization on the semiconductor wafer surface in the electronics, and the wafer is one of the essential basic device in making the chip, need pass through the detection to the electrical characteristic of chip after the chip is made on the wafer, and the encapsulation preparation, and current detection mode detects the chip one by one through visiting, record unqualified chip again, it is of a specified duration to consume time, efficiency is not high, and the wafer can pass through artifical and all kinds of mechanical equipment's contact during the encapsulation, the contaminated probability of wafer has been improved, it is comparatively unsatisfactory.
Disclosure of Invention
The invention aims to provide an automatic chip detection device, which solves the problems that the detection of a chip takes longer time and the chip is easy to be polluted during packaging.
The invention is realized by the following technical scheme.
The invention relates to an automatic chip detection device, which comprises an equipment base, wherein a working cavity with an upward opening is arranged on the left side of the upper end in the equipment base, a supporting plate capable of sliding up and down is arranged in the working cavity, the upper end surface of the supporting plate is in contact connection with a chip, a lifting sleeve rod capable of sliding up and down in the working cavity is fixedly connected to the center of the lower end surface of the supporting plate, the left wall and the right wall of the upper end in the working cavity are symmetrical and are communicated with a sealing rod cavity, a sealing rod push plate is arranged in the working cavity on the right side in a sliding manner, a sealing rod is fixedly arranged on the right end surface of the sealing rod push plate, the working cavity can be sealed with the outside by the sealing rod, a vacuum box cavity is communicated with the left wall in the sealing rod cavity on the left side at the left end in the equipment base, a vacuum box is arranged in the vacuum, the right side of the upper end face of the equipment base is fixedly connected with a fixed shaft, the upper end of the fixed shaft is fixedly provided with a fixed block, the lower end of the fixed block is rotatably arranged on the left side of the fixed shaft and is provided with a threaded shaft, the outer circular face of the threaded shaft is in threaded connection with a sliding block, the inner right end of the sliding block is in sliding connection with the outer circular face of the fixed shaft, the left end face of the sliding block is fixedly provided with a connecting rod, the left end face of the connecting rod is fixedly connected with a test disc, the test disc is internally provided with a sliding rod cavity in an annular array manner, a sliding rod is arranged in the sliding rod cavity in a sliding manner, the center of the lower end of the sliding rod is fixedly connected with a probe, the left side of the lower end face of the sliding rod is fixedly provided with a marking pen, the test disc stops moving, the probe begins right all chips begin to detect simultaneously in the chip up end, detects when there is the trouble certain chip on the chip, the marker pen marks it, and the processing after being convenient for detects the completion back the lift loop bar slides down and passes through the backup pad drives the chip gets into in the work intracavity, the closing rod slides left will work intracavity upper end is sealed, the vacuum tube starts right in the work intracavity the vacuum box intracavity reaches the closing rod intracavity carries out evacuation work, prevents to have the dust to pile up, right the chip causes the influence, the closing rod drives the chip gets into in the storage chamber, the right-hand member is closed in the vacuum box to be convenient for later deposit and transportation.
Preferably, lower extreme just is close to in the equipment base the fixed work motor that is equipped with in terminal surface right side under the equipment base, both ends symmetry and power are connected with the power shaft about the work motor, lower extreme just is located in the equipment base the symmetry of work motor left and right sides is equipped with the power chamber, right side the power shaft right-hand member extends to the right side power intracavity spline connection has the spline to rotate the piece, the spline rotates the fixed power bevel gear that is equipped with of right-hand member, the spline rotates the fixed spline magnet that is equipped with of left end face, spline magnet left side just is located the right side the fixed spline electro-magnet that is equipped with spline magnet magnetism is connected of power intracavity wall, the screw thread shaft lower extreme extends to the right side downwards the power intracavity fixed be equipped with.
