CN112286233A - Working method of double-measuring-head automatic alignment system based on laser displacement sensor - Google Patents
Working method of double-measuring-head automatic alignment system based on laser displacement sensor Download PDFInfo
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- CN112286233A CN112286233A CN202011042328.1A CN202011042328A CN112286233A CN 112286233 A CN112286233 A CN 112286233A CN 202011042328 A CN202011042328 A CN 202011042328A CN 112286233 A CN112286233 A CN 112286233A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 239000000523 sample Substances 0.000 abstract description 4
- 238000003384 imaging method Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
本发明公开了一种基于激光位移传感器的双测头自动对准系统的工作方法，双测头自动对准系统主要由机械系统和测控系统两部分组成；其中机械系统包括侧挡板、工件台、安装板、上自动滑台、上传感器夹具，上传感器、下传感器夹具、下传感器、下自动滑台、电机、支架；测控系统控制自动滑台带动传感器在XOY平面内相对运动，通过采集有限点的测量值拟合曲线，在拟合曲线中找到峰值点，工控机控制电机将传感器移动到峰值点处，以此控制上下两个传感器对准。本发明提出的自动对准解决了一般对准过程带来的准确度不高的问题；本发明还可以在对准后拆卸，安装，解决了对准的一次性问题。
The invention discloses a working method of a dual-probe automatic alignment system based on a laser displacement sensor. The dual-probe automatic alignment system is mainly composed of a mechanical system and a measurement and control system; wherein the mechanical system includes a side baffle and a workpiece table. , mounting plate, upper automatic sliding table, upper sensor fixture, upper sensor, lower sensor fixture, lower sensor, lower automatic sliding table, motor, bracket; the measurement and control system controls the automatic sliding table to drive the sensor to move relatively in the XOY plane, and through the limited acquisition The measured value of the point is fitted to the curve, and the peak point is found in the fitted curve. The industrial computer controls the motor to move the sensor to the peak point, so as to control the alignment of the upper and lower sensors. The automatic alignment proposed by the present invention solves the problem of low accuracy caused by the general alignment process; the present invention can also be disassembled and installed after alignment, thereby solving the one-time problem of alignment.
Description
The application is as follows: 2017.02.17, application No. 201710085083.2, divisional application entitled "dual stylus automatic alignment system based on laser displacement sensor".
Technical Field
The invention relates to a double-measuring-head automatic alignment system based on a laser displacement sensor.
Background
The sensors are various in types and widely applied to various fields of social production and scientific research. The laser displacement sensor is rapidly developed in recent years, and the measuring efficiency and precision are greatly improved in the fields of part size measurement, three-dimensional profile measurement and product quality detection. In some measurement occasions, the method is applied to the double measuring head alignment measurement of the thickness or the diameter of a measured piece.
In general, in the measurement application of the double measuring heads, it is difficult to align the measuring heads on the same straight line, and particularly, a sensor with extremely high accuracy, such as a laser displacement sensor, has higher requirement on the accuracy of alignment, so that the accuracy in measurement can be ensured.
For a laser displacement sensor, in the alignment process, two measuring heads are generally manually adjusted to be aligned, so that a large positioning error exists, the laser displacement sensor is used as a high-precision sensor, and the positioning errors can bring a large influence on a measurement result. In most cases, a laser displacement sensor is fixed, for example, a pre-alignment device is disclosed in a patent of a laser displacement sensor-based and alignment device and system (CN 104635753A), the scheme fixes a laser double-probe, but the alignment problem of the laser double-probe is not considered, and as a system mentioned in a patent of a laser displacement sensor-controlled pre-alignment method, the system relates to the technical field of lithography, and the alignment of a layout center and a mask plate center in the lithography process is solved by using a high-precision platform of an imaging system and the laser displacement sensor, and the adoption of the imaging system means the increase of the manufacturing cost of the system.
