CN112222097B - Method for removing residues on surface of clamping rod - Google Patents
Method for removing residues on surface of clamping rod Download PDFInfo
- Publication number
- CN112222097B CN112222097B CN202010918646.3A CN202010918646A CN112222097B CN 112222097 B CN112222097 B CN 112222097B CN 202010918646 A CN202010918646 A CN 202010918646A CN 112222097 B CN112222097 B CN 112222097B
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- Prior art keywords
- clamping rod
- clamping
- purging
- strip
- clamping rods
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/16—Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
- H01J23/24—Slow-wave structures, e.g. delay systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
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- Cleaning In General (AREA)
Abstract
The invention relates to a method for removing residues on the surface of a clamping rod, which adopts sterile high-purity nitrogen to perform high-pressure purging on the clamping rod, can effectively remove boron nitride residues permeated on the surface of the clamping rod, and ensures that the surface of the clamping rod achieves higher cleanliness and the cleaning effect is obvious. According to the method for removing the residues on the surface of the clamping rod, the special tool is adopted to fix the clamping rod, so that the clamping rod can be prevented from deforming under high-pressure blowing, the cleaning purpose is achieved, and the shape of the clamping rod can be ensured.
Description
Technical Field
The invention relates to a method for removing residues on the surface of a clamping rod, in particular to residue cleaning for supporting the clamping rod between a helix traveling wave tube and a tube shell, and belongs to the technical field of microwave vacuum electronics.
Background
Helix traveling wave tube plays indispensable effect in communication and electron countermeasure, and the supporting transition piece between helix traveling wave tube and the tube is regarded as to the supporting pole among its slow wave circuit, plays the heat conduction effect simultaneously, in time conducts the heat that produces intraductal to the tube surface. Two widely used materials in the traveling wave tube are beryllium oxide and anisotropic boron nitride, the two materials have high thermal conductivity, and the trend that the thermal conductivity of the boron nitride ceramic is reduced along with the rise of temperature is relatively small, so that the boron nitride ceramic has good high-temperature thermal conductivity and is applied to replace the toxic beryllium oxide ceramic material in recent years.
The boron nitride ceramic is prepared under the CVD process and is in a layered structure. In the process of processing the boron nitride ceramics into finished products, the clamp, the grinding tool and the circulating liquid have residues attached to the surfaces of the clamping rods, but the cleanliness requirement of the inside of the spiral line traveling wave tube after packaging is higher, metal and boron nitride residues cannot exist, or the dielectric parameters of the whole spiral line traveling wave tube can be influenced, so that the performance of the spiral line traveling wave tube is influenced. The existing pickling method can only remove metal residues, but cannot clean boron nitride residues permeating into the surface layer.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a method for removing residues on the surface of a clamping rod.
The technical scheme of the invention is as follows:
a method of removing debris from a surface of a clamping bar, comprising the steps of:
1) respectively placing the pickled clamping rods into the grooves of the tool, and fixing two sides of each clamping rod by using buckles;
2) aligning a high-pressure nozzle connected with a nitrogen cylinder to a clamping rod on the tool, wherein the distance between the high-pressure nozzle and the surface of the clamping rod is 10-15 cm;
3) opening the high-pressure nozzle, starting to purge the clamping rods, wherein the purging air pressure is 0.1-0.2mPa, and purging the clamping rods one by one according to a Z-shaped path in the purging process;
4) after one purging is finished, amplifying the purged clamping rods by 130-fold and 150-fold by using a high-power microscope and observing;
5) if no black spot impurities exist, purging the next batch of clamping rods; if the black spot impurities still exist, repeating the steps 1) -4) until no black spot impurities exist.
Preferably, in step 1), the tool comprises a fixing seat and a buckle, a plurality of strip-shaped grooves are formed in the upper surface of the fixing seat in parallel, and the buckle is arranged on two sides of the fixing seat.
Preferably, the strip-shaped groove has a length of 90mm, a width of 0.8mm and a depth of 0.3 mm.
Preferably, the number of the strip-shaped grooves is 10, and the distance between every two adjacent strip-shaped grooves is 10 mm.
Preferably, the fixing seat is made of quartz glass.
Preferably, in step 3), the purge pressure is 0.1 mPa.
The invention has the technical characteristics and beneficial effects that:
1. according to the method for removing the residues on the surface of the clamping rod, the clamping rod is subjected to high-pressure purging by adopting sterile high-purity nitrogen, so that the boron nitride residues permeated on the surface of the clamping rod can be effectively removed, the surface of the clamping rod achieves higher cleanliness, and the cleaning effect is obvious.
2. According to the method for removing the residues on the surface of the clamping rod, the special tool is adopted to fix the clamping rod, so that the clamping rod can be prevented from deforming under high-pressure blowing, the cleaning purpose is achieved, and the shape of the clamping rod can be ensured.
Drawings
FIG. 1 is a front view of the tooling of the present invention;
FIG. 2 is a perspective view of the tooling of the present invention;
in the figure: 1-a fixed seat, 2-a buckle and 3-a groove.
Detailed Description
The present invention will be further described by way of examples, but not limited thereto, with reference to the accompanying drawings.
Example 1:
the embodiment provides a method for removing residues on the surface of a clamping rod, which performs a purging operation on a marble platform of a clean room and comprises the following steps:
1) respectively placing the pickled clamping rods into the grooves of the tool, and fixing two sides of each clamping rod by using buckles;
2) aligning a high-pressure nozzle connected with a nitrogen cylinder to a clamping rod on the tool, wherein the distance between the high-pressure nozzle and the surface of the clamping rod is 10 cm;
3) opening the high-pressure nozzle, starting purging the clamping rods, wherein the purging pressure is 0.1mPa, and purging the clamping rods one by one according to a Z-shaped path in the purging process, namely purging the single clamping rod back and forth;
4) after one purging is finished, the purged clamping rods are magnified 130 times by a high-power microscope and observed;
5) if no black spot impurities exist, purging the next batch of clamping rods; if the black spot impurities still exist, repeating the steps 1) -4) until no black spot impurities exist.
In this embodiment, the frock includes fixing base 1 and buckle 2, and 10 bar groove 3 have been seted up side by side to 1 upper surface of fixing base, and the both sides of fixing base 1 set up buckle 2. Each strip-shaped groove 3 has a length of 90mm, a width of 0.8mm and a depth of 0.3 mm. The distance between adjacent strip-shaped grooves is 10 mm.
Wherein, fixing base 1 adopts quartz glass to make, and is impurity-free, avoids sweeping the in-process secondary pollution supporting rod. The buckle 2 is an elastic copper sheet, and when the buckle is buckled on two sides of the fixing seat, the clamping rod can be guaranteed not to move and deform in the blowing process.
By adopting the technical scheme of the embodiment, after the high-pressure pure nitrogen purging is completed, the boron nitride residues permeated on the surface of the clamping rod can be completely removed, the higher cleanliness standard is reached, and the dielectric parameters of the whole helix line traveling wave tube can not be influenced when the helix line traveling wave tube and the tube shell are supported subsequently.
Example 2:
a method for removing residue from the surface of a clamping bar, the method comprising the steps of embodiment 1, except that: in the step 2), the distance between the high-pressure nozzle and the surface of the clamping rod is 15 cm; in step 3), the purge pressure was 0.2 mPa. And 4) in the step 4), magnifying the purged clamping rods by 150 times by using a high-power microscope and observing.
The above description is only for the specific embodiments of the present invention, and the protection scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the protection scope of the present invention.
Claims (5)
1. A method of removing debris from a surface of a clamping bar, comprising the steps of:
1) respectively placing the pickled clamping rods into the grooves of the tool, and fixing two sides of each clamping rod by using buckles;
the tool comprises a fixed seat and buckles, a plurality of strip-shaped grooves are formed in the upper surface of the fixed seat in parallel, and the buckles are arranged on two sides of the fixed seat;
2) aligning a high-pressure nozzle connected with a nitrogen cylinder to a clamping rod on the tool, wherein the distance between the high-pressure nozzle and the surface of the clamping rod is 10-15 cm;
3) opening the high-pressure nozzle, starting to purge the clamping rods, wherein the purging air pressure is 0.1-0.2mPa, and purging the clamping rods one by one according to a Z-shaped path in the purging process;
4) after one purging is finished, amplifying the purged clamping rods by 130-fold and 150-fold by using a high-power microscope and observing;
5) if no black spot impurities exist, purging the next batch of clamping rods; if the black spot impurities still exist, repeating the steps 1) -4) until no black spot impurities exist.
