CN111999719A - Single photon TOF image sensor for laser radar - Google Patents
Single photon TOF image sensor for laser radar Download PDFInfo
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- CN111999719A CN111999719A CN201910391897.8A CN201910391897A CN111999719A CN 111999719 A CN111999719 A CN 111999719A CN 201910391897 A CN201910391897 A CN 201910391897A CN 111999719 A CN111999719 A CN 111999719A
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- 238000011084 recovery Methods 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 238000010791 quenching Methods 0.000 claims abstract description 15
- 230000000171 quenching effect Effects 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000001960 triggered effect Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4861—Circuits for detection, sampling, integration or read-out
- G01S7/4863—Detector arrays, e.g. charge-transfer gates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Light Receiving Elements (AREA)
Abstract
The invention discloses a single photon TOF sensor, which comprises: a single photon TOF image sensor detecting element for detecting incident photons and generating avalanche, generating avalanche current: a single photon TOF image sensor detecting element for detecting incident photons and generating avalanche, generating avalanche current: the active quenching-recovery circuit is used for quenching the avalanche state of the detection element of the single-photon TOF image sensor, recovering the avalanche state to the Geiger mode and generating a digital signal as a STOP signal; a time-to-digital converter for calculating a time difference between receiving the optical pulse as a START signal and receiving the STOP signal; and the digital signal reading circuit is used for reading the time difference data. The active quenching circuit adopted by the invention can effectively reduce the dead time; and the array type single photon image sensor is easy to integrate, has small area and can realize large-scale array type single photon image sensors.
Description
Technical Field
The invention relates to the field of single photon TOF (time of flight) image sensors, in particular to a single photon TOF image sensor for a laser radar.
Background
The low-cost three-dimensional image sensor has a good application prospect in the fields of automatic driving and the like in recent years. Three-dimensional image sensors based on single photon avalanche diodes have many advantages, such as higher sensitivity for detecting weaker light; its temporal resolution is very low, typically between tens to hundreds of picoseconds; after the single photon avalanche diode is quenched and restored, the output signal is a digital signal, and subsequent system circuit design and signal processing are facilitated. The traditional III-V group single photon avalanche diode-based working voltage is high and is usually dozens of volts, and is difficult to be integrated with a follow-up circuit in a single chip mode, and the CMOS group single photon image sensor is low in cost and easy to be integrated in a small mode.
Current TOF sensors are mainly based on two principles, indirect time-of-flight measurement based on conventional photodiodes, and direct time-of-flight measurement based on single photon detectors. The former method obtains distance information by using an indirect phase delay calculation method, which has low requirements on an imaging system but has more complex calculation and shorter detection distance. The existing single photon TOF image sensor has the problems that the dynamic range of the image sensor is reduced by the dark noise of a single photon avalanche diode, and the photon counting rate of the device is limited by long dead time.
Disclosure of Invention
Technical problem to be solved
It is an object of the present invention to provide a single photon TOF image sensor for lidar to at least partially address the above technical problem.
(II) technical scheme
According to an aspect of the invention, there is provided a single photon TOF sensor comprising:
the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche to generate avalanche current;
the active quenching-recovery circuit is used for quenching the avalanche state of the detection element of the single-photon TOF image sensor, recovering the avalanche state to the Geiger mode and generating a digital signal as a STOP signal;
a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal;
a digital signal readout circuit for reading out the time difference data;
wherein the time of emission of the light pulse to the time-to-digital converter is the same as the time of incidence of the photons to the single photon TOF image sensor detection element.
In a further embodiment, the single photon TOF image sensor detecting element is a single photon avalanche diode operating in geiger mode and the single photon avalanche diode is of P +/N-Well construction.
In a further embodiment, the single photon avalanche diode includes a P-well at the edge of the active region of the single photon avalanche diode.
In a further embodiment, the single photon avalanche diode further comprises a polysilicon guard ring located at an upper surface of the P-well.
In a further embodiment, the active quench-recovery circuit is a tunable delay quench-recovery circuit with a feedback loop.
In a further embodiment, the active quench-recovery circuit comprises: the active quenching circuit comprises two inverters, a delay chain and an active quenching enabling signal circuit, wherein the two inverters, the delay chain and the active quenching enabling signal circuit are sequentially connected in series to form the feedback loop.
In a further embodiment, the single photon TOF image sensor further comprises a phase locked loop connected to the time to digital converter for providing an 8-phase clock.
In a further embodiment, the time-to-digital converter counts based on the phase locked loop 8-phase clock.
In a further embodiment, the time-to-digital converter comprises:
a START phase interpolator and a STOP phase interpolator for recording the phases of the START signal and the STOP signal, respectively, relative to a phase-locked loop 8-phase clock;
two D flip-flop based counters for counting the START signal and the STOP signal;
and a decoder for obtaining a time difference between the START signal and the STOP signal.
In a further embodiment, the digital signal readout circuit reads out the time difference data in parallel off-chip.
(III) advantageous effects
According to the technical scheme, the single photon TOF image sensor has the following beneficial effects:
(1) in the invention, the single photon avalanche diode with the optimized guard ring structure adopts a polysilicon guard ring isolation device to be arranged on the upper surface of a P trap at the edge of an active area, so that the dark noise between the active area and STI can be effectively reduced;
(2) according to the active quenching circuit, when the detection element of the single photon TOF image sensor is triggered in an avalanche state, the anode current rises, so that the feedback loop is opened to accelerate discharge, and the dead time can be effectively reduced;
(3) the single photon TOF image sensor is easy to integrate and small in area, and can realize a large-scale array type single photon image sensor.
Drawings
FIG. 1 is a schematic diagram of the structure of a single photon TOF image sensor of the present invention;
FIG. 2 is a schematic diagram of a single photon avalanche diode pixel structure according to the present invention;
FIG. 3 is a schematic diagram of the active quench-recovery circuit of the single photon TOF image sensor of the present invention;
fig. 4 is a schematic diagram of a time-to-digital converter circuit according to the present invention.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
The invention discloses a single photon TOF image sensor for a laser radar, which comprises:
the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche to generate avalanche current;
the active quenching-recovery circuit is used for quenching the avalanche state of the detection element of the single-photon TOF image sensor, recovering the avalanche state to the Geiger mode and generating a digital signal as a STOP signal;
a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal;
a digital signal readout circuit for reading out the time difference data;
wherein the time of emission of the light pulse to the time-to-digital converter is the same as the time of incidence of the photons to the single photon TOF image sensor detection element.
In this embodiment, the single photon TOF image sensor detecting element is a single photon avalanche diode operating in geiger mode. Preferably, the single photon avalanche diode is a single photon avalanche diode based on a CMOS process, the active region structure of the single photon avalanche diode is P +/N-well, and the edge of the single photon avalanche diode can comprise a P well protection ring to reduce the field intensity of the edge of the active region and prevent the edge from being broken down prematurely; the P-well structure can further comprise a polysilicon protection ring which is positioned on the upper surface of the P-well and used for reducing dark noise.
Preferably, the active quenching-recovery circuit is a time-delay adjustable active quenching-recovery circuit with a feedback loop, and when the avalanche diode is triggered, the anode current of the avalanche diode rises to open the feedback loop to accelerate discharge, so that dead time is reduced. The active quench-recovery circuit includes: the active quenching circuit comprises two inverters, a delay chain and an active quenching enabling signal circuit, wherein the two inverters, the delay chain and the active quenching enabling signal circuit are sequentially connected in series to form the feedback loop. The feedback loop is designed to be adjustable in time delay, so that dead time is adjustable.
In this embodiment, the single photon TOF image sensor further comprises a phase locked loop connected to the time-to-digital converter for providing an 8-phase clock.
Preferably, the time converter is a time to digital converter based on a phase locked loop 8-phase clock output count, the time converter circuit comprising two phase interpolator circuits, two counters and a decoder. Wherein the phase interpolation circuit samples the current phase of START and STOP; the two counters respectively count by a pair of clocks with opposite phases so as to avoid inaccurate counting caused by the metastable state of the D flip-flop.
In this embodiment, after the digital signal reading circuit reads out the time difference data, the subsequent digital signal processing may be implemented off-chip or integrated on-chip. Preferably, the digital signal readout circuit reads out the time-of-flight signals output from the time-to-digital converters in parallel.
In a specific exemplary embodiment, the workflow of the single photon TOF image sensor is as follows: the single photon avalanche diode working in the Geiger mode detects incident photons and generates avalanche to generate a huge avalanche current; the active quenching-recovery circuit recovers the single-photon avalanche diode from an avalanche state to a Geiger mode and generates a digital signal representing the correlation of the arrival time of the photons as a STOP signal; the time-to-digital converter circuit calculates the time difference between the emitted light pulse as the START signal and the pulse generated by the single photon avalanche diode induced reflected light as the STOP signal, namely the flight time; and the digital signal reading circuit reads the output digital signal out of the chip to realize the subsequent time-dependent single photon counting algorithm. The technical scheme of the invention is further explained by combining the attached drawings.
As shown in fig. 1, fig. 1 is a schematic structural diagram of a single photon TOF image sensor provided by the invention. The single photon TOF image sensor comprises: the single photon TOF image sensor comprises a single photon TOF image sensor detection element, an active quenching-recovery circuit, a digital time converter, a digital signal reading circuit and a phase-locked loop. The single-photon TOF image sensor detection element, the active quenching-recovery circuit, the digital time converter and the digital signal reading circuit are sequentially connected, and the phase-locked loop is connected with the digital time converter. The single photon TOF image sensor detection element generates avalanche current to be transmitted into the active quenching-recovery circuit according to detected incident photon avalanche, waveform phase changes to output a digital signal to serve as a STOP signal, the time-to-digital converter performs series processing on a laser pulse serving as a START signal and the STOP signal based on the phase-locked loop to obtain a time difference, and the digital signal reading circuit reads out the time difference data to perform subsequent processing.
