CN112255718A - Large-view-field X-ray absorption grating and manufacturing method thereof - Google Patents
Large-view-field X-ray absorption grating and manufacturing method thereof Download PDFInfo
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Abstract
The embodiment of the invention discloses a large-field-of-view X-ray absorption grating and a manufacturing method thereof. The large-field-of-view X-ray absorption grating comprises a metal lamination, wherein the metal lamination comprises a plurality of first metal layers and a plurality of second metal layers which are arranged in a lamination mode; the thickness of the first end of each first metal layer is greater than that of the second end of each first metal layer, the thickness of the first end of each second metal layer is greater than that of the second end of each second metal layer, the first ends of the first metal layers and the first ends of the second metal layers are located at the first ends of the large-field-of-view X-ray absorption gratings, and the second ends of the first metal layers and the second ends of the second metal layers are located at the second ends of the large-field-of-view X-ray absorption gratings; the density of the first metal layer is greater than the density of the second metal layer. The large-field-of-view X-ray absorption grating provided by the embodiment of the invention has the advantages of large depth-width ratio, controllable grating period and grating angle, good uniformity and good imaging effect, and is suitable for low-cost mass production.
Description
Technical Field
The embodiment of the invention relates to the technology of optical devices, in particular to a large-field-of-view X-ray absorption grating and a manufacturing method thereof.
Background
X-ray differential interference imaging techniques, which are capable of acquiring X-ray absorption, scattering and phase contrast images, have very important applications in the fields of medicine, life sciences, material sciences and industrial applications.
The X-ray absorption grating has important function in X-ray differential interference imaging, and in view of the extremely strong penetration force of X-rays and the large depth-to-width ratio, the basic requirements of grating fabrication are met, and the fabrication technology of the existing grating mainly includes the following four techniques:
deep Reactive Ion Etching (DRIE), LIGA technology combining photolithography (lithaggie), electroforming (galvanoforming) and injection molding (abormung), photo-assisted electrochemical etching technology and metal stack compression molding technology. Wherein, the DRIE technology has low etching depth-to-width ratio; the LIGA technology has high manufacturing cost and small manufacturing area; the photo-assisted electrochemical etching method has a complex flow, the silicon-based resistivity, the temperature, the corrosive liquid and the like in the manufacturing process have large influence on the etching structure and are difficult to control, and high-atomic-number metal needs to be filled in the subsequent process, so that the filling process is complex, the conditions are harsh, and the filling uniformity is poor. Compared with the first three technologies, the fourth metal lamination compression molding technology can utilize metal films with uniform thickness to be overlapped and then compression molded, has good uniformity and consistency, is easy to control the period, is suitable for mass production and manufacture of X-ray gratings, and has wide development prospect.
However, the X-ray grating prepared by the above method is generally a plane grating, and since the rays emitted by the light source in the X-ray grating interferometer are cone beams, the phase contrast information and the dark field information cannot coincide with the plane grating in the propagation direction of the X-rays, and the plane grating will generate a phenomenon of edge contrast reduction under the projection thereof, the reduction is more serious the farther away from the optical axis, which limits the effective field of view of the whole imaging system.
Disclosure of Invention
The embodiment of the invention provides a large-field-of-view X-ray absorption grating and a manufacturing method thereof.
In a first aspect, an embodiment of the present invention provides a large-field-of-view X-ray absorption grating, including a metal stack, where the metal stack includes a plurality of first metal layers and a plurality of second metal layers that are stacked;
the thickness of the first end of each first metal layer is greater than that of the second end of each first metal layer, the thickness of the first end of each second metal layer is greater than that of the second end of each second metal layer, the first ends of the first metal layers and the first ends of the second metal layers are located at the first ends of the large-field-of-view X-ray absorption gratings, and the second ends of the first metal layers and the second ends of the second metal layers are located at the second ends of the large-field-of-view X-ray absorption gratings;
the density of the first metal layer is greater than the density of the second metal layer.
Optionally, an end face of the first end of the large-field-of-view X-ray absorption grating is a plane or an arc, and an end face of the second end of the large-field-of-view X-ray absorption grating is a plane or an arc.
Optionally, the thickness of the first metal layer decreases linearly from the first end to the second end of the first metal layer;
the thickness of the second metal layer decreases linearly from the first end to the second end of the second metal layer.
Optionally, the first metal layer includes a heavy metal material for absorbing X-rays, and the second metal layer includes a light metal material for transmitting X-rays.
Optionally, the first metal layer includes gold, silver or lead, and the second metal layer includes lithium, beryllium, aluminum or magnesium.
In a second aspect, an embodiment of the present invention further provides a method for manufacturing a large-field X-ray absorption grating, including:
providing a first platen and a second platen;
forming a metal laminate between the first and second platens, the metal laminate comprising a plurality of first metal layers and a plurality of second metal layers in a stacked arrangement;
the thickness of the first end of the metal lamination is larger than that of the second end of the metal lamination by using a compression molding technology;
heating the metal lamination layer to enable the metal lamination layer to be fixedly molded;
cutting the metal stack to form a large field of view X-ray absorption grating.
Optionally, cutting the metal stack to form the large-field-of-view X-ray absorption grating includes:
cutting the end face of one end of the metal lamination into a plane or a cambered surface;
and cutting the other end of the metal lamination into a plane or an arc surface to form the large-field X-ray absorption grating.
Optionally, the making, by using a compression molding technique, the thickness of the first end of the metal stack layer greater than the thickness of the second end includes:
applying different pressures to the two ends of the first pressing plate and the second pressing plate so that the thickness of the first end of the metal lamination is larger than that of the second end.
Optionally, the making, by using a compression molding technique, the thickness of the first end of the metal stack layer greater than the thickness of the second end includes:
respectively placing a plurality of first metal layers and second metal layers between a first roller and a second roller;
when the first roller and the second roller roll, the first metal layer or the second metal layer is rolled into a metal membrane with linearly changed thickness;
and mutually superposing a plurality of metal membranes to form a metal lamination, and placing the metal lamination between the first pressing plate and the second pressing plate for fixing.
Optionally, the first metal layer includes a heavy metal material for absorbing X-rays, and the second metal layer includes a light metal material for transmitting X-rays;
the first metal layer comprises gold, silver or lead, and the second metal layer comprises lithium, beryllium, aluminum or magnesium.
The large-field-of-view X-ray absorption grating provided by the embodiment of the invention comprises a metal laminated layer, wherein the metal laminated layer comprises a plurality of first metal layers and a plurality of second metal layers which are arranged in a laminated manner; the density of the first metal layer is greater than that of the second metal layer, the first metal layer adopts heavy metal and is used for absorbing X rays, the second metal layer adopts light metal and is used for transmitting the X rays, the thickness of the first end of each first metal layer is greater than that of the second end of the first metal layer, the thickness of the first end of each second metal layer is greater than that of the second end of the second metal layer, the grating period and the grating included angle are changed, the grating structure is adjusted to be a metal lamination layer suitable for a cone beam light source to pass through, and the large-view-field X-ray absorption grating with a large depth-width ratio, a grating period, a controllable grating angle, good uniformity and a good imaging effect and suitable for low-cost mass production is formed.
Drawings
FIG. 1 is a schematic structural diagram of a large-field X-ray absorption grating provided by an embodiment of the present invention;
FIG. 2 is a schematic diagram of an X-ray grating imaging system;
FIG. 3 is a schematic diagram of another large field-of-view X-ray absorption grating structure provided by an embodiment of the present invention;
FIG. 4 is a schematic flow chart of a method for manufacturing a large-field X-ray absorption grating according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram after step S120 according to the embodiment of the present invention;
FIG. 6 is a schematic structural diagram after step S130 according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a compression molding technique according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. It should be noted that the terms "upper", "lower", "left", "right", and the like used in the description of the embodiments of the present invention are used in the angle shown in the drawings, and should not be construed as limiting the embodiments of the present invention. In addition, in this context, it is also to be understood that when an element is referred to as being "on" or "under" another element, it can be directly formed on "or" under "the other element or be indirectly formed on" or "under" the other element through an intermediate element. The terms "first," "second," and the like, are used for descriptive purposes only and not for purposes of limitation, and do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Fig. 1 is a schematic structural diagram of a large-field-of-view X-ray absorption grating according to an embodiment of the present invention, and referring to fig. 1, the large-field-of-view X-ray absorption grating according to the embodiment includes a metal stack 10, where the metal stack 10 includes a plurality of first metal layers 11 and a plurality of second metal layers 12 which are stacked; the thickness of the first end of each first metal layer 11 is greater than that of the second end of each first metal layer 11, the thickness of the first end of each second metal layer 12 is greater than that of the second end of each second metal layer 12, the first ends of the first metal layers 11 and the first ends of the second metal layers 12 are located at the first ends of the large-field-of-view X-ray absorption gratings, and the second ends of the first metal layers 11 and the second ends of the second metal layers 12 are located at the second ends of the large-field-of-view X-ray absorption gratings; the density of the first metal layer 11 is greater than the density of the second metal layer 12.
It will be appreciated that X-rays have a relatively high degree of penetration and are of different materials, for example, a heavy metal material (e.g., lead) may absorb X-rays, a light metal material (e.g., aluminum) may transmit X-rays, and optionally, the first metal layer 11 includes a heavy metal material for absorbing X-rays and the second metal layer 12 includes a light metal material for transmitting X-rays. In specific implementation, optionally, the first metal layer 11 may include gold, silver, or lead, and the second metal layer 12 may include lithium, beryllium, aluminum, or magnesium, which is not limited in this embodiment of the invention.
Fig. 2 is a schematic structural diagram of an X-ray grating imaging system, referring to fig. 2, the X-ray grating imaging system includes an X-ray point light source 100, a grating 200 and a detector 300, the X-ray emitted by the point X-ray point light source 100 is a cone beam, and a certain included angle is formed between the light and the propagation optical axis, so that the grating 200 needs to be adjusted according to the light emission angle, the grating structure in fig. 1 is adopted, and the channel of the light-transmitting portion of the grating just allows the light to pass through without being blocked, thereby improving the edge resolution of the system and expanding the field range of the system.
The technical scheme of this embodiment, the density of first metal level is greater than the density of second metal level, first metal level adopts heavy metal, be used for absorbing the X ray, the second metal level adopts light metal, be used for transmitting the X ray, thickness through setting up the first end of every first metal level is greater than the thickness of the second end of first metal level, the thickness of the first end of every second metal level is greater than the thickness of the second end of second metal level, thereby change grating period and grating contained angle, make the grating structure adjust the metal stromatolite that is fit for the cone beam light source to pass through, form and have big aspect ratio, the grating period, the grating angle is controllable, the homogeneity is good, imaging effect is good, be fit for the big visual field X ray absorption grating of low-cost big batch production.
On the basis of the above technical scheme, optionally, the end face of the first end of the large-view-field X-ray absorption grating is a plane or an arc, and the end face of the second end of the large-view-field X-ray absorption grating is a plane or an arc.
With reference to fig. 1, two end faces of the large-field-of-view X-ray absorption grating shown in fig. 1 are both flat surfaces, for example, fig. 3 is a schematic structural diagram of another large-field-of-view X-ray absorption grating provided in an embodiment of the present invention, referring to fig. 3, two end faces of the large-field-of-view X-ray absorption grating are both arc surfaces, light enters from the right end, and in a specific design, an arc surface radius may be set according to a divergence angle of a light beam emitted from a light source, so as to facilitate the entrance of X-. In other embodiments, one end of the large-field-of-view X-ray absorption grating may also be set as a plane, and the other end of the large-field-of-view X-ray absorption grating may also be set as an arc surface.
