CN112271030B - Hot pressing equipment of conducting film for semiconductor production - Google Patents
Hot pressing equipment of conducting film for semiconductor production Download PDFInfo
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- CN112271030B CN112271030B CN202011187893.7A CN202011187893A CN112271030B CN 112271030 B CN112271030 B CN 112271030B CN 202011187893 A CN202011187893 A CN 202011187893A CN 112271030 B CN112271030 B CN 112271030B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0016—Apparatus or processes specially adapted for manufacturing conductors or cables for heat treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0036—Details
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a hot-pressing device of a conductive film for semiconductor production, which comprises a hot air bin, a first air channel, a second air channel, a heating roller, a pressing device, a winding roller, a driving device and a spot-breaking device, wherein the pressing device comprises a sleeve, a sliding column and a pressing roller, the driving device comprises a piston cylinder and a piston seat, and the spot-breaking device comprises a sliding cylinder and a piston rod.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to hot-pressing equipment for a conductive film for semiconductor production.
Background
The conductive film is a thin film having a conductive function, and charged carriers of the conductive thin film are scattered by a surface and an interface during transport, and when the thickness of the thin film is comparable to the free path of electrons, the influence on the surface and the interface becomes significant, which is referred to as a size effect of the thin film, which is equivalent to a reduction in the free path of carriers, and thus the conductivity of the thin film is small compared to a bulk of the same material.
Semiconductor device's production need use a large amount of conductive films, the conductive film is obtained by the complex of conductive film body and substrate usually, at compound in-process, need heat it, still need receive simultaneously and unreel the process, these processes generally need set up different power and drive, thereby it is more to make the power equipment in the hot pressing equipment, cause the complexity of equipment to improve, thereby maintenance and maintenance difficulty, simultaneously, the cost of equipment is corresponding to be improved, make popularization nature reduce.
After the conductive film body is compounded with the base material, the conductive film body generally needs to be cut into a fixed small size for use, and in the prior art, the conductive film body is generally cut by a cutting device after hot pressing is finished, so that the use is inconvenient.
Disclosure of Invention
In order to solve the problems, the invention provides hot-pressing equipment for a conductive film for semiconductor production, and the hot-pressing equipment is realized through the following technical scheme.
A hot-pressing device for a conductive film for semiconductor production comprises a hot air bin, a first air duct, a second air duct, a heating roller, a pressing device, a winding roller, a driving device and a point breaking device; the hot air bin is of a cylindrical cavity structure, a heating wire is arranged on the inner wall of the hot air bin, a first rotating shaft is fixedly connected between the front side plate and the rear side plate of the hot air bin, rotating blades are uniformly and fixedly connected to the circumference of the rotating shaft in the hot air bin, the rear end of the first rotating shaft extends out of the hot air bin and is fixedly connected with a driving wheel, a first air duct and a second air duct are symmetrically and fixedly connected to the upper side and the lower side of the hot air bin, a communicating bin is symmetrically and forwardly connected between the heads of the first air duct and the second air duct, the inner cavity of the communicating bin is communicated with the inner cavities of the first air duct and the second air duct, an L-shaped first axle seat is symmetrically and forwardly fixedly connected to the right side of the first air duct, a first unwinding roller is rotatably connected between the heads of the first axle seat, an L-shaped second axle seat is symmetrically and forwardly fixedly connected to the right side of the second air duct, a second unwinding roller is rotatably connected between the second axle seats, a circulating fan is arranged in the second air duct, and the heating roller is of a hollow structure, the heating roller is rotatably connected between the communicating bins and communicated with the inner cavity of the communicating bins, the pressing devices are arranged on the left side of the heating roller and are arranged in an up-and-down symmetrical mode, the winding roller is rotatably connected on the right side of the hot air bin through a second rotating shaft, the rear end of the second rotating shaft is fixedly connected with a driving wheel, the driving wheel is linked with a driving wheel through a belt, the front end of the second rotating shaft is fixedly connected with a turntable, the driving device comprises a piston cylinder and a piston seat, the piston cylinder is fixedly connected below the first air channel and communicated with the inner cavity of the first air channel, the piston cylinder is positioned right above the winding roller and is slidably connected in the piston cylinder, the lower surface of the piston seat is fixedly connected with a sliding rod, the sliding rod is slidably connected with a bottom plate of the piston cylinder, the bottom of the sliding rod is hinged with a connecting rod, the other end of the connecting rod is eccentrically hinged with the front side surface of the turntable, the point breaking device comprises a sliding cylinder and a piston rod, the sliding cylinder is fixedly connected below the first air channel, the sliding cylinders are positioned between the winding roller and the pressing device, a plurality of sliding cylinders are uniformly arranged in the longitudinal direction, the piston rods are connected in the sliding cylinders in a sliding mode, and the bottoms of the piston rods are fixedly connected with point breaking heads.
Furthermore, the pressing device comprises a sleeve, sliding columns and pressing rollers, wherein the sleeve is fixedly connected with a pair of sliding columns in a front-back symmetrical mode below the first air channel and above the second air channel, the sliding columns are connected into the sleeve in a sliding mode, a pressing spring is fixedly connected between the bottom surface of the sleeve and the sliding columns, and the pressing rollers are rotatably connected between the heads of the sliding columns.
Furthermore, a seat plate is fixedly connected to the second air duct below the point breaking head, and point breaking grooves corresponding to the point breaking heads one to one are formed in the top surface of the seat plate.
Further, the heating wire is spirally and fixedly connected to the inner wall of the hot air bin.
Furthermore, the inner walls of the communicating bins are fixedly connected with hollow ventilation pipes, and the centers of the front side plate and the rear side plate of the heating roller are respectively connected with the ventilation pipes on the front side and the rear side in a sealing and rotating mode.
Further, the bottommost part of the first unwinding roller is positioned below the topmost part of the heating roller, and the topmost part of the second unwinding roller is positioned above the bottommost part of the heating roller.
Further, the heating roller is a smooth steel roller.
The beneficial effects of the invention are as follows:
1. the air circularly flows among the heating bin, the first air duct, the second air duct and the heating roller through the circulating fan, in the process, the heating wire heats the flowing air, the hot air raises the temperature of the heating roller, and the heating roller heats the heat-seal material, so that the heated air circulates in the equipment, and the heat loss is avoided;
2. the heating roller heats the conductive film body and the base material, and then the base material and the conductive film body are pressed into a whole at the position of the pressing device, so that smooth hot pressing operation is realized;
3. the rotating blades are rotated by the flowing air, so that the winding roller is driven to rotate to perform winding operation, and the winding operation does not need to be driven by an additional power source, so that the complexity and the manufacturing cost of the device are reduced, and the maintenance and the popularization of equipment are facilitated;
4. the second rotating shaft is provided with a rotating disc, so that in the process that the second rotating shaft rotates to drive the wind-up roll to rotate, the rotating disc synchronously rotates, the rotating disc drives the piston seat to perform reciprocating piston motion through the connecting rod and the sliding rod, so that the pressure in the second air channel is changed, and the pressure is transmitted to drive the piston rod to perform reciprocating motion with the broken end to realize the broken operation due to the lower compression ratio of hot air;
drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without inventive labor.
FIG. 1: the invention relates to a structural schematic diagram of hot-pressing equipment of a conductive film for semiconductor production;
FIG. 2: the invention relates to a structural schematic diagram of the position of a hot air bin;
FIG. 3: the invention is a linkage schematic diagram of a driving wheel and a driving wheel;
FIG. 4: the invention discloses a structural schematic diagram of the position of a winding roller;
FIG. 5 is a schematic view of: the invention discloses a structural schematic diagram of a point breaking device;
FIG. 6: the structure schematic diagram of the pressing device is shown;
FIG. 7: the heating roller of the present invention is schematically installed.
