CN112161584A - Wavefront three-dimensional microscope based on illumination light tilt modulation - Google Patents
Wavefront three-dimensional microscope based on illumination light tilt modulation Download PDFInfo
- Publication number
- CN112161584A CN112161584A CN202011161962.7A CN202011161962A CN112161584A CN 112161584 A CN112161584 A CN 112161584A CN 202011161962 A CN202011161962 A CN 202011161962A CN 112161584 A CN112161584 A CN 112161584A
- Authority
- CN
- China
- Prior art keywords
- wavefront
- light source
- light
- dimensional microscope
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 title claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 abstract description 10
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a wavefront three-dimensional microscope based on illumination light tilt modulation, which comprises a structured light collimation light source, wherein a wavefront modulator, a sample to be measured and an objective lens are correspondingly arranged on one side of the structured light collimation light source, a barrel lens and a wavefront sensor which correspond to the objective lens are arranged on the other end, far away from the structured light collimation light source, of the objective lens, and the wavefront sensor is connected with a computer. The invention has the beneficial effects that: the three-dimensional microscope based on the wavefront sensing can reconstruct the three-dimensional characteristics of a detected sample through the wavefront of light, has simple structure, is insensitive to vibration noise and has low requirement on the coherence of a light source, so the three-dimensional microscope can be widely applied to the fields of biological observation, medical instruments, optical surface type detection, industrial detection and the like.
Description
Technical Field
The invention relates to the technical field, in particular to a wavefront three-dimensional microscope based on illumination light tilt modulation.
Background
Since the detection range of the wavefront detector is limited, the detection slope from the minimum detection slope to the maximum detection slope is the dynamic range of the wavefront sensor, and if the light spot position exceeds the detection range of the photoelectric detector, the wavefront detector cannot accurately detect the slope of the incident wave wavefront.
Three-dimensional microscopes based on wavefront sensing reconstruct three-dimensional data of an object by detecting the transmission or surface reflection slope of the sample under test, and therefore, when the slope exceeds the dynamic range of the wavefront sensor, three-dimensional data cannot be accurately reconstructed.
Disclosure of Invention
The present invention is directed to a wavefront three-dimensional microscope based on illumination light tilt modulation to solve the above-mentioned problems of the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a wave front three-dimensional microscope based on illumination light tilt modulation comprises a structured light collimation light source, wherein a wave front modulator, a sample to be measured and an objective lens are correspondingly arranged on one side of the structured light collimation light source, a barrel mirror and a wave front sensor which correspond to the objective lens are arranged on the other end, far away from the structured light collimation light source, of the objective lens, and the wave front sensor is connected with a computer.
Preferably, the wavefront sensor is composed of a grating array and a photosensitive element.
Preferably, the structured collimation light source is generated by point light source through lens collimation.
Preferably, the point light source is a laser or an LED.
Preferably, the structured collimated light source generates a plane wave beam which can be tilted in various directions within a certain range by transmission or reflection of the wavefront modulator.
Preferably, the light beam modulated by the wavefront modulator is incident to the wavefront sensor through the sample to be measured, the objective lens and the tube lens, and forms a spot lattice on the photoelectric sensor.
Advantageous effects
The three-dimensional microscope based on the illumination light tilt modulation can reconstruct the three-dimensional characteristics of a measured sample through the wavefront of light, has a simple structure, is insensitive to vibration noise, and has low requirement on the coherence of a light source, so that the three-dimensional microscope can be widely applied to the fields of biological observation, medical instruments, optical surface type detection, industrial detection and the like. When the wave front of the incident wave is different from that of the ideal wave, the position of the light spot lattice can be changed. Therefore, the slope of the incoming wave front and the outgoing wave front can be calculated by comparing the change of the position of the light spot with the reference wave front, and the three-dimensional information of the tested sample can be reconstructed.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the overall structure of embodiment 2 of the present invention;
fig. 3 is a diagram illustrating the sub-aperture structure of the wavefront sensor of the present invention.
Reference numerals
The method comprises the following steps of 1-structured light collimation light source, 2-measured sample, 3-objective lens, 4-cylindrical lens, 5-wavefront sensor, 6-grating array, 7-photosensitive element, 8-computer, 9-wavefront modulator, 10-first wedge prism and 11-second wedge prism.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
Example 1
As shown in fig. 1, the wavefront three-dimensional microscope based on illumination light tilt modulation comprises a structured light collimation light source 1, a wavefront modulator 9, a sample 2 to be measured and an objective lens 3 are arranged on one side of the structured light collimation light source 1 and correspond to the structured light collimation light source, a barrel lens 4 and a wavefront sensor 5 corresponding to the objective lens 3 are arranged on the other end of the objective lens 3 far away from the structured light collimation light source 1, and the wavefront sensor 5 is connected with a computer 8.