And processing the data by adopting a curve fitting method in the control part. So-called curve fitting is from the data set
The general regularity is found out and a curve which can better reflect the general regularity is constructed
. The interpolation method is also a method to deal with such problems, but has significant disadvantages, firstly, because the data inevitably carries errors, this time it requires that the approximation function p (x) crosses all known points, which is equivalent to retaining all errors. In addition, because many experimental data are often obtained, if polynomial interpolation is still adopted, a polynomial with a higher degree is inevitably obtained, so that not only is the calculation complicated, but also the convergence and stability of p (x) are difficult to ensure, a lattice phenomenon occurs, and the approximation effect is poor.
The curve p (x) can be fitted as close as possible to all data points with all errors minimized, so the curve fitting method is a good choice.
Disclosure of Invention
The invention aims to provide a double-measuring-head automatic alignment system based on a laser displacement sensor, which is reliable in precision and convenient to adjust.
The technical solution of the invention is as follows:
a double-measuring-head automatic alignment system based on a laser displacement sensor is characterized in that: the system mainly comprises a mechanical system and a measurement and control system;
the mechanical system comprises a support, a side baffle is arranged at the upper part of the support, an upper mounting plate is arranged at the top of the support, an upper automatic sliding table is mounted on the lower surface of the upper mounting plate, an upper sensor is mounted on the upper automatic sliding table through an upper sensor clamp, a workpiece table arranged on the support is arranged below the upper automatic sliding table, a round hole with the diameter equal to that of a spherical reference object is reserved in the center of the workpiece table, the reference object is placed in the round hole, a lower automatic sliding table mounted on the support is arranged below the workpiece table, and a lower sensor is mounted on the lower automatic sliding table through a lower sensor clamp; the upper sensor and the lower sensor are respectively arranged on the upper side and the lower side of the reference object;
the measurement and control system adopts a motion control card to realize control, and the motion control card controls the upper automatic sliding table and the lower automatic sliding table to move along the X, Y direction through signals given by the upper computer.
The workpiece table is in a form that the workpiece table can be directly drawn out from the bracket.
The sensors move along with the automatic sliding table in the X-Y direction, a curve is fitted by collecting data of finite points, peak points are found, and automatic alignment of the upper sensor and the lower sensor is realized.
Two driving motors for driving the sliding tables to move in the directions x and y which are perpendicular to each other are respectively arranged on the upper automatic sliding table and the lower automatic sliding table.
The working process is as follows:
the first step is as follows: placing a reference object in a workpiece table, and mounting the workpiece table on a bracket;
the second step is that: installing a laser displacement sensor on an automatic sliding table, wherein an upper sensor and a lower sensor are respectively fixed on the upper automatic sliding table and the lower automatic sliding table and are distributed on the upper side and the lower side of a reference object;
the third step: starting a power supply, and enabling the upper sensor and the lower sensor to be at initial measurement positions; setting parameters of a laser double-measuring head and an X, Y-direction movement mechanism; starting a program, driving a sensor to move along the X direction by a system through a motor driving sliding table, collecting and receiving data of a finite point measured by the sensor, resetting the sensor, performing least square polynomial curve fitting by using the data through a Labview platform to fit a curve, driving the motor to drive the sensor to the vertex in the X direction, and taking the position of the sensor at the moment as an initial position in the Y direction; the control motor drives the sliding table to drive the sensor to move in the Y direction, data of the sensor are collected and received, the sensor is reset, a Y-direction curve is fitted through the Labview platform, the driving motor drives the sensor to the top point of the Y-direction curve, and at the moment, the upper sensor and the lower sensor are both aligned to the center of a sphere, namely, the upper sensor and the lower sensor are aligned.
The invention has the beneficial effects that: (1) the automatic alignment provided by the invention solves the problem of low accuracy caused by a general alignment process; (2) the invention can also be disassembled and assembled after alignment, thus solving the one-off problem of alignment.
Drawings
The invention is further illustrated by the following figures and examples.
Fig. 1 is an overall schematic of the present invention.
Fig. 2 is a schematic view of an automatic slide table in the mechanical system of the present invention.
Fig. 3 is a flow chart of the automatic alignment of the present invention.
Reference number designations in the drawings: 1. the automatic sensor assembling device comprises a side baffle, a mounting plate 2, an upper automatic sliding table 3, an upper sensor clamp 4, an upper sensor 5, a reference object 6, a workpiece table 7, a lower sensor clamp 8, a lower sensor 9, a lower automatic sliding table 10, a support 11 and a motion control card 12.
