CN112296997B - Method, device and equipment for calibrating manipulator handover station and storage medium - Google Patents
Method, device and equipment for calibrating manipulator handover station and storage medium Download PDFInfo
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- CN112296997B CN112296997B CN201910702431.5A CN201910702431A CN112296997B CN 112296997 B CN112296997 B CN 112296997B CN 201910702431 A CN201910702431 A CN 201910702431A CN 112296997 B CN112296997 B CN 112296997B
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- shaped groove
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1692—Calibration of manipulator
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
Abstract
The invention discloses a calibration method, a device, equipment and a storage medium for a manipulator transfer station. The method comprises the following steps: after collision occurs, judging whether a collision point of the last two times of collision is positioned on the inner wall of the same side of the V-shaped groove, if so, controlling the manipulator to step in the stepping direction and the stepping distance of the previous step, and controlling the manipulator to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove; and if not, controlling the manipulator to step in a second stepping direction and a second stepping distance, controlling the manipulator to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove, judging whether the station calibration index is met or not during each collision, and if not, continuing to execute collision operation until the station calibration index is met. On the premise of ensuring the station calibration precision, the invention reduces the collision frequency of the first calibration part and the V-shaped groove, reduces the calibration time and improves the calibration efficiency.
Description
Technical Field
The embodiment of the invention relates to the field of photoetching equipment, in particular to a method, a device and equipment for calibrating a manipulator transfer station and a storage medium.
Background
A lithographic apparatus in which a substrate transport system is used to quickly, accurately and reliably transport a substrate to a workpiece stage or substrate library is an apparatus that images the exposure of a mask pattern onto a silicon wafer. Along with the continuous development of the technology of the integrated circuit manufacturing industry, the scribing precision of the chip is continuously improved, the requirement on a transmission system is reflected in that the precision of the silicon wafer transmitted to the workpiece table is also improved, namely, the requirement on the calibration precision of the hand-over station of the mechanical arm and the workpiece table is higher and higher.
In the existing silicon chip transmission subsystem, the following two methods are mainly adopted for carrying out handover station calibration:
1) the manipulator is adopted for low-speed micro-motion, and manual field visual observation is carried out to finish the calibration of the handover station, so that the mode not only has long time consumption and low efficiency, but also has poor reliability and accuracy.
2) The first calibration part of the mechanical arm piece fork is adopted to collide with the V-shaped groove of the second calibration part on the workpiece table, continuously collide with the left side and the right side of the V-shaped groove, and curves on two sides of the V-shaped groove are fitted, so that the center position of the V-shaped groove is calculated to serve as a handover station. The method has more collision points, takes too long time, needs to fit two curves, and introduces errors to be amplified.
Disclosure of Invention
The invention provides a calibration method, a calibration device and a storage medium for a manipulator transfer station, which reduce the collision frequency of a first calibration part and a V-shaped groove, reduce the calibration time and improve the calibration efficiency on the premise of ensuring the station calibration precision.
In a first aspect, an embodiment of the present invention provides a calibration method for a hand-transferring station, where a hand includes a first calibration portion, a workpiece stage includes a second calibration portion corresponding to the first calibration portion, the second calibration portion has a "V" shaped groove, an inner wall of the "V" shaped groove includes a first inner wall and a second inner wall on two sides, and the calibration method for the hand-transferring station includes:
after the first marking part is driven to collide with the inner wall of the V-shaped groove for the nth-1 time by controlling the movement of the manipulator, the manipulator is controlled to step in a first stepping direction and a first stepping distance, and the manipulator is controlled to move along the collision direction until the first marking part collides with the inner wall of the V-shaped groove for the nth time, wherein the first stepping direction is parallel to the direction from the first inner wall to the second inner wall, the collision direction is perpendicular to the first stepping direction, and n is more than or equal to 2;
judging whether the collision point of the n-1 th collision and the collision point of the nth collision are positioned on the inner wall of the V-shaped groove on the same side;
if the collision point of the first calibration part colliding with the V-shaped groove for the nth time and the collision point of the first calibration part colliding with the V-shaped groove for the (n-1) th time are positioned on the inner wall on the same side of the V-shaped groove, controlling the mechanical arm to step in the first step direction and the first step distance, and controlling the mechanical arm to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the (n + 1) th time;
if the collision point of the first calibration part colliding with the V-shaped groove for the nth time and the collision point of the first calibration part colliding with the V-shaped groove for the n-1 th time are located on the inner walls of the V-shaped groove on different sides, controlling the mechanical arm to step in a second stepping direction and a second stepping distance, and controlling the mechanical arm to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the n +1 th time, wherein the second stepping direction is opposite to the first stepping direction, and the second stepping distance is smaller than the first stepping distance;
the manipulator handover station calibration method further comprises the following steps:
and judging whether a station calibration index is met or not when the first calibration part collides with the V-shaped groove every time, and if the station calibration index is not met, continuing to execute the collision operation of the first calibration part and the V-shaped groove until the station calibration index is met.