Preferably, the wavefront sensor 5 is composed of a grating array 6 and a light-sensitive element 7.
Preferably, the structured collimated light source 1 is produced by point light sources collimated by a lens.
Preferably, the point light source is a laser or an LED.
Preferably, the structured collimated light source 1 generates a plane wave beam which can be tilted in various directions within a certain range by transmission or reflection by the wavefront modulator 9.
Preferably, the light beam modulated by the wavefront modulator 9 is incident on the wavefront sensor 5 through the sample 2 to be measured, the objective lens 3 and the barrel lens 4, and forms a spot lattice on the photoelectric sensor 7.
The structure collimation light source is generated by point light source such as laser or LED through lens collimation, the collimated light beam is transmitted or reflected by the plane wave front modulator to generate a plane wave light beam which can incline to all directions in a certain range, the modulated light beam passes through a sample to be measured and then enters the wave front sensor through the objective lens and the tube lens to form a light spot lattice on the photoelectric sensor, and the position of each light spot reflects the wave front angle of partial incident light wave.
When the wave fronts of the incident wave and the ideal wave are different, the lattice position of the light spot can be changed, so that the slope of the wave fronts of the incident wave and the incident wave can be calculated by comparing the change of the position of the light spot with the reference wave fronts, and the three-dimensional information of the measured sample can be reconstructed.
For the slope in the dynamic range of the wavefront sensor, the light spot formed in the sub-aperture of the wavefront sensor is as shown in the left diagram of fig. 3, in the sub-aperture (square) region, if the detected slope exceeds the dynamic range of the wavefront sensor, the situation as shown in the right diagram of fig. 3 occurs, the focused light spot appears outside the sub-aperture region, at this time, the light spot enters the detection region of the sub-aperture by scanning the inclination angle of the wave front of the incident light wave and is distinguished from the light spot belonging to the adjacent sub-aperture, at this time, the light spot offset is calculated by the centroid algorithm, and the offset introduced by the wavefront modulation is superposed, so that the real slope corresponding to the sub-aperture region can be calculated.
Example 2
As shown in fig. 2, the wavefront three-dimensional microscope based on illumination light tilt modulation comprises a structured light collimation light source 1, wherein a first wedge prism 10 and a second wedge prism 11, a sample 2 to be measured and an objective lens 3 are arranged on one side of the structured light collimation light source 1 correspondingly, a barrel lens 4 and a wavefront sensor 5 corresponding to the other end of the objective lens 3 far away from the structured light collimation light source 1 are arranged on the other end of the objective lens 3, and the wavefront sensor 5 is connected with a computer 8.
Preferably, the first wedge prism 10 and the second wedge prism 11 are rotationally connected to a driving motor disposed outside thereof.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the content of the present invention within the scope of the protection of the present invention.
Claims (6)
1. A wavefront three-dimensional microscope based on illumination light tilt modulation, comprising a structured light collimated light source (1), characterized by: the device is characterized in that a wavefront modulator (9), a detected sample (2) and an objective lens (3) are correspondingly arranged on one side of the structured light collimation light source (1), the other end, far away from the structured light collimation light source (1), of the objective lens (3) is provided with a barrel mirror (4) and a wavefront sensor (5) which correspond to the objective lens, and the wavefront sensor (5) is connected with a computer (8).
2. The wavefront three-dimensional microscope based on illumination light tilt modulation of claim 1, characterized in that: the wavefront sensor (5) is composed of a grating array (6) and a photosensitive element (7).
3. The wavefront three-dimensional microscope based on illumination light tilt modulation of claim 1, characterized in that: the structure collimation light source (1) is generated by point light source through lens collimation.
4. The illumination light tilt modulation based wavefront three-dimensional microscope of claim 3, wherein: the point light source is laser or LED.
5. The wavefront three-dimensional microscope based on illumination light tilt modulation of claim 1, characterized in that: the structured collimation light source (1) generates a plane wave light beam which can incline towards all directions within a certain range through the transmission or reflection of the wave front modulator (9).
6. The wavefront three-dimensional microscope based on illumination light tilt modulation of claim 1, characterized in that: the light beam modulated by the wave front modulator (9) is incident to the wave front sensor (5) through the tested sample (2), the objective lens (3) and the tube lens (4) and forms a spot lattice on the photoelectric sensor (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011161962.7A CN112161584A (en) | 2020-10-27 | 2020-10-27 | Wavefront three-dimensional microscope based on illumination light tilt modulation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011161962.7A CN112161584A (en) | 2020-10-27 | 2020-10-27 | Wavefront three-dimensional microscope based on illumination light tilt modulation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112161584A true CN112161584A (en) | 2021-01-01 |
Family
ID=73864751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011161962.7A Pending CN112161584A (en) | 2020-10-27 | 2020-10-27 | Wavefront three-dimensional microscope based on illumination light tilt modulation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112161584A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1831499A (en) * | 2006-04-10 | 2006-09-13 | 中国科学院光电技术研究所 | Self-adaptive optical system based on microprism shack-Hartmann wavefront sensor |
| CN101371594A (en) * | 2006-01-20 | 2009-02-18 | 视瑞尔技术公司 | Holographic projector for enlarging a reconstruction zone |
| CN102426061A (en) * | 2011-08-23 | 2012-04-25 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with adjustable dynamic range |
| CN102436061A (en) * | 2011-12-13 | 2012-05-02 | 刘诚 | High speed three-dimensional fluorescence imaging microscope |
| CN103630330A (en) * | 2013-11-04 | 2014-03-12 | 中国科学院光电技术研究所 | Light intensity adjustable wave front tilt disturbance error simulator |
| CN105264428A (en) * | 2013-06-06 | 2016-01-20 | 浜松光子学株式会社 | Adjustment method for adaptive optics system, adaptive optics system, and storage medium storing program for adaptive optics system |
| CN108152991A (en) * | 2018-01-02 | 2018-06-12 | 北京全欧光学检测仪器有限公司 | The assembly method and device of a kind of optical lens |
| CN214372297U (en) * | 2020-10-27 | 2021-10-08 | 龚海 | Wavefront three-dimensional microscope based on illumination light tilt modulation |
-
2020
- 2020-10-27 CN CN202011161962.7A patent/CN112161584A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101371594A (en) * | 2006-01-20 | 2009-02-18 | 视瑞尔技术公司 | Holographic projector for enlarging a reconstruction zone |
| CN1831499A (en) * | 2006-04-10 | 2006-09-13 | 中国科学院光电技术研究所 | Self-adaptive optical system based on microprism shack-Hartmann wavefront sensor |
| CN102426061A (en) * | 2011-08-23 | 2012-04-25 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with adjustable dynamic range |
| CN102436061A (en) * | 2011-12-13 | 2012-05-02 | 刘诚 | High speed three-dimensional fluorescence imaging microscope |
| CN105264428A (en) * | 2013-06-06 | 2016-01-20 | 浜松光子学株式会社 | Adjustment method for adaptive optics system, adaptive optics system, and storage medium storing program for adaptive optics system |
| CN103630330A (en) * | 2013-11-04 | 2014-03-12 | 中国科学院光电技术研究所 | Light intensity adjustable wave front tilt disturbance error simulator |
| CN108152991A (en) * | 2018-01-02 | 2018-06-12 | 北京全欧光学检测仪器有限公司 | The assembly method and device of a kind of optical lens |
| CN214372297U (en) * | 2020-10-27 | 2021-10-08 | 龚海 | Wavefront three-dimensional microscope based on illumination light tilt modulation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7298468B2 (en) | Method and measuring device for contactless measurement of angles or angle changes on objects | |
| US7957006B2 (en) | System and method for optical sensing of surface motions | |
| CN106052585B (en) | A kind of surface shape detection apparatus and detection method | |
| WO2010058322A1 (en) | Laser self-mixing differential doppler velocimetry and vibrometry | |
| JP2002071513A (en) | Interferometer for immersion microscope objective and evaluation method of the immersion microscope objective | |
| EP3022523A1 (en) | Optical apparatus and methods | |
| US7649621B2 (en) | Optical inclinometer | |
| CN214372297U (en) | Wavefront three-dimensional microscope based on illumination light tilt modulation | |
| KR101085014B1 (en) | Optical surface measuring apparatus and method | |
| JP2547309B2 (en) | Method and apparatus for measuring interface tilt in an optical system | |
| US8269157B2 (en) | Optical imaging system | |
| US7728270B2 (en) | Microscopy method and microscope including two detections | |
| CN112161584A (en) | Wavefront three-dimensional microscope based on illumination light tilt modulation | |
| CN112857752A (en) | Absolute measurement system and method for angle-resolved scattering of optical element | |
| JP2001235317A (en) | Apparatus for measuring radius of curvature of optical spherical surface | |
| US20120316830A1 (en) | Coupled multi-wavelength confocal systems for distance measurements | |
| JP4652745B2 (en) | Optical displacement measuring instrument | |
| JPH09325278A (en) | Confocal type optical microscope | |
| US20120314200A1 (en) | Coupled multi-wavelength confocal systems for distance measurements | |
| KR101907782B1 (en) | Optical micorscopy device and method of measuring the image of a specimen | |
| US6750436B2 (en) | Focus error detection apparatus and method having dual focus error detection path | |
| JPH0843717A (en) | Focus detector | |
| KR102178045B1 (en) | Optical module for optical height measurement | |
| JP2009264778A (en) | Optical spot displacement detection apparatus and measuring apparatus | |
| JPS63153442A (en) | Measuring instrument for optical characteristic of beam splitter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |