CN112105135B - Stainless steel injection type discharging module - Google Patents
Stainless steel injection type discharging module Download PDFInfo
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- CN112105135B CN112105135B CN202010974705.9A CN202010974705A CN112105135B CN 112105135 B CN112105135 B CN 112105135B CN 202010974705 A CN202010974705 A CN 202010974705A CN 112105135 B CN112105135 B CN 112105135B
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- 229910001220 stainless steel Inorganic materials 0.000 title claims abstract description 36
- 239000010935 stainless steel Substances 0.000 title claims abstract description 36
- 238000002347 injection Methods 0.000 title claims abstract description 18
- 239000007924 injection Substances 0.000 title claims abstract description 18
- 238000007599 discharging Methods 0.000 title description 2
- 239000000919 ceramic Substances 0.000 claims abstract description 19
- 230000000712 assembly Effects 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 10
- 241000219122 Cucurbita Species 0.000 claims description 4
- 235000009852 Cucurbita pepo Nutrition 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 238000002844 melting Methods 0.000 abstract description 3
- 230000008018 melting Effects 0.000 abstract description 3
- 239000002131 composite material Substances 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 description 11
- 238000007789 sealing Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 231100000053 low toxicity Toxicity 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a stainless steel injection type discharge module, which comprises a stainless steel bottom plate, a supporting component, a medium pipe and an electrode, wherein: the supporting component comprises a ceramic supporting piece, a supporting plate and an electrode connecting plate, the ceramic supporting piece is fixed on the stainless steel bottom plate, the supporting plate is fixed on the stainless steel bottom plate, and the electrode connecting plate is fixed on the supporting plate; the supporting components are provided with two groups, the electrode connecting plates of the two groups of supporting components are parallel to each other, the two ends of each electrode are fixed on the electrode connecting plates of the two groups of supporting components respectively, and the medium pipe is sleeved outside the electrodes. According to the stainless steel injection type discharge module, the stainless steel bottom plate and the ceramic support piece can stably exist in a plasma environment for a long time; the composite material has the advantages of no large-area plastic parts, no potential safety hazards such as fire melting and the like, high mechanical strength and capability of meeting the application requirements of most occasions.
Description
Technical Field
The invention relates to the technical field of plasma discharge equipment, in particular to a stainless steel injection type discharge module.
Background
In recent years, a low temperature plasma technology has attracted increasing attention, and plasma is called a fourth species existing form other than solid, liquid and gas, and is composed of electrons, ions, radicals and neutral particles, and the whole remains electrically neutral. In low-temperature plasma, a large amount of high-energy electrons and active particles such as O, OH and the like generated by the high-energy electrons are generated, and then a series of complex physical and chemical reactions are initiated to convert complex macromolecular pollutants into simple micromolecular substances or convert toxic and harmful substances into non-toxic and harmless or low-toxicity and low-harmful substances, so that the pollutants are degraded and removed. The low-temperature plasma technology has the characteristics of simple process, short treatment flow, less investment, small occupied area, high removal rate, low operation cost (mainly expressed as electricity charge), wide application range and the like.
At present, the generation methods for generating low-temperature plasma mainly include glow discharge, corona discharge, dielectric barrier discharge, radio frequency discharge, sliding arc discharge, jet discharge, atmospheric pressure glow discharge and sub-atmospheric pressure glow discharge.
At present, a common double-dielectric barrier discharge module mainly uses an insulating material to fix a discharge electrode, applies voltage to the discharge electrode to ionize air to generate plasma, the insulating material generally uses a high polymer material and has certain flame retardant property and insulation grade, but the insulating material gradually ages, performance attenuation and local creepage along with the accumulation of discharge time and the influence of an external environment, and finally even forms a fire hidden trouble.
Disclosure of Invention
In order to solve the technical problems in the background art, the invention provides a stainless steel injection type discharge module.
The invention provides a stainless steel injection type discharge module, which comprises a stainless steel bottom plate, a supporting component, a medium pipe and an electrode, wherein:
the supporting assembly comprises a ceramic supporting piece, a supporting plate and an electrode connecting plate, the ceramic supporting piece is fixed on the stainless steel bottom plate, the supporting plate is fixed on the stainless steel bottom plate, and the electrode connecting plate is fixed on the supporting plate;
the supporting components are provided with two groups, the electrode connecting plates of the two groups of supporting components are parallel to each other, the two ends of each electrode are fixed on the electrode connecting plates of the two groups of supporting components respectively, and the medium pipe is sleeved outside the electrodes.
Certainly, the longer the electrode is, the better the electrode length is, but the electrode length is influenced by practical application environments, the electrode length is different according to different application environments, and in order to facilitate the adjustment of the electrode length according to practical situations to adapt to different application environments, as a further optimized scheme of the invention, the electrode comprises two conductive columns and a conductive elastic part, the two conductive columns are respectively fixed on electrode connecting plates of two groups of supporting assemblies, the two conductive columns are coaxially connected through the conductive elastic part, and the conductive elastic part can elastically deform along the axial direction of the conductive columns;
the medium pipe comprises an inner pipe, an outer pipe and a sleeve, the inner pipe and the outer pipe are respectively fixed on the supporting plates of the two groups of supporting components, the inner pipe is sleeved in the outer pipe, the inner pipe can slide in the outer pipe, and the sleeve is sleeved at the connecting position of the inner pipe and the outer pipe.
In order to reduce the occupied space of the bottom plate, as a further optimized scheme of the invention, the stainless steel bottom plate comprises a left bottom plate and a right bottom plate, and two groups of supporting assemblies are respectively fixed on the left bottom plate and the right bottom plate.
In order to increase the stability, as a further optimized scheme of the invention, a supporting rod is detachably arranged between the left bottom plate and the right bottom plate.
As a further optimized scheme of the invention, the conductive elastic element is a conductive spring.
In order to facilitate the installation of the sleeve, as a further optimized scheme of the invention, the sleeve comprises an upper half sleeve and a lower half sleeve, wherein the upper half sleeve is detachably installed on the lower half sleeve.
In order to increase the blocking effect of the medium pipe, as a further optimized scheme of the invention, the bottom surface of the upper half sleeve is provided with a clamping ring, the upper surface of the lower half sleeve is provided with a clamping ring groove, and the clamping ring groove is matched with the clamping ring.
In order to increase the blocking effect of the medium pipe, as a further optimized scheme of the invention, two ends of the sleeve are respectively provided with a first closed ring and a second closed ring, the inner pipe is provided with a plurality of first connecting clamping ring grooves, the outer pipe is provided with a plurality of second connecting clamping ring grooves, the first connecting clamping ring grooves are matched with the first closed rings, and the second connecting clamping ring grooves are matched with the second closed rings.
In order to effectively utilize space and generate more plasmas under the same volume, as a further optimized scheme of the invention, the electrodes comprise a conductive electrode and a grounding electrode, wherein the conductive electrode and the grounding electrode are both provided with a plurality of conductive electrodes and the grounding electrodes are arranged in a mutually staggered mode.
In some embodiments, the ceramic supporting member is a ceramic gourd, which can be purchased directly on the market, thereby reducing the manufacturing cost.
According to the stainless steel injection type discharge module, the stainless steel bottom plate and the ceramic support piece can stably exist in a plasma environment for a long time; large-area plastic parts are not needed, potential safety hazards such as fire melting and the like are avoided, the mechanical strength is high, and the application in most occasions can be met; furthermore, the electrode comprises two conductive columns and a conductive elastic part, and the medium pipe comprises an inner pipe, an outer pipe and a sleeve pipe, so that the length of the electrode can be conveniently adjusted according to the application environment.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic view of the structure of the present invention;
FIG. 2 is a schematic view of the connection structure of the electrode and the dielectric tube according to the present invention;
fig. 3 is a schematic structural view of the bushing of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar designations denote like or similar elements or elements having like or similar functionality throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
It will be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in an orientation or positional relationship indicated in the drawings for convenience and simplicity of description only and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly, e.g., as being permanently connected, detachably connected, or integral; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
A stainless steel material injection type discharge module as shown in fig. 1-3, comprising a stainless steel base plate 1, a support member 2, a medium pipe 3 and an electrode 4, wherein:
the supporting component 2 comprises a ceramic supporting piece 20, a supporting plate 21 and an electrode connecting plate 22, wherein the ceramic supporting piece 20 is a ceramic gourd, the ceramic supporting piece 20 is fixed on the stainless steel bottom plate 1, the supporting plate 21 is fixed on the stainless steel bottom plate 1, and the electrode connecting plate 22 is fixed on the supporting plate 21;
the two groups of supporting components 2 are arranged, the electrode connecting plates 22 of the two groups of supporting components 2 are parallel to each other, two ends of an electrode 4 are respectively fixed on the electrode connecting plates 22 of the two groups of supporting components 2, and the medium tube 3 is sleeved outside the electrode 4;
the stainless steel bottom plate 1 comprises a left bottom plate 10 and a right bottom plate 11, two groups of supporting assemblies 2 are respectively fixed on the left bottom plate 10 and the right bottom plate 11, and supporting rods 12 are detachably arranged between the left bottom plate 10 and the right bottom plate 11 in a threaded or clamping manner;
the electrodes 4 comprise conductive electrodes 4a and grounding electrodes 4b, the conductive electrodes 4a and the grounding electrodes 4b are respectively provided with a plurality of conductive electrodes 4a, and the plurality of conductive electrodes 4a and the plurality of grounding electrodes 4b are arranged on the two groups of supporting components 2 in a mutually staggered manner;
the electrode 4 comprises two conductive columns 40 and a conductive elastic part 41, the conductive elastic part 41 is a conductive spring, the two conductive columns 40 are respectively fixed on the electrode connecting plates 22 of the two groups of supporting assemblies 2, the two conductive columns 40 are coaxially connected through the conductive elastic part 41, and the conductive elastic part 41 can elastically deform along the axial direction of the conductive columns 40;
the medium pipe 3 comprises an inner pipe 30, an outer pipe 31 and a sleeve 32, the inner pipe 30 and the outer pipe 31 are respectively fixed on the support plates 21 of the two groups of support components 2, the inner pipe 30 is sleeved in the outer pipe 31, the inner pipe 30 can slide in the outer pipe 31, and the sleeve 32 is sleeved at the joint of the inner pipe 30 and the outer pipe 31;
the sleeve 32 comprises an upper half sleeve 320 and a lower half sleeve 321, the upper half sleeve 320 is detachably mounted on the lower half sleeve 321, the bottom surface of the upper half sleeve 320 is provided with a clamping ring 5, the upper surface of the lower half sleeve 321 is provided with a clamping ring groove 6, and the clamping ring groove 6 is matched with the clamping ring 5;
the both ends of sleeve pipe 32 are equipped with first closed ring 7 and second closed ring 8 respectively, have all opened a plurality of first connection joint ring grooves 9 on the inner tube 30, have opened a plurality of second on the outer tube 31 and connect joint ring groove 12', first connection joint ring groove 9 matches with first closed ring 7, and joint ring groove 12' matches with second closed ring 8 is connected to the second.
In the working process of the embodiment: firstly, adjusting the length of an electrode 4 according to an installation space, firstly, separating a clamping ring 5 from a clamping ring groove 6 through an external force, dragging a left bottom plate 10 or a right bottom plate 11 to compress or extend a conductive spring, further changing the length of the electrode 4, supporting the left bottom plate 10 and the right bottom plate 11 through a support rod 12, then clamping an upper half sleeve 320 on a lower half sleeve 321, and meeting the requirement of long-time stable existence in a plasma environment through a stainless steel bottom plate and a ceramic support piece; the composite material has the advantages of no large-area plastic parts, no potential safety hazards such as fire melting and the like, high mechanical strength and capability of meeting the application requirements of most occasions.
Preferably, in this embodiment, in order to adjust the length of the electrode 4 according to actual conditions, the electrode 4 includes two conductive posts 40 and a conductive elastic member 41, the two conductive posts 40 are respectively fixed on the electrode connecting plates 22 of the two sets of support assemblies 2, the two conductive posts 40 are coaxially connected through the conductive elastic member 41, and the conductive elastic member 41 can elastically deform along the axial direction of the conductive posts 40;
the medium pipe 3 comprises an inner pipe 30, an outer pipe 31 and a sleeve 32, the inner pipe 30 and the outer pipe 31 are respectively fixed on the support plates 21 of the two groups of support components 2, the inner pipe 30 is sleeved in the outer pipe 31, the inner pipe 30 can slide in the outer pipe 31, and the sleeve 32 is sleeved at the joint of the inner pipe 30 and the outer pipe 31; in the process of changing the length of the electrode 4 according to actual conditions, the length of the electrode 4 is convenient to change by changing the distance between the two groups of support assemblies 2.
Be convenient for change two sets of supporting component 2's distance, and then be convenient for change the length of electrode 4, preferred in this embodiment, stainless steel bottom plate 1 includes left bottom plate 10 and right bottom plate 11, and two sets of supporting component 2 are fixed respectively on left bottom plate 10 and right bottom plate 11.
For the purpose of increasing stability, it is preferable in the present embodiment that a support bar 12 is detachably mounted between the left base plate 10 and the right base plate 11.
In order to ensure the elasticity of the conductive elastic member 41, it is preferable in the present embodiment that the conductive elastic member 41 is a conductive spring.
To facilitate the mounting and dismounting of the sleeve 32, it is preferred in this embodiment that the sleeve 32 comprises an upper half-sleeve 320 and a lower half-sleeve 321, the upper half-sleeve 320 being detachably mounted on the lower half-sleeve 321.
In this embodiment, it is preferable that the bottom surface of the upper half sleeve 320 is provided with a snap ring 5, the upper surface of the lower half sleeve 321 is provided with a snap ring groove 6, and the snap ring groove 6 is matched with the snap ring 5.
In order to increase the connection stability and ensure the medium function of the medium pipe, it is preferable in this embodiment that two ends of the sleeve 32 are respectively provided with a first sealing ring 7 and a second sealing ring 8, the inner pipe 30 is provided with a plurality of first connecting clamping ring grooves 9, the outer pipe 31 is provided with a plurality of second connecting clamping ring grooves 12', the first connecting clamping ring grooves 9 are matched with the first sealing ring 7, the second connecting clamping ring grooves 12' are matched with the second sealing ring 8, the first connecting clamping ring grooves 9 are matched with the first sealing ring 7, and the second connecting clamping ring grooves 12' are matched with the second sealing ring 8, so that the inner pipe 30 and the outer pipe 31 are fixed, and meanwhile, gaps between the outer pipe 31 and the end portions of the inner pipe 30 and the sleeve 32 are sealed.
In order to effectively utilize space and generate more plasma in the same volume, it is preferable in this embodiment that the electrode 4 includes a conductive electrode 4a and a ground electrode 4b, each of the conductive electrode 4a and the ground electrode 4b is provided with a plurality of conductive electrodes 4a and ground electrodes 4b, and the plurality of conductive electrodes 4a and ground electrodes 4b are alternately arranged.
In the present embodiment, the ceramic support 20 is a ceramic gourd.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (9)
1. A stainless steel material injection type discharge module, comprising a stainless steel bottom plate (1), a support component (2), a medium pipe (3) and an electrode (4), wherein: the supporting component (2) comprises a ceramic supporting piece (20), a supporting plate (21) and an electrode connecting plate (22), wherein the ceramic supporting piece (20) is fixed on the stainless steel bottom plate (1), the supporting plate (21) is fixed on the ceramic supporting piece (20), and the electrode connecting plate (22) is fixed on the supporting plate (21); two groups of supporting assemblies (2) are arranged, electrode connecting plates (22) of the two groups of supporting assemblies (2) are parallel to each other, two ends of an electrode (4) are respectively fixed on the electrode connecting plates (22) of the two groups of supporting assemblies (2), and a medium pipe (3) is sleeved outside the electrode (4);
the electrode (4) comprises two conductive columns (40) and conductive elastic pieces (41), the two conductive columns (40) are respectively fixed on the electrode connecting plates (22) of the two groups of supporting assemblies (2), the two conductive columns (40) are coaxially connected through the conductive elastic pieces (41), and the conductive elastic pieces (41) can elastically deform along the axial direction of the conductive columns (40); the medium pipe (3) comprises an inner pipe (30), an outer pipe (31) and a sleeve (32), the inner pipe (30) and the outer pipe (31) are respectively fixed on the supporting plates (21) of the two groups of supporting components (2), the inner pipe (30) is sleeved in the outer pipe (31), the inner pipe (30) can slide in the outer pipe (31), and the sleeve (32) is sleeved at the connecting position of the inner pipe (30) and the outer pipe (31).
2. A stainless steel injection discharge module according to claim 1, wherein the stainless steel base plate (1) comprises a left base plate (10) and a right base plate (11), and the two sets of support members (2) are fixed to the left base plate (10) and the right base plate (11), respectively.
3. The stainless steel injection discharge module according to claim 2, wherein the support rod (12) is detachably mounted between the left base plate (10) and the right base plate (11).
4. The stainless steel injection discharge module of claim 1, wherein the conductive elastic member (41) is a conductive spring.
5. A stainless steel injection discharge module according to claim 1, wherein the sleeve (32) comprises an upper half sleeve (320) and a lower half sleeve (321), the upper half sleeve (320) being detachably mounted on the lower half sleeve (321).
6. The stainless steel injection discharge module of claim 5, wherein the bottom surface of the upper half sleeve (320) is provided with a snap ring (5), the upper surface of the lower half sleeve (321) is provided with a snap ring groove (6), and the snap ring groove (6) is matched with the snap ring (5).
7. The stainless steel injection discharge module of claim 1, wherein the sleeve (32) has a first closed ring (7) and a second closed ring (8) at both ends thereof, the inner tube (30) has a plurality of first connecting snap ring grooves (9), the outer tube (31) has a plurality of second connecting snap ring grooves (12 '), the first connecting snap ring grooves (9) are matched with the first closed ring (7), and the second connecting snap ring grooves (12') are matched with the second closed ring (8).
8. The stainless steel injection discharge module according to claim 1, wherein the electrodes (4) comprise a conductive electrode (4 a) and a ground electrode (4 b), the conductive electrode (4 a) and the ground electrode (4 b) are provided in plural numbers, and the plural conductive electrodes (4 a) and the ground electrodes (4 b) are alternately arranged.
9. The stainless steel injection discharge module of claim 1 wherein the ceramic support (20) is a porcelain gourd.
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US5483117A (en) * | 1993-02-19 | 1996-01-09 | Ernst Rohrer | Device for non-thermal excitation and ionization of vapors and gases |
JP2008140567A (en) * | 2006-11-30 | 2008-06-19 | Nittetsu Mining Co Ltd | Gas excitation device having contact type suspension electrode, and gas excitation method |
CN104084010A (en) * | 2014-07-15 | 2014-10-08 | 浙江惠尔涂装环保设备有限公司 | Low-temperature plasma waste gas purification apparatus |
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