Optionally, the second step distance is half of the first step distance.
Optionally, the determining whether the station calibration index is met includes:
determining the number of times of collision between the first calibration part and the V-shaped groove;
and when the collision frequency is determined to reach the preset frequency, determining that the station calibration index is met.
Optionally, after each collision between the first calibration portion and the V-shaped groove, the method further includes:
and controlling the manipulator to retreat for a preset distance along the collision direction.
Optionally, the determining whether the collision point of the n-1 st collision and the collision point of the nth collision are located on the inner wall of the same side of the V-shaped groove includes:
determining that the collision point is positioned on the first inner wall or the second inner wall of the V-shaped groove based on the coordinate information of the light spot formed on the four-quadrant sensor by the light source; wherein the content of the first and second substances,
the manipulator comprises a mechanical arm, a detection mechanism and an actuator, the first calibration part is arranged on the actuator, and the actuator is connected with the mechanical arm through the detection mechanism;
the detection mechanism comprises a light source, a four-quadrant sensor and a shading part, wherein a through hole is formed in the shading part, the light source and the four-quadrant sensor are relatively fixedly arranged, the shading part is arranged between the light source and the four-quadrant sensor, and the shading part is connected with the actuator.
Optionally, the determining that the collision point is located on the first inner wall or the second inner wall of the "V" shaped groove based on the coordinate information of the light spot formed by the light source on the four-quadrant sensor includes:
if the light spot is positioned in the first quadrant or the fourth quadrant of the four-quadrant sensor, determining that the collision point is positioned on the first inner wall of the V-shaped groove;
and if the light spot is positioned in the second quadrant or the third quadrant of the four-quadrant sensor, determining that the collision point is positioned on the second inner wall of the V-shaped groove.
Optionally, the initial stepping distance of the manipulator stepping in the first stepping direction is 1mm, and the preset number of times is 9.
In a second aspect, an embodiment of the present invention further provides a robot hand-transferring station calibration apparatus, where a robot hand includes a first calibration portion, a workpiece stage includes a second calibration portion corresponding to the first calibration portion, the second calibration portion has a "V" shaped groove, an inner wall of the "V" shaped groove includes a first inner wall and a second inner wall on two sides, and the robot hand-transferring station calibration apparatus includes:
the first control module is used for controlling the mechanical arm to step in a first step direction and a first step distance after controlling the movement of the mechanical arm to drive the first calibration part to collide with the inner wall of the V-shaped groove for n-1 time, and controlling the mechanical arm to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for n time, wherein the first step direction is parallel to the direction from the first inner wall to the second inner wall, the collision direction is perpendicular to the first step direction, and n is more than or equal to 2;
the judging module is used for judging whether the collision point of the n-1 th collision and the collision point of the nth collision are positioned on the inner wall of the V-shaped groove on the same side;
the second control module is used for controlling the mechanical arm to step in the first step direction and the first step distance and controlling the mechanical arm to move along the collision direction until the first marking part and the inner wall of the V-shaped groove collide for the n +1 th time when the collision point of the first marking part and the n-1 th time of the V-shaped groove are determined to be positioned on the inner wall on the same side of the V-shaped groove;
a third control module, configured to control the manipulator to step in a second stepping direction and a second stepping distance and control the manipulator to move in the collision direction to the first calibration portion and collide with the inner wall of the V-shaped groove for n +1 th time when it is determined that a collision point at which the first calibration portion collides with the V-shaped groove and a collision point at which the first calibration portion collides with the V-shaped groove for n-1 th time are located on the inner wall of the V-shaped groove on different sides, where the second stepping direction is opposite to the first stepping direction, and the second stepping distance is smaller than the first stepping distance;
the station calibration judging module is used for judging whether the station calibration index is met or not when the first calibration part collides with the V-shaped groove every time;
and the return execution module is used for continuously executing the collision operation of the first calibration part and the V-shaped groove until the station calibration index is met when the station calibration index is determined not to be met.
In a third aspect, an embodiment of the present invention further provides a computer device, including:
one or more processors;
a memory for storing one or more programs;
when executed by the one or more processors, cause the one or more processors to implement a method of robot hand-off station calibration according to the first aspect of the invention.
In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium, on which a computer program is stored, where the computer program, when executed by a processor, implements the method for calibrating a robot handover station according to the first aspect of the present invention.
According to the manipulator transfer station calibration method provided by the embodiment of the invention, after the first calibration part collides with the V-shaped groove, whether the closest collision point of the two previous collisions is positioned on the inner wall of the same side of the V-shaped groove is judged, if yes, the manipulator is controlled to step in the previous stepping direction and the previous stepping distance, and the manipulator is controlled to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove; if not, the manipulator is controlled to step in a second stepping direction and a second stepping distance, and the manipulator is controlled to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove. The second stepping direction is opposite to the previous stepping direction, the second stepping distance is smaller than the previous stepping distance, and the number of times of collision between the first calibration part and the V-shaped groove is reduced by gradually reducing the stepping distance on the premise of ensuring the calibration precision, so that the calibration time is reduced, the calibration efficiency is improved, and the calibration precision can be flexibly improved by adjusting the calibration error window.
