CN105157616B - A kind of shadow moire profilometry device, its scaling method and measuring method - Google Patents
A kind of shadow moire profilometry device, its scaling method and measuring method Download PDFInfo
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- CN105157616B CN105157616B CN201510464965.0A CN201510464965A CN105157616B CN 105157616 B CN105157616 B CN 105157616B CN 201510464965 A CN201510464965 A CN 201510464965A CN 105157616 B CN105157616 B CN 105157616B
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Abstract
The present invention provides a kind of shadow moire profilometry device, its scaling method and measuring method, and measurement apparatus includes three line sources of red, green, blue, a colourful CCD video camera, a grating and a precision displacement platform；Three line sources of red, green, blue and colourful CCD video camera collinearly be arranged at grating side and parallel with grating face；Described grating is arranged on precision displacement platform；Described three line sources of red, green, blue are arranged in colourful CCD video camera side.Invention also provides the scaling method of above-mentioned shadow moire profilometry device and measuring method.The problem of longer testee time and not high precision being measured instant invention overcomes existing phase shift shadow Moire measurement apparatus and measuring method.
Description
Technical field
The present invention relates to technical field of optical precision measurement, and in particular to a kind of shadow moire profilometry device, its mark
Determine method and measuring method.
Background technology
Shadow Moire technology of profiling precision is high, has become the one preferred technique that object is heated or stress deformation is measured.And
One of major technique that JEDEC high temperature measurements industrial standard also recommends shadow moire to carry out such measurement.So far, it is existing big
Application of the document report of the amount shadow Moire technology in IC industry, and pertinent literature also emerges in large numbers constantly.These should
Topography measurement with the package surface profile measurement including chip, the silicon wafer measurement of planeness and silicon wafer integrated circuit etc..
The variation for persistently diminishing and designing however as Electronic Packaging, new manufacturing process for e measurement technology propose it is online or
Position, high accuracy, the measurement request of full inspection.The feature also requires that existing e measurement technology adapts to the change progress of test product feature
It is correspondingly improved, makes its measurement apparatus that there is optimal parameter, to obtain high-contrast moiré topography, and combines phase shift skill
Art, reliably automatically extracts metrical information etc. exhaustive.But limited by component manufacture level and Measurement Algorithm, tradition
Shadow Moire measurement apparatus often use black-white CCD video camera, and by moving grating produce measure visual field phase change,
Its dephasing processes needs mechanical movement, and process wastes time and energy.Additionally while some devices are attempted by the different light sources of Time-sharing control
Light on and off introduce phase shift for measurement visual field, but this method can not complete the acquisition of bar graph simultaneously, and to light source positioning requirements mistake
In strict, it is impossible to realize that light source is accurately positioned, furthermore, its measurement result is easily changed by light field to be influenceed, it is impossible to reliably surveyed
Amount.Traditional another shortcoming of shadow Moire device is that its calibration process needs to make calibrating block, is needed during demarcation according to demarcation
Elevation information known to block, inverse goes out device parameter, or needs to record the light intensity changing rule of measurement visual field point, such side
Method is realized complicated, it is impossible to be rapidly completed demarcation.
The content of the invention
It is an object of the invention to provide a kind of shadow moire profilometry device, its scaling method and measuring method, with gram
Take existing phase shift shadow Moire measurement apparatus and measuring method measurement the testee time is longer and the problem of not high precision.
The technical scheme is that：
A kind of shadow moire profilometry device, described measurement apparatus includes three line sources of red, green, blue, a coloured silk
Color ccd video camera, a grating and a precision displacement platform；Described three line sources of red, green, blue and colored CCD shooting
Machine collinearly be arranged at grating side and parallel with grating face；Described grating is arranged on that accurate displacement is flat to appear on the stage；It is described it is red,
Green, blue three line sources are arranged in colourful CCD video camera side.
Described precision displacement platform is manual precision displacement table or electric precision displacement platform.
Described three line sources of red, green, blue are equidistantly spaced from colourful CCD video camera side.
A kind of scaling method of shadow moire profilometry device, comprises the following steps：
Step one, testee is placed in below grating, opens any of three line sources of red, green, blue monochromatic source,
By the equidistant moving grating of precision displacement platform several times, shoot and record phase shift bar graph therein；
Step 2, is determined due to the phase shift that moving grating is produced using phase shift extraction algorithm.
A kind of measuring method of shadow moire profilometry device, comprises the following steps successively：
Step one, grating is adjusted to initial position, testee is placed in below grating, while opening red, green, blue three
Line source, secondary color Moire fringe is produced on testee surface, and then colourful CCD video camera absorbs multiple under the conditions of single shot
Color Moire fringe；
Step 2, separates the secondary color Moire fringe of intake to form monochromatic Moire fringe, obtains being used to demodulate testee
The phase shift moire fringe figure of surface topography；
Step 3, by the data Regularization obtained by step 2, then extracts measurement phase with main amount analytic approach；
Step 4, the measurement phase extracted with de-packaging method to step 3 carries out phase unwrapping；
Step 5, according to measurement sensitivity and the phase of expansion, carries out Phase-height mapping, completes measurement.
