CN112302915B

CN112302915B - Bellows pump with built-in damper

Info

Publication number: CN112302915B
Application number: CN202011163913.7A
Authority: CN
Inventors: 胡亮; 高志坚; 阮晓东; 付新; 苏芮
Original assignee: Zhejiang University ZJU
Current assignee: Zhejiang University ZJU
Priority date: 2020-10-27
Filing date: 2020-10-27
Publication date: 2021-08-31
Anticipated expiration: 2040-10-27
Also published as: CN112302915A

Abstract

The invention relates to a bellows pump with a built-in damper. The pulsation dampers are arranged on the two sides of the pump head, so that impact generated in the process of pumping fluid by the bellows pump is absorbed, and flow pulsation of an outlet is reduced. The pulsation damper utilizes the dead space in the pump cavity, is beneficial to the compactness of the pump body, can improve the update rate of fluid in the pump cavity and is beneficial to reducing the pollution probability of the pump cavity.

Description

Bellows pump with built-in damper

Technical Field

The invention relates to the technical field of pumps, in particular to a bellows pump with a built-in damper.

Background

In the fields of semiconductor manufacturing, high-purity chemical industry, biomedicine, and the like, there are many cases where it is necessary to use a high-purity fluid. As a fluid power source, the bellows pump has the characteristic of less pollution, and is widely applied to high-purity fluid systems. The basic principle of a bellows pump is to create a periodic fluid driving force by either drawing fluid from a conduit into the pump chamber or forcing fluid from the pump chamber into a conduit by changing the volume of a flexible pump chamber. Because the power generation mode comes from the deformation of the pump cavity, no sliding friction is generated, so that no pollution particles are generated due to friction, no pollutants migrate into the pump cavity from the sliding gap due to the existence of the sliding kinematic pair, the source of the pollutants is obviously reduced, and the high-purity fluid component is particularly suitable for high-purity fluid systems.

The most basic bellows pump has a bellows disposed on the pump head, the bellows forming a pump chamber therein; the pump head is provided with a fluid inflow channel and a fluid outflow channel, and the fluid inflow channel and the fluid outflow channel are respectively communicated with the pump cavity through one-way valves; when the bellows is stretched or compressed, fluid is drawn into and expelled from the pump chamber, respectively, creating an outwardly pumped fluid flow.

A bellows pumps fluid outward only when compressed and not when extended; in order to improve the efficiency of pumping fluid, a scheme of combining two corrugated pipes can be adopted, such as the double-connection reciprocating pump disclosed in the chinese patent with application number 201810112127.0, the corrugated pipes are arranged in the working chamber in a manner that the opening sides of the corrugated pipes are fixedly arranged at the two ends of the pump head, and a pump chamber is formed between the corrugated pipes and the pump head; the pump shaft is used for rigidly connecting movable separating parts such as corrugated pipes and the like at two ends through a connecting rod. Compressed air is alternately introduced into the pair of working chambers, so that the pair of corrugated pipes are alternately compressed and extended, and the purpose of pumping fluid back and forth is achieved. The bellows connections at both ends of such reciprocating pumps are rigid, so that their process switching will be performed synchronously, i.e. when the bellows at one end enters the compression process, the bellows at the other end necessarily enters the tension process. When the bellows compression process at one end reaches the maximum and compression is stopped, the bellows extension process at the other end also reaches the maximum and extension is stopped, and at this time, the movement of the entire pump is stopped, and as a result, pulsation corresponding to the number of strokes is generated in the discharge flow rate. Such pulsations are detrimental to the regulation and control of parameters such as fluid flow rate and can lead to malfunctions, for example, in some semiconductor applications, the pulsations of the fluid can cause particles that become lodged in the filters to be pulsed and squeezed downstream, or can cause the wafer cleaning showerhead to oscillate and affect cleaning efficiency. Therefore, the suppression of pulsation of the reciprocating pump caused by the synchronous change of the volumes of the pump chambers at the two ends becomes an important problem to be solved when the reciprocating pump is applied to the field of high-precision control.

