KR101206120B1 - Dual reciprocating pump - Google Patents

Dual reciprocating pump Download PDF

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Publication number
KR101206120B1
KR101206120B1 KR1020107018866A KR20107018866A KR101206120B1 KR 101206120 B1 KR101206120 B1 KR 101206120B1 KR 1020107018866 A KR1020107018866 A KR 1020107018866A KR 20107018866 A KR20107018866 A KR 20107018866A KR 101206120 B1 KR101206120 B1 KR 101206120B1
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South Korea
Prior art keywords
pair
pump
movable partition
pump chamber
chamber
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KR1020107018866A
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Korean (ko)
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KR20110013347A (en
Inventor
토시키 오니즈카
아츠시 요시다
쿄우헤이 이와부치
히로유키 타나베
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가부시키가이샤 이와키
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Priority to JP2009139626 priority Critical
Priority to JPJP-P-2009-139626 priority
Application filed by 가부시키가이샤 이와키 filed Critical 가부시키가이샤 이와키
Priority to PCT/JP2010/056777 priority patent/WO2010143469A1/en
Publication of KR20110013347A publication Critical patent/KR20110013347A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/001Noise damping
    • F04B53/003Noise damping by damping supports
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/12Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
    • F04B9/129Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers
    • F04B9/137Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers the pumping members not being mechanically connected to each other

Abstract

Stable pump operation is possible at all times and suppresses pulsation. The case member 2 forms a pair of spaces along the axial direction therein. The movable partition member 3 is axially freely arranged in the pair of spaces, respectively, to divide the pair of spaces into the pump chamber 5 and the operating chamber 6 in the axial direction, respectively. The connecting shaft 11 freely expands and contracts the movable partition member 3 in the axial direction through the elastic member 14. The valve mechanism 27 introduces a working fluid into the working chamber 6 and discharges the working fluid from the working chamber 6. The controller 25 has a compression process of one pump chamber 5 and a compression process of the other pump chamber 5 based on the output of the displacement sensor 23 which continuously detects the displacement of the pair of movable partition members 3, respectively. The pair of movable partition members 3 are driven by switching the valve mechanism 27 so as to have a partially overlapping overlapping distance.

Description

Double Reciprocating Pumps {DUAL RECIPROCATING PUMP}

According to the present invention, a pair of pump chambers formed by movable partition members such as a pair of bellows, diaphragms, and plungers connected by a connecting shaft alternately repeat the compression process and the expansion process. The present invention relates to a two-stage reciprocating pump that operates, and more particularly, to a two-stage reciprocating pump provided with an elastic means in the connecting shaft to reduce pulsation of the conveying fluid.

A pair of closed spaces are partitioned into a pump chamber and an operating chamber by movable partition members such as bellows connected to the connecting shaft, and the working chamber is reciprocated to alternately compress the pump chamber by alternately introducing a working fluid into the pair of operating chambers. And two-stage reciprocating pumps which are adapted to expand are known. In this type of pump, at the end of the reciprocating stroke of the connecting shaft, the pair of intake valves and the pair of discharge valves are respectively switched from one pump chamber side to the other pump chamber side, and as a result, the number of strokes in the discharge flow rate. The pulsation corresponding to this occurs. This pulsation causes several obstacles. For example, in semiconductor applications, particles blocked by the filter are pushed by the pulsation and mixed downstream, leaked from the seam by the shaking of the pipe, the liquid surface of the cleaning tank is waved, or the tip of the nozzle that sprays the liquid onto the wafer vibrates. There is a problem that the cleaning efficiency is lowered, the inertial resistance of the liquid is increased, and the flow rate is not stabilized. In particular, in the field of manufacturing processes such as semiconductors, liquid crystals, solar cells, medicines, and foods, there is a big problem to be improved.

In order to solve such a problem, the technique which aimed at reducing the pulsation mentioned above is also known conventionally by providing a coil spring in a part of connection shaft, and connecting a movable partition member elastically in a reciprocating direction (patent document 1, 2). ).

Japanese Patent Laid-Open No. 11-504098 (7 pages, 20 lines to 25 lines, Fig. 1) WO00 / 15962 (page 4, line 37 to page 5, line 5, Fig. 1)

However, in the double-reciprocating reciprocating pump disclosed in Patent Document 1 described above, the expansion process of the other pump chamber is started at the stroke end in which one pump chamber is changed from the expansion process to the compression process, and the delay of the expansion process start is delayed to the contraction of the coil spring. In order to absorb by this, there exists a problem that a pulsation removal effect is less compared with the method of actively overlapping completion | finish and start period of a compression process in a pair of pump rooms.

In addition, in the two-stage reciprocating pump disclosed in Patent Document 2, since the timing of switching between the expansion process and the compression process of the pump chamber is controlled by time, changes over time such as heat generation of the elastic member after the start of operation, change of the surrounding environment, and the number of strokes In this case, there is a problem in that the phase of the reciprocating motion gradually changes and the pump operation becomes unstable.

This invention is made | formed in view of such a point, Comprising: It aims at providing the double reciprocating pump which can always operate a stable pump and suppressed pulsation.

A double-stage reciprocating pump according to the present invention includes a case member which forms a pair of spaces in an axial direction therein, and is freely deformed or moved in the axial direction, respectively, in the pair of spaces so that the pair of spaces are axially respectively. A pair of movable partition members, which are divided into a pump chamber and an operation chamber, a connecting shaft that freely expands and contracts the pair of movable partition members in an axial direction through an elastic member, and is provided on the suction side of the pump chamber to induce transfer fluid to the pump chamber. A suction valve, a discharge valve provided on the discharge side of the pump chamber, for discharging the transfer fluid from the pump chamber, a valve mechanism for introducing a working fluid into the working chamber and discharging the working fluid from the working chamber; A displacement sensor for continuously detecting displacements of the pair of movable partition members, and the displacement And a controller for driving the pair of movable partition members by switching the valve mechanism such that the compression process of one pump chamber and the compression process of the other pump chamber have overlapping overlapping portions based on the output of the sensor. do.

In one preferred embodiment, the controller has setting means for setting the overlapping rate represented by the ratio of the overlapping distance to the entire stroke length of the movable partition member, and setting of the overlapping rate set by the setting means. The overlap rate is controlled based on a value and the output of the displacement sensor.

In another embodiment, the controller increases the overlap ratio represented by the ratio of the overlapping distance to the total stroke length of the movable partition member as the number of strokes of the pair of movable partition members increases.

In another embodiment, the controller maintains the overlapping rate expressed as the ratio of the overlapping distance to the entire stroke length of the movable partition member at a value 1 to 3% less than the threshold value of the overlapping rate at which the pump operation stops. The movable partition member is driven so as to operate.

In other embodiments, the controller is characterized in that the optimal redundancy is changed periodically or dynamically.

In another embodiment, the expansion and contraction member of the connecting shaft has a damper for relieving the bias force when it is elongated in a compressed state.

In another embodiment, the stretching member is a coil spring or an air cushion.

In another embodiment, it is further provided with the proximity sensor which respectively detects that the said pair of movable partition members reached the edge part of a movement stroke.

In another embodiment, the valve mechanism comprises a pair of valves respectively provided in the pair of operating chambers, and a pair of regulators for respectively supplying the working fluid to the pair of valves by adjusting the pressure of the working fluid from a working fluid source. and a regulator.

Another double-stage reciprocating pump of the present invention is a bottomed cylindrical cylinder having a pump head and openings facing each other on both sides of the pump head so as to form a pump chamber therein, and each can be stretched in the axial direction. The pair of bellows on the top and the openings facing each other coaxially disposed with respect to the bellows to respectively receive the pair of bellows therein, forming an operating chamber between the pair of bellows. A pair of bottomed cylindrical cylinders mounted on the pump head and the bottoms of these pairs of cylinders are hermetically and slidably penetrating along the central axis of the cylinder, respectively, so that one end is each bottom of the pair of bellows. A pair of pump shafts connected to each other and the other ends of the pair of pump shafts through an elastic member. A connecting shaft which extends and freely connects in a direction, and is mounted to the pump head in the pump chamber to guide the transfer fluid from the inlet of the transfer fluid to the pump chamber and to guide the transfer fluid from the pump chamber to the outlet of the transfer fluid. A valve unit for introducing a working fluid into the working chamber, for discharging the working fluid from the working chamber, a displacement sensor for continuously detecting displacements of the pair of bellows, and a displacement sensor for And a controller for driving the pair of bellows by switching the valve mechanism such that the compression process of the one pump chamber and the compression process of the other pump chamber have overlapping overlapping portions based on the output.

According to the present invention, since it is possible to control the overlapping distance of the optimum compression process based on continuous displacement detection by the displacement sensor, stable pump operation is possible at all times, and pulsation can be effectively suppressed.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the double reciprocating pump which concerns on 1st-3rd embodiment of this invention.
Fig. 2 is a waveform diagram showing the operation of the pump.
3A is a graph showing the ratio of the overlap distance to the stroke number of the copper pump and the discharge side pulsation pressure.
3B is a graph showing the range of the ratio of the overlap distance to the stroke number of the pump.
4 is a partial cross-sectional view of the connecting shaft in the double-reciprocating reciprocating pump according to the fourth embodiment of the present invention.
5 is a partial cross-sectional view of a connecting shaft in a double-stage reciprocating pump according to a fifth embodiment of the present invention.
Fig. 6 is a partial cross-sectional view of the connecting shaft in the double reciprocating pump according to the sixth embodiment of the present invention.
It is a figure which shows the structure of the double reciprocating pump which concerns on 7th Embodiment of this invention.
It is a figure which shows the structure of the double reciprocating pump which concerns on 8th Embodiment of this invention.
It is a figure which shows the structure of the double reciprocating pump which concerns on 9th Embodiment of this invention.
It is a figure which shows the structure of the double reciprocating pump which concerns on 10th Embodiment of this invention.
It is a figure which shows the structure of the double reciprocating pump which concerns on 11th Embodiment of this invention.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described.

[First Embodiment]

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows sectional drawing of the double reciprocating bellows pump which concerns on the 1st Embodiment of this invention, and its peripheral mechanism. On both sides of the pump head 1 arranged in the central portion, bottomed cylindrical cylinders 2a and 2b, which are case members, are coaxially arranged, and a pair of spaces are formed therein. In these spaces, bottomed cylindrical bellows 3a and 3b are coaxially arranged, respectively. The open ends of the bellows 3a and 3b are fixed to the pump head 1, and the shaft fixing plates 4a and 4b are fixed to the bottom part. The bellows 3a, 3b constitutes a movable partition member that divides the inner space of the cylinders 2a, 2b as the pump chambers 5a, 5b on the inside and the operation chambers 6a, 6b on the outside.

One end of the shafts 7a and 7b extending coaxially is fixed to the shaft fixing plates 4a and 4b. The other ends of the shafts 7a and 7b respectively pass through the bottom center of the cylinders 2a and 2b through the seal member 8 in an airtight manner and extend to the outside of the cylinders 2a and 2b. At the other end of the shafts 7a and 7b, the connecting plates 9a and 9b are fixed with a nut 10. The connecting plates 9a and 9b are connected to the connecting shafts 11a and 11b at positions up and down of the cylinders 2a and 2b. Each connecting shaft 11a, 11b consists of the shaft parts 12 and 13 and the coil spring 14 which is the elastic member mounted between these shaft parts 12 and 13, and is connected by the bolt 15 to the connection board. It is fixed to 9a, 9b.

The pump head 1 is provided with a suction port 16 and a discharge port 17 of the conveying fluid at a position facing the side of the pump, and at the position from the suction port 18 to the pump chambers 5a and 5b, the suction valve 18a, 18b is provided, and discharge valves 19a and 19b are provided in a path from the pump chambers 5a and 5b to the discharge port 17.

Proximity switches 21a and 21b are attached to the bottom outer wall surfaces of the cylinders 2a and 2b. The proximity switches 21a and 21b detect that the bottoms of the bellows 3a and 3b are most retracted, for example, to detect that the inner surfaces of the connecting plates 9a and 9b are close to each other. In addition, displacement sensors 23a and 23b are attached to the fixed plates 22a and 22b extending from the cylinders 2a and 2b. The displacement sensors 23a and 23b detect displacements with the outer surfaces of the connecting plates 9a and 9b, for example, laser displacement meters, MR (magnetic resistance element) sensors, capacitive sensors, and linear encoders. , A high frequency oscillation type proximity displacement sensor, an optical fiber displacement sensor, and the like can be preferably used. The detection signals from these proximity switches 21a and 21b and displacement sensors 23a and 23b are input to the controller 25.

On the other hand, working fluids, such as air, from working fluid sources such as an air compressor (not shown) are limited to predetermined pressures at the regulators 26a and 26b, respectively, and are supplied to the electromagnetic valves 27a and 27b. The controller 25 inputs the detection outputs of the proximity switches 21a and 21b and the displacement sensors 23a and 23b, and controls the opening and closing of the solenoid valves 27a and 27b based on these detection outputs.

Next, operation | movement of the double reciprocating pump which concerns on this embodiment comprised in this way is demonstrated.

2 is a waveform diagram of each part for explaining the operation of the pump according to the present embodiment.

The air from the air source is supplied to the solenoid valves 27a and 27b after being limited to predetermined pressures at the regulators 26a and 26b, respectively. For this reason, since the pressure fluctuation of one operation chamber 6a, 6b does not affect the pressure of the other operation chamber 6b, 6a, there also exists a pulsation reduction effect by this. In addition, there is no reason to limit to two regulators, and one may be sufficient. In this case, it is more preferable to use a precision regulator. Now, it is assumed that the solenoid valve 27a is in an off state (exhaust state), the solenoid valve 27b is in an on state (air introduction state), the pump chamber 5a is in the expansion process, and the pump chamber 5b is in the shrinkage process. At this time, since the suction valve 18a and the discharge valve 19b are opened, the suction valve 18b and the discharge valve 19a are closed, the liquid to be transferred is introduced into the pump chamber 5a from the suction port 16, It discharges from the pump chamber 5b through the discharge port 17.

At this time, the output of the displacement sensor 23b descends with the spacing of the connecting plate 9a. The controller 25 monitors the output of the displacement sensor 23b, and when the output of the displacement sensor 23b falls below a predetermined threshold value THR, the solenoid valve 27a is turned on to operate the air ( 6a). For this reason, the pump chamber 5a is switched from an expansion process to a compression process. However, at this point in time, since air is continuously supplied to the other operation chamber 6b, the pump chamber 5b also maintains a compression process. Therefore, the intake valves 18a and 18b are closed, and the discharge valves 19a and 19b are opened, and the liquid is discharged from both pump chambers 5a and 5b. The coil spring 14 of the connecting shafts 11a and 11b is compressed to absorb dimensional changes between both ends of the bellows 3a and 3b at this time.

When the proximity switch 21b detects the stroke end, the solenoid valve 27b is switched to air exhaust, and the bellows 3b is pulled by the connecting shafts 11a and 11b to start the expansion, so the pump chamber 5b is expanded. Is switched to. The above operation is repeated in the pump chambers 5a and 5b on the left and right sides.

2 shows the overlap distance P O in which both the pump chambers 5a and 5b are subjected to a compression process. In this way, immediately before the final stage of the discharge process in which the discharge pressure of one pump chamber is lowered, the pulsation on the discharge side is suppressed by allowing the liquid to be discharged from the other pump chamber. The overlap distance PO can be adjusted by the set values of the threshold values THL and THR of the outputs of the displacement sensors 23a and 23b that define the switching timing. More specifically, at the start of the pump, the output values of the displacement sensors 23a and 23b are sampled at both stroke ends of the reciprocating operation, respectively, and based on the output values, the ratio of the overlap distance PO to the entire stroke length (hereinafter, ' (Called the redundancy rate). The controller 25 is provided with a setting means of the above-mentioned ratio, which is not shown, and it is possible to set any ratio by using the setting means.

According to the experiments of the present inventors, the optimum overlap rate is the number of strokes of the pump, the physical characteristics of the bellows (3a, 3b), the spring constant of the coil spring 14, the supply air pressure, supply / exhaust conditions of the supply air, It is changed by various factors.

For example, FIG. 3A is a graph showing the optimum overlap ratio (%) and the discharge side pulsation pressure width MPa in the number of strokes of the reciprocating operation of this pump. 3A, the discharge side pulsation pressure width | variety by operation when there is no overlap as a comparative example is also shown. As is apparent from this figure, when the number of strokes increases, it is desirable to also increase the optimal overlap rate. When the stroke number is set from 20 to 120 (spm), the graph shows that the overlap rate (%) is 11 to 29 (%), which is a result when a specific supply / exhaust condition is a specific condition, and various conditions are considered. If it is 11-50 (%), it is preferable.

According to this embodiment, since the displacement sensors 23a and 23b allow the displacement at the stroke ends of the connecting plates 9a and 9b to be continuously detected, it is duplicated by setting the threshold values THL and THR. The percentage can be freely set. For this reason, the optimum setting by which the pulsation of discharge fluid is most suppressed can be made. Moreover, according to this embodiment, even if there is no feedback from a discharge liquid and a suction liquid pressure sensor, an optimal overlap ratio can be selected.

[Second Embodiment]

Although the foregoing embodiment did not specifically mention that the overlap ratio has a limit value, when the overlap ratio is too large, the force for advancing one movable partition member and the force for advancing the other movable partition member are antagonistic. Causes a stop of the pump operation. The overlapping rate at which the pump operation stops as described above is called `` limit overlapping rate '' below.

3B shows the limit overlap rate at each stroke number under certain conditions. In order not to stop the pump operation, it is preferable to control the operation of the pump so as not to exceed this limit redundancy rate and to maintain the redundancy rate in the range indicated by the illustrated hatching in which pulsation is taken. More preferably, it is desirable to maintain a redundancy rate of several percent (for example, 1 to 3%) less than the limit redundancy rate. This optimal overlap rate varies with the number of strokes.

So in 2nd Embodiment, based on the detection signal from the proximity switch 21a, 21b and the displacement sensors 23a, 23b shown in FIG. 1, the controller 25 monitors the overlap ratio of a pump, and pump operation The overlap rate is dynamically changed in accordance with the number of strokes.

Specifically, the control table is prepared by obtaining the optimum overlap ratio in the hatching of FIG. 3B for various supply / exhaust conditions in advance. The control table may be prepared by obtaining an optimal overlap rate by two-point calibration, and calculating other overlap rates by interpolation. During the pump operation, when the number of strokes is detected by referring to the control table from the stroke numbers and the outputs of the displacement sensors 23a and 23b, control is made to reduce or increase the overlap rate.

As a result, an optimum overlap ratio in accordance with the number of strokes can be achieved, and the pump can be operated with low pulsation.

In addition, the optimal redundancy may vary due to changes in the pump or the surrounding environment over time, operating conditions including supply / exhaust conditions, and the like. For this reason, you may perform dynamic calibration based on regular calibration of a control table, the output of displacement sensors 23a, 22b, etc.

Moreover, even if it does not produce a control table from the output of the displacement sensors 23a and 23b, it can drive, always looking for -1%--3% of "limit overlap ratio." At that time, feedback from the liquid pressure sensor is unnecessary.

[Third Embodiment]

4 is a partial cross-sectional view of the connecting shaft 31a (31b) used for the double reciprocating pump according to the third embodiment of the present invention.

In the first embodiment, the coil spring 14 is used as the expansion and contraction member of the connecting shafts 11a and 11b. In this embodiment, the air cushion is used as the expansion and contraction member. That is, the connecting shaft 31a (31b) is comprised by the shaft part 32 and 33 and the air cushion part 34 which couples both. The air cushion portion 34 is composed of an air cylinder 35 attached to the tip of the shaft portion 33 and a piston 36 attached to the tip of the shaft portion 32. Air of predetermined pressure is supplied through 37. As shown in FIG.

According to this embodiment, not only the optimal redundancy but also the optimum spring pressure can be set easily. The spring pressure may also change in time.

[Fourth Embodiment]

5 is a partial cross-sectional view of the connecting shaft 41a (41b) used for the double-reciprocating reciprocating pump according to the fourth embodiment of the present invention.

In the above embodiment, when one pump chamber is switched from the compression process to the expansion process, the energy accumulated in the coil spring 14 is released, so that excessive suction pressure is generated on the suction side, so that the pulsation on the suction side is amplified. have. Therefore, in this embodiment, the damper for relieving the side force when the expansion-contraction member of a connection shaft expands in a compressed state is provided.

The connecting shaft 41a (41b) of this embodiment has the shaft parts 42 and 43, the coil spring 44 which expands at the time of compression mounted between them, and the damper which expands at the time of extension. It has a coil spring 45.

According to this embodiment, when the pump chamber moves from the compression process to the expansion process, the damper coil spring 45 suppresses rapid expansion of the pump chamber, and therefore the pulsation on the suction side can be suppressed.

[Fifth Embodiment]

FIG. 6 is a further modification of the embodiment of FIG. 5, in which an air cushion is used as a damper.

In this embodiment, the connecting shaft 51a (51b) consists of the shaft parts 52 and 53, and the cushion part 54 provided between them, and the cushion part 54 consists of the coil spring 55 and the air cushion part. It expands and contracts with the balance of 56. By appropriately adjusting the air pressure introduced into the air cushion portion 56 from the air inlet port 57, the pulsation on both the discharge side and the suction side can be reduced.

[Sixth Embodiment]

FIG. 7 shows an embodiment in which all of the embodiments of FIG. 5 are performed with an air cushion.

In addition, in the following embodiment, the same code | symbol is attached | subjected about the same part as previous embodiment, and the overlapping description is left.

The connecting shafts 61a and 61b are composed of shaft parts 62 and 63 and an air cushion part 64 provided therebetween, and the air cushion part 64 is composed of an air cylinder 65 and a piston 66. It is. The pulsation on both the discharge side and the suction side can be reduced by the balance between the pressure inside the air cylinder 65 introduced from the air inlets 67 and 68 and the pressure on the back surface of the piston 66.

In the present embodiment, in addition to the regulators 26a and 26b and the solenoid valves 27a and 27b in the pump of FIG. 1, the regulators 28a and 28b and the solenoid valves 29a, 29b).

[Seventh Embodiment]

8 is a diagram illustrating a modification of the sixth embodiment.

This embodiment is an example in which the pressure control on the back surface of the piston 66 of the air cushion unit 64 is realized by a check valve 69 (nonreturn valve) and a low speed speaker (speed controller).

In this embodiment, air is always supplied from the air inlet 67 (when the connecting shaft 61a is contracted) to introduce air into the back surface of the piston 66, and low speed spigot when the connecting shaft 61a is extended. The cone 70 restricts the exhaust of air on the back of the piston 66. For this reason, it functions as a damper.

According to this embodiment, it can be set as a structure simpler than 6th embodiment.

[Eighth Embodiment]

9 is a cross-sectional view showing a double-stage reciprocating pump according to an eighth embodiment of the present invention.

In the above embodiment, a bellows is used as the movable partition member. In this embodiment, a piston is used as the movable partition member.

On both sides of the pump head 71 disposed in the center portion, bottomed cylindrical cylinders 72a and 72b, which are case members, are coaxially arranged, and a pair of spaces are formed therein. In these spaces, pistons 73a and 73b are arranged freely reciprocally. The front end side of the piston 73a, 73b opposes the pump head 71 side, and the pump chamber 75a, 75b is formed between the pump head 71. As shown in FIG. The base end sides of the pistons 73a and 73b form operating chambers 76a and 76b, and the shafts 77a and 77b are coaxially fixed. The other ends of the shafts 77a and 77b respectively pass through the bottom center of the cylinders 72a and 72b through the seal member 78 in an airtight manner and extend to the outside of the cylinders 72a and 72b.

The pump head 71 is provided with a suction port 86 and a discharge port 87 of the transfer fluid at a position facing the side of the pump, and a ball-shaped suction valve at a position from the suction port 86 to the pump chambers 75a and 75b. 88a and 88b are provided and the discharge valves 89a and 89b are provided in the position which reaches the discharge port 87 from the pump chambers 75a and 75b.

The other structure is the same as that of FIG.

Also in such a pump, an optimal overlap ratio can be set based on continuous displacement detection by the displacement sensors 23a and 23b, and pulsation can be effectively suppressed.

[Ninth Embodiment]

10 is a cross-sectional view showing a two-stage reciprocating pump according to a ninth embodiment of the present invention.

In the above embodiment, a bellows or a piston is used as the movable partition member. In this embodiment, a diaphragm is used as the movable partition member.

Covers 92a and 92b, which are case members that form a space together with the main body 91, are attached to both sides of the main body 91 having a pump head disposed inside the central portion. In the space formed by the main body 91 and the covers 92a and 92b, diaphragms 93a and 93b are mounted so as to divide these spaces into the pump chambers 95a and 95b and the operating chambers 96a and 96b, respectively. . The diaphragms 93a and 93b are connected by a connecting shaft 94 whose central portion penetrates through the body portion 91. The connecting shaft 94 is provided with the coil spring 97 as an elastic member, and the whole is comprised freely elastically.

The main body portion 91 is provided with a suction port 106 and a discharge port 107 of the conveying fluid, and ball-shaped suction valves 108a and 108b are provided in a path from the suction port 106 to the pump chambers 95a and 95b. The discharge valves 109a and 109b are provided in the path from the pump chambers 95a and 95b to the discharge port 107.

In addition, the covers 92a and 92b are provided with proximity switches 111a and 111b which detect the most retreat of the diaphragms 93a and 93b on the back surfaces of the diaphragms 93a and 93b. Moreover, the displacement sensors 113a and 113b which consist of linear encoders for detecting the displacement of the coupling shaft 94 in the reciprocating direction of the coupling shaft 94 are provided.

The other structure is the same as that of FIG.

Also in such a pump, an optimal overlap rate can be set based on continuous displacement detection by the displacement sensors 113a and 113b, and the pulsation can be effectively suppressed.

[Tenth Embodiment]

It is sectional drawing which shows the double reciprocating pump which concerns on 10th Embodiment of this invention.

In the first embodiment, each of the connecting shafts 11a and 11b has a coil spring 14 mounted at an almost intermediate position of the shaft portions 12 and 13, but in this embodiment the coil spring 14 is a shaft. It is attached in the position biased toward the part 12 side. In addition, the liquid pressure sensors 116 and 117 are provided in the piping which does not show in the inlet 16, and the piping which does not show in the discharge port 17, and the air pressure sensor (1) faces the operation chamber 6a, 6b. 127a and 127b and leak sensors 150a and 150b are provided. In addition, the displacement sensors 123a and 123b consist of a laser displacement meter, and detect the displacement amount of each connection shaft 11a, 11b. The detection outputs of the pressure sensors 116, 117, 127a, and 127b are input to the controller 25.

According to this embodiment, since the coil spring 14 of each connecting shaft 11a, 11b is mounted in the biased position, it can be set as the structure which does not contact the piping of the suction port 16 and the discharge port 17 of a pump. Therefore, the whole size can be reduced and the degree of freedom of piping can be improved.

In addition, the controller 25 can acquire and control not only the detection outputs from the proximity sensors 21a and 21b and the displacement sensors 123a and 123b, but also the detection outputs from the pressure sensors 116, 117, 127a and 127b. Therefore, the following control becomes possible, for example.

That is, the controller 25 can detect the pulsation of the conveying fluid on the suction side and the discharge side by the output of the liquid pressure sensors 116 and 117, and can control the overlap rate so that this pulsation will be minimum.

In addition, when the pressure of the supply air changes, the optimum overlap ratio (%) also changes. In this embodiment, the controller 25 monitors the supply air pressure with the air pressure sensors 127a and 127b and based on the detected air pressure. It is possible to control the overlap rate (%).

In addition, by using an electrostatic regulator for the regulators 26a and 26b, the controller 25 controls the pressure of the supply air to perform constant flow rate control to keep the stroke number constant regardless of the change in the discharge pressure. Even in this case, it is possible to change the overlap rate (%) in accordance with the supply air pressure.

In addition, the pump may be operated by correcting the zero point of the displacement sensors 123a and 123b in consideration of the influence of the temperature change of each part of the pump and the change over time. The zero point correction is such that, for example, the controller 25 acquires the value at the maximum movement of the connecting shafts 11a and 11b at the time of starting the pump and includes it in the control or checks it periodically based on this. You can drive.

[Other Embodiments]

In addition, in the above eighth and ninth embodiments, it is needless to say that dampers such as those shown in Figs.

1, 71 pump head
2a, 2b, 72a, 72b cylinder
3a, 3b bellows
5a, 5b pump room
6a, 6b operating room
11a, 11b, 31a, 31b, 41a, 41b, 51a, 51b, 94 connecting shaft
14, 44, 45, 55, 97 coil spring
16, 86, 106 inlet
17, 87, 107 outlet
18a, 18b, 88a, 88b, 108a, 108b intake valve
19a, 19b, 89a, 89b, 109a, 109b discharge valve
21a, 21b, 111a, 111b proximity switch
23a, 23b, 113a, 113b displacement sensor
25 controller
26a, 26b, 28a, 28b regulator
27a, 27b, 29a, 29b solenoid valve

Claims (11)

  1. A case member forming a pair of spaces in the axial direction therein;
    A pair of movable partition members disposed freely in the axial direction in the pair of spaces so as to be deformed or moved in a axial direction to divide the pair of spaces into pump chambers and operating chambers, respectively;
    A connecting shaft configured to freely expand and contract the pair of movable partition members in the axial direction through the elastic members;
    A suction valve provided on the suction side of the pump chamber to guide a transfer fluid to the pump chamber;
    A discharge valve provided at a discharge side of the pump chamber and discharging the transfer fluid from the pump chamber;
    A valve mechanism for introducing a working fluid into the working chamber and discharging the working fluid from the working chamber;
    A displacement sensor for continuously detecting displacements of the pair of movable partition members,
    A controller for driving the pair of movable partition members by switching the valve mechanism such that the compression process of one pump chamber and the compression process of the other pump chamber have overlapping distances partially overlapping based on the output of the displacement sensor,
    The controller has setting means for setting the overlap ratio represented by the ratio of the overlap distance to the entire stroke length of the movable partition member, the set value of the overlap ratio set by the setting means, and the output of the displacement sensor. And controlling the redundancy ratio based on the two-stage reciprocating pump.
  2. The method of claim 1,
    And the controller increases the overlap ratio represented by the ratio of the overlap distance to the total stroke length of the movable partition member as the number of strokes of the pair of movable partition members increases.
  3. The method of claim 1,
    The controller controls the movable partition member to maintain the overlap ratio represented by the ratio of the overlap distance to the entire stroke length of the movable partition member at a value 1 to 3% less than the threshold value of the overlap ratio at which the pump operation stops. Two-stage reciprocating pump, characterized in that driven.
  4. The method of claim 3,
    And said controller changes said optimal redundancy periodically or dynamically.
  5. The method of claim 1,
    The expansion and contraction member of the connecting shaft has a damper for relieving the bias force when extending from the compressed state.
  6. The method of claim 1,
    The expansion member is a two-stage reciprocating pump, characterized in that the coil spring.
  7. The method of claim 1,
    And said telescopic member is an air cushion.
  8. The method of claim 1,
    And a proximity sensor for detecting that the pair of movable partition members have reached the end of the moving stroke, respectively.
  9. The method according to any one of claims 1 to 8,
    The valve mechanism,
    A pair of valves each provided in the pair of operating chambers,
    And a pair of regulators for adjusting the pressure of the working fluid from the working fluid source to supply the working fluid to the pair of valves, respectively.
  10. With pump head,
    A pair of bottomed cylindrical bellows installed on both sides of the pump head so as to face each other and having a pump chamber therein, each of which can expand and contract in an axial direction;
    Are mounted coaxially with respect to the bellows to respectively receive the pair of bellows, and are mounted to the pump head so that openings face each other, forming an operating chamber between the pair of bellows, A pair of cylindrical cylinders with a bottom,
    A pair of pump shafts each of which has one end connected to each bottom portion of the pair of bellows, respectively, while the bottom portion of the pair of cylinders is hermetically and slidably freely passed along the central axis of the cylinder;
    A connecting shaft configured to freely expand and contract the other ends of the pair of pump shafts in an axial direction through an elastic member;
    A valve unit mounted to the pump head in the pump chamber to guide the transfer fluid from the suction port of the transfer fluid to the pump chamber and to guide the transfer fluid from the pump chamber to the discharge port of the transfer fluid;
    A valve mechanism for introducing a working fluid into the working chamber and discharging the working fluid from the working chamber;
    A displacement sensor for continuously detecting displacements of the pair of bellows, respectively;
    And a controller for driving the pair of bellows by switching the valve mechanism such that the compression process of the one pump chamber and the compression process of the other pump chamber have overlapping overlapping portions, based on the output of the displacement sensor. Double reciprocating pumps.
  11. delete
KR1020107018866A 2009-06-10 2010-04-15 Dual reciprocating pump KR101206120B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009139626 2009-06-10
JPJP-P-2009-139626 2009-06-10
PCT/JP2010/056777 WO2010143469A1 (en) 2009-06-10 2010-04-15 Double reciprocation pump

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KR20110013347A KR20110013347A (en) 2011-02-09
KR101206120B1 true KR101206120B1 (en) 2012-11-29

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JP (1) JP5315550B2 (en)
KR (1) KR101206120B1 (en)
CN (1) CN102057160B (en)
TW (1) TWI513894B (en)
WO (1) WO2010143469A1 (en)

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Publication number Priority date Publication date Assignee Title
JP5720888B2 (en) * 2011-03-30 2015-05-20 株式会社イワキ Bellows pump
TWI477697B (en) * 2011-09-22 2015-03-21
JP2014051950A (en) * 2012-09-10 2014-03-20 Nippon Pillar Packing Co Ltd Bellows pump
CN103244390B (en) * 2013-05-20 2015-06-24 贝恩医疗设备(广州)有限公司 Metering pump
KR20170030539A (en) 2014-07-08 2017-03-17 가부시키가이샤 이와키 Coil-spring fixing structure and duplex reciprocating pump
JP6353732B2 (en) * 2014-08-04 2018-07-04 日本ピラー工業株式会社 Bellows pump device
JP6367645B2 (en) * 2014-08-08 2018-08-01 日本ピラー工業株式会社 Bellows pump device
EP3179105B1 (en) * 2014-08-08 2019-05-29 Nippon Pillar Packing Co., Ltd. Bellows pump device
JP6362535B2 (en) * 2014-12-25 2018-07-25 日本ピラー工業株式会社 Bellows pump device
CN107429684B (en) * 2015-04-07 2019-04-26 株式会社易威奇 Double reciprocation pump
DE102015219204A1 (en) * 2015-10-05 2017-04-06 Zf Friedrichshafen Ag Multiple pump and gearbox

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DE3706338A1 (en) * 1987-02-27 1988-09-08 Wagner Gmbh J Diaphragm pump device
JPH0814163A (en) * 1994-06-28 1996-01-16 Nippon Pillar Packing Co Ltd Bellows pump with flow rate adjusting function
SE9501564L (en) * 1995-04-27 1996-07-01 Svante Bahrton Double-acting pump
JP3519364B2 (en) * 2000-12-05 2004-04-12 株式会社イワキ Bellows pump
JP3989334B2 (en) * 2002-08-23 2007-10-10 株式会社イワキ Double reciprocating bellows pump
JP2005214014A (en) * 2004-01-27 2005-08-11 Iwaki Co Ltd Twin reciprocating bellows pump with interlocking shaft

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TWI513894B (en) 2015-12-21
KR20110013347A (en) 2011-02-09
WO2010143469A1 (en) 2010-12-16
CN102057160B (en) 2013-05-29
JP5315550B2 (en) 2013-10-16
JPWO2010143469A1 (en) 2012-11-22
TW201107601A (en) 2011-03-01
CN102057160A (en) 2011-05-11

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