CN112223425A - Conveying mechanism and cutting device - Google Patents
Conveying mechanism and cutting device Download PDFInfo
- Publication number
- CN112223425A CN112223425A CN202011056075.3A CN202011056075A CN112223425A CN 112223425 A CN112223425 A CN 112223425A CN 202011056075 A CN202011056075 A CN 202011056075A CN 112223425 A CN112223425 A CN 112223425A
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- assembly
- groove
- moving assembly
- conveying mechanism
- driving source
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F3/00—Severing by means other than cutting; Apparatus therefor
- B26F3/06—Severing by using heat
- B26F3/16—Severing by using heat by radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/01—Means for holding or positioning work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/06—Arrangements for feeding or delivering work of other than sheet, web, or filamentary form
- B26D7/0616—Arrangements for feeding or delivering work of other than sheet, web, or filamentary form by carriages, e.g. for slicing machines
Abstract
The invention relates to the technical field of automation equipment, and discloses a conveying mechanism and a cutting device. The conveying mechanism comprises a base, a linear driving source and a moving assembly, wherein a groove extending along a preset direction in a horizontal plane is formed in the base, part of the moving assembly is accommodated in the groove, and the moving assembly is used for bearing a workpiece to be processed; the linear driving source is arranged on the base and can drive the moving assembly to move along a preset direction, and the driving force of the linear driving source on the moving assembly and the gravity center of the moving assembly are coplanar in a horizontal plane. The conveying mechanism can reduce the deflection amplitude of the moving assembly in the X direction, further reduce the abrasion between the moving assembly and the base, and reduce the abrasion between the moving assembly and the linear driving source, so that the conveying mechanism works stably and has long service life. The cutting device provided by the invention is provided with the conveying mechanism, so that the service life is long, the workpiece is stably conveyed, the workpiece cutting size precision is high, and the quality of a cutting surface is good.
Description
Technical Field
The invention relates to the technical field of automation equipment, in particular to a conveying mechanism and a cutting device.
Background
To meet the demand for obtaining a small-sized workpiece, a large-sized workpiece needs to be cut using a cutting device. The workpiece can be a substrate, and the substrate is an OLED substrate as an example, and with the continuous development of the technology, the initial size of the OLED substrate is larger and larger. At present, the initial size specification of the OLED substrate commonly used in China includes G6(1500mm × 1850mm) and G6half (1500mm × 925mm), and there is a trend towards larger size specification. However, small-sized OLED substrates are generally used in electronic devices such as mobile phones, notebook computers, and televisions, and therefore, a cutting device is required to cut OLED substrates having a larger initial size.
In the prior art, as shown in fig. 1, a cutting device comprises a conveying mechanism 1 ', a portal frame 2 ' and a laser cutting head 3 ', wherein the conveying mechanism 1 ' comprises a base 11 ', a linear guide rail 12 extending along the X direction, a linear driving source (not shown) and a motion assembly 13 ', the linear driving source and the linear guide rail 12 ' are both arranged on the base 11 ', the moving assembly 13 ' is in sliding fit with the linear guide rail 12 ' through a sliding block, the linear driving source can drive the moving assembly 13 ' to linearly move along the X direction relative to the base 1 ', the moving assembly 13 ' comprises a rotary driving source and a carrier, the carrier is used for bearing a workpiece 4 ', the workpiece is a substrate, for example, an OLED substrate, the rotary driving source is used for driving the carrier to rotate around a Z axis in a vertical direction (i.e., the Z direction), the gantry 2 ' is arranged on the base 11 ', and the laser cutting head 3 ' is arranged on the gantry 2 ' and can move along the Y direction relative to the gantry 2 '. Wherein, the X direction, the Y direction and the Z direction are vertical in pairs.
In the prior art, in order to expand the application range of the conveying mechanism 1 ', especially for large-sized workpieces, a moving assembly 13 ' with a larger horizontal size and a larger Z-direction height is generally adopted, and the height of the center of gravity of the moving assembly 13 ' is higher than that of a linear driving source arranged on a base 11 ', so that a certain distance is formed between the driving force of the linear driving source to the moving assembly 13 ' and the position of the center of gravity of the moving assembly 13 ' along the Z direction, when the moving assembly 13 ' is driven to perform linear motion along the X direction by the driving force of the linear driving source, the moving assembly 13 ' generates a deflection problem in the X direction (i.e. the heights of two ends of the moving assembly 13 ' along the X direction fluctuate), if the deflection amplitude is larger, abrasion is generated between the moving assembly 13 ' and the base 11 ' and/or between the moving assembly 13 ' and the driving source, and the working stability of the conveying mechanism 1 ' is, reducing the service life of the conveying means 1 'and possibly causing the conveying means 1' to jam.
With regard to the cutting device, on the one hand, the cutting device comprises a conveying mechanism 1', and therefore the cutting device accordingly has the above problems; on the other hand, in the prior art, the laser cutting head 3 'is used for cutting the workpiece in conveying, and the deflection of the motion assembly 13' can cause the workpiece to deflect, so that the dimensional accuracy of workpiece cutting is low, and the quality of a cutting surface is poor.
Therefore, it is desirable to provide a conveying mechanism and a cutting device to solve the above problems.
Disclosure of Invention
The first purpose of the invention is to provide a conveying mechanism capable of resisting deflection so as to reduce the abrasion of a moving component, improve the working stability and prolong the service life of the conveying mechanism.
A second objective of the present invention is to provide a cutting device to reduce the wear of the moving components, improve the working stability and the service life of the cutting device, and improve the quality of the cutting surface and the cutting dimension precision of the workpiece processed by the cutting device.
In order to achieve the purpose, the invention adopts the following technical scheme:
a conveying mechanism comprising:
the device comprises a base, a first fixing piece and a second fixing piece, wherein a groove extending along a preset direction is formed in the base;
the moving assembly is partially accommodated in the groove and is used for bearing a workpiece to be processed;
the linear driving source is arranged on the base and can drive the motion assembly to move along a preset direction, and the driving force of the motion assembly and the gravity center of the motion assembly are coplanar in a horizontal plane.
Optionally, the motion assembly comprises:
the connecting plate is arranged on the upper side of the base and is connected with the output end of the linear driving source;
the carrying platform is arranged on the upper side of the connecting plate;
the suspension assembly is connected to the lower surface of the carrying platform, the lower end of the suspension assembly extends into the groove, and the suspension assembly can be suspended on the bottom of the groove.
Optionally, the motion assembly further comprises:
and the rotating drive source is fixedly connected to the connecting plate, and the carrying platform is connected with the output end of the rotating drive source.
Optionally, the suspension assembly comprises:
the upper end of the rotating shaft is connected to the lower surface of the carrying platform;
the air flotation component is connected to the lower end of the rotating shaft and used for blowing positive pressure gas into the bottom of the groove so as to enable the carrying platform to be subjected to upward buoyancy;
the suspension assembly also includes a preload assembly for applying a downward preload force to the stage.
Optionally, the suspension assembly includes a rotating shaft and a shaft sleeve, the upper end of the rotating shaft is connected to the lower surface of the carrier, the shaft sleeve is sleeved outside the rotating shaft, the upper end of the shaft sleeve is connected to the connecting plate, the lower end of the shaft sleeve extends into the groove, a ring cavity is formed between the shaft sleeve and the rotating shaft, a gas passing gap is formed between the ring cavity and the side wall of the groove, the ring cavity is communicated with the gas passing gap, and positive pressure gas is introduced into the ring cavity and the gas passing gap respectively.
Optionally, the motion assembly further comprises at least three sets of auxiliary supports disposed between the connecting plate and the stage,
the auxiliary support comprises a shell and a ball, the shell is connected to at least one of the connecting plate and the carrying platform, a ball groove is formed in the shell, the ball is arranged in the ball groove in a rolling manner, and the ball is arranged between the connecting plate and the carrying platform; or
The auxiliary support includes a ball and a ball groove provided on at least one of the connecting plate and the stage, the ball being rollably provided in the ball groove, the ball being provided between the connecting plate and the stage.
Optionally, the conveying mechanism further comprises a measuring assembly for detecting the position of the moving assembly, and the measuring assembly is coplanar with the center of gravity of the moving assembly in a horizontal plane.
Optionally, conveying mechanism still includes the edge linear guide that the direction of predetermineeing extends, still be provided with on the base along the heavy groove that the direction of predetermineeing extends, linear guide sets up heavy inslot, the motion subassembly includes the slider, the slider with linear guide sliding fit.
Optionally, chamfers are arranged at two edges of the upper end of the linear guide rail, which are parallel to the preset direction, along the preset direction, the bottom surface of the sinking groove is an arc surface with a high middle part and two low ends, and the linear guide rail is fixed on the bottom surface through a fastener.
A cutting device comprises the conveying mechanism.
The invention has the beneficial effects that:
according to the conveying mechanism, part of the structure of the motion assembly is accommodated in the groove of the base, and part of the structure correspondingly protrudes out of the upper surface of the base, so that the driving force of the linear driving source on the motion assembly and the gravity center position of the motion assembly are coplanar in a horizontal plane, the deflection amplitude of the motion assembly in the X direction can be reduced, the abrasion between the motion assembly and the base is reduced, the abrasion between the motion assembly and the linear driving source is reduced, the working stability of the conveying mechanism is improved, and the service life of the conveying mechanism is prolonged; the groove can assist the motion assembly to reduce the gravity center, and is favorable for realizing the coplanarity of the gravity center of the motion assembly and the driving force of the linear driving source on the motion assembly; on the other hand, the device can also play a certain guiding role on the moving assembly.
According to the cutting device, by arranging the conveying mechanism, the driving force of the linear driving source on the moving assembly and the center of gravity of the moving assembly are coplanar, the deflection amplitude along the X direction in the workpiece conveying process can be reduced, on one hand, the abrasion between the moving assembly and the base can be reduced, the abrasion between the moving assembly and the linear driving source is reduced, the working stability of the conveying mechanism is improved, and the service life of the conveying mechanism is prolonged; on the other hand, the stability of the workpiece in the conveying process can be improved, and the size precision of the workpiece cutting and the quality of the cutting surface are further improved.
Drawings
FIG. 1 is a schematic view of a cutting apparatus according to the prior art;
FIG. 2 is a schematic diagram of the structure of a conveying mechanism and a workpiece according to an embodiment of the present invention;
FIG. 3 is a schematic view of a portion of a delivery mechanism according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a delivery mechanism provided in accordance with an embodiment of the present invention;
FIG. 5 is an exploded view of the motion assembly (the slide not shown) provided by an embodiment of the present invention;
FIG. 6 is an enlarged view taken at A in FIG. 4;
FIG. 7a is a schematic cross-sectional view of a linear guide and slider combination according to the prior art;
FIG. 7b is a force distribution diagram across the cross-section of the linear guide of FIG. 7 a;
FIG. 8a is a schematic structural diagram of a cross-section of a linear guide and slider mating according to an embodiment of the present invention;
FIG. 8b is a force distribution diagram across the cross-section of the linear guide of FIG. 8 a.
In the figure:
1' -a conveying mechanism; 11' -a base; 12' -a linear guide; 13' -a kinematic assembly; 2' -a gantry; 3' -a laser cutting head; 4' -a workpiece;
100-an OLED substrate;
1-a base; 11-a groove; 12-sinking a tank; 121-bottom surface;
2-a linear drive source;
3-a motion assembly; 31-a connecting plate; 32-a rotary drive source; 33-a stage; 34-a suspension assembly; 341-a rotating shaft; 342-a receiving cavity; 343-an air floating assembly; 3431-a mounting plate; 3432-air cushion; 344-preload the assembly; 345-shaft sleeve; 346-ring cavity; 347-air gap; 35-auxiliary support; 351-a shell; 352-a ball bearing; 36-a slide block;
4-linear guide rail; 41-chamfering.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
At present, in a cutting device, a linear driving source of a conveying mechanism generates driving force on a moving component and the gravity center position of the moving component are not coplanar, so that the moving component has the problem of deflection in the moving process along the linear movement direction, and the problems of poor processing precision of workpieces, poor quality of cut surfaces and the like are caused. In this regard, the present embodiment provides a conveying mechanism and a cutting device, wherein the cutting device includes a conveying mechanism for conveying a workpiece, the workpiece may be a substrate, but the present invention is not limited thereto, the cutting device may be used for cutting a plate-shaped substrate such as an OLED substrate and a glass panel, and the conveying mechanism is used for conveying the OLED substrate 100 as an example. As shown in fig. 2, the X direction is a predetermined direction in the horizontal plane, the Y direction is a direction perpendicular to the X direction in the horizontal plane, and the Z direction is a vertical direction, wherein the X direction, the Y direction and the Z direction are perpendicular to each other and respectively represent a spatial direction.
As shown in fig. 2 to 4, the conveying mechanism includes a base 1, a linear driving source 2 and a moving assembly 3, wherein a groove 11 extending along a predetermined direction is provided on the base 1, in this embodiment, a length direction of the groove 11 is a predetermined direction, that is, an X direction, a width direction of the groove 11 is a Y direction, the moving assembly 3 is used for carrying a workpiece to be processed, and the moving assembly 3 is partially accommodated in the groove 11, the linear driving source 2 is provided on the base 1, the linear driving source 2 is used for driving the moving assembly 3 to move along the predetermined direction, and a driving force of the linear driving source 2 to the moving assembly and a center of gravity of the moving assembly are coplanar in a horizontal plane.
Part of the structure of the motion assembly 3 is accommodated in the groove 11 of the base 1, and correspondingly, part of the structure protrudes out of the upper surface of the base 1, so that the driving force of the linear drive source 2 to the motion assembly 3 and the gravity center position of the whole motion assembly 3 are coplanar in a horizontal plane, and the deflection amplitude of the motion assembly in the X direction (the X direction deflection means that the motion assembly generates up-and-down fluctuation along the height of two ends of the X direction) can be reduced, the abrasion between the motion assembly 3 and the base 1 is reduced, the abrasion between the motion assembly and the linear drive source is reduced, the working stability of the conveying mechanism is improved, and the service life of the conveying mechanism is prolonged; when the conveying mechanism is matched with the laser processing structure to cut the workpiece, for example, the laser processing structure comprises a portal frame and a laser cutting head arranged on the portal frame, the conveying mechanism conveys the workpiece below the portal frame, the laser cutting head cuts the workpiece on the conveying mechanism, and the reduction of the deflection amplitude of the conveying mechanism along the X direction can improve the processing precision of the workpiece and the quality of a cutting surface of the workpiece. In addition, the groove 11 can assist the moving component 3 to lower the gravity center, which is beneficial to realizing the coplanarity of the gravity center of the moving component 3 and the driving force of the linear driving source to the moving component 3; on the other hand, the moving assembly 3 can be guided to a certain extent.
Specifically, in the present embodiment, as shown in fig. 2, the linear driving source 2 is a linear motor, and the linear motor has high positioning accuracy, so that it is possible to satisfy the requirement of highly accurate conveyance of the OLED substrate 100. Preferably, in this embodiment, two sets of linear motors are provided, the stator ends of the two sets of linear motors extend along the X direction and are respectively disposed at two sides of the groove 11, two ends of the moving assembly 3 are respectively connected with the mover ends of the two sets of linear motors, and the connection position is located at the upper surface of the base 1, in other embodiments, the installation positions of the stator and the mover of the linear motors can be interchanged. In this embodiment, the middle part of the moving assembly 3 extends into the groove 11, and the two groups of linear motors drive the moving assembly 3 together, so that the moving stability of the moving assembly 3 can be ensured.
Preferably, the base 1 is made of marble material. Compared with an iron material, on one hand, the marble base 1 is not easy to generate stress deformation, so that the base 1 can keep the shape precision in the process that the moving component 3 moves relative to the base 1, and further the conveying precision and the service life of the conveying mechanism are improved; on the other hand, the marble material has lower relative density, so the weight of the whole conveying mechanism can be reduced, and the conveying mechanism is convenient to transport and assemble.
Further, the conveying mechanism further comprises a measuring assembly, and the measuring assembly is used for detecting the position of the moving assembly 3 in the X direction so as to feed back the position state of the moving assembly 3. Preferably, the gravity centers of the measuring assembly and the moving assembly 3 are coplanar in a horizontal plane, so that the driving force of the linear driving source 2 to the moving assembly 3, the gravity center of the moving assembly 3 and the measuring assembly are coplanar in the horizontal plane, the problem that the position information detected by the measuring assembly is inaccurate due to deflection is avoided, the accuracy of the detected position information of the moving assembly 3 is higher, more accurate information can be fed back to the linear driving source 2, the linear driving source 2 adjusts the motion amount of the moving assembly 3 by combining the position information of the moving assembly 3 fed back by the measuring assembly, and the conveying accuracy of the conveying mechanism is ensured. Specifically, the fixed position of the measuring component is coplanar with the center of gravity of the moving component 3 in the horizontal plane, in this embodiment, the measuring component is a detection grating, the detection grating includes a graduated scale and a reading head, the graduated scale is fixed on the base 1, and the reading head is fixed on the connecting plate 31. In other embodiments, the measurement component may also be a position sensor or other element capable of detecting position information.
Preferably, as shown in fig. 3 and 4, the moving assembly 3 includes a connecting plate 31, a rotation driving source 32, a stage 33 and a suspension assembly 34, wherein the connecting plate 31 is disposed on the upper side of the base 1, the connecting plate 31 is slidably connected to the base 1 and connected to the output end of the linear driving source 2, the rotation driving source 32 is fixedly connected to the connecting plate 31, the stage 33 is disposed on the upper side of the connecting plate 31 and connected to the output end of the rotation driving source 32, the suspension assembly 34 is connected to the lower surface of the stage 33, the lower end of the suspension assembly extends into the groove 11, and the suspension assembly 34 can be suspended on the bottom of the groove 11. The conveying mechanism of this embodiment can not only drive the OLED substrate 100 to move along the X-direction, but also drive the carrier 33 to rotate around the Z-axis through the rotation driving source 32, and further drive the OLED substrate 100 to rotate around the Z-axis to realize the adjustment of the orientation, so that the OLED substrate 100 can be processed in different orientation postures. In addition, by adjusting the weight and/or geometry of at least one of the connection plate 31, the rotation drive source 32, the stage 33, and the levitation assembly 34, the height of the center of gravity of the entire movement assembly 3 can be adjusted, and the requirement that the height of the center of gravity of the movement assembly 3 and the position of the driving force of the linear drive source 2 on the same plane in the horizontal plane can be satisfied. Adjusting the weight of at least one of the connecting plate 31, the rotary drive source 32, the stage 33 and the suspension assembly 34 may be accomplished by selecting suitable materials and/or dimensions.
Specifically, in the present embodiment, when the mover of the linear motor is provided on the base 1, the connection plate 31 is connected to the stator of the linear motor, and when the stator of the linear motor is fixed to the base 1, the connection plate 31 is connected to the mover of the linear motor. The connecting plate 31 is provided with an avoiding hole, and the suspension assembly 34 passes through the avoiding hole on the connecting plate 31 and then extends into the groove 11. In this embodiment, the middle area of the connecting plate 31 is provided with an avoiding hole. Further, the rotation driving source 32 is an arc-shaped linear motor, a stator of the arc-shaped linear motor is fixed on the upper surface of the connecting plate 31 and is arranged around the avoidance hole, a rotor end of the arc-shaped linear motor is connected to the lower surface of the carrier 33, and an upper end of the suspension assembly 34 is connected to the lower surface of the carrier 33 and is located in an area enclosed by the rotor end of the arc-shaped linear motor. In other embodiments, the installation positions of the stator and the rotor of the arc-shaped linear motor can be interchanged.
The suspension assembly 34 may employ magnetic suspension or pneumatic suspension. In this embodiment, the suspension assembly 34 adopts a pneumatic suspension scheme to reduce the cost. Specifically, as shown in fig. 4 and 5, the levitation assembly 34 includes a rotating shaft 341 and an air levitation assembly 343, which, in this embodiment, the upper end of the rotating shaft 341 is connected to the lower surface of the carrier 33, and encloses an accommodating cavity 342 with the carrier 33, so that the rotating shaft 341 is a cylindrical structure, can be used for reducing the weight of the whole motion assembly 3, an air floating assembly 343 is connected at the lower end of the rotating shaft 341, the air floating assembly 343 is used for blowing positive pressure gas to the bottom of the groove 11, so that the carrier 33 is subjected to upward buoyancy, the positive pressure gas reversely moves into the accommodating cavity 342 after being acted by the groove bottom of the groove 11, thereby generating upward buoyancy to the carrier 33 and avoiding the contact between the moving component 3 and the bottom of the groove 11, so that the moving component 3 and the bottom of the groove 11 will not generate friction, thereby reducing the friction of the whole conveying mechanism and reducing the power required by the linear driving source 2 to drive the whole motion assembly 3. The regional and outside air intercommunication that ventilates between recess 11 and the suspension subassembly 34 on X upwards holds and sets up the gas vent on the chamber 342, and the malleation gas that holds in the chamber 342 can lose heart through gas vent and this region of ventilating, can guarantee to hold the pressure stability of the interior gas of chamber 342, provides stable buoyancy on. The air outlet also can not be arranged on the accommodating cavity 342, so that the positive pressure air in the accommodating cavity 342 can be discharged through the ventilation area, and the pressure stability of the air in the accommodating cavity 342 can also be ensured.
In this embodiment, the conveying mechanism includes an air source, as shown in fig. 4, the air floating assembly 343 includes a mounting plate 3431 and an air floating pad 3432, the mounting plate 3431 is connected to the bottom of the rotating shaft 341, the air floating pad 3432 is fixed on the mounting plate 3431, an air inlet of the air floating pad 3432 is communicated with the air source, the air floating pad 3432 is configured to change an air flow direction of the air source, so that an outlet of the air floating pad 3432 exhausts air to a bottom of the groove 11, the air reversely acts on the moving assembly 3 through the bottom of the groove, and further provides an upper buoyancy for. Gas acting against moving component 3 through the bottom of the trough may act on mounting plate 3431 and/or within receiving cavity 342, thereby creating an upward buoyant force on stage 33.
In this embodiment, the suspension assembly 34 further includes a preload assembly 344, and the preload assembly 344 is configured to apply a downward preload force (also referred to as a preload force) to the stage 33 to limit the floating displacement of the stage 33, so that an appropriate air film thickness is maintained between the stage 33 and the bottom of the groove 11, and the stage 33 is prevented from shaking up and down. The downward preloading force applied to the carrier 33 by the preloading component 344 is matched with the upward buoyancy force of the air floating component to the carrier, so that the floating displacement of the carrier is controlled within a reasonable range, and the motion stability of the carrier is ensured.
In this embodiment, the preload assembly 344 includes an electromagnet and a ferromagnetic member (or another electromagnet), wherein the electromagnet is disposed on a side of the mounting plate 3431 facing the bottom of the groove 11, the ferromagnetic member is disposed on the bottom of the groove 11 and opposite to the electromagnet, and when the electromagnet is powered on, the electromagnet and the ferromagnetic member in the groove 11 attract each other, that is, the ferromagnetic member exerts a downward force on the electromagnet, and further exerts a downward force on the carrier 33 through the mounting plate 3431 and the rotating shaft 341. In other embodiments, the mounting positions of the electromagnet and the ferromagnetic piece can be interchanged. In another embodiment, the preload assembly 344 may be a vacuum preload assembly, with the preload assembly 344 being disposed on the side of the mounting plate 3431 facing the bottom of the groove 11. Preferably, in this embodiment, preload assemblies 344 are uniformly circumferentially disposed on the side of the mounting plate facing the bottom of recess 11, thereby ensuring that carrier 33 is evenly stressed.
On the one hand, because the base 1 is uneven or has external force disturbance and other factors, the moving assembly 3 may also generate Y-directional deflection (Y-directional deflection means that the moving assembly generates up-and-down fluctuation in height at two ends along the Y direction), thereby causing Y-directional deflection of the carrier 33 and the workpiece on the carrier 33; on the other hand, even in the case where the centers of gravity are coplanar, when the linear drive source 2 drives the moving element 3 to start or stop, a problem of yaw in the X direction occurs due to inertia.
To solve the problem, as shown in fig. 4-6, the suspension assembly 34 further includes a shaft sleeve 345, the shaft sleeve 345 is sleeved outside the rotating shaft 341, the upper end of the shaft sleeve 345 is fixedly connected to the connecting plate 31, the lower end of the shaft sleeve extends into the recess 11, a ring cavity 346 is formed between the shaft sleeve 345 and the rotating shaft 341, an air passing gap 347 is formed between the shaft sleeve 345 and the side wall of the recess 11, the ring cavity 346 is communicated with the air passing gap 347, and positive pressure gas is respectively introduced into the ring cavity 246 and the air passing gap 347. In this embodiment, the shaft sleeve 345 is provided with an air inlet, the air inlet is communicated with the air floating assembly 343, positive pressure air can be respectively introduced into the annular cavity 346 and the air passing gap 347 through the air inlet on the shaft sleeve 345 by the air floating assembly 343, so that the positive pressure air is respectively blown to the outer wall of the rotating shaft 341 and the side wall of the groove 11, on one hand, the air in the air passing gaps 347 on both sides along the Y direction respectively provides clamping force to both sides along the Y direction of the shaft sleeve 345, thereby reducing the deflection amplitude of the whole motion assembly 3 along the Y direction; on the other hand, the gas in the annular cavity 346 provides a clamping force to the rotating shaft 341, which is applied to the annular outer wall of the rotating shaft 341, so that the deflection amplitude of the entire moving assembly 3 in the X direction and in the Y direction can be reduced. Therefore, in the present embodiment, the inner side and the outer side of the shaft sleeve 345 are respectively subjected to the pressure of the gas, so as to stabilize the position of the shaft sleeve 345 by controlling the flow rate of the gas, thereby reducing the possibility of abrasion between the shaft sleeve 345 and the side wall of the groove 11 or the outer wall of the rotating shaft 341 caused by the deflection of the moving assembly 3, and being beneficial to preventing the moving assembly 3 from being stuck due to abrasion.
In other embodiments, the air supply may supply positive pressure air directly through the air inlet in the shaft housing 345 into the annular cavity 346 and into the air gap 347, respectively, without supplying air to the shaft housing 345 through the air flotation assembly 343. The air passing gap 347 is communicated with the external atmosphere, and the air in the annular cavity 346 can be decompressed through the air passing gap 347 communicated with the annular cavity 346, so that the pressure of the air in the annular cavity 346 is stable, and a stable clamping force is provided. A positive pressure environment may be maintained in the annular cavity 346, so that a clamping force may be generated on the outer wall of the rotating shaft 341 along the outer circumferential direction of the rotating shaft 341, wherein the clamping force on the outer wall of the rotating shaft 341 includes both the X direction and the Y direction, so that the deflection amplitude of the moving assembly 3 in the X direction and the deflection amplitude in the Y direction can be reduced simultaneously. It should be noted that the deflection direction in the actual movement process of the moving assembly 3 is not limited to the X and Y directions, and if the actual deflection direction is not the X direction or the Y direction, the X direction and the Y direction can be separated, so that the air-floating clamping mode of the embodiment can play a role in reducing the deflection amplitude regardless of the actual deflection direction.
Specifically, in the present embodiment, the air bearing pad 3432 includes two sets of outlets, wherein one set of outlets is used for exhausting air to the bottom of the groove 11, and the other set of outlets is connected to the air inlet of the shaft sleeve 345 through a pipe, and further communicates with the annular cavity 346 and the air passing gap 347. It will be appreciated that when the positive pressure in the annular cavity 346 is constant, the larger the surface area of the side surface of the annular cavity 346, i.e., the larger the surface area of the rotating shaft 341, the greater the clamping force of the positive pressure gas in the annular cavity 346 on the rotating shaft 341, and accordingly the better the improvement effect on the runout problem of the carrier in the X direction and the Y direction. When the surface area of the rotating shaft 341 is fixed, the larger the air pressure in the annular cavity 346 is, the larger the clamping force on the rotating shaft 341 is, and accordingly, the better the improvement effect on the deflection problem of the carrier in the X direction and the Y direction is. The clamping force of the positive pressure gas in the annular cavity 346 on the rotating shaft 341 can be adjusted by adjusting parameters such as the pressure of the gas in the annular cavity 346, the length of the rotating shaft 341, and the outer diameter of the rotating shaft 341.
Preferably, the flow rates of the air flows introduced into the annular cavity 346 and the air passing gap 347 can be respectively adjusted, so that the force applied to the outer wall of the shaft sleeve 345 is balanced with the force applied to the inner wall of the shaft sleeve 345, and finally, the abrasion of the shaft sleeve 345 and the side wall of the groove 11 is avoided. In addition, the machining precision of the base 1 made of marble is not easy to control, the shaft sleeve 345 can be separately machined, and the dimensional precision is easy to guarantee, in the embodiment, the shaft sleeve 345 is arranged, so that the annular cavity 346 is enclosed by the shaft sleeve 345 and the rotating shaft 341, and the thickness dimension of the annular cavity 346 can be accurately controlled by adjusting the thickness dimension of the shaft sleeve 345.
If the rotating shaft 341 is worn away from the shaft sleeve 345 during the rotation process, the shaft sleeve 345 or the rotating shaft 341 may be deformed locally, and if the deformation reaches a certain size, the shaft sleeve 345 and the rotating shaft 341 may be stuck, in this embodiment, the rotating shaft 341 and the shaft sleeve 345 are made of carbon steel with a carbon content fraction of 0.9%, and the hardness of the carbon steel with a carbon content fraction of 0.9% is relatively high, so that even if the rotating shaft 341 and the shaft sleeve 345 are worn away, the deformation may not occur easily, and further the problem that the shaft sleeve 345 and the rotating shaft 341 are stuck is avoided. Further, the outer surface of the rotating shaft 341 and the inner surface of the sleeve 345 are carburized, and the hardness of the inner surface of the rotating shaft 341 and the outer surface of the sleeve 345 can be further improved by the carburization.
The scheme that the driving force of the linear driving source 2 to the moving assembly 3 is coplanar with the gravity center of the moving assembly 3 can reduce the deflection amplitude of the moving assembly in the X direction, and cannot reduce the deflection in the Y direction, so that the deflection of the moving assembly 3 is difficult to eliminate, the air floatation clamping of the positive pressure air in the annular cavity 346 can simultaneously reduce the deflection amplitude of the moving assembly 3 in the X and Y directions, and the positive pressure gas in the air gap 347 can reduce the deflection amplitude of the moving assembly 3 along the Y direction, however, motion assembly 3 tends to have a greater weight, particularly carrier 33, and the clamping force of the air-floating clamp is less, this clamping force makes it difficult to eliminate the deflection of stage 33, and motion assembly 3, when actually moving, tends to have deflection in both the X-direction and the Y-direction, therefore, it is difficult to eliminate the runout of the moving assembly 3 using the air-floating clamping and/or the coplanar center of gravity.
To solve this problem, as shown in fig. 3 and 5, in the present embodiment, the moving assembly 3 includes at least three sets of auxiliary supports 35 disposed between the connecting plate 31 and the stage 33, and each auxiliary support 35 includes a housing 351 and a ball 352, wherein the housing 351 is connected to at least one of the stage 33 and the connecting plate 31, the housing 351 is provided with a ball groove, the ball 352 is rollably disposed in the ball groove, and the ball 352 is disposed between the stage 33 and the connecting plate 31. When the housing 351 is connected to one of the stage 33 and the connecting plate 31, the portion of the ball 352 exposed out of the ball groove is in contact with the other of the stage 33 and the connecting plate 31; when the housings 351 are respectively connected to the stage 33 and the connecting plate 31, each housing 351 includes a ball groove, and the balls 352 are rollably disposed in the two ball grooves. At least three sets of auxiliary supports 35 can stably support the lower surface of stage 33, and during the movement of motion block 3, balls 352 roll in the ball grooves to cause stage 33 to adjust itself in the horizontal plane, thereby reducing both the yaw amplitude of stage 33 in the X direction and the yaw amplitude of stage 33 in the Y direction. In addition, when the rotating shaft 341 or the shaft sleeve 345 is subjected to a yawing action, the rolling ball 352 rolls in the housing 351, so that the relative position floating between the carrier 33 and the connecting plate 31 in a horizontal plane can be reduced or avoided, the yawing amplitude of the moving assembly 3 is further reduced, the abrasion of the moving assembly 3 is reduced or avoided, the abrasion between the rotating shaft 341 and the shaft sleeve 345 can be reduced or avoided, and the problem that the rotating shaft 341 and the shaft sleeve 345 are stuck is prevented.
In other embodiments, the auxiliary support 35 may not be provided with a housing, but may be directly provided with a ball groove on one or both of the connecting plate 31 and the stage 33, the ball 352 may be rollably disposed in the ball groove, and the ball 352 may be disposed between the connecting plate 31 and the stage 33, when the ball groove is provided on one of the connecting plate 31 and the stage 33, a portion of the ball 352 exposed from the ball groove abuts against the other of the connecting plate 31 and the stage 33; when ball grooves are formed in both of the connecting plate 31 and the stage 33, the balls 352 are rollably disposed in the two ball grooves.
Optionally, at least three sets of auxiliary supports 35 are arranged at intervals along the circumferential direction of the rotation driving source 32, so that the acting force of the carrier 33 on the connecting plate 31 is uniformly distributed at each auxiliary support 35, the stability of the OLED substrate 100 in conveying is ensured, and the processing precision of the OLED substrate 100 is further ensured. Specifically, in one embodiment, at least three sets of auxiliary supports 35 are evenly arranged along one circumferential direction of the rotation drive source 32; in another embodiment, the auxiliary supports 35 are uniformly arranged along at least two circumferential directions of the rotation driving source 32, and at least three sets of auxiliary supports 35 are respectively arranged in each circumferential direction, so that the deflection amplitude of the moving assembly 3 can be further reduced, and the problems of abrasion and jamming of the moving assembly 3 can be avoided.
In addition, by adjusting the weight and/or geometry of at least one of the connection plate 31, the rotation drive source 32, the stage 33, the levitation assembly 34, and the auxiliary support 35, the height of the center of gravity of the entire motion assembly 3 can be adjusted, and thus the requirement that the height of the center of gravity of the motion assembly 3 and the position of the driving force of the linear drive source 2 to the same are coplanar in a horizontal plane is satisfied.
Preferably, as shown in fig. 3 and 4, the conveying mechanism further includes a linear guide 4 extending along the direction X, the base 1 is further provided with a sunken groove 12 extending along the preset direction (direction X), the linear guide 4 is disposed in the sunken groove 12 and fixed on the bottom surface 121 of the sunken groove 12 by a fastener, the moving assembly 3 includes a slider 36, and the slider 36 is slidably engaged with the linear guide 4. On one hand, the gravity center height of the whole motion assembly 3 can be adjusted by adjusting the weight and/or the geometry of at least one of the connecting plate 31, the rotary drive source 32, the carrier 33, the suspension assembly 34, the auxiliary support 35 and the slider 36, so that the requirement that the gravity center height of the motion assembly 3 and the position of the driving force of the linear drive source 2 on the motion assembly are coplanar in a horizontal plane is met; on the other hand, by arranging the linear guide rail 4 to be matched with the sliding block 36, the motion process of the motion assembly 3 can be more stable, and the motion direction is more accurate; by adjusting the depth of the sinking groove 12, the height of the connecting plate 31 can be adjusted, which is beneficial to realizing that the driving force of the linear driving source 2 to the moving assembly 3 and the gravity center position of the moving assembly 3 are coplanar in a horizontal plane. Specifically, in the present embodiment, the sliding block 36 is connected to the bottom of the connecting plate 31, two sinking grooves 12 are provided on the base 1, the two sinking grooves 12 are respectively located at two sides of the width direction of the groove 11, at least one linear guide rail is provided in each sinking groove 12, for example, two linear guide rails 4 are provided in each sinking groove 12, and the linear guide rails 4 are in sliding fit with the sliding block 36.
Normally, the bottom surface 121 of the sink 12 is a plane, and the bottom surface of the linear guide 4 completely fits the bottom surface 121 of the sink 12 and is fixed to the bottom surface 121 of the sink 12 by a fastener. If the motion assembly 3 generates deflection, certain impact force can be generated on the linear guide rail 4 in the motion process, and the fastener can be affected by the impact force and can be loosened, so that the connection stability and reliability of the linear guide rail 4 are affected. In this embodiment, because the base 1 adopts the marble material, so the bottom surface 121 of heavy groove 12 is difficult for taking place to warp, and linear guide 4 sets up with the laminating of the bottom surface 121 of heavy groove 12 for even linear guide 4 does not have the space to take place elastic deformation for even if linear guide 4 is the metal material, so the impact force of motion component 3 to linear guide 4 can concentrate and act on fastener department, probably causes the fastener to become flexible, and then influences the stability and the reliability of linear guide 4 installation. In order to solve the problem, in this embodiment, along the length direction (i.e. X direction) of the sinking groove 12, the bottom surface 121 of the sinking groove 12 is in an arc shape with a high middle part and low ends, so that after the linear guide rail 4 is fixed on the arc bottom surface 121 through the fastening member, the bottom surface of the linear guide rail 4 cannot be completely attached to the bottom surface 121 of the groove 11, when the moving assembly 3 generates an impact force on the linear guide rail 4, the linear guide rail 4 can disperse the impact force by generating a certain elastic deformation, thereby preventing the impact force from being concentrated on the fastening member, and improving the stability and reliability of the connection of the linear guide rail 4.
Further, in the prior art, as shown in fig. 7a, the matching surfaces of the linear guide 4 and the slider 36 are arranged in a fitting manner, and the acting force of the slider 36 on the linear guide 4 is distributed on the cross section of the linear guide 4 as shown in fig. 7b, that is, on the cross section of the linear guide 4, the two ends of the linear guide 4 are stressed intensively, and the middle part of the linear guide 4 is stressed less, so that the stress distribution condition affects the service life of the linear guide 4, and in order to solve the problem, as shown in fig. 8a, chamfers 41 are arranged at two edges of the upper end of the linear guide 4 parallel to the preset direction. After the chamfer 41 is provided, the distribution of the acting force of the slider 36 on the linear guide rail 4 on the cross section of the linear guide rail 4 is shown in fig. 8b, i.e. the problem of concentrated stress on the two ends of the cross section of the linear guide rail 4 is avoided, so that the service life of the linear guide rail 4 can be prolonged. In the present embodiment, the trajectory of the chamfer 41 is a logarithmic curve, and in other embodiments, the stress distribution of the cross section of the linear guide rail 4 is obtained according to finite element analysis, and then the trajectory curve of the chamfer is obtained according to the stress distribution. In addition, the chamfer 41 enables a certain gap to be formed between the matching surfaces of the linear guide rail 4 and the sliding block 36, so that more lubricant can be contained, an oil film can be easily formed between the matching surfaces of the linear guide rail 4 and the sliding block 36, the friction resistance is reduced, and the abrasion between the linear guide rail 4 and the sliding block 36 is reduced.
The embodiment also provides a cutting device, and the cutting device comprises the conveying mechanism. By arranging the conveying mechanism, the driving force of the linear driving source on the moving assembly 3 and the center of gravity of the moving assembly 3 can be coplanar, the cutting device can reduce the deflection amplitude along the X direction in the workpiece conveying process, on one hand, the abrasion between the moving assembly 3 and the base 1 can be reduced, the abrasion between the moving assembly 3 and the linear driving source can be reduced, and the working stability and the service life of the conveying mechanism can be improved; on the other hand, the stability of the workpiece in the conveying process can be improved, and the size precision of the workpiece cutting and the quality of the cutting surface are further improved.
Furthermore, by arranging the conveying mechanism, the cutting device can reduce the deflection amplitude of the workpiece in the X direction and the Y direction in the conveying process, on one hand, the abrasion between the motion assembly and the base can be further reduced, the abrasion between the motion assembly and the linear driving source is reduced, the working stability of the conveying mechanism is improved, and the service life of the conveying mechanism is prolonged; on the other hand, the stability of the workpiece in the conveying process can be further improved, and the size precision of the workpiece cutting and the quality of the cutting surface are further improved.
Specifically, the cutting device further includes a gantry, a laser cutting head and a cutting device (Cell Break Equipment), wherein the gantry is disposed above the base 1, the laser cutting head is slidably disposed on the gantry and can move relative to the gantry along a horizontal Y direction, the workpiece is taken as the OLED substrate 100, the OLED substrate 100 includes a glass substrate and a display layer formed on the glass substrate as an example, after a preset cutting line is formed on the OLED substrate 100 by processing of the laser cutting head (laser generated by the laser cutting head penetrates through the display layer and forms the cutting line on the glass substrate), the OLED substrate 100 can be cut along the cutting line by the cutting device to form a plurality of small OLED substrates with preset sizes.
The motion assembly 3 can convey the OLED substrate 100 below the gantry along the X direction, so that the laser cutting head can process a cutting line extending along the X direction on the OLED substrate 100, in an embodiment, the laser cutting head can continuously slide on the gantry along the Y direction, and process the OLED substrate 100 in the Y direction, so as to process a cutting line in the Y direction on the OLED substrate 100, at this time, the laser cutting head needs to be continuously moved, the laser cutting head processes the OLED substrate 100 along the Y direction when moving, and the motion deviation of the laser cutting head when moving can cause the deviation of the cutting line in the Y direction on the OLED substrate 100, so that the cutting surface quality of the workpiece is poor; in another embodiment, the moving assembly 3 includes the above-mentioned rotation driving source 32, the rotation driving source 32 can drive the carrier 33 and the OLED substrate 100 to rotate 90 ° along the Z axis, and adjust the orientation of the OLED substrate 100, so that the laser cutting head can process the cutting lines staggered horizontally and vertically on the OLED substrate 100, the laser cutting head slides on the gantry along the Y direction and stops at a position, the laser cutting head is in a stationary state at this time, the laser cutting head processes the OLED substrate 100 when the laser cutting head is stationary, and does not need to process the OLED substrate 100 when the laser cutting head moves, thereby avoiding the problem that the cutting lines deviate due to the processing of the workpiece when the laser cutting head moves, and improving the cutting quality of the workpiece.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the invention and are not to be construed as limitations of the embodiments of the present invention, but may be modified in various embodiments and applications by those skilled in the art according to the spirit of the present invention, and the content of the present description should not be construed as a limitation of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A conveyor mechanism, comprising:
the device comprises a base (1), wherein a groove (11) extending along a preset direction is formed in the base (1);
the moving assembly (3), the moving assembly (3) is partially accommodated in the groove (11), and the moving assembly (3) is used for bearing a workpiece to be processed;
the linear driving source (2) is arranged on the base (1), the linear driving source (2) can drive the motion assembly (3) to move along a preset direction, and the driving force of the linear driving source (2) on the motion assembly (3) and the gravity center of the motion assembly (3) are coplanar in a horizontal plane.
2. The delivery mechanism according to claim 1, wherein the kinematic assembly (3) comprises:
the connecting plate (31) is arranged on the upper side of the base (1) and is connected with the output end of the linear driving source (2);
a stage (33) provided on the upper side of the connection plate (31);
the suspension assembly (34) is connected to the lower surface of the carrier (33), the lower end of the suspension assembly (34) extends into the groove (11), and the suspension assembly (34) can be suspended on the bottom of the groove (11).
3. The delivery mechanism according to claim 2, wherein the kinematic assembly (3) further comprises:
and the rotary driving source (32) is fixedly connected to the connecting plate (31), and the carrier (33) is connected with the output end of the rotary driving source (32).
4. The conveyor mechanism of claim 2 wherein the suspension assembly (34) comprises:
the upper end of the rotating shaft (341) is connected to the lower surface of the carrier (33);
the air floating assembly (343) is connected to the lower end of the rotating shaft (341), and the air floating assembly (343) is used for blowing positive pressure gas to the bottom of the groove (11) so as to enable the carrying platform (33) to be subjected to upward buoyancy;
the suspension assembly (34) further includes a preload assembly (344), the preload assembly (344) for applying a downward preload force to the stage (33).
5. The conveying mechanism according to claim 2, wherein the suspension assembly (34) includes a rotating shaft (341) and a shaft sleeve (345), an upper end of the rotating shaft (341) is connected to a lower surface of the carrier (33), the shaft sleeve (345) is sleeved outside the rotating shaft (341), an upper end of the shaft sleeve is connected to the connecting plate (31), a lower end of the shaft sleeve extends into the groove (11), an annular cavity (346) is formed between the shaft sleeve (345) and the rotating shaft (341), an air gap (347) is formed between the annular cavity (346) and a side wall of the groove (11), the annular cavity (346) is communicated with the air gap (347), and positive pressure air is respectively introduced into the annular cavity (346) and the air gap (347).
6. Conveying mechanism according to claim 2, wherein the kinematic assembly (3) further comprises at least three sets of auxiliary supports (35) arranged between a connecting plate (31) and the carrier (33),
the auxiliary support (35) comprises a shell (351) and a ball (352), the shell (351) is connected to at least one of the connecting plate (31) and the carrying platform (33), a ball groove is formed in the shell (351), the ball (352) is arranged in the ball groove in a rolling mode, and the ball (352) is arranged between the connecting plate (31) and the carrying platform (33); or
The auxiliary support (35) comprises a ball (352) and a ball groove provided on at least one of the connecting plate (31) and the stage (33), the ball (352) being rollably provided in the ball groove, the ball (352) being provided between the connecting plate (31) and the stage (33).
7. A conveyor mechanism as claimed in claim 1, characterized in that it further comprises a measuring assembly for detecting the position of the moving assembly (3), and in that it is coplanar with the centre of gravity of the moving assembly (3) in a horizontal plane.
8. The conveying mechanism according to claim 1, further comprising a linear guide (4) extending along the preset direction, wherein a sunken groove (12) extending along the preset direction is further formed in the base (1), the linear guide (4) is disposed in the sunken groove (12), and the moving assembly (3) comprises a sliding block (36), wherein the sliding block (36) is in sliding fit with the linear guide (4).
9. The conveying mechanism according to claim 8, wherein chamfers (41) are arranged at two edges of the upper end of the linear guide rail (4) parallel to the preset direction, along the preset direction, the bottom surface (121) of the sinking groove (12) is an arc surface with a high middle part and two low ends, and the linear guide rail (4) is fixed on the bottom surface (121) through a fastening piece.
10. A cutting device, characterized by comprising a conveying mechanism according to any one of claims 1-9.
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| CN202011056075.3A CN112223425A (en) | 2020-09-29 | 2020-09-29 | Conveying mechanism and cutting device |
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| CN202011056075.3A CN112223425A (en) | 2020-09-29 | 2020-09-29 | Conveying mechanism and cutting device |
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