The reference numbers are as follows:
1-hot air bin, 101-heating wire, 102-first rotating shaft, 103-rotating blade, 104-driving wheel,
2-a first air duct, 201-a communicating bin, 202-a first shaft seat, 203-a first unwinding roller, 204-a second shaft seat, 205-a second unwinding roller, 206-a circulating fan,
3-a second air duct, and a second air duct,
4-heated rolls, 401-air ducts,
5-a pressing device, 501-a sleeve, 502-a sliding column, 503-a pressing roller, 504-a pressing spring,
6-a wind-up roll, 601-a second rotating shaft, 602-a driving wheel, 603-a belt, 604-a turntable,
701-piston cylinder, 702-piston seat, 703-slide bar, 704-connecting rod,
8-point breaking device, 801-sliding cylinder, 802-piston rod, 803-point breaking head, 804-seat plate and 805-point breaking groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-7, a hot-pressing device for a conductive film for semiconductor production comprises a hot air bin 1, a first air duct 2, a second air duct 3, a heating roller 4, a pressing device 5, a winding roller 6, a driving device and a spot-breaking device 8; the hot air bin 1 is a cylindrical cavity structure, the inner wall of the hot air bin 1 is provided with a heating wire 101, a first rotating shaft 102 is fixedly connected between the front side plate and the rear side plate of the hot air bin 1, rotating blades 103 are uniformly and fixedly connected on the circumference of the rotating shaft in the hot air bin 1, the rear end of the first rotating shaft 102 extends out of the hot air bin 1 and is fixedly connected with a driving wheel 104, a first air duct 2 and a second air duct 3 are symmetrically and fixedly connected on the upper side and the lower side of the hot air bin 1, a communicating bin 201 is symmetrically and forwardly fixedly connected between the heads of the first air duct 2 and the second air duct 3, the inner cavity of the communicating bin 201 is communicated with the inner cavities of the first air duct 2 and the second air duct 3, an L-shaped first axle seat 202 is symmetrically and forwardly fixedly connected on the right side of the first air duct 2, a first air duct unreeling roller 203 is rotatably connected between the heads of the first axle seat 202, an L-shaped second axle seat 204 is symmetrically and forwardly and rotatably connected between the second unreeling rollers 205, a circulating fan 206 is arranged in the second air duct 3, the heating roller 4 is of a hollow structure, the heating roller 4 is rotatably connected between the communicating bins 201 and is communicated with the inner cavity of the communicating bins 201, the pressing device 5 is arranged on the left side of the heating roller 4 and is arranged in an up-and-down symmetrical manner, the winding roller 6 is rotatably connected on the right side of the hot air bin 1 through a second rotating shaft 601, a driving wheel 602 is fixedly connected at the rear end of the second rotating shaft 601, the driving wheel 602 is linked with the driving wheel 104 through a belt 603, a rotating disc 604 is fixedly connected at the front end of the second rotating shaft 601, the driving device comprises a piston cylinder 701 and a piston seat 702, the piston cylinder 701 is fixedly connected below the first air duct 2 and is communicated with the inner cavity thereof, the piston cylinder 701 is positioned right above the winding roller 6, the piston seat 702 is slidably connected in the piston cylinder 701, a slide bar 703 is fixedly connected on the lower surface of the piston seat 702, the slide bar 703 is slidably connected with the bottom plate of the piston cylinder 701, and a connecting rod 704 is hinged with the bottom of the slide bar 703, the other end of the connecting rod 704 is eccentrically hinged with the front side surface of the rotating disc 604, the spot-breaking device 8 comprises a sliding cylinder 801 and a piston rod 802, the sliding cylinder 801 is fixedly connected below the first air duct 2, the sliding cylinder 801 is positioned between the winding roller 6 and the pressing device 5, the sliding cylinders 801 are uniformly arranged in the longitudinal direction, the piston rods 802 are slidably connected in the sliding cylinder 801, and the bottom of the piston rods 802 is fixedly connected with spot-breaking heads 803.
Preferably, the pressing device 5 includes a sleeve 501, a sliding column 502 and a pressing roller 503, the sleeve 501 is fixedly connected to a pair of sleeves respectively below the first air duct 2 and above the second air duct 3, the sliding column 502 is slidably connected to the sleeve 501, a pressing spring 504 is fixedly connected between the bottom surface of the sleeve 501 and the sliding column 502, and the pressing roller 503 is rotatably connected between the heads of the sliding columns 502.
Preferably, a seat plate 804 is fixedly connected to the second air duct 3 below the dotted end 803, and the top surface of the seat plate 804 is provided with dotted grooves 805 corresponding to the dotted ends 803 one to one.
Preferably, the heating wire 101 is spirally fixed on the inner wall of the hot wind bin 1.
Preferably, hollow ventilation pipes 401 are fixedly connected to the inner walls of the communicating bin 201, and the centers of the front and rear side plates of the heating roller 4 are respectively connected with the ventilation pipes 401 at the front and rear sides in a sealing and rotating manner.