Preferably, the left side the disc outside power shaft spline connection has the switching to rotate the piece, the switching rotates the piece right-hand member and is located be equipped with the switching chamber in the equipment base, switch intracavity right side wall and about the left side the power shaft longitudinal symmetry is equipped with fixed electromagnetic block, switch intracavity left side wall and about the left side the power shaft longitudinal symmetry be equipped with respectively with the switching rotates a piece right-hand member face fixed connection's rotation magnet, the switching rotates a piece left end and extends to the left side left the fixed initiative bevel gear that is equipped with of power intracavity, the initiative bevel gear right side and with the switching rotates a disc outside fixed connection and switches bevel gear.
Preferably, the lifting sleeve rod is internally threaded with a lifting shaft which is rotatably connected to the center of the lower wall in the working cavity, the lower end of the lifting shaft extends downwards to the left side, the power cavity is internally fixed and provided with a driven bevel gear which can be meshed with the driving bevel gear, the right side of the lifting shaft is positioned between the working cavity and the left side, a transmission cavity is arranged between the power cavity and the left side, a transmission shaft is arranged on the inner wall of the power cavity in a rotatable manner, and the lower end of the transmission shaft extends downwards to the left side, the power cavity is fixedly provided with a transmission bevel gear which can be meshed with the switching bevel gear.
Preferably, a closed rod shaft is connected to the closed rod through an internal thread, a belt wheel cavity is formed in the equipment base at the right end and one side close to the threaded shaft, belt wheels are symmetrically arranged in the belt wheel cavity in an up-down mode and can rotate, a synchronous belt is wound between the belt wheels at the upper side and the lower side, the right end of the closed rod shaft extends rightwards into the belt wheel cavity and is fixedly connected with the axis of the belt wheel at the upper side, a rotating shaft is fixedly arranged at the axis of the belt wheel at the upper side, the left end of the rotating shaft extends leftwards into the transmission cavity and is fixedly provided with a meshing bevel gear, and a rotating bevel gear meshed with the meshing bevel.
Preferably, the vacuum box cavity is close to the lower end of the inner wall on one side of the left end face of the equipment base is communicated with a baffle cavity, a baffle is arranged in the baffle cavity in a sliding mode, the baffle can be tightly sealed by the vacuum box cavity, a baffle spring is fixedly arranged between the lower end of the vacuum box cavity and the lower wall in the baffle cavity, a baffle column is fixedly arranged on the upper side of the left end face of the baffle, and induction magnets are fixedly arranged on the upper and lower sides of the right end face of the vacuum box in an up-and-down symmetrical.
Preferably, the left side closing rod intracavity lower wall left end intercommunication has the closing plate chamber, it is equipped with the closing plate to slide in the closing plate chamber, bilateral symmetry about the left end in the closing plate just fixes and is equipped with closing plate magnet, both sides from top to bottom the closing plate magnet respectively can with upper and lower both sides induction magnet magnetism is connected, closing plate lower extreme fixedly connected with promotes the loop bar, it is equipped with the promotion axle to promote the loop bar internal rotation, just be located in the equipment base the fixed push motor that is equipped with of closing plate chamber downside, promote the axle lower extreme with push motor up end power is connected.
Preferably, the upper end of the left side in the test disc is provided with an induction cavity with an upward opening, active electromagnetic blocks are symmetrically arranged in the induction cavity from top to bottom, the active electromagnetic blocks are fixedly connected with the upper end in the induction cavity and arranged at the lower side, the active electromagnetic blocks can slide in the induction cavity from top to bottom, electromagnetic block springs are fixedly arranged between the active electromagnetic blocks at the upper side and the lower side, the center of the end face of each active electromagnetic block is fixedly connected with an active electromagnetic block pull rope, the left wall of the lower end in the sliding rod cavity is provided with a clamping block cavity with a rightward opening, a clamping block is arranged in the clamping block cavity in a sliding manner, a clamping block spring is fixedly arranged between the left end face of each clamping block and the left wall in the clamping block cavity, and the center.
The invention has the beneficial effects that: the invention can rapidly complete the detection of the electrical characteristics of the chips, realizes the one-to-one corresponding effect by placing the corresponding probes and the marking pens according to the number of the chips and the arrangement mode thereof, and also carries out the vacuum cleaning on the wafer again while packaging the wafer.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic structural diagram at A-A in FIG. 1 according to an embodiment of the present invention;
FIG. 3 is an enlarged schematic view of the embodiment of the present invention at B in FIG. 1;
FIG. 4 is an enlarged schematic view of the embodiment of the present invention at C in FIG. 1;
FIG. 5 is an enlarged schematic view of the embodiment of the present invention at D in FIG. 1;
FIG. 6 is an enlarged schematic view of the embodiment of the present invention at E in FIG. 1.
Detailed Description
The invention will now be described in detail with reference to fig. 1-6, wherein for ease of description the orientations described hereinafter are now defined as follows: the up, down, left, right, and front-back directions described below correspond to the up, down, left, right, and front-back directions in the projection relationship of fig. 1 itself.
The automatic chip detection device described with reference to fig. 1-6 includes an apparatus base 11, a working chamber 71 with an upward opening is provided on the left side of the inner upper end of the apparatus base 11, a support plate 18 capable of sliding up and down is provided in the working chamber 71, a wafer 19 is connected on the upper end surface of the support plate 18 in a contact manner, a lifting sleeve 14 capable of sliding up and down in the working chamber 71 is fixedly connected to the center of the lower end surface of the support plate 18, the left and right walls of the inner upper end of the working chamber 71 are symmetrical and communicated with a closed rod chamber 17, a closed rod push plate 16 is slidably provided in the working chamber 71 on the right side, a closed rod 72 is fixedly provided on the right end surface of the closed rod push plate 16, the working chamber 71 can be closed with the outside by the closed rod 72, a vacuum box chamber 42 is communicated with the left wall of the closed rod chamber 17 on the left side and provided with a vacuum box 13 slidably provided in, a storage cavity 12 with a rightward opening is arranged in the vacuum box 13, the left side of the lower end of the inner wall of the working cavity 71 is communicated with a vacuum tube 43, the right side of the upper end face of the equipment base 11 is fixedly connected with a fixed shaft 29, the upper end of the fixed shaft 29 is fixedly provided with a fixed block 27, the lower end of the fixed block 27 is rotatably arranged on the left side of the fixed shaft 29 and is provided with a threaded shaft 28, the outer circular face of the threaded shaft 28 is in threaded connection with a sliding block 30, the inner right end of the sliding block 30 is in sliding connection with the outer circular face of the fixed shaft 29, the left end face of the sliding block 30 is fixedly provided with a connecting rod 25, the left end face of the connecting rod 25 is fixedly connected with a test disc 26, an annular array in the test disc 26 is provided with a sliding rod cavity 70, a sliding rod 70 is, the test disc 26 is located right above the wafer 19, when the detection operation starts, the threaded shaft 28 rotates to drive the sliding block 30 to slide downwards until the lower end surface of the probe 69 contacts with the upper end surface of the wafer 19, the test disc 26 stops moving, the probe 69 starts to simultaneously detect all chips in the upper end surface of the wafer 19, when a chip on the wafer 19 is detected to have a fault, the marking pen 59 marks the chip, the subsequent processing is facilitated, after the detection is completed, the lifting sleeve 14 slides downwards to drive the wafer 19 to enter the working cavity 71 through the supporting plate 18, the closing rod 72 slides leftwards to close the upper end in the working cavity 71, and the vacuum tube 43 starts to vacuumize the working cavity 71, the vacuum box cavity 42 and the closing rod cavity 17, the dust is prevented from being accumulated to affect the wafer 19, the closing rod 72 drives the wafer 19 to enter the storage cavity 12, and the right end in the vacuum box 13 is closed, so that the wafer is convenient to store and transport.