Drawings
Fig. 1 is a flowchart of a method for calibrating a hand-over station of a robot according to an embodiment of the present invention;
fig. 2 is a schematic diagram illustrating a hand-over between a robot and a workpiece stage according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first calibration portion and a second calibration portion according to a first embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a detecting mechanism according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the relative positions of the four quadrants of the four quadrant sensor and the first and second calibration portions;
FIG. 6 is a schematic diagram showing the relative positions of the first calibration portion and the "V" shaped groove under ideal conditions;
fig. 7 is a schematic structural diagram of a robot hand-over station calibration device according to a second embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; may be a mechanical connection; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Example one
Fig. 1 is a flowchart of a calibration method for a hand-transferring station of a manipulator according to an embodiment of the present invention, where this embodiment is applicable to a situation of calibrating a hand-transferring station of a manipulator, and the method may be executed by a hand-transferring station calibration device according to an embodiment of the present invention, where the device may be implemented in a software and/or hardware manner, as shown in fig. 1, the calibration method for a hand-transferring station of a manipulator according to an embodiment of the present invention specifically includes the following steps:
s301, after the first calibration part is driven to collide with the inner wall of the V-shaped groove for the nth-1 time through the movement of the manipulator, the manipulator is controlled to step in the first stepping direction and the first stepping distance, and the manipulator is controlled to move to the first calibration part along the collision direction to collide with the inner wall of the V-shaped groove for the nth time.
Fig. 2 is a schematic diagram illustrating the connection between a robot and a workpiece stage according to a first embodiment of the present invention, and fig. 3 is a schematic diagram illustrating the structures of a first calibration portion and a second calibration portion according to a first embodiment of the present invention, where as shown in fig. 2 and 3, the robot 100 includes the first calibration portion 110, the workpiece stage 200 includes a second calibration portion 210 corresponding to the first calibration portion 110, the second calibration portion 210 is provided with a "V" shaped groove 211, and an inner wall of the "V" shaped groove 211 includes a first inner wall 2111 and a second inner wall 2112 on both sides. Wherein the first step direction is perpendicular to the center line of the V-shaped groove 211 and parallel to the direction from the first inner wall 2111 to the second inner wall 2112, the positive direction of the X-axis in the figure represents the first step direction, the collision direction is perpendicular to the first step direction and parallel to the center line of the V-shaped groove 211, and n is more than or equal to 2.
For example, the first calibration portion 110 is a calibration wheel and is fixedly connected to an actuator of the robot 100, and after the first calibration portion 110 is driven to collide with the inner wall of the "V" shaped groove 211 for the nth-1 time by controlling the movement of the robot 100, the robot 100 is controlled to step in the first stepping direction and the first stepping distance, and the robot 100 is controlled to move in the collision direction until the first calibration portion collides with the inner wall of the "V" shaped groove 211 for the nth time.
S302, judging whether the collision point of the n-1 th collision and the collision point of the n-th collision are positioned on the inner wall of the same side of the V-shaped groove.
Before each collision, it is judged whether or not the collision point of the nearest two previous collisions is located on the inner wall on the same side of the "V" shaped groove 211.
Illustratively, as shown in fig. 2, the robot arm 100 includes a robot arm 120, a detection mechanism 130, and an actuator 140. The first calibration portion 110 is disposed on the actuator 140, the actuator 140 is connected to the robot arm 120 through the detection mechanism 130, and the robot arm 120 is movably connected to the base 150. In an embodiment of the invention, the actuator 140 may be a blade fork, and the robot 100 is a transport mechanism in a lithographic apparatus, the blade fork being adapted to carry a substrate during transport of the substrate. Workpiece stage 200 can be a substrate pre-alignment stage or an exposure stage.
Fig. 4 is a schematic structural diagram of a detection mechanism in an embodiment of the invention, and as shown in fig. 4, the detection mechanism 130 includes a light source 131, a four-quadrant sensor 132, a light shielding portion 133, a first connection portion 134, and a second connection portion 135. Specifically, the first connection portion 134 is connected to the robot arm 120, a light source fixing member 1341 is disposed on a lower surface of the first connection portion 134, one end of a vertical section of the light source fixing member 1341 is connected to a lower surface of the first connection portion 134, the other end of the vertical section of the light source fixing member 1341 is connected to a horizontal section of the light source fixing member 1341, the light source 131 is disposed on the horizontal section of the light source fixing member 1341, and the four-quadrant sensor 132 is disposed on the lower surface of the first connection portion 134 opposite to the light source 131; the second connecting portion 135 is connected to the actuator 140, one end of the vertical section of the light-shielding portion 133 is fixedly connected to the upper surface of the second connecting portion 135, the other end is connected to the horizontal section of the light-shielding portion 133, the horizontal section of the light-shielding portion 133 is located between the light source 131 and the four-quadrant sensor 132, and a through hole 1331 is formed in the horizontal section of the light-shielding portion 133.