Preferably, the bottommost portion of the first unwinding roller 203 is located below the topmost portion of the heating roller 4, and the topmost portion of the second unwinding roller 205 is located above the bottommost portion of the heating roller 4.
Preferably, the heating roller 4 is a smooth steel roller.
The working principle of the invention is as follows:
when the conductive film heating device is used, the first unwinding roller 203 and the second unwinding roller 205 are used for unwinding the conductive film body and the substrate respectively, the conductive film body and the substrate are in contact with the upper side and the lower side of the heating roller 4 respectively, so that the heating roller 4 and the conductive film body are heated, then the conductive film body and the substrate enter the pressing device 5 to be subjected to hot pressing operation, then the conductive film body and the substrate are subjected to spot breaking through the spot breaking device 8, and finally the conductive film body and the substrate are wound on the winding roller 6.
The circulating fan 206 drives the hot air bin 1, the first air duct 2, the second air duct 3 and the air in the heating roller 4 to flow when working, when the air flows into the hot air cylinder, the heating wire 101 heats the air, the heated hot air enters the heating roller 4 to increase the temperature of the hot air, and therefore the heating roller 4 heats the conductive film body and the substrate, and subsequent hot pressing operation is facilitated.
By the arrangement of the pressing spring 504, a sufficient pressing force is provided between the upper pressing roller 503 and the lower pressing roller 503, so that the heated conductive film body and the substrate are conveniently subjected to thermal compression bonding.
When flowing air passes through the hot air cabin 1, the rotating blade 103 is pushed to rotate, so that the first rotating shaft 102 and the driving wheel 104 fixedly connected to the first rotating shaft rotate, the driving wheel 104 drives the driving wheel 602 to rotate through the belt 603, so that the second rotating shaft 601 and the winding roller 6 rotate, and the rotating winding roller 6 winds the pressed materials.
In the process of rotating the second rotating shaft 601, the rotating disc 604 rotates synchronously, the rotating disc 604 drives the piston seat 702 to reciprocate up and down through the connecting rod 704 and the sliding rod 703, so that the pressure in the second air duct 3 changes, and because the compression ratio of the hot air is low, the piston rod 802 drives the point breaking head 803 to reciprocate through pressure transmission, and the point breaking head 803 generates a row of breaking points on the composite material, so that when the breaking points are arranged for subsequent use, the composite material is conveniently torn off.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (2)
1. A hot pressing equipment of conducting film for semiconductor production is characterized in that: the hot air device comprises a hot air bin, a first air duct, a second air duct, a heating roller, a pressing device, a winding roller, a driving device and a breaking device; the hot air bin is of a cylindrical cavity structure, a heating wire is arranged on the inner wall of the hot air bin, a first rotating shaft is fixedly connected between the front side plate and the rear side plate of the hot air bin, rotating blades are uniformly and fixedly connected to the circumference of the rotating shaft in the hot air bin, the rear end of the first rotating shaft extends out of the hot air bin and is fixedly connected with a driving wheel, a first air duct and a second air duct are symmetrically and fixedly connected to the upper side and the lower side of the hot air bin, a communicating bin is symmetrically and forwardly connected between the heads of the first air duct and the second air duct, the inner cavity of the communicating bin is communicated with the inner cavities of the first air duct and the second air duct, an L-shaped first axle seat is symmetrically and forwardly fixedly connected to the right side of the first air duct, a first unwinding roller is rotatably connected between the heads of the first axle seat, an L-shaped second axle seat is symmetrically and forwardly fixedly connected to the right side of the second air duct, a second unwinding roller is rotatably connected between the second axle seats, a circulating fan is arranged in the second air duct, and the heating roller is of a hollow structure, the heating roller is rotatably connected between the communicating bins and communicated with the inner cavity of the communicating bins, the pressing devices are arranged on the left side of the heating roller and are arranged in an up-and-down symmetrical mode, the winding roller is rotatably connected on the right side of the hot air bin through a second rotating shaft, the rear end of the second rotating shaft is fixedly connected with a driving wheel, the driving wheel is linked with the driving wheel through a belt, the front end of the second rotating shaft