Advantageously, a working motor 37 is fixedly arranged at the inner lower end of the equipment base 11 and close to the right side of the lower end surface of the equipment base 11, the left end and the right end of the working motor 37 are symmetrical and are in power connection with a power shaft 36, power cavities 32 are symmetrically arranged at the left side and the right side of the working motor 37 at the lower end in the equipment base 11, the right end of the power shaft 36 at the right side extends rightwards to the right side, spline connection is arranged in the power cavities 32, a spline rotating part 79 is arranged, the right end of the spline rotating part 79 is fixedly provided with a power bevel gear 73, the left end face of the spline rotating part 79 is fixedly provided with a spline magnet 78, a spline electromagnet 77 magnetically connected with the spline magnet 78 is fixedly arranged on the inner wall of the power cavity 32 at the left side and the right side of the spline magnet 78, the lower end of the threaded shaft 28 extends downwards to the right side, and a driven bevel gear 31 meshed with the power bevel gear 73 is fixedly arranged in the power cavity 32.
Beneficially, a switching rotating member 53 is splined on the outer circular surface of the power shaft 36 on the left side, a switching cavity 51 is arranged at the right end of the switching rotating member 53 and in the equipment base 11, fixed electromagnetic blocks 58 are symmetrically arranged on the right wall in the switching cavity 51 and on the left side of the power shaft 36 up and down, rotating member magnets 52 respectively fixedly connected with the right end surface of the switching rotating member 53 are symmetrically arranged on the left wall in the switching cavity 51 and on the left side of the power shaft 36 up and down, a driving bevel gear 55 is fixedly arranged in the power cavity 32 and extends to the left side of the left end of the switching rotating member 53, and a switching bevel gear 56 is fixedly connected on the right side of the driving bevel gear 55 and on the outer circular surface of the.
Advantageously, the lifting sleeve rod 14 is internally threaded with a lifting shaft 15 rotatably connected to the center of the lower wall in the working chamber 71, the lower end of the lifting shaft 15 extends downward to the left side, a driven bevel gear 57 capable of meshing with the drive bevel gear 55 is fixedly arranged in the power chamber 32, a transmission chamber 33 is arranged on the right side of the lifting shaft 15 and between the working chamber 71 and the left side of the power chamber 32, a transmission shaft 74 is rotatably arranged in the inner walls of the transmission chamber 33 and the left side of the power chamber 32, and a transmission bevel gear 54 capable of meshing with the switching bevel gear 56 is fixedly arranged in the power chamber 32, and the lower end of the transmission shaft 74 extends downward to the left side.
Beneficially, a closed rod shaft 23 is connected to the closed rod 72 through a thread, a pulley cavity 21 is arranged at the right end in the equipment base 11 and on one side close to the threaded shaft 28, pulleys 20 are symmetrically and rotatably arranged in the pulley cavity 21, a synchronous belt 22 is wound between the pulleys 20 on the upper side and the lower side, the right end of the closed rod shaft 23 extends rightwards into the pulley cavity 21 and is fixedly connected with the axis of the pulley 20 on the upper side, a rotating shaft 24 is fixedly arranged on the axis of the pulley 20 on the upper side, the left end of the rotating shaft 24 extends leftwards into the transmission cavity 33 and is fixedly provided with a meshing bevel gear 34, and a rotating bevel gear 35 meshed with the meshing bevel gear 34 is fixedly arranged at the upper end of the transmission shaft 74 and extends upwards into the transmission cavity 33.
Beneficially, the lower end of the inner wall of the vacuum box cavity 42 close to the left end face of the equipment base 11 is communicated with a baffle cavity 41, a baffle 40 is slidably arranged in the baffle cavity 41, the vacuum box cavity 42 can be tightly closed by the baffle 40, a baffle spring 38 is fixedly arranged between the lower end of the vacuum box cavity 42 and the inner lower wall of the baffle cavity 41, a baffle column 39 is fixedly arranged on the upper side of the left end face of the baffle 40, and the right end face of the vacuum box 13 is vertically symmetrical and fixedly provided with an induction magnet 49.