Optionally, in an embodiment of the present invention, the detection mechanism 130 further includes a return spring 136 and a return rod 137. Specifically, the second connecting portion 135 is provided with a through hole 1351, and the restoring rod 137 passes through the through hole 1351 and is connected with the lower surface of the first connecting portion 134; the spring holder 1352 is disposed on the lower surface of the second connecting portion 135, and one end of the return spring 136 is connected to the spring holder 1352 and the other end is connected to the return bar 137. After each collision, when the calibration wheel is separated from the "V" shaped groove 211, the first connection part 134 and the second connection part 135 are restored to the original relative positional relationship by the return spring 136.
Optionally, in an embodiment of the present invention, the detecting mechanism 130 further includes a limiting wheel 138 and a limiting member 139. Specifically, the wheel axle of the limiting wheel 138 is fixed on the upper surface of the second connecting portion 135, one end of the vertical section of the limiting member 139 is connected with the lower surface of the first connecting portion 134, and the other end is connected with the horizontal section of the limiting member 139. The initial state of the return spring 136 is a tension state, and in the recovery process, when the limiting wheel 138 contacts with the limiting piece 139, the recovery is completed, and it is ensured that the first connecting portion 134 and the second connecting portion 135 can recover to the initial relative position relationship each time.
When the first calibration part 110 collides with the V-shaped groove, the first connection part 134 and the second connection part 135 relatively move, so that the light source 131 and the through hole 1331 relatively move, the coordinate position of the light spot formed on the four-quadrant sensor 132 by the light source 131 changes, and the collision point on the first inner wall or the second inner wall of the V-shaped groove can be determined according to the coordinate position of the light spot formed on the four-quadrant sensor 132 by the light source 131.
For example, fig. 5 is a schematic diagram of relative positions of four quadrants of the four quadrant sensor and the first and second calibration portions, and referring to fig. 4 and 5, if an impact point of the first calibration portion 110 with the "V" shaped groove 211 is located on the first inner wall 2111, the light shielding portion 133 moves forward along the X axis relative to the light source 131, and a light spot formed on the four quadrant sensor 132 by the light emitted from the light source 131 through the through hole 1331 is located in the first quadrant or the fourth quadrant; if the collision point of the first calibration portion 110 with the "V" shaped groove 211 is located on the second inner wall 2112, the light shielding portion 133 moves in the negative direction of the X axis with respect to the light source 131, and the light spot formed on the four-quadrant sensor 132 by the light emitted from the light source 131 through the through hole 1331 is located in the second quadrant or the third quadrant. Therefore, it can be determined from the coordinate information of the light spot on the four-quadrant sensor 132 that the collision point is located on the first inner wall 2111 or the second inner wall 2112 of the "V" -shaped groove 211.
And S303, if the collision point of the first calibration part colliding with the V-shaped groove for the nth time and the collision point of the first calibration part colliding with the V-shaped groove for the (n-1) th time are positioned on the inner wall of the same side of the V-shaped groove, controlling the manipulator to step in a first step direction and a first step distance, and controlling the manipulator to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the (n + 1) th time.
That is, if the closest collision point of the first two collisions is located on the inner wall of the same side of the "V" shaped groove 211, the robot 100 is controlled to step in the step direction and step distance of the previous step, and the robot 100 is controlled to move in the collision direction until the first calibration part 110 collides with the inner wall of the "V" shaped groove 211.
S304, if the collision point of the first calibration part colliding with the V-shaped groove for the nth time and the collision point of the first calibration part colliding with the V-shaped groove for the (n-1) th time are located on the inner walls of different sides of the V-shaped groove, the manipulator is controlled to step in the second stepping direction and the second stepping distance, and the manipulator is controlled to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the (n + 1) th time.
That is, if the collision points of the last two collisions are located on the first inner wall 2111 and the second inner wall 2112 of the "V" shaped groove 211, respectively, the robot 100 is controlled to step in the second step direction and the second step distance, and the robot 100 is controlled to move in the collision direction until the first calibration part 110 collides with the inner wall of the "V" shaped groove 211. And the second stepping direction is opposite to the stepping direction of the previous stepping, and the second stepping distance is smaller than the stepping distance of the previous stepping.
The manipulator handover station calibration method further comprises the following steps:
s305, judging whether the station calibration indexes are met or not when the first calibration part collides with the V-shaped groove every time.
In this embodiment, the condition that the station calibration index is satisfied is that the distance between the center line of the first calibration part 110 (i.e., the axis of the calibration wheel) and the center line of the "V" shaped groove 211 in the X-axis direction is smaller than or equal to the station calibration error window, i.e., the absolute value of the calibration error is smaller than or equal to the station calibration error window.
And if the station calibration indexes are met, stopping collision operation and ending the station calibration process.
If the station calibration index is not met, the collision operation of the first calibration part and the V-shaped groove is continuously executed until the station calibration index is met.
For example, if the station calibration index is not satisfied, it is determined whether the collision point of the nth and (n + 1) th collisions is located on the inner wall of the same side of the "V" shaped groove 211, and if so, the manipulator 100 is controlled to step in the previous stepping direction and stepping distance, and the manipulator 100 is controlled to move in the collision direction until the first calibration part 110 collides with the inner wall of the "V" shaped groove 211 for the (n + 2) th collision; if not, the robot 100 is controlled to step in the opposite direction of the previous step and at a step distance smaller than the previous step, and the robot 100 is controlled to move in the collision direction until the first marking part 110 collides with the inner wall of the "V" shaped groove 211 for the (n + 2) th time. And circulating until the station calibration indexes are met.
In order to more clearly illustrate the technical solution of the present invention, the technical solution of the present invention is described below with reference to specific examples.
In the prior art, the first calibration part collides with the V-shaped groove of the second calibration part on the workpiece table, and continuously collides with the left side and the right side of the V-shaped groove respectively to fit curves on two sides of the V-shaped groove respectively, so that the center position of the V-shaped groove is calculated to be used as a handover station. Fig. 6 is a schematic diagram showing the relative positions of the first calibration portion and the "V" -shaped groove in an ideal case where, as shown in fig. 6, the center line of the first calibration portion 110 (i.e., the axis of the calibration wheel) and the center line of the "V" -shaped groove 211 should intersect in the X-axis direction, i.e., the center line of the "V" -shaped groove 211 passes through the center of the calibration wheel. Based on the current mechanical design size, as shown in fig. 6, the distance that one side of the "V" groove can collide is 3.64mm, and considering that the mounting error is 2mm, the distance that the robot arm can collide is 1.64mm at the minimum. In the prior art, in order to achieve a fitting curve and an error calibration window (0.1mm), a fixed stepping distance of 0.1mm is adopted, and since the distance for the collision of the manipulator is 1.64mm at least, 16 times of collision are needed on two sides of a V-shaped groove respectively, the time required by each collision is about 5s, and at least 160s is needed for completing one calibration.
Since the installation error of the calibration wheel is 0-2mm, in the embodiment of the invention, a plurality of numerical values with the installation error of the calibration wheel being 0-2mm are taken for simulation. For example, the present invention will be described by taking an example in which the mounting error of the mounting calibration wheel is 1.87mm in the negative direction of the X axis, and the initial step distance of the robot stepping in the first step direction is 1mm, that is, the initial step distance of the robot stepping after the first collision is 1mm, and the second step distance is half the first step distance. The following table shows simulation results obtained by simulation under the above conditions, and the positions and the step conditions of the respective collision points are shown in the following table.
| Point of impact | Stepping (mm) | Calibration error (mm) |
| 1 | 0 | -1.87 |
| 2 | +1 | -0.87 |
| 3 | +1 | +0.13 |
| 4 | -0.5 | -0.37 |
| 5 | +0.25 | -0.12 |
| 6 | +0.25 | +0.13 |
| 7 | -0.125 | +0.005 |
| 8 | -0.125 | -0.12 |
| 9 | +0.0625 | -0.0575 |
| 10 | +0.0625 | 0.005 |
Referring to the table above, the calibration process of the manipulator handover station comprises the following steps:
1. controlling the manipulator to move forward along the Y axis, and enabling the calibration wheel to collide with the V-shaped groove for the first time to generate a collision point 1, wherein the collision point 1 is positioned on a first inner wall 2111 of the V-shaped groove 211;
2. controlling the mechanical hand to retreat along the negative direction of the Y axis for a preset distance, then stepping 1mm towards the positive direction of the X axis, and then controlling the mechanical hand to move along the positive direction of the Y axis until the calibration wheel collides with the V-shaped groove 211 to generate a collision point 2 and a collision point 2;
3. determining that the collision point 2 is still on the first inner wall 2111 of the V-shaped groove 211 through the light spot coordinate information detected by the four-quadrant sensor;
4. controlling the mechanical hand to retreat along the negative direction of the Y axis for a preset distance, then stepping 1mm towards the positive direction of the X axis, and then controlling the mechanical hand to move along the positive direction of the Y axis until the calibration wheel collides with the V-shaped groove 211 to generate a collision point 3;
5. determining that the collision point 3 is positioned on the second inner wall 2112 of the V-shaped groove 211 through the coordinate information of the light spot detected by the four-quadrant sensor;
6. controlling the mechanical hand to retreat along the negative direction of the Y axis for a preset distance, then stepping 0.5mm towards the negative direction of the X axis, and then controlling the mechanical hand to move along the positive direction of the Y axis until the calibration wheel collides with the V-shaped groove 211 to generate a collision point 4;
7. determining that the collision point 4 is positioned on the first inner wall 2111 of the V-shaped groove 211 through the coordinate information of the light spot detected by the four-quadrant sensor;
8. controlling the mechanical hand to retreat along the negative direction of the Y axis for a preset distance, then stepping the mechanical hand by 0.25mm towards the positive direction of the X axis, and then controlling the mechanical hand to move along the positive direction of the Y axis until the calibration wheel collides with the V-shaped groove 211 to generate a collision point 5;
and repeating the steps until the station calibration index is finished, namely the absolute value of the calibration error is less than or equal to the station calibration error window, wherein in the embodiment of the invention, the calibration error window is 0.1 mm. As shown in the table, the absolute value (0.0575mm) of the calibration error (-0.0575mm) can be smaller than the calibration error window only by colliding 9 times.
