CN111975558A - Polishing device for semiconductor graphite thermal field used component and polishing method thereof - Google Patents
Polishing device for semiconductor graphite thermal field used component and polishing method thereof Download PDFInfo
- Publication number
- CN111975558A CN111975558A CN202010651322.8A CN202010651322A CN111975558A CN 111975558 A CN111975558 A CN 111975558A CN 202010651322 A CN202010651322 A CN 202010651322A CN 111975558 A CN111975558 A CN 111975558A
- Authority
- CN
- China
- Prior art keywords
- motor
- rod
- transversely
- thermal field
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0046—Column grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
Abstract
The invention discloses a polishing device for a semiconductor graphite thermal field used component, which comprises a bottom plate, wherein a transmission assembly is fixedly arranged in the middle of one side of the top surface of the bottom plate, and a fixing column is vertically and fixedly arranged on one side of the middle of the top surface of the bottom plate; the middle part of the top surface of the sliding plate is provided with a movable column; clamping assemblies are arranged on the surfaces of the first rotating column and the second rotating column; the adjusting cavities are provided with adjusting components; a sleeve is movably sleeved on the rod body of the guide rod, electric push rods are vertically and fixedly arranged on two sides of the bottom of the sleeve, and a mounting plate is horizontally arranged below the electric push rods; the bottom end of the transmission shaft is provided with a polishing wheel; the graphite thermal field grinding machine is convenient to operate, the problem that graphite thermal fields of different sizes are inconvenient to use members for adjusting and clamping is solved through the adjusting assembly and the clamping assembly, and the problem that workers are inconvenient to turn over and grind during grinding is solved through the transmission assembly; the problem that the graphite thermal field is inconvenient to move and adjust according to the position of the graphite thermal field to be polished is solved through the moving assembly.
Description
Technical Field
The invention relates to the technical field of semiconductor graphite thermal fields, in particular to a polishing device for a member used in a semiconductor graphite thermal field and a polishing method thereof.
Background
In the preparation of monocrystalline silicon, a graphite thermal field device is needed; the core part of the graphite thermal field device mainly comprises a graphite crucible, an inner guide cylinder, an outer guide cylinder and the like; at present, the technological process for producing the graphite thermal field device is as follows: selecting a graphite material with a proper size, and then processing the graphite material into a required shape by machines such as a lathe, a milling machine, a drilling machine and the like; need use the component to carry out the work of polishing to graphite thermal field, and current grinding device exists and is not convenient for use the component to the graphite thermal field of unidimensional not and adjust the shortcoming of centre gripping, and graphite thermal field uses the component simultaneously and is not convenient for the staff when polishing to overturn and polish to and current grinding device exists and is not convenient for use the required position of polishing of component according to graphite thermal field and removes the shortcoming of adjusting.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a polishing device for a semiconductor graphite thermal field using component.
In order to achieve the purpose, the invention adopts the following technical scheme: the polishing device for the components used in the semiconductor graphite thermal field comprises a bottom plate, wherein the bottom plate is horizontally arranged in a rectangular plate shape, a transmission assembly is fixedly arranged in the middle of one side of the top surface of the bottom plate, a fixed column is vertically and fixedly arranged on one side of the middle of the top surface of the bottom plate, a cross beam is transversely and fixedly arranged at the top end of the fixed column, T-shaped slide rails are transversely and fixedly arranged at the front end and the rear end of the other side of the top surface of the bottom plate, a sliding plate is horizontally and movably arranged between the top surfaces of the two T-shaped slide rails, and T-shaped slide grooves are transversely formed in the; a movable column is vertically and fixedly arranged in the middle of the top surface of the sliding plate, bearing grooves are formed in the lower portion of the inner side surface of the fixed column and the middle portion of the inner side surface of the movable column, a first bearing is fixedly arranged in each bearing groove, a first rotating column and a second rotating column are transversely and fixedly arranged in the inner rings of the two first bearings respectively, and clamping assemblies are arranged on the surfaces of the first rotating column and the second rotating column respectively; motor cavities are formed in the inner ends of the first rotating column and the second rotating column, a circular adjusting cavity is transversely formed in the column body outside each motor cavity, and an adjusting assembly is arranged in each adjusting cavity;
limiting plates are vertically and fixedly arranged on two sides of the bottom surface of the cross beam, a guide rod is transversely and fixedly arranged at the lower part between the two limiting plates, a sleeve is movably sleeved on a rod body of the guide rod, electric push rods are vertically and fixedly arranged on two sides of the bottom of the sleeve, a mounting plate is horizontally arranged below the electric push rods, and the bottoms of the telescopic ends of the two electric push rods are fixedly connected with two sides of the top surface of the mounting plate respectively; the fixed motor case that is equipped with in top surface middle part of mounting panel the vertical fixed first motor that is equipped with of motor case the fixed second bearing that is equipped with in interior bottom surface middle part of motor case vertical fixed transmission shaft that is equipped with in the inner circle of second bearing, the coaxial rigid coupling of motor shaft of shaft coupling and first motor is passed through on the top of transmission shaft, just the activity of transmission shaft runs through to the bottom surface below of mounting panel the bottom horizontal fixation of transmission shaft is equipped with the wheel of polishing.