Beneficially, the left side is that the left end of the inner lower wall of the closed rod cavity 17 is communicated with a closed plate cavity 50, a closed plate 46 is slidably arranged in the closed plate cavity 50, closed plate magnets 47 are symmetrically and fixedly arranged on the upper side and the lower side of the inner left end of the closed plate 46, the closed plate magnets 47 on the upper side and the lower side can be magnetically connected with the induction magnets 49 on the upper side and the lower side respectively, a pushing sleeve rod 75 is fixedly connected to the lower end of the closed plate 46, a pushing shaft 76 is arranged in the pushing sleeve rod 75 in a rotating mode, a pushing motor 45 is fixedly arranged on the lower side of the closed plate cavity 50 in the equipment base 11, and the lower end of the pushing shaft 76 is in power connection with the.
Beneficially, an induction cavity 62 with an upward opening is arranged at the upper end of the left side in the test disc 26, active electromagnetic blocks 68 are symmetrically arranged in the induction cavity 62 from top to bottom, the upper active electromagnetic block 68 is fixedly connected with the upper end in the induction cavity 62, the lower active electromagnetic block 68 can slide up and down in the induction cavity 62, an electromagnetic block spring 61 is fixedly arranged between the upper and lower active electromagnetic blocks 68, an active electromagnetic block pull rope 60 is fixedly connected with the center of the lower end face of the lower active electromagnetic block 68, a clamping block cavity 63 with a rightward opening is formed in the left wall of the lower end in the sliding rod cavity 70, a clamping block 66 is arranged in the clamping block cavity 63 in a sliding manner, a latch spring 64 is fixedly arranged between the left end surface of the latch 66 and the left wall in the latch cavity 63, the center of the left end surface of the fixture block 66 is fixedly connected with a fixture block pull rope 65 connected with the active electromagnetic block pull rope 60.
In an initial state, the lower end face of the supporting plate 18 is flush with the inner upper wall of the working cavity 71, the closing rod push plate 16 is located in the right closing rod cavity 17, the driven bevel gear 57 is separated from the driving bevel gear 55, the switching bevel gear 56 is separated from the transmission bevel gear 54, the closing plate 46 is located in the closing plate cavity 50, the driving electromagnetic blocks 68 on the upper side and the lower side are separated, the fixture block 66 is located in the sliding rod 70, the pushing motor 45 and the working motor 37 stop working, the electromagnetic block spring 61 and the fixture block spring 64 are in a natural state, and the baffle spring 38 is in a compressed state.
The wafer 19 is manually placed on the upper end face of the supporting plate 18 and is located under the test disc 26, the distribution of the sliding rods 70 in the test disc 26 is adjusted through the distribution condition of chips in the wafer 19, the upper side active electromagnetic block 68 is started to drive the lower side active electromagnetic block 68 to slide upwards, the fixture block pull rope 65 is driven by the active electromagnetic block pull rope 60 to drive the fixture block 66 to slide leftwards to the fixture block cavity 63, and the sliding rods 70 are distributed in a manner that the sliding rods 70 are separated from the sliding rod cavity 70 or the sliding rods 70 are additionally arranged in the blank sliding rod cavity 70, so that the sliding rods 70 can correspond to the chips one to one.
When in detection, the working motor 37 is started to drive the left and right power shafts 36 to rotate, the left power shaft 36 drives the driving bevel gear 55 and the switching bevel gear 56 to rotate through the switching rotating part 53, the right power shaft 36 drives the power bevel gear 73 to rotate through the spline rotating part 79, the power bevel gear 73 is in meshing transmission with the driven bevel gear 31, and further can drive the threaded shaft 28 to rotate, so that the sliding block 30 is driven by the threaded shaft 28 to slide downwards, the sliding block 30 drives the test disc 26 by the connecting rod 25, and further drives the probes 69 and the marking pen 59 to move downwards by the sliding rod 70 to be contacted with the upper end surface of the wafer 19, all the probes 69 in the test disc 26 are started simultaneously, the electrical characteristics of the corresponding chips are detected, and when a certain chip is not detected, the marking pen 59 corresponding to the probe 69 marks the chip for the convenience of the subsequent treatment.
During packaging, the spline electromagnet 77 is started to drive the spline magnet 78 to slide leftwards, the spline magnet 78 drives the power bevel gear 73 to slide leftwards through the spline rotor 79 until the power bevel gear 73 is disengaged from the driven bevel gear 31, the fixed electromagnet block 58 is started to drive the rotor magnet 52 to slide leftwards, the switching rotor 53 drives the driving bevel gear 55 to slide leftwards until the driving bevel gear 55 is engaged with the driven bevel gear 57, the driving bevel gear 55 rotates to drive the driven bevel gear 57 to rotate, the lifting sleeve 14 is driven to move downwards through the lifting shaft 15, the lifting sleeve 14 drives the wafer 19 to move downwards into the working chamber 71 through the support plate 18, the fixed electromagnet block 58 is started again to drive the rotor magnet 52 to slide rightwards, the switching rotor 53 drives the switching bevel gear 56 to slide rightwards until the driving bevel gear 55 is disengaged from the driven bevel gear 57, the switching bevel gear 56 drives the transmission bevel gear 54 to rotate and further drives the rotation bevel gear 35 to rotate through the transmission shaft 74, the rotation bevel gear 35 drives the rotating shaft 24 to transmit through the meshing bevel gear 34, the rotating shaft 24 drives the synchronous belt 22 to transmit through the lower belt pulley 20 and further drives the sealing rod shaft 23 to rotate through the upper belt pulley 20, the sealing rod shaft 23 drives the sealing rod 72 and further drives the sealing rod push plate 16 to slide leftwards into the left sealing rod cavity 17 to separate the working cavity 71, the vacuum tube 43 is started to vacuumize the working cavity 71, the vacuum box cavity 42 and the sealing rod cavity 17 to prevent dust accumulation, meanwhile, when the sealing rod push plate 16 slides leftwards, the wafer 19 can be driven to simultaneously slide leftwards into the storage cavity 12 to be placed, the pushing motor 45 is started to drive the pushing sleeve rod 75 to slide upwards through the pushing shaft 76 to drive the sealing plate 46 to slide upwards to drive the upper sealing plate magnet 47 to contact with the upper sensing magnet 49, and then the magnetic connection is carried out, the storage cavity 12 is sealed, a new vacuum box 13 is put in while the baffle 40 is driven by a person through the baffle column 39 to slide downwards to take out the vacuum box 13, the pushing motor 45 rotates reversely to drive the pushing sleeve rod 75 to reset, the supporting plate 18 resets, the testing disc 26 resets, and new detection is carried out.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (8)
1. The utility model provides a chip automatic checkout device, includes the equipment base, its characterized in that: a working cavity with an upward opening is arranged on the left side of the upper end in the equipment base, a supporting plate capable of sliding up and down is arranged in the working cavity, a chip is connected on the upper end face of the supporting plate in a contact manner, a lifting loop bar capable of sliding up and down in the working cavity is fixedly connected to the center of the lower end face of the supporting plate, the left wall and the right wall of the upper end in the working cavity are symmetrical and communicated with a sealing rod cavity, a sealing rod push plate is arranged in the working cavity in a sliding manner on the right side, a sealing rod is fixedly arranged on the right end face of the sealing rod push plate, the working cavity can be sealed from the outside by the sealing rod, a vacuum box cavity is arranged at the left end in the equipment base and communicated with the left wall in the sealing rod cavity on the left side, a vacuum box is arranged in the vacuum box cavity in a sliding manner, a storage cavity with, the upper end of the fixed shaft is fixedly provided with a fixed block, the lower end of the fixed block is positioned on the left side of the fixed shaft and is rotatably provided with a threaded shaft, the outer circular surface of the threaded shaft is in threaded connection with a sliding block, the inner right end of the sliding block is in sliding connection with the outer circular surface of the fixed shaft, the left end surface of the sliding block is fixedly provided with a connecting rod, the left end surface of the connecting rod is fixedly connected with a test disc, the inner circular array of the test disc is provided with a sliding rod cavity, a sliding rod is arranged in the sliding rod cavity in a sliding manner, the center of the lower end of the sliding rod is fixedly connected with a probe, the left side of the lower end surface of the sliding rod is fixedly provided with a marking pen, the test disc is positioned right above the chip, when the detection work starts, the threaded shaft rotates to drive the sliding block to slide downwards until, when detecting certain chip has the trouble on the chip, the marker pen marks it, the processing after being convenient for, detect and accomplish the back the lift loop bar slides down and passes through the backup pad drives the chip gets into in the work intracavity, the closed rod slides left will work intracavity upper end is sealed, the vacuum tube starts right the work intracavity the vacuum box intracavity, reach the closed rod intracavity carries out evacuation work, prevents to have the dust to pile up, right the chip causes the influence, the closed rod drives the chip gets into store the intracavity, the right-hand member is closed in the vacuum box to be convenient for deposit and transportation afterwards.
