CN112093545B - Tension control system based on winding coating machine process under high vacuum environment - Google Patents
Tension control system based on winding coating machine process under high vacuum environment Download PDFInfo
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- CN112093545B CN112093545B CN202010821856.0A CN202010821856A CN112093545B CN 112093545 B CN112093545 B CN 112093545B CN 202010821856 A CN202010821856 A CN 202010821856A CN 112093545 B CN112093545 B CN 112093545B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
- B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
- B65H23/1888—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web and controlling web tension
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/044—Sensing web tension
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/06—Registering, tensioning, smoothing or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle
- B65H23/063—Registering, tensioning, smoothing or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle and controlling web tension
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2513/00—Dynamic entities; Timing aspects
- B65H2513/10—Speed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2515/00—Physical entities not provided for in groups B65H2511/00 or B65H2513/00
- B65H2515/30—Forces; Stresses
- B65H2515/31—Tensile forces
- B65H2515/314—Tension profile, i.e. distribution of tension, e.g. across the material feeding direction or along diameter of web roll
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- Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
- Battery Electrode And Active Subsutance (AREA)
Abstract
The invention relates to the technical field of vacuum winding coating tension control, in particular to a tension control system based on a winding coating machine process under a high vacuum environment, which comprises an initial data setting module, a tension data acquisition module, a speed data acquisition module, a mean value calculation module, a coefficient calculation module, a magnetic powder output quantity calculation module and a magnetic powder clutch control module, wherein the tension control system realizes the control and adjustment of the process tension, so that the viscous friction on each electrode roller is close, wrinkles are reduced, the tension at each position is stable, and the whole system is stable; the tension controller is simplified into the tension detector, an expensive tension controller is not needed, and the cost is greatly saved.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of vacuum winding coating tension control, in particular to a tension control system based on a winding coating machine process under a high vacuum environment.
[ background of the invention ]
In a winding and coating system, each section of tension of a base film in the process from unwinding to winding is different, so the process tension control is very important and directly influences the quality of a coated product.
[ summary of the invention ]
The invention provides a tension control system based on a winding coating machine process under a high vacuum environment, and aims to solve the problems that the process tension control of the existing winding coating system needs a tension controller, so that the cost is too high and the universality is poor.
The invention is realized by the following technical scheme:
winding coating machine process tension control system based on under high vacuum environment, its characterized in that includes:
an initial data setting module: for setting the initial tension of the electrode roll to T0The linear velocity of the film belt is v0D diameter of the electrode roll and eta initial output quantity of the magnetic powder clutchi0And the basic period of one rotation of the electrode roller is delta t;
the tension data acquisition module is used for acquiring real-time tension detection data of each point through the winding tension detection roller, the unwinding tension detection roller and the process tension detection roller;
the speed data acquisition module is used for acquiring real-time speed detection data of each electrode roller;
the mean value calculating module is used for calculating the tension mean value and the speed mean value of the electrode roller in one period of rotation;
the coefficient calculation module is used for respectively calculating a tension loss coefficient, a tension deviation coefficient and a speed deviation coefficient of the electrode roller according to the tension average value and the speed average value obtained by the average value calculation module;
a magnetic powder output quantity calculation module for calculating the magnetic powder output quantity eta of the ith electrode roller at the beginning of the next delta t period according to the tension loss coefficient, the tension deviation coefficient and the speed deviation coefficient of the electrode rolleri;
A magnetic powder clutch control module for controlling the magnetic powder clutch according to the output eta of the magnetic powderiWorking as the initial output for the next at period.
Based on the tension control system for the winding coating machine process in the high vacuum environment, the mean value calculation module comprises:
a tension average value calculating unit for calculating the tension average value T of the previous tension detecting roller of the ith electrode roller in the previous delta T measuring periodiAnd calculating the tension average value T of the tension detection roller of the ith electrode roller in the previous delta T measurement periodi+1;
A speed average value calculating unit for calculating the speed average value v of the ith electrode roller in the previous delta t measuring periodi。
Based on the tension control system for the winding coating machine process in the high vacuum environment, the coefficient calculation module comprises:
a tension loss coefficient calculation unit for calculating a tension loss coefficient alpha of the ith electrode rolli;
A tension deviation coefficient calculation unit for calculating the tension deviation coefficientTension deviation coefficient beta of ith electrode rolli;
A speed deviation coefficient calculation unit for calculating a speed deviation coefficient gamma of the ith electrode rolleri。
Based on the tension control system for the winding coating machine process in the high vacuum environment, the tension data acquisition module comprises:
the winding tension detection roller is used for detecting winding tension;
the unwinding tension detection roller is used for detecting unwinding tension;
and the process tension detection rollers are arranged in front of and behind the electrode roller and are used for detecting the process tension in front of and behind the electrode roller.
