CN111208376A - Detector for detecting performance of semiconductors in various forms - Google Patents

Detector for detecting performance of semiconductors in various forms Download PDF

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Publication number
CN111208376A
CN111208376A CN202010159235.0A CN202010159235A CN111208376A CN 111208376 A CN111208376 A CN 111208376A CN 202010159235 A CN202010159235 A CN 202010159235A CN 111208376 A CN111208376 A CN 111208376A
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cavity
wall
detection
chamber
telescopic
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CN202010159235.0A
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CN111208376B (en
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不公告发明人
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Wuhan Shenglida Technology Co ltd
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Qingtian Linxin Semiconductor Technology Co Ltd
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Priority to CN202010159235.0A priority Critical patent/CN111208376B/en
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Priority to JP2020106474A priority patent/JP2021139871A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention discloses a detector for detecting the performance of semiconductors in various forms, which comprises a machine body, wherein a detection cavity is arranged in the machine body, electrifying plates are symmetrically arranged in the front and back of the detection cavity, an opening and closing port with a rightward opening is communicated with the right side of the detection cavity, a closing plate is arranged in the opening and closing port and can slide left and right, a supporting plate fixedly connected to the lower end of the left end face of the closing plate is connected to the lower wall of the detection cavity in a left and right sliding manner, the supporting plate can be driven by moving the closing plate right to move the right and open the opening and closing port, the performance of a solid, gas or liquid semiconductor can be detected in the same sealed space, the gas or liquid semiconductor can be sucked into the detection cavity through a suction device, the sealing of the detection cavity can be controlled during detection, and the control block can control the opening and closing of an upper valve plate and a lower valve plate while realizing the, the operation is more convenient.

Description

Detector for detecting performance of semiconductors in various forms
Technical Field
The invention relates to the technical field of semiconductor detection, in particular to a detector for detecting the performance of semiconductors in various forms.
Background
The semiconductor refers to a material with conductivity between a conductor and an insulator at normal temperature, and has various forms, such as solid, liquid, gas, plasma and the like, when a semiconductor element is produced by using the semiconductor material, the performance of the material needs to be tested, and then the condition or whether the detection of the semiconductor element made of the material can meet the use requirement is known, but because the semiconductor has various forms, the instruments used for detecting the semiconductors in different forms are different, and the use range is smaller. The present invention sets forth a device that solves the above problems.
Disclosure of Invention
The technical problem is as follows:
the existing semiconductor material performance detection device aims at semiconductor materials with different forms, and the used instruments are different, so that the application range is smaller.
In order to solve the problems, the embodiment designs a detector for detecting the performance of various semiconductors, and the detector for detecting the performance of various semiconductors comprises a machine body, wherein a detection cavity is arranged in the machine body, a conducting plate is symmetrically arranged in the front and back of the detection cavity, the right side of the detection cavity is communicated with an opening and closing opening with a right opening, a closing plate is arranged in the opening and closing opening and can slide left and right, a supporting plate fixedly connected to the lower end of the left end face of the closing plate is connected to the lower wall of the detection cavity in a left and right sliding manner, the closing plate can be moved right to drive the supporting plate to move right and open the opening and closing opening, solid semiconductor materials can be placed on the supporting plate, the conducting plates are close to each other and can be in contact with the solid semiconductor materials, telescopic devices are symmetrically arranged on the front and back sides of the detection cavity, telescopic rods which are symmetrical front and back and forth and, the telescopic link can drive the circular telegram board is close to each other or keeps away from, it is equipped with the suction device to detect the chamber upside, be equipped with in the suction device and be located detect the suction chamber of chamber upside, can with gaseous state or liquid semiconductor pump to through the suction chamber detect the intracavity, the suction chamber with it moves about to be equipped with between the detection chamber last valve plate to detect the chamber downside is equipped with eduction gear, be equipped with in the eduction gear communicate in detect the chamber lower wall and the decurrent discharge passage of opening, it is equipped with down the valve plate to run through and can the horizontal slip about in the discharge passage left and right wall, run through about in the layer board be equipped with can with the conduction mouth of discharge passage intercommunication.
Preferably, a handle convenient for pushing and pulling by hand is fixedly arranged on the right end face of the closing plate.
