CN1120156A - 压电气体传感器 - Google Patents
压电气体传感器 Download PDFInfo
- Publication number
- CN1120156A CN1120156A CN95100968A CN95100968A CN1120156A CN 1120156 A CN1120156 A CN 1120156A CN 95100968 A CN95100968 A CN 95100968A CN 95100968 A CN95100968 A CN 95100968A CN 1120156 A CN1120156 A CN 1120156A
- Authority
- CN
- China
- Prior art keywords
- sensor
- piezoelectric crystal
- formula
- coating
- multinomial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 239000011248 coating agent Substances 0.000 claims abstract description 20
- 239000013078 crystal Substances 0.000 claims abstract description 14
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 7
- 125000005647 linker group Chemical group 0.000 claims abstract description 4
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 3
- 125000001118 alkylidene group Chemical group 0.000 claims abstract description 3
- 125000003118 aryl group Chemical group 0.000 claims abstract description 3
- 125000000101 thioether group Chemical group 0.000 claims abstract description 3
- 229920000412 polyarylene Polymers 0.000 claims abstract 3
- 230000003252 repetitive effect Effects 0.000 claims description 12
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 1
- 150000003568 thioethers Chemical class 0.000 abstract description 2
- 125000002947 alkylene group Chemical group 0.000 abstract 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 12
- -1 poly (arylene sulfide Chemical compound 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 7
- 239000004734 Polyphenylene sulfide Substances 0.000 description 5
- 229920000069 polyphenylene sulfide Polymers 0.000 description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- JTPNRXUCIXHOKM-UHFFFAOYSA-N 1-chloronaphthalene Chemical compound C1=CC=C2C(Cl)=CC=CC2=C1 JTPNRXUCIXHOKM-UHFFFAOYSA-N 0.000 description 2
- NQMUGNMMFTYOHK-UHFFFAOYSA-N 1-methoxynaphthalene Chemical compound C1=CC=C2C(OC)=CC=CC2=C1 NQMUGNMMFTYOHK-UHFFFAOYSA-N 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- JBKVHLHDHHXQEQ-UHFFFAOYSA-N epsilon-caprolactam Chemical compound O=C1CCCCCN1 JBKVHLHDHHXQEQ-UHFFFAOYSA-N 0.000 description 2
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013047 polymeric layer Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LINPIYWFGCPVIE-UHFFFAOYSA-N 2,4,6-trichlorophenol Chemical compound OC1=C(Cl)C=C(Cl)C=C1Cl LINPIYWFGCPVIE-UHFFFAOYSA-N 0.000 description 1
- LUZDYPLAQQGJEA-UHFFFAOYSA-N 2-Methoxynaphthalene Chemical compound C1=CC=CC2=CC(OC)=CC=C21 LUZDYPLAQQGJEA-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 206010013786 Dry skin Diseases 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 125000004957 naphthylene group Chemical group 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 150000004965 peroxy acids Chemical class 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000012047 saturated solution Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
- G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/19—Halogen containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/20—Oxygen containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/20—Oxygen containing
- Y10T436/206664—Ozone or peroxide
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Acoustics & Sound (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Paints Or Removers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4402671A DE4402671A1 (de) | 1994-01-29 | 1994-01-29 | Leitfähigkeitssensor |
| DEP4402671.4 | 1994-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1120156A true CN1120156A (zh) | 1996-04-10 |
Family
ID=6508990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95100968A Pending CN1120156A (zh) | 1994-01-29 | 1995-01-27 | 压电气体传感器 |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US6171867B1 (ja) |
| EP (1) | EP0665427B1 (ja) |
| JP (1) | JP3653113B2 (ja) |
| KR (1) | KR950033480A (ja) |
| CN (1) | CN1120156A (ja) |
| AT (1) | ATE195180T1 (ja) |
| AU (1) | AU688431B2 (ja) |
| BR (1) | BR9500359A (ja) |
| CA (1) | CA2141265A1 (ja) |
| CZ (1) | CZ21695A3 (ja) |
| DE (2) | DE4402671A1 (ja) |
| DK (1) | DK0665427T3 (ja) |
| ES (1) | ES2150508T3 (ja) |
| IL (1) | IL112464A0 (ja) |
| MY (1) | MY130289A (ja) |
| PL (1) | PL306978A1 (ja) |
| RU (1) | RU95101040A (ja) |
| TW (1) | TW365086B (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110045013A (zh) * | 2018-01-15 | 2019-07-23 | 罗门哈斯电子材料有限责任公司 | 声波传感器和感测气相分析物的方法 |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19619227C2 (de) * | 1996-05-13 | 2001-06-07 | Axiva Gmbh | Ozonsammler zur Bestimmung von integralen Ozonbelastungen |
| US6368867B1 (en) * | 1998-01-29 | 2002-04-09 | International Business Machines Corporation | Monitor for verification of ozone reaction |
| US20040203172A1 (en) * | 2003-04-14 | 2004-10-14 | Urs Corporation | Method and apparatus for a chemical sensor |
| US20050016276A1 (en) * | 2003-06-06 | 2005-01-27 | Palo Alto Sensor Technology Innovation | Frequency encoding of resonant mass sensors |
| US7232545B2 (en) * | 2003-09-16 | 2007-06-19 | Steris Inc. | Sensor for determining concentration of fluid sterilant |
| US7541002B2 (en) | 2004-05-12 | 2009-06-02 | Steris Corporation | Apparatus for determining the efficiency of a vaporizer in a decontamination system |
| US20050276721A1 (en) * | 2004-05-25 | 2005-12-15 | Steris Inc. | Method and apparatus for controlling the concentration of a sterilant chemical in a fluid |
| US7431886B2 (en) * | 2004-09-24 | 2008-10-07 | Steris Corporation | Method of monitoring operational status of sensing devices for determining the concentration of chemical components in a fluid |
| US20060105466A1 (en) * | 2004-11-12 | 2006-05-18 | Steris Inc. | Sensor for determining concentration of ozone |
| US20060188399A1 (en) * | 2005-02-04 | 2006-08-24 | Jadi, Inc. | Analytical sensor system for field use |
| US20080196478A1 (en) * | 2007-02-20 | 2008-08-21 | Honeywell International Inc. | Transition metals doped zeolites for saw based CO2 gas sensor applications |
| FR2931701B1 (fr) * | 2008-06-02 | 2010-06-11 | Centre Nat Rech Scient | Utilisation de nanomateriaux de carbone en tant que materiau de filtration impermeable a l'ozone |
| US11215586B2 (en) | 2017-01-30 | 2022-01-04 | Aromatix, Inc. | Ultrasound gas sensor system using machine learning |
| US10900062B2 (en) | 2017-07-14 | 2021-01-26 | American Sterilizer Company | Process for determining viability of test microorganisms of biological indicator and sterilization detection device for determining same |
| US10876144B2 (en) | 2017-07-14 | 2020-12-29 | American Sterilizer Company | Process for determining viability of test microorganisms of biological indicator and sterilization detection device for determining same |
| US10889848B2 (en) | 2017-07-14 | 2021-01-12 | American Sterilizer Company | Process for determining viability of test microorganisms of biological indicator and sterilization detection device for determining same |
| TWI792000B (zh) * | 2019-06-23 | 2023-02-11 | 美商羅門哈斯電子材料有限公司 | 氣體感測器和感測氣相分析物之方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59123975A (ja) * | 1982-12-29 | 1984-07-17 | Fujitsu Ltd | ベクトルデ−タ記憶制御方式 |
| JPS613038A (ja) * | 1984-06-16 | 1986-01-09 | Nissin Electric Co Ltd | ガスセンサ |
| DE4314734A1 (de) * | 1993-05-04 | 1994-11-10 | Hoechst Ag | Filtermaterial und Verfahren zur Entfernung von Ozon aus Gasen und Flüssigkeiten |
-
1994
- 1994-01-29 DE DE4402671A patent/DE4402671A1/de not_active Withdrawn
-
1995
- 1995-01-16 TW TW084100342A patent/TW365086B/zh active
- 1995-01-20 DK DK95100785T patent/DK0665427T3/da active
- 1995-01-20 DE DE59508603T patent/DE59508603D1/de not_active Expired - Fee Related
- 1995-01-20 ES ES95100785T patent/ES2150508T3/es not_active Expired - Lifetime
- 1995-01-20 AT AT95100785T patent/ATE195180T1/de not_active IP Right Cessation
- 1995-01-20 EP EP95100785A patent/EP0665427B1/de not_active Expired - Lifetime
- 1995-01-25 AU AU11436/95A patent/AU688431B2/en not_active Ceased
- 1995-01-26 US US08/378,838 patent/US6171867B1/en not_active Expired - Fee Related
- 1995-01-27 KR KR1019950001478A patent/KR950033480A/ko not_active Application Discontinuation
- 1995-01-27 IL IL11246495A patent/IL112464A0/xx active IP Right Grant
- 1995-01-27 MY MYPI95000211A patent/MY130289A/en unknown
- 1995-01-27 PL PL95306978A patent/PL306978A1/xx unknown
- 1995-01-27 CA CA002141265A patent/CA2141265A1/en not_active Abandoned
- 1995-01-27 CZ CZ95216A patent/CZ21695A3/cs unknown
- 1995-01-27 BR BR9500359A patent/BR9500359A/pt active Search and Examination
- 1995-01-27 RU RU95101040/25A patent/RU95101040A/ru unknown
- 1995-01-27 CN CN95100968A patent/CN1120156A/zh active Pending
- 1995-01-30 JP JP01297995A patent/JP3653113B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110045013A (zh) * | 2018-01-15 | 2019-07-23 | 罗门哈斯电子材料有限责任公司 | 声波传感器和感测气相分析物的方法 |
| CN110045013B (zh) * | 2018-01-15 | 2022-08-26 | 罗门哈斯电子材料有限责任公司 | 声波传感器和感测气相分析物的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07294404A (ja) | 1995-11-10 |
| MY130289A (en) | 2007-06-29 |
| DE4402671A1 (de) | 1995-08-03 |
| JP3653113B2 (ja) | 2005-05-25 |
| IL112464A0 (en) | 1995-03-30 |
| EP0665427A2 (de) | 1995-08-02 |
| US6171867B1 (en) | 2001-01-09 |
| DE59508603D1 (de) | 2000-09-07 |
| RU95101040A (ru) | 1996-10-27 |
| EP0665427A3 (de) | 1997-04-09 |
| ES2150508T3 (es) | 2000-12-01 |
| EP0665427B1 (de) | 2000-08-02 |
| PL306978A1 (en) | 1995-08-07 |
| ATE195180T1 (de) | 2000-08-15 |
| CZ21695A3 (en) | 1995-09-13 |
| KR950033480A (ko) | 1995-12-26 |
| DK0665427T3 (da) | 2000-12-27 |
| TW365086B (en) | 1999-07-21 |
| BR9500359A (pt) | 1997-01-14 |
| AU1143695A (en) | 1995-08-10 |
| CA2141265A1 (en) | 1995-07-30 |
| AU688431B2 (en) | 1998-03-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |