CN112262620B

CN112262620B - Substrate working machine

Info

Publication number: CN112262620B
Application number: CN201880094445.7A
Authority: CN
Inventors: 藤田阳司
Original assignee: Fuji Corp
Current assignee: Fuji Corp
Priority date: 2018-06-13
Filing date: 2018-06-13
Publication date: 2022-06-17
Anticipated expiration: 2038-06-13
Also published as: JP7035184B2; JPWO2019239510A1; CN112262620A; WO2019239510A1

Abstract

Provided is a substrate working machine which can reduce adjustment work by an operator and can perform highly accurate alignment of guides of adjacent substrate working machines when the adjacent substrate working machines are provided. The substrate working machine is provided with a module, a base, and a conveying part for conveying an object to be conveyed along a guide. The base has a reference surface serving as a reference for the position of the base. When the position of the reference surface of an arbitrary substrate working machine and the position of the reference surface of an adjacent substrate working machine are aligned, the positions of the guide of the arbitrary substrate working machine and the guide of the adjacent substrate working machine are aligned.

Description

Substrate working machine

Technical Field

The present disclosure relates to alignment when two adjacent pair substrate working machines are provided.

Background

Conventionally, there is a technology of arranging a plurality of substrate working machines for mounting components on a substrate to form a single production line (for example, patent document 1). The pair of substrate working machines of patent document 1 and another pair of substrate working machines provided in parallel are connected via a connecting member and positioned. The two coupled substrate working machines are disposed adjacent to each other with a gap therebetween.

Documents of the prior art

Patent document 1: japanese patent laid-open No. 2001 and 179546

Disclosure of Invention

Problems to be solved by the invention

In the production line, the substrate is conveyed across a plurality of substrate handling machines. Each pair of substrate working machines conveys the substrates along a guide member on which a belt conveyor or the like is mounted. In such an installation work for the substrate working machine, if a step occurs between the guides of the adjacent substrate working machines, for example, it is necessary to align the positions of the guides. In the conventional substrate working machine, for example, a gap is secured between adjacent substrate working machines, and the positions of the guides are adjusted in the vertical direction and the front-rear direction of the substrate working machines. This adjustment operation depends on the operator's feeling, and an error may occur due to a difference in the operator's feeling.

The present disclosure has been made in view of the above problems, and an object of the present disclosure is to provide a substrate working machine capable of reducing adjustment work performed by an operator and accurately positioning guides of adjacent substrate working machines when the adjacent substrate working machines are provided.

Means for solving the problems

In order to solve the above problem, the present disclosure discloses a substrate working machine including: a module for performing mounting operation of components on the conveyed substrate; a base on which the module is disposed; and a conveying section that conveys the object to be conveyed relating to the mounting operation along a guide; the base has a reference surface that is a reference of a position of the base, the guide of the transport unit is disposed at a predetermined position with respect to the reference surface, the pair-substrate working machine includes a plurality of the pair-substrate working machines arranged in parallel, the transported object that is carried out along the guide by the transport unit of any of the pair-substrate working machines can be carried in along the guide by the transport unit of the adjacent pair-substrate working machine, and when a position of the reference surface of the any pair-substrate working machine is aligned with a position of the reference surface of the adjacent pair-substrate working machine, a position of the guide of the any pair-substrate working machine is aligned with a position of the guide of the adjacent pair-substrate working machine.

Effects of the invention

According to the substrate working machine of the present disclosure, in the setting operation, the position of the adjacent guide can be aligned by aligning the position of the reference surface of an arbitrary substrate working machine with the position of the reference surface of the adjacent substrate working machine. In this way, the operator who performs the setting can align the position of the guide of the conveying unit by aligning the position of the reference surface of the base. Therefore, the position adjustment work depending on the feeling of the operator can be reduced, and the adjacent guide to the substrate working machine can be accurately positioned. As a result, the object to be conveyed that moves between the pair of substrate working machines can be stably conveyed by the conveying section.

Drawings

Fig. 1 is a perspective view showing a production system in an embodiment.

Fig. 2 is a schematic perspective view showing the structures of the exchange robot and the electronic component mounting machine.

Fig. 3 is a side view of the change robot.

Fig. 4 is a perspective view showing the structure of the mobile device.

Fig. 5 is a perspective view showing a state in which the module is pulled out with respect to the base.

Fig. 6 is a perspective view of the base.

Fig. 7 is a view schematically showing two bases juxtaposed in the left-right direction.

Fig. 8 is an enlarged view of the region 101 shown in fig. 7.

Fig. 9 is a view of the first roller guide and the right base of fig. 8 removed.

Fig. 10 is a diagram showing a part of the front surfaces of two adjacent bases.

Fig. 11 is a view showing a part of the rear surfaces of two adjacent bases.

Fig. 12 is a flowchart showing the sequence of setting jobs.

Detailed Description

(construction of production System 10)

Hereinafter, an embodiment for implementing the present disclosure will be described in detail with reference to the drawings. Fig. 1 is a perspective view showing a production system 10 including an electronic component mounting machine (hereinafter, abbreviated as "mounting machine") 11 as an embodiment of turning a substrate working machine of the present disclosure into a body. Fig. 2 shows a perspective view of the exchange robot 15 and the mounting machine 11. Fig. 2 shows a state in which the touch panel 39, the upper cover 11A, and the like of the mounting apparatus 11 are removed.

As shown in fig. 1 and 2, the production system 10 is configured by arranging a plurality of mounting machines 11 in parallel in one direction and connecting them to each other, and conveys the substrate BD. In the following description, as shown in fig. 1 and 2, a direction in which the mounting machine 11 is connected and the substrate BD is conveyed is referred to as a left-right direction, a direction perpendicular to the left-right direction and parallel to a plane of the conveyed substrate BD is referred to as a front-rear direction, and a direction perpendicular to the left-right direction and the front-rear direction is referred to as a vertical direction.

The production system 10 includes, on a front surface side (a near side in fig. 1) in the front-back direction: feeder storage device 13, replacement robot 15, and management device 17. The plurality of mounting machines 11, feeder storage device 13, replacement robot 15, management device 17, and the like can communicate via a network (not shown). The mounting machine 11 and the like transmit and receive various data via a network. The connection of the network used in the production system 10 may be wired or wireless. The production system 10 may include other types of substrate working machines such as a screen printer, a mounting inspection machine, and a reflow furnace, in addition to the mounting machine 11.

The feeder storage device 13 is provided on the loading side (left side in the left-right direction) of the loaded substrate BD, and stores a cassette-type feeder 21. Feeder 21 is a feeder type supply device for supplying electronic components from a carrier tape formed by knitting electronic components. The feeder storage device 13 has a plurality of slots, and stores feeders 21 mounted in the respective slots. When installed in a slot of feeder storage device 13, feeder 21 is in a state in which it can communicate with management device 17. Thereby, the slot of feeder storage device 13 and the identification number (ID) of feeder 21 installed in the slot are recorded in management device 17 in association with each other.

The replacement robot 15 performs various operations such as replacement of the feeders 21 for each of the mounting machines 11 and the feeder storage apparatus 13. Details of the replacement robot 15 will be described later. The management device 17 monitors the operating state of the production system 10 and controls the production system 10. Various data for controlling the mounting machine 11 are stored in the management device 17. The management device 17 appropriately transmits various data such as a production program to each device of the production system 10 when the production process of the production system 10 is executed.

(Structure of mounting machine 11)

Next, the structure of the mounting machine 11 will be described. Each of the plurality of mounting machines 11 includes a module 23 and a base 25. The mounter 11 arranges one module 23 on, for example, one base 25. The mounting machine 11 may be configured such that a plurality of modules 23 are arranged on one base 25 or such that one module 23 is arranged on a plurality of bases 25. The module 23 performs mounting work for mounting electronic components on the substrate BD loaded into the mounting machine 11. The module 23 has: two substrate transport devices 31, an upper slot 33, a mounting head 35, a head transfer device 37, and a touch panel 39 (see fig. 1).

The substrate transfer devices 31 each have a pair of substrate guides 32 facing each other in the front-rear direction. A belt conveyor (not shown) for conveying the substrate BD, a clamping device (not shown) for fixing the substrate BD at a predetermined position, and the like are provided inside the substrate guide 32. The substrate transport device 31 sequentially transports the substrates BD in the transport direction (right direction) according to the rotation of the belt conveyor. The substrate transport device 31 carries the substrate BD from the mounting machine 11 on the upstream side (left side), and positions the substrate BD at a predetermined position in the module 23 by the clamping device. After the mounting operation of the module 23 is performed, the substrate transport apparatus 31 carries out the substrate BD to the downstream mounting machine 11.

The upper slot 33 is disposed at an upper portion of the front side of the mounting machine 11, and holds the mounted feeder 21 so as to be operable. Feeder 21 mounted on upper slot 33 is controlled in conjunction with the mounting work of module 23, and electronic components are supplied at a supply position provided on the upper portion of feeder 21.

In addition, the base 25 has a lower insertion groove 41. Lower slot 41 is disposed below upper slot 33 and stores feeder 21. The lower slot 41 preliminarily stores the feeder 21 to be used in production or temporarily stores the used feeder 21 after use in production. Replacement of feeder 21 between upper slot 33 and lower slot 41 is performed by automatic replacement of replacement robot 15 or manual replacement by a user.

Mounting head 35 has a holding member (not shown) for holding electronic components to be supplied to the supply position of feeder 21. As the holding member, for example, a suction nozzle to which negative pressure is supplied to hold an electronic component, a chuck to hold an electronic component, or the like can be used. The mounting head 35 holds the holding member so as to be movable in the vertical direction, for example. The mounting head 35 holds the holding member so as to be rotatable about an axis extending in the vertical direction. The head moving device 37 is provided above the module 23, and is mounted with the mounting head 35. The mounting head 35 can be moved in the front-rear direction and the left-right direction on the substrate BD by driving the head moving device 37. The touch panel 39 is provided on the upper cover 11A of the mounting apparatus 11, and receives various information displays of the mounting apparatus 11 and user operation inputs.

(Structure of the Change robot 15)

The replacement robot 15 performs replacement of feeders 21 with respect to the plurality of mounting machines 11 or feeder storage devices 13. More specifically, for example, the replacement robot 15 conveys the feeder 21 from the feeder stocker 13 to the lower slot 41 and the upper slot 33 of the mounting machine 11. The replacement robot 15 replaces the feeder 21 between the upper slot 33 and the lower slot 41 of the mounting machine 11. Further, replacement robot 15 conveys used feeder 21 from mounting machine 11 to feeder storage device 13.

Fig. 3 shows a side view of the change robot 15. As shown in fig. 3, the replacement robot 15 includes: the replacement device 51, the detachment prevention guide 54, the moving device 60, and the position detection device 80 (see fig. 4). The replacement device 51 performs collection and replenishment of the feeders 21 installed in each of the plurality of mounting machines 11. The replacing device 51 includes: a gripper (not shown) for gripping feeder 21, and a moving mechanism for moving the gripper in the front-back direction and the up-down direction. The replacement device 51 includes an upper transfer unit 51A for arranging the feeder 21 to be replaced between the replacement device 51 and the upper slot 33, and a lower transfer unit 51B for arranging the feeder 21 to be replaced between the replacement device 51 and the lower slot 41. The replacement device 51 controls the position and gripping state of the grippers at the upper transfer unit 51A or the lower transfer unit 51B based on a control command from the mounting machine 11 or the management device 17.

As shown in fig. 1, each mounting machine 11 includes a first roller guide 52 and a second roller guide 53 on the front surface 25A of the base 25. The first roller guide 52 is provided between the upper slot 33 and the lower slot 41 in each of the plurality of mounting machines 11 in the vertical direction. Each of the plurality of mounting machines 11 has the same type of first roller guide 52, and one rail is configured by arranging the first roller guides 52 so as to be continuous in the left-right direction. The feeder storage device 13 has a roller guide having the same shape at a position continuous to the first roller guide 52 of the mounting machine 11.

As shown in fig. 3 and 4, the first roller guide 52 extends in the left-right direction and has a planar travel path 52A. A plane is formed along the left-right direction and the up-down direction on the travel path 52A. The travel path 52A is formed facing the exchange device 51 (front side). The traveling path 52A is engaged with a driving wheel 72 described later by friction. In addition, the first roller guide 52 has an upper surface portion 52B and a side surface portion 52C. The upper surface portion 52B is formed with a plane along the front-rear direction and the left-right direction. The side surface portion 52C is formed with a flat surface along the left-right direction and the up-down direction. The side surface portion 52C is formed perpendicular to the upper surface portion 52B and faces the side opposite to the exchanging device 51 (the rear side).

The second roller guide 53 is provided on the front surface 25A of the plural mounting machines 11. As shown in fig. 3, the second roller guide 53 is provided below the first roller guide 52 and the lower insertion groove 41. The second roller guide 53 extends in the left-right direction and has a planar support portion 53A. The support portion 53A is formed with a plane along the vertical direction and the horizontal direction. The support portion 53A is formed to face the exchange device 51 side (front side). The support portion 53A rollably supports the third guide roller 64 of the replacement robot 15. The disengagement prevention guide 54 has an opposing surface (rear surface) that faces the support portion 53A in the front-rear direction, and suppresses disengagement of the third guide roller 64 that rolls on the support portion 53A from the support portion 53A. Thus, when an external force for tilting the entire replacement device 51 is applied, the disengagement prevention guide 54 contacts the third guide roller 64, and tilting of the replacement device 51 is suppressed. The feeder storage device 13 has a roller guide having the same shape at a position continuous to the second roller guide 53 of the mounting machine 11.