Beneficial effects of the present invention：
1st, measurement apparatus of the present invention is simple in construction：Measurement apparatus structure proposed in the present invention is imaged using colored CCD
Machine, the collection of phase shift bar graph can be completed simultaneously, and by using R, G, B light source irradiation measurement grating, bar graph can be completed simultaneously
Phase shift；Compared with traditional shadow moire, the present invention improves measurement structure, reduces because the diffraction and grating surface of light are anti-
Penetrate the influence that light is distributed to fringe contrast and light intensity sine；Its installation requirement is low, and does not increase the complexity of measuring system；
2nd, the measuring method of testee surface appearance feature of the present invention is simple：Testee is placed under grating, once
Measurement can be automatically performed, measuring speed is improved, to adapt to online or in place and full inspection measurement request；Develop the phase without imbalance
Shadow Moire demodulation techniques are moved, measurement accuracy is reached submicron order in large dynamic range；It can be carried out by this method
Object surface appearance is measured, can be with automatic measurement testee surface topography, to realize that object surface appearance quickly lays the first stone.
3rd, the present invention also provides a set of quick scaling method for device：This method relies only on the moon without using calibrating block
Shadow More's own device, realizes quick, the convenient demarcation of measurement sensitivity and structural parameters, and the present invention can measured directly
The demarcation of sensitivity is measured in journey, measurement efficiency is improved；
4th, application requirement of the present invention is low：The present invention does not need the uniformity of light source, low to environmental requirement, it is adaptable to industrial field
The measurement of conjunction needs.
Brief description of the drawings
Fig. 1 is the measurement apparatus schematic diagram of the present invention；
Fig. 2 is the schematic diagram that measuring method of the present invention is implemented；
In figure, three line sources of 1- red, green, blues, 2- colourful CCD video cameras, 3- gratings, 4- testees.
Embodiment
The present invention is further detailed below in conjunction with the accompanying drawings, a kind of shadow moire profilometry as shown in Figure 1
Device, described measurement apparatus includes three line sources 1 of red, green, blue, a colourful CCD video camera 2, a grating 3 and one
Precision displacement platform；Described three line sources 1 of red, green, blue and colourful CCD video camera 2 it is conllinear be arranged at the side of grating 3 and
It is parallel with grating face；Described grating 3 is arranged on that accurate displacement is flat to appear on the stage, and precision displacement platform is manual precision displacement table or electricity
Dynamic precision displacement table, precision displacement platform can drive direction of the grating 3 along vertical raster face to move；Described red, green, blue three
Individual line source 1 is equidistantly spaced from the side of colourful CCD video camera 2 at equal intervals or approximately.
The scaling method based on said apparatus is described below：
Referring to Fig. 2, the optical axis of colourful CCD video camera 2 is perpendicular to grating face, the equidistant cloth of three line sources of red, green, blue 1
Put, the optical centre and light source center of colourful CCD video camera 2 are placed in distance grating plane h distance, first line source and coloured silk
Color ccd video camera optical center distance is d.
Before actually measurement object surface appearance, the demarcation of device is measured first, the proving operation is only surveyed first
Needed during amount, scaling method is comprised the concrete steps that：
Testee 4 is placed in the lower section of grating 3 by step one, opens any of three line sources 1 of red, green, blue monochromatic light
Source, by manual precision displacement table or 3 a quarter fringe spacing distance of electric precision displacement platform moving grating 3 times, and is clapped
Take the photograph and record phase shift bar graph therein；
Step 2 is determined due to the phase shift delta that moving grating 3 is produced using phase shift extraction algorithm, according to the phase shift delta of determination,
Obtaining measurement sensitivity S is：Δ h is the distance that precision displacement platform is moved every time in formula.
Complete measurement apparatus staking-out work after, carry out testee 4 measuring surface form, measuring method it is specific
Step is：
Step one, testee 4 is placed in below grating 3, while three line sources 1 of red, green, blue are opened, in measured object
The surface of body 4, which is produced, has certain phase-shift phase between secondary color Moire fringe, assorted Moire fringe, then colourful CCD video camera 2 is in list
Secondary color Moire fringe is absorbed under secondary shooting condition；
Step 2, separates the secondary color Moire fringe of intake to form monochromatic Moire fringe, is just used in a computer
In the phase shift moire fringe figure of the demodulation surface topography of testee 4；
Assuming that Ak(x, y) is background, Bk(x, y) is modulation item, φk(x, y) be phase, k=1,2,3 be time domain striped sequence
Number, then the bar graph light intensity absorbed can be expressed as respectively：
Ik(x, y)=Ak(x,y)+Bk(x,y)cos[φk(x,y)]；
Step 3, by the data Regularization obtained by step 2, removes striped background and amplitude, eliminates color cross-talk pair
The influence of measurement；Then measurement phase is extracted with main amount analytic approach；
Described Regularization process is：
N is pixel number in formula；
Step 4, the measurement phase extracted with de-packaging method to step 3 carries out phase unwrapping；
Step 5, according to measurement sensitivity S and the phase of expansion, carries out Phase-height mapping, completes measurement；
Such as need to continue to measure, repeat measuring surface form step.
, can be fully the contactless measurement of full field and phase of shadow Moire D profile detection by above-mentioned measuring method
The advantageous features such as e measurement technology high accuracy combine, and limit of the beyond tradition shadow Moire technical system in measurement process
System；In this regard, this patent proposes the phase shift shadow Moire three-dimensional sensing new technology based on red, green, blue (RGB) light source.Colored CCD is
Data quick sampling provides guarantee under single shot, by arranging that light source position realizes that secondary color More and stripe measurement phase are adjusted
System, then corrects light field standardization striped diagram data, and develop high-precision phase shift algorithm, become accurate phase de-packaging method and be
Unite calibration technique, absolute phase is mapped to measurement height space by coarse and fine.
Present disclosure is not limited to cited by embodiment, and those of ordinary skill in the art are by reading description of the invention
And any equivalent conversion taken technical solution of the present invention, it is that claim of the invention is covered.
Claims (3)
1. a kind of measuring method of shadow moire profilometry device, it is characterised in that：
The measurement apparatus that this method is used includes three line sources of red, green, blue（1）, a colored CCD video camera（2）, one
Individual grating（3）With a precision displacement platform；Described three line sources of red, green, blue（1）With colored CCD video camera（2）
Conllinear is arranged at grating（3）Side and parallel with grating face；Described grating（3）It is arranged on precision displacement platform；It is described
Three line sources of red, green, blue（1）It is arranged in colored CCD video camera（2）Side；
Described measuring method comprises the following steps successively：
Step one, by grating（3）Adjust to initial position, testee（4）It is placed in grating（3）Lower section, at the same open it is red, green,
Blue three line sources（1）, secondary color Moire fringe is produced on testee surface, then colored CCD video camera（2）Clapped in single
Secondary color Moire fringe is absorbed under the conditions of taking the photograph；
Step 2, separates the secondary color Moire fringe of intake to form monochromatic Moire fringe, obtains being used to demodulate testee（4）Table
The phase shift moire fringe figure of face pattern；
Step 3, by the data Regularization obtained by step 2, then extracts measurement phase with main amount analytic approach；
Step 4, the measurement phase extracted with de-packaging method to step 3 carries out phase unwrapping；
Step 5, according to measurement sensitivity and the phase of expansion, carries out Phase-height mapping, completes measurement.
2. the measuring method of shadow moire profilometry device according to claim 1, it is characterised in that：Described precision
Displacement platform is manual precision displacement table or electric precision displacement platform.
3. the measuring method of shadow moire profilometry device according to claim 1, it is characterised in that：It is described it is red,
Green, blue three line sources（1）It is equidistantly spaced from colored CCD video camera（2）Side.
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105953746B (en) * | 2016-05-16 | 2018-12-14 | 西安工业大学 | The 3-D profile real-time measuring method of dynamic object |
| CN106257995B (en) * | 2016-07-25 | 2019-06-07 | 深圳大学 | A kind of light field three-D imaging method and its system |
| CN106813596B (en) * | 2017-01-18 | 2019-01-18 | 西安工业大学 | A kind of self-calibration shadow Moire measuring three-dimensional profile method |
| CN107727002B (en) * | 2017-09-29 | 2020-03-13 | 西安工业大学 | Structure for shadow Moire parameter calibration, calibration method and offset error elimination method |
| CN108254086B (en) * | 2017-12-29 | 2022-01-28 | 西安工业大学 | Random optical fiber point diffraction measurement method |
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| EP1306646A1 (en) * | 2000-06-07 | 2003-05-02 | Citizen Watch Co. Ltd. | Lattice pattern projector using liquid crystal lattice |
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| CN101608906A (en) * | 2009-07-21 | 2009-12-23 | 西安交通大学 | A kind of method for measuring optical three-dimensional contour of space encoding |
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| CN1206845A (en) * | 1998-06-22 | 1999-02-03 | 西安交通大学 | Variable light source shadow Moire measuring method and device thereof |
| EP1306646A1 (en) * | 2000-06-07 | 2003-05-02 | Citizen Watch Co. Ltd. | Lattice pattern projector using liquid crystal lattice |
| CN101182996A (en) * | 2006-11-13 | 2008-05-21 | 株式会社高永科技 | Three-dimensional shape measuring apparatus using shadow moire |
| CN101608906A (en) * | 2009-07-21 | 2009-12-23 | 西安交通大学 | A kind of method for measuring optical three-dimensional contour of space encoding |
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