The telescopic device comprises a telescopic cavity, wherein the telescopic cavity is symmetrically and communicated with the telescopic cavity, the telescopic cavity is arranged on the front wall and the rear wall of the detection cavity, the telescopic rod is arranged in the telescopic cavity in a sliding mode, the inner wall of one side of the detection cavity is connected with a telescopic screw rod in the telescopic rod in a rotating mode, the telescopic cavity is far away from one side of the detection cavity and is provided with a bevel gear cavity, one end of the telescopic screw rod, which is far away from a symmetry center, extends to a driven bevel gear fixedly arranged in the bevel gear cavity, and the left wall of the bevel gear cavity is rotatably connected with a.
The suction device comprises a pump shaft which is rotatably connected between the left wall and the right wall of the suction cavity, pump blades are fixedly arranged on the outer circular surface annular array of the pump shaft, a conveying pipeline is communicated between the lower wall of the suction cavity and the upper wall of the detection cavity, an upper valve cavity is arranged between the left wall and the right wall of the conveying pipeline in a penetrating and communicating mode, the left valve cavity and the right valve cavity are connected in the upper valve cavity in a sliding mode, an upper through hole which can be communicated with the conveying pipeline is arranged in the upper through hole in a penetrating mode, and an input port with an upward opening is arranged on the upper wall.
And a compression-resistant spring is fixedly connected between the right end and the right wall of the upper valve cavity.
Wherein, eduction gear is including the intercommunication and controlling and run through the lower valve pocket of discharge passage, lower valve plate side to side sliding connection in the lower valve pocket, run through from top to bottom in the lower valve plate be equipped with can with the lower opening of discharge passage intercommunication, lower valve plate right-hand member with fixed connection has down between the valve pocket right side wall and move to the left side of lower valve plate and push away the spring that provides power, the lower valve plate left end is equipped with the inclined plane towards the upper left.
Preferably, a control cavity located on the left side of the detection cavity and the suction cavity is arranged on the left side in the machine body, a switching block is connected in the control cavity in a vertical sliding manner, a power motor is fixedly arranged in the right end face of the switching block, a power straight gear is connected to the right end of the power motor in a power connection manner, a transmission straight gear capable of being meshed with the upper end of the power straight gear is fixedly arranged in the control cavity, an extension port is communicated between the lower wall of the control cavity and the left end of the upper wall of the lower valve cavity, a lower pressing block is fixedly arranged on the right end face of the switching block, the lower end of the lower pressing block can penetrate through the extension port and abut against the inclined face of the left end face of the lower valve plate, right push rods are symmetrically and fixedly arranged on the front and back of the left end face, the left end of the right push rod extends into the control, the left end of the right push rod is provided with an inclined plane facing to the left lower side and can be abutted against the upper end of the switching block.
Preferably, wall symmetry and intercommunication are equipped with and are located before the control chamber the left transmission chamber in bevel gear chamber, keep away from in the transmission chamber control chamber one side is rotated and is connected with fixed connection in the driven sprocket of drive bevel gear left end, the transmission intracavity is close to control chamber one side is rotated and is connected with drive sprocket, drive sprocket with around being equipped with the driving chain between the driven sprocket, the drive sprocket right-hand member is fixed be equipped with can the driven spur gear of power straight-tooth gear front and back end meshing.
Preferably, a control motor is fixedly arranged at the left end in the upper wall of the control cavity, and the lower end of the control motor is in power connection with a control screw rod which is in threaded connection with the left side in the switching block.
Preferably, the lower end surface of the machine body is fixedly provided with support legs at the front, rear, left and right ends.
The invention has the beneficial effects that: the invention can realize the detection of the performance of the solid, gas or liquid semiconductor in the same sealed space, can pump the gas semiconductor or the liquid semiconductor into the detection cavity through the pumping device, can control the sealing of the detection cavity during the detection, and can control the opening and closing of the upper valve plate and the lower valve plate while realizing the power switching of the power motor by the control block, thereby having simpler and more convenient operation, and avoiding the detection result being influenced by the unsealed detection cavity caused by the phenomenon of forgetting to close the valve.
Drawings
For ease of illustration, the invention is described in detail by the following specific examples and figures.
FIG. 1 is a schematic diagram of the overall structure of an apparatus for detecting the properties of semiconductors of various forms according to the present invention;
FIG. 2 is a schematic view of the structure in the direction "A-A" in FIG. 1;
FIG. 3 is a schematic view of the structure in the direction "B-B" in FIG. 1;
FIG. 4 is a schematic view of the structure in the direction "C-C" in FIG. 1.
Detailed Description
The invention will now be described in detail with reference to fig. 1-4, for ease of description, the orientations described below will now be defined as follows: the up, down, left, right, and front-back directions described below correspond to the up, down, left, right, and front-back directions in the projection relationship of fig. 1 itself.
The invention relates to a detector for detecting the performance of semiconductors in various forms, which is mainly applied to the performance detection of materials before the production of semiconductors, and the invention is further explained by combining the attached drawings of the invention:
the invention relates to a detector for detecting the performance of semiconductors in various forms, which comprises a machine body 11, wherein a detection cavity 12 is arranged in the machine body 11, electrifying plates 13 are symmetrically arranged in the detection cavity 12 in a front-back mode, an opening and closing opening 14 with a right opening is communicated with the right side of the detection cavity 12, a closing plate 15 is arranged in the opening and closing opening 14 in a left-right sliding mode, a supporting plate 16 fixedly connected to the lower end of the left end face of the closing plate 15 is connected to the lower wall of the detection cavity 12 in a left-right sliding mode, the closing plate 15 is moved rightwards to drive the supporting plate 16 to move rightwards and open the opening and closing opening 14, solid semiconductor materials can be placed on the supporting plate 16, the electrifying plates 13 are close to each other and can be contacted with the solid semiconductor materials, telescopic devices 101 are symmetrically arranged on the front side and the back side of the detection cavity 12, telescopic rods 17 which are symmetrical in a front-back mode and, the telescopic link 17 can drive the circular telegram board 13 is close to each other or keeps away from, it is equipped with suction device 102 to detect the chamber 12 upside, be equipped with in the suction device 102 and be located detect the suction chamber 18 of chamber 12 upside, through suction chamber 18 can with gaseous state or liquid semiconductor pump to detect in the chamber 12, suction chamber 18 with it can move about to be equipped with the last valve plate to detect between the chamber 12 detect the chamber 18 the detection chamber 12 downside is equipped with eduction gear 103, be equipped with in the eduction gear 103 communicate in detect the chamber 12 lower wall and the decurrent discharge passage 20 of opening, it is equipped with lower valve plate 21 to run through and can the horizontal slip about in the discharge passage 20 left and right wall, it can with the conduction port 22 of discharge passage 20 intercommunication to run through from top to bottom in the layer board 16.
Advantageously, a handle 23 for facilitating pushing and pulling by hand is fixedly arranged at the right end face of the closing plate 15.
According to an embodiment, the following detailed description is provided on the telescopic device 101, the telescopic device 101 includes a telescopic cavity 25 symmetrically and communicated with the front wall and the rear wall of the detection cavity 12, the telescopic rod 17 is slidably disposed in the telescopic cavity 25 in the front and rear directions, a telescopic screw 26 screwed into the telescopic rod 17 is rotatably connected to the inner wall of the telescopic cavity 25 on the side away from the detection cavity 12, a bevel gear cavity 27 is disposed on the side of the telescopic cavity 25 on the side away from the detection cavity 12, a driven bevel gear 28 is fixedly disposed in the bevel gear cavity 27 by extending one end of the telescopic screw 26 away from the center of symmetry, and a driving bevel gear 29 meshed with the driven bevel gear 28 is rotatably connected to the left wall of the bevel gear cavity 27.
According to the embodiment, the following detailed description is provided for the pumping device 102, where the pumping device 102 includes a pump shaft 30 rotatably connected between left and right walls of the pumping chamber 18, a pump blade 31 is fixedly disposed on an outer circumferential surface of the pump shaft 30 in an annular array, a delivery pipe 32 is disposed between a lower wall of the pumping chamber 18 and an upper wall of the detection chamber 12 in a communication manner, an upper valve chamber 33 is disposed between left and right walls of the delivery pipe 32 in a penetrating and communicating manner, the pump 19 is slidably connected in the upper valve chamber 33 in the left and right directions, an upper through hole 34 capable of communicating with the delivery pipe 32 is disposed in the pump 19 in an up and down penetrating manner, and an input port 35 with an upward opening is disposed in the upper wall.
Advantageously, a compression spring 36 is fixedly connected between the right end of the valve chamber 19 and the right wall of the upper valve chamber 33, and the compression spring 36 provides power for the left movement of the valve chamber 19.
