CN111999719B - Single photon TOF image sensor for laser radar - Google Patents
Single photon TOF image sensor for laser radar Download PDFInfo
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- CN111999719B CN111999719B CN201910391897.8A CN201910391897A CN111999719B CN 111999719 B CN111999719 B CN 111999719B CN 201910391897 A CN201910391897 A CN 201910391897A CN 111999719 B CN111999719 B CN 111999719B
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- 238000001514 detection method Methods 0.000 claims abstract description 16
- 238000010791 quenching Methods 0.000 claims abstract description 9
- 230000000171 quenching effect Effects 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 238000011084 recovery Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 230000001960 triggered effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4861—Circuits for detection, sampling, integration or read-out
- G01S7/4863—Detector arrays, e.g. charge-transfer gates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Light Receiving Elements (AREA)
Abstract
The invention discloses a single photon TOF sensor, comprising: the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche, and generating avalanche current: the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche, and generating avalanche current: an active quenching-restoring circuit for quenching the avalanche state of the single photon TOF image sensor detecting element and restoring it to the cover mode, and generating a digital signal as a STOP signal; a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal; and the digital signal reading circuit is used for reading out the time difference data. The active quenching circuit adopted by the invention can effectively reduce the dead time; and the integrated structure is easy to integrate, has small area and can realize a large-scale array type single photon image sensor.
Description
Technical Field
The invention relates to the field of single photon TOF image sensors, in particular to a single photon TOF image sensor for laser radar.
Background
The low-cost three-dimensional image sensor has good application prospect in the fields of automatic driving and the like in recent years. Three-dimensional image sensors based on single photon avalanche diodes have many advantages, such as higher sensitivity to detect weaker light; its time resolution is very low, typically between tens to hundreds of picoseconds; after quenching-recovery, the single photon avalanche diode outputs digital signals, which are convenient for subsequent system circuit design and signal processing. Conventional group III-V based single photon avalanche diodes typically operate at voltages of tens of volts and are difficult to monolithically integrate with subsequent circuitry, CMOS based single photon image sensors are low cost and easy to miniaturize.
Current TOF sensors are mainly based on two principles, indirect time-of-flight measurements based on conventional photodiodes, and direct time-of-flight measurements based on single photon detectors. The method for indirectly calculating the phase delay is used for obtaining the distance information, and the method has low requirements on an imaging system, is complex in calculation and short in detection distance. The existing single photon TOF image sensor has the problems that the dark noise of the single photon avalanche diode reduces the dynamic range of the image sensor, and the long dead time limits the photon counting rate of the device.
Disclosure of Invention
First, the technical problem to be solved
The present invention aims to provide a single photon TOF image sensor for lidar, which at least partially solves the above mentioned technical problems.
(II) technical scheme
According to an aspect of the present invention, there is provided a single photon TOF sensor comprising:
the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche to generate avalanche current;
an active quenching-restoring circuit for quenching the avalanche state of the single photon TOF image sensor detecting element and restoring it to the cover mode, and generating a digital signal as a STOP signal;
a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal;
a digital signal reading circuit for reading out the time difference data;
wherein the light pulse is emitted to the time-to-digital converter at the same time as the photon is incident to the single photon TOF image sensor detection element.
In a further embodiment, the single photon TOF image sensor detection element is a single photon avalanche diode operating in a geiger mode, and the single photon avalanche diode is a p+/N-Well structure.
In a further embodiment, the single photon avalanche diode includes a P-well located at an edge of an active region of the single photon avalanche diode.
In a further embodiment, the single photon avalanche diode further includes a polysilicon guard ring located on an upper surface of the P-well.
In a further embodiment, the active quench-recovery circuit is a delay-adjustable quench-recovery circuit with a feedback loop.
In a further embodiment, the active quench-restore circuit comprises: the two inverters, the delay chain and the active quenching enabling signal circuit are sequentially connected in series to form the feedback loop.
In a further embodiment, the single photon TOF image sensor further comprises a phase locked loop coupled to the time to digital converter for providing an 8-phase clock.
In a further embodiment, the time to digital converter is based on the phase locked loop 8 phase clock count.
In a further embodiment, the time-to-digital converter comprises:
a START phase interpolator and a STOP phase interpolator for recording the phase of the START signal and the STOP signal, respectively, relative to the phase clock of the phase-locked loop 8;
two D-flip-flop based counters for counting the START signal and the STOP signal;
and a decoder for obtaining a time difference between the START signal and the STOP signal.
In a further embodiment, the digital signal readout circuit reads out the time difference data off-chip in parallel.
(III) beneficial effects
From the above technical solution, the single photon TOF image sensor of the present invention has at least the following advantages:
(1) In the invention, the single photon avalanche diode with optimized guard ring structure adopts a polysilicon guard ring isolation device to be arranged on the upper surface of the P well at the edge of the active region, so that the dark noise between the active region and the STI can be effectively reduced;
(2) According to the active quenching circuit adopted by the invention, when the detection element of the single photon TOF image sensor is triggered in an avalanche state, the anode current of the detection element is increased, so that the feedback loop is opened to accelerate discharge, and the dead time can be effectively reduced;
(3) The single photon TOF image sensor is easy to integrate, has small area and can realize large-scale array single photon image sensor.
Drawings
FIG. 1 is a schematic diagram of a single photon TOF image sensor according to the present invention;
FIG. 2 is a schematic diagram of a single photon avalanche diode pixel structure in accordance with the present invention;
FIG. 3 is a schematic diagram of an active quench-restore circuit of a single photon TOF image sensor according to the present invention;
fig. 4 is a schematic diagram of a circuit structure of a time-to-digital converter according to the present invention.
Detailed Description
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
The invention discloses a single photon TOF image sensor for laser radar, which comprises:
the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche to generate avalanche current;
an active quenching-restoring circuit for quenching the avalanche state of the single photon TOF image sensor detecting element and restoring it to the cover mode, and generating a digital signal as a STOP signal;
a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal;
a digital signal reading circuit for reading out the time difference data;
wherein the light pulse is emitted to the time-to-digital converter at the same time as the photon is incident to the single photon TOF image sensor detection element.
In this embodiment, the single photon TOF image sensor detection element is a single photon avalanche diode operating in a geiger mode. Preferably, the single photon avalanche diode is a single photon avalanche diode based on a CMOS process, the active region structure is P+/N-well, and the edge of the single photon avalanche diode can comprise a P well protection ring to reduce the field intensity of the edge of the active region and prevent the edge from being broken down prematurely; a polysilicon guard ring may also be included on the upper surface of the P-well to reduce dark noise.
Preferably, the active quench-recovery circuit is a delay-adjustable active quench-recovery circuit with a feedback loop, the anode current of which rises when the avalanche diode is triggered so that the feedback loop opens to accelerate the discharge, thereby reducing dead time. The active quench-restore circuit includes: the two inverters, the delay chain and the active quenching enabling signal circuit are sequentially connected in series to form the feedback loop. The feedback loop is designed to be delay-adjustable, thereby achieving an adjustable dead time.
In this embodiment, the single photon TOF image sensor further includes a phase locked loop coupled to the time to digital converter for providing an 8-phase clock.
Preferably, the time converter is a phase locked loop 8-phase clock output count based time to digital converter comprising two phase interpolator circuits, two counters and a decoder. The phase interpolation circuit samples the current phases of the START and the STOP; the two counters count by a pair of clocks with opposite phases respectively, so as to avoid inaccurate counting caused by metastable state of the D trigger.
In this embodiment, after the digital signal readout circuit reads out the time difference data, subsequent digital signal processing may be performed off-chip or integrated on-chip. Preferably, the digital signal readout circuit reads out the time-of-flight signals output from the time-to-digital converter in parallel.