2. The automatic chip detection device according to claim 1, wherein: lower extreme just is close to in the equipment base the fixed work motor that is equipped with in terminal surface right side under the equipment base, both ends symmetry and power connection have the power shaft about the work motor, lower extreme just is located in the equipment base the symmetry of work motor left and right sides is equipped with the power chamber, the right side power shaft right-hand member extends to the right side power intracavity splined connection has the spline to rotate the piece, the spline rotates the fixed power bevel gear that is equipped with of piece right-hand member, the spline rotates the fixed spline magnet that is equipped with of piece left end face, spline magnet left side just is located the right side the fixed spline electro-magnet that is equipped with spline magnet magnetism is connected of power intracavity wall, screw thread axle lower extreme downwardly extending right side the power intracavity fixed be equipped with power.
3. The automatic chip detection device according to claim 2, wherein: the left side the outer disc splined connection of power shaft has the switching to rotate the piece, the switching rotates the piece right-hand member and is located be equipped with the switching chamber in the equipment base, switch intracavity right side wall and about the left side the power shaft longitudinal symmetry is equipped with fixed electromagnetic block, switch intracavity left side wall and about the left side the power shaft longitudinal symmetry be equipped with respectively with the switching rotates a piece magnet of piece right-hand member face fixed connection, the switching rotates a left end and extends to the left side left the fixed initiative bevel gear that is equipped with of power intracavity, the initiative bevel gear right side and with the switching rotates an outer disc fixedly connected with switching bevel gear.
4. The automatic chip detection device according to claim 3, wherein: lifting loop bar female connection have rotate connect in the lift axle at work intracavity lower wall center, lift axle lower extreme downwardly extending to the left side the power intracavity is fixed be equipped with can with the driven bevel gear of drive bevel gear engaged with, the lift axle right side just is located work chamber and left side be equipped with the transmission chamber between the power chamber, transmission chamber and left side the power intracavity wall internal energy pivoted is equipped with the transmission shaft, transmission shaft lower extreme downwardly extending to the left side the power intracavity is fixed be equipped with can with switch bevel gear engaged with transmission bevel gear.
5. The automatic chip detection device according to claim 4, wherein: the sealing rod is internally threaded with a sealing rod shaft, a belt wheel cavity is formed in the right end of the equipment base and is close to one side of the threaded shaft, belt wheels are symmetrically arranged in the belt wheel cavity in an up-down mode and can rotate, a synchronous belt is wound between the belt wheels on the upper side and the lower side, the right end of the sealing rod shaft extends rightwards into the belt wheel cavity and is fixedly connected with the axis of the belt wheel on the upper side, a rotating shaft is fixedly arranged on the axis of the belt wheel on the upper side, the left end of the rotating shaft extends leftwards into the transmission cavity and is fixedly provided with a meshing bevel gear, and the upper end of the rotating shaft extends upwards.
6. The automatic chip detection device according to claim 1, wherein: the vacuum box cavity is close to the lower end of the inner wall on one side of the left end face of the equipment base is communicated with a baffle cavity, a baffle is arranged in the baffle cavity in a sliding mode, the baffle can be tightly sealed in the vacuum box cavity, the lower end of the vacuum box cavity is fixedly provided with a baffle spring between the lower wall in the baffle cavity, a baffle column is fixedly arranged on the upper side of the left end face of the baffle, and induction magnets are arranged on the upper and lower sides of the right end face of the vacuum box in a vertically symmetrical mode.
