CN112146812A - Temperature compensation method of thermal film shear stress sensor based on constant current driving - Google Patents
Temperature compensation method of thermal film shear stress sensor based on constant current driving Download PDFInfo
- Publication number
- CN112146812A CN112146812A CN202011023737.7A CN202011023737A CN112146812A CN 112146812 A CN112146812 A CN 112146812A CN 202011023737 A CN202011023737 A CN 202011023737A CN 112146812 A CN112146812 A CN 112146812A
- Authority
- CN
- China
- Prior art keywords
- temperature
- temperature compensation
- shear stress
- fluid
- expression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
The invention discloses a temperature compensation method of a thermal film shear stress sensor based on constant current driving, which comprises the following steps: converting the fluid temperature into an equivalent thermistor according to a linear relation expression of the temperature and the resistance value of the thermistor in the sensor, constructing an expression of the fluid temperature, and reconstructing an expression of the working resistor and an expression of the temperature difference by using the linear relation expression; substituting the obtained expression and the relation between the output voltage and the working resistance into a shear stress and thermal power formula to obtain an initial temperature compensation model; performing form transformation on the model to obtain a temperature compensation model of the relation between the output voltage and the fluid wall shear stress, and performing temperature compensation on the output voltage of the thermal film shear stress sensor according to the temperature compensation model; the invention realizes the temperature compensation of the thermal film shear stress sensor based on the constant current driving mode, and can compensate the error of the output voltage caused by the temperature change in a larger range, so that the error of the sensor is smaller.
Description
Technical Field
The invention belongs to the technical field of temperature compensation of a shear stress sensor, and particularly relates to a temperature compensation method of a thermal film shear stress sensor based on constant current driving.
Background
The frictional resistance of various water, land and air aircrafts in the high-speed running process accounts for 50% -80% of the total resistance, and the frictional resistance has an inseparable relation with the speed, energy consumption, carrying capacity and maneuverability of the aircrafts. The fluid wall shear stress is an important parameter for accurately expressing frictional resistance and describing the flow state of a fluid boundary layer. Fluid wall shear stress refers to the tangential stress on a wall due to the viscous action of the fluid as it flows through the wall. At present, measurement of wall shear stress plays an important role in drag reduction of large airplanes and noise reduction of underwater submarines, so that accurate measurement of wall shear stress has important theoretical and engineering significance.
The thermal film shear stress sensor is a typical thermal sensor used to measure wall shear stress. The sensor can measure the shear stress of the flowing wall surface by depositing a heat resistance element on the substrate based on the heat conduction principle. The driving mode is generally divided into constant temperature driving and constant current driving, compared with the constant temperature driving mode, the circuit system of the constant current driving mode is simpler and more stable, so that the constant current mode is simple and easy to use in wall shear stress measurement, and the driving can be realized by adopting a commercial constant current power supply.
The output signal of the thermal film shear stress sensor is formed by coupling wall shear stress and fluid temperature. Without temperature compensation, it is difficult for a thermal film shear sensor to accurately measure wall shear. When measuring the wall shear stress, the variation of the fluid temperature can cause large errors to the measurement result. Generally, a change of 0.5 ℃ of the fluid temperature can cause a measurement error of 2%, so that establishing an effective temperature compensation model is significant for realizing high-precision measurement of wall shear stress.
In the prior art, a method for realizing temperature compensation of a thermal film shear stress sensor based on a temperature compensation model in a constant temperature driving mode has been proposed; however, at present, there is no practical solution for temperature compensation based on a thermal film shear stress sensor in a constant current driving mode; this is because when the thermal film shear stress sensor based on constant current drive works, the change of the fluid temperature will affect the heat dissipation of the working resistor, so that the resistance value of the working resistor is deviated, thereby affecting the output voltage of the sensor.
Disclosure of Invention
The invention provides a temperature compensation method of a thermal film shear stress sensor based on constant current driving, which aims to realize temperature compensation of the thermal film shear stress sensor based on a constant current driving mode.