Preferably, a funnel-shaped slag collecting groove is formed in the middle of the top surface of the bottom plate, a slag collecting hopper is fixedly arranged at the bottom of the slag collecting groove, and the bottom end of the slag collecting hopper penetrates below the bottom surface of the bottom plate; a rectangular driving cavity is transversely formed in the middle of the other side in the bottom plate, a driving assembly is arranged in the driving cavity, and a rectangular equipment cavity is formed in the bottom plate on one side of the driving cavity; a rectangular moving cavity is transversely formed in the middle of the inside of the cross beam, and a moving assembly is arranged in the moving cavity; a rectangular cavity is formed in a cross beam on one side of the movable cavity.
Preferably, the clamping assembly comprises a clamping plate, a first hinged support, a second hinged support, a hinged rod and a third hinged support, strip-shaped clamping plates are transversely and movably arranged on the peripheries of the first rotating column and the second rotating column, a connecting rod is transversely and fixedly connected to the inner end of each clamping plate, the first hinged support is fixedly arranged on the periphery of the surface of the inner end of each rotating column and the surface of the inner end of each second rotating column, and the inner end of each connecting rod is movably hinged in a notch of the first hinged support; step-shaped anti-skidding teeth are arranged on the outer side face of each clamping plate; every the outer end of splint medial surface all is fixed and is equipped with the third free bearing first rotation post rotates the surface of post with the second and all moves about all to be equipped with the second free bearing, every it has the hinge bar, and every all swing joint in the notch of second free bearing the outer end of hinge bar all articulates in the notch of third free bearing.
Preferably, the adjusting assembly comprises second motors, lead screws, threaded sleeves and connecting rods, the second motors are transversely arranged in the motor cavities, third bearings are fixedly arranged on the inner walls of the two sides of each adjusting cavity, the lead screws are transversely arranged in the adjusting cavities, and the two ends of each lead screw are fixedly connected in the inner rings of the third bearings; the inner end of the screw rod penetrates into the motor cavity and is coaxially and fixedly connected with a motor shaft of the second motor through a coupler; the screw rod is characterized in that a threaded sleeve is movably sleeved on the rod body of the screw rod, a connecting rod is fixedly arranged on the periphery of the surface of the threaded sleeve and perpendicular to the rod body, strip-shaped openings are formed in the inner wall of the adjusting cavity along the length direction, and the outer end of each connecting rod extends out of the strip-shaped opening and is fixedly connected with the bottom surface of the second hinged support.