According to an embodiment, the following detailed description will be given of the discharge device 103, where the discharge device 103 includes a lower valve chamber 37 communicating with and penetrating through the discharge passage 20 from left to right, the lower valve plate 21 is slidably connected in the lower valve chamber 37 from left to right, a lower through hole 38 capable of communicating with the discharge passage 20 is vertically penetrated in the lower valve plate 21, a left push spring 39 for providing power for the left movement of the lower valve plate 21 is fixedly connected between the right end of the lower valve plate 21 and the right wall of the lower valve chamber 37, and the left end of the lower valve plate 21 is provided with a slope facing the upper left.
Beneficially, a control cavity 40 located on the left side of the detection cavity 12 and the suction cavity 18 is arranged on the left side in the machine body 11, a switching block 41 is connected in the control cavity 40 in an up-down sliding manner, a power motor 42 is fixedly arranged in the right end face of the switching block 41, a power straight gear 43 is connected to the right end of the power motor 42 in a power manner, a transmission straight gear 44 capable of being meshed with the upper end of the power straight gear 43 is fixedly arranged in the control cavity 40 at the left end, an extension port 45 is communicated between the lower wall of the control cavity 40 and the left end of the upper wall of the lower valve cavity 37, a lower pressing block 46 is fixedly arranged at the right end face of the switching block 41, the lower end of the lower pressing block 46 can penetrate through the extension port 45 and abut against the inclined plane of the left end face of the lower valve plate 21, right push rods 47 are symmetrically and fixedly arranged in the front and back of the left end face of the control cavity 19, the left end of the right push rod 47 extends, the left end of the right push rod 47 is provided with a slope facing to the left lower side and can be abutted against the upper end of the switching block 41.
Beneficially, the front wall and the rear wall of the control cavity 40 are symmetrically and communicated with a transmission cavity 51 positioned on the left side of the bevel gear cavity 27, one side of the transmission cavity 51, far away from the control cavity 40, is rotatably connected with a driven sprocket 53 fixedly connected to the left end of the driving bevel gear 29, the transmission cavity 51 is internally close to one side of the control cavity 40, is rotatably connected with a driving sprocket 54, a driving chain 55 is wound between the driving sprocket 54 and the driven sprocket 53, and the right end of the driving sprocket 54 is fixedly provided with a driven spur gear 56 capable of being meshed with the front end and the rear end of the power spur gear 43.
Advantageously, a control motor 48 is fixedly arranged at the left end in the upper wall of the control cavity 40, and a control screw 49 which is screwed at the left side in the switching block 41 is dynamically connected to the lower end of the control motor 48.
Advantageously, the lower end surface of the machine body 11 is fixedly provided with support legs 50 at the front, rear, left and right ends.
The following will describe in detail the use steps of an apparatus for detecting the properties of semiconductors with various forms with reference to fig. 1 to 4:
in an initial state, the switching block 41 is positioned on the lower side of the right push rod 47, the lower pressing block 46 is positioned on the upper side of the lower valve plate 21 and is not abutted, the power straight gear 43 is meshed with the driven straight gear 56, the lower valve plate 21 is positioned at a left limit position under the elasticity of the left push spring 39, the lower through hole 38 is positioned at the left side of the discharge channel 20 and is not communicated, the lower through hole 19 is positioned at a left limit position under the elasticity of the pressure-resistant spring 36, the upper through hole 34 is positioned at the left side of the conveying pipeline 32 and is not communicated, the telescopic rod 17 is retracted in the telescopic cavity 25, and the electrifying plate.