As shown in fig. 2, fig. 2 is a schematic view of a single photon avalanche diode pixel structure of the present invention. The single photon avalanche diode is realized based on a CMOS (complementary metal oxide semiconductor) process and comprises a P +/N-well active area and a P-well protection ring, wherein the P +/N-well protection ring is used for reducing the field intensity of the edge area of the active area and preventing the premature breakdown of the edge of a device; polysilicon guard rings to reduce dark noise.
As shown in fig. 3, fig. 3 is a schematic structural diagram of an active quenching-recovery circuit of the single photon TOF image sensor of the invention. The active quench-recovery circuit is an active quench-recovery circuit with a feedback loop whose principle is that when the avalanche diode is triggered, its anode current rises causing the feedback loop to open accelerating the discharge, thereby reducing the dead time. The feedback loop is designed to be adjustable in time delay, so that dead time is adjustable.
FIG. 4 is a circuit implementation diagram of a time-to-digital converter according to the present invention. The time-to-digital converter counts based on a phase-locked loop 8-phase clock, two phase interpolators record the phases of the START and STOP signals, respectively, relative to the phase-locked loop 8-phase clock, and a counter is used to calculate a complete count between the START and STOP signals. The design of the invention adopts a dual-counter structure which respectively counts based on a pair of clocks with opposite phases to avoid counting errors caused by the metastable state of the counter. The time difference between START and STOP is then obtained by the decoder. The various component embodiments of the invention may be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. Those skilled in the art will appreciate that a microprocessor or Digital Signal Processor (DSP) may be used in practice to implement some or all of the functionality of some or all of the components in the associated apparatus according to embodiments of the invention.
Note that the count in the present invention refers to a time count.
Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features included in other embodiments, rather than other features, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A single photon TOF sensor comprising:
the single photon TOF image sensor detection element is used for detecting incident photons and generating avalanche to generate avalanche current;
the active quenching-recovery circuit is used for quenching the avalanche state of the detection element of the single-photon TOF image sensor, recovering the avalanche state to the Geiger mode and generating a digital signal as a STOP signal;
a time-to-digital converter for calculating a time difference between receiving an optical pulse as a START signal and receiving the STOP signal;
a digital signal readout circuit for reading out the time difference data;
wherein the time of emission of the light pulse to the time-to-digital converter is the same as the time of incidence of the photons to the single photon TOF image sensor detection element.
2. The single photon TOF image sensor according to claim 1 wherein said single photon TOF image sensor detecting element is a single photon avalanche diode operating in geiger mode and said single photon avalanche diode is of P +/N-Well construction.
3. The single photon TOF image sensor according to claim 2 wherein said single photon avalanche diode comprises a P-well located at the edge of the active area of said single photon avalanche diode.
4. The single photon TOF image sensor of claim 3 in which said single photon avalanche diode further comprises a polysilicon guard ring on the upper surface of said P-well.
5. The single photon TOF image sensor of claim 1 in which said active quench-recovery circuit is a time delay tunable quench-recovery circuit with a feedback loop.
6. The single photon TOF image sensor according to claim 5, wherein said active quench-recovery circuit comprises: the active quenching circuit comprises two inverters, a delay chain and an active quenching enabling signal circuit, wherein the two inverters, the delay chain and the active quenching enabling signal circuit are sequentially connected in series to form the feedback loop.
7. The single photon TOF image sensor according to any of the claims 1 to 6, further comprising a phase locked loop connected to said time-to-digital converter for providing an 8-phase clock.
8. The single photon TOF image sensor according to claim 7, wherein said time to digital converter counts based on said phase locked loop 8 phase clock.
9. The single photon TOF image sensor according to claim 8, wherein said time-to-digital converter comprises:
a START phase interpolator and a STOP phase interpolator for recording the phases of the START signal and the STOP signal, respectively, relative to a phase-locked loop 8-phase clock;
two D flip-flop based counters for counting the START signal and the STOP signal;
and a decoder for obtaining a time difference between the START signal and the STOP signal.
10. The single photon TOF image sensor according to claim 1 wherein said digital signal readout circuit reads out said time difference data in parallel off-chip.
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| CN116449337A (en) * | 2023-01-12 | 2023-07-18 | 深圳阜时科技有限公司 | Pixel circuit, photoelectric sensor, toF device and electronic equipment |
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| CN111999719B (en) | 2024-03-12 |
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