CN112289884A - Laser redundancy photoelectric integrated circuit - Google Patents

Laser redundancy photoelectric integrated circuit Download PDF

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Publication number
CN112289884A
CN112289884A CN202011254632.2A CN202011254632A CN112289884A CN 112289884 A CN112289884 A CN 112289884A CN 202011254632 A CN202011254632 A CN 202011254632A CN 112289884 A CN112289884 A CN 112289884A
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laser
waveguide
lasers
integrated circuit
input end
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冯大增
王奕琼
梁虹
武爱民
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
    • H01L31/125Composite devices with photosensitive elements and electroluminescent elements within one single body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0203Containers; Encapsulations, e.g. encapsulation of photodiodes

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  • Microelectronics & Electronic Packaging (AREA)
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  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
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  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)

Abstract

The invention relates to the technical field of semiconductors and discloses a laser redundancy photoelectric integrated circuit. The photoelectric integrated circuit comprises N lasers and a multi-mode interferometer, wherein the number of the lasers is N, and N is an integer greater than or equal to 2; the multimode interferometer comprises input ends and at least two output ends, wherein the number of the input ends is M, and M is an integer which is more than or equal to N; the N lasers are connected with N input ends in the M input ends in a one-to-one corresponding waveguide manner; the multimode interferometer is used for determining the remaining N-L non-fault lasers as target lasers when L lasers in the N lasers have faults, receiving light generated by the target lasers by utilizing N-L input ends corresponding to the target lasers, and equally distributing the received light to the at least two output ends, wherein L is a natural number smaller than N. Therefore, the photoelectric integrated circuit provided by the invention has the advantages of high reliability and low cost.

