CN112007918A - Laser cleaning equipment and method - Google Patents

Laser cleaning equipment and method Download PDF

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Publication number
CN112007918A
CN112007918A CN201910455340.6A CN201910455340A CN112007918A CN 112007918 A CN112007918 A CN 112007918A CN 201910455340 A CN201910455340 A CN 201910455340A CN 112007918 A CN112007918 A CN 112007918A
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CN
China
Prior art keywords
laser
cleaned
workpiece
focusing device
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910455340.6A
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Chinese (zh)
Inventor
何崇文
朱海红
余海龙
李立坤
王启明
刘娟娟
苏权科
李�瑞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avic Biam New Materials Technology Engineering Co ltd
Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co Ltd
Original Assignee
Avic Biam New Materials Technology Engineering Co ltd
Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avic Biam New Materials Technology Engineering Co ltd, Wuhan Optical Valley Aerospace Sanjiang Laser Industry Technology Research Institute Co Ltd filed Critical Avic Biam New Materials Technology Engineering Co ltd
Priority to CN201910455340.6A priority Critical patent/CN112007918A/en
Publication of CN112007918A publication Critical patent/CN112007918A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning

Abstract

The invention relates to the technical field of laser cleaning, in particular to laser cleaning equipment and a laser cleaning method. The laser cleaning equipment comprises a laser, a laser focusing device, a preheating device and a control system. The laser is used to generate a primary laser beam. The laser focusing device is connected with a laser emitting port of the laser and is used for enabling an incident original laser beam to form a scanning focusing spot. The preheating device is used for generating heat energy capable of acting on the surface of the workpiece to be cleaned so as to preheat the surface of the workpiece to be cleaned. The control system is respectively connected with the laser, the laser focusing device and the preheating device and is used for controlling the working states of the laser, the laser focusing device and the preheating device. The laser cleaning method is applied to the laser cleaning equipment. The laser cleaning equipment and the laser cleaning method provided by the embodiment of the invention can effectively improve the efficiency of laser cleaning.

Description

Laser cleaning equipment and method
Technical Field
The invention relates to the technical field of laser cleaning, in particular to laser cleaning equipment and a laser cleaning method.
Background
The laser cleaning technology is characterized in that a high-energy laser beam is irradiated on the surface of a workpiece to be cleaned, so that dirt, rust spots or a coating on the surface of the workpiece to be cleaned is instantaneously evaporated or stripped, and a clean technological process is achieved. However, when the existing laser cleaning technology is used for cleaning the surface of a workpiece to be cleaned, the defect of low cleaning efficiency still exists.
Disclosure of Invention
It is therefore an object of the present invention to provide a laser cleaning apparatus and method to solve the above problems.
The laser cleaning equipment provided by the embodiment of the invention comprises a laser, a laser focusing device, a preheating device and a control system;
the laser is used for generating an original laser beam;
the laser focusing device is connected with a laser emitting port of the laser and is used for enabling an incident original laser beam to form a scanning focusing spot;
the preheating device is used for generating heat energy capable of acting on the surface of the workpiece to be cleaned so as to preheat the surface of the workpiece to be cleaned;
the control system is respectively connected with the laser, the laser focusing device and the preheating device and is used for controlling the working states of the laser, the laser focusing device and the preheating device.
Further, the laser cleaning equipment also comprises a walking control assembly;
the laser, the laser focusing device and the preheating device are arranged on the walking control assembly, and the control system is further connected with the walking control assembly and used for controlling the working state of the walking control assembly.
Further, the walking control assembly comprises a bearing vehicle and a mechanical arm used for arranging the laser, the laser focusing device and the preheating device, the mechanical arm is arranged on the bearing vehicle, and the control system is respectively connected with the bearing vehicle and the mechanical arm to control the working state of the bearing vehicle and the mechanical arm.
Further, the preheating device comprises a connecting piece and a preheating device body, wherein the connecting piece comprises a first end portion and a second end portion, the first end portion is arranged on the mechanical arm, and the preheating device body is arranged on the second end portion.
Further, the preheating device body is CO2A laser preheater or an electromagnetic induction preheater.
Further, laser cleaning equipment still includes laser rangefinder, laser rangefinder set up in inside the casing of laser focusing device or connect in on the outer wall of the casing of laser focusing device, just the outgoing optical axis of laser rangefinder with the outgoing optical axis of laser focusing device is coaxial.
Further, the laser focusing device comprises a laser collimating device and a scanning focusing device, wherein the laser collimating device is used for collimating the incident original laser beam to form a collimated laser beam, and the scanning focusing device is coupled with the laser collimating device and is used for focusing the incident collimated laser beam to form a scanning focusing spot.
Furthermore, the laser focusing device further comprises a beam shaping device, wherein the beam shaping device is arranged between the laser collimating device and the scanning focusing device and is used for changing the spot distribution form of the incident collimated laser beam.
Furthermore, the laser cleaning equipment also comprises a dust suction device, wherein the dust suction device is arranged on one side of the laser focusing device and is just opposite to the working surface, or is arranged on two sides of the laser focusing device and is just opposite to the working surface.
The embodiment of the invention also provides a laser cleaning method, which is applied to the laser cleaning equipment, and the laser cleaning method comprises the following steps:
the workpiece to be cleaned is arranged at a preset position, and the preheating device is controlled to be started through the control system so as to preheat the surface of the workpiece to be cleaned;
after the surface of the workpiece to be cleaned is preheated, the control system controls the laser to be started, the laser generates an original laser beam, and the laser focusing device enables the incident original laser beam to form a scanning focusing spot and act on the surface of the workpiece to be cleaned so as to clean the surface of the workpiece to be cleaned.
The laser cleaning equipment provided by the embodiment of the invention comprises a laser, a laser focusing device, a preheating device and a control system. The laser is used to generate a primary laser beam. The laser focusing device is connected with a laser emitting port of the laser and is used for enabling an incident original laser beam to form a scanning focusing spot. The preheating device is used for generating heat energy capable of acting on the surface of the workpiece to be cleaned so as to preheat the surface of the workpiece to be cleaned. The control system is respectively connected with the laser, the laser focusing device and the preheating device and is used for controlling the working states of the laser, the laser focusing device and the preheating device. When the surface of a workpiece to be cleaned needs to be cleaned, the preheating device can be controlled to be started by the control system to preheat the surface of the workpiece to be cleaned, then the laser is controlled to be started by the control system, the laser generates an original laser beam, and the laser focusing device enables the incident original laser beam to form a scanning focusing spot and act on the surface of the workpiece to be cleaned to clean the surface of the workpiece to be cleaned. Therefore, before the surface of the workpiece to be cleaned is cleaned, the surface of the workpiece to be cleaned can be kept in a state higher than normal temperature, so that the evaporation or the peeling of dirt, rust spots or a coating on the surface of the workpiece to be cleaned is promoted, and the efficiency of laser cleaning is effectively improved.
Further, in the embodiment of the present invention, the laser cleaning apparatus further includes a walking control assembly. The laser, the laser focusing device and the preheating device are arranged on the walking control assembly, and the control system is further connected with the walking control assembly and used for controlling the working state of the walking control assembly. Treat through this laser cleaning equipment and wash when treating the cleaning workpiece surface, alright in order to carry on the laser instrument through the walking control subassembly, laser focusing device and preheating device walking to realize laser focusing device and preheating device and for treating moving on a large scale of cleaning the work piece, simultaneously, realize laser focusing device and preheating device and for treating the small scale removal of cleaning the work piece under the effect of the arm that the walking control subassembly includes, make the laser cleaning process more nimble controllable, in order to further improve laser cleaning's efficiency.
The laser cleaning method provided by the embodiment of the invention is applied to the laser cleaning equipment, so that the laser cleaning method has the same beneficial effects as the laser cleaning equipment, and the detailed description is omitted.
The foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below. It is appreciated that the following drawings depict only some embodiments of the invention and are therefore not to be considered limiting of its scope, for those skilled in the art will be able to derive additional related drawings therefrom without the benefit of the inventive faculty.
Fig. 1 is a schematic structural block diagram of a laser cleaning apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic view of an application process of a laser cleaning apparatus according to an embodiment of the present invention.
Fig. 3 is another schematic structural block diagram of a laser cleaning apparatus according to an embodiment of the present invention.
Fig. 4 is a schematic flow chart of a laser cleaning method according to an embodiment of the present invention.
Icon: 10-laser cleaning equipment; 100-a laser; 200-a laser focusing device; 210-a laser collimating device; 220-scanning focusing means; 230-a beam shaping device; 300-a preheating device; 310-a connector; 320-preheating the device body; 400-a control system; 500-a walking control assembly; 510-a carrier vehicle; 520-a mechanical arm; 600-laser ranging device.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
Referring to fig. 1 and 2, an embodiment of the invention provides a laser cleaning apparatus 10, where the laser cleaning apparatus 10 includes a laser 100, a laser focusing device 200, a preheating device 300, and a control system 400.
The laser 100 is used to generate a primary laser beam. The laser focusing device 200 is connected to the laser emitting port of the laser 100, and is used for forming the incident original laser beam into a scanning focusing spot. The preheating device 300 is used for generating heat energy capable of acting on the surface of the workpiece to be cleaned so as to preheat the surface of the workpiece to be cleaned. The control system 400 is respectively connected with the laser 100, the laser focusing device 200 and the preheating device 300, and is used for controlling the working states of the laser 100, the laser focusing device 200 and the preheating device 300. In addition, in the embodiment of the present invention, preferably, the laser 100 may adopt a high-power pulse laser that generates a square flat-top laser beam, the laser power is greater than or equal to 500W, and the laser pulse width can be controlled within a range of 10ns to 200ns, so as to effectively clean the surface of the workpiece, and simultaneously, avoid the scanning focusing laser beam from damaging the surface of the workpiece to be cleaned. Further, in an embodiment of the present invention, the control system 400 may include a shop floor information management system and a Manufacturing Execution System (MES).
When the surface of the workpiece to be cleaned needs to be cleaned, the control system 400 can control the preheating device 300 to be turned on first to preheat the surface of the workpiece to be cleaned, the control system 400 controls the laser 100 to be turned on, the laser 100 generates an original laser beam, and the laser focusing device 200 enables the incident original laser beam to form a scanning focusing spot and act on the surface of the workpiece to be cleaned to clean the surface of the workpiece to be cleaned. Therefore, when the surface of the workpiece to be cleaned is cleaned, the surface of the workpiece to be cleaned can be kept in a state higher than the normal temperature, so that the evaporation or the peeling of dirt, rust spots or a coating on the surface of the workpiece to be cleaned is promoted, and the efficiency of laser cleaning is effectively improved.
Referring to fig. 3, in the embodiment of the invention, the laser focusing apparatus 200 includes a laser collimator 210 and a scanning focusing device 220. The laser collimator 210 is used to collimate the incident original laser beam to form a collimated laser beam, and in practical implementation, the laser collimator 210 is a beam expander or a collimator. The scanning focusing device 220 is coupled to the laser collimator 210 for focusing the incident collimated laser beam to form a scanning focusing spot, and in particular, the scanning focusing device 220 is capable of performing both one-dimensional scanning and two-dimensional scanning.
In the embodiment of the present invention, the laser focusing apparatus 200 may further include a beam shaping device 230, where the beam shaping device 230 is disposed between the laser collimator 210 and the scanning focusing device 220, and is configured to shape a circular gaussian spot possibly existing in the collimated laser beam into a square flat-topped spot. Specifically, in the embodiment of the present invention, the beam shaping device 230 includes one or more diffractive optical elements, and the one or more diffractive optical elements can shape the circular gaussian spot into the square flat-topped spot or the circular flat-topped spot, so as to ensure that the energy of the scanning focused spot is uniformly distributed, thereby further improving the consistency of the laser cleaning effect to avoid damaging the substrate.
In an embodiment of the present invention, the laser cleaning apparatus 10 may further include a dust suction device (not shown in the figure), which is disposed on one side of the laser focusing device 200 close to the laser 100 and is located right opposite to the laser focusing device 200 to work, or is disposed on both sides of the laser focusing device 200 and is located right opposite to the laser focusing device 200 to work, and is configured to adsorb particles and dust generated in the cleaning process, so as to reduce pollution to the laser focusing device 200.
Optionally, in the embodiment of the present invention, the laser cleaning apparatus 10 may further include a walking control assembly 500. The laser 100, the laser focusing device 200 and the preheating device 300 are disposed on the walking control assembly 500, and the control system 400 is further connected with the walking control assembly 500 for controlling the working state of the walking control assembly 500. Further, in the embodiment of the present invention, the walking control assembly 500 includes a carrying vehicle 510, and a mechanical arm 520 for disposing the laser 100, the laser focusing device 200, and the preheating device 300, wherein the mechanical arm 520 is disposed on the carrying vehicle 510, and the mechanical arm 520 is a six-axis mechanical arm, and the control system 400 is respectively connected to the carrying vehicle 510 and the mechanical arm 520 to control working states of the carrying vehicle 510 and the mechanical arm 520, that is, to control a motion state, including a motion speed and a motion direction, of the carrying vehicle 510, and to control a terminal pose of the mechanical arm 520.
Through the arrangement, the bearing vehicle 510 can drive the mechanical arm 520 to move greatly, and meanwhile, the mechanical arm 520 can change the working positions of the laser 100, the laser focusing device 200 and the preheating device 300 by changing the pose of the tail end, so that the surface of a large workpiece to be cleaned can be cleaned quickly and comprehensively.
In an embodiment of the present invention, the preheating device 300 may include a connecting member 310 and a preheating device body 320, wherein the connecting member 310 includes a first end portion and a second end portion, the first end portion is disposed on the robot arm 520, and the preheating device body 320 is disposed on the second end portion. In order to facilitate the orientation adjustment of the preheating device body 320, in the embodiment of the present invention, as a first embodiment, the first end portion may rotate relative to the mechanical arm 520, and likewise, the preheating device body 320 may rotate relative to the second end portion, and as a second embodiment, the connecting member 310 may be made of a raw material piece having a deformability and a deformation-restoring capability, such as a gooseneck or a serpentine tube.
In the embodiment of the present invention, the preheating device body 320 is CO2A laser preheater or an electromagnetic induction preheater. In order to enhance the preheating effect and meet the individual heating requirements of different workpieces to be cleaned, in practical implementation, a plurality of preheating devices 300 may be provided, for example, two preheating devices may be provided, wherein the preheating device body 320 of one preheating device 300 is CO2The preheating device body 320 of the laser preheater and the other preheating device 300 is an electromagnetic induction preheater. Therefore, before the workpiece to be cleaned is cleaned, the workpiece to be cleaned can be preheated by adopting one preheating device 300 to heat alone or adopting a mode of composite heating of two preheating devices 300.
Optionally, in this embodiment of the present invention, the laser cleaning apparatus 10 further includes a laser distance measuring device 600, the laser distance measuring device 600 is disposed inside the casing of the laser focusing device 200 or connected to an outer wall of the casing of the laser focusing device 200, and in addition, an exit optical axis of the laser distance measuring device 600 and an exit optical axis of the laser focusing device 200 may be coaxial through a spectroscope. The laser distance measuring device 600 is used for measuring the spacing distance between the laser focusing device 200 and the surface of the workpiece to be cleaned. In the embodiment of the present invention, the automatic positioning of the laser focusing focus can be completed by the control system 400. Laser ranging device 600 also can be the lidar that is connected in laser focusing device 200's casing outer wall, and laser ranging device 600 also can be connected with control system 400 to through control system 400 control self operating condition, send out the police dispatch newspaper to the distance of the barrier in the working equipment of motion and the environment, and monitor the personnel that are close to workspace, and send out safety alarm when the distance is less than safe threshold value.
Referring to fig. 4, a laser cleaning method applied to the laser cleaning apparatus 10 is further provided in the embodiment of the present invention, and the laser cleaning method includes the following steps.
Step S100, a workpiece to be cleaned is set at a preset position, and the control system 400 controls the preheating device 300 to be turned on to preheat the surface of the workpiece to be cleaned.
Step S200, after the surface of the workpiece to be cleaned is preheated, the control system 400 controls the laser 100 to be started, the laser 100 generates an original laser beam, and the laser focusing device 200 enables the incident original laser beam to form a scanning focusing spot and act on the surface of the workpiece to be cleaned, so that the surface of the workpiece to be cleaned is cleaned.
In summary, the laser cleaning apparatus 10 provided in the embodiment of the present invention includes a laser 100, a laser focusing device 200, a preheating device 300, and a control system 400. The laser 100 is used to generate a primary laser beam. The laser focusing device 200 is connected to the laser emitting port of the laser 100, and is used for forming the incident original laser beam into a scanning focusing spot. The preheating device 300 is used for generating heat energy capable of acting on the surface of the workpiece to be cleaned so as to preheat the surface of the workpiece to be cleaned. The control system 400 is respectively connected with the laser 100, the laser focusing device 200 and the preheating device 300, and is used for controlling the working states of the laser 100, the laser focusing device 200 and the preheating device 300. When the surface of the workpiece to be cleaned needs to be cleaned, the control system 400 can control the preheating device 300 to be started to preheat the surface of the workpiece to be cleaned, the control system 400 controls the laser 100 to be started, the laser 100 generates an original laser beam, and the laser focusing device 200 enables the incident original laser beam to form a scanning focusing spot and act on the surface of the workpiece to be cleaned so as to clean the surface of the workpiece to be cleaned. Therefore, when the surface of the workpiece to be cleaned is cleaned, the surface of the workpiece to be cleaned can be kept in a state higher than the normal temperature, so that the evaporation or the peeling of dirt, rust spots or a coating on the surface of the workpiece to be cleaned is promoted, and the efficiency of laser cleaning is effectively improved.
Further, in the embodiment of the present invention, the laser cleaning apparatus 10 further includes a walking control assembly 500. The laser 100, the laser focusing device 200 and the preheating device are disposed on the walking control assembly 500, and the control system 400 is further connected with the walking control assembly 500 for controlling the working state of the walking control assembly 500. When the surface of a workpiece to be cleaned is cleaned through the laser cleaning equipment 10, the laser 100, the laser focusing device 200 and the preheating device 300 can be carried by the walking control assembly 500 to walk, so that the laser focusing device 200 and the preheating device 300 can move on a large scale relative to the workpiece to be cleaned, and meanwhile, the laser focusing device 200 and the preheating device 300 can move on a small scale relative to the workpiece to be cleaned under the action of the mechanical arm 520 included by the walking control assembly 500, so that the laser cleaning process is more flexible and controllable, and the laser cleaning efficiency is further improved.
In the description of the present invention, it should also be noted that the terms "disposed" and "connected" are to be construed broadly and, for example, may be fixedly connected, detachably connected, or integrally connected, unless expressly stated or limited otherwise. Either mechanically or electrically. They may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it should be noted that the terms "one end", "the other end", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that the products of the present invention are conventionally placed in use, which are merely for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or the element to which the present invention is directed must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The laser cleaning equipment is characterized by comprising a laser, a laser focusing device, a preheating device and a control system;
the laser is used for generating an original laser beam;
the laser focusing device is connected with a laser emitting port of the laser and is used for enabling an incident original laser beam to form a scanning focusing spot;
the preheating device is used for generating heat energy capable of acting on the surface of the workpiece to be cleaned so as to preheat the surface of the workpiece to be cleaned;
the control system is respectively connected with the laser, the laser focusing device and the preheating device and is used for controlling the working states of the laser, the laser focusing device and the preheating device.
2. The laser cleaning apparatus of claim 1, further comprising a walk control assembly;
the laser, the laser focusing device and the preheating device are arranged on the walking control assembly, and the control system is further connected with the walking control assembly and used for controlling the working state of the walking control assembly.
3. The laser cleaning equipment according to claim 2, wherein the walking control assembly comprises a carrying vehicle and a mechanical arm for arranging the laser, the laser focusing device and the preheating device, the mechanical arm is arranged on the carrying vehicle, and the control system is respectively connected with the carrying vehicle and the mechanical arm so as to control the working states of the carrying vehicle and the mechanical arm.
4. The laser cleaning apparatus according to claim 3, wherein the preheating device includes a connecting member and a preheating device body, the connecting member includes a first end portion and a second end portion, the first end portion is disposed on the robot arm, and the preheating device body is disposed on the second end portion.
5. The laser cleaning apparatus of claim 4, wherein the pre-heating device body is CO2A laser preheater or an electromagnetic induction preheater.
6. The laser cleaning device according to claim 3, further comprising a laser distance measuring device, wherein the laser distance measuring device is disposed inside the housing of the laser focusing device or connected to an outer wall of the housing of the laser focusing device, and an exit optical axis of the laser distance measuring device is coaxial with an exit optical axis of the laser focusing device.
7. The laser cleaning apparatus of claim 1, wherein the laser focusing device comprises a laser collimating device and a scanning focusing device, the laser collimating device is configured to collimate the incident original laser beam to form a collimated laser beam, and the scanning focusing device is coupled to the laser collimating device and configured to focus the incident collimated laser beam to form a scanning focusing spot.
8. The laser cleaning apparatus of claim 7, wherein the laser focusing device further comprises a beam shaping device disposed between the laser collimating device and the scanning focusing device for changing a spot profile of the incident collimated laser beam.
9. The laser cleaning device according to claim 1, further comprising a dust suction device disposed at one side of the laser focusing device and facing the working surface, or disposed at both sides of the laser focusing device and facing the working surface.
10. A laser cleaning method applied to the laser cleaning apparatus according to any one of claims 1 to 9, the laser cleaning method comprising:
the workpiece to be cleaned is arranged at a preset position, and the preheating device is controlled to be started through the control system so as to preheat the surface of the workpiece to be cleaned;
after the surface of the workpiece to be cleaned is preheated, the control system controls the laser to be started, the laser generates an original laser beam, and the laser focusing device enables the incident original laser beam to form a scanning focusing spot and act on the surface of the workpiece to be cleaned so as to clean the surface of the workpiece to be cleaned.
CN201910455340.6A 2019-05-29 2019-05-29 Laser cleaning equipment and method Pending CN112007918A (en)

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Application Number Priority Date Filing Date Title
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CN112007918A true CN112007918A (en) 2020-12-01

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Application publication date: 20201201