In a specific exemplary embodiment, the workflow of the single photon TOF image sensor is: the single photon avalanche diode working in the Geiger mode detects incident photons and generates avalanche, and a huge avalanche current is generated; an active quench-recovery circuit recovers the single photon avalanche diode from an avalanche state to a geiger mode and generates a digital signal representative of photon arrival time dependence as a STOP signal; the time-to-digital converter circuit calculates the time difference, i.e., the time of flight, between the emitted light pulse as a START signal and the pulse generated by the single photon avalanche diode induced reflection light as a STOP signal; the digital signal reading circuit reads the output digital signal out of the chip to perform the subsequent time-dependent single photon counting algorithm. The technical scheme of the invention is further described below with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a single photon TOF image sensor according to the present invention, as shown in fig. 1. The single photon TOF image sensor comprises: the device comprises a single photon TOF image sensor detection element, an active quenching-recovery circuit, a digital time converter, a digital signal reading circuit and a phase-locked loop. The single photon TOF image sensor detection element, the active quenching-recovery circuit, the digital time converter and the digital signal reading circuit are sequentially connected, and the phase-locked loop is connected with the digital time converter. The single photon TOF image sensor detecting element is used for making detected incident photons avalanche, generating avalanche current to be transmitted into the active quenching-restoring circuit, changing waveform phase to output a digital signal as a STOP signal, the time-to-digital converter is used for carrying out progression on laser pulses as a START signal and the STOP signal based on the phase-locked loop to obtain a time difference, and the digital signal reading circuit is used for reading out the time difference data to carry out subsequent processing.
As shown in fig. 2, fig. 2 is a schematic diagram of a single photon avalanche diode pixel structure according to the present invention. The single photon avalanche diode is realized based on a CMOS process and comprises a P+/N-well active region and a P-well protection ring, wherein the P-well protection ring is used for reducing the field intensity of the edge region of the active region and preventing the edge of a device from being broken down prematurely; the polysilicon guard ring reduces dark noise.
Fig. 3 is a schematic diagram of an active quenching-recovery circuit of the single photon TOF image sensor according to the present invention. The active quench-recovery circuit is an active quench-recovery circuit with a feedback loop, the principle of which is that when an avalanche diode is triggered, its anode current increases so that the feedback loop opens to accelerate the discharge, thereby reducing dead time. The feedback loop is designed to be delay-adjustable, thereby achieving an adjustable dead time.
Fig. 4 is a diagram of an implementation of the time-to-digital converter circuit of the present invention. The time-to-digital converter is based on phase-locked loop 8 phase clock counts, two phase interpolators record the phases of the START signal and STOP signal, respectively, relative to the phase-locked loop 8 phase clock, and a counter is used to calculate the complete count between the START signal and STOP signal. The design of the invention adopts a double-counter structure based on a pair of clocks with opposite phases to count respectively so as to avoid counting errors caused by metastable states of the counter. The time difference between START and STOP is then obtained by the decoder. Various component embodiments of the invention may be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. Those skilled in the art will appreciate that some or all of the functions of some or all of the components in a related device according to embodiments of the present invention may be implemented in practice using a microprocessor or Digital Signal Processor (DSP).
The term "count" as used herein refers to a time count.
Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the invention thereto, but to limit the invention thereto, and any modifications, equivalents, improvements and equivalents thereof may be made without departing from the spirit and principles of the invention.
Claims (8)
1. A single photon TOF image sensor, comprising:
the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche to generate avalanche current;
an active quenching-restoring circuit for quenching the avalanche state of the single photon TOF image sensor detecting element and restoring it to the cover mode, and generating a digital signal as a STOP signal; the active quenching-restoring circuit is a quenching-restoring circuit with adjustable delay and a feedback loop, and comprises: the two inverters, the delay chain and the active quenching enabling signal circuit are sequentially connected in series to form the feedback loop;
a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal;
a digital signal reading circuit for reading out the time difference data;
wherein the light pulse is emitted to the time-to-digital converter at the same time as the photon is incident to the single photon TOF image sensor detection element.
2. The single photon TOF image sensor according to claim 1, wherein the single photon TOF image sensor detection element is a single photon avalanche diode operating in a geiger mode and the single photon avalanche diode is a p+/N-Well structure.
3. The single photon TOF image sensor of claim 2, wherein the single photon avalanche diode comprises a P-well located at an active region edge of the single photon avalanche diode.
4. The single photon TOF image sensor of claim 3, wherein the single photon avalanche diode further comprises a polysilicon guard ring located on an upper surface of the P-well.
5. The single photon TOF image sensor according to any one of claims 1-4, further comprising a phase locked loop coupled to the time to digital converter for providing an 8-phase clock.
6. The single photon TOF image sensor of claim 5, wherein the time to digital converter is based on the phase locked loop 8 phase clock count.
7. The single photon TOF image sensor of claim 6, wherein the time to digital converter comprises:
a START phase interpolator and a STOP phase interpolator for recording the phase of the START signal and the STOP signal, respectively, relative to the phase clock of the phase-locked loop 8;
two D-flip-flop based counters for counting the START signal and the STOP signal;
and a decoder for obtaining a time difference between the START signal and the STOP signal.
8. The single photon TOF image sensor of claim 1, wherein the digital signal readout circuitry reads out the time difference data off-chip in parallel.
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| CN114488354B (en) * | 2022-02-10 | 2024-05-28 | 传周半导体科技(上海)有限公司 | DToF-based rainfall sensor |
| CN116449337B (en) * | 2023-01-12 | 2024-05-24 | 深圳阜时科技有限公司 | Pixel circuit, photoelectric sensor, toF device and electronic equipment |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6545309B1 (en) * | 2002-03-11 | 2003-04-08 | Macronix International Co., Ltd. | Nitride read-only memory with protective diode and operating method thereof |
| CN103763485A (en) * | 2014-02-17 | 2014-04-30 | 苏州超锐微电子有限公司 | Single-photon level resolution ratio image capturing chip front-end circuit module for intelligent image sensor |
| CN105181132A (en) * | 2015-08-10 | 2015-12-23 | 湘潭大学 | Pixel circuit for three-dimensional imaging chip |
| CN106712752A (en) * | 2016-12-09 | 2017-05-24 | 南京邮电大学 | Quenching reset circuit for single photon avalanche diode detector |
| CN107063452A (en) * | 2017-04-07 | 2017-08-18 | 电子科技大学 | A kind of single-photon avalanche photodiode capacitance quenching circuit |
| CN107806931A (en) * | 2017-09-30 | 2018-03-16 | 东南大学 | Gate complementary type Photo Counting System |
| CN108270436A (en) * | 2016-12-30 | 2018-07-10 | 中国科学院电子学研究所 | Control code latch cicuit and clock data recovery circuit |
| CN109100737A (en) * | 2017-06-21 | 2018-12-28 | 西克股份公司 | For measuring the photoelectric sensor and method of the distance of object |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2520232A (en) * | 2013-08-06 | 2015-05-20 | Univ Edinburgh | Multiple Event Time to Digital Converter |
| US9874629B2 (en) * | 2013-12-23 | 2018-01-23 | Oulun Yliopisto | Distance measurement device, receiver thereof and method of distance measurement |
| CN109443555B (en) * | 2018-10-29 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | Single photon detection system based on active quenching active recovery circuit |
-
2019
- 2019-05-10 CN CN201910391897.8A patent/CN111999719B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6545309B1 (en) * | 2002-03-11 | 2003-04-08 | Macronix International Co., Ltd. | Nitride read-only memory with protective diode and operating method thereof |
| CN103763485A (en) * | 2014-02-17 | 2014-04-30 | 苏州超锐微电子有限公司 | Single-photon level resolution ratio image capturing chip front-end circuit module for intelligent image sensor |
| CN105181132A (en) * | 2015-08-10 | 2015-12-23 | 湘潭大学 | Pixel circuit for three-dimensional imaging chip |
| CN106712752A (en) * | 2016-12-09 | 2017-05-24 | 南京邮电大学 | Quenching reset circuit for single photon avalanche diode detector |
| CN108270436A (en) * | 2016-12-30 | 2018-07-10 | 中国科学院电子学研究所 | Control code latch cicuit and clock data recovery circuit |
| CN107063452A (en) * | 2017-04-07 | 2017-08-18 | 电子科技大学 | A kind of single-photon avalanche photodiode capacitance quenching circuit |
| CN109100737A (en) * | 2017-06-21 | 2018-12-28 | 西克股份公司 | For measuring the photoelectric sensor and method of the distance of object |
| CN107806931A (en) * | 2017-09-30 | 2018-03-16 | 东南大学 | Gate complementary type Photo Counting System |
Non-Patent Citations (2)
| Title |
|---|
| "Single-photon avalanche diode array with column-level time-to-digital converter for unmanned vehicle";Gang Xie et al.;《2017 IEEE 2nd International Conference on Opto-Electronic Information Processing (ICOIP)》;20170911;第49-54页 * |
| "基于APD线列的单光子探测计数研究";张常年等;《计算机测量与控制》;20160925;第24卷(第9期);第184-187页 * |
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