The solution provided in the invention is that the flexible telescopic parts are adopted to flexibly link the movements of the outer end surfaces of the pair of corrugated pipes together, so that the movements of the corrugated pipes at two ends can be respectively controlled; and maintaining at least one corrugated pipe in a continuous compression process in the process of continuously pumping fluid by the flexible linkage reciprocating pump. The pump body is provided with the spring, so that the volume of the pump body is increased, and the processing and assembling requirements are met; the supply timing of the compressed air has special requirements, and the requirements for the supply and control of the compressed air are complex.

In addition, a damper can be arranged on a fluid output flow channel outside the corrugated pipe to reduce flow pulsation, and the damper is not integrated with the pump body in the scheme, so that the volume of the pump is increased, the possibility of fluid pollution is increased, and the matching with the pump body is not facilitated.

Disclosure of Invention

The present invention is directed to a bellows pump with a built-in damper, which overcomes the above-mentioned shortcomings of the prior art. The damper is arranged in the invalid space in the pump cavity, so that the outlet pulsation of the bellows pump is reduced under the conditions of not increasing the whole volume of the bellows pump and not reducing the outlet flow of the bellows pump. The damper is arranged on the bypass of the fluid outflow channel and has smaller resistance than the solution connected in series to the fluid outflow channel. And the arrangement of the pulsation damper reduces the dead space in the pump cavity, improves the renewal rate of the fluid to be transferred in the pump cavity, and can reduce the probability of pollution such as microorganism retention and breeding.

The invention comprises a pump head, a pump shell, a corrugated pipe, a pulsation damper, a pump shaft, a proximity switch, a liquid discharge valve, a liquid suction valve and a connecting rod. The pump head is arranged in the center of the bellows pump, and the left pump shell and the right pump shell are respectively and fixedly arranged on two sides of the pump head in a mode that the opening sides are opposite; a left working cavity and a right working cavity are respectively formed between the left pump shell, the right pump shell and the pump head; the left corrugated pipe and the right corrugated pipe are respectively and fixedly arranged in the left working cavity and the right working cavity, and a left pump cavity and a right pump cavity are formed among the left corrugated pipe, the right corrugated pipe and the pump head. A liquid suction flow channel and a liquid discharge flow channel for transferring fluid are arranged in the pump head, and the middle parts of the liquid suction flow channel and the liquid discharge flow channel are separated; the inlet of the liquid suction flow passage is used as a liquid suction port, and the outlet of the liquid discharge flow passage is used as a liquid discharge port; one end of the liquid suction flow passage is provided with a left liquid suction valve and a right liquid suction valve, and one end of the liquid discharge flow passage is provided with a left liquid discharge valve and a right liquid discharge valve. The left and right liquid suction valve inlets are connected with the top of the liquid suction flow channel, and the left and right liquid suction valve outlets are respectively arranged in the left pump cavity and the right pump cavity; the inlet of the left and right drain valves is respectively arranged in the left pump cavity and the right pump cavity, and the outlet of the left and right drain valves is connected with the bottom of the drain runner; the bottom of the left pump shell and the bottom of the right pump shell are provided with a left working fluid inlet and a right working fluid inlet;

a left pulsation damper and a right pulsation damper are fixedly arranged on two sides of the pump head, the left pulsation damper and the right pulsation damper are communicated with the liquid drainage flow channel, the left pulsation damper is fixedly arranged in the left pump cavity, and the right pulsation damper is fixedly arranged in the right pump cavity; the axial length of the left and right pulsation dampers in the left and right pump chambers is equal to that of the liquid suction valve or the liquid discharge valve;

the left and right pulsation dampers comprise two parts, namely a shell and a diaphragm, the shell is fixedly arranged on the pump head in a mode that the opening side faces the pump head, a gas cavity is formed between the shell and the pump head, the gas cavity is connected with a gas flow channel arranged on the pump head, and the gas flow channel is connected with an external compressed gas source; the diaphragm is arranged in the pulsation damper shell, a liquid cavity is formed between the diaphragm and the pump head, and the liquid cavity is connected with the bottom of the liquid discharge flow passage of the pump head.

