CN111983812A - Micromirror laser scanning near-to-eye display system - Google Patents
Micromirror laser scanning near-to-eye display system Download PDFInfo
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- CN111983812A CN111983812A CN202010947719.1A CN202010947719A CN111983812A CN 111983812 A CN111983812 A CN 111983812A CN 202010947719 A CN202010947719 A CN 202010947719A CN 111983812 A CN111983812 A CN 111983812A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/0101—Head-up displays characterised by optical features
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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Abstract
The invention provides a micromirror laser scanning near-to-eye display system. The micro-mirror laser scanning near-to-eye display system comprises an MEMS micro-mirror scanning device, a collimating mirror, an incoupling grating, a waveguide and an outcoupling grating, wherein the incoupling grating is arranged on the surface of the waveguide, the MEMS micro-mirror scanning device comprises a light source for emitting light beams, the light beams emitted by the light source are changed into parallel light beams after passing through the collimating mirror, the parallel light beams are vertically incident to the incoupling grating, the light beams vertically incident to the incoupling grating are coupled into the waveguide by the incoupling grating for transmission, and the light beams transmitted by the waveguide are totally reflected in the waveguide and are coupled out by the outcoupling grating; the coupling-out grating is a holographic grating, and the light beams of the waveguide are coupled out by the coupling-out grating to be convergent light beams and converged in human eyes. The invention avoids the limit of light beam by waveguide total reflection angle and the generation of VAC, and simultaneously, the light is coupled in and out at an angle, and the uniformity of the displayed image is good.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of waveguide near-to-eye display, in particular to a micromirror laser scanning near-to-eye display system.
[ background of the invention ]
Referring to fig. 1, fig. 1 shows an Augmented Reality (AR) waveguide near-eye display device in the prior art, wherein a display image source is provided by a microdisplay 1, and light beams emitted by different pixels on the microdisplay 1 are converted into incident light beams with different angles by a collimating mirror 2, so as to be coupled into a waveguide 4 by an in-coupling grating 3. The coupled-in light beam propagates in the waveguide 4 in the form of total reflection, and a light beam having a partial energy each time it encounters the coupling-out grating 5 is coupled out of the waveguide into the human eye 6. Finally, the light beams of different pixel points enter human eyes 6 at different angles, so that display images at infinity can be seen.
However, the display device in fig. 1 has at least the following three disadvantages:
firstly, because the waveguide is propagated in a total reflection mode, a Field of View (FOV) is limited by the total reflection angle of the waveguide, and a large FOV cannot be realized;
second, the displayed image is always at infinity, so that a Vergence-accommodation Conflict (VAC) occurs when the human eyes focus at near.
And thirdly, different pixel points are coupled in and out by the grating at different angles, the diffraction efficiency of the grating to light beams with different incident angles is different, the coupling-out positions of the light beams with different angles on the coupling-out grating are different, and the phenomenon of uneven brightness and color of an image seen by human eyes can occur by combining the two factors.
[ summary of the invention ]
The invention provides a micromirror laser scanning near-to-eye display system which can enlarge the FOV size, avoid the occurrence of VAC and simultaneously has good uniformity of displayed images.
The invention provides a micromirror laser scanning near-eye display system, comprising: the MEMS micro-mirror scanning device comprises a light source for emitting light beams, the light beams emitted by the light source are changed into parallel light beams after passing through the collimating mirror, the parallel light beams are vertically incident on the coupling-in grating, the light beams vertically incident on the coupling-in grating are coupled into the waveguide by the coupling-in grating for transmission, and the light beams transmitted by the waveguide are totally reflected in the waveguide and are coupled out by the coupling-out grating; the coupling-out grating is a holographic grating, and the light beams of the waveguide are coupled out by the coupling-out grating to be convergent light beams and converged in human eyes. MEMS micro-mirror scanning device
Preferably, the MEMS micro-mirror scanning device includes the light source, the beam combining mirror and the MEMS micro-mirror, which are sequentially disposed along the propagation path of the light beam, the light source is a RGB three-color light source, the light beam emitted by the light source is transmitted to the MEMS micro-mirror after being integrated by the beam combining mirror, and the MEMS micro-mirror scans and displays the light beam. MEMS micro-mirror scanning device
Preferably, the surface of the MEMS micro-mirror is metallized to increase the light reflectivity in the visible wavelength band.