is fixedly connected with a turntable, the driving device comprises a piston cylinder and a piston seat, the piston cylinder is fixedly connected below the first air channel and communicated with the inner cavity of the first air channel, the piston cylinder is positioned right above the winding roller and is slidably connected in the piston cylinder, the lower surface of the piston seat is fixedly connected with a sliding rod, the sliding rod is slidably connected with a bottom plate of the piston cylinder, the bottom of the sliding rod is hinged with a connecting rod, the other end of the connecting rod is eccentrically hinged with the front side surface of the turntable, the point breaking device comprises a sliding cylinder and a piston rod, the sliding cylinder is fixedly connected below the first air channel, the sliding cylinders are positioned between the winding roller and the pressing device, a plurality of sliding cylinders are uniformly arranged in the longitudinal direction, the piston rods are connected in the sliding cylinders in a sliding mode, and the bottoms of the piston rods are fixedly connected with point breaking heads;
the pressing device comprises a sleeve, sliding columns and pressing rollers, the sleeve is fixedly connected with a pair of sliding columns in a front-back symmetrical mode below the first air channel and above the second air channel respectively, the sliding columns are connected into the sleeve in a sliding mode, a pressing spring is fixedly connected between the bottom surface of the sleeve and the sliding columns, and the pressing rollers are rotatably connected between the heads of the sliding columns;
a seat plate is fixedly connected to the second air duct below the point breaking head, and point breaking grooves corresponding to the point breaking heads one to one are formed in the top surface of the seat plate;
the heating wire is spirally and fixedly connected to the inner wall of the hot air bin;
the inner walls of the communicating bins are fixedly connected with hollow ventilating pipes, and the centers of front and rear side plates of the heating roller are respectively in sealed rotary connection with the ventilating pipes on the front and rear sides;
the bottommost part of the first unwinding roller is positioned below the topmost part of the heating roller, and the topmost part of the second unwinding roller is positioned above the bottommost part of the heating roller.
2. The hot-pressing apparatus for conductive films for semiconductor production according to claim 1, wherein: the heating roller is a smooth steel roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011187893.7A CN112271030B (en) | 2020-10-29 | 2020-10-29 | Hot pressing equipment of conducting film for semiconductor production |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011187893.7A CN112271030B (en) | 2020-10-29 | 2020-10-29 | Hot pressing equipment of conducting film for semiconductor production |
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| Publication Number | Publication Date |
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| CN112271030A CN112271030A (en) | 2021-01-26 |
| CN112271030B true CN112271030B (en) | 2022-05-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011187893.7A Active CN112271030B (en) | 2020-10-29 | 2020-10-29 | Hot pressing equipment of conducting film for semiconductor production |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114474542A (en) * | 2021-12-06 | 2022-05-13 | 湖南恒会昌彩印包装有限公司 | Calendering roller temperature compensation device for plastic film processing equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207184942U (en) * | 2017-08-30 | 2018-04-03 | 上达电子（黄石）股份有限公司 | A kind of new film laminator |
| CN107891659A (en) * | 2017-09-30 | 2018-04-10 | 重庆三创印刷有限公司 | A kind of thermoprinting machine quickly cooled down |
| CN209320434U (en) * | 2018-12-28 | 2019-08-30 | 江苏佳意包装科技有限公司 | A kind of aluminium foil composite card pressing and forming device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140120200A1 (en) * | 2012-10-29 | 2014-05-01 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Stretching and clamping device for anisotropy conductive film and clamping roller and clamping head thereof |
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2020
- 2020-10-29 CN CN202011187893.7A patent/CN112271030B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207184942U (en) * | 2017-08-30 | 2018-04-03 | 上达电子（黄石）股份有限公司 | A kind of new film laminator |
| CN107891659A (en) * | 2017-09-30 | 2018-04-10 | 重庆三创印刷有限公司 | A kind of thermoprinting machine quickly cooled down |
| CN209320434U (en) * | 2018-12-28 | 2019-08-30 | 江苏佳意包装科技有限公司 | A kind of aluminium foil composite card pressing and forming device |
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Effective date of registration: 20220506 Address after: 523000 Lang village, Changping Town, Dongguan, Guangdong Applicant after: Guangdong baoyuantong testing equipment Co.,Ltd. Address before: No.259, changban Road, Yuyang office, Dangyang city, Yichang City, Hubei Province Applicant before: Zhang Yu |
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