Further, the diaphragm is a cylindrical bellows elastically stretchable in the axial direction and having a bottom on one side, and is fixedly provided to the pump head with an opening side facing the pump head to form a liquid chamber with the pump head.

Furthermore, the diaphragm is a flat elastic diaphragm which is transversely and fixedly arranged inside the pulsation damper shell and divides the inside of the pulsation damper shell into two cavities, a gas cavity is formed between the pulsation damper shell and the pulsation damper shell, and a liquid cavity is formed between the pulsation damper shell and the pump head.

Furthermore, the left and right pulsation dampers are respectively arranged in the left and right pump chambers in a way that the openings are opposite, and the liquid chambers of the left and right pulsation dampers are connected through the flow passage in the pump head and then are connected into the liquid drainage flow passage as a bypass.

Further, the liquid chambers of one or more pulsation dampers are individually connected as a bypass into the liquid discharge flow passage.

Furthermore, a pulsation damper is arranged in the pump cavity on the opposite side of each drain valve in a mode that an opening faces the drain valve, and the drain valve is communicated with the corresponding pulsation damper through a straight flow passage.

Further, the material of the diaphragm is polytetrafluoroethylene or fusible polytetrafluoroethylene.

Further, the material of the corrugated pipe is polytetrafluoroethylene or fusible polytetrafluoroethylene.

Further, the part of the pump head contacting the liquid to be transferred uses high-cleanliness stainless steel or polytetrafluoroethylene or meltable polytetrafluoroethylene material.

Further, the pressure in the gas cavity of the pulsation damper is set to be smaller than the pressure of the liquid outlet when the output flow of the bellows pump is free of pulsation.

Drawings

Fig. 1 is a schematic overall structure diagram of a first embodiment of the present invention;

FIG. 2 is a schematic view of a pulsation damper;

FIG. 3 is a schematic view of another pulsation damper;

FIG. 4 is a schematic layout of a suction valve and a discharge valve in a conventional bellows;

FIG. 5 is a schematic overall structure diagram of a second embodiment of the present invention;

FIG. 6 is a schematic layout view of a pipette and a drain valve according to a third embodiment of the present invention;

FIG. 7 is a schematic layout view of a pipette and a drain valve according to a fourth embodiment of the present invention.

Detailed Description

The following description of the embodiments of the present invention is made with reference to the accompanying drawings.

Example one

As shown in fig. 1, a damper-incorporated bellows pump (hereinafter, simply referred to as a "bellows pump") includes a pump head 1, a pump housing 2a (2b), a bellows 3a (3b), a pulsation damper 14a (14b), a pump shaft 7a (7b), a proximity switch 13a (13b), a liquid discharge valve 8a (8b), a liquid suction valve 9a (9b), and a connecting rod 18.

The pump head 1 is arranged in the center of the bellows pump, the left pump shell 2a and the right pump shell 2b are respectively and fixedly arranged on two sides of the pump head 1 in a mode that the opening sides are opposite, and the left pump shell 2a and the right pump shell 2b are cylindrical with one side being provided with a bottom; a left working cavity 6a and a right working cavity 6b are respectively formed between the left pump shell 2a and the pump head 1 and between the right pump shell 2b and the pump head 1; the left bellows 3a and the right bellows 3b are respectively and fixedly arranged in the left working chamber 6a and the right working chamber 6b, and a left pump chamber 5a and a right pump chamber 5b are formed between the left bellows 3a and the right bellows 3b and the pump head 1. The opening sides of the left and

right pulsation dampers

14a and 14b are fixedly provided on both sides of the pump head, the left pulsation damper 14a is fixedly provided in the left pump chamber 5a, and the right pulsation damper 14b is fixedly provided in the right pump chamber 5 b.

A liquid suction flow channel and a liquid discharge flow channel for transferring fluid are arranged on the central axis of the pump head 1, and the liquid suction flow channel and the liquid discharge flow channel are separated in the middle; the inlet of the liquid suction flow path serves as a liquid suction port 16, and the outlet of the liquid discharge flow path serves as a liquid discharge port 17. The top of the imbibition flow channel is provided with a left imbibition valve 9a and a right imbibition valve 9b, and the bottom of the drainage flow channel is provided with a left drainage valve 8a and a right drainage valve 8 b. The inlet of the left and right liquid suction valves is connected with the top of the liquid suction flow channel, and the outlet of the left and right liquid suction valves is respectively arranged in the left pump cavity 5a and the right pump cavity 5 b; the inlets of the left and right liquid discharge valves are respectively arranged in the left pump cavity 5a and the right pump cavity 5b, and the outlets of the left and right liquid discharge valves are connected with the bottom of the liquid discharge flow passage.

The bottom of the left and right pump casings is provided with left and right working fluid inlets, and in the embodiment, gas is used as the working fluid of the working fluid source. A reversing valve 20 is arranged between the left working fluid inlet and the right working fluid inlet at the bottom of the left pump shell and the right pump shell, and the reversing valve 20 is controlled to switch the flow of the compressed gas between the left working cavity 6a and the right working cavity 6b according to requirements.

As shown in fig. 2, the pulsation damper includes two parts, a housing 30 and a diaphragm 40, the housing 30 is a cylinder with a bottom on one side, is fixedly disposed on the pump head 1 with an open side facing the pump head 1, and forms a gas chamber 31 with the pump head 1, the gas chamber 31 is connected to a gas flow passage 10 provided on the pump head 1, and the gas flow passage 10 is connected to an external compressed gas source; the diaphragm 40 is a cylindrical bellows having a bottom on one side elastically stretchable in the axial direction, is fixed to the pump head 1 with the open side facing the pump head 1, and forms the liquid chamber 32 with the pump head 1. The liquid chamber 32 is connected to the bottom of the liquid discharge channel of the pump head 1.

As shown in fig. 3, the diaphragm of the pulsation damper may be a flat elastic diaphragm 41 which is laterally fixedly disposed inside the pulsation damper housing 30 and divides the inside thereof into two chambers, wherein a gas chamber 31 is formed with the housing 30 and a liquid chamber 32 is formed with the pump head 1. The flat-film type pulsation damper shown in fig. 3 is easier to manufacture and seal than the bellows type pulsation damper shown in fig. 2, but is less susceptible to deformation and has a slightly poor flow pulsation suppression effect.

The working principle is as follows: when the compressed air flows to the left working cavity, the pressure in the left working cavity rises, the pressure acts on the left pump cavity to enable the pressure in the left pump cavity to rise, the left liquid suction valve is closed, the left liquid discharge valve is opened, and the liquid to be transferred is discharged from the left pump cavity through the left liquid discharge valve from the liquid discharge port. On the other hand, the left corrugated pipe and the right corrugated pipe are linked together by the upper connecting rod and the lower connecting rod, so that the right corrugated pipe is extended, the pressure in the right pump cavity is reduced, the right liquid suction valve is opened, the right liquid discharge valve is closed, and the liquid to be transferred is guided into the right pump cavity from the liquid suction port through the liquid suction valve. As mentioned above, the flow direction of the compressed air is switched between the left working chamber and the right working chamber by the reversing valve, so that the left corrugated pipe and the right corrugated pipe are repeatedly and alternately stretched, and continuous liquid suction and discharge actions of the left pump chamber and the right pump chamber are realized. It should be noted that filling the working chamber with a flow of compressed air is only one way to drive the bellows to telescope, and filling the working chamber with a flow of liquid, or using a push-rod type actuation structure driven by an external source of action may also drive the bellows to telescope.

According to the structure of the pulsation damper, when the flow rate at the liquid discharge flow passage is increased, the pressure at the liquid discharge flow passage is increased, the excessive flow rate can be stored in the liquid cavity of the pulsation damper, and the liquid pressure in the liquid cavity can be kept at a set value due to the compressed air filled in the gas cavity; when the flow at the liquid discharge flow passage is reduced, the pressure at the liquid discharge flow passage is reduced, and the liquid which is stored in the liquid cavity of the pulsation damper and reaches the set pressure value is supplemented to the liquid discharge port, so that the function of reducing the flow pulsation of the outlet is finally realized.

The damping effect of the pulsation damper on the output flow pulsation is adjusted by controlling the pressure of the compressed air in the gas chamber 31. It is conventional to set the pressure of the compressed air in the gas chamber 31 equal to the pressure of the liquid to be transferred in the liquid chamber 32 (i.e. the pressure at the discharge), but an alternative is to set the pressure in the gas chamber 31 less than the pressure in the liquid chamber 32, which may further enhance the flow pulsation damping effect of the pulsation damper. This is because the output flow pulsation that affects the output flow greatly in the bellows pump is mainly the case where the output flow is drastically reduced or even reduced to zero. If the pressure in the gas chamber 31 is lower than the pressure in the liquid chamber 32, when the outlet flow rate is not pulsating, the pressure in the liquid chamber 32 is higher than the pressure in the gas chamber 31, the diaphragm 41 of the pulsation damper is pressed toward the gas chamber 31, and the liquid chamber 32 is filled with more liquid to be transferred, so that when the output flow rate is sharply reduced, the liquid chamber 32 can provide more liquid to be transferred to compensate for the reduction of the output flow rate. The degree to which the pressure in the gas chamber 31 is less than the pressure in the liquid chamber 32 may depend on the discharge liquid pressure, discharge liquid flow rate pulsation, and elastic rigidity of the pulsation damper diaphragm 41. The smaller the pressure of the gas chamber 31 is relative to the pressure of the liquid chamber 32, the stronger the pulsation damper has the capability of stabilizing sudden flow reduction pulsation; however, the greater the pressure difference between both sides of the diaphragm 41, the greater the elastic deformation of the diaphragm 41, and the longer the life of the diaphragm 41. For example, in one embodiment, where the discharge pressure is set to 1bar and the maximum differential pressure against which the diaphragm 41 resists within the design amount of deformation is 0.3bar, the pressure in the gas chamber 31 can be made 0.8 bar.

As shown in fig. 4, the conventional bellows 3 is cylindrical, and the conventional drain valve 8 and the conventional suction valve 9 are also cylindrical, so that the end face of the bellows 3 cannot be covered by the drain valve 8 and the suction valve 9, and a dead space is created as shown by the hatched area in fig. 4. During the stroke in which bellows 3 is stretched and compressed, the dead space cannot take part in the volume change and does not take part in pumping the transfer fluid. As shown in fig. 1, the present invention provides a pulsation damper 14 in the dead space, which is advantageous in improving the performance of the bellows pump while controlling the volume thereof.

In order to ensure that the bellows pump is used in applications requiring high cleanliness in semiconductor manufacturing, the material in contact with the fluid to be transferred in the bellows pump should be less likely to generate contaminants such as particles, for example, the metal material is high-cleanliness stainless steel, and the non-metal material is Polytetrafluoroethylene (PTFE) or soluble Polytetrafluoroethylene (PFA). For example, in the present invention, PTFE or PFA may be used as the elastic member such as the bellows and the diaphragm of the pulsation damper, and stainless steel or plastic such as PTFE may be used as the rigid member such as the pump head.