A large amount of simulation data show that in the embodiment of the invention, the initial stepping distance for stepping in the first stepping direction is 1mm, namely the initial stepping distance for stepping after the first collision is 1mm, the second stepping distance is half of the first stepping distance, and the station calibration index can be met only by colliding for 9 times at most. The time required by each collision is about 5s, the total time is 45s, and the calibration error window can be adjusted to flexibly improve the calibration precision.
Therefore, optionally, in the embodiment of the present invention, determining whether the station calibration index is met may include:
the number of times of collision between the first calibration part 110 and the V-shaped groove 211 is determined, and when the number of times of collision is determined to reach the preset number (9 times), the station calibration index is determined to be met.
According to the manipulator transfer station calibration method provided by the embodiment of the invention, after the first calibration part collides with the V-shaped groove, whether the closest collision point of the two previous collisions is positioned on the inner wall of the same side of the V-shaped groove is judged, if yes, the manipulator is controlled to step in the previous stepping direction and the previous stepping distance, and the manipulator is controlled to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove; if not, the manipulator is controlled to step in a second stepping direction and a second stepping distance, and the manipulator is controlled to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove. The second stepping direction is opposite to the previous stepping direction, the second stepping distance is smaller than the previous stepping distance, and the number of times of collision between the first calibration part and the V-shaped groove is reduced by gradually reducing the stepping distance on the premise of ensuring the calibration precision, so that the calibration time is reduced, the calibration efficiency is improved, and the calibration precision can be flexibly improved by adjusting the calibration error window.
Example two
The second embodiment of the invention provides a manipulator transfer station calibration device, wherein a manipulator comprises a first calibration part, a workpiece table comprises a second calibration part corresponding to the first calibration part, the second calibration part is provided with a V-shaped groove, and the inner wall of the V-shaped groove comprises a first inner wall and a second inner wall which are arranged on two sides. Fig. 7 is a schematic structural diagram of a manipulator transfer station calibration apparatus according to a second embodiment of the present invention, and as shown in fig. 7, the apparatus specifically includes:
the first control module 401 is configured to control the manipulator to step in a first step direction and a first step distance after controlling the movement of the manipulator to drive the first calibration portion to collide with the inner wall of the V-shaped groove for the nth-1 time, and control the manipulator to move in a collision direction until the first calibration portion collides with the inner wall of the V-shaped groove for the nth time, where the first step direction is parallel to a direction from the first inner wall to the second inner wall, the collision direction is perpendicular to the first step direction, and n is greater than or equal to 2;
a judging module 402, configured to judge whether the collision point of the n-1 st collision and the collision point of the nth collision are located on the inner wall on the same side of the V-shaped groove;
a second control module 403, configured to, when determining that a collision point of the first calibration portion colliding with the "V" shaped groove for the nth time and a collision point of the first calibration portion colliding with the "V" shaped groove for the n-1 th time are located on the inner wall on the same side of the "V" shaped groove, control the manipulator to step in the first step direction and the first step distance, and control the manipulator to move along the collision direction until the first calibration portion collides with the inner wall of the "V" shaped groove for the n +1 th time;
a third control module 404, configured to, when it is determined that a collision point of the first calibration portion colliding with the "V" shaped groove for the nth time and a collision point of the first calibration portion colliding with the "V" shaped groove for the n-1 th time are located on the inner walls on different sides of the "V" shaped groove, control the manipulator to step in a second stepping direction and a second stepping distance, and control the manipulator to move in the collision direction until the first calibration portion collides with the inner wall of the "V" shaped groove for the n +1 th time, where the second stepping direction is opposite to the first stepping direction, and the second stepping distance is smaller than the first stepping distance;
a station calibration judging module 405, configured to judge whether a station calibration index is met every time the first calibration portion collides with the "V" shaped groove;
and a return execution module 406, configured to, when it is determined that the station calibration index is not satisfied, continue to execute the collision operation between the first calibration portion and the "V" shaped groove until the station calibration index is satisfied.
Optionally, the station calibration determining module 405 includes:
a collision number determining unit for determining the number of collisions between the first marking portion and the "V" -shaped groove;
and the station calibration index judging unit is used for determining that the station calibration index is met when the collision frequency is determined to reach the preset frequency.
Optionally, the manipulator transfer station calibration apparatus further includes a fourth control module 407, configured to control the manipulator to retreat by a preset distance in the collision direction after the first calibration portion collides with the V-shaped groove each time.
Optionally, the judging module 402 includes a judging unit, configured to determine that the collision point is located on the first inner wall or the second inner wall of the "V" shaped groove based on coordinate information of a light spot formed by the light source on the four-quadrant sensor; wherein the content of the first and second substances,
the manipulator comprises a mechanical arm, a detection mechanism and an actuator, the first calibration part is arranged on the actuator, and the actuator is connected with the mechanical arm through the detection mechanism;
the detection mechanism comprises a light source, a four-quadrant sensor and a shading part, wherein a through hole is formed in the shading part, the light source and the four-quadrant sensor are relatively fixedly arranged, the shading part is arranged between the light source and the four-quadrant sensor, and the shading part is connected with the actuator.
The manipulator transfer station calibration device can execute the manipulator transfer station calibration method provided by any embodiment of the invention, and has corresponding functional modules and beneficial effects of the execution method.
An embodiment of the present invention further provides a computer device, where the computer device includes: one or more processors; a storage device configured to store one or more programs which, when executed by the one or more processors, cause the one or more processors to implement the method for calibrating a hand-over station of a robot according to any embodiment of the present invention.
The embodiment of the present invention further provides a computer-readable storage medium, where instructions in the storage medium, when executed by a processor of a computer device, enable the computer device to perform the method for calibrating a manipulator handover station according to the above method embodiment.
It should be noted that, as for the apparatus, the computer device and the storage medium embodiment, since they are basically similar to the method embodiment, the description is relatively simple, and in relation to the description, reference may be made to part of the description of the method embodiment.
From the above description of the embodiments, it is obvious for those skilled in the art that the present invention can be implemented by software and necessary general hardware, and certainly, can also be implemented by hardware, but the former is a better embodiment in many cases. Based on such understanding, the technical solutions of the present invention may be embodied in the form of a software product, which may be stored in a computer-readable storage medium, such as a floppy disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a FLASH Memory (FLASH), a hard disk, or an optical disk of a computer, and includes instructions for enabling a computer device (which may be a robot, a personal computer, a server, or a network device) to execute the method for calibrating a robot handover station according to any embodiment of the present invention.
It should be noted that, in the above robot hand-over station calibration apparatus, each unit and each module included in the apparatus are merely divided according to the functional logic, but are not limited to the above division, as long as the corresponding functions can be realized; in addition, specific names of the functional units are only for convenience of distinguishing from each other, and are not used for limiting the protection scope of the present invention.
It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the various steps or methods may be implemented in software or firmware stored in memory and executed by suitable instruction execution devices. For example, if implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. The manipulator handover station calibration method is characterized in that a manipulator comprises a first calibration part, a workpiece table comprises a second calibration part corresponding to the first calibration part, the second calibration part is provided with a V-shaped groove, the inner wall of the V-shaped groove comprises a first inner wall and a second inner wall which are arranged on two sides, and the manipulator handover station calibration method comprises the following steps:
after the first calibration part is driven to collide with the first inner wall of the V-shaped groove for the nth-1 time by controlling the movement of the manipulator, the manipulator is controlled to step in a first step direction and a first step distance, and the manipulator is controlled to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the nth time, wherein the first step direction is the direction in which the first inner wall points to the second inner wall, the collision direction is perpendicular to the first step direction, and n is more than or equal to 2;
judging whether the collision point of the n-1 th collision and the collision point of the nth collision are positioned on the inner wall of the V-shaped groove on the same side;
if the collision point of the first calibration part colliding with the V-shaped groove for the nth time and the collision point of the first calibration part colliding with the V-shaped groove for the (n-1) th time are positioned on the inner wall on the same side of the V-shaped groove, controlling the mechanical arm to step in the first step direction and the first step distance, and controlling the mechanical arm to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the (n + 1) th time;
if the collision point of the first calibration part colliding with the V-shaped groove for the nth time and the collision point of the first calibration part colliding with the V-shaped groove for the n-1 th time are located on the inner walls of the V-shaped groove on different sides, controlling the mechanical arm to step in a second stepping direction and a second stepping distance, and controlling the mechanical arm to move along the collision direction until the first calibration part collides with the inner wall of the V-shaped groove for the n +1 th time, wherein the second stepping direction is opposite to the first stepping direction, and the second stepping distance is smaller than the first stepping distance;
the manipulator handover station calibration method further comprises the following steps:
and judging whether a station calibration index is met or not when the first calibration part collides with the V-shaped groove every time, and if the station calibration index is not met, continuing to execute the collision operation of the first calibration part and the V-shaped groove until the station calibration index is met.
2. The method of claim 1, wherein the second step distance is half the first step distance.
3. The method for calibrating a transfer station of a manipulator according to claim 1, wherein said determining whether a station calibration index is satisfied comprises:
determining the number of times of collision between the first calibration part and the V-shaped groove;
and when the collision frequency is determined to reach the preset frequency, determining that the station calibration index is met.
4. The method for calibrating the transfer station of the robot hand as claimed in claim 1, further comprising, after each collision of the first calibration portion with the V-shaped groove:
and controlling the manipulator to retreat for a preset distance along the collision direction.
5. The method for calibrating a manipulator transfer station according to claim 1, wherein the step of determining whether the collision point of the n-1 st collision and the collision point of the n-th collision are located on the inner wall of the same side of the V-shaped groove comprises:
determining that the collision point is positioned on the first inner wall or the second inner wall of the V-shaped groove based on the coordinate information of the light spot formed on the four-quadrant sensor by the light source; wherein the content of the first and second substances,
the manipulator comprises a mechanical arm, a detection mechanism and an actuator, the first calibration part is arranged on the actuator, and the actuator is connected with the mechanical arm through the detection mechanism;
the detection mechanism comprises a light source, a four-quadrant sensor and a shading part, wherein a through hole is formed in the shading part, the light source and the four-quadrant sensor are relatively fixedly arranged, the shading part is arranged between the light source and the four-quadrant sensor, and the shading part is connected with the actuator.
6. The method for calibrating the transfer station of the manipulator according to claim 5, wherein the determining that the collision point is located on the first inner wall or the second inner wall of the V-shaped groove based on the coordinate information of the light spot formed by the light source on the four-quadrant sensor comprises:
if the light spot is positioned in the first quadrant or the fourth quadrant of the four-quadrant sensor, determining that the collision point is positioned on the first inner wall of the V-shaped groove;
and if the light spot is positioned in the second quadrant or the third quadrant of the four-quadrant sensor, determining that the collision point is positioned on the second inner wall of the V-shaped groove.
7. The method of claim 3, wherein the initial step distance for the robot to step in the first step direction is 1mm, and the predetermined number of times is 9.
8. The utility model provides a manipulator handing-over station calibration device, its characterized in that, the manipulator includes first mark portion, the work piece platform include with the second mark portion that first mark portion corresponds, the second is markd the portion and is had "V" shape groove, the inner wall in "V" shape groove includes the first inner wall and the second inner wall of both sides, manipulator handing-over station calibration device includes:
the first control module is used for controlling the mechanical arm to step in a first step direction and a first step distance after controlling the movement of the mechanical arm to drive the first marking part to collide with the first inner wall of the V-shaped groove for n-1 times, and controlling the mechanical arm to move along the collision direction until the first marking part collides with the inner wall of the V-shaped groove for n times, wherein the first step direction is a direction in which the first inner wall points to the second inner wall, the collision direction is perpendicular to the first step direction, and n is more than or equal to 2;
the judging module is used for judging whether the collision point of the n-1 th collision and the collision point of the nth collision are positioned on the inner wall of the V-shaped groove on the same side;
the second control module is used for controlling the mechanical arm to step in the first step direction and the first step distance and controlling the mechanical arm to move along the collision direction until the first marking part and the inner wall of the V-shaped groove collide for the n +1 th time when the collision point of the first marking part and the n-1 th time of the V-shaped groove are determined to be positioned on the inner wall on the same side of the V-shaped groove;
a third control module, configured to control the manipulator to step in a second stepping direction and a second stepping distance and control the manipulator to move in the collision direction to the first calibration portion and collide with the inner wall of the V-shaped groove for n +1 th time when it is determined that a collision point at which the first calibration portion collides with the V-shaped groove and a collision point at which the first calibration portion collides with the V-shaped groove for n-1 th time are located on the inner wall of the V-shaped groove on different sides, where the second stepping direction is opposite to the first stepping direction, and the second stepping distance is smaller than the first stepping distance;
the station calibration judging module is used for judging whether the station calibration index is met or not when the first calibration part collides with the V-shaped groove every time;
and the return execution module is used for continuously executing the collision operation of the first calibration part and the V-shaped groove until the station calibration index is met when the station calibration index is determined not to be met.
9. A computer device, comprising:
one or more processors;
a memory for storing one or more programs;
when executed by the one or more processors, cause the one or more processors to implement the method of robot hand-off station calibration of any of claims 1-7.
10. A computer-readable storage medium, having stored thereon a computer program, wherein the program, when executed by a processor, implements the method for robot hand-off station calibration of any of claims 1-7.
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