Detailed Description
A double-measuring-head automatic alignment system based on a laser displacement sensor is characterized in that: the system mainly comprises a mechanical system and a measurement and control system;
the mechanical system comprises a support, a side baffle is arranged at the upper part of the support, an upper mounting plate is arranged at the top of the support, an upper automatic sliding table is mounted on the lower surface of the upper mounting plate, an upper sensor is mounted on the upper automatic sliding table through an upper sensor clamp, a workpiece table arranged on the support is arranged below the upper automatic sliding table, a round hole with the diameter equal to that of a spherical reference object is reserved in the center of the workpiece table, the reference object is placed in the round hole, a lower automatic sliding table mounted on the support is arranged below the workpiece table, and a lower sensor is mounted on the lower automatic sliding table through a lower sensor clamp; the upper sensor and the lower sensor are respectively arranged on the upper side and the lower side of the reference object;
the measurement and control system adopts a motion control card to realize control, and the motion control card controls the upper automatic sliding table and the lower automatic sliding table to move along the X, Y direction through signals given by the upper computer.
The workpiece table is in a form that the workpiece table can be directly drawn out from the bracket.
The sensors move along with the automatic sliding table in the X-Y direction, a curve is fitted by collecting data of finite points, peak points are found, and automatic alignment of the upper sensor and the lower sensor is realized.
Two driving motors for driving the sliding tables to move in the directions x and y which are perpendicular to each other are respectively arranged on the upper automatic sliding table and the lower automatic sliding table.
The working process is as follows:
the first step is as follows: placing a reference object in a workpiece table, and mounting the workpiece table on a bracket;
the second step is that: installing a laser displacement sensor on an automatic sliding table, wherein an upper sensor and a lower sensor are respectively fixed on the upper automatic sliding table and the lower automatic sliding table and are distributed on the upper side and the lower side of a reference object;
the third step: starting a power supply, and enabling the upper sensor and the lower sensor to be at initial measurement positions; setting parameters of a laser double-measuring head and an X, Y-direction movement mechanism; starting a program, driving a sensor to move along the X direction by a system through a motor driving sliding table, collecting and receiving data of a finite point measured by the sensor, resetting the sensor, performing least square polynomial curve fitting by using the data through a Labview platform to fit a curve, driving the motor to drive the sensor to the vertex in the X direction, and taking the position of the sensor at the moment as an initial position in the Y direction; the control motor drives the sliding table to drive the sensor to move in the Y direction, data of the sensor are collected and received, the sensor is reset, a Y-direction curve is fitted through the Labview platform, the driving motor drives the sensor to the top point of the Y-direction curve, and at the moment, the upper sensor and the lower sensor are both aligned to the center of a sphere, namely, the upper sensor and the lower sensor are aligned.
Claims (2)
1. A working method of a double-measuring-head automatic alignment system based on a laser displacement sensor is characterized by comprising the following steps: the double-measuring-head automatic alignment system based on the laser displacement sensor comprises a mechanical system and a measuring and controlling system;
the mechanical system comprises a support, a side baffle is arranged at the upper part of the support, an upper mounting plate is arranged at the top of the support, an upper automatic sliding table is arranged on the lower surface of the upper mounting plate, an upper sensor is arranged on the upper automatic sliding table through an upper sensor clamp, a workpiece table arranged on the support is arranged below the upper automatic sliding table, a round hole with the diameter equal to that of a spherical reference object is reserved in the center of the workpiece table, the spherical reference object is placed in the round hole, a lower automatic sliding table arranged on the support is arranged below the workpiece table, and a lower sensor is arranged on the lower automatic sliding table through a lower sensor clamp; the upper sensor and the lower sensor are respectively arranged on the upper side and the lower side of the spherical reference object;
the measurement and control system adopts a motion control card to realize control, and the motion control card controls the upper automatic sliding table and the lower automatic sliding table to move along the direction X, Y through signals given by the upper computer;
the upper and lower sensors are upper and lower laser displacement sensors;
the sensors move along with the automatic sliding table in the X-Y direction, a curve is fitted by collecting data of finite points, peak points are found, and automatic alignment of the upper sensor and the lower sensor is realized;
the working method comprises the following steps:
the first step is as follows: placing the spherical reference object in a workpiece table, and mounting the workpiece table on a support;
the second step is that: installing an upper laser displacement sensor and a lower laser displacement sensor on an upper automatic sliding table and a lower automatic sliding table, wherein the upper laser displacement sensor and the lower laser displacement sensor are respectively fixed on the upper automatic sliding table and the lower automatic sliding table and are distributed on the upper side and the lower side of a spherical reference object;
the third step: starting a power supply, and enabling the upper laser displacement sensor and the lower laser displacement sensor to be at initial measurement positions; setting parameters of a laser double-measuring head and an X, Y-direction movement mechanism; the upper automatic sliding table and the lower automatic sliding table are respectively provided with two driving motors for driving the upper automatic sliding table and the lower automatic sliding table to move in two mutually vertical directions of x and y; starting a program, driving the upper and lower automatic sliding tables to move in the X direction by two driving motors driving the upper and lower automatic sliding tables to move in the X direction respectively, collecting and receiving data of finite points measured by the upper and lower laser displacement sensors, resetting the upper and lower laser displacement sensors, performing least square polynomial curve fitting by using the data through a Labview platform to fit an X-direction curve, driving the upper and lower automatic sliding tables to move to X-direction vertexes by using the two driving motors driving the upper and lower automatic sliding tables to move in the X direction respectively, and taking the positions of the upper and lower laser displacement sensors as initial positions in the Y direction; two driving motors driving the upper and lower automatic sliding tables to move in the Y direction respectively drive the upper and lower automatic sliding tables to drive the upper and lower laser displacement sensors to move in the Y direction, collect and receive data of the upper and lower laser displacement sensors, reset the upper and lower laser displacement sensors, and fit a Y-direction curve through a Labview platform.
2. The working method of the double-measuring-head automatic alignment system based on the laser displacement sensor as claimed in claim 1, wherein the working method comprises the following steps: the workpiece table is in a form of being directly drawn out from the bracket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011042328.1A CN112286233B (en) | 2017-02-17 | 2017-02-17 | Working method of double-measuring-head automatic alignment system based on laser displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710085083.2A CN106873638B (en) | 2017-02-17 | 2017-02-17 | Dual-probe automatic alignment system based on laser displacement sensor |
| CN202011042328.1A CN112286233B (en) | 2017-02-17 | 2017-02-17 | Working method of double-measuring-head automatic alignment system based on laser displacement sensor |
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| CN201710085083.2A Division CN106873638B (en) | 2017-02-17 | 2017-02-17 | Dual-probe automatic alignment system based on laser displacement sensor |
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| CN112286233A true CN112286233A (en) | 2021-01-29 |
| CN112286233B CN112286233B (en) | 2021-09-14 |
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| CN201710085083.2A Active CN106873638B (en) | 2017-02-17 | 2017-02-17 | Dual-probe automatic alignment system based on laser displacement sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108398097A (en) * | 2018-03-07 | 2018-08-14 | 南通大学 | Hose diameter on-line monitoring system based on laser displacement sensor |
| CN111536875B (en) * | 2020-05-22 | 2021-09-14 | 西安飞机工业（集团）有限责任公司 | Rapid detection system and detection method for form and position tolerance at edge of airplane floor beam |
| US11740356B2 (en) | 2020-06-05 | 2023-08-29 | Honeywell International Inc. | Dual-optical displacement sensor alignment using knife edges |
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| Publication number | Publication date |
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| CN112286233B (en) | 2021-09-14 |
| CN106873638A (en) | 2017-06-20 |
| CN106873638B (en) | 2020-11-10 |
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Application publication date: 20210129 Assignee: Suzhou Zelituo Precision Machinery Co.,Ltd. Assignor: NANTONG University Contract record no.: X2023980053132 Denomination of invention: The working method of a dual probe automatic alignment system based on laser displacement sensors Granted publication date: 20210914 License type: Common License Record date: 20231219 |