With the above configuration, the first roller guide 52 and the second roller guide 53 are provided over the entire region in the left-right direction of the production system 10. The moving device 60 includes: a main body 61, a first guide roller 62, a second guide roller 63, a third guide roller 64, a biasing mechanism 65, and a driving unit 70. The main body 61 is a frame member that holds the exchanging device 51. A bracket 61A for mounting the driving unit 70 is formed in the main body portion 61. The first guide roller 62 is engaged with the upper surface portion 52B of the first roller guide 52 so as to be capable of rolling, and restricts downward movement of the exchanging device 51 held by the main body portion 61. The second guide roller 63 is engaged with the side surface portion 52C of the first roller guide 52 to be rollable, and restricts the forward movement of the exchanging device 51. A plurality of first guide rollers 62 and a plurality of second guide rollers 63 are disposed on the moving device 60 so as to alternate in the left-right direction. The third guide roller 64 rolls along the support portion 53A of the second roller guide 53, and maintains the posture of the exchanging device 51.

The drive unit 70 has: a base plate 71, a drive wheel 72, a drive motor 73, and a transmission mechanism 74. The bottom plate 71 is formed in a plate shape extending in the front-rear direction, and is attached to the bracket 61A so as to be slidable in the front-rear direction. Thereby, the drive unit 70 is configured to be slidable in the front-rear direction with respect to the main body 61 as a whole. The biasing mechanism 65 biases the drive wheels 72 toward the travel path 52A by pushing the drive unit 70 toward the first roller guide 52 (rearward) with respect to the body portion 61. The driving wheel 72 has an outer peripheral portion formed of an elastic material such as urethane, and the driving wheel 72 is biased by a biasing mechanism 65 toward the metallic traveling path 52A and is engaged with the traveling path 52A with a predetermined frictional force. The drive motor 73 is supported on the bottom plate 71 such that a drive shaft is parallel to the vertical direction, for example. The transmission mechanism 74 includes a pulley 74A that rotates integrally with the drive wheel 72, and an endless belt 74B that is hung between the output shaft of the drive motor 73 and the pulley 74A. The transmission mechanism 74 transmits the driving force of the drive motor 73 to the drive wheels 72 via a pulley 74A and an endless belt 74B.

With the above configuration, the biasing mechanism 65 biases the drive unit 70, and thus maintains the state in which the drive wheels 72 are brought into contact with the traveling path 52A of the first roller guide 52 even if there is a gap or a step at the joint of the first roller guide 52. Then, the moving device 60 drives the drive wheel 72 engaged with the traveling path 52A to move the exchanging device 51 along the first and second roller guides 52 and 53.

Further, the position detection device 80 includes: a toothed belt 81, a pinion 82 and a rotary encoder 83. The toothed belt 81 is formed of a rubber-like elastic material and is disposed in parallel with the first roller guide 52 in the left-right direction. The pinion 82 is provided so as to be rotatable about a rotation axis parallel to the front-rear direction, and is in a state of meshing with the toothed belt 81. The rotary encoder 83 is a rotation angle sensor that detects the rotation angle of the pinion 82. The position detection device 80 detects the position of the replacement robot 15 in the left-right direction based on the output pulse of the rotary encoder 83. The replacement robot 15 moves based on the detected position of the position detecting device 80, the instruction value of the mounting machine 11, and the like.

(Structure of base datum plane)

Fig. 5 shows a state in which the module 23 is pulled out with respect to the base 25. Fig. 6 shows a perspective view of the base 25. In fig. 6, the first and second roller guides 52 and 53 are not shown. The module 23 of the present embodiment can be pulled out from the base 25. As shown in fig. 5 and 6, the mounting machine 11 is configured to be able to pull out the module 23 forward with respect to the base 25, and is able to perform maintenance on the module 23 and replacement of the module 23 itself. The mounting machine 11 has a predetermined width in the left-right direction and is long in the up-down direction and the front-back direction. The base 25 has a substantially rectangular parallelepiped shape having a predetermined thickness in the vertical direction and being long in the left-right direction and the front-rear direction. The upper surface 25B of the base 25 has a substantially rectangular shape that is long in the front-rear direction when viewed from above. A pair of guides 91 arranged along the front-rear direction are provided on both sides in the left-right direction on the upper surface 25B. The module 23 is movable in the front-rear direction along the pair of guides 91.

Further, on the upper surface 25B, a pair of bumpers 92 is provided on the rear surface 25C side of the base 25. The pair of dampers 92 are disposed substantially at the center of the base 25 in the lateral direction, and are disposed so as to sandwich a center line CL of the base 25 in the lateral direction. The dampers 92 are brought into contact with the module 23 when pushing the module 23 to a position at the rear end of the base 25, respectively, to alleviate the impact.

Further, positioning members 97 are provided on the outer sides of the guides 91 in the left-right direction, respectively. The two positioning members 97 are provided at respective ends in the left-right direction of the upper surface 25B of the base 25. The positioning member 97 is formed of a metal material, for example, and has a plate shape formed along the front-rear direction. The positioning member 97 has a protrusion 98 formed at a front end and a rear end. Two, four in total, projections 98 are formed on each positioning member 97. Fig. 6 and 7 show the projecting portion 98 in a manner to increase the projecting amount so that the position, shape, and structure of the projecting portion 98 can be easily understood. The amount of projection of the projection 98 is appropriately changed depending on, for example, the size of the gap provided between the mounting machines 11 and the structure and shape of the mounting machines 11. For example, as shown in fig. 8 and 9 described later, the projecting amount of the projecting portion 98 is a small amount projecting from the side surface of the base 25.

Fig. 7 schematically shows two bases 25 juxtaposed in the left-right direction. In fig. 7, the illustration of the module 23 is omitted. Fig. 8 shows an enlarged view of the region 101 of fig. 7. Fig. 9 shows a view of the base 25 on the right side and the first roller guide 52 in fig. 8 removed. As shown in fig. 7 to 9, the projecting portion 98 is formed to project outward along the left-right direction with a constant width in the up-down direction and the front-rear direction. Fig. 9 shows a right and front end tab 98 of the base 25. The projecting portion 98 projects rightward along the left-right direction. In other words, the protruding portion 98 provided in any mounting machine 11 among the plurality of mounting machines 11 arranged in parallel protrudes toward the protruding portion 98 of the adjacent mounting machine 11. A front end surface 98A is formed at the protruding front end of the protruding portion 98. The front end surface 98A is formed along the vertical direction and the front-rear direction. Further, an upper surface 98B is formed above the protruding portion 98. The upper surface 98B is formed along the front-rear direction and the left-right direction. The base 25 of the present embodiment has a front end surface 98A as a reference surface serving as a reference in the left-right direction of the position of the base 25, and an upper surface 98B as a reference surface serving as a reference in the up-down direction.

The bases 25 of the present embodiment have surfaces for connecting and fixing two adjacent bases 25 on both sides in the front-rear direction. Fig. 10 shows a part of the front surfaces 25A of the adjacent two bases 25. As shown in fig. 10, a first fixing surface 113 is provided on the front surface 25A of the base 25 below the rail holding plate 103. The first fixing surface 113 is disposed above the front surface 25A and at a position close to the rail holding plate 103. The first fixing surface 113 is provided at an end in the left-right direction. The first fixing surface 113 is a plane along the left-right direction and the up-down direction. Here, the first fixing surface 113 is a reference surface that serves as a reference in the front-rear direction of the position of the base 25.

As shown in fig. 5 and 6, a first reference pin 93 for positioning the module 23 in the left-right direction is provided between the pair of buffers 92. The first reference pin 93 is fixed to a predetermined position in the left-right direction with respect to the front end surface 98A. The first reference pin 93 is provided with a sensor capable of detecting the pushed-in module 23. Further, on the upper surface 25B of the base 25, second reference pins 94 for positioning the module 23 in the left-right direction and the front-rear direction are provided at substantially the center of the upper surface 25B on the front side of the first reference pins 93. The second reference pin 94 is fixed to a predetermined position in the left-right direction with respect to the front end surface 98A and fixed to a predetermined position in the front-rear direction with respect to the first fixing surface 113. The upper surface 25B is provided with a stopper 96 that engages with the module 23 when the module 23 is pulled out to the front side. The second reference pin 94 is provided between the first reference pin 93 and the stopper 96 in the front-rear direction. As shown in fig. 6, the first reference pin 93 and the second reference pin 94 are disposed on a center line CL passing through the center of the base 25 in the left-right direction.

In the present embodiment, the module 23 is configured to be arranged on the base 25 with reference to the positions of the first reference pin 93 and the second reference pin 94. For example, a detection target portion (not shown) that is detected by a sensor of the first reference pin 93 in a state where the module 23 is attached by being pushed into the rear end of the base 25 is provided on the lower surface of the module 23. An engaging portion (not shown) that engages with the first reference pin 93 and the second reference pin 94 in a state where the module 23 is pushed into the rear end of the base 25 and attached is provided on the lower surface of the module 23. Therefore, the module 23 is accurately mounted on the base 25 and is disposed at a predetermined position in the left-right direction and the front-rear direction with respect to the base 25 by the first and second reference pins 93 and 94. That is, the module 23 is correctly attached to the base 25, and is disposed at a predetermined position in the left-right direction with respect to the front end surface 98A and at a predetermined position in the front-rear direction with respect to the first fixing surface 113. The substrate guide 32 (see fig. 2) included in the substrate transport device 31 is fixed to a predetermined position in the left-right direction and the front-rear direction with respect to the engagement portion. Therefore, in a state where the module 23 is correctly attached to the base 25, the substrate guide 32 is arranged at a predetermined position in the left-right direction with respect to the front end surface 98A and at a predetermined position in the front-rear direction with respect to the first fixing surface 113. In a state where the module 23 is accurately mounted on the base 25, the substrate guide 32 is disposed at a predetermined position in the vertical direction with respect to the upper surface 98B.

As shown in fig. 6 to 9, a rail holding plate 103 that holds the first roller guide 52 (see fig. 3) is fixed to the upper end of the base 25 on the front surface 25A of the base 25. The rail holding plate 103 is formed of, for example, a metal material, and has a substantially plate shape that is long in the left-right direction. A reference front surface 103A is formed on the front surface of the rail holding plate 103. The reference front surface 103A is a surface that serves as a reference for the position of components (the substrate transport device 31, the positioning component 97, and the like) included in the mounting apparatus 11, for example. Further, a side surface 103B is formed at an end portion of the rail holding plate 103 in the left-right direction. The side surface 103B is a plane along the front-rear direction and the up-down direction. The two adjacent mounting machines 11 are disposed close to each other with a slight gap between the side surfaces 103B, for example.

Further, a first roller guide 52 for moving the replacement robot 15 is fixed to the front end of the rail holding plate 103. Here, the first roller guide 52 is fixed to a predetermined position in the left-right direction with respect to the front end surface 98A. The first roller guide 52 is fixed to a predetermined position in the front-rear direction with respect to the first fixing surface 113. In addition, the first roller guide 52 is fixed to a predetermined position in the up-down direction with respect to the upper surface 98B. The second roller guide 53 is also fixed to a predetermined position with respect to the distal end surface 98A, the first fixing surface 113, and the upper surface 98B in the same manner.

The two adjacent mounting machines 11 are disposed with a slight gap between the first roller guides 52 in the left-right direction, similarly to the rail holding plate 103. The adjacent two first roller guides 52 are, for example, in a state of being separated from each other so as to bring only the toothed belts 81 into contact as shown in fig. 8. In addition, the adjacent two first roller guides 52 may be configured to separate the toothed belts 81 and completely separate from each other. In addition, the two adjacent mounting machines 11 may be configured such that the side surfaces of the rail holding plate 103 or the first roller guide 52 contact each other.

Further, a power supply unit 105 for supplying power to the replacement robot 15 is provided on the upper surface 103C of the rail holding plate 103. The power supply portion 105 includes, for example, a power supply coil 105A and a frame portion 105B that holds the power supply coil 105A. The power supply unit 105 is disposed along the left-right direction. As shown in fig. 4, the replacement robot 15 includes a power receiving unit 107. The power receiving unit 107 includes a support portion 107A fixed to the body portion 61 and a power receiving coil 107B supported by the support portion 107A and receiving power from the power feeding coil 105A. The power receiving coil 107B of the power receiving unit 107 is disposed opposite to the power feeding coil 105A of the power feeding unit 105 with a predetermined gap therebetween in the vertical direction, for example. The mounting machine 11 supplies electric power necessary for operations such as traveling to the replacement robot 15 via the power supply unit 105 and the power receiving unit 107. The method of supplying power to the replacement robot 15 is not limited to the above-described wireless power supply. For example, the replacement robot 15 may include a power supply circuit for receiving electric power from a commercial power supply.

A plurality of positioning pins 109 are provided on the upper surface 103C of the rail holding plate 103. The positioning pins 109 are disposed, for example, in the vertical direction and stand on the upper surface 103C. The frame portion 105B of the power supply portion 105 is fixed in a state of being inserted through the positioning pin 109 in the vertical direction. This allows the power supply unit 105 to be fixed at a predetermined position with respect to the rail holding plate 103.

The reference front surface 103A is a plane extending in the left-right direction and the up-down direction, and has a rectangular shape elongated in the left-right direction. The reference front surface 103A is disposed at a reference position set based on, for example, an external dimension (a length along each direction of the vertical direction, the horizontal direction, and the front-rear direction) of the base 25. For example, the rail holding plate 103 is formed into a plate shape by casting, and is joined to the main body of the base 25 by welding. The rail holding plate 103 is cut by the cutting process to adjust the position on the plane of the reference front surface 103A by cutting the reference front surface 103A. At this time, the reference front surface 103A is flattened so as to match the design external dimensions from the rear end, the lower end, and the right end of the base 25, for example. Thereby, the reference front surface 103A is formed at a predetermined reference position with respect to the external dimension of the base 25.

As shown in fig. 10, the first fixing surfaces 113 of the adjacent bases 25 are connected by a connecting member 115. The coupling member 115 is, for example, a metal plate extending in the left-right direction and the up-down direction, and has a rectangular shape elongated in the left-right direction when viewed from the front. The coupling member 115 fixes both ends in the left-right direction to the adjacent first fixing surfaces 113 by the fastening member 117. The fastening member 117 is, for example, a bolt, and is screwed to the screwed portion of the first fixing surface 113.

In addition, fig. 11 shows a part of the rear surfaces 25C of the adjacent two bases 25. As shown in fig. 11, a second fixing surface 119 is provided on the rear surface 25C of the base 25. The second fixing surface 119 is provided at an end portion in the left-right direction above the rear surface 25C. The second fixing surface 119 is formed along the left-right direction and the up-down direction. The second fixing surfaces 119 of the adjacent two bases 25 are connected by a connecting member 121. The coupling member 121 fixes the end portions in the left-right direction to each other by the fastening member 123 to the two adjacent second fixing surfaces 119.

Here, conventionally, when two mounting machines 11 are arranged in parallel, for example, in an installation work, the two mounting machines 11 are first installed close to each other with a gap therebetween. Next, the vertical and longitudinal positions of the mounting machine 11 are adjusted, and the positions of the substrate guides 32 included in the substrate transport devices 31 of the two mounting machines 11 and the belt conveyors mounted on the substrate guides 32 are aligned. That is, the two mounting machines 11 are arranged close to each other at an approximate position without being aligned with the vertical and front-rear directions, and then the positions are adjusted by the operator's feeling. Therefore, the adjustment work is performed in a large portion depending on the operator's feeling, and an error occurs in the position of the substrate guide 32 due to the difference in the operator's feeling, and the adjustment work may be difficult.

In contrast, as described above, the base 25 of the present embodiment has the distal end surface 98A, the upper surface 98B, the first fixing surface 113, and the like of the positioning member 97 as reference surfaces. By disposing the mounting machine 11 using the front end surface 98A or the like, the amount of adjustment work that is perceived by the operator after the disposition can be reduced.

Next, an example of the installation procedure of the mounting machine 11 will be described with reference to fig. 12. The order of the setting procedure and the reference surface used in each step shown in fig. 12 are examples, and the order and the reference surface used may be changed as appropriate. In the mounting machine 11 of the present embodiment, similarly to the board guide 32, the travel path 52A of the first roller guide 52, the support portion 53A of the second roller guide 53, and the like are disposed at predetermined positions with respect to the reference surface. The first and second roller guides 52 and 53 can be aligned using the reference surfaces in the same manner as the substrate guide 32. Therefore, in the following description, the positioning of the substrate guide 32 will be mainly described, and the description of the positioning of the first and second roller guides 52 and 53 in the same manner will be omitted as appropriate.

First, in step (hereinafter, abbreviated as "S") 11 shown in fig. 12, the worker who performs the setting temporarily sets the mounting machine 11. The worker sets the mounting machine 11 based on, for example, the position of the production line of the production system 10, and sets another mounting machine 11 based on the mounting machine 11. The operator newly sets the mounting machine 11 next to the already set mounting machine 11 (S11). The two mounting machines 11 are disposed adjacent to each other with a gap provided therebetween in the left-right direction.

Next, the operator aligns the positions of the two adjacent work machines in the left-right direction (S13). The operator aligns the positions of the front end face 98A of the protruding portion 98 of the mounting machine 11 temporarily set at S11 and the front end face 98A of the mounting machine 11 already set. As shown in fig. 7 and 8, for example, two adjacent mounting machines 11 are arranged in parallel such that the entire distal end surfaces 98A of the protruding portions 98 are in surface contact with each other and a slight gap is provided between the other portions (the other portions of the positioning member 97 and the module 23). The mounting machine 11 is in a state in which both the front end projection 98 and the rear end projection 98 are in contact with the adjacent projection 98 of the mounting machine 11.

For example, the worker aligns the vertical and front-rear positions of the front end face 98A of an arbitrary mounting machine 11 with the positions of the front end faces 98A of the adjacent mounting machines 11, and brings the two front end faces 98A into surface contact with each other. As described above, the substrate guide 32 and the first and second roller guides 52 and 53 of the substrate transport device 31 are disposed at predetermined positions in the left-right direction with respect to the front end surface 98A. Therefore, the distance between the adjacent substrate guides 32 in the left-right direction can be easily set to an appropriate distance. Further, the substrate BD moved across the two mounting machines 11 can be smoothly moved.

Next, the upper surface 98B is used to align the vertical positions of the substrate guide 32, the first and second roller guides 52 and 53, and the like. The first fixing surface 113 is used to position the substrate guide 32, the first and second roller guides 52 and 53, and the like in the front-rear direction. By sequentially performing the positioning in each direction, the substrate guide 32 can be accurately positioned.

As described above, the base 25 of the present embodiment has the protruding portion 98 at the end in the transport direction (left-right direction) in which the substrate BD is transported. When a plurality of mounting machines 11 are arranged in parallel, the protruding portion 98 provided in any mounting machine 11 protrudes toward the protruding portion 98 of the adjacent mounting machine 11. The reference surface of the present embodiment includes a front end surface 98A formed at the front end of the protruding portion 98. Thus, by aligning the positions of the projections 98 provided on the respective adjacent bases 25, the mounting machine 11 can be set by accurately aligning the substrate guides 32 of the adjacent mounting machines 11 with each other.

When the front end surface 98A provided in an arbitrary mounting machine 11 and the front end surface 98A provided in an adjacent mounting machine 11 are aligned with each other in the vertical direction and brought into surface contact with each other, the positions (intervals, etc.) in the horizontal direction (an example of the conveying direction) of the substrate guide 32, etc. of the arbitrary mounting machine 11 and the substrate guide 32, etc. of the adjacent mounting machine 11 are aligned (positioned in a predetermined relative positional relationship). Thus, the positions of the substrate guides 32 and the like can be aligned with the positions of the adjacent mounting machines 11 in the left-right direction only by aligning and surface-contacting the positions of the front end surfaces 98A of the adjacent bases 25. Therefore, the reference for the position adjustment during the installation work becomes clearer, and the work depending on the feeling of the operator can be further reduced. Further, since the configuration is such that only the distal end surfaces 98A of the protruding portions 98 of the two positioning members 97 adjacent in the left-right direction are brought into contact, the installation work of the base 25 can be easily performed as compared with the configuration in which the entire outer surfaces of the positioning members 97 in the left-right direction are brought into contact.

The substrate transport device 31 of the mounting machine 11 according to the present embodiment functions as a substrate transport unit that transports the substrate BD along the substrate guide 32. Therefore, with the above configuration, the guide of the substrate transport unit that transports the substrate BD can be accurately positioned.

Further, the position of the mounting machine 11 may be finely adjusted after the distal end surface 98A is set in surface contact. When the adjacent bases 25 are arranged with the front end surfaces 98A in surface contact with each other at the positions in the vertical direction and the front-rear direction, the upper surfaces 98B of the two bases 25 should be arranged in parallel on the same plane along the horizontal direction and the front-rear direction. That is, the two upper surfaces 98B are at the same position in the up-down direction. If the vertical positions of the two upper surfaces 98B are deviated, the operator may finely adjust the vertical position of the mounting machine 11 with the upper surface 98B as a reference plane (S15). Alternatively, the operator may simultaneously perform the position adjustment in the left-right direction based on the distal end surface 98A in S13 and the position adjustment in the up-down direction based on the upper surface 98B in S15.

For example, as shown in fig. 10 and 11, a plurality of leg portions 110 are provided on the lower surface of the base 25. A leveling bolt is attached to each leg 110, and an adjusting nut 111 is screwed to the leveling bolt. The vertical position of the base 25 can be adjusted by the adjusting nuts 111 of the respective leg portions 110. For example, when the upper surface 98B serving as a reference surface is distorted due to the weight of the base 25 or the module 23 and the vertical position of the substrate guide 32, the first and second roller guides 52 and 53, and the like to be subjected to position adjustment based on the reference surface are deviated, the operator may screw the adjustment nut 111 to finely adjust the positions of the upper surface 98B, the substrate guide 32, and the like (S15).

Thus, the reference surface of the present embodiment includes the upper surface 98B of the projection 98. In the case where a plurality of mounting machines 11 are arranged in parallel, when the upper surface 98B of an arbitrary mounting machine 11 and the upper surface 98B of an adjacent mounting machine 11 are arranged so as to be aligned with each other in the vertical direction, the vertical positions of the substrate guides 32 and the like of the arbitrary mounting machine 11 and the substrate guides 32 and the like of the adjacent mounting machine 11 are aligned with each other. Accordingly, the operator can easily align the vertical positions of the substrate guide 32, the first and second roller guides 52 and 53, and the like by aligning the position of the upper surface 98B.

In S13, when the adjacent bases 25 are disposed at positions corresponding to the positions of the distal end surfaces 98A, the first fixing surfaces 113 of the two bases 25 should be disposed in parallel on the same plane along the vertical direction and the horizontal direction. That is, the two first fixing surfaces 113 are located at the same position in the front-rear direction. If the two first fixing surfaces 113 are assumed to be displaced in the front-rear direction, the operator may adjust the front-rear direction position by fastening the fastening member 117 (see fig. 10) (S17). The operator can align the front-back direction positions of the two first fixing surfaces 113, that is, the front-back direction positions of the two mounting machines 11, while adjusting the fastening positions of the four fastening members 117, for example. In this way, the mounting machine 11 of the present embodiment can easily and accurately perform position adjustment using the three reference surfaces (the distal end surface 98A, the upper surface 98B, and the first fixing surface 113). The reference surface used for the position adjustment is not limited to the three surfaces. For example, the operator may align the reference front surface 103A of the rail holding plate 103 to adjust the positions of the two mounting machines 11 in the front-rear direction.

The operator fixes the first fixing surfaces 113 of the two mounting machines 11 arranged in parallel by the coupling member 115 and the fastening member 117, and then fixes the second fixing surfaces 119 at the rear by the coupling member 121 and the fastening member 123 (S17). This suppresses the relative positional deviation of the two mounting machines 11. The substrate guide 32 and the first roller guide 52 are fixed in alignment.

Here, the base 25 of the present embodiment is long in the front-rear direction. Therefore, depending on the accuracy of the manufacturing process of the assembly base 25, the relative position of the rear surface 25C with respect to the front surface 25A may vary for each mounting machine 11. The mounting machine 11 according to the present embodiment can perform cutting of each component using, for example, the front reference front surface 103A as a reference position. In this case, the machining accuracy of the second fixing surface 119 provided on the rear surface 25C (i.e., the second fixing surface 119 provided at a position farther from the reference position) may be lower than the machining accuracy of the first fixing surface 113 on the front side. As a result, when the front first fixing surface 113 is fixed, the two rear second fixing surfaces 119 may be slightly displaced in the front-rear direction. Therefore, as shown in fig. 11, the coupling member 121 for fixing the second fixing surface 119 may be formed without using a single metal plate. For example, the connecting member 121 may be formed of two metal plates that can allow a certain amount of movement in the front-rear direction with respect to one metal plate and the other metal plate. Thus, even when the positions of the two second fixing surfaces 119 in the front-rear direction are displaced, the two second fixing surfaces 119 can be coupled by changing the angle of the coupling member 121. The adjacent two bases 25 are fixed to the second fixing surface 119 in addition to the first fixing surface 113, and both the front surface 25A and the rear surface 25C are fixed, so that relative positional deviation is further suppressed. It is possible to align the positions of the substrate guide 32, the first roller guide 52, and the like, and to securely fix the adjacent two mounting machines 11.

In the mounting machine 11 of the present embodiment, when a plurality of mounting machines 11 are arranged in parallel, the first and second fixing surfaces 113 and 119 of an arbitrary mounting machine 11 and the first and second fixing surfaces 113 and 119 of the adjacent mounting machine 11 can be connected by the connecting

members

115 and 121. The first and second fixing surfaces 113 and 119 are fixed to the

coupling members

115 and 121 by fastening the

fastening members

117 and 123. This can suppress the positional deviation between the first fixing surface 113 and the other reference surfaces (the front end surface 98A, the upper surface 98B, and the like), and further suppress the positional deviation between the substrate guides 32 and the like of the two adjacent mounting machines 11.

The reference surfaces (the front end surface 98A, the upper surface 98B, and the first fixing surface 113) in the present embodiment are flat surfaces along any one of the vertical direction, the horizontal direction, and the front-rear direction of the mounting apparatus 11. That is, the reference surface is formed along each direction of the mounting machine 11. Thus, when the position of the reference surface is aligned in the reference surface positioning operation, the vertical direction of the mounting machine 11 and the like can be easily recognized with a sense, and the position adjustment operation can be efficiently performed.

Returning to fig. 12, the operator confirms the positions of the respective members after setting another mounting machine 11 adjacent thereto and performing the position adjustment of S13 to S17 (S19). For example, the operator checks whether or not the substrate guides 32 are aligned in the left-right direction (S19). The worker also performs the confirmation work with respect to the rail holding plate 103, the first and second roller guides 52 and 53, and the like. The mounting machine 11 of the present embodiment conveys not only the substrate BD but also the replacement robot 15 to another mounting machine 11. The replacement robot 15 moves along the first and second roller guides 52, 53. When the positions of the reference surfaces such as the distal end surface 98A are aligned, the two adjacent rail holding plates 103 are arranged such that the upper surfaces 103C (see fig. 8) are arranged along the same plane and are aligned with each other. In other words, the two upper surfaces 103C are arranged on the same plane along the front-rear direction and the left-right direction. However, there is some deviation due to skew of the device and the like. The operator may check whether or not the upper surfaces 103C of the adjacent rail holding plates 103 are horizontal to each other using a level gauge or the like (S19). If the upper surface 103C is not horizontal, the operator may screw the adjusting nut 111 of the leg 110 to secure the horizontal position. Thus, the position of power supply unit 105 attached to upper surface 103C is aligned.

Further, a first roller guide 52 is attached to the front end of the rail holding plate 103. The operator may check the level of the first roller guide 52 using a level gauge or the like, as in the case of the upper surface 103C, and may perform adjustment or the like by the adjustment nut 111 if necessary. The operator may also perform a transfer test in which a test moving device including the first and

second guide rollers

62 and 63 and the pinion 82 (see fig. 4) travels on the first roller guide 52 and moves between the two first roller guides 52. Further, adjustment by the adjustment nut 111 and the like may be performed according to the result of the transfer test. The operator may also perform horizontal confirmation, traveling state confirmation, and fine position adjustment on the second roller guide 53 provided below the first roller guide 52, as in the case of the first roller guide 52. After the position adjustment is performed, the adjacent first roller guide 52 or second roller guide 53 may be connected and fixed to each other.

In this way, after the worker finishes the position adjustment and confirmation work shown in fig. 12, the worker similarly performs the setting of the next mounting machine 11 to set the production system 10. In the above-described arrangement order, the mounters 11 having the modules 23 are arranged in order, but the arrangement order is not limited to this. For example, all the pedestals 25 may be provided first, and then the module 23 may be attached to the provided pedestals 25. Alternatively, an adjacent base 25 may be provided, and the module 23 may be attached to the base 25 when the confirmation work is performed. Therefore, the mounting timing of the modules 23 in the setting order is not particularly limited.

As described above, in the mounting machine 11 of the present embodiment, the first fixing surface 113 serving as the reference surface is disposed on the front surface 25A of the base 25, which is the same as the replacement robot 15 and the first and second roller guides 52 and 53. Thus, by shortening the distance between the reference surface and the first and second roller guides 52 and 53 to be adjusted, the error in the position of the first and second roller guides 52 and 53 with respect to the reference surface can be reduced.

The base 25 of the present embodiment has a substantially rectangular parallelepiped shape elongated in the front-rear direction. The first fixing surface 113 functions as a reference surface formed on the front surface 25A of the base 25. When the mounting machines 11 are aligned with the front-rear direction positions of the first fixing surfaces 113 of the adjacent mounting machines 11, the front-rear direction positions of the substrate guide 32 of any mounting machine 11, the first and second roller guides 52 and 53, the substrate guide 32 of the adjacent mounting machine 11, and the like are aligned.

Thus, the positions of the substrate guide 32 and the first and second roller guides 52 and 53 provided on the front surface 25A of the base 25 can be aligned by aligning the front-rear direction positions of the first fixing surface 113 provided on the front surface 25A of any mounting machine 11 and the first fixing surface 113 provided on the front surface 25A of the adjacent mounting machine 11. The first and second roller guides 52 and 53 of the adjacent mounting machines 11 are adjusted in the front-rear direction and arranged in positions aligned with each other.

The first and second roller guides 52 and 53 of the present embodiment function as a conveying portion and a guide provided on the front surface 25A of the base 25 in the front-rear direction. The first and second roller guides 52 and 53 function as a replenishing-device conveying unit that conveys the replacement robot 15, which replenishes electronic components to the mounting machine 11, along the first and second roller guides 52 and 53. Therefore, with the above configuration, the guide of the replenishing-device conveying section of the conveying replacement robot 15 can be accurately positioned.

In the above description, the arrangement of two mounting machines 11 is described, but the arrangement may be the same for three or more mounting machines 11. For example, when a plurality of mounting machines 11 are arranged in the left-right direction in this order from left to right, the plurality of mounting machines 11 may be arranged in order by adjusting the positions of the mounting machines 11 arranged after the mounting machine is arranged based on the front end surface 98A or the like. Alternatively, the mounting machines 11 may be sequentially installed on both sides in the left-right direction of the installed mounting machine 11 with reference to the position of the installed mounting machine 11.

Incidentally, the relationship between the terms of the embodiment and the terms of the present disclosure is as follows.

The mounting machine 11 is an example of a substrate working machine. The replacement robot 15 is an example of a transported object or a replenishment device. The substrate transfer device 31 is an example of a transfer unit and a substrate transfer unit. The substrate guide 32 is an example of a guide. The front end surface 98A is an example of a reference surface. The upper surface 98B is an example of an upper reference surface. The first roller guide 52 and the second roller guide 53 are examples of a conveying section, a replenishing-apparatus conveying section, and a guide. The first fixing surface 113 is an example of a front surface reference surface. The substrate BD is an example of an object to be transported.

As described above, the present embodiment provides the following effects.

In one embodiment of the present embodiment, the base 25 has a distal end surface 98A, an upper surface 98B, and a first fixing surface 113 as reference surfaces to be used as reference surfaces for positioning. When the position of the front end surface 98A or the like of an arbitrary mounting machine 11 is aligned with the position of the front end surface 98A or the like of an adjacent mounting machine 11, the positions of the substrate guide 32 or the like of the arbitrary mounting machine 11 and the substrate guide 32 or the like of the adjacent mounting machine 11 in the vertical direction, the horizontal direction, and the front-rear direction are aligned.

Thus, in the setting operation, the position of the front end surface 98A or the like of an arbitrary mounting machine 11 is aligned with the position of the front end surface 98A or the like of the adjacent mounting machine 11, and the adjacent substrate guides 32 or the like can be aligned and arranged. Thus, the operator can align the positions of the substrate guides 32 and the like by aligning the positions of the front end surface 98A and the like of the base 25. Therefore, the position adjustment work according to the operator's feeling can be reduced, and the substrate guides 32 of the adjacent mounting machines 11 can be accurately positioned. As a result, the object (the substrate BD, the replacement robot 15) moving between the mounting machines 11 can be stably conveyed.