2. The method for removing residue from the surface of a clamping bar as set forth in claim 1, wherein the strip-shaped groove has a length of 90mm, a width of 0.8mm and a depth of 0.3 mm.
3. The method for removing residue on the surface of a clamping bar as set forth in claim 1, wherein the number of the strip-shaped grooves is 10, and the interval between the adjacent strip-shaped grooves is 10 mm.
4. The method of claim 1, wherein the holder is made of quartz glass.
5. The method for removing residue on the surface of a clamping rod according to claim 1, wherein in the step 3), the purge pressure is 0.1 mPa.
Priority Applications (1)
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CN202010918646.3A CN112222097B (en) | 2020-09-04 | 2020-09-04 | Method for removing residues on surface of clamping rod |
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CN202010918646.3A CN112222097B (en) | 2020-09-04 | 2020-09-04 | Method for removing residues on surface of clamping rod |
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CN112222097A CN112222097A (en) | 2021-01-15 |
CN112222097B true CN112222097B (en) | 2022-03-08 |
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CN202010918646.3A Active CN112222097B (en) | 2020-09-04 | 2020-09-04 | Method for removing residues on surface of clamping rod |
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100620405B1 (en) * | 2006-04-24 | 2006-09-06 | 홍성결 | Calmping apparatus for wire |
CN1986087A (en) * | 2005-12-21 | 2007-06-27 | 财团法人金属工业研究发展中心 | Cleaning device and method for circular rod workpiece |
DE202012104227U1 (en) * | 2012-11-05 | 2012-12-05 | Robert Lönne | Machining center for the machining of strip-shaped workpieces |
CN103995434A (en) * | 2014-06-12 | 2014-08-20 | 上海华力微电子有限公司 | Mask dust collection device |
CN104249255A (en) * | 2013-06-30 | 2014-12-31 | 常州市华贤五金厂 | Multi-workstation rod-piece fixing tool assembly |
CN104362114A (en) * | 2014-09-30 | 2015-02-18 | 天津市环欧半导体材料技术有限公司 | Device and method for cleaning large-diameter zone-melting polycrystalline rods |
CN105538003A (en) * | 2016-02-29 | 2016-05-04 | 西安交通大学 | Multi-station bar material cutting fixture workbench for wire sawing machine tool |
CN106637269A (en) * | 2016-12-22 | 2017-05-10 | 机械科学研究总院青岛分院 | Removing method of irregular stainless steel piece surface passive film |
EP3650168A1 (en) * | 2018-11-07 | 2020-05-13 | On.GmbH | Clamping device for fixing workpieces during processing |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6953047B2 (en) * | 2002-01-14 | 2005-10-11 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purging |
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2020
- 2020-09-04 CN CN202010918646.3A patent/CN112222097B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1986087A (en) * | 2005-12-21 | 2007-06-27 | 财团法人金属工业研究发展中心 | Cleaning device and method for circular rod workpiece |
KR100620405B1 (en) * | 2006-04-24 | 2006-09-06 | 홍성결 | Calmping apparatus for wire |
DE202012104227U1 (en) * | 2012-11-05 | 2012-12-05 | Robert Lönne | Machining center for the machining of strip-shaped workpieces |
CN104249255A (en) * | 2013-06-30 | 2014-12-31 | 常州市华贤五金厂 | Multi-workstation rod-piece fixing tool assembly |
CN103995434A (en) * | 2014-06-12 | 2014-08-20 | 上海华力微电子有限公司 | Mask dust collection device |
CN104362114A (en) * | 2014-09-30 | 2015-02-18 | 天津市环欧半导体材料技术有限公司 | Device and method for cleaning large-diameter zone-melting polycrystalline rods |
CN105538003A (en) * | 2016-02-29 | 2016-05-04 | 西安交通大学 | Multi-station bar material cutting fixture workbench for wire sawing machine tool |
CN106637269A (en) * | 2016-12-22 | 2017-05-10 | 机械科学研究总院青岛分院 | Removing method of irregular stainless steel piece surface passive film |
EP3650168A1 (en) * | 2018-11-07 | 2020-05-13 | On.GmbH | Clamping device for fixing workpieces during processing |
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