CN112007432A - Gas-solid separation system - Google Patents
Gas-solid separation system Download PDFInfo
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- CN112007432A CN112007432A CN202010987402.0A CN202010987402A CN112007432A CN 112007432 A CN112007432 A CN 112007432A CN 202010987402 A CN202010987402 A CN 202010987402A CN 112007432 A CN112007432 A CN 112007432A
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- 239000007787 solid Substances 0.000 title claims abstract description 144
- 238000000926 separation method Methods 0.000 title claims abstract description 94
- 239000007789 gas Substances 0.000 claims abstract description 291
- 239000002912 waste gas Substances 0.000 claims abstract description 129
- 238000000034 method Methods 0.000 claims abstract description 127
- 239000002245 particle Substances 0.000 claims abstract description 119
- 238000004380 ashing Methods 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
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- 238000009792 diffusion process Methods 0.000 description 3
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- 238000005507 spraying Methods 0.000 description 3
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- 238000005202 decontamination Methods 0.000 description 2
- 230000003588 decontaminative effect Effects 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
- B01D45/16—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes
Abstract
A gas-solid separation system at least comprises a cyclone capture device and a negative pressure waste gas treatment device, wherein the cyclone capture device is provided with a gas inlet and outlet cavity and a cyclone separation cavity which are communicated, the gas inlet and outlet cavity is provided with a gas inlet pipe communicated with a process waste gas source and a gas outlet pipe communicated with the negative pressure waste gas treatment device. Wherein the process waste gas provided by the process waste gas source is introduced into the gas inlet/outlet chamber through the gas inlet pipe and generates cyclone, so as to separate part of the solid particles from the process waste gas, and the process waste gas is transmitted to the negative pressure waste gas treatment device through the gas outlet pipe, so as to further separate the rest of the solid particles from the process waste gas.
Description
Technical Field
The present invention relates to a gas purification apparatus, and more particularly, to a gas-solid separation system for separating process exhaust gas and solid particles carried by the process exhaust gas by generating a cyclone.
Background
Process off-gases such as industrial off-gases are generally recognized as the source of various environmental problems. The waste gas from industrial processes is usually captured by a wet scrubber, so the mixing degree of the gas and the liquid determines the quality of the decontamination capability. In order to increase the mixing degree, the wet scrubber Tower is classified into Spray Type (Spray Type), Packed Tower Type (Packed Tower Type), Venturi Tube Type (Venturi Tube Type), and the like. The venturi tube is used for generating negative pressure by utilizing a siphon principle to prevent harmful gas from flowing back, the novel Taiwan patent No. M535595 conveying tube component and a gas-liquid mixing stirrer with the same are that the venturi tube structure is utilized to increase gas-liquid mixing degree, and the flexible tube is matched with solid dust attached to the conveying tube along with water flow disturbance to avoid blockage. However, the flexible tube is subject to a risk of breakage over time, causing damage to the equipment, and a reduction in decontamination force due to the tube wall being too small and the path being too long. Moreover, the conventional technique cannot treat the exhaust gas during maintenance, so that the maintenance must be stopped, which leads to the overall process halt. In addition, or a plurality of spare facilities must be provided, so that not only the overall cost is increased, but also the complexity of the exhaust gas treatment is increased. In addition, the process exhaust gas carries a plurality of solid particles with different particle sizes, but the larger the particle size of the solid particles, the more frequent blockage of the washing equipment is easily caused, and therefore, the cleaning is often required.
Disclosure of Invention
Accordingly, the present invention is directed to a gas-solid separation system for separating the process exhaust and the solid particles carried thereby to solve the problems of the prior art.
In order to achieve the above object, the present invention provides a gas-solid separation system at least comprising a waste gas treatment device and a cyclone capturing device, wherein the cyclone capturing device at least comprises: at least one gas inlet and outlet cavity, which is provided with a gas inlet pipe communicated with a process waste gas source and a gas outlet pipe communicated with a waste gas treatment device; and at least one cyclone separation chamber, the cyclone separation chamber is communicated with the gas inlet and outlet chamber, wherein a process waste gas provided by the process waste gas source is introduced into the gas inlet and outlet chamber through the gas inlet pipe by a suction force, so that the process waste gas generates a cyclone in the gas inlet and outlet chamber and/or the cyclone separation chamber, solid particles with a particle size larger than a default value are separated from the process waste gas by centrifugal force, and the gas outlet pipe is used for transmitting the process waste gas subjected to centrifugal separation treatment to the waste gas treatment device so as to further separate solid particles with other particle sizes from the process waste gas.
Preferably, the waste gas treatment device is a negative pressure waste gas treatment device, and the process waste gas after centrifugal separation treatment is transmitted to the negative pressure waste gas treatment device through the gas outlet pipe by the suction force generated when the negative pressure waste gas treatment device operates.
Preferably, the suction force is generated by a pump disposed between the exhaust gas treatment device and the cyclone capturing device.
Preferably, the cyclone capturing device of the present invention further comprises a Plasma ashing device (Plasma ash) disposed between the gas inlet/outlet chamber and the waste gas treatment device and/or disposed between the gas inlet/outlet chamber and the process waste gas source, so as to miniaturize the solid particles carried by the process waste gas.
Preferably, the default value is greater than 0.01 μm.
Preferably, the cyclonic separating chamber has a solids collection port.
Preferably, the cyclone capturing device of the present invention further comprises a collecting tank connected to the cyclone separating chamber for collecting the solid particles in the collecting tank through the solid particle collecting port.
Preferably, the cyclone separation chamber further comprises a first on-off valve disposed at the solid particle collecting port.
Preferably, the cyclone separation chamber or the collecting tank further comprises a discharge pipe connected to the exhaust gas treatment device for discharging solid particles to the exhaust gas treatment device.
Preferably, the discharge pipe has a second on-off valve.
Preferably, a gas inlet of the gas outlet pipe is located on the cavity of the gas inlet/outlet chamber or extends into the gas inlet/outlet chamber.
Preferably, the opening direction of the gas inlet of the gas outlet pipe is kept away from the opening direction of a solid particle collecting opening of the cyclone separation chamber and/or the gas outlet of the gas inlet pipe.
Preferably, the direction of the process waste gas entering the gas inlet of the gas outlet is substantially perpendicular or parallel to the direction of the process waste gas transported by the gas outlet.
Preferably, the value of the height of the gas plenum divided by the inner diameter of the gas plenum is between 1 and 2 and/or the value of the height of the cyclonic separation chamber divided by the inner diameter of the gas plenum is between 1 and 2.
Preferably, the process waste gas enters the gas inlet/outlet chamber and/or the cyclone separation chamber in a tangential direction substantially parallel to the chamber of the gas inlet/outlet chamber to generate a cyclone, and the process waste gas enters the gas inlet/outlet chamber at an angle of less than 90 degrees with respect to the axial direction of the chamber of the gas inlet/outlet chamber.
Preferably, the cyclone separation chamber is a conical chamber, and the gas inlet and outlet chamber is a cylindrical chamber or a conical chamber.
Preferably, the flow of the process exhaust gas into the gas access chamber is substantially less than 1,000 SLM.
Preferably, the number of the cyclone catching devices is plural, and the cyclone catching devices are connected in series and/or in parallel to communicate with each other.
Preferably, the number of the swirl catching devices is plural, and the gas outlet pipe of one of the adjacent swirl catching devices is connected in series with the gas inlet pipe of the other one of the swirl catching devices.
Preferably, the number of the swirl trapping devices is plural, and the gas inlet pipe of one of the adjacent swirl trapping devices is connected in parallel with the gas inlet pipe of the other of the gas inlet and outlet chambers, and the gas outlet pipe of the one of the adjacent swirl trapping devices is connected in parallel with the gas outlet pipe of the other of the swirl trapping devices.
In view of the above, the gas-solid separation system according to the present invention may have one or more of the following advantages:
(1) solid particles can be separated by cyclone generated from the process exhaust gas, thereby capturing the solid particles. (2) By collecting the solid particles in the collecting tank, the solid particles can be removed without stopping the process exhaust gas source or the negative pressure exhaust gas treatment device. (3) The waste gas generated by ashing process using the plasma ashing device can be pre-pulverized into solid particles before the waste gas is separated and treated by the negative pressure waste gas treatment device. (4) By connecting the exhaust pipe to the negative pressure exhaust gas treatment device, the trapped solid particles can be discharged without stopping the process exhaust gas source or the negative pressure exhaust gas treatment device. (5) By matching with the rotational flow catching device and the negative pressure waste gas treatment device, the cleaning and maintenance cycle can be prolonged, i.e. the interior of the chamber of the negative pressure waste gas treatment device does not need to be cleaned and maintained frequently. (6) By means of several sets of series and/or parallel cyclone capturing devices, the capturing rate of solid particles can be increased, thereby further prolonging the cleaning and maintenance period. (7) By reducing the surface roughness, solid particles carried by the process exhaust gas are prevented from adhering to the inner surfaces of the chamber and the tube.
Drawings
FIG. 1 is a perspective view of a cyclone capturing device of a gas-solid separation system according to a first embodiment of the present invention.
FIG. 2 is a schematic sectional side view of a cyclone capturing device of a gas-solid separation system according to a first embodiment of the present invention.
FIG. 3 is a schematic top sectional view taken along section line I-I' in FIG. 2.
FIG. 4 is a schematic perspective view of a cyclone capturing device of a gas-solid separation system according to a first embodiment of the present invention, wherein a first switch valve opens a solid particle collecting port.
FIG. 5 is a perspective view of the cyclone catching device of the gas-solid separation system in communication with the negative pressure waste gas treatment device according to the first embodiment of the present invention.
FIG. 6 is a perspective view of the cyclone catching device connected to the negative pressure exhaust gas treatment device according to the first embodiment of the present invention, wherein the collecting tank has a discharge pipe connected to the negative pressure exhaust gas treatment device.
FIG. 7 is a block diagram schematically illustrating a gas-solid separation system according to a first embodiment of the present invention.
FIG. 8 is a schematic block diagram of a gas-solid separation system of a cyclone trap device of the series type according to a second embodiment of the present invention.
FIG. 9 is a schematic block diagram of a gas-solid separation system of a cyclone trap device of a parallel type according to a second embodiment of the present invention.
FIG. 10 is a schematic block diagram of a gas-solid separation system according to a third embodiment of the present invention.
FIG. 11 is a data graph showing the solid particle removal rate of the cyclone trapping apparatus according to the first embodiment of the present invention.
Wherein:
11: rotational flow catching device
10: gas inlet and outlet cavity
12: gas inlet pipe
14: gas delivery pipe
15: air suction inlet
16. 18: communicating pipeline
20: cyclone separation cavity
21: clamping piece
22: solid particle collecting port
24: first switch valve
30: process waste gas source
40: negative pressure waste gas treatment device
41: negative pressure jet pipe
42: gas pipeline
43: inner groove
44: outer trough
45: filter assembly
46: gas-liquid separation assembly
47: discharge channel
48: spray assembly
50: collecting tank
52: discharge pipe
54: second switch valve
60: plasma ashing apparatus
72: suction chamber
74: injection pipe
76: mixing tube
78: diffusion tube
I-I': section line
Detailed Description
For the purpose of understanding the technical features, contents and advantages of the present invention and the effects achieved thereby, the present invention will be described in detail with reference to the following embodiments, wherein the drawings are used for illustration and the accompanying specification, and are not necessarily to be construed as the actual scale and precise configuration of the present invention, and the attached drawings are not to be interpreted as limiting the scope of the present invention in the actual implementation. Moreover, for ease of understanding, like components in the following embodiments are illustrated with like reference numerals. The dimensional ratios of the components shown in the drawings are merely for convenience in explanation and are not intended to be limiting.
Furthermore, the words used throughout the specification and claims have the ordinary meaning as is usually accorded to each word used in the art, in the context of this disclosure and in the context of particular integers, unless otherwise indicated. Certain terms used to describe the invention are discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.
The terms "first," "second," "third," and the like, as used herein, are not intended to be limited to the specific order or sequence presented, nor are they intended to be limiting, but rather are intended to distinguish one element from another or from another element or operation described by the same technical term.
Furthermore, as used herein, the terms "comprising," "including," "having," "containing," and the like are open-ended terms that mean including, but not limited to.
Referring to fig. 1 to 7, the gas-solid separation system of the first embodiment of the present invention at least comprises a cyclone capture device 11 disposed between the process waste gas source and the waste gas treatment device for treating the process waste gas generated from the process waste gas source by the cyclone capture device 11 and the waste gas treatment device. The cyclone catching device 11 at least comprises a gas inlet/outlet chamber 10 and a cyclone separation chamber 20 connected to each other. In the cyclone capturing device 11 of the present invention, the cavity of the gas inlet/outlet chamber 10 is provided with a gas inlet pipe 12 and a gas outlet pipe 14 having two open ends, respectively, the gas inlet pipe 12 and the gas outlet pipe 14 are hollow pipes, wherein one open end of the gas inlet pipe 12 is connected to the inside of the gas inlet/outlet chamber 10, the other open end of the gas inlet pipe 12 is directly or indirectly connected to an external process waste gas source 30, the process waste gas provided by the process waste gas source 30 is introduced by connecting the gas inlet/outlet chamber 10 and the process waste gas source 30, and the process waste gas carries a lot of dust such as solid particles with different particle sizes, and the process waste gas generates a cyclone in the gas inlet/outlet chamber 10 and/or the cyclone separating chamber 20, and the solid particles with particle sizes larger than a default value are separated from the process waste gas by centrifugal force, so as to achieve the purpose of capturing.
The process waste gas source 30 is, for example, a semiconductor process chamber capable of generating process waste gas, but is not limited thereto, as long as the process equipment capable of providing gas carrying solid particles is within the scope of the present invention. One open end of the gas outlet pipe 14 is a gas inlet 15, the gas inlet 15 is connected to the inside of the gas inlet/outlet chamber 10 and preferably extends into the inside of the gas inlet/outlet chamber 10, and the other open end of the gas outlet pipe 14 is directly or indirectly connected to an external exhaust gas treatment device, such as a negative pressure exhaust gas treatment device 40, by connecting the gas inlet/outlet chamber 10 and the negative pressure exhaust gas treatment device 40, the separated process exhaust gas is guided to the negative pressure exhaust gas treatment device 40 by suction force, so as to further capture solid particles with other particle sizes in the process exhaust gas. In other words, the exhaust gas treatment device of the present invention is exemplified by a negative pressure exhaust gas treatment device capable of generating a negative pressure suction force, but the present invention is not limited thereto. The present invention is also applicable to other types of exhaust gas treatment devices, or a suction device and/or an exhaust device such as a pump is disposed between the cyclone capture device and the exhaust gas treatment device, for example, the present invention can also selectively add a suction device and/or an exhaust device such as a pump to communicate with a gas inlet pipe and/or a gas outlet pipe, so as to transmit the process exhaust gas. Since it should be clear to those skilled in the art how to arrange the air pumping device and/or the exhaust device to transmit the process exhaust according to the description of the present invention, the detailed description is omitted here.
In the cyclone capturing device of the gas-solid separation system of the present invention, the gas inlet/outlet chamber 10 is, for example, a hollow cylindrical chamber or a hollow conical chamber with an inner diameter decreasing from top to bottom, the cyclone separation chamber 20 is, for example, a hollow conical chamber with an inner diameter decreasing from top to bottom, wherein the gas inlet/outlet chamber 10 is communicated with the cyclone separation chamber 20. The bottom of the gas inlet/outlet chamber 10 is preferably integrally formed with the top of the cyclonic separating chamber 20, but is not limited thereto. For example, the gas inlet/outlet chamber 10 of the present invention can also be fixedly or detachably connected to the cyclone separation chamber 20. In addition, the gas inlet pipe 12 is disposed on the cavity of the gas inlet/outlet chamber 10, the axial direction of the tube body of the gas inlet pipe 12 is substantially parallel to the tangential direction of the cavity of the gas inlet/outlet chamber 10, the gas inlet pipe 12 is preferably disposed on the cavity of the gas inlet/outlet chamber 10 in an inclined manner, that is, the axial direction of the tube body of the gas inlet pipe 12 is preferably not parallel to the cross section of the cavity of the gas inlet/outlet chamber 10. For example, the axial direction of the tube body of the gas introduction tube 12 is preferably a cross section relative to the cavity of the gas inlet/outlet chamber 10 at an angle of substantially less than 90 degrees.
Therefore, the process waste gas provided by the process waste gas source 30 can be introduced into the gas inlet/outlet chamber 10 through the gas inlet pipe 12 in a direction substantially parallel to the tangential direction of the chamber body of the gas inlet/outlet chamber 10, and the process waste gas can be introduced into the gas inlet/outlet chamber 10 from the top to the bottom in an inclined direction, so that the process waste gas generates a cyclone in the gas inlet/outlet chamber 10. Wherein the cyclone direction of the process exhaust gas is determined by the position of the gas inlet pipe 12 relative to the gas inlet/outlet chamber 10. For example, if the gas inlet pipe 12 is disposed at the left side of the gas inlet/outlet chamber 10, the process exhaust gas introduced into the gas inlet/outlet chamber 10 will rotate from the left side of the gas inlet/outlet chamber 10 to the right side of the gas inlet/outlet chamber 10, i.e. clockwise cyclone. On the contrary, if the gas inlet pipe 12 is disposed at the right side of the gas inlet/outlet chamber 10, the process exhaust gas introduced into the gas inlet/outlet chamber 10 will rotate from the right side of the gas inlet/outlet chamber 10 to the left side of the gas inlet/outlet chamber 10, i.e. counterclockwise cyclone.
In addition, since the gas inlet pipe 12 is disposed on the gas inlet/outlet chamber 10 from top to bottom, when the process waste gas enters the gas inlet/outlet chamber 10 from top to bottom through the gas inlet pipe 12, the process waste gas enters the cyclone separation chamber 20 along with the process waste gas, and a cyclone that travels and rotates from top to bottom is generated. Since the process waste gas carries a plurality of solid particles with different particle sizes, and the weight of the solid particles is greater than that of the gas, when the process waste gas generates cyclone, the solid particles with particle sizes substantially greater than a predetermined value, such as, but not limited to, 2 μm to 0.01 μm, can be separated from the process waste gas by the centrifugal force generated by the rotation, so as to achieve the purpose of capturing the solid particles. In addition, since the cyclone separation chamber 20 is a conical chamber with an inner diameter decreasing from top to bottom, the solid particles will rotate downward along the chamber of the cyclone separation chamber 20 to the solid particle collecting opening 22 at the bottom of the cyclone separation chamber 20, so as to achieve the purpose of separating and capturing the solid particles from the process exhaust gas. One feature of the present invention is that the process waste gas generates cyclone moving and rotating from top to bottom, so as to separate solid particles with a particle size substantially larger than a predetermined value from the process waste gas.
The cyclone separation chamber 20 of the present invention may optionally have a first on-off valve 24 disposed at the solid particle collecting port 22 for controlling the opening and closing of the solid particle collecting port 22. The form and type of the first on-off valve 24 are not particularly limited, and it may be, for example, a control valve fixedly or detachably provided at the solid particle collecting port 22, or a sealing plate detachably held at the solid particle collecting port 22 by a holding member 21. Another feature of the present invention is that the solid particles can be removed from the solid particle collecting port 22 by controlling the first on-off valve 24 to open the solid particle collecting port 22. Wherein, the clamping member 21 is omitted from some drawings for clarity of the overall illustration.