Description

Laser redundancy photoelectric integrated circuit
Technical Field
The invention relates to the technical field of semiconductors, in particular to a laser redundancy photoelectric integrated circuit.
Background
With the increasing requirements of people on information transmission and processing speed and the coming of the multi-core computing era, electrical interconnection based on metal becomes a development bottleneck due to defects of overheating, delay, electronic interference and the like. And the problem can be effectively solved by adopting optical interconnection to replace electrical interconnection. Silicon-based optical interconnects are preferred for their incomparable cost and technical advantages in the implementation of optical interconnects. The silicon-based optical interconnection not only can play the advantages of high optical interconnection speed, large bandwidth, interference resistance, low power consumption and the like, but also can fully utilize the advantages of mature process, high-density integration, high yield, low cost and the like of a microelectronic standard Complementary Metal Oxide Semiconductor (CMOS), and the development of the silicon-based optical interconnection can certainly promote the development of a new generation of high-performance computer and data communication system, and has wide market application prospect.
A typical optoelectronic integrated circuit (PIC) consists of a laser, a modulator and a detector (PD). For example: in the optoelectronic integrated circuit based on III-V material, the laser is integrated monolithically; in silicon-based optoelectronic integrated circuits, lasers are integrated using flip-chip bonding, or lasers fabricated by bonding/epitaxy III-V materials directly on silicon.
In all components of the optoelectronic integrated circuit, because the laser needs to work for many years at high current and high temperature, the reliability of the laser is the worst, and the reliability of the optoelectronic integrated circuit needing the laser is poor.
Disclosure of Invention
The invention aims to solve the technical problem that the photoelectric integrated circuit in the prior art is poor in reliability.
In order to solve the technical problem, the application discloses a laser redundancy optoelectronic integrated circuit, which comprises a laser and a multimode interferometer;
the number of the lasers is N, and N is an integer greater than or equal to 2;
the multimode interferometer comprises input ends and at least two output ends, wherein the number of the input ends is M, and M is an integer which is more than or equal to N;
the N lasers are connected with N input ends in the M input ends in a one-to-one corresponding waveguide manner;
the multimode interferometer is used for determining the remaining N-L non-fault lasers as target lasers when L lasers in the N lasers have faults, receiving light generated by the target lasers by utilizing N-L input ends corresponding to the target lasers, and equally distributing the received light to the at least two output ends, wherein L is a natural number smaller than N.
Optionally, N is 2, the laser includes a first laser and a second laser;
m is 2, the input terminals include a first input terminal and a second input terminal;
the multimode interferometer further comprises a first output terminal and a second output terminal;
the first laser is connected with the first input end waveguide;
the second laser is connected with the second input end waveguide;
the multimode interferometer is used for receiving the light generated by the second laser by using the second input end and equally distributing the light generated by the second laser to the first output end and the second output end when the first laser has a fault.
Optionally, N is 2, the laser includes a first laser and a second laser;
m is 2, the input terminals include a first input terminal and a second input terminal;
the multimode interferometer further comprises a first output terminal, a second output terminal, a third output terminal and a fourth output terminal;
the first laser is connected with the first input end waveguide;
the second laser is connected with the second input end waveguide;
the multimode interferometer is used for receiving the light generated by the second laser by using the second input end when the first laser has a fault, and equally distributing the light generated by the second laser to the first output end, the second output end, the third output end and the fourth output end.
Optionally, N is 3, and the laser includes a first laser, a second laser, and a third laser;
m is 3, the input terminals include a first input terminal, a second input terminal and a third input terminal;
the multimode interferometer further comprises a first output terminal and a second output terminal;
the first laser is connected with the first input end waveguide;
the second laser is connected with the second input end waveguide;
the third laser is connected with the third input end waveguide;
the multimode interferometer is used for receiving the light generated by the second laser and the third laser by using the second input end and the third input end respectively and equally distributing the light to the first output end and the second output end when the first laser has a fault.
Optionally, the waveguide is a silicon waveguide.
Optionally, the waveguide has a height of 0.1 to 5 microns.
Optionally, the waveguide has a width of 0.1 to 5 microns.
Optionally, a modulator is further included;
the number of the modulators is equal to the number of the output ends of the multi-mode interferometer;
the modulator is connected with the output end of the multimode interferometer in a one-to-one corresponding waveguide way.
Optionally, further comprising an optical mode converter;
the number of the optical mode converters is equal to the number of the modulators;
the optical mode converters are connected to the one-to-one waveguide of the modulators.
Optionally, a multiplexer is further included;
the multiplexer is connected to the modulator waveguide.
By adopting the technical scheme, the laser redundancy photoelectric integrated circuit provided by the application has the following beneficial effects:
the application provides a redundant optoelectronic integrated circuit of laser includes a plurality of lasers and multimode interferometer to realize the redundancy of laser, and a plurality of inputs of a plurality of lasers and multimode interferometer are the one-to-one waveguide connection, when a laser of work trouble, multimode interferometer can be through other inputs to receive the light of a laser in the remaining not trouble laser, it can have light wave transmission to have guaranteed this integrated circuit, when having improved this optoelectronic integrated circuit's reliability, the cost is reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a laser-redundant optoelectronic integrated circuit according to the present application;
FIG. 2 is a schematic diagram of an alternative laser redundancy optoelectronic integrated circuit according to the present application;
FIG. 3 is a schematic diagram of another alternative laser redundancy optoelectronic integrated circuit of the present application;
FIG. 4 is a schematic diagram of another alternative laser redundancy optoelectronic integrated circuit of the present application;
FIG. 5 is a schematic diagram of another alternative laser-redundant optoelectronic integrated circuit of the present application.
The following is a supplementary description of the drawings:
1-a laser; 11-a first laser; 12-a second laser; 2-a multimode interferometer; 3-a modulator; 4-optical mode converter.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the present application. In the description of the present application, it is to be understood that the terms "upper", "lower", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.
As shown in fig. 1, fig. 1 is a schematic structural diagram of a laser-redundant optoelectronic integrated circuit according to the present application. The application discloses a laser redundant photoelectric integrated circuit, which comprises a laser 1 and a multimode interferometer 2; the number of the lasers 1 is N, and N is an integer greater than or equal to 2; the multimode interferometer 2 comprises input ends and at least two output ends, wherein the number of the input ends is M, and M is an integer which is more than or equal to N; the N lasers 1 are connected with N input ends in the M input ends in a one-to-one corresponding waveguide manner; the multimode interferometer 2 is configured to determine, when L lasers 1 have a failure in the N lasers 1, remaining N-L non-failed lasers 1 as target lasers 1, receive light generated by the target lasers 1 through N-L input ends corresponding to the target lasers 1, and equally distribute the received light to the at least two output ends, where L is a natural number smaller than N. Therefore, the photoelectric integrated circuit has the advantages of high reliability and low cost.
In one existing application scenario, an optical switch is used to control multiple lasers 1, however, the optical switch control requires special control of the optical switch, increases complexity of an optical path, and significantly increases optical loss and power consumption.
The laser redundancy optoelectronic integrated circuit provided by the application uses a multimode interferometer (MMI) 2, the multimode interferometer is a passive device, an additional control device is not needed to control the switching work of the multimode interferometer, the influence on the laser performance is small, and the cost is reduced.
As can be seen from fig. 1, the principle of controlling N lasers 1 by the laser redundancy optoelectronic integrated circuit provided in the present application is that when the laser is turned on, the light of one laser a of the N lasers 1 is equally distributed to at least two output channels of the multimode interferometer 2, and the light generated by each laser of the N lasers 1 can share multiple optical channels, for example, if the multimode interferometer 2 has 2 outputs, the light generated by one laser can be shared by two optical channels, and if the multimode interferometer 2 has M outputs, the light generated by one laser 1 can be shared by M optical channels; when the laser A fails, the power of the laser A is turned off, the power of the other non-failed one of the N lasers 1 is selected to be turned on, and the input end corresponding to the multimode interferometer 2 receives the light of the laser 1 and equally distributes the light to the M optical channels without reconfiguration of the optical path.
In an alternative embodiment, as shown in fig. 2, fig. 2 is a schematic structural diagram of an optional laser redundancy optoelectronic integrated circuit according to the present application. N is 2, the laser 1 comprises a first laser 11 and a second laser 12; m is 2, the input terminals include a first input terminal and a second input terminal; the multimode interferometer 2 further comprises a first output and a second output; the first laser 11 is connected to the first input end waveguide; the second laser 12 is connected to the second input waveguide; the multimode interferometer 2 is configured to receive the light generated by the second laser 12 through the second input terminal and equally distribute the light generated by the second laser 12 to the first output terminal and the second output terminal when the first laser 11 is defective.
In another alternative embodiment, as shown in fig. 3, fig. 3 is a schematic structural diagram of another alternative laser redundancy optoelectronic integrated circuit of the present application. N is 2, the laser 1 comprises a first laser 11 and a second laser 12; m is 2, the input terminals include a first input terminal and a second input terminal; the multimode interferometer 2 further comprises a first output terminal, a second output terminal, a third output terminal and a fourth output terminal; the first laser 11 is connected to the first input end waveguide; the second laser 12 is connected to the second input waveguide; the multimode interferometer 2 is configured to receive the light generated by the second laser 12 through the second input terminal and equally distribute the light generated by the second laser 12 to the first output terminal, the second output terminal, the third output terminal and the fourth output terminal when the first laser 11 fails.
In another alternative embodiment, where N is 3, the laser 1 includes a first laser 11, a second laser 12, and a third laser; m is 3, the input terminals include a first input terminal, a second input terminal and a third input terminal; the multimode interferometer 2 further comprises a first output and a second output; the first laser 11 is connected to the first input end waveguide; the second laser 12 is connected to the second input waveguide; the third laser is connected with the third input end waveguide; the multimode interferometer 2 is configured to receive light generated by the second laser 12 and the third laser via the second input terminal and the third input terminal, respectively, and equally distribute the light to the first output terminal and the second output terminal when the first laser 11 is defective.
It should be noted that the number of the input ends of the multimode interferometer 2 may also be 4, 5, and 6, and the number of the output ends of the multimode interferometer 2 may also be 4, 5, and 6, and preferably, the number of the input ends and the output ends of the multimode interferometer 2 are both even numbers.
In an alternative embodiment, the waveguide is a silicon waveguide.
In an alternative embodiment, the height of the waveguide is 0.1 to 5 microns, and optionally the height of the waveguide is 2.0-5.0 microns or 2.8-3.2 microns or 2.9-3.1 microns.
In an alternative embodiment, the waveguide has a width of 0.1 to 5 microns, and optionally the waveguide has a width of 2.0-5.0 microns or 2.0-4.0 microns.
In an alternative embodiment, when the number of the output ends of the multimode interferometer 2 is greater than 3, the laser 1 is a high-power laser 1, and the waveguide is a large-size waveguide, that is, the width and the height of the waveguide are both greater than 2 microns, preferably, the optoelectronic integrated circuit is formed based on a silicon-based SOI optoelectronic technology with a thickness of 3 microns, so that the formed silicon waveguide is equivalent to the spot size of the laser light generated by the laser 1, and the coupling loss of the laser light is low, which can effectively reduce the nonlinear effect of the high-power laser light in the waveguide.
In another alternative embodiment, as shown in fig. 4, fig. 4 is a schematic structural diagram of another alternative laser redundancy optoelectronic integrated circuit of the present application; the optoelectronic integrated circuit further comprises a modulator 3; the number of modulators 3 is equal to the number of outputs of the multimode interferometer 2; the modulator 3 is connected with the output end of the multimode interferometer 2 by one-to-one corresponding waveguide, and can be applied to an integrated optical receiver or other optical communication products needing laser.
In another alternative embodiment, as shown in fig. 5, fig. 5 is a schematic structural diagram of another alternative laser redundancy optoelectronic integrated circuit of the present application; the optoelectronic integrated circuit further comprises an optical mode converter 4; the number of optical mode converters 4 is equal to the number of modulators 3; the optical mode converter 4 is connected with the one-to-one corresponding waveguide of the modulator 3, and the optical mode converter 4 is used for connecting with an external optical fiber and can be applied to an integrated optical receiver or other optical communication products needing laser.
In another alternative embodiment, the optoelectronic integrated circuit further comprises a multiplexer; the multiplexer is waveguide-connected to the modulator 3 and is used to multiplex the light of different wavelengths transmitted from the modulator 3.
The above description is only exemplary of the present application and should not be taken as limiting, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A laser-redundant optoelectronic integrated circuit comprising a laser (1) and a multimode interferometer (2);
the number of the lasers (1) is N, and N is an integer greater than or equal to 2;
the multi-mode interferometer (2) comprises input ends and at least two output ends, wherein the number of the input ends is M, and M is an integer which is larger than or equal to N;
the N lasers (1) are connected with N input ends in the M input ends in a one-to-one corresponding waveguide manner;
the multimode interferometer (2) is used for determining the remaining N-L non-fault lasers (1) as target lasers (1) when L lasers (1) in the N lasers (1) have faults, receiving light generated by the target lasers (1) by utilizing N-L input ends corresponding to the target lasers (1), and equally distributing the received light to the at least two output ends, wherein L is a natural number smaller than N.
2. The laser-redundant optoelectronic integrated circuit of claim 1, wherein N is 2, the laser (1) comprises a first laser (11) and a second laser (12);
m is 2, and the input ends comprise a first input end and a second input end;
the multimode interferometer (2) further comprises a first output and a second output;
the first laser (11) is connected with the first input end waveguide;
the second laser (12) is connected with the second input end waveguide;
the multimode interferometer (2) is used for receiving the light generated by the second laser (12) by the second input end when the first laser (11) has a fault, and equally distributing the light generated by the second laser (12) to the first output end and the second output end.
3. The laser-redundant optoelectronic integrated circuit of claim 1, wherein N is 2, the laser (1) comprises a first laser (11) and a second laser (12);
m is 2, and the input ends comprise a first input end and a second input end;
the multimode interferometer (2) further comprises a first output terminal, a second output terminal, a third output terminal and a fourth output terminal;
the first laser (11) is connected with the first input end waveguide;
the second laser (12) is connected with the second input end waveguide;
the multimode interferometer (2) is used for receiving the light generated by the second laser (12) by using the second input end when the first laser (11) has a fault, and equally distributing the light generated by the second laser (12) to the first output end, the second output end, the third output end and the fourth output end.
4. The laser-redundant optoelectronic integrated circuit of claim 1, wherein N is 3, and the laser (1) comprises a first laser (11), a second laser (12), and a third laser;
m is 3, and the input ends comprise a first input end, a second input end and a third input end;
the multimode interferometer (2) further comprises a first output and a second output;
the first laser (11) is connected with the first input end waveguide;
the second laser (12) is connected with the second input end waveguide;
the third laser is connected with the third input end waveguide;
the multimode interferometer (2) is used for receiving the light generated by the second laser (12) and the third laser by using the second input end and the third input end respectively and equally distributing the light to the first output end and the second output end when the first laser (11) has a fault.
5. The laser-redundant optoelectronic integrated circuit of claim 1, wherein the waveguide is a silicon waveguide.
6. The laser-redundant optoelectronic integrated circuit of claim 1, wherein the waveguide has a height of 0.1 to 5 microns.
7. The laser-redundant optoelectronic integrated circuit of claim 6, wherein the waveguide has a width of 0.1 to 5 microns.
8. The laser-redundant optoelectronic integrated circuit of claim 1, further comprising a modulator (3);
the number of modulators (3) is equal to the number of outputs of the multimode interferometer (2);
the modulator (3) is connected with the output end of the multimode interferometer (2) in a waveguide-to-waveguide manner.
9. The laser-redundant optoelectronic integrated circuit of claim 8, further comprising an optical mode converter (4);
the number of optical mode converters (4) is equal to the number of modulators (3);
the optical mode converters (4) are connected with the modulators (3) in a waveguide-to-waveguide manner.
10. The laser-redundant optoelectronic integrated circuit of claim 8, further comprising a multiplexer (5);
the multiplexer (5) is connected with the modulator (3) in a waveguide way.
CN202011254632.2A 2020-11-11 2020-11-11 Laser redundancy photoelectric integrated circuit Pending CN112289884A (en)

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CN106921112A (en) * 2017-04-13 2017-07-04 中国科学院半导体研究所 Multi-wavelength silicon substrate hybrid integrated slot laser integrated optical sources and preparation method thereof
CN107710528A (en) * 2015-06-25 2018-02-16 华为技术有限公司 The variable grid laser of fast tunable
US20180294621A1 (en) * 2017-04-06 2018-10-11 Rockley Photonics Limited Reliable laser light source
CN109633611A (en) * 2018-12-06 2019-04-16 上海交通大学 Integrated two-dimensional multi-beam laser radar emission system based on butler matrix
CN110455405A (en) * 2018-05-08 2019-11-15 华为技术有限公司 Beam splitter, optical power monitoring device and chip of laser

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004253494A (en) * 2003-02-19 2004-09-09 Hitachi Ltd Light controller for communication
US20150155945A1 (en) * 2012-07-30 2015-06-04 Nec Corporation Optical transmitter and optical communication device
CN103929252A (en) * 2014-04-25 2014-07-16 华中科技大学 Coherent receiver based on APD
CN107710528A (en) * 2015-06-25 2018-02-16 华为技术有限公司 The variable grid laser of fast tunable
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