7. The automatic chip detection device according to claim 6, wherein: the left side closing rod intracavity lower wall left end intercommunication has the closing plate chamber, it is equipped with the closing plate to slide in the closing plate chamber, bilateral symmetry about the left end in the closing plate just fixes being equipped with closing plate magnet, both sides from top to bottom closing plate magnet can respectively with upper and lower both sides response magnet magnetism is connected, closing plate lower extreme fixedly connected with promotes the loop bar, it is equipped with the promotion axle to promote the loop bar internal rotation, just be located in the equipment base the fixed push motor that is equipped with of closing plate chamber downside, promote the axle lower extreme with push motor up end power is connected.
8. The automatic chip detection device according to claim 1, wherein: the upper end of the left side in the test disc is provided with an induction cavity with an upward opening, active electromagnetic blocks are symmetrically arranged in the induction cavity from top to bottom, the active electromagnetic blocks are fixedly connected with the upper end in the induction cavity and arranged at the lower side, the active electromagnetic blocks can slide in the induction cavity from top to bottom, electromagnetic block springs are fixedly arranged between the active electromagnetic blocks and arranged at the upper side and the lower side, an active electromagnetic block pull rope is fixedly connected with the center of the end face of each active electromagnetic block, a clamping block cavity with a rightward opening is arranged on the left wall of the lower end in the sliding rod cavity, a clamping block is arranged in the clamping block cavity in a sliding mode, a clamping block spring is fixedly arranged between the left end face of each clamping block and the left wall of the clamping block cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011211186.7A CN112305410A (en) | 2020-11-03 | 2020-11-03 | Chip automatic detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011211186.7A CN112305410A (en) | 2020-11-03 | 2020-11-03 | Chip automatic detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112305410A true CN112305410A (en) | 2021-02-02 |
Family
ID=74332718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011211186.7A Withdrawn CN112305410A (en) | 2020-11-03 | 2020-11-03 | Chip automatic detection device |
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| Country | Link |
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| CN (1) | CN112305410A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113759083A (en) * | 2021-11-09 | 2021-12-07 | 苏州星帆华镭光电科技有限公司 | Chip surface curve detection device |
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| CN105510805A (en) * | 2016-01-08 | 2016-04-20 | 上海恒浥智能科技股份有限公司 | Chip automatic detection device |
| CN108490342A (en) * | 2018-04-20 | 2018-09-04 | 福州市星旺成信息科技有限公司 | A kind of arrangement for testing integrated circuit |
| CN110261760A (en) * | 2019-07-05 | 2019-09-20 | 杨桂英 | A kind of chip test system applied to integrated circuit |
| CN111208376A (en) * | 2020-03-09 | 2020-05-29 | 青田林心半导体科技有限公司 | Detector for detecting performance of semiconductors in various forms |
| CN111561860A (en) * | 2020-05-28 | 2020-08-21 | 台州市椒江蒙特智能装备有限公司 | Flatness automatic detection box for square workpiece |
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- 2020-11-03 CN CN202011211186.7A patent/CN112305410A/en not_active Withdrawn
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105510805A (en) * | 2016-01-08 | 2016-04-20 | 上海恒浥智能科技股份有限公司 | Chip automatic detection device |
| CN108490342A (en) * | 2018-04-20 | 2018-09-04 | 福州市星旺成信息科技有限公司 | A kind of arrangement for testing integrated circuit |
| CN110261760A (en) * | 2019-07-05 | 2019-09-20 | 杨桂英 | A kind of chip test system applied to integrated circuit |
| CN111208376A (en) * | 2020-03-09 | 2020-05-29 | 青田林心半导体科技有限公司 | Detector for detecting performance of semiconductors in various forms |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113759083A (en) * | 2021-11-09 | 2021-12-07 | 苏州星帆华镭光电科技有限公司 | Chip surface curve detection device |
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