In addition, the cyclone catching device 11 of the present invention can optionally further comprise a collecting tank 50 to have a better solid particle collecting effect and effectively prevent the dust-raising phenomenon from raising solid particles, wherein the top of the collecting tank 50 is an opening corresponding to the solid particle collecting opening 22 of the cyclone separating chamber 20. The collection trough 50 may be, for example, a conical cavity, a cylindrical cavity, or any combination thereof. For example, the collecting tank 50 may be formed by combining a conical cavity with a gradually wider tube diameter from top to bottom, a cylindrical cavity, and a conical cavity with a gradually narrower tube diameter from top to bottom. In other words, the collection tank 50 of the present invention is not limited to a particular shape, as long as the collection tank 50 can store solid particles, and is within the scope of the claimed invention. Wherein the collection tank 50 may be, for example, fixedly or detachably connected to the cyclonic separation chamber 20. In the case of the collection tank 50 detachably connected to the cyclone separation chamber 20, the first switch valve 24 can be opened, removed or even omitted according to the form of the first switch valve 24, and the collection tank 50 is connected to the solid particle collection port 22 of the cyclone separation chamber 20, and the connection between the cyclone separation chamber 20 and the collection tank 50 can be clamped by the clamping member 21. Therefore, if the solid particle collecting port 22 is opened and the collecting tank 50 is connected to the solid particle collecting port 22, the separated solid particles can enter the collecting tank 50 through the solid particle collecting port 22 and be temporarily stored in the collecting tank 50. When it is necessary to remove the solid particles temporarily stored in the collecting tank 50, the user simply closes the solid particle collecting port 22 and removes the collecting tank 50, so that the solid particles can be discharged from the opening of the collecting tank 50. In other words, the present invention can remove the solid particles temporarily stored in the collecting tank 50 without stopping the process exhaust gas source 30 and/or the negative pressure exhaust gas treatment device 40, so as to achieve the effect of continuously treating the process exhaust gas.
In addition, for example, the collecting tank 50 is fixedly or detachably connected to the cyclone separation chamber 20, the collecting tank 50 of the present invention may optionally have a discharge pipe 52, wherein the discharge pipe 52 may be connected to the cyclone separation chamber 20 or the collecting tank 50, for example. For example, the collecting tank 50 may further communicate with a filter component of the negative pressure exhaust gas treatment device 40 through a discharge pipe 52, for example, so as to discharge the solid particles to the negative pressure exhaust gas treatment device 40 for cleaning treatment. The discharge pipe 52 is preferably disposed longitudinally, and the solid particles can be discharged to the negative pressure exhaust gas treatment device 40 by its own weight by using gravity, so as to remove the solid particles by filtration, for example. The drain pipe 52 of the collecting tank 50 may optionally have a second on-off valve 54, and the second on-off valve 54 may be any type of on-off valve for controlling the opening or closing of the drain pipe 52. In addition, in order to obtain a better solid particle separation effect, in the present invention, the value of the height of the gas inlet/outlet chamber 10 divided by the inner diameter of the gas inlet/outlet chamber 10 is preferably between 1 and 2 and/or the value of the height of the cyclone separation chamber 20 divided by the inner diameter of the gas inlet/outlet chamber 10 is preferably between 1 and 2. However, these values are merely examples and are not intended to limit the scope of the present invention.
In addition, in the cyclone catching device 11 of the present invention, one open end of the gas outlet pipe 14 of the gas inlet/outlet chamber 10 is the gas inlet 15, and the gas inlet 15 is connected to the inside of the gas inlet/outlet chamber 10, and the opening direction of the gas inlet 15 is preferably kept away from the solid particle collecting port 22 and/or the gas outlet of the gas inlet pipe 12, so as to prevent the solid particles from being sucked. For example, the gas outlet 14 of the gas outlet chamber 10 may extend, for example, into the gas outlet chamber 10 and its gas inlet 15 may, for example, be located at the center axis of the gas outlet chamber 10, wherein the direction of the process waste gas entering the gas inlet 15 of the gas outlet 14 is, for example, substantially perpendicular or parallel to the direction of the process waste gas output by the gas outlet 14, i.e., the opening direction of the gas inlet 15 may, for example, be upward or sideward. However, the design of the gas delivery pipe 14 and the opening direction of the gas inlet 15 are not limited to the above examples, and the gas inlet 15 of the gas delivery pipe 14 may be disposed on the cavity of the gas inlet/outlet chamber 10, or the gas inlet 15 of the gas delivery pipe 14 may be directed downward, for example, as long as the process waste gas can be sucked out, which falls within the scope of the claimed invention. In addition, the gas outlet 14 can be disposed on the sidewall or the top wall of the gas inlet/outlet chamber 10, for example, so as to extend into the gas inlet/outlet chamber 10. Furthermore, the gas inlet 15 of the gas outlet 14 can be disposed at one end or on the pipe body of the gas outlet 14, for example, and the direction of the process waste gas entering the gas inlet 15 is not limited to the direction perpendicular to the direction of the process waste gas output from the gas outlet 14, but can also be, for example, parallel to the direction of the process waste gas output from the gas outlet 14.
The other open end of the gas outlet pipe 14 of the gas inlet/outlet chamber 10 is directly or indirectly connected to the external negative pressure exhaust gas treatment device 40. Therefore, by the negative pressure suction force generated during the operation of the negative pressure exhaust gas treatment device 40, the separated process exhaust gas can be sucked from the suction port 15 of the gas outlet pipe 14 and delivered to the negative pressure exhaust gas treatment device 40 for further separation treatment of the process exhaust gas. Wherein, since the process exhaust gas has separated solid particles with a particle size substantially larger than the default value, the negative pressure exhaust gas treatment device 40 can further separate solid particles with a particle size substantially smaller than or equal to the default value from the process exhaust gas.
The negative pressure waste gas treatment device 40 is exemplified by a wet treatment device using the venturi principle, wherein the negative pressure waste gas treatment device 40 generates negative pressure by spraying a cleaning solution at a high speed through a negative pressure jet pipe 41, for example, to suck the process waste gas having completed the solid particle capture through a gas pipeline 42 of the gas outlet pipe 14 communicating with the gas inlet/outlet chamber 10. And when the cleaning liquid impacts the cleaning liquid in the inner tank 43 of the processing tank at a high speed, the process waste gas will be cut into micro-bubbles, and during the micro-bubbles moving upwards from the depth of the cleaning liquid in the inner tank 43 of the processing tank, the micro-bubbles can fully mix the solid particles with the rest particle size in the process waste gas. In addition, as more micro bubbles are generated, the micro bubbles will diffuse from the cleaning liquid in the inner tank 43 of the processing tank to the liquid surface from bottom to top, and further diffuse to the upper part of the outer tank 44 of the processing tank and break, so that the solid particles with the rest particle size in the process waste gas will drop into the cleaning liquid in the outer tank 44. Subsequently, the washing liquid in the tank 44 outside the treatment tank is filtered by the filter assembly 45, so as to remove the solid particles by filtration. Therefore, the washing liquid filtered to remove the solid particles can be re-injected into the inner tank 43 of the processing tank, thereby generating a negative pressure and cutting the process exhaust gas into micro bubbles. Wherein, when the micro bubbles are diffused above the inner tank 43 of the processing tank, the gas-liquid separating member 46 plays a role of filtering and catching moisture and solid particles and allows only gas to pass through the gas-liquid separating member 46, so that the processed exhaust gas of the drying process can be discharged from the discharge passage 47 thereof. A gas-liquid separation component may be added to the exhaust channel 47 to capture moisture and exhaust the drier process exhaust. Wherein, the negative pressure exhaust gas treatment device 40 can clean the gas-liquid separation assembly 46 by the spraying assembly 48 to drop the solid particles into the cleaning liquid in the inner tank 43 or the outer tank 44. The gas-liquid separation element 46 is, for example, a fiber bed mist eliminator comprised of glass fibers having a diameter of about 100 microns to about 1 micron, for filtering moisture and solid particles and allowing only gas to pass therethrough. The negative pressure jet pipe 41 has, for example, a suction chamber 72 and an injection pipe 74, the side wall of the suction chamber 72 has at least one suction port for communicating with the gas pipeline 42, the top end of the injection pipe 74 is a entrance port for injecting the cleaning liquid, the bottom end of the injection pipe 74 is an exit port extending into the suction chamber 72, and the cleaning liquid is injected into the suction chamber 72 to generate a negative pressure suction force, wherein the bottom of the suction chamber 72 is connected with a mixing pipe 76 and a diffusion pipe 78 in sequence, and the mixing pipe 76 and/or the diffusion pipe 78 are immersed in the cleaning liquid in the inner tank 43 to increase the time of micro-bubbles in the cleaning liquid. In addition, the interior of the suction chamber 72 and/or the gas line 42 may optionally have a cleaning member for spraying a fluid such as gas and/or liquid to clean the interior thereof.
As shown in fig. 8 and 9, the gas-solid separation system of the present invention may have a plurality of cyclone capturing devices 11, that is, besides a single set of gas inlet and outlet and cyclone separation chamber, a plurality of sets of gas inlet and outlet and cyclone separation chamber, and the number and combination are not particularly limited, so long as the purpose of separating solid particles from the process gas can be achieved, which falls within the protection scope of the present invention. In addition, the structure of the gas inlet/outlet chamber 10 and the cyclone separation chamber 20 of the cyclone catching device 11 can be the same as that of the first embodiment, and therefore, the detailed description thereof is omitted. In the second embodiment of the present invention, for example, the swirling flow capturing device 11 of the present invention can be in series, parallel, and series and parallel. In a series connection, for example, in the plurality of cyclone catching devices 11, the gas outlet pipe 14 of the former of two adjacent gas inlet/outlet chambers 10 is connected in series with the gas inlet pipe 12 of the latter. Moreover, the gas inlet pipe 12 and the gas outlet pipe 14 of the two outermost gas inlet/outlet chambers 10 are connected to the process waste gas source 30 and the negative pressure waste gas treatment device 40, respectively, as mentioned above, and therefore, the description thereof is omitted. In the case of a parallel connection, in the plurality of cyclone catching devices 11, the gas inlet pipe 12 of one of the two adjacent gas inlet/outlet chambers 10 is connected in parallel to the gas inlet pipe 12 of the other through a connecting pipe 16, for example, and one end of the connecting pipe 16 is connected to the process waste gas source 30 to introduce the process waste gas, and the gas outlet pipe 14 of one of the two adjacent gas inlet/outlet chambers 10 is connected in parallel to the gas outlet pipe 14 of the other through another connecting pipe 18, for example, and one end of the connecting pipe 18 is connected to the negative pressure waste gas treatment device 40. For example, the plurality of cyclone capturing devices 11 can have a plurality of gas in-out chambers 10 connected in parallel and in series, and a plurality of cyclone separating chambers 20 connected to the corresponding gas in-out chambers 10, wherein the parallel and series connection are the same as above, and therefore they are not described herein again.
As shown in fig. 10, in a third embodiment of the present invention, the gas-solid separation system of the present invention further comprises a Plasma Asher (Plasma Asher)60, wherein the Plasma Asher is disposed between the gas inlet/outlet chamber 10 and the negative pressure waste gas treatment device 40 of the previous embodiment, i.e. the process waste gas can enter the Plasma Asher 60 from the gas inlet/outlet chamber 10 through the gas outlet pipe 14, and after the Plasma ashing process is completed, the process waste gas can enter the negative pressure waste gas treatment device 40 through the gas outlet pipe 14 or other pipelines, so as to pre-ash the process waste gas before the negative pressure waste gas treatment device 40 separates and treats the process waste gas, thereby further miniaturizing the solid particles. The plasma ashing apparatus 60 may be any type or type of plasma ashing apparatus, so long as the particle size of the solid particles carried in the process exhaust gas is smaller than, equal to or larger than the predetermined value. Similarly, the plasma ashing apparatus may be disposed between the gas inlet/outlet chamber 10 and the process waste gas source 30, so as to pre-ash the process waste gas before the process waste gas is introduced into the gas inlet/outlet chamber 10 for centrifugal separation, thereby further miniaturizing the solid particles.
In the gas-solid separation system of the present invention, all surfaces that contact the process waste gas or the solid particles carried by the process waste gas, such as the surfaces of the gas inlet/outlet chamber, the cyclone separation chamber, the gas inlet pipe and/or the gas outlet pipe, may be subjected to a smoothing or lubricating treatment, such as polishing, coating or modification, to reduce the surface roughness, thereby preventing the solid particles from adhering to the inner wall of the chamber and/or the pipe to obstruct the flow of the process waste gas, and maintaining the flow of the process waste gas smooth. And the smaller the surface roughness is, the more the solid particle can be prevented from attaching or depositing, and the better the solid particle capturing rate is. In addition, in the cyclone trap apparatus of the present invention, the material of the gas inlet/outlet chamber, the cyclone separation chamber, the gas inlet pipe and/or the gas outlet pipe may be, for example, but not limited to, stainless steel or plastic.
Fig. 11 is a data graph showing the solid particle removal rate of the cyclone trap apparatus according to the first embodiment of the present invention, wherein the abscissa is the flow rate (flow rate) and the ordinate is the trap rate (trapped rate). The gas inlet/outlet chamber 10 of the present invention has a gas inlet pipe 12 in communication with a process waste gas source 30, wherein the process waste gas source 30 provides the process waste gas, and the flow rate of the process waste gas introduced into the gas inlet/outlet chamber 10 is, for example, less than about 1,000SLM, preferably less than about 800SLM, and more preferably less than about 200 SLM. Taking the flow rate of the process waste gas as 200SLM as an example, the capture rate of the solid particles with a particle size of 2 μm can be up to about 65%, and the capture rate of the solid particles with a particle size of 0.1 μm can be up to about 20%.
In summary, the gas-solid separation system of the present invention may have one or more of the following advantages: (1) solid particles can be separated by cyclone generated from the process exhaust gas, thereby capturing the solid particles. (2) By collecting the solid particles in the collecting tank, the solid particles can be removed without stopping the process exhaust gas source or the negative pressure exhaust gas treatment device. (3) The waste gas generated by ashing process using the plasma ashing device can be pre-pulverized into solid particles before the waste gas is separated and treated by the negative pressure waste gas treatment device. (4) By connecting the exhaust pipe to the negative pressure exhaust gas treatment device, the trapped solid particles can be discharged without stopping the process exhaust gas source or the negative pressure exhaust gas treatment device. (5) By matching with the rotational flow catching device and the negative pressure waste gas treatment device, the cleaning and maintenance cycle can be prolonged, i.e. the interior of the chamber of the negative pressure waste gas treatment device does not need to be cleaned and maintained frequently. (6) By means of several sets of series and/or parallel cyclone capturing devices, the capturing rate of solid particles can be increased, thereby further prolonging the cleaning and maintenance period. (7) By reducing the surface roughness, solid particles carried by the process exhaust gas are prevented from adhering to the inner surfaces of the chamber and the tube.
The foregoing is by way of example only, and not limiting. It is intended that all equivalent modifications or variations without departing from the spirit and scope of the present invention shall be included in the appended claims.
Claims (20)
1. A gas-solid separation system comprising at least:
an exhaust gas treatment device;
and at least one cyclone catching device at least comprising:
a gas inlet and outlet cavity, which is provided with a gas inlet pipe communicated with a process waste gas source and a gas outlet pipe communicated with the waste gas treatment device; and
a cyclone separation chamber, which is connected to the gas inlet/outlet chamber, wherein a process waste gas provided by the process waste gas source is introduced into the gas inlet/outlet chamber through the gas inlet pipe by a suction force, so that the process waste gas generates a cyclone in the gas inlet/outlet chamber and/or the cyclone separation chamber, and solid particles with a particle size larger than a predetermined value are separated from the process waste gas by centrifugal force, wherein the gas outlet pipe is used to transmit the process waste gas after centrifugal separation to the waste gas treatment device for further separating solid particles with other particle sizes from the process waste gas.
2. The gas-solid separation system of claim 1, wherein the waste gas treatment device is a negative pressure waste gas treatment device, and the process waste gas after centrifugal separation is transmitted to the negative pressure waste gas treatment device through the gas outlet pipe by the suction force generated by the operation of the negative pressure waste gas treatment device.
3. The gas-solid separation system of claim 1, wherein the suction is generated by a pump disposed between the waste gas treatment device and the cyclone capturing device.
4. The gas-solid separation system of claim 1, further comprising a plasma ashing device disposed between the gas inlet/outlet chamber and the waste gas treatment device and/or between the gas inlet/outlet chamber and the process waste gas source for minimizing solid particles carried by the process waste gas.
5. The gas-solid separation system of claim 1, wherein the default value is greater than 0.01 μm.
6. The gas-solids separation system of claim 1, wherein the cyclonic separation chamber has a solids collection port.
7. The gas-solid separation system of claim 6, further comprising a collection tank in communication with the cyclone separation chamber for collecting the solid particles in the collection tank through the solid particle collection port.
8. The gas-solid separation system of claim 7, wherein the cyclone separation chamber further comprises a first on-off valve disposed at the solid particle collecting port.
9. A gas-solid separation system according to claim 7, wherein the cyclone separation chamber or the collecting tank further comprises a discharge pipe connected to the waste gas treatment device for discharging solid particles to the waste gas treatment device.
10. The gas-solid separation system of claim 9, wherein the discharge pipe has a second on-off valve.
11. The gas-solid separation system of claim 1, wherein a gas inlet of the gas outlet pipe is located on the cavity of the gas inlet/outlet chamber or extends into the gas inlet/outlet chamber.
12. The gas-solid separation system of claim 11, wherein the opening direction of the gas inlet of the gas outlet pipe is a direction avoiding the opening direction of a solid particle collecting port of the cyclone separation chamber and/or a gas outlet of the gas inlet pipe.
13. The gas-solid separation system of claim 12, wherein the direction of the process off-gas entering the gas inlet of the gas delivery pipe is substantially perpendicular or parallel to the direction of the process off-gas transported by the gas delivery pipe.
14. The gas-solid separation system of claim 1, wherein the value of the height of the gas inlet/outlet divided by the inner diameter of the gas inlet/outlet is between 1 and 2 and/or the value of the height of the cyclonic separation chamber divided by the inner diameter of the gas inlet/outlet is between 1 and 2.
15. The gas-solid separation system of claim 1, wherein the process waste gas enters the gas inlet/outlet chamber and/or the cyclone separation chamber substantially parallel to a tangential direction of the chamber of the gas inlet/outlet chamber to generate a cyclone, and the process waste gas enters the gas inlet/outlet chamber at an angle of less than 90 degrees with respect to an axial direction of the chamber of the gas inlet/outlet chamber.
16. The gas-solid separation system of claim 1, wherein the cyclone separation chamber is a conical chamber, and the gas inlet and outlet chamber is a cylindrical chamber or a conical chamber.
17. The gas-solid separation system of claim 1, wherein the flow rate of the process off-gas introduced into the gas inlet and outlet chamber is less than 1,000 SLM.
18. The gas-solid separation system of claim 1, wherein the number of said cyclone capturing devices is plural, said cyclone capturing devices are connected in series and/or in parallel to communicate with each other.
19. The gas-solid separation system of claim 1, wherein the number of the cyclone capturing devices is plural, and the gas outlet pipe of one of the adjacent cyclone capturing devices is connected in series with the gas inlet pipe of the other of the cyclone capturing devices.
20. The gas-solid separation system of claim 1, wherein the number of the cyclone capturing devices is plural, and the gas inlet pipe of one of the adjacent cyclone capturing devices is connected in parallel with the gas inlet pipe of the other of the gas inlet and outlet chambers, and the gas outlet pipe of the one of the adjacent cyclone capturing devices is connected in parallel with the gas outlet pipe of the other of the cyclone capturing devices.
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| CN202010987402.0A CN112007432A (en) | 2020-09-18 | 2020-09-18 | Gas-solid separation system |
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| CN202010987402.0A CN112007432A (en) | 2020-09-18 | 2020-09-18 | Gas-solid separation system |
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Effective date of registration: 20210827 Address after: No. 51, Chengyin Road, Baoshan District, Shanghai Applicant after: SHANGHAI HIGH LIGHT TECH Co.,Ltd. Address before: 106 Gongming south 2nd Road, Annan District, Tainan City Applicant before: HIGHLIGHT TECHNOLOGY Corp. |
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Application publication date: 20201201 |