It is needless to say that the present disclosure is not limited to the above embodiments, and various improvements and modifications can be made without departing from the scope of the present disclosure.

For example, in the above embodiment, the power source (drive motor 73) for moving the replacement robot 15 is disposed in the replacement robot 15, but the present invention is not limited thereto. For example, the mounting machine 11 may include a gear for moving the replacement robot 15, a belt conveyor, a drive motor for rotating the gear, and the like on the front surface 25A. In this case, a gear or the like that moves the replacement robot 15 is an example of the conveying unit and the replenishing-apparatus conveying unit of the present disclosure.

The mounting machine 11 includes the distal end surface 98A, the upper surface 98B, and the first fixing surface 113 as reference surfaces, but may include only one reference surface. For example, the mounting machine 11 may be configured to include only the distal end surface 98A as a reference surface and not include another reference surface such as the upper surface 98B. In addition, the reference front surface 103A, the upper surface 103C and the lower surface of the rail holding plate 103, the upper surface, the front surface, the lower surface, and the like of the protruding portion 98 may be used as the reference surfaces. For example, the worker may set the mounting machine 11 by first aligning the positions of the upper surface 103C in the vertical direction and the front-rear direction.

In the above embodiment, the two distal end surfaces 98A are brought into surface contact with each other, but the present invention is not limited thereto. For example, two pedestals 25 may be disposed so as to provide a gap between the front end surfaces 98A.

The mounting machine 11 may not include the first roller guide 52 or the second roller guide 53. In this case, the production system 10 may not include a device for automatically replacing the feeder 21, such as the replacement robot 15. The reference surface may be used only for positioning the substrate guide 32.

The adjacent bases 25 may not be connected by the connecting

members

115 and 121.

The reference surface may be a plane inclined at a predetermined angle with respect to at least one of the vertical direction, the horizontal direction, and the front-rear direction.

The substrate working machine according to the present disclosure is not limited to the mounting machine 11 that mounts electronic components on the substrate BD. The substrate working machine may be another device that performs work on the substrate BD, such as a screen printer, a mounting inspection machine, or a reflow furnace. The components to be mounted on the substrate BD may be components (screws, etc.) other than electronic components.

Description of the reference numerals

11 mounting machine (to-substrate working machine), 15 replacement robot (conveyed object, replenishing device), 23 module, 25 base, 31 substrate conveying device (conveying part, substrate conveying part), 32 substrate guide (guide part), 52 first roller guide (guide part, conveying part, replenishing device conveying part), 53 second roller guide (guide part, conveying part, replenishing device conveying part), 98 protrusion part, 98A front end face (reference face), 98A front end face (upper side reference face), 103A reference front surface (front side reference face), 113 first fixing face (front surface side reference face), 119 second fixing face (reference face), BD substrate (conveyed object).

Claims

1. A substrate working machine is provided with:

a module for performing component mounting operation on the conveyed substrate;

a base on which the module is disposed; and

a conveying unit that conveys the object to be conveyed relating to the mounting operation along a guide;

the base has a reference surface as a reference of a position of the base,

the guide of the conveying part is arranged at a predetermined position with the reference surface as a reference,

the substrate working mechanism is configured such that a plurality of the substrate working machines are arranged in parallel, the object to be conveyed, which is carried out by the conveying part of any one of the substrate working machines along the guide, can be carried in along the guide by the conveying part of the adjacent substrate working machine, and when the position of the reference surface of the any one of the substrate working machines is aligned with the position of the reference surface of the adjacent substrate working machine, the position of the guide of the any one of the substrate working machines is aligned with the position of the guide of the adjacent substrate working machine,

the susceptor has a protruding portion at an end in a conveying direction in which the substrate is conveyed,

wherein the projecting portion is configured to project toward the projecting portion of the adjacent substrate working machine pair when a plurality of substrate working machines are arranged in parallel,

the reference surface includes a front end surface formed at a front end of the protruding portion in the conveying direction and formed at an outermost side of the base in the conveying direction,

the position in the conveying direction between the guides of the two adjacent pairs of substrate working machines is aligned only by aligning the front end surfaces of the two adjacent pairs of substrate working machines with each other at a position in the vertical direction to make surface contact.

2. The substrate working machine according to claim 1, wherein the base has a substantially rectangular parallelepiped shape having a predetermined thickness in a direction orthogonal to a mounting surface on which the substrate working machine is mounted,

the protruding portion and the front end surface are disposed at an upper end portion of the base.

3. The substrate working machine according to claim 1, wherein an end of the base in the conveying direction has a positioning member,

the protrusion is protrudingly provided from the positioning member,

the two adjacent pair of substrate working machines are arranged in parallel with each other with a gap provided between the other portions of the positioning member, the front end surfaces of the protruding portions being in surface contact with each other.

4. The substrate working machine according to claim 2, wherein an end of the base in the conveying direction has a positioning member,

the protrusion is protrudingly provided from the positioning member,

5. The substrate working machine according to any one of claims 1 to 4,

the reference surface includes an upper reference surface formed on an upper surface of the protruding portion,

in a case where a plurality of the substrate working machines are provided in parallel, when the upper reference surface of the arbitrary substrate working machine and the upper reference surface of the adjacent substrate working machine are arranged so as to be aligned with each other in a vertical direction, the guide of the arbitrary substrate working machine and the guide of the adjacent substrate working machine are aligned in a vertical direction.

6. The substrate working machine according to any one of claims 1 to 4,

the base is in a substantially rectangular parallelepiped shape long in the front-rear direction,

the reference surface includes a front surface side reference surface formed on a front surface of the base in the front-rear direction,

the substrate working mechanism is configured such that, when a plurality of substrate working machines are arranged in parallel, the guide of the arbitrary substrate working machine and the guide of the adjacent substrate working machine are aligned in the front-rear direction when the front-surface-side reference surface of the arbitrary substrate working machine and the front-surface-side reference surface of the adjacent substrate working machine are arranged in alignment with the position in the front-rear direction.

7. The substrate working machine according to claim 6, wherein,

wherein the substrate working mechanism is configured such that, when a plurality of the substrate working machines are arranged in parallel, the front surface side reference surface of the arbitrary substrate working machine and the front surface side reference surface of the adjacent substrate working machine can be coupled by a coupling member,

the front surface side reference surface is fixed to the coupling member by fastening of a fastening member.

8. The substrate working machine according to any one of claims 1 to 4,

the conveying section includes a substrate conveying section that conveys the substrate along the guide.

9. The substrate working machine according to any one of claims 1 to 4,

the conveying section includes a replenishing device conveying section that conveys a replenishing device that replenishes the component to the substrate working machine along the guide.