When the solid semiconductor is detected, the handle 23 is pulled by hand right, the closing plate 15 is driven to move right, the supporting plate 16 is driven to move right, the opening and closing opening 14 is opened, the solid semiconductor to be detected is placed on the supporting plate 16, the closing plate 15 is moved left again, the opening and closing opening 14 is sealed, the power motor 42 is started and drives the power straight gear 43 to rotate, the driven spur gear 56 is driven to rotate and the driving sprocket 54 is driven to rotate through gear meshing, the driven sprocket 53 is driven to rotate and the driving bevel gear 29 is driven to rotate through the transmission chain 55, the driven bevel gear 28 is driven to rotate by the gear engagement and the telescopic screw 26 is driven to rotate, the telescopic rod 17 is driven to move towards the direction close to the detection cavity 12 by the threaded connection, further driving the energizing plates 13 to approach each other and abut against the front and rear ends of the solid semiconductor, and energizing the energizing plates 13 at the moment, thereby detecting the performance of the solid semiconductor;
when detecting a liquid or gaseous semiconductor, in an initial state, the control motor 48 is started and drives the control screw 49 to rotate, the switching block 41 is driven to ascend to an upper limit position through threaded connection, at the moment, the switching block 41 abuts against an inclined plane at the left end of the right push rod 47, the right push rod 47 is further pushed to move right and drive the right push rod 19 to move right, the upper port 34 is communicated with the conveying pipeline 32 and compresses the compression-resistant spring 36, the power straight gear 43 ascends to be disengaged with the driven straight gear 56 and is engaged with the transmission straight gear 44, the power motor 42 is started, the power straight gear 43 drives the transmission straight gear 44 to rotate through gear engagement and drives the pump shaft 30 to rotate, the gaseous semiconductor or the liquid semiconductor input from the input port 35 is pumped into the cavity 18 through the pump blade 31, the gaseous semiconductor or the liquid semiconductor is input into the detection cavity 12 through the conveying pipeline 32 and the upper port 34, the switching block 41, 19 move left under resistance to compression spring 36 elasticity and reset, at this moment to circular telegram board 13 circular telegram, can detect gaseous state semiconductor or liquid semiconductor's performance, after the detection, control motor 48 starts and control switching block 41 descends, and then drives briquetting 46 descend to the lower extreme and offset with lower valve plate 21 left end, gets into and promotes lower valve plate 21 and move right and compress left push spring 39, lower through-hole 38 and discharge passage 20 intercommunication this moment, gaseous state semiconductor or liquid semiconductor in the detection chamber 12 are through conduction opening 22, discharge passage 20 and lower through-hole 38 discharge recovery.
The invention has the beneficial effects that: the invention can realize the detection of the performance of the solid, gas or liquid semiconductor in the same sealed space, can pump the gas semiconductor or the liquid semiconductor into the detection cavity through the pumping device, can control the sealing of the detection cavity during the detection, and can control the opening and closing of the upper valve plate and the lower valve plate while realizing the power switching of the power motor by the control block, thereby having simpler and more convenient operation, and avoiding the detection result being influenced by the unsealed detection cavity caused by the phenomenon of forgetting to close the valve.
In the above manner, a person skilled in the art can make various changes depending on the operation mode within the scope of the present invention.

Claims (10)

1. A detector for detecting the performance of semiconductors in various forms comprises a machine body, and is characterized in that: the detection device is characterized in that a detection cavity is arranged in the machine body, electrifying plates are symmetrically arranged in the front and back of the detection cavity, an opening and closing port with a right opening is communicated with the right side of the detection cavity, a closing plate is arranged in the opening and closing port and can slide left and right, a supporting plate fixedly connected to the lower end of the left end face of the closing plate is connected to the lower wall of the detection cavity in a sliding manner, the closing plate can be moved right to drive the supporting plate to move right to open the opening and closing port, solid semiconductor materials can be placed on the supporting plate, the electrifying plates are close to each other and can be contacted with the solid semiconductor materials, telescopic devices are symmetrically arranged on the front side and the back side of the detection cavity, telescopic rods which are symmetrical in front and back and can move back and forth and can be fixedly connected to one side;
the utility model discloses a semiconductor device, including detection chamber, pumping device, exhaust passage, valve plate, detection chamber upside, be equipped with in the pumping device be located the pumping chamber of detection chamber upside, through the pumping chamber can with gaseous state or liquid semiconductor pump extremely detect the intracavity, the pumping chamber with be equipped with the last valve plate that can remove about being equipped with between the detection chamber downside is equipped with eduction gear, be equipped with in the eduction gear communicate in detect chamber lower wall and the decurrent discharge passage of opening, run through about in the discharge passage left and right wall and can the horizontal slip be equipped with down the valve plate, run through from top to bottom in the layer board be equipped with can with the conduction mouth of discharge passage intercommunication.
2. The apparatus according to claim 1, wherein the apparatus comprises: and a handle convenient for pushing and pulling by hand is fixedly arranged on the right end face of the closing plate.