Example two

In the first embodiment, the pulsation damper is a pair of left and right fixed in a pair of left and right pump chambers. As shown in fig. 5, in the present embodiment, the pulsation damper does not necessarily need to be a pair of left and right, and may be fixedly disposed only in the left pump chamber or only in the right pump chamber.

As described above, according to the bellows pump with a built-in pulsation damper according to the present invention, since the pulsation damper is installed in the pump chamber, the space inside the pump chamber is fully utilized, and the pulsation of the outlet flow rate is reduced by compensating the flow rate fluctuation at the discharge port by the pulsation damper without changing the overall size of the conventional bellows pump and without reducing the flow rate at the outlet of the bellows pump. And the arrangement of the pulsation damper reduces the dead space in the pump cavity, improves the renewal rate of the fluid to be transferred in the pump cavity, and can reduce the probability of pollution such as microorganism retention and breeding.

EXAMPLE III

The third embodiment and the fourth embodiment illustrate two kinds of layouts of the pulsation damper 14.

In the first embodiment, one pulsation damper 14 is provided in each of the left and right pump chambers 5 in the bellows pump, and the liquid chambers 32 of the two pulsation dampers 14 are connected by a flow path in the pump head 1 and then bypassed to the liquid discharge flow path.

As shown in fig. 6, in the third embodiment, the

discharge valves

8a and 8b, the

pipette valves

9a and 9b, and the discharge flow path and the pipette flow path are arranged in a conventional manner, that is, the pipette fluid is distributed to the left pipette valve 9a and the right pipette valve 9b through the pipette flow path, and the fluid from the left discharge valve 8a and the right discharge valve 8b is collected in the discharge flow path and discharged.

The number of the

pulsation dampers

14a and 14b may be arbitrarily set near the drain valve 8 and the suction valve 9 and inside the bellows 3, and each pulsation damper 14 communicates with the drain flow passage through the flow passage. Thus, each pulsation damper 14 serves as a bypass of the liquid discharge flow path. Compared with the pulsation damper layout of the first embodiment, the pulsation damper 14 in the second embodiment has a closer access position to the drain valve 8 in the flow path, and a better flow pulsation damping effect is achieved; the pulsation dampers 14 are connected in parallel to the flow path, and the influence of coupling between them is small.

Example four

As shown in fig. 7, in the fourth embodiment, the arrangement of the pipette valve 9 and the pipette flow path is not changed.

Each of the liquid discharge valves 8 communicates with the pulsation damper 14 on the opposite side and is symmetrically arranged with respect to the pump head, for example, the left liquid discharge valve 8a communicates with the right pulsation damper 14b and is symmetrically arranged, while the right liquid discharge valve 8b communicates with the left pulsation damper 14a and is symmetrically arranged; the intermediate flow path that connects the drain valve 8 and the right pulsation damper 14 is made substantially straight; the two intermediate flow passages are communicated with the liquid discharge flow passage.

In this arrangement, the pulsation damper 14 can still be understood as a bypass of the discharge flow path, but the flow pulsation from the discharge valve 8 can act more directly on the pulsation damper 14, and therefore the effect of smoothing out the flow pulsation is better.

In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.

The foregoing summary and structure are provided to explain the principles, general features, and advantages of the product and to enable others skilled in the art to understand the invention. The foregoing examples and description have been presented to illustrate the principles of the invention and are intended to provide various changes and modifications within the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A corrugated pipe pump with a built-in damper comprises a pump head, a pump shell, a corrugated pipe, a pulsation damper, a pump shaft, a proximity switch, a liquid discharge valve, a liquid suction valve and a connecting rod; the pump head is arranged in the center of the bellows pump, and the left pump shell and the right pump shell are respectively and fixedly arranged on two sides of the pump head in a mode that the opening sides are opposite; a left working cavity and a right working cavity are respectively formed between the left pump shell, the right pump shell and the pump head; the left corrugated pipe and the right corrugated pipe are respectively and fixedly arranged in the left working cavity and the right working cavity, and a left pump cavity and a right pump cavity are formed between the left corrugated pipe and the pump head and between the right corrugated pipe and the pump head; a liquid suction flow channel and a liquid discharge flow channel for transferring fluid are arranged in the pump head, and the middle parts of the liquid suction flow channel and the liquid discharge flow channel are separated; the inlet of the liquid suction flow passage is used as a liquid suction port, and the outlet of the liquid discharge flow passage is used as a liquid discharge port; one end of the liquid suction flow passage is provided with a left liquid suction valve and a right liquid suction valve, and one end of the liquid discharge flow passage is provided with a left liquid discharge valve and a right liquid discharge valve; the left and right liquid suction valve inlets are connected with the top of the liquid suction flow channel, and the left and right liquid suction valve outlets are respectively arranged in the left pump cavity and the right pump cavity; the inlet of the left and right drain valves is respectively arranged in the left pump cavity and the right pump cavity, and the outlet of the left and right drain valves is connected with the bottom of the drain runner; the bottom of the left pump shell and the bottom of the right pump shell are provided with a left working fluid inlet and a right working fluid inlet;

the method is characterized in that: a left pulsation damper and a right pulsation damper are fixedly arranged on two sides of the pump head, the left pulsation damper and the right pulsation damper are communicated with the liquid drainage flow channel, the left pulsation damper is fixedly arranged in the left pump cavity, and the right pulsation damper is fixedly arranged in the right pump cavity; the axial length of the left and right pulsation dampers in the left and right pump chambers is equal to that of the liquid suction valve or the liquid discharge valve;

2. A damper-incorporated bellows pump as claimed in claim 1, wherein: the diaphragm is a cylindrical corrugated pipe with one side capable of elastically stretching along the axial direction and a bottom, and is fixedly arranged on the pump head in a mode that the opening side faces the pump head, and a liquid cavity is formed between the diaphragm and the pump head.

3. A damper-incorporated bellows pump as claimed in claim 1, wherein: the diaphragm is a flat elastic diaphragm which is transversely and fixedly arranged inside the pulsation damper shell and is divided into two cavities, a gas cavity is formed between the two cavities and the shell, and a liquid cavity is formed between the two cavities and the pump head.

4. A damper-incorporated bellows pump as claimed in claim 1, wherein: the left and right pulsation dampers are respectively arranged in the left and right pump chambers in a mode that the openings are opposite, and the liquid chambers of the left and right pulsation dampers are connected through the flow passage in the pump head and then are connected into the liquid drainage flow passage as a bypass.

5. A damper-incorporated bellows pump as claimed in claim 1, wherein: the liquid chambers of one or more pulsation dampers are individually connected as a bypass to the liquid discharge flow passage.

6. A damper-incorporated bellows pump as claimed in claim 1, wherein: and a pulsation damper is arranged in the pump cavity on the opposite side of each drain valve in a manner that an opening is opposite to the drain valve, and the drain valve is communicated with the corresponding pulsation damper through a straight flow passage.

7. A damper-incorporated bellows pump as claimed in any one of claims 2 or 3, wherein: the material of the diaphragm is polytetrafluoroethylene.

8. A damper-incorporated bellows pump as claimed in any one of claims 1 to 6, wherein: the material of the corrugated pipe is polytetrafluoroethylene.

9. A damper-incorporated bellows pump as claimed in any one of claims 1 to 6, wherein: the part of the pump head contacting the liquid to be transferred uses high-cleanliness stainless steel or polytetrafluoroethylene materials.

10. A damper-incorporated bellows pump as claimed in claim 1, wherein: and setting the pressure in the gas cavity of the pulsation damper to be smaller than the pressure of the liquid outlet when the output flow of the corrugated pipe pump is not pulsated.