Optionally, with continued reference to fig. 1 or fig. 3, the thickness of the first metal layer 11 decreases linearly from the first end to the second end of the first metal layer 11; from the first end to the second end of the second metal layer 12, the thickness of the second metal layer 12 decreases linearly, so that a fixed included angle is formed between the metal layers to match the X-ray source of the corresponding exit angle.
Fig. 4 is a schematic flow chart of a manufacturing method of a large-field-of-view X-ray absorption grating according to an embodiment of the present invention, where the manufacturing method provided in this embodiment may be used to manufacture the large-field-of-view X-ray absorption grating provided in the foregoing embodiment, and the manufacturing method includes:
and step S110, providing a first pressing plate and a second pressing plate.
Step S120, forming a metal laminate between the first pressing plate and the second pressing plate, where the metal laminate includes a plurality of first metal layers and a plurality of second metal layers stacked together.
For example, fig. 5 is a schematic structural diagram after step S120 according to an embodiment of the present invention, and referring to fig. 5, a metal stack 10 is included between the first pressing plate 1 and the second pressing plate 2, and the metal stack 10 includes a plurality of first metal layers 11 and second metal layers 12 that are stacked. Alternatively, the first metal layer 11 includes a heavy metal material for absorbing X-rays, and the second metal layer 12 includes a light metal material for transmitting X-rays. Optionally, the first metal layer 11 includes gold, silver or lead, and the second metal layer 12 includes lithium, beryllium, aluminum or magnesium, which is not limited in the embodiment of the present invention.
Step S130, a compression molding technique is used to make the thickness of the first end of the metal stack greater than that of the second end.
In one embodiment, optionally, the making the thickness of the first end of the metal laminate layer greater than the thickness of the second end by using a compression molding technique includes:
different pressures are applied to the two ends of the first pressing plate and the second pressing plate, so that the thickness of the first end of the metal lamination is larger than that of the second end.
For example, fig. 6 is a schematic structural diagram after step S130 according to an embodiment of the present invention, and referring to fig. 6, different pressures are applied between the first pressing plate 1 and the second pressing plate 2 (fig. 6 takes the example that the pressure at the right end is greater than the pressure at the left end as an example), so as to form a metal stack 10 with a thick end and a thin end.
In another embodiment, optionally, the making the thickness of the first end of the metal laminate layer larger than the thickness of the second end by using a compression molding technique includes:
respectively placing a plurality of first metal layers and second metal layers between a first roller and a second roller;
rolling the first metal layer or the second metal layer into a metal membrane with linearly changed thickness when the first roller and the second roller roll;
and mutually overlapping a plurality of metal membranes to form a metal lamination, and placing the metal lamination between the first pressing plate and the second pressing plate for fixing.
Exemplarily, fig. 7 is a schematic structural diagram of a compression molding technique according to an embodiment of the present invention, and referring to fig. 7, a first metal layer 11 or a second metal layer 12 is disposed between a first roller 3 and a second roller 4, the first roller 3 is configured to be a non-circular shape with a gradually changing radius, so that the first metal layer 11 or the second metal layer 12 is rolled into a metal film with a linearly changing thickness when the first roller 3 and the second roller 4 roll; then, a plurality of metal films are stacked to form a metal stack, and the metal stack is placed between a first pressing plate and a second pressing plate to be fixed, so that the structure shown in fig. 6 is formed.
Step S140, heating the metal laminate to fix and mold the metal laminate.
In specific implementation, the heating temperature is flexibly set according to the used metal materials, for example, the heating temperature can be 400 to 500 ℃ when the first metal layer is made of silver, the heating temperature can be 400 to 500 ℃ when the second metal layer is made of aluminum, the heating temperature can be 200 to 300 ℃ when the first metal layer is made of lead, and the heating temperature can be 200 to 300 ℃ when the second metal layer is made of aluminum.
And step S150, cutting the metal lamination to form the large-field X-ray absorption grating.
Optionally, cutting the metal stack to form the large-field-of-view X-ray absorption grating comprises:
the end surface of one end of the cut metal lamination is a plane or a cambered surface;
and the other end of the cut metal lamination is a plane or a cambered surface so as to form the large-field-of-view X-ray absorption grating.
It is understood that the grating structure shown in fig. 1 can be obtained when the end faces of both ends of the cut metal stack are flat, and the grating structure shown in fig. 3 can be obtained when the end faces of both ends of the cut metal stack are arc-shaped.
The prior method for preparing the X-ray absorption grating by etching has the following defects: the manufacture of the X-ray absorption grating with a large depth-to-width ratio is difficult; the uniformity is difficult when large-area gratings are manufactured; in order to solve the problem of absorption of X-rays, heavy metal absorbing substances are required to be filled in the manufactured grating grooves, and the problem of uniformity of filling cannot be solved by a filling process. And the angle of the etching holes can only be vertical to the surface, so that different included angles can not exist among the etching holes, the etching holes are in a non-parallel state, and the arc cylindrical grating can not be manufactured.
The metal laminated compression molding technology provided by the embodiment can solve the manufacturing problem of micropores with large depth-to-width ratio, the grating period and the grating angle are controllable, the uniformity is good, convenience and rapidness are realized, and large-area X-ray absorption gratings with large depth-to-width ratio can be manufactured in a large batch. The grating angle control can be realized by utilizing the metal laminated compression molding technology, so that the manufacture of the arc cylindrical surface grating is realized, and an important technical support is provided for the development of the X-ray grating imaging technology.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A large-field-of-view X-ray absorption grating is characterized by comprising a metal lamination, wherein the metal lamination comprises a plurality of first metal layers and a plurality of second metal layers which are arranged in a lamination mode;
the thickness of the first end of each first metal layer is greater than that of the second end of each first metal layer, the thickness of the first end of each second metal layer is greater than that of the second end of each second metal layer, the first ends of the first metal layers and the first ends of the second metal layers are located at the first ends of the large-field-of-view X-ray absorption gratings, and the second ends of the first metal layers and the second ends of the second metal layers are located at the second ends of the large-field-of-view X-ray absorption gratings;
the density of the first metal layer is greater than the density of the second metal layer.
2. The large-field-of-view X-ray absorption grating as claimed in claim 1, wherein the end surface of the first end of the large-field-of-view X-ray absorption grating is a plane or an arc surface, and the end surface of the second end of the large-field-of-view X-ray absorption grating is a plane or an arc surface.
3. The large-field-of-view X-ray absorption grating as recited in claim 1, wherein the thickness of the first metal layer decreases linearly from a first end to a second end of the first metal layer;
the thickness of the second metal layer decreases linearly from the first end to the second end of the second metal layer.
4. The large-field-of-view X-ray absorption grating as claimed in any one of claims 1 to 3, wherein the first metal layer comprises a heavy metal material for absorbing X-rays, and the second metal layer comprises a light metal material for transmitting X-rays.
5. The large field of view X-ray absorption grating of claim 4, wherein the first metal layer comprises gold, silver, or lead, and the second metal layer comprises lithium, beryllium, aluminum, or magnesium.
6. A method for manufacturing a large-field-of-view X-ray absorption grating is characterized by comprising the following steps:
providing a first platen and a second platen;
forming a metal laminate between the first and second platens, the metal laminate comprising a plurality of first metal layers and a plurality of second metal layers in a stacked arrangement;
the thickness of the first end of the metal lamination is larger than that of the second end of the metal lamination by using a compression molding technology;
heating the metal lamination layer to enable the metal lamination layer to be fixedly molded;
cutting the metal stack to form a large field of view X-ray absorption grating.
7. The method of manufacturing according to claim 6, wherein cutting the metal laminate to form a large-field-of-view X-ray absorption grating comprises:
cutting the end face of one end of the metal lamination into a plane or a cambered surface;
and cutting the other end of the metal lamination into a plane or an arc surface to form the large-field X-ray absorption grating.
8. The method of claim 6, wherein the step of using a compression molding technique to make the thickness of the first end of the metal laminate layer greater than the thickness of the second end comprises:
applying different pressures to the two ends of the first pressing plate and the second pressing plate so that the thickness of the first end of the metal lamination is larger than that of the second end.
9. The method of claim 6, wherein the step of using a compression molding technique to make the thickness of the first end of the metal laminate layer greater than the thickness of the second end comprises:
respectively placing a plurality of first metal layers and second metal layers between a first roller and a second roller;
when the first roller and the second roller roll, the first metal layer or the second metal layer is rolled into a metal membrane with linearly changed thickness;
and mutually superposing a plurality of metal membranes to form a metal lamination, and placing the metal lamination between the first pressing plate and the second pressing plate for fixing.
10. The method according to any one of claims 6 to 9, wherein the first metal layer comprises a heavy metal material for absorbing X-rays, and the second metal layer comprises a light metal material for transmitting X-rays;
the first metal layer comprises gold, silver or lead, and the second metal layer comprises lithium, beryllium, aluminum or magnesium.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080039664A (en) * | 2006-11-01 | 2008-05-07 | 한화엘앤씨 주식회사 | Reflector of x-ray filter |
| CN101413905A (en) * | 2008-10-10 | 2009-04-22 | 深圳大学 | X ray differentiation interference phase contrast imaging system |
| JP2012127685A (en) * | 2010-12-13 | 2012-07-05 | Konica Minolta Medical & Graphic Inc | Metal grid manufacturing method, metal grid, and x-ray imaging apparatus using metal grid |
| CN102930917A (en) * | 2011-08-08 | 2013-02-13 | 西门子公司 | Method for producing an x-ray scattered radiation grid and x-ray scattered radiation grid |
| CN104681117A (en) * | 2013-11-29 | 2015-06-03 | 佳能株式会社 | Structural Body And X-ray Talbot Interferometer Including The Structural Body |
| WO2017036729A1 (en) * | 2015-09-01 | 2017-03-09 | Paul Scherrer Institut | Method for fabricating high aspect ratio gratings for phase contrast imaging |
| CN108714625A (en) * | 2018-06-25 | 2018-10-30 | 深圳大学 | The manufacture craft of novel X-ray grating |
| CN111487702A (en) * | 2020-05-12 | 2020-08-04 | 深圳大学 | Grating manufacturing process for adhering heavy metal colloid to light metal film |
| CN111522086A (en) * | 2020-05-12 | 2020-08-11 | 深圳大学 | Thermal composite grating manufacturing process |
-
2020
- 2020-11-27 CN CN202011364767.4A patent/CN112255718A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080039664A (en) * | 2006-11-01 | 2008-05-07 | 한화엘앤씨 주식회사 | Reflector of x-ray filter |
| CN101413905A (en) * | 2008-10-10 | 2009-04-22 | 深圳大学 | X ray differentiation interference phase contrast imaging system |
| JP2012127685A (en) * | 2010-12-13 | 2012-07-05 | Konica Minolta Medical & Graphic Inc | Metal grid manufacturing method, metal grid, and x-ray imaging apparatus using metal grid |
| CN102930917A (en) * | 2011-08-08 | 2013-02-13 | 西门子公司 | Method for producing an x-ray scattered radiation grid and x-ray scattered radiation grid |
| CN104681117A (en) * | 2013-11-29 | 2015-06-03 | 佳能株式会社 | Structural Body And X-ray Talbot Interferometer Including The Structural Body |
| WO2017036729A1 (en) * | 2015-09-01 | 2017-03-09 | Paul Scherrer Institut | Method for fabricating high aspect ratio gratings for phase contrast imaging |
| CN108714625A (en) * | 2018-06-25 | 2018-10-30 | 深圳大学 | The manufacture craft of novel X-ray grating |
| CN111487702A (en) * | 2020-05-12 | 2020-08-04 | 深圳大学 | Grating manufacturing process for adhering heavy metal colloid to light metal film |
| CN111522086A (en) * | 2020-05-12 | 2020-08-11 | 深圳大学 | Thermal composite grating manufacturing process |
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Application publication date: 20210122 |