3. The apparatus according to claim 1, wherein the apparatus comprises: the telescopic device comprises a telescopic cavity which is symmetrically and communicated with the front wall and the rear wall of the detection cavity, the telescopic rod is arranged in the telescopic cavity in a sliding mode, the inner wall of the telescopic cavity is far away from one side of the detection cavity and is rotatably connected with a telescopic screw rod in the telescopic rod, the telescopic cavity is far away from one side of the detection cavity and is provided with a bevel gear cavity, one end of the telescopic screw rod, which is far away from a symmetry center, extends to the bevel gear cavity, a driven bevel gear is fixedly arranged in the bevel gear cavity, and the left wall of the bevel gear cavity is rotatably connected with a driving.
4. The apparatus according to claim 3, wherein the apparatus comprises: the suction device comprises a pump shaft which is rotatably connected between the left wall and the right wall of the suction cavity, pump blades are fixedly arranged on the outer circular surface annular array of the pump shaft, a conveying pipeline is communicated between the lower wall of the suction cavity and the upper wall of the detection cavity, an upper valve cavity is arranged between the left wall and the right wall of the conveying pipeline in a penetrating and communicating mode, the left valve cavity and the right valve cavity are connected in a sliding mode, an upper through hole which can be communicated with the conveying pipeline is arranged in the upper valve cavity in a penetrating mode, and an input port with an upward opening is arranged on the upper wall of the suction.
5. The apparatus according to claim 4, wherein the apparatus comprises: and a compression-resistant spring is fixedly connected between the right end and the right wall of the upper valve cavity.
6. The apparatus according to claim 4, wherein the apparatus comprises: the discharging device comprises a lower valve cavity communicated with and penetrating through the left and right of the discharging passage, the lower valve plate is connected with the lower valve cavity in a sliding mode in the left and right mode, a lower opening capable of being communicated with the discharging passage is arranged in the lower valve plate in a penetrating mode from top to bottom, the right end of the lower valve plate is fixedly connected with the right wall of the lower valve cavity, a left push spring providing power for leftward movement of the lower valve plate is arranged, and the left end of the lower valve plate is provided with an inclined plane facing to the upper left.
7. The apparatus according to claim 6, wherein the apparatus comprises: the left side in the machine body is provided with a control cavity positioned at the left side of the detection cavity and the suction cavity, a switching block is connected in the control cavity in a vertical sliding manner, a power motor is fixedly arranged in the right end face of the switching block, the right end of the power motor is connected with a power straight gear in a power manner, the left end of a pump shaft extends into the control cavity and is fixedly provided with a transmission straight gear capable of being meshed with the upper end of the power straight gear, an extension port is communicated between the lower wall of the control cavity and the left end of the upper wall of the lower valve cavity, a lower pressing block is fixedly arranged at the right end of the lower end face of the switching block, the lower end of the lower pressing block can penetrate through the extension port and abut against the inclined plane of the left end face of the lower valve plate, right push rods are symmetrically and fixedly arranged in the front and back of the left, the left end of the right push rod is provided with an inclined plane facing to the left lower side and can be abutted against the upper end of the switching block.
8. The apparatus according to claim 7, wherein the apparatus comprises: the back wall symmetry just communicates to be equipped with before the control chamber and is located the left transmission chamber in bevel gear chamber, keep away from in the transmission chamber control chamber one side is rotated and is connected with fixed connection in the driven sprocket of drive bevel gear left end, the transmission intracavity is close to control chamber one side is rotated and is connected with drive sprocket, drive sprocket with around being equipped with the driving chain between the driven sprocket, the drive sprocket right-hand member is fixed be equipped with can the driven straight-teeth gear of power straight-teeth gear front and back end meshing.
9. The apparatus according to claim 6, wherein the apparatus comprises: the left end in the control cavity upper wall is fixedly provided with a control motor, and the lower end of the control motor is in power connection with a control screw rod which is in threaded connection with the left side in the switching block.
10. The apparatus according to claim 1, wherein the apparatus comprises: and supporting legs are fixedly arranged at the front end, the rear end, the left end and the right end of the lower end surface of the machine body.
CN202010159235.0A 2020-03-09 2020-03-09 Detector for detecting performance of semiconductors in various forms Active CN111208376B (en)

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CN202010159235.0A CN111208376B (en) 2020-03-09 2020-03-09 Detector for detecting performance of semiconductors in various forms
JP2020106474A JP2021139871A (en) 2020-03-09 2020-06-19 Tester for testing performance of a variety of forms of semiconductors

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