The technical problem to be solved by the invention is realized by the following technical scheme:
a temperature compensation method of a thermal film shear stress sensor based on constant current driving comprises the following steps:
the method comprises the following steps: according to a linear relation expression of the temperature and the resistance value of the thermistor in the sensor, the fluid temperature T is measuredfInto an equivalent thermistor RfTemperature T of the build fluidfAnd reconstructing the working resistance R of the sensor by using the linear relation expressionwExpression of (1) and temperature difference Δ T0The expression of (1); wherein the temperature difference Δ T0Is a working resistance RwWorking temperature T ofwWith fluid temperature TfA difference of (d);
step two: the expression obtained in the step one, the output voltage and the working resistor RwSubstituting the relation into a shear stress and thermal power formula to obtain an initial temperature compensation model;
step three: performing form transformation on the initial temperature compensation model to obtain a final temperature compensation model, and performing temperature compensation on the output voltage of the hot film shear stress sensor according to the final temperature compensation model; wherein the final temperature compensation model is a relation model of the output voltage and the fluid wall shear stress, and the model parameter of the final temperature compensation model is the fluid temperature TfNon-sensitive parameters.
Preferably, the sensor is a sensor for measuring the fluid wall shear stress based on the principle of heat dissipation, and the driving mode of the sensor is a constant current driving mode.
Preferably, the working resistance R reconstructed by the linear relational expression in the step onewThe expression of (a) is:
Rw＝R20×α20×(Tw-20)+R20；
wherein R is20Is the resistance value, alpha, of the thermistor at 20 DEG C20The temperature coefficient of resistance, T, of the thermistor at 20 DEG CwIs the operating temperature of the operating resistor.
Preferably, the fluid temperature T established in step onefThe expression of (a) is:
preferably, the expression of the initial temperature compensation model is:
wherein tau is the shear stress of the wall surface of the fluid to be measured, A is a first preset fitting parameter related to forced convection heat exchange of the fluid and the thermistor, B is a second preset fitting parameter related to heat conduction of the thermistor and the flexible substrate, and i is a constant driving current of the working resistor; eWIs the output voltage.
Preferably, the expression of the final temperature compensation model is:
f(Ew)＝A′τ1/3+B′；
wherein the content of the first and second substances,
both a 'and B' are constants that are insensitive to fluid temperature.
According to the temperature compensation method of the thermal film shear stress sensor based on constant current driving, the temperature of fluid is equivalent to a thermistor, the constant current driving is used as a bridge to form a connection with output voltage, and a final temperature compensation model is obtained. Based on the obtained temperature compensation model, the temperature compensation can be carried out on the output voltage of the thermal film shear stress sensor only by separately measuring the fluid temperature on the basis of the original calibration result, so that the error of the output voltage caused by the temperature change is compensated in a larger range, and the temperature compensation of the thermal film shear stress sensor based on the constant-current driving mode is realized.
The present invention will be described in further detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic flow chart of a temperature compensation method of a thermal film shear stress sensor based on constant current driving according to an embodiment of the present invention;
FIG. 2 is a diagram illustrating a relationship curve between the shear stress and the output voltage of the sensor 2 obtained by calibration when the temperature compensation is not performed on the sensor 2;
FIG. 3 is a diagram illustrating a relationship curve between a shear stress and an output voltage of the sensor 2 obtained by calibrating the temperature compensation of the sensor 2 according to the method shown in FIG. 1;
FIG. 4 is a diagram illustrating a relationship curve between a shear stress and an output voltage of the sensor 3 obtained by calibrating the temperature compensation of the sensor 3 according to the method shown in FIG. 1;
fig. 5 is a graph illustrating a relationship between the shear stress and the output voltage of the sensor 4 obtained by calibrating the temperature compensation of the sensor 4 by using the method shown in fig. 1.
Detailed Description
The present invention will be described in further detail with reference to specific examples, but the embodiments of the present invention are not limited thereto.
In order to realize temperature compensation of the thermal film shear stress sensor based on a constant current driving mode, the embodiment of the invention provides a temperature compensation method of the thermal film shear stress sensor based on constant current driving. As shown in fig. 1, the method may include the steps of:
s10: converting the fluid temperature into an equivalent thermistor according to a linear relation expression of the temperature and the resistance value of the thermistor in the sensor, constructing an expression of the fluid temperature, and reconstructing an expression of a working resistor and an expression of a temperature difference of the sensor by using the linear relation expression.
Wherein the temperature difference is Delta T0Is a working resistance RwTo a workerWorking temperature TwWith fluid temperature TfDifference of (D), symbol R for equivalent thermistorfAnd (4) showing.
In the embodiment of the invention, the sensor is a thermal film shear stress sensor, in particular to a sensor for measuring the shear stress of the fluid wall surface based on the heat dissipation principle, and the driving mode of the sensor is a constant current driving mode. In practical applications, the working resistor in such a sensor uses a thermistor, and the linear relationship expression of the temperature of the thermistor and the resistance is as follows:
R＝R20(1+α20(T-20)) (1)
wherein R is the resistance value of the thermistor at the temperature T; r20The resistance value of the thermistor is 20 ℃; alpha is alpha20The temperature coefficient of resistance of the thermistor is 20 ℃. Wherein the temperature T can be measured practically and R20And alpha20Is determined by the sensor itself and is of a known parameter.
According to the linear relational expression of the temperature of the thermistor and the resistance shown in the formula (1), the operating temperature T of the operating resistor can be obtainedwAnd fluid temperature TfExpressed in the following form:
wherein R iswRepresents the working resistance; rfRepresenting the temperature T of the fluidfEquivalent thermistors of the formula RfEqual in value to the same fluid temperature TfThe resistance of the lower working resistor. Wherein, in order to obtain more accurate equivalent thermistor RfThe fluid temperature T is requiredfA separate measurement is performed.
According to the formulae (2) and (3), and Δ T0＝Tw-TfCan obtain Δ T0The expression of (1); then according to formula(2) The working resistance R can be obtainedwThe expression of (a) is:
Rw＝R20×α20×(Tw-20)+R20 (4)
s20: and (4) substituting the expression of the temperature difference, the expression of the working resistance and the relational expression of the output voltage and the working resistance obtained in the step (S10) into a shear stress and thermal power formula to obtain an initial temperature compensation model.
In the step, the working resistance R of the sensor can be known according to ohm lawwAnd an output voltage EWThe relational expression of (1) is:
wherein i is a constant driving current of the working resistor, is a constant under the condition of constant current driving, and belongs to known parameters; output voltage EwIs the output signal of the entire sensor, which contains interfering components of the fluid temperature change.
In addition, the operating resistance R can be determined from the relation between the shear stress and the thermal powerwThe relational expression with the shear stress is as follows:
wherein tau is the shear stress of the fluid wall to be actually tested; a is a first preset fitting parameter related to forced convection heat exchange of the fluid and the thermistor and can be obtained in advance through an actual calibration experiment; b is a second predetermined fitting parameter related to the thermal conduction of the thermistor and the flexible substrate, which can also be obtained in advance by actual calibration experiments.
It will be appreciated that the operating resistance RwIn the relational expression between R and the shear stresswAnd Δ T0Subject to the temperature T of the fluidfThe change influence is large, and large errors are easily caused, so the influence caused by the change influence needs to be removed. Thus, the Δ T obtained in step 1 is compared0Expression of (1), operating resistance RwExpression (4) of (a) and output voltage and operating resistance RwSubstituting relational expression (5) into working resistance RwAnd the relation expression (6) between the shear stress and the initial temperature compensation model is obtained, and the expression of the model is as follows:
in the formula (7), the right side of the equal sign represents the convective heat transfer power of the working resistor at unit temperature, and the energy angle represents the dissipation of heat energy in a flow field; the left side of the equal sign shows the thermal power of the working resistor at unit temperature, the thermal power removes the interference of the temperature change of the fluid and is reflected in the aspect of energy that electric energy is converted into heat energy.
It will be appreciated that the innovative part of the embodiments of the invention is mainly embodied in the equivalent thermistor RfThe voltage across is denoted iRf，iRfNamely, the specific value of the influence of the change of the fluid temperature on the final output voltage, the physical meaning of the sensor is that after the change of the resistance value caused by the change of the fluid temperature, an additional resistance is connected, so that the additional resistance needs to be subtracted from the output voltage of the sensor.
Step S30: performing form transformation on the initial temperature compensation model to obtain a final temperature compensation model, and performing temperature compensation on the output voltage of the hot film shear stress sensor according to the final temperature compensation model; the final temperature compensation model is a relation model of the output voltage and the fluid wall shear stress, and model parameters of the final temperature compensation model are parameters which are not sensitive to the fluid temperature.
Specifically, the left side of the equal sign of formula (7) is other than EwExcept for the variables, the other parameters are known parameters before the calibration experiment, so the expression f (E) can be simplifiedw). Constant number
Sum constant
Reduced to constants a 'and B', respectively, are constants that are not sensitive to fluid temperature. After the formula (7) is simplified, a final temperature compensation model is obtained, and the expression of the model is as follows:
f(Ew)＝A′τ1/3+B′ (8)
it can be seen that f (E) on the left side of the medium number in the formula (8)w) Deviations affected by temperature changes are corrected. For the parameters on the right side of the equal sign, it has been proved by related experiments that the temperature of the fluid is almost constant between 23.1 ℃ and 85.1 ℃. Therefore, the temperature compensation model shown in the formula (8) reduces the influence of the fluid temperature change, realizes the temperature compensation of the output voltage, and embodies the practicability of the embodiment of the invention.
Based on the above embodiments, the temperature compensation method of the thermal film shear stress sensor based on constant current driving provided by the invention is characterized in that the fluid temperature is equivalent to a thermistor, and the constant current driving is used as a bridge to link the thermistor with the output voltage to obtain a final temperature compensation model. Based on the obtained temperature compensation model, the temperature compensation can be carried out on the output voltage of the thermal film shear stress sensor only by separately measuring the fluid temperature on the basis of the original calibration result, so that the error of the output voltage caused by the temperature change is compensated in a larger range, and the temperature compensation of the thermal film shear stress sensor based on the constant-current driving mode is realized.
Experiments show that the temperature compensation method provided by the embodiment of the invention can compensate errors of the output voltage of the thermal film shear stress sensor caused by temperature change in a larger range. To demonstrate this beneficial effect, specific experimental data are given below to illustrate the effectiveness and utility of the temperature compensation method provided by the embodiments of the present invention. The experimental process comprises calibrating the thermal film shear stress sensor and evaluating the fluid temperature T under the conditions that the water temperatures are 23 ℃, 26 ℃, 30 ℃ and 34 ℃ respectivelyfThe effect of the change in (c) on the measurement results. And, another two thermal film shear stress sensors were selected for calibration at the same four water temperatures to evaluate the generality of the proposed model.
Specifically, the R measured in advance by using 4 constant-current-driven thermal film shear stress sensors with 50 milliamperes is used20And alpha20As shown in table 1 below:
TABLE 1
| Sensor numbering | R20 | α20 |
| 1 | 9.439 | 0.004785 |
| 2 | 8.620 | 0.004752 |
| 3 | 8.858 | 0.004728 |
| 4 | 9.297 | 0.005019 |
In the experiment, the thermal film shear stress sensor driven by a constant current of 50 milliamperes has four leads, so that the influence of the lead voltage on the output voltage can be eliminated.
First, calibration was performed using the sensor 2 at fluid temperatures of 23 ℃, 26 ℃, 30 ℃ and 34 ℃, respectively. During each calibration, the fluid temperature was controlled within a 0.1 ℃ fluctuation range. Calibration data for the sensor 2 at these four temperatures without any temperature compensation is shown with reference to fig. 2. It can be seen that when temperature compensation is not performed, the output voltage difference corresponding to the same shear stress is large under different temperatures.
Then, the temperature compensation method provided by the embodiment of the present invention is used to perform temperature compensation on the output voltage of the sensor 2, and calibration data redrawn after compensation is shown in fig. 3. It can be seen that, after the temperature compensation method provided by the embodiment of the invention is used for carrying out temperature compensation on the output voltage, the change curve of the shear stress and the output voltage is compressed into a curve under the condition of no temperature, which shows that the temperature compensation method provided by the embodiment of the invention can accurately capture the influence of the temperature change on the calibration, namely the output voltage after the temperature compensation is hardly influenced by the fluid temperature, and only reflects the change of the pipe wall shear stress.
Wherein, the fitting values of the parameters a 'and B' of the temperature compensation model used in the compensation process are shown in table 2 below:
TABLE 2
| Temperature of fluid (. degree.C.) | A′ | B′ |
| 23 | 0.002224 | 0.003224 |
| 26 | 0.002227 | 0.003221 |
| 30 | 0.002208 | 0.003247 |
| 34 | 0.002217 | 0.003244 |
| Maximum relative error | 0.86％ | 0.8％ |
As can be seen from table 2, the relative error of the fitting parameters after calibration for the four temperatures is small.