Based on the tension control system for the winding coating machine process in the high vacuum environment, the speed data acquisition module comprises:
and the speed detector is arranged on the electrode roller and is used for detecting the rotating speed of the electrode roller.
Compared with the prior art, the invention has the following advantages:
the invention provides a tension control system based on a winding coating machine process in a high vacuum environment, which comprises an initial data setting module, an electrode roller initial tension setting module, a film tape running linear speed setting module, an electrode roller diameter setting module, an initial output quantity of a magnetic powder clutch and a basic period setting module, wherein the initial data setting module is used for setting the initial tension of the electrode roller, the film tape running linear speed, the electrode roller diameter setting module and the basic period setting module; acquiring winding tension, unwinding tension and process tension of each electrode roller by a tension data acquisition module; acquiring real-time speed detection data of each electrode roller by a speed data acquisition module; then an average value of the tension of the front tension and the rear tension of the electrode roller in the previous measuring period and an average value of the speed of the electrode roller in the previous measuring period are calculated by an average value calculating module; then, a tension loss coefficient, a tension deviation coefficient and a speed deviation coefficient are calculated through a coefficient calculation module; finally, magnetic powder output quantity is calculated by a magnetic powder output quantity calculation module, the magnetic powder clutch control module controls the electrode roller to directly work by the magnetic powder output quantity at the beginning of the next period so as to achieve the adjustment effect, control and adjustment of process tension are realized, viscous friction on each electrode roller is close, wrinkles are reduced, tension at each position is stable, and the whole system is stable; the tension controller is simplified into a tension detector, an expensive tension controller is not needed, and the cost is greatly saved; meanwhile, the whole control model is universal and can be adopted in the same type of tension control systems.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below.
FIG. 1 is a schematic view of the movement principle of the electrode roll of the present invention;
FIG. 2 is a schematic diagram of the control principle of the present invention;
FIG. 3 is a schematic structural view of the roll coater of the present invention;
FIG. 4 is a schematic structural diagram of a tension control system in the process of the winding coating machine of the present invention.
[ detailed description ] embodiments
In order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
When embodiments of the present invention refer to "first", "second", etc. ordinal terms, it should be understood that they are used for distinguishing purposes only, unless the context clearly dictates otherwise.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
The specific embodiment is as follows: as shown in fig. 1-3, based on the tension control method in the process of the winding coating machine in the high vacuum environment, the winding roller, the unwinding roller and the electrode roller of the winding coating machine are respectively connected with the winding motor, the unwinding motor and the electrode roller motor through magnetic powder clutches, and the method comprises the following steps:
step 1: setting the initial tension of the electrode roller to T0The linear velocity of the film belt is v0D diameter of the electrode roll and eta initial output of the magnetic powder clutchi0The time of one rotation of the electrode roller is delta t ═ pi D/v0Taking deltat as a basic period;
step 2: acquiring winding tension, unwinding tension and front and rear process tension of each electrode roller in real time;
and step 3: acquiring the rotating speed of each electrode roller in real time;
and 4, step 4: at the beginning of each period, the measured average value of the above one period is used as the control data source of the period, and the measured average value comprises:
the average tension value of the tension detection roller before the ith electrode roller in the previous delta t measurement period is
The average tension value of the tension detection roller behind the ith electrode roller in the previous delta t measurement period is
Thirdly, the average speed value of the ith electrode roller in the previous delta t measuring period is
And 5: calculating the tension loss coefficient, the tension deviation coefficient and the speed deviation coefficient of the ith electrode roll according to the measured average value obtained in the step 4,
the tension loss coefficient of the ith electrode roll is
The tension deviation coefficient of the ith electrode roll is
The speed deviation coefficient of the ith electrode roller is
Step 6: calculating the output quantity eta of the magnetic powder clutch of the ith electrode roller at the beginning of the next delta t period according to the result obtained in the step 5iInitial output eta of magnetic powder clutchi0In a ratio of
ηi=(1-aαi+bβi-cγi)ηi0Wherein a, b and c are constants,
if 0.9 etai0≤ηi≤2ηi0Eta is theniNormally taking values;
if etai﹤0.9ηi0Then define ηi=0.9ηi0;
If etai﹥2ηi0Then define ηi=2ηi0;
The electrode rolls adopt a periodic proportional control mode, for example, the initial output quantity of the magnetic powder clutch of the ith electrode roll is etai0The ith electrode roller is connected with the initial output quantity eta of the magnetic powder clutch in the next delta t period according to the calculationi0Proportional magnetic powder output ηiThe tension of the electrode roll in the period can be adjusted, so that the viscous friction on each electrode roll is close, wrinkles are reduced, the tension at each position is stable, and the whole system is stable; controlling the tensionThe device is simplified into a tension detector, an expensive tension controller is not needed, and the cost is greatly saved; meanwhile, the whole control model is universal and can be adopted in the same type of tension control systems.