Preferably, the driving assembly comprises a third motor, a threaded rod, a threaded cylinder and a connecting column, the third motor is transversely and fixedly arranged in the equipment cavity, fourth bearings are fixedly arranged on the inner walls of the two sides of the driving cavity, the threaded rod is transversely arranged in the driving cavity, and the two ends of the threaded rod are fixedly connected in the inner ring of each fourth bearing; the inner end of the threaded rod penetrates into the equipment cavity and is coaxially and fixedly connected with a motor shaft of a third motor through a coupler; a threaded cylinder is movably sleeved on the rod body of the threaded rod, and a connecting column is vertically arranged at the top of the threaded cylinder; the top end of the connecting column extends out of the strip-shaped opening and is fixedly connected with the bottom surface of the sliding plate.
Preferably, the moving assembly comprises a fourth motor, a screw rod, a threaded sleeve and a vertical rod, the fourth motor is transversely and fixedly arranged in the rectangular cavity, fifth bearings are fixedly arranged on the inner walls of the two sides of the moving cavity, the screw rod is transversely arranged in the moving cavity, and the two ends of the screw rod are fixedly connected in the inner ring of the fifth bearing; one end of the screw rod penetrates into the rectangular cavity and is coaxially and fixedly connected with a motor shaft of a third motor through a coupler; the movable sleeve is equipped with threaded sleeve on the body of rod of lead screw the equal vertical rigid coupling in threaded sleeve's bottom both sides has the montant remove and seted up banding rectangle opening along length direction on the interior bottom surface in chamber, just the bottom of montant all extends from the rectangle opening in with sheathed tube top rigid coupling.
Preferably, the transmission assembly comprises a fourth motor, a driving pulley, a driven pulley and a belt, the fourth motor is transversely and fixedly arranged at the middle part of one side of the top surface of the bottom plate, the driving pulley is fixedly arranged at the top end of a motor shaft of the fourth motor in a fixing mode, the outer end of the first rotating column penetrates through the outer side of the fixing column, the driven pulley is fixedly arranged at the outer end of the first rotating column in a fixing mode, the belt is sleeved between the driving pulley and the driven pulley, and the driving pulley is in transmission connection with the driven pulley through the belt.
The invention also provides a polishing method of the polishing device for the semiconductor graphite thermal field using component, which comprises the following steps:
firstly, electrically connecting an electric push rod, a first motor, a second motor, a third motor and a fourth motor with an external power supply through leads respectively, and sleeving one end of a graphite thermal field using component to be polished on a clamping plate of a first rotating column;
step two, driving the threaded rod to rotate by controlling a third motor, enabling the threaded barrel to transversely move by the rotation of the threaded rod, driving the sliding plate at the top end of the connecting column to transversely slide on the T-shaped sliding rail by the transverse movement of the threaded barrel, driving the movable column to transversely move by the transverse sliding of the sliding plate, and driving the second rotating column to be inserted into the other end of the graphite thermal field use component by the transverse movement of the movable column;
driving a lead screw to rotate by controlling a second motor, driving a threaded sleeve to transversely move on a rod body by the rotation of the lead screw, driving a second hinged support at the outer end of a connecting rod to transversely move by the transverse movement of the threaded sleeve, driving the outer end of a clamping plate at the other end of a hinged rod to outwards expand by the transverse movement of the second hinged support, and carrying out limiting clamping on two sides of a graphite thermal field using component by the expansion of the outer end of the clamping plate;
fourthly, a third motor is controlled to drive a screw rod to rotate, a threaded sleeve is driven to transversely move on a rod body through the rotation of the screw rod, a sleeve at the bottom end of a vertical rod is driven to transversely move on the rod body of a guide rod through the transverse movement of the threaded sleeve, and a mounting plate and a polishing wheel at the bottom end of an electric push rod are driven to transversely move and adjust through the transverse movement of the sleeve;
fifthly, driving the polishing wheel at the bottom end of the mounting plate to descend by controlling the extension and retraction of the electric push rod, driving the polishing wheel at the bottom end of the transmission shaft to rotate by controlling the first motor, and polishing the graphite thermal field use component by the rotation of the polishing wheel;
step six, a driving belt pulley is driven to rotate by controlling a fourth motor, a driven belt pulley at the other end of the belt is driven to rotate by the rotation of the driving belt pulley, a first rotating column is driven to rotate by the rotation of the driven belt pulley, a graphite thermal field using component fixedly clamped by a clamping plate is driven to rotate by the rotation of the first rotating column, and a circle of the outer surface of the grinding wheel is conveniently ground by the rotation of the graphite thermal field using component; and after the operation and grinding are finished, the graphite thermal field using component is taken down, and the power supply is turned off.
