CN112140092B - Terahertz wave induction-based micro robot - Google Patents
Terahertz wave induction-based micro robot Download PDFInfo
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- CN112140092B CN112140092B CN202011045598.8A CN202011045598A CN112140092B CN 112140092 B CN112140092 B CN 112140092B CN 202011045598 A CN202011045598 A CN 202011045598A CN 112140092 B CN112140092 B CN 112140092B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
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Abstract
The invention discloses a terahertz wave induction-based micro-robot which comprises a substrate, wherein a wave absorbing and heating deformation layer is adhered on the substrate, the wave absorbing and heating deformation layer at least comprises a first wave absorbing unit and a second wave absorbing unit with different terahertz wave response frequencies, and a first heating deformation unit and a second heating deformation unit are respectively adhered to two sides of the first wave absorbing unit and the second wave absorbing unit; the first wave absorbing unit and the second wave absorbing unit are respectively used for absorbing terahertz waves with the same frequency as the response frequency of the first wave absorbing unit and the second wave absorbing unit and converting the terahertz waves into heat energy; the first heating deformation unit and the second heating deformation unit respectively generate thermal stress by absorbing heat energy generated by the first wave absorbing unit or the second wave absorbing unit and generate asymmetric deformation together with the substrate, and the micro robot is promoted to move towards the second wave absorbing unit in the direction of the first wave absorbing unit in the deformation recovery process.
Description
Technical Field
The disclosure relates to a micro-robot, in particular to a micro-robot based on terahertz wave induction.
Background
The micro-robot (soft actuator) is usually a small driving device made of flexible material, and can absorb other forms of wave into mechanical energy to drive the self motion through deformation. Due to its inexpensive raw materials, diversified driving methods, convenient operation control performance, and strong adaptability to complex environments, it has recently become a research focus. Currently, more sophisticated soft actuators can be divided into two categories depending on the power source: laser induced soft actuators, and infrared/visible/ultraviolet multi-wavelength induced soft actuators. In the former, a high-energy laser beam is irradiated to a specific portion of the robot to generate a thermal gradient stress, thereby causing a locally asymmetric shape deformation of the actuator, thereby realizing a movement change in a macroscopic direction. However, this actuator has the following disadvantages due to the small cross section of the laser beam and the high energy density: (1) the laser has high energy density, and easily damages the medium when passing through the intermediate medium, so that the laser has high requirements on the application environment; (2) the extremely fine laser beam needs to be accurately irradiated to a specific position of the soft robot, which requires high precision in the laser scanning direction and requires high skill of the operator. The latter often adopts a layered framework to construct multi-stimulus response, and utilizes photo-thermal induced phase change effect triggered by visible light/infrared rays and ultraviolet induced trans-cis isomerization of azobenzene chromophore to drive the robot to move. However, such a soft actuator system has the following disadvantages due to the very limited light penetration capability: (1) the light penetration capability is limited and there are very strict limitations on the scanning direction of the light source. (2) The response speed is slow, and the movement efficiency is low.
Disclosure of Invention
Aiming at the defects in the prior art, the object of the present disclosure is to provide a terahertz wave induction-based micro-robot, which utilizes the characteristics of strong terahertz wave penetration capability and large tunable range to realize the motion control of the micro-robot.
In order to achieve the above purpose, the present disclosure provides the following technical solutions:
a micro robot based on terahertz wave induction comprises a substrate, wherein a wave absorbing heating deformation layer is adhered to the substrate and at least comprises a first wave absorbing unit and a second wave absorbing unit with different terahertz wave response frequencies, the first heating deformation unit is adhered to two sides of the first wave absorbing unit, and the second heating deformation unit is adhered to two sides of the second wave absorbing unit; wherein the content of the first and second substances,
the first wave absorbing unit and the second wave absorbing unit are respectively used for absorbing terahertz waves with the same frequency as the response frequency of the first wave absorbing unit and the second wave absorbing unit and converting the terahertz waves into heat energy;
the first heat-generating deformation unit generates heat stress by absorbing heat energy generated by the first wave absorbing unit and generates asymmetric deformation together with the substrate, and the micro robot is promoted to move towards the direction of the second wave absorbing unit in the deformation recovery process;
the second heating deformation unit generates thermal stress by absorbing heat energy generated by the second wave absorbing unit and generates asymmetric deformation together with the substrate, so that the micro robot is promoted to move towards the direction of the first wave absorbing unit in the deformation recovery process.
Preferably, the first wave absorption unit comprises a silicon substrate, wherein first antenna arrays are uniformly distributed on the silicon substrate, the arm length of each antenna in the first antenna arrays is one fourth of the wavelength of the terahertz waves absorbed by the antenna, and the width of a gap between the antennas is one twentieth of the wavelength of the terahertz waves absorbed by the antenna.
Preferably, the second wave absorbing unit comprises a silicon substrate, the silicon substrate is etched with second antenna arrays distributed uniformly, the arm length of each antenna in the second antenna arrays is one fourth of the wavelength of the terahertz waves absorbed by the antenna, and the width of a gap between the antennas is one twentieth of the wavelength of the terahertz waves absorbed by the antenna.
Preferably, the antennas in the first antenna array and the second antenna array are both band-stop antennas and are made of resistive polysilicon.
Preferably, the first heat generating deformation unit and the second heat generating deformation unit are both made of composite materials with heat deformation functions.
Preferably, the substrate is made of a PDMS superelastic material.
The present disclosure also provides a method of preparing a micro-robot, comprising the steps of:
s100: respectively processing and depositing 2 groups of antenna arrays with different structural parameters and uniform distribution on at least 2 silicon substrates;
s200: composite materials with thermal deformation functions are respectively adhered to the upper surface of each antenna in the 2 groups of antenna arrays and the lower surface of the silicon substrate to form a wave-absorbing heating deformation layer;
s300: and adhering the wave-absorbing heating deformation layer to a substrate prepared from a PDMS (polydimethylsiloxane) super-elastic material to obtain the micro-robot.
The present disclosure also provides an application method of the micro robot, comprising the steps of:
s100: the terahertz source is started, terahertz waves with the same frequency as the response frequency of the first wave absorption unit are emitted, the first wave absorption unit converts the absorbed terahertz waves into heat energy and transmits the heat energy to the first heat generation deformation unit, and at the moment, the second wave absorption unit does not act;
s200: the first heat generation deformation unit generates heat stress after absorbing heat energy and generates asymmetric deformation together with the substrate;
s300: and (3) the terahertz source is turned off, the first wave absorbing unit stops absorbing terahertz waves, the first heat generation deformation unit and the substrate are gradually restored to the initial state, and the micro robot is promoted to move towards the direction of the second wave absorbing unit.
Compared with the prior art, the beneficial effect that this disclosure brought does:
1. the robot can move by completely covering the terahertz waves without accurately irradiating a light source on a specific area of the micro robot, so that the operation difficulty is greatly reduced;
2. the movement control of the micro robot is realized by arranging wave absorbing devices with different response frequencies by utilizing the characteristic that the material is deformed due to the radiation of terahertz waves.
Drawings
Fig. 1 is a schematic structural diagram of a micro-robot based on terahertz wave induction according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of a wave-absorbing exothermic deformation layer according to another embodiment of the disclosure;
fig. 3 is a schematic diagram of an antenna structure provided by another embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of a wave-absorbing unit provided in another embodiment of the disclosure;
FIG. 5 is a top view of a wave-absorbing exothermic deformation layer according to another embodiment of the disclosure;
FIG. 6 is a schematic diagram of the movement principle of a micro-robot provided in another embodiment of the present disclosure;
fig. 7 is a schematic structural diagram of a micro-robot with a steering function according to another embodiment of the present disclosure.
Detailed Description
Specific embodiments of the present disclosure will be described in detail below with reference to fig. 1 to 7. While specific embodiments of the disclosure are shown in the drawings, it should be understood that the disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The description which follows is a preferred embodiment of the invention, but is made for the purpose of illustrating the general principles of the invention and not for the purpose of limiting the scope of the invention. The scope of the present disclosure is to be determined by the terms of the appended claims.
To facilitate an understanding of the embodiments of the present disclosure, the following detailed description is to be considered in conjunction with the accompanying drawings, and the drawings are not to be construed as limiting the embodiments of the present disclosure.
In one embodiment, as shown in fig. 1 and 2, a terahertz wave induction-based micro-robot includes a substrate, on which a wave-absorbing heating deformation layer is adhered, where the wave-absorbing heating deformation layer includes at least a first wave-absorbing unit and a second wave-absorbing unit having different terahertz wave response frequencies, and the first heating deformation unit is adhered to two sides of the first wave-absorbing unit, and the second heating deformation unit is adhered to two sides of the second wave-absorbing unit; wherein the content of the first and second substances,
the first wave absorbing unit and the second wave absorbing unit are respectively used for absorbing terahertz waves with the same frequency as the response frequency of the first wave absorbing unit and the second wave absorbing unit and converting the terahertz waves into heat energy;
the first heat-generating deformation unit generates heat stress by absorbing heat energy generated by the first wave absorbing unit and generates asymmetric deformation together with the substrate, and the micro robot is promoted to move towards the direction of the second wave absorbing unit in the deformation recovery process;
the second heating deformation unit generates thermal stress by absorbing heat energy generated by the second wave absorbing unit and generates asymmetric deformation together with the substrate, so that the micro robot is promoted to move towards the direction of the first wave absorbing unit in the deformation recovery process.
In the embodiment, the wave-absorbing structures with different terahertz wave responses are utilized, and terahertz waves with different working frequencies are emitted to enable the different wave-absorbing structures to absorb the waves and generate heat and cause the deformation of the heating deformation units corresponding to the different wave-absorbing structures, so that the motion control of the micro robot is realized. Through the embodiment, the specific area of the micro robot is not required to be accurately irradiated, and only the full coverage of the terahertz waves is required to be ensured, so that the control difficulty of the micro robot is reduced. In addition, due to the adjustability of the radiation power of the terahertz waves, the response speed and the motion efficiency of the thermal deformation of the micro robot can be ensured.
In another embodiment, the first wave absorption unit comprises a silicon substrate, wherein a first antenna array is uniformly distributed on the silicon substrate, the arm length of each antenna in the first antenna array is one fourth of the wavelength of the terahertz wave absorbed by the antenna, and the width of a gap between the antennas is one twentieth of the wavelength of the terahertz wave absorbed by the antenna.
In this embodiment, when the arm length of the antenna is one fourth of the wavelength of the terahertz wave absorbed by the antenna, the antenna resonates with the terahertz wave, so that the terahertz wave can be absorbed to the maximum extent. In a specific embodiment, the frequency of terahertz waves absorbed by the first antenna array is selected to be 3THz, one quarter of the corresponding wavelength is 25 micrometers, the length of the antenna arm is 25 micrometers, and at the moment, the absorption rate of the antenna on terahertz waves can reach 85% -95%, the heat conversion rate can reach 100-200K/W, and the requirement of heat-force conversion can be met.
In another embodiment, the second wave absorbing unit includes a silicon substrate, the silicon substrate is etched with second antenna arrays distributed uniformly, the arm length of each antenna in the second antenna array is one fourth of the wavelength of the terahertz wave absorbed by the antenna, and the width of the gap between the antennas is one twentieth of the wavelength of the terahertz wave absorbed by the antenna.
In one specific embodiment of this embodiment, the THz absorbed by the second antenna array is selected to have a frequency of 1THz, which corresponds to a quarter wavelength of 12.5 microns, and the antenna arm length is 25 microns.
In another embodiment, the antennas in the first antenna array and the second antenna array are both band-stop antennas and are made of resistive polysilicon.
In another embodiment, the first heat generating deformation unit and the second heat generating deformation unit are both made of composite materials with heat deformation functions.
In this embodiment, as shown in fig. 6, when the operating frequency of the terahertz wave THz1 emitted by the terahertz source is the response frequency of the first wave absorbing unit, the terahertz wave is absorbed by the first wave absorbing unit, the generated heat energy causes the first exothermic deformation unit to generate thermal stress, and causes the first exothermic deformation unit to generate asymmetric deformation together with the substrate adhered thereto, after the terahertz source is turned off, the heat energy obtained by the first exothermic deformation unit gradually decreases, the first exothermic deformation unit and the substrate gradually recover to the initial state and generate thrust to the micro-robot, so that the micro-robot moves to the direction where the second wave absorbing unit is located by the friction force on the ground under the action of the thrust. Similarly, when the working frequency of the terahertz waves THz2 emitted by the terahertz source is the response frequency of the second wave absorbing unit, the micro-robot can move to the direction of the first wave absorbing unit.
As an improvement, in the present disclosure, on the basis of the above embodiment, a third wave absorbing unit and a third heating deformation unit may be further added, so that the micro robot further has a steering function on the basis of realizing forward or backward movement, as shown in fig. 7. The micro-robot with the steering function specifically operates as follows: when the working frequency of the terahertz waves emitted by the terahertz source is the response frequency of the first wave absorption unit, the terahertz waves are absorbed by the first wave absorption unit on the left side of the tail, the first exothermic deformation unit and the substrate are asymmetrically deformed by generated heat energy, after the terahertz source is turned off, the first wave absorption unit stops absorbing the terahertz waves, so that the heat energy is not generated any more, the first exothermic deformation unit and the substrate are gradually restored to the initial state and generate thrust, and at the moment, the micro robot moves to the right front side by means of the friction force of the ground under the action of the thrust, so that the right-turning function is realized. Similarly, when the frequency of the terahertz source is set to the response frequency of the second wave-absorbing unit, the micro-robot will rotate to the left. If the normal forward function needs to be realized, only terahertz waves with the same frequency as the response frequency of the first wave absorbing unit and the second wave absorbing unit need to be emitted simultaneously, the first heating deformation unit and the second heating deformation unit generate symmetrical deformation, and the micro robot is pushed to move forwards in the process of recovering to the initial state; if the backward movement function needs to be realized, the working frequency of the terahertz source needs to be set as the response frequency of the third wave absorbing unit, at the moment, the third wave absorbing unit absorbs terahertz waves to generate heat energy, so that the third heating deformation unit and the substrate are asymmetrically deformed, and the micro robot is pushed to move backward.
It should be noted that the composite material with thermal deformation function used in this embodiment is prepared from a liquid crystal elastomer based on polydimethylsiloxane, and other chemical substances with the same properties may be used instead of the polydimethylsiloxane, which is not described herein again.
In another embodiment, the present disclosure further provides a method for manufacturing a micro-robot, including the steps of:
s100: respectively processing and depositing 2 groups of antenna arrays with different structural parameters and uniform distribution on at least 2 silicon substrates;
in this step, as shown in fig. 4, the antennas are uniformly distributed on the silicon substrate in an array form, and the antennas on the same silicon substrate have the same structural parameters, including the arm length, the line width, and the gap between the antennas (as shown in fig. 3). Because each group of antenna arrays needs to absorb terahertz waves with different frequencies, the structural parameters of the antennas on different silicon substrates are different. Illustratively, each antenna in the 1 st set of cross-shaped antenna arrays has an arm length of 25 microns, a width of 1.2 microns, and a gap of 1.25 microns (when the characteristic frequency of terahertz waves is 3 THz). Each antenna in the 2 nd set of cross-shaped antenna arrays has an arm length of 12.5 microns, an antenna width of 1.2 microns, and a gap of 1.25 microns (when the characteristic frequency of terahertz waves is 6 THz).
S200: composite materials with thermal deformation functions are respectively adhered to the upper surface of each antenna in the 2 groups of antenna arrays and the lower surface of the silicon substrate to form a wave-absorbing heating deformation layer;
in this step, as shown in fig. 5, after the antenna array is arranged on the silicon substrate, a composite material with a thermal deformation function is required to be adhered to the upper surface of the antenna array and the lower surface of the silicon substrate, so as to absorb heat generated by the antenna due to absorption of terahertz waves. Illustratively, when the frequency of an incident terahertz wave is 3THz, because the response frequency of the 1 st group of cross-shaped antenna arrays is also 3THz, the 1 st group of antenna arrays starts to absorb the energy of the terahertz wave and converts the energy into heat energy, so that the composite material attached to the antenna arrays is deformed, and the micro-robot is prompted to move to the 1 st group of antenna arrays in the deformation recovery process, at this time, the 2 nd group of antenna arrays do not absorb the terahertz wave of the 3THz frequency because the response frequency of the 2 nd group of antenna arrays is not matched with the frequency of the incident terahertz wave; similarly, when the frequency of the incident terahertz wave is 6THz, the 2 nd group of antenna arrays with the response frequency of 6THz absorb the terahertz wave, and the composite material attached to the antenna arrays is deformed, so that the micro-robot moves to the 1 st group of antenna arrays.
S300: and adhering the wave-absorbing heating deformation layer to a substrate prepared from a PDMS (polydimethylsiloxane) super-elastic material to obtain the micro-robot.
In another embodiment, the present disclosure further provides a method for applying a micro-robot, comprising the steps of:
s100: the terahertz source is started, terahertz waves with the same frequency as the response frequency of the first wave absorption unit are emitted, the first wave absorption unit converts the absorbed terahertz waves into heat energy and transmits the heat energy to the first heat generation deformation unit, and at the moment, the second wave absorption unit does not act;
s200: the first heat generation deformation unit generates heat stress after absorbing heat energy and generates asymmetric deformation together with the substrate;
s300: and (3) the terahertz source is turned off, the first wave absorbing unit stops absorbing terahertz waves, the first heat generation deformation unit and the substrate are gradually restored to the initial state, and the micro robot is promoted to move towards the direction of the second wave absorbing unit.
The foregoing describes the general principles of the present disclosure in conjunction with specific embodiments, however, it is noted that the advantages, effects, etc. mentioned in the present disclosure are merely examples and are not limiting, and they should not be considered essential to the various embodiments of the present disclosure. Furthermore, the foregoing disclosure of specific details is for the purpose of illustration and description and is not intended to be limiting, since the foregoing disclosure is not intended to be exhaustive or to limit the disclosure to the precise details disclosed.
Claims (8)
1. A terahertz wave induction-based micro-robot comprises a substrate, wherein a wave absorbing heating deformation layer is adhered to the substrate, the wave absorbing heating deformation layer at least comprises a first wave absorbing unit and a second wave absorbing unit which are symmetrically arranged and have different terahertz wave response frequencies, the first heating deformation unit is adhered to two sides of the first wave absorbing unit, and the second heating deformation unit is adhered to two sides of the second wave absorbing unit; wherein the content of the first and second substances,
the first wave absorbing unit and the second wave absorbing unit are respectively used for absorbing terahertz waves with the same frequency as the response frequency of the first wave absorbing unit and the second wave absorbing unit and converting the terahertz waves into heat energy;
the first heat-generating deformation unit generates heat stress by absorbing heat energy generated by the first wave absorbing unit and generates asymmetric deformation together with the substrate, and thrust is generated on the micro-robot in the deformation recovery process, so that the micro-robot moves to the second wave absorbing unit by means of ground friction under the action of the thrust;
the second heating deformation unit generates thermal stress by absorbing heat energy generated by the second wave absorbing unit and generates asymmetric deformation together with the substrate, and thrust is generated on the micro-robot in the deformation recovery process, so that the micro-robot moves to the position of the first wave absorbing unit by depending on ground friction under the action of the thrust;
the response speed and the motion efficiency of the thermal deformation of the micro robot can be adjusted according to the radiation power of the terahertz waves.
2. The microrobot of claim 1, wherein the first wave absorbing unit comprises a silicon substrate on which a uniformly distributed first antenna array is etched, the arm length of each antenna in the first antenna array is one fourth of the wavelength of the terahertz wave absorbed by the antenna, and the width of the gap between the antennas is one twentieth of the wavelength of the terahertz wave absorbed by the antenna.
3. The micro-robot of claim 2, wherein the second wave-absorbing unit comprises a silicon substrate on which a second antenna array is etched, the second antenna array is uniformly distributed, the arm length of each antenna in the second antenna array is one fourth of the wavelength of the terahertz wave absorbed by the antenna, and the width of the gap between the antennas is one twentieth of the wavelength of the terahertz wave absorbed by the antenna.
4. The microrobot of claim 2 or 3, wherein the antennas in the first and second antenna arrays are each band-stop antennas, made of resistive polysilicon.
5. The microrobot of claim 2, wherein the first and second heat-generating deformation units are each composed of a composite material having a heat-deforming function.
6. The microrobot of claim 1, wherein the substrate is made of a PDMS superelastic material.
7. A method of preparing the microrobot of claim 5, comprising the steps of:
s100: respectively processing and depositing 2 groups of antenna arrays with different structural parameters and uniform distribution on at least 2 silicon substrates;
s200: composite materials with thermal deformation functions are respectively adhered to the upper surface of each antenna in the 2 groups of antenna arrays and the lower surface of the silicon substrate to form a wave-absorbing heating deformation layer;
s300: and adhering the wave-absorbing heating deformation layer to a substrate prepared from a PDMS (polydimethylsiloxane) super-elastic material to obtain the micro-robot.
8. A method of using the microrobot of claim 1, comprising the steps of:
s100: the terahertz source is started, terahertz waves with the same frequency as the response frequency of the first wave absorption unit are emitted, the first wave absorption unit converts the absorbed terahertz waves into heat energy and transmits the heat energy to the first heat generation deformation unit, and at the moment, the second wave absorption unit does not act;
s200: the first heat generation deformation unit generates heat stress after absorbing heat energy and generates asymmetric deformation together with the substrate;
s300: and (3) the terahertz source is turned off, the first wave absorbing unit stops absorbing terahertz waves, the first heat generation deformation unit and the substrate are gradually restored to the initial state, and the micro robot is promoted to move towards the direction of the second wave absorbing unit.
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| US8450690B2 (en) * | 2010-10-04 | 2013-05-28 | Trustees Of Boston University | Thermal imager using metamaterials |
| CN103575403A (en) * | 2012-07-18 | 2014-02-12 | 北京大学 | Terahertz focal plane array based on MEMS technology |
| EP2926005A1 (en) * | 2012-11-27 | 2015-10-07 | CNR - Consiglio Nazionale Delle Ricerche | Light driven liquid crystal elastomer actuator |
| US9272426B2 (en) * | 2013-06-26 | 2016-03-01 | The Uniteed States of America as represented by the Secretary of the Army | Optically-actuated mechanical devices |
| CN104792420A (en) * | 2014-01-22 | 2015-07-22 | 北京大学 | Optical readout focal plane array and preparation method thereof |
| CN105987757B (en) * | 2015-03-06 | 2018-10-09 | 中国科学院微电子研究所 | Terahertz focal plane array and detection and imaging device |
| CN108336498A (en) * | 2017-01-19 | 2018-07-27 | 天津大学 | A kind of metal antenna coupling THz wave thermal detector structure based on CMOS technology |
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