Preferably, the incoupling grating is a surface relief grating or a volume holographic grating, and the diffraction angle of the light beam in the incoupling grating is larger than the total reflection angle of the waveguide.
Preferably, the incoupling grating and the outcoupling grating are both arranged on one side of the waveguide close to the MEMS micro-mirror scanning device.
Preferably, the coupling grating is disposed on a side of the waveguide away from the MEMS micro-mirror scanning device.
Preferably, the coupling-out grating includes at least two layers of the holographic gratings arranged in a stacked manner, and is used for respectively exposing the RGB light beams.
Preferably, the holographic grating records the RGB three-color beams respectively using multiple exposures.
Preferably, the light beams coupled out by the coupling grating are projected to different positions on the retina of a human eye to form near-eye vision of an image, and the field angle of the near-eye vision satisfies the following conditions:
wherein, FOV is the field angle, s is the area of the holographic grating, and d is the distance from the light beam convergence point to the waveguide.
Preferably, the incoupling grating and the outcoupling grating are both volume holographic gratings, the incoupling grating and the outcoupling grating are arranged on the same side of the waveguide, and the area of the outcoupling grating is larger than that of the incoupling grating.
Preferably, the incoupling grating and the outcoupling grating are both arranged on one side of the waveguide close to the MEMS micromirror scanning device, and the incoupling grating and the outcoupling grating are both transmission gratings.
Preferably, the incoupling grating and the outcoupling grating are both disposed on a side of the waveguide away from the MEMS micromirror scanning device, and both the incoupling grating and the outcoupling grating are reflective gratings.
Preferably, for the incoupling grating, a parallel light beam incident perpendicularly to the waveguide is a reference light, and an incident angle of an object light incident on a central light ray of the incoupling grating satisfies:
n0sinγ＝n1sinβ
wherein, gamma is the incident angle of object light, beta is the refraction angle of waveguide, n0Is the refractive index of air, n1Is the waveguide index.
Compared with the prior art, the micromirror laser scanning near-eye display system provided by the invention avoids the limitation of the waveguide total reflection angle of the light beam by adjusting the angle of the light beam entering the coupling grating, and avoids the generation of VAC by converging the HOE of the coupling grating to the center of the human eye crystalline lens, and meanwhile, the light beams are coupled in and out at an angle, and the uniformity of the displayed image is good.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a schematic diagram of a prior art AR waveguide near-to-eye display;
FIG. 2 is a schematic diagram of a micromirror laser scanning near-eye display system according to an embodiment of the invention;
FIG. 3 is a schematic diagram of the MEMS micro-mirror laser scanning display device in FIG. 2;
fig. 4 is a schematic diagram of recording an HOE according to an embodiment of the present invention;
fig. 5 is a schematic diagram illustrating adjustment of the incoupling grating HOE and the incoupling grating HOE according to an embodiment of the present invention;
fig. 6 is a recording schematic of the HOE coupled into the grating of fig. 5.
[ detailed description ] embodiments
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 2, the micromirror laser scanning near-eye display system provided by the present invention comprises: the MEMS micro-mirror scanning device 10 includes a light source for emitting a light beam, the light beam emitted by the light source passes through the collimating mirror 20, becomes a parallel light beam, and then perpendicularly enters the coupled-in grating 30, the coupled-in grating 30 is a surface relief grating or a volume holographic grating, and a diffraction angle 31 θ of the coupled-in grating 30 is greater than a total reflection angle of the waveguide 40; the light beams vertically incident to the incoupling grating 30 are coupled into the waveguide 40 by the incoupling grating 30 for transmission, and the light beams after being coupled into the waveguide 40 are still equal to each other; the incoupling grating 30 is placed on the surface of the waveguide 40, the light beam transmitted by the waveguide 40 is totally reflected in the waveguide 40 and coupled out by the outcoupling grating 50, the outcoupling grating 50 is a holographic grating, and the light beam of the waveguide 40 is coupled out by the outcoupling grating 50 as a convergent light beam and converged in a human eye 60; the point at which the light beams converge is the center 61 of the lens of the human eye 60 and is then projected directly onto the retina 62 of the human eye 60, resulting in near-to-eye vision.
The outcoupling grating 50 is a Holographic Optical Element (HOE), and the outcoupling grating 50 is disposed on the surface of the waveguide 40. The incoupling grating 30 and the outcoupling grating 50 may be placed on the upper surface 41 or the lower surface 42 of the waveguide 40, the incoupling grating 30 and the outcoupling grating 50 are transmissive incoupling grating/outcoupling grating when placed on the upper surface 41 of the waveguide 40, the incoupling grating 30 and the outcoupling grating 50 are reflective incoupling grating/outcoupling grating when placed on the lower surface 42 of the waveguide 40, the upper surface 41 and the lower surface 42 of the waveguide 40 are relative to the light source, that is, the MEMS micro-mirror scanning device 10 is said, the surface on the same side as the light source is the upper surface 41, and the opposite surface is the lower surface 42. In the present embodiment, a reflective in-grating/out-grating is taken as an example.
The light beams coupled out by the coupling grating are projected to different positions on the retina of the human eye to form near-to-eye vision of images, the light beams emitted in different directions carry information of different pixel points of an image source, the images formed by all the pixel points are directly projected to different positions on the retina 62 of the human eye to form image vision, as all the light beams pass through the center 61 of the crystalline lens of the human eye, the focusing of the crystalline lens does not influence the transmission of the light beams, and when the human eye 60 focuses and converges the convergence to observe natural real objects with different distances, virtual digital images can be clearly displayed independently of the focusing of the crystalline lens, thereby avoiding VAC. Since the light rays of all the pixel points are parallel to each other and are coupled into the waveguide at the same angle, a near-eye visual Field angle (FOV) 63 is not limited by the waveguide total reflection condition, and the near-eye visual Field angle satisfies:
where FOV is the visual-acoustic angle, s is the area of the HOE, and d is the distance from the beam convergence point to the waveguide.
Therefore, the light rays incident on the incoupling grating and the outcoupling grating HOE are parallel to each other and have the same incident angle, so that there is no problem of different diffraction efficiencies at different incident angles and the human eye will see an image with uniform brightness.
Referring to fig. 3, fig. 3 shows that, compared to the Micro display technology in the prior art, such as Liquid Crystal On Silicon (LCOS), Digital Micro-mirror array (DMD), Micro-Organic Light Emitting Diode (Micro-OLED), etc., the MEMS Micro-mirror scanning Device 10 has the advantages of small display chip, wide color gamut, high contrast, and no focusing, and is suitable for portable Micro projection systems, near-eye display systems, and locomotive display systems, and has a broad market prospect. The MEMS micro-mirror is obtained by etching a bulk silicon micro-machining process, silicon has very good mechanical property, and a rotating shaft made of the MEMS micro-mirror can bear high-speed rotation without fracture. The MEMS micro-mirror scanning device 10 includes along the propagation path of light beam sets gradually light source, beam combining mirror 15 and MEMS micro-mirror 11, the light source is RGB three-color light source, RGB three-color light source is R12, G13 and B14 respectively, the light beam that the light source sent by beam combining mirror 15 transmits to after the integration MEMS micro-mirror 11, MEMS micro-mirror 11 scans and displays the light beam. The surface of the MEMS micro-mirror 11 is plated with metal to increase the light reflectivity in the visible light band, and specifically, in this embodiment, the surface of the mirror is plated with Gold (Au) followed by Aluminum (Al) to increase the light reflectivity in the visible light band.
As shown in fig. 3, the MEMS micro-mirror 11 rotates around a pivot 110, three laser light sources R12, G13, and B14 in a color mode (Red Green Blue, RGB) reach the surface of the MEMS micro-mirror 11 after passing through the beam combiner 15 and the mirror 16, and the color of each pixel point is controlled by adjusting the brightness of the three lasers in RGB.
Referring to fig. 4, the HOE101 employs volume holographic recording, and for RBG three-color display, the use of the HOE101 includes single-layer multiple exposure or multi-layer superposition separate recording. Specifically, the recorded object light 102 is a spherical wave converging to a point o103, the reference light 104 is a plane wave, and the reference light 104 can be coupled into the waveguide 10 by using a prism 105 having a refractive index close to that of the waveguide 10. For RBG three-color display, the HOE101 needs to respectively use RGB three-color laser to expose the RBG three-color display for multiple times, so that RBG three-object light information can be recorded; or overlapping with multiple layers of HOEs, specifically in one embodiment, using three layers of HOEs, each layer recording object light information of one color in the RBG; in another embodiment, two layers of HOEs are used, one layer recording one color and the other layer recording object light information of two other colors.
Here, HOE generally employs a volume hologram recording method, which has a good selectivity for wavelength, and diffracts only light of three wavelengths of RGB to be recorded, while light of other wavelengths can directly transmit. Most of the ambient light can pass through the waveguide and HOE to reach the human eye so that the displayed image can be superimposed on the surrounding environment.
Referring to fig. 5, in an embodiment, to expand the FOV of the near-eye display of the human eye, the incoupling grating 30 and the outcoupling grating 50 are both set to be HOE, the HOE of the incoupling grating 30 and the HOE of the outcoupling grating 50 are placed on the upper surface or the lower surface of the waveguide 40, the HOE of the outcoupling grating 50 is larger than the HOE of the incoupling grating 30, and the FOV is expanded by increasing the HOE area of the outcoupling grating 50. Specifically, when both the HOE of the in-coupling grating 30 and the HOE of the out-coupling grating 50 are placed on the upper surface 41 of the waveguide 40, the HOE is a transmissive HOE, and when both the HOE of the in-coupling grating 30 and the HOE of the out-coupling grating 50 are placed on the lower surface 42 of the waveguide 40, the HOE is a reflective HOE. In the present embodiment, for example, the HOE of the in-coupling grating 30 and the HOE of the out-coupling grating 50 are both disposed on the upper surface 41 of the waveguide 40.
To enlarge the FOV, the area of the HOE needs to be increased, and the area of the in-coupling grating 30 needs to be increased to enlarge the FOV since the light rays transmitted in the waveguide 40 are parallel to each other, which results in an increase in the volume of the collimating mirror 20 and the MEMS micromirror scanning device 10, which is not favorable for the overall volume and weight control, and reduces the portability. Thus, in particular in this embodiment, by replacing the in-coupling grating 30 with an HOE, a parallel beam of light incident perpendicularly can be diffracted into a diverging beam of light that can be transmitted through the waveguide with only a minimum diffraction angle that is greater than the angle of total reflection of the waveguide. Due to the beam divergence characteristic, the contact area with the waveguide interface at each total reflection is larger than that at the last total reflection. The area of the HOE coupled out of the grating 50 is thus larger than the area of the HOE coupled in to the grating 30, which allows the FOV to be enlarged without increasing the volume and weight of the system.
Referring to fig. 6, for the HOE coupled into the grating 30, the parallel light beam incident perpendicularly is the reference light 301, the reference light 301 is a plane wave incident perpendicularly to the waveguide 40, and the object light 302 is a spherical wave emitted from the o' point 303. Considering that the refractive index of the waveguide is different from that of air, the incident angle of the object light incident to the HOE central ray coupled into the grating 30 satisfies:
n0sinγ＝n1sinβ
where γ is the incident angle 304 of object light, β is the refraction angle 305 of waveguide, n0Is the refractive index of air, n1Is the waveguide index.
Compared with the prior art, the micromirror laser scanning near-eye display system provided by the invention avoids the limitation of the waveguide total reflection angle of the light beam by adjusting the angle of the light beam entering the coupling grating, and avoids the generation of VAC by converging the HOE of the coupling grating to the center of the human eye crystalline lens, and meanwhile, the light beams are coupled in and out at an angle, and the uniformity of the displayed image is good.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.
Claims (13)
1. A micromirror laser scanning near-eye display system, comprising: the MEMS micro-mirror scanning device comprises a light source for emitting light beams, the light beams emitted by the light source are changed into parallel light beams after passing through the collimating mirror, the parallel light beams are vertically incident on the coupling-in grating, the light beams vertically incident on the coupling-in grating are coupled into the waveguide by the coupling-in grating for transmission, and the light beams transmitted by the waveguide are totally reflected in the waveguide and are coupled out by the coupling-out grating; the coupling-out grating is a holographic grating, and the light beams of the waveguide are coupled out by the coupling-out grating to be convergent light beams and converged in human eyes.
2. The micromirror laser scanning near-to-eye display system according to claim 1, wherein the MEMS micromirror scanning device comprises the light source, a beam combiner and a MEMS micromirror sequentially arranged along the propagation path of the light beam, the light source is a RGB three-color light source, the light beam emitted by the light source is integrated by the beam combiner and then transmitted to the MEMS micromirror, and the MEMS micromirror scans and displays the light beam.
3. A micromirror laser scanning near-eye display system as claimed in claim 2, characterized in that the surface of the MEMS micro-mirror is metallized to increase the light reflectivity to the visible wavelength band.
4. The micromirror laser scanning near-to-eye display system of claim 1, wherein the incoupling grating is a surface relief grating or a volume holographic grating, and the diffraction angle of the light beam in the incoupling grating is larger than the total reflection angle in the waveguide.
5. The micromirror laser scanning near-to-eye display system of claim 1, wherein the incoupling grating and the outcoupling grating are both disposed on a side of the waveguide close to the MEMS micromirror scanning device.
6. The micromirror laser scanning near-to-eye display system of claim 1, wherein the outcoupling grating is disposed on a side of the waveguide away from the MEMS micromirror scanning device.
7. The micromirror laser scanning near-to-eye display system as claimed in claim 2, wherein the outcoupling grating comprises at least two layers of the holographic gratings arranged in a stack for exposing the RGB light beams, respectively.
8. The micromirror laser scanning near-to-eye display system as claimed in claim 2, wherein the holographic grating records RGB three-color light beams separately with multiple exposures.
9. The micromirror laser scanning near-eye display system of claim 1, wherein the light beams coupled out by the coupling grating are projected to different positions on human retina to form image near-eye vision, and the near-eye vision field angle satisfies:
wherein, FOV is the field angle, s is the area of the holographic grating, and d is the distance from the light beam convergence point to the waveguide.
10. The micromirror laser scanning near-eye display system of claim 1 or 9, wherein the incoupling grating and the outcoupling grating are both volume holographic gratings, the incoupling grating and the outcoupling grating are disposed on the same side of the waveguide, and the area of the outcoupling grating is larger than that of the incoupling grating.
11. The micromirror laser scanning near-to-eye display system of claim 10, wherein the incoupling grating and the outcoupling grating are both disposed on the side of the waveguide close to the MEMS micromirror scanning device, and both the incoupling grating and the outcoupling grating are transmission gratings.
12. The micromirror laser scanning near-to-eye display system of claim 10, wherein the incoupling grating and the outcoupling grating are both disposed on a side of the waveguide away from the MEMS micromirror scanning device, and both the incoupling grating and the outcoupling grating are reflective gratings.
13. The micromirror laser scanning near-eye display system of claim 10, wherein for the incoupling grating, the parallel light beam incident perpendicular to the waveguide is the reference light, and the incident angle of the object light incident on the central light of the incoupling grating satisfies:
n0sinγ＝n1sinβ
wherein, gamma is the incident angle of object light, beta is the refraction angle of waveguide, n0Is the refractive index of air, n1Is the waveguide index.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN2019113799602 | 2019-12-27 | ||
| CN201911379960.2A CN111158144A (en) | 2019-12-27 | 2019-12-27 | Micromirror laser scanning near-to-eye display system |
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| CN202010947719.1A Pending CN111983812A (en) | 2019-12-27 | 2020-09-10 | Micromirror laser scanning near-to-eye display system |
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| WO (1) | WO2021128952A1 (en) |
Cited By (1)
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| CN112198667A (en) * | 2020-11-30 | 2021-01-08 | 深圳铅笔视界科技有限公司 | Virtual retina projection system |
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| CN111158144A (en) * | 2019-12-27 | 2020-05-15 | 瑞声科技（南京）有限公司 | Micromirror laser scanning near-to-eye display system |
| CN111413764A (en) * | 2020-05-22 | 2020-07-14 | 宋建明 | Passive brightness enhancement method and waveguide grating passive brightness energy superposition enhancement device |
| CN112462522A (en) * | 2020-12-08 | 2021-03-09 | 谷东科技有限公司 | Large-view-field compact near-to-eye display device |
| CN114815234A (en) * | 2021-01-18 | 2022-07-29 | 京东方科技集团股份有限公司 | Display device, reality augmentation apparatus, and display method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112198667A (en) * | 2020-11-30 | 2021-01-08 | 深圳铅笔视界科技有限公司 | Virtual retina projection system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111158144A (en) | 2020-05-15 |
| WO2021128952A1 (en) | 2021-07-01 |
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Application publication date: 20201124 |