CN112034550A - 基于悬空波导结构的氮化硅相控阵芯片 - Google Patents
基于悬空波导结构的氮化硅相控阵芯片 Download PDFInfo
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- CN112034550A CN112034550A CN202010870062.3A CN202010870062A CN112034550A CN 112034550 A CN112034550 A CN 112034550A CN 202010870062 A CN202010870062 A CN 202010870062A CN 112034550 A CN112034550 A CN 112034550A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12014—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the wavefront splitting or combining section, e.g. grooves or optical elements in a slab waveguide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
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Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN202010870062.3A CN112034550B (zh) | 2020-08-26 | 2020-08-26 | 基于悬空波导结构的氮化硅相控阵芯片 |
US17/337,969 US11598917B2 (en) | 2020-08-26 | 2021-06-03 | Silicon nitride phased array chip based on a suspended waveguide structure |
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CN202010870062.3A CN112034550B (zh) | 2020-08-26 | 2020-08-26 | 基于悬空波导结构的氮化硅相控阵芯片 |
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CN112034550A true CN112034550A (zh) | 2020-12-04 |
CN112034550B CN112034550B (zh) | 2022-10-14 |
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CN202010870062.3A Active CN112034550B (zh) | 2020-08-26 | 2020-08-26 | 基于悬空波导结构的氮化硅相控阵芯片 |
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US (1) | US11598917B2 (zh) |
CN (1) | CN112034550B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113703244A (zh) * | 2021-08-19 | 2021-11-26 | 扬州大学 | 一种大规模集成的电光微环光学相控阵 |
WO2023217153A1 (zh) * | 2022-05-09 | 2023-11-16 | 北京万集科技股份有限公司 | 一种移相器 |
CN117434777A (zh) * | 2023-12-20 | 2024-01-23 | 中国工程物理研究院流体物理研究所 | 光子集成光学相控阵、单波长二维角度扫描装置及方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112034550B (zh) * | 2020-08-26 | 2022-10-14 | 华东师范大学重庆研究院 | 基于悬空波导结构的氮化硅相控阵芯片 |
CN114609723A (zh) * | 2022-02-25 | 2022-06-10 | 浙江大学 | 一种无需复杂相位较正的光调控器 |
CN114578585B (zh) * | 2022-03-22 | 2024-06-25 | 吉林大学 | 一种基于功能化聚合物片上集成的多层光互连波导开关矩阵 |
EP4386456A1 (en) * | 2022-12-16 | 2024-06-19 | Imec VZW | A low-loss optical bent waveguide core |
Citations (4)
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CN107180883A (zh) * | 2017-05-04 | 2017-09-19 | 南京邮电大学 | 基于InGaN光子单片集成的多维空间可见光通信系统 |
CN108398842A (zh) * | 2018-04-18 | 2018-08-14 | 中国科学院西安光学精密机械研究所 | 一种基于串联式光学天线的光学相控阵芯片 |
CN109270628A (zh) * | 2018-09-28 | 2019-01-25 | 上海理工大学 | 一种可见光波段氮化硅光束偏转芯片 |
CN109462145A (zh) * | 2017-12-28 | 2019-03-12 | 南京邮电大学 | 集成谐振光栅微腔的GaN基悬空波导激光器及制备方法 |
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US6928200B2 (en) * | 2002-10-07 | 2005-08-09 | Intel Corporation | Ultra-thin polarization mode converters based on liquid crystal materials |
JP2007065562A (ja) * | 2005-09-02 | 2007-03-15 | Furukawa Electric Co Ltd:The | アレイ導波路回折格子 |
US9989831B2 (en) * | 2016-03-02 | 2018-06-05 | The United States Of America, As Represented By The Secretary Of The Navy | Chip-scale two-dimensional optical phased array with simplified controls |
US20180081112A1 (en) * | 2016-09-20 | 2018-03-22 | Honeywell International Inc. | Acoustic ridge or rib waveguides in low-loss integrated optical platforms |
CN209728158U (zh) | 2018-12-29 | 2019-12-03 | 国科光芯(海宁)科技股份有限公司 | 一种相控阵集成光学芯片和光学相控阵发射装置 |
CN109991582B (zh) | 2019-03-13 | 2023-11-03 | 上海交通大学 | 硅基混合集成激光雷达芯片系统 |
CN112034550B (zh) * | 2020-08-26 | 2022-10-14 | 华东师范大学重庆研究院 | 基于悬空波导结构的氮化硅相控阵芯片 |
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2020
- 2020-08-26 CN CN202010870062.3A patent/CN112034550B/zh active Active
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2021
- 2021-06-03 US US17/337,969 patent/US11598917B2/en active Active
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CN107180883A (zh) * | 2017-05-04 | 2017-09-19 | 南京邮电大学 | 基于InGaN光子单片集成的多维空间可见光通信系统 |
CN109462145A (zh) * | 2017-12-28 | 2019-03-12 | 南京邮电大学 | 集成谐振光栅微腔的GaN基悬空波导激光器及制备方法 |
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CN109270628A (zh) * | 2018-09-28 | 2019-01-25 | 上海理工大学 | 一种可见光波段氮化硅光束偏转芯片 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113703244A (zh) * | 2021-08-19 | 2021-11-26 | 扬州大学 | 一种大规模集成的电光微环光学相控阵 |
CN113703244B (zh) * | 2021-08-19 | 2023-12-19 | 扬州大学 | 一种大规模集成的电光微环光学相控阵 |
WO2023217153A1 (zh) * | 2022-05-09 | 2023-11-16 | 北京万集科技股份有限公司 | 一种移相器 |
CN117434777A (zh) * | 2023-12-20 | 2024-01-23 | 中国工程物理研究院流体物理研究所 | 光子集成光学相控阵、单波长二维角度扫描装置及方法 |
CN117434777B (zh) * | 2023-12-20 | 2024-03-19 | 中国工程物理研究院流体物理研究所 | 光子集成光学相控阵、单波长二维角度扫描装置及方法 |
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Publication number | Publication date |
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CN112034550B (zh) | 2022-10-14 |
US20210294032A1 (en) | 2021-09-23 |
US11598917B2 (en) | 2023-03-07 |
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