Then, the temperature compensation calibration is performed on the sensor 3 and the sensor 4, and the calibration data after the temperature compensation calibration is shown in fig. 4 and 5, respectively. Comparing fig. 4 and 5, it can be seen that the calibration data of sensor 3 and sensor 4 after temperature compensation respectively almost coincide. Therefore, the temperature compensation method provided by the embodiment of the invention can realize temperature correction of the thermal film sensor in a constant current driving mode and has universality.
It should be noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the specification, reference to the description of the term "one embodiment", "some embodiments", "an example", "a specific example", or "some examples", etc., means that a particular feature or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by those skilled in the art.
While the present application has been described in connection with various embodiments, other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed application, from a review of the drawings, the disclosure, and the appended claims.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (6)
1. A temperature compensation method of a thermal film shear stress sensor based on constant current driving is characterized by comprising the following steps:
the method comprises the following steps: according to a linear relation expression of the temperature and the resistance value of the thermistor in the sensor, the fluid temperature T is measuredfInto an equivalent thermistor RfTemperature T of the build fluidfAnd reconstructing the working resistance R of the sensor by using the linear relation expressionwExpression of (1) and temperature difference Δ T0The expression of (1); wherein the temperature difference Δ T0Is a working resistance RwWorking temperature T ofwWith fluid temperature TfA difference of (d);
step two: the expression obtained in the step one, the output voltage and the working resistor RwSubstituting the relation into a shear stress and thermal power formula to obtain an initial temperature compensation model;
step three: performing form transformation on the initial temperature compensation model to obtain a final temperature compensation model, and performing final temperature compensation according to the final temperatureThe temperature compensation model performs temperature compensation on the output voltage of the thermal film shear stress sensor; wherein the final temperature compensation model is a relation model of the output voltage and the fluid wall shear stress, and the model parameter of the final temperature compensation model is the fluid temperature TfNon-sensitive parameters.
2. The temperature compensation method of claim 1, wherein the sensor is a sensor for measuring a fluid wall shear stress based on a heat dissipation principle, and a driving mode of the sensor is a constant current driving mode.
3. The temperature compensation method of claim 1, wherein the operating resistance R reconstructed by the linear relational expression in the first stepwThe expression of (a) is:
Rw＝R20×α20×(Tw-20)+R20；
wherein R is20Is the resistance value, alpha, of the thermistor at 20 DEG C20The temperature coefficient of resistance, T, of the thermistor at 20 DEG CwIs the operating temperature of the operating resistor.
4. The method of claim 3, wherein the fluid temperature T established in step onefThe expression of (a) is:
5. the temperature compensation method of claim 4, wherein the initial temperature compensation model is expressed by:
wherein tau is toThe measured wall shear stress of the fluid is measured, A is a first preset fitting parameter related to forced convection heat exchange of the fluid and the thermistor, B is a second preset fitting parameter related to heat conduction of the thermistor and the flexible substrate, and i is constant driving current of the working resistor; eWIs the output voltage.
6. The temperature compensation method of claim 5, wherein the final temperature compensation model is expressed by:
f(Ew)＝A′τ1/3+B′；
wherein the content of the first and second substances,
both a 'and B' are constants that are insensitive to fluid temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011023737.7A CN112146812B (en) | 2020-09-25 | 2020-09-25 | Temperature compensation method of thermal film shear stress sensor based on constant current driving |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011023737.7A CN112146812B (en) | 2020-09-25 | 2020-09-25 | Temperature compensation method of thermal film shear stress sensor based on constant current driving |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112146812A true CN112146812A (en) | 2020-12-29 |
| CN112146812B CN112146812B (en) | 2022-04-19 |
Family
ID=73897543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011023737.7A Active CN112146812B (en) | 2020-09-25 | 2020-09-25 | Temperature compensation method of thermal film shear stress sensor based on constant current driving |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112146812B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113340473A (en) * | 2021-06-09 | 2021-09-03 | 中国科学院工程热物理研究所 | Rotor surface thermal film test correction method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014115098A (en) * | 2012-12-06 | 2014-06-26 | Azbil Corp | Differential pressure sensor |
| CN103900757A (en) * | 2014-03-24 | 2014-07-02 | 西北工业大学 | Method for conducting temperature correction on underwater thermosensitive shearing stress sensor |
| CN105300596A (en) * | 2015-11-03 | 2016-02-03 | 水利部交通运输部国家能源局南京水利科学研究院 | Underwater wall surface shear stress sensor calibration device having temperature control function |
| CN107860496A (en) * | 2017-09-30 | 2018-03-30 | 青岛理工大学 | A kind of total length bonds reinforced anchor bolt body of rod surface shear stress method of testing |
| CN108981979A (en) * | 2018-07-26 | 2018-12-11 | 西北工业大学 | A kind of ceramics based high-temp-resistant fluid walls face shear stress microsensor chip and its manufacturing process |
| CN110034728A (en) * | 2018-01-04 | 2019-07-19 | 硅实验室公司 | The systems, devices and methods accurately measured for temperature outside chip |
-
2020
- 2020-09-25 CN CN202011023737.7A patent/CN112146812B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014115098A (en) * | 2012-12-06 | 2014-06-26 | Azbil Corp | Differential pressure sensor |
| CN103900757A (en) * | 2014-03-24 | 2014-07-02 | 西北工业大学 | Method for conducting temperature correction on underwater thermosensitive shearing stress sensor |
| CN105300596A (en) * | 2015-11-03 | 2016-02-03 | 水利部交通运输部国家能源局南京水利科学研究院 | Underwater wall surface shear stress sensor calibration device having temperature control function |
| CN107860496A (en) * | 2017-09-30 | 2018-03-30 | 青岛理工大学 | A kind of total length bonds reinforced anchor bolt body of rod surface shear stress method of testing |
| CN110034728A (en) * | 2018-01-04 | 2019-07-19 | 硅实验室公司 | The systems, devices and methods accurately measured for temperature outside chip |
| CN108981979A (en) * | 2018-07-26 | 2018-12-11 | 西北工业大学 | A kind of ceramics based high-temp-resistant fluid walls face shear stress microsensor chip and its manufacturing process |
Non-Patent Citations (1)
| Title |
|---|
| 朱鹏飞等: "基于驱动电流的水下热敏剪应力微传感器灵敏度研究", 《传感器与微系统》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113340473A (en) * | 2021-06-09 | 2021-09-03 | 中国科学院工程热物理研究所 | Rotor surface thermal film test correction method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112146812B (en) | 2022-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104458121B (en) | Silicon pressure sensor temperature excursion compensating circuit and circuit establishing method | |
| CN100533087C (en) | Error compensation method of high-precision pressure sensor | |
| CN102052973B (en) | Methods and systems for thermistor temperature processing | |
| CN112146812B (en) | Temperature compensation method of thermal film shear stress sensor based on constant current driving | |
| CN101113963A (en) | Method and device for measuring liquid thermal conductivity factor | |
| CN105784215A (en) | Pressure sensor temperature compensation method | |
| CN109752113B (en) | Sheet temperature sensor, position determining method and circuit design method in application of sheet temperature sensor | |
| CN103868623B (en) | The measurement apparatus of temperature of liquid and method in a kind of pipeline | |
| CN112461406B (en) | Calibration method based on fiber grating type temperature sensor | |
| CN101551262A (en) | Air flow detection circuit of digital air flow meter | |
| US20100139390A1 (en) | Apparatus for determining and/or monitoring mass flow | |
| CN106441472A (en) | Method for temperature drift inhibition of constant power type thermal type gas flowmeter | |
| CN111542760A (en) | System and method for correcting current value of shunt resistor | |
| CN102519527B (en) | Thermal constant-power gas flow meter | |
| CN104034378B (en) | Constant-current thermal gas mass flow meter and measuring method implemented by same | |
| CN104634469A (en) | Method and device for acquiring ambient temperature based on junction temperature of MCU (Micro Controller Unit) | |
| CN114791325A (en) | Heat flow calibration method for testing ground thermal strength cabin of aerospace plane | |
| CN103900757B (en) | A kind of the method for temperature adjustmemt is carried out to temperature-sensitive shear stress sensor under water | |
| CN110231101B (en) | Motor temperature measurement system method based on real-time correction of system measurement errors | |
| US20050092078A1 (en) | Pulsed thermistor sensor | |
| CN106679848A (en) | Method for fast measuring temperature by using normal temperature sensor | |
| CN117287288A (en) | Engine cooling system temperature prediction method, device, equipment, medium and vehicle | |
| JPS5850295Y2 (en) | Gauge for measuring heat flow | |
| CN204064363U (en) | A kind of sensor circuit for thermal type gas quality flow meter | |
| EP3584555B1 (en) | Flux calorimeter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |