CN1122189C - Variable light source shadow moire measuring method and device thereof - Google Patents
Variable light source shadow moire measuring method and device thereof Download PDFInfo
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- CN1122189C CN1122189C CN 98102625 CN98102625A CN1122189C CN 1122189 C CN1122189 C CN 1122189C CN 98102625 CN98102625 CN 98102625 CN 98102625 A CN98102625 A CN 98102625A CN 1122189 C CN1122189 C CN 1122189C
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Abstract
The present invention relates to a variable light source shadow moire measuring method and a device thereof. The device comprises a variable light source device, an optical grating, a photoelectric sensor, an object to be measured and a measuring result outputting device, wherein the variable light source device is used for changing spatial position of a light source, the optical grating is used for generating moire fringes, the photoelectric sensor is used for obtaining measurement information, and the object to be measured is placed back of the optical grating. When the position of the light source is changed by the variable light source device once, a moire topograph I corresponding to the object to be measured can be observed by the photoelectric sensor from the optical grating. If other relative positions are kept immovable, the position of the light source is continuously changed for n (n is at least 3) times, and the corresponding N moire topographs I1, I2... and In (n is at least 3) are obtained. In this way, three-dimensional shape surface information of the object can be obtained by solving the moire topographs.
Description
The present invention relates to photoelectric detection technology field, further relate to a kind of variable light source shadow Moire measuring method and device.
The shadow Moire contour measuring method is a kind of optics whole audience noncontact three-dimensional measuring method, and this method was published on " Applied Optics " the 9th the 6th phase of volume by HTakasaki first in 1970.In order to obtain the three-dimensional information of measured object bodily form face, one grating is approached body surface to be placed, by one group of pointolite (or one group of line source) irradiation grating, thereby will produce deformed grating figure at body surface, when observing this deformed grating by this grating, just can obtain a moir, this moir has comprised the three-dimensional information of measured object bodily form face, by finding the solution this moir, just can obtain the three-dimensional profile coordinate of object.
Usually the optical field distribution of moir can be expressed as:
Wherein A (x y) is the background light intensity, B (x, y)/(x y) is the contrast of Moire fringe to A, and P is a grating pitch, and (U z) is the information factor of inclusion bodily form face to φ.As can be seen from the above equation, if to solve elevation information Z (x, y), then essential at least three equations.Existing method, generally be to change the distance of grating between testee by mobile grating to obtain new equation, promptly change the size of h, this method must make mechanical movement, as: people such as Gerard Mauvoision disclosed technology on " Applied Optics " the 33 volume the tenth first phase in 1994.Therefore its measuring speed and measurement reliability are with restricted.
The quick measuring method that the purpose of this invention is to provide a kind of whole audience, noncontact, the motion of nothing machinery, by changing the position acquisition new equation of light source with respect to photoelectric sensor, thereby solve elevation information Z (x, y), i.e. variable light source shadow Moire measuring method.The needs that detect with the real-time online that satisfies the surface topography size.
Variable light source shadow Moire measuring method of the present invention comprises the steps:
1) grating being approached body surface places;
2), thereby will produce the first amplitude variation shape raster pattern J1 at body surface by first pointolite S1 (or line source L1) irradiation grating;
3) observe the first amplitude variation shape raster pattern J1 by this grating, just can obtain comprising first width of cloth moir I1 of the three-dimensional information of measured object bodily form face;
4) keep other relative position motionless, change the light source space position,, thereby will produce the second amplitude variation shape raster pattern J2 at body surface by second pointolite S2 (or line source L2) irradiation grating;
5) observe the second amplitude variation shape raster pattern J2, just can obtain second width of cloth moir I2;
6) repetition above-mentioned steps 4), 5) can obtain n width of cloth moir I1, I2 n time ... In (n 〉=3);
7) by finding the solution this n width of cloth moir I1, I2 ... In just can obtain the three-dimensional profile coordinate of object.
Change light supply apparatus of the present invention comprises a series of control circuits that are fixed on the illuminating source on the light source base and control light source, and this control circuit is that a common multichannel is selected one selected on-off circuit.
Variable light source shadow Moire measurement mechanism of the present invention consists of the following components, and it comprises the change light supply apparatus that changes the light source space position; Be used to produce the grating of Moire fringe; Be used to obtain the photoelectric sensor of metrical information; Be placed on grating testee afterwards; The measurement result output unit is formed.By becoming the every change light source position of light supply apparatus once, photoelectric sensor just can be observed the corresponding width of cloth moir of testee by grating.Keep other relative position motionless, continuously change (n 〉=3) light source position U1 n time, U2 ... Un obtains corresponding n Moire fringe optical field distribution I1, I2 ... In.Solve the three-dimensional information of testee.
The present invention has improved measuring speed and reliability, for Moire measuring method provides a kind of new demodulation method owing to adopted the change light supply apparatus to realize the quick measuring method that the whole audience, noncontact, nothing machinery move.
Fig. 1 is the schematic diagram of variable light source shadow Moire measuring method and device;
Fig. 2 is embodiments of the invention one.
Fig. 3 is embodiments of the invention two.
Fig. 4 is embodiments of the invention three.
Fig. 5 is the synoptic diagram that the present invention becomes light supply apparatus.
Describe method and apparatus of the present invention in detail below in conjunction with accompanying drawing:
As shown in Figure 1, testee 4 is positioned as close to a side that is placed on grating 2 plane β, and photoelectric sensor 3 and change light supply apparatus 1 are placed on the opposite side of optical axis 2 plane β respectively, and guarantee that the optical axis of photoelectric sensor 3 and light source optical axis have the angle of spending greater than 0, this angle is by the Measurement Resolution decision of system, and method of the present invention realizes according to the following steps:
1) grating 2 is approached object 4 and show placement;
2), thereby will produce the first amplitude variation shape raster pattern J1 on object 4 surfaces by first pointolite S1 (or line source) L1 irradiation grating 2;
3) observe the first amplitude variation shape raster pattern J1 by grating 2, just can obtain comprising first width of cloth moir I1 of the three-dimensional information of measured object bodily form face;
4) keep other relative position motionless, change the light source space position,, thereby will produce the second amplitude variation shape raster pattern J2 on object 4 surfaces by second pointolite S2 (or line source L2) irradiation grating 2;
5) observe the second amplitude variation shape raster pattern J2, just can obtain second width of cloth moir I2;
6) repetition above-mentioned steps 4), 5) can obtain n width of cloth moir I1, I2 n time ... In (n 〉=3);
7) by finding the solution this n width of cloth moir I1, I2 ... In just can obtain the three-dimensional profile coordinate of object.
Fig. 2 has described and has become one of embodiment of light source Moire measuring method and device, its light source is made the pointolite S1 that can adopt enough brightness, S2 ... Sn, its locus is respectively U1, U2 ... Un, the also available line source L1 that is parallel to grating 2 stripeds, L2 ... Ln finishes to highlight, and the mid point of each line source is respectively U1, U2 ... Un, perpendicular to plane α and be symmetrically distributed in α both sides, plane, at this moment to come from the intersection point of plane α be U1 to linear light, U2 ... Un.Light source is with in photoelectric sensor all is in the same plane α vertical with grating 2 plane β.Thereby obtain different More's information I1, I2 ... In.
Fig. 3 has described two of the embodiment that becomes light source Moire measuring method and device, pointolite S1, S2 ... Sn, or line source L1, L2 ... Ln is with in photoelectric sensor 3 all is in the same plane γ parallel with grating 2 plane β.
Fig. 4 has described three of the embodiment that becomes light source Moire measuring method and device, and promptly the optical axis of photoelectric sensor 3 is perpendicular to grating planar β, and line source L1, L2 ... Ln all is in the photoelectric sensor 3 residing plane α.And each light source equates with the distance of photoelectric sensor 3 to grating 2 to the distance of grating 2.According to the Moire fringe principle, under this specific structure, in order to obtain better moir, can arrange light source symmetrically at the another side of photoelectric sensor 3, the line source identical with photoelectric sensor 3 distances has identical Moire fringe, and be superposed to More's information I1 of high s/n ratio, I2 ... In.In this embodiment, the pitch P=0.05mm of grating 2, photoelectric sensor 3 and the distance h=118mm of light source L to grating 2, the distance, delta b=7mm between the light source, the distance of light source L1 and photoelectric sensor 3 is b=24mm.It is 40 * 40mm that this device can be surveyed the object area
2, measurement range is 0-0.3mm, and measuring accuracy reaches 10 μ m, and time of every measurement is 1.5 seconds, has satisfied the needs that real-time online detects.