Further, the initial value of the ith electrode roller in the next period is the output quantity of the magnetic powder clutch of the electrode roller in the previous period, namely the output quantity eta of the magnetic powder clutch in each periodi(t)The output quantity eta of the magnetic powder clutch in the above periodi(t-1)As initial values of the period:
ηi(t)=(1-aαi(t)+bβi(t)-cγi(t))ηi(t-1);
still further, the initial output eta of the magnetic powder clutchi0When the magnetic powder is not coated, the electrode roller rotates at a set speed relatively at a constant speed to obtain the minimum magnetic powder output.
Specifically, when the winding film plating machine is started to work, a plurality of values of a, b and c are firstly formulated according to basic rules, then an orthogonal experiment method is used for testing, the values of constants b, a and c are sequentially selected, and the test value taking process of the parameter b comprises the following steps:
1) firstly, taking a as 0, c as 0, and b sequentially selected from a plurality of values;
2) in a plurality of test processes, the operation of 20-50 cycles is taken as a test investigation time range, in the embodiment, three process chambers are provided, 4 electrode rollers are arranged in each process chamber, a process tension real-time curve is detected through an upper computer, the tension curve in each process chamber is placed in a real-time tension curve control for comparison, whether the process tension real-time curve has a convergence trend or not, namely is close to a target value or not is observed, and if the process tension real-time curve has the convergence trend, the parameter is preliminarily judged to be reasonable;
3) according to the parameters obtained in the step 2), whether wrinkles exist and tension indicated values are used as references, and whether wrinkles exist and tension value data are stable is observed by naked eyes to be regarded as reasonable parameters;
4) selecting two reasonable parameters from a plurality of values, inserting a plurality of similar values between the two parameters, then sequentially taking values from the parameters, and carrying out the steps 2) and 3)Judging whether the parameters are reasonable or not, further screening and testing, and selecting the value b when the tension is most stable from the obtained reasonable parameters0As parameter b.
More specifically, the experimental evaluation process of the parameter a comprises the following steps:
1) on the basis of determining the b parameter, b is taken as b0C is 0, and a is selected from a plurality of values in sequence;
2) in a plurality of test processes, the operation of 20-50 cycles is taken as a test investigation time range, in the embodiment, three process chambers are provided, 4 electrode rollers are arranged in each process chamber, a process tension real-time curve is detected through an upper computer, the tension curve in each process chamber is placed in a real-time tension curve control for comparison, whether the process tension real-time curve has a convergence trend or not, namely is close to a target value or not is observed, and if the process tension real-time curve has the convergence trend, the parameter is preliminarily judged to be reasonable;
3) according to the parameters obtained in the step 2), whether wrinkles exist and tension indicated values are used as references, and whether wrinkles exist and tension value data are stable is observed by naked eyes to be regarded as reasonable parameters;
4) selecting two reasonable parameters from the plurality of values, inserting a plurality of similar values between the two parameters, then sequentially taking values from the parameters, judging whether the parameters are reasonable or not through the steps 2) and 3), further performing screening test, and selecting the value a with the most stable tension from the obtained reasonable parameters0As parameter a;
still further, the test valuing process of the c parameter comprises the following steps:
1) on the basis of determining the b parameter and the a parameter, b is taken as b0,a=a0C is selected from a plurality of values in sequence;
2) in a plurality of test processes, the operation of 20-50 cycles is taken as a test investigation time range, in the embodiment, three process chambers are provided, 4 electrode rollers are arranged in each process chamber, a process tension real-time curve is detected through an upper computer, the tension curve in each process chamber is placed in a real-time tension curve control for comparison, whether the process tension real-time curve has a convergence trend or not, namely is close to a target value or not is observed, and if the process tension real-time curve has the convergence trend, the parameter is preliminarily judged to be reasonable;
3) according to the parameters obtained in the step 2), whether wrinkles exist and tension indicated values are used as references, and whether wrinkles exist and tension value data are stable is observed by naked eyes to be regarded as reasonable parameters;
4) selecting two reasonable parameters from the plurality of values, inserting a plurality of similar values between the two parameters, then sequentially taking values from the parameters, judging whether the parameters are reasonable or not through the steps 2) and 3), further performing a screening test, and selecting the value c when the tension is most stable from the obtained reasonable parameters0As parameter c. By selecting the optimal a, b and c parameters, the magnetic powder output eta of the electrode roller is only controllediTo the initial output quantity eta of the magnetic powderi0Working proportionally, i.e. etai=(1-aαi+bβi-cγi)ηi0The adjustment of the process tension of the electrode roll can be realized.
Fig. 4 is a schematic structural diagram of a tension control system based on a winding coater process in a high vacuum environment according to the present invention, where the tension control system 100 includes an initial data setting module 110, a tension data collecting module 120, a speed data collecting module 130, a mean value calculating module 140, a coefficient calculating module 150, a magnetic powder output calculating module 160, and a magnetic powder clutch control module 170.
Initial data setup module 110: for setting the initial tension of the electrode roll to T0The linear velocity of the film belt is v0D diameter of the electrode roll and eta initial output quantity of the magnetic powder clutchi0And the basic period of one rotation of the electrode roller is delta t;
the tension data acquisition module 120 is configured to acquire real-time tension detection data of each point through the winding tension detection roller 121, the unwinding tension detection roller 122 and the process tension detection roller 123;
a speed data acquisition module 130, configured to acquire real-time speed detection data of each electrode roller;
the mean value calculating module 140 is configured to calculate a mean value of tension and a mean value of speed of the electrode roll in one period of rotation according to the real-time tension detection data and the real-time speed detection data acquired by the tension data acquiring module 120 and the speed data acquiring module 130;
the coefficient calculation module 150 is used for respectively calculating a tension loss coefficient, a tension deviation coefficient and a speed deviation coefficient of the electrode roller according to the tension average value and the speed average value obtained by the average value calculation module;
a magnetic powder output quantity calculating module 160 for calculating the magnetic powder output quantity eta of the ith electrode roller at the beginning of the next delta t period according to the tension loss coefficient, the tension deviation coefficient and the speed deviation coefficient of the electrode rolleri;
A magnetic powder clutch control module 170 for controlling the magnetic powder clutch according to the output eta of the magnetic powderiWorking as the initial output for the next at period.
Specifically, the mean calculation module 140 includes:
a tension average value calculating unit 141 for calculating a tension average value T of a tension detecting roller of the ith electrode roller in a previous delta T measurement periodiAnd calculating the tension average value T of the tension detection roller of the ith electrode roller in the previous delta T measurement periodi+1(ii) a The above-mentioned
A speed average value calculating unit 142 for calculating the speed average value v of the ith electrode roller in the previous Δ t measuring periodiSaid
More specifically, the coefficient calculation module 150 includes:
a tension loss coefficient calculation unit 151 for calculating a tension loss coefficient α of the ith electrode rolli(ii) a The above-mentioned
Tension deviation coefficient calculation unit 152, calculating the tension deviation coefficient beta of the ith electrode rolleri(ii) a The above-mentioned
A speed deviation coefficient calculation unit 153 for calculating a speed deviation coefficient γ of the ith electrode rolli(ii) a The above-mentioned
Coefficient of loss by tension alphaiCoefficient of tension deviation betaiAnd a velocity deviation coefficient gammaiThe output quantity eta of the magnetic powder clutch of the ith electrode roller at the beginning of the next delta t period can be calculatediInitial output eta of magnetic powder clutchi0In a ratio of
ηi=(1-aαi+bβi-cγi)ηi0(ii) a Wherein a, b and c are constants,
in addition, the tension data collecting module 120 includes:
a winding tension detection roller 121 for detecting winding tension;
an unwinding tension detection roller 122 for detecting the unwinding tension;
and a process tension detecting roller 123 disposed in front of and behind the electrode roller for detecting the process tension in front of and behind the electrode roller, wherein the process tension detecting roller 123 includes L1 to L5 in the present embodiment.
Further, the speed data acquisition module 130 includes:
and a speed detector 131 mounted on the electrode roller for detecting the rotational speed of the electrode roller, wherein the speed detector is a rotary encoder for detecting the rotational speeds V1-V4 of the electrode roller in the embodiment.
The invention provides a tension control system based on a winding coating machine process in a high vacuum environment, which comprises an initial data setting module, a magnetic powder clutch and a control module, wherein the initial data setting module is used for setting the initial tension of an electrode roller, the film tape running linear speed, the diameter of the electrode roller and the initial output quantity and the basic period of the magnetic powder clutch; acquiring winding tension, unwinding tension and process tension of each electrode roller by a tension data acquisition module; acquiring real-time speed detection data of each electrode roller by a speed data acquisition module; then, an average value calculation module calculates the tension average value of the front and rear tension of the electrode roller in the previous measurement period and the speed average value of the electrode roller in the previous measurement period; then, a tension loss coefficient, a tension deviation coefficient and a speed deviation coefficient are calculated through a coefficient calculation module; finally, magnetic powder output quantity is calculated by a magnetic powder output quantity calculation module, the magnetic powder clutch control module controls the electrode roller to directly work by the magnetic powder output quantity at the beginning of the next period so as to achieve the adjustment effect, control and adjustment of process tension are realized, viscous friction on each electrode roller is close, wrinkles are reduced, tension at each position is stable, and the whole system is stable; the tension controller is simplified into a tension detector, an expensive tension controller is not needed, and the cost is greatly saved; meanwhile, the whole control model is universal and can be adopted in tension control systems of the same type; the invention also adds a rotation speed control item of the electrode roller, controls and adjusts the rotation speed of the electrode roller, prevents the electrode roller from slipping too fast, and avoids the problem that part of the electrode roller is still.
The foregoing is illustrative of one embodiment provided in connection with the detailed description and is not intended to limit the invention to the specific embodiment described. Similar or identical methods, structures and the like as those of the present invention or several technical deductions or substitutions made on the premise of the conception of the present invention should be considered as the protection scope of the present invention.
Claims (5)
1. Winding coating machine technology process tension control system based on under high vacuum environment, its characterized in that includes:
an initial data setting module: for setting the initial tension of the electrode roll to T0The linear velocity of the film belt is v0D diameter of the electrode roll and eta initial output quantity of the magnetic powder clutchi0And the basic period of one rotation of the electrode roller is delta t;
the tension data acquisition module is used for acquiring real-time tension detection data of each point through the winding tension detection roller, the unwinding tension detection roller and the process tension detection roller;
the speed data acquisition module is used for acquiring real-time speed detection data of each electrode roller;
the mean value calculating module is used for calculating the tension mean value and the speed mean value of the electrode roller in one period of rotation;
the coefficient calculation module is used for respectively calculating a tension loss coefficient, a tension deviation coefficient and a speed deviation coefficient of the electrode roller according to the tension average value and the speed average value obtained by the average value calculation module;
a magnetic powder output quantity calculation module for calculating the magnetic powder output quantity eta of the ith electrode roller at the beginning of the next delta t period according to the tension loss coefficient, the tension deviation coefficient and the speed deviation coefficient of the electrode rolleri;
A magnetic powder clutch control module for controlling the magnetic powder clutch according to the output eta of the magnetic powderiWorking as the initial output for the next at period.
2. The tension control system based on the winding coating machine process in the high vacuum environment as claimed in claim 1, wherein the mean value calculation module comprises:
a tension average value calculating unit for calculating the tension average value T of the previous tension detecting roller of the ith electrode roller in the previous delta T measuring periodiAnd calculating the tension average value T of the tension detection roller of the ith electrode roller in the previous delta T measurement periodi+1;
A speed average value calculating unit for calculating the speed average value v of the ith electrode roller in the previous delta t measuring periodi。
3. The tension control system based on the winding coating machine process in the high vacuum environment as claimed in claim 2, wherein the coefficient calculation module comprises:
a tension loss coefficient calculation unit for calculating a tension loss coefficient alpha of the ith electrode rolli;
A tension deviation coefficient calculation unit for calculating a tension deviation coefficient beta of the ith electrode rolli;
A speed deviation coefficient calculation unit for calculating a speed deviation coefficient gamma of the ith electrode rolleri。
4. The winding coating machine process tension control system based on high vacuum environment of claim 3, wherein the tension data acquisition module comprises:
the winding tension detection roller is used for detecting winding tension;
the unwinding tension detection roller is used for detecting unwinding tension;
and the process tension detection rollers are arranged in front of and behind the electrode roller and are used for detecting the process tension in front of and behind the electrode roller.
5. The winding coating machine process tension control system based on high vacuum environment of claim 3, wherein the speed data acquisition module comprises:
and the speed detector is arranged on the electrode roller and is used for detecting the rotating speed of the electrode roller.
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