Fig. 5 is the basic structure of change light supply apparatus 1 of the present invention, comprises a series of control circuits 8 that are fixed on the illuminating source 7 on the light source base 6 and control light source 7, and this control circuit is that a common multichannel is selected one selected on-off circuit.
Owing to adopted the change light source technology, widened the utilization scope of shadow Moire measuring method, improved its technical feature, measuring accuracy has improved 10 times, reach 10 μ m, and make Measuring Time shorten 1.5 seconds, thereby reached the needs that real-time online detects, can be widely used in the on-line testing of microelectronics industry product by 40 seconds.
Claims (5)
1, a kind of variable light source shadow Moire measuring method may further comprise the steps:
1) grating being approached body surface places;
2), thereby will produce the first amplitude variation shape raster pattern (J1) at body surface by first pointolite (S1) or line source (L1) irradiation grating;
3) photoelectric sensor is observed the first amplitude variation shape raster pattern (J1) by this grating, just can obtain comprising the first amplitude variation shape raster pattern (I1) of the three-dimensional information of measured object bodily form face;
Feature of the present invention is:
4) keep other relative position motionless, change the light source space position,, thereby will produce the second amplitude variation shape raster pattern (J2) at body surface by second pointolite (S2) or line source (L2) irradiation grating;
5) observe the second amplitude variation shape raster pattern (J2), just can obtain second width of cloth moir (I2);
6) repeat above-mentioned 4), 5) can obtain n width of cloth moir (I1, I2 n time ... In), just can obtain object and get the three-dimensional profile coordinate;
7) by finding the solution this n width of cloth moir (I1, I2 ... In), just can obtain the three-dimensional profile coordinate of object.
2, a kind of variable light source shadow Moire measurement mechanism, comprise that one is placed on the grating (2) of testee (4) one sides, the opposite side of grating (2) plane β disposes a photoelectric sensor (3) and a light supply apparatus (1), the optical axis of photoelectric sensor (3) and light source optical axis have the angle greater than 0 degree, feature of the present invention is, light supply apparatus (1) is a change light supply apparatus, and it comprises a series of control circuits (8) that are fixed on the illuminating source (7) on the light source base (6) and control light source (7).
3, variable light source shadow Moire measurement mechanism according to claim 2 is characterized in that, said pointolite (S1, S2 ... Sn), or line source (L1, L2 ... Ln) mid point and photoelectric sensor (3) are in the same plane α, and the α plane is perpendicular to grating planar β.
4, variable light source shadow Moire measurement mechanism according to claim 2, it is characterized in that said pointolite (S1, S2 ... Sn) or line source (L1, L2 ... Ln) all be in the same plane γ with photoelectric sensor (3), the γ plane parallel is in grating planar β.
5, variable light source shadow Moire measurement mechanism according to claim 2, it is characterized in that, the optical axis of said photoelectric sensor (3) is perpendicular to grating planar β, pointolite (S1, S2 ... Sn) or line source (L1, L2 ... Ln) center all is in the same plane α with photoelectric sensor (3), and is symmetrically distributed in the both sides of photoelectric sensor (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98102625 CN1122189C (en) | 1998-06-22 | 1998-06-22 | Variable light source shadow moire measuring method and device thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98102625 CN1122189C (en) | 1998-06-22 | 1998-06-22 | Variable light source shadow moire measuring method and device thereof |
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| CN1206845A CN1206845A (en) | 1999-02-03 |
| CN1122189C true CN1122189C (en) | 2003-09-24 |
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| CN 98102625 Expired - Fee Related CN1122189C (en) | 1998-06-22 | 1998-06-22 | Variable light source shadow moire measuring method and device thereof |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103278954B (en) * | 2012-11-01 | 2016-03-30 | 上海天马微电子有限公司 | 3D display panel and 3D display device |
| CN104634278A (en) * | 2015-03-03 | 2015-05-20 | 湖北汽车工业学院 | Shadow Moire measuring system for automatic compensation of contrast of fringe pattern |
| CN105157616B (en) * | 2015-07-31 | 2017-08-22 | 西安工业大学 | A kind of shadow moire profilometry device, its scaling method and measuring method |
| CN106813596B (en) * | 2017-01-18 | 2019-01-18 | 西安工业大学 | A kind of self-calibration shadow Moire measuring three-dimensional profile method |
| CN109959346A (en) * | 2019-04-18 | 2019-07-02 | 苏州临点三维科技有限公司 | A kind of non-contact 3-D measuring system |
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1998
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