Compared with the prior art, the invention has the beneficial effects that:
1. the movable columns on the sliding plate are driven by the driving assembly to transversely move, the second rotating columns are conveniently inserted into the graphite thermal field using components through the transverse movement of the movable columns, the graphite thermal field using components to be polished are conveniently limited and fixed, the graphite thermal field using components to be polished are conveniently and rapidly clamped and fixed through the adjusting assembly and the clamping assembly, the graphite thermal field using components with different sizes are conveniently adjusted, clamped and fixed, and the working efficiency of clamping the graphite thermal field using components is effectively improved; the rotation of the graphite thermal field using member during polishing can be prevented conveniently through the clamping plate and the anti-skid teeth, and the limiting and anti-skid effects can be realized conveniently; the problem that the conventional polishing device is inconvenient to adjust and clamp graphite thermal field use components of different sizes is solved, and the problem that the conventional graphite thermal field use components are easy to rotate during polishing is solved;
2. the graphite thermal field using component sleeved on the first rotating column and the second rotating column is driven to rotate conveniently through the transmission assembly, and a circle of the outer surface of the graphite thermal field using component is polished conveniently through the polishing wheel; the polishing efficiency of the graphite thermal field using component is effectively improved, the polishing operation of workers is facilitated, and the problem that the existing graphite thermal field using component is inconvenient for workers to perform turnover polishing during polishing is solved; the position that uses the required component to polish through removing the subassembly is convenient for use the component according to graphite thermal field and is removed the regulation, has effectively increased the practicality of device, is convenient for effectively improve the quality of polishing to graphite thermal field use component simultaneously, has solved current grinding device and has not been convenient for use the position that the component required was polished according to graphite thermal field and carry out the removal problem of adjusting.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic cross-sectional front view of the present invention;
FIG. 3 is an enlarged schematic cross-sectional view of a first rotating column according to the present invention;
FIG. 4 is a schematic side sectional view of the first rotating column of the present invention;
FIG. 5 is a schematic cross-sectional view of one side of the base plate according to the present invention;
FIG. 6 is a schematic view of the polishing method of the present invention;
number in the figure: the grinding device comprises a bottom plate 1, a fixed column 2, a cross beam 3, a T-shaped sliding rail 4, a sliding plate 5, a movable column 6, a first rotating column 7, a second rotating column 8, a guide rod 9, a sleeve 10, an electric push rod 11, a mounting plate 12, a motor box 13, a first motor 14, a grinding wheel 15, a slag collecting hopper 16, a clamping plate 17, a first hinged support 18, a second hinged support 19, a hinged rod 20, a third hinged support 21, a second motor 22, a lead screw 23, a threaded sleeve 24, a connecting rod 25, a third motor 26, a threaded rod 27, a threaded cylinder 28, a connecting column 29, a fourth motor 30, a lead screw 31, a threaded sleeve 32, a vertical rod 33, a fourth motor 34, a driving belt pulley 35, a driven belt pulley 37 and a belt 37.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1: referring to fig. 1-5, the polishing device for the components used in the semiconductor graphite thermal field comprises a bottom plate 1, wherein the bottom plate 1 is horizontally arranged in a rectangular plate shape, a transmission assembly is fixedly arranged in the middle of one side of the top surface of the bottom plate 1, a fixed column 2 is vertically and fixedly arranged on one side of the middle of the top surface of the bottom plate 1, a cross beam 3 is transversely and fixedly arranged at the top end of the fixed column 2, T-shaped slide rails 4 are transversely and fixedly arranged at the front end and the rear end of the other side of the top surface of the bottom plate 1, a sliding plate 5 is horizontally and movably arranged between the top surfaces of the two T-shaped slide rails 4, and T-shaped slide grooves are transversely formed in; a movable column 6 is vertically and fixedly arranged in the middle of the top surface of the sliding plate 5, bearing grooves are formed in the lower portion of the inner side surface of the fixed column 2 and the middle portion of the inner side surface of the movable column 6, a first bearing is fixedly arranged in each bearing groove, a first rotating column 7 and a second rotating column 8 are respectively and transversely and fixedly arranged in the inner rings of the two first bearings, and clamping assemblies are arranged on the surfaces of the first rotating column 7 and the second rotating column 8; motor cavities are formed in the inner ends of the cylinders of the first rotating column 7 and the second rotating column 8, a circular adjusting cavity is transversely formed in the cylinder outside each motor cavity, and an adjusting assembly is arranged in each adjusting cavity; limiting plates are vertically and fixedly arranged on two sides of the bottom surface of the cross beam 3, a guide rod 9 is transversely and fixedly arranged on the lower portion between the two limiting plates, a sleeve 10 is movably sleeved on a rod body of the guide rod 9, electric push rods 11 are vertically and fixedly arranged on two sides of the bottom of the sleeve 10, a mounting plate 12 is horizontally arranged below the electric push rods 11, and the bottoms of the telescopic ends of the two electric push rods 11 are fixedly connected with two sides of the top surface of the mounting plate 12 respectively; the fixed motor case 13 that is equipped with in top surface middle part of mounting panel 12 the vertical fixed first motor 14 that is equipped with of motor case 13 the fixed second bearing that is equipped with in interior bottom surface middle part of motor case 13 the vertical fixed transmission shaft that is equipped with in the inner circle of second bearing, the coaxial rigid coupling of shaft coupling and first motor 14's motor shaft is passed through on the top of transmission shaft, just the activity of transmission shaft runs through to the bottom surface below of mounting panel 12 the bottom horizontal fixation of transmission shaft is equipped with grinding wheel 15.
In the invention, a funnel-shaped slag collecting groove is formed in the middle of the top surface of the bottom plate 1, a slag collecting hopper 16 is fixedly arranged at the bottom of the slag collecting groove, and the bottom end of the slag collecting hopper 16 penetrates below the bottom surface of the bottom plate 1; a rectangular driving cavity is transversely formed in the middle of the other side in the bottom plate 1, a driving assembly is arranged in the driving cavity, and a rectangular equipment cavity is formed in the bottom plate 1 on one side of the driving cavity; a rectangular moving cavity is transversely formed in the middle of the inside of the cross beam 3, and a moving assembly is arranged in the moving cavity; a rectangular cavity is arranged in the cross beam 3 at one side of the movable cavity.
In the invention, the clamping assembly comprises clamping plates 17, a first hinged support 18, a second hinged support 19, a hinged rod 20 and a third hinged support 21, strip-shaped clamping plates 17 are transversely and movably arranged on the peripheries of the first rotating column 7 and the second rotating column 8, a connecting rod is transversely and fixedly connected to the inner end of each clamping plate 17, the first hinged support 18 is fixedly arranged on the periphery of the surface of the inner end of each rotating column 7 and the surface of the inner end of each rotating column 8, and the inner end of each connecting rod is movably hinged in a notch of the first hinged support 18; step-shaped anti-skidding teeth are arranged on the outer side surface of each clamping plate 17; every the outer end of splint 17 medial surface all is fixed and is equipped with third free bearing 21 first rotation post 7 rotates the surface of post 8 with the second and all the activity is equipped with second free bearing 19 all around, every it has hinge rod 20, and every all the activity hinges in the notch of second free bearing 19 has hinge rod 20, and every the outer end of hinge rod 20 all the activity hinges in the notch of third free bearing 21.
In the invention, the adjusting assembly comprises a second motor 22, lead screws 23, threaded sleeves 24 and connecting rods 25, the second motors 22 are all transversely arranged in the motor cavities, third bearings are fixedly arranged on the inner walls of the two sides of each adjusting cavity, the lead screws 23 are all transversely arranged in the adjusting cavities, and the two ends of each lead screw 23 are fixedly connected in the inner ring of each third bearing; the inner end of the screw 23 penetrates into the motor cavity and is coaxially and fixedly connected with a motor shaft of the second motor 22 through a coupler; every all the activity cover is equipped with threaded sleeve 24 on the body of rod of lead screw 23, every threaded sleeve 24's surface all is equipped with connecting rod 25 all around perpendicularly to body is fixed, every the strip opening has all been seted up along length direction on the inner wall all around of regulation chamber, and every the outer end of connecting rod 25 all extends from in the strip opening with the bottom surface rigid coupling of second free bearing 19.
In the invention, the driving component comprises a third motor 26, a threaded rod 27, a threaded cylinder 28 and a connecting column 29, the third motor 26 is transversely and fixedly arranged in the equipment cavity, fourth bearings are fixedly arranged on the inner walls of the two sides of the driving cavity, the threaded rod 27 is transversely arranged in the driving cavity, and the two ends of the threaded rod 27 are fixedly connected in the inner ring of the fourth bearing; the inner end of the threaded rod 27 penetrates into the equipment cavity and is coaxially and fixedly connected with a motor shaft of the third motor 26 through a coupler; a threaded cylinder 28 is movably sleeved on the rod body of the threaded rod 27, and a connecting column 29 is vertically arranged at the top of the threaded cylinder 28; a strip-shaped opening is formed in the inner top surface of the driving cavity along the length direction, and the top end of the connecting column 29 extends out of the strip-shaped opening to be fixedly connected with the bottom surface of the sliding plate 5.
In the invention, the moving assembly comprises a fourth motor 30, a screw rod 31, a threaded sleeve 32 and a vertical rod 33, the fourth motor 30 is transversely and fixedly arranged in the rectangular cavity, fifth bearings are fixedly arranged on the inner walls of the two sides of the moving cavity, the screw rod 31 is transversely arranged in the moving cavity, and the two ends of the screw rod 31 are fixedly connected in the inner ring of the fifth bearing; one end of the screw rod 31 penetrates into the rectangular cavity and is coaxially and fixedly connected with a motor shaft of a third motor 30 through a coupler; the movable sleeve is equipped with threaded sleeve 32 on the body of rod of lead screw 31 the equal vertical rigid coupling in bottom both sides of threaded sleeve 32 has montant 33 the interior bottom surface of removal chamber is gone up and is seted up banding rectangle opening along length direction, just the bottom of montant 33 all extends from the rectangle opening in with the top rigid coupling of sleeve pipe 10.
In the invention, the transmission assembly comprises a fourth motor 34, a driving pulley 35, a driven pulley 36 and a belt 37, the fourth motor 34 is transversely and fixedly arranged in the middle of one side of the top surface of the bottom plate 1, the driving pulley 35 is fixedly sleeved at the top end of a motor shaft of the fourth motor 34, the outer end of the first rotating column 7 penetrates through the outer side of the fixed column 2, the driven pulley 36 is fixedly sleeved at the outer end of the first rotating column 7, the belt 37 is sleeved between the driving pulley 35 and the driven pulley 36, and the driving pulley 35 is in transmission connection with the driven pulley 36 through the belt 36.
Example 2: referring to fig. 6, in this embodiment, the present invention further provides a polishing method for a polishing apparatus for a member used in a thermal field of semiconductor graphite, including the steps of:
firstly, an electric push rod 11, a first motor 14, a second motor 22, a third motor 26 and a fourth motor 30 are respectively and electrically connected with an external power supply through leads, and one end of a graphite thermal field using component to be polished is sleeved on a clamping plate 17 of a first rotating column 7;
step two, the third motor 26 is controlled to drive the threaded rod 27 to rotate, the threaded barrel 28 is transversely moved through the rotation of the threaded rod 27, the sliding plate 5 at the top end of the connecting post 29 is transversely moved on the T-shaped sliding rail 4 through the transverse movement of the threaded barrel 28, the movable post 6 is transversely moved through the transverse movement of the sliding plate 5, and the second rotating post 8 is driven to be inserted into the other end of the graphite thermal field use component through the transverse movement of the movable post 6;
step three, driving a lead screw 23 to rotate by controlling a second motor 22, driving a threaded sleeve 24 to transversely move on the rod body by the rotation of the lead screw 23, driving a second hinged support 19 at the outer end of a connecting rod 25 to transversely move by the transverse movement of the threaded sleeve 24, driving the outer end of a clamping plate 17 at the other end of a hinged rod 20 to outwards expand by the transverse movement of the second hinged support 19, and performing limiting clamping on two sides of a graphite thermal field use member by the expansion of the outer end of the clamping plate 17;
fourthly, the third motor 30 is controlled to drive the screw rod 31 to rotate, the screw rod 31 is rotated to drive the threaded sleeve 32 to transversely move on the rod body, the transverse movement of the threaded sleeve 32 drives the sleeve 10 at the bottom end of the vertical rod 33 to transversely move on the rod body of the guide rod 9, and the transverse movement of the sleeve 10 drives the mounting plate 12 at the bottom end of the electric push rod 11 and the polishing wheel 15 to transversely move and adjust;
fifthly, the grinding wheel 15 at the bottom end of the mounting plate 12 is driven to descend by controlling the extension and contraction of the electric push rod 11, the grinding wheel 15 at the bottom end of the transmission shaft is driven to rotate by controlling the first motor 14, and the graphite thermal field use component is ground by the rotation of the grinding wheel 15;
step six, a driving belt pulley 35 is driven to rotate by controlling a fourth motor 34, a driven belt pulley 36 at the other end of a belt 37 is driven to rotate by the rotation of the driving belt pulley 35, a first rotating column 7 is driven to rotate by the rotation of the driven belt pulley 36, a graphite thermal field using component fixedly clamped by a clamping plate 17 is driven to rotate by the rotation of the first rotating column 7, and a circle of the outer surface of the grinding wheel 15 is conveniently ground by the rotation of the graphite thermal field using component; and after the operation and grinding are finished, the graphite thermal field using component is taken down, and the power supply is turned off.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (8)
1. Semiconductor graphite thermal field uses grinding device for component, including bottom plate (1), its characterized in that: the bottom plate (1) is horizontally arranged in a rectangular plate shape, a transmission assembly is fixedly arranged in the middle of one side of the top surface of the bottom plate (1), a fixed column (2) is vertically and fixedly arranged on one side of the middle of the top surface of the bottom plate (1), a cross beam (3) is transversely and fixedly arranged at the top end of the fixed column (2), T-shaped slide rails (4) are transversely and fixedly arranged at the front end and the rear end of the other side of the top surface of the bottom plate (1), a sliding plate (5) is horizontally and movably arranged between the top surfaces of the two T-shaped slide rails (4), and T-shaped slide grooves are transversely formed in the front end and the rear end of the bottom surface of the sliding; a movable column (6) is vertically and fixedly arranged in the middle of the top surface of the sliding plate (5), bearing grooves are formed in the lower portion of the inner side surface of the fixed column (2) and the middle portion of the inner side surface of the movable column (6), a first bearing is fixedly arranged in each bearing groove, a first rotating column (7) and a second rotating column (8) are respectively and transversely and fixedly arranged in the inner rings of the two first bearings, and clamping assemblies are arranged on the surfaces of the first rotating column (7) and the second rotating column (8); motor cavities are formed in the inner ends of the cylinders of the first rotating column (7) and the second rotating column (8), a circular adjusting cavity is transversely formed in the cylinder outside each motor cavity, and an adjusting assembly is arranged in each adjusting cavity;
limiting plates are vertically and fixedly arranged on two sides of the bottom surface of the cross beam (3), a guide rod (9) is transversely and fixedly arranged on the lower portion between the two limiting plates, a sleeve (10) is movably sleeved on a rod body of the guide rod (9), electric push rods (11) are vertically and fixedly arranged on two sides of the bottom of the sleeve (10), a mounting plate (12) is horizontally arranged below the electric push rods (11), and the bottoms of the telescopic ends of the two electric push rods (11) are fixedly connected with two sides of the top surface of the mounting plate (12) respectively; the fixed motor case (13) that is equipped with in top surface middle part of mounting panel (12) the vertical fixed first motor (14) that is equipped with in motor case (13) the interior bottom surface middle part of motor case (13) is fixed to be equipped with the second bearing vertical fixed transmission shaft that is equipped with in the inner circle of second bearing, the coaxial rigid coupling of motor shaft of shaft coupling and first motor (14) is passed through on the top of transmission shaft, just the activity of transmission shaft runs through to the bottom surface below of mounting panel (12) the bottom level of transmission shaft is fixed and is equipped with grinding wheel (15).
2. The polishing device for a member used in a thermal field of semiconductor graphite as claimed in claim 1, wherein: a funnel-shaped slag collecting groove is formed in the middle of the top surface of the bottom plate (1), a slag collecting hopper (16) is fixedly arranged at the bottom of the slag collecting groove, and the bottom end of the slag collecting hopper (16) penetrates below the bottom surface of the bottom plate (1); a rectangular driving cavity is transversely formed in the middle of the other side in the bottom plate (1), a driving assembly is arranged in the driving cavity, and a rectangular equipment cavity is formed in the bottom plate (1) on one side of the driving cavity; a rectangular moving cavity is transversely formed in the middle of the inside of the cross beam (3), and a moving assembly is arranged in the moving cavity; a rectangular cavity is arranged in a cross beam (3) at one side of the movable cavity.
3. The polishing device for a member used in a thermal field of semiconductor graphite as claimed in claim 1, wherein: the clamping assembly comprises a clamping plate (17), a first hinged support (18), a second hinged support (19), a hinged rod (20) and a third hinged support (21), strip-shaped clamping plates (17) are transversely and movably arranged on the peripheries of the first rotating column (7) and the second rotating column (8), a connecting rod is transversely and fixedly connected to the inner end of each clamping plate (17), the first hinged supports (18) are fixedly arranged on the peripheries of the surfaces of the inner ends of the first rotating column (7) and the second rotating column (8), and the inner end of each connecting rod is movably hinged in a notch of each first hinged support (18); step-shaped anti-skidding teeth are arranged on the outer side surface of each clamping plate (17); every the outer end of splint (17) medial surface all fixes and is equipped with third free bearing (21) first rotation post (7) and the equal activity of surface all around of second rotation post (8) are equipped with second free bearing (19), every it has articulated hinge rod (20) all to articulate in the notch of second free bearing (19), and every the equal activity of outer end of hinge rod (20) articulates in the notch of third free bearing (21).
4. The polishing device for a member used in a thermal field of semiconductor graphite as claimed in claim 3, wherein: the adjusting assembly comprises second motors (22), lead screws (23), threaded sleeves (24) and connecting rods (25), the second motors (22) are transversely arranged in motor cavities, third bearings are fixedly arranged on the inner walls of the two sides of each adjusting cavity, the lead screws (23) are transversely arranged in the adjusting cavities, and the two ends of each lead screw (23) are fixedly connected in the inner ring of each third bearing; the inner end of the lead screw (23) penetrates into the motor cavity and is coaxially and fixedly connected with a motor shaft of the second motor (22) through a coupler; every all the activity cover is equipped with threaded sleeve pipe (24) on the body of rod of lead screw (23), every all perpendicular to body is fixed all around threaded sleeve pipe (24) and is equipped with connecting rod (25), every all seted up strip opening along length direction on the inner wall all around of adjusting the chamber, and every the outer end of connecting rod (25) all extends from strip opening in and the bottom surface rigid coupling of second free bearing (19).
5. The polishing device for a member used in a thermal field of semiconductor graphite as claimed in claim 2, wherein: the driving assembly comprises a third motor (26), a threaded rod (27), a threaded cylinder (28) and a connecting column (29), the third motor (26) is transversely and fixedly arranged in the equipment cavity, fourth bearings are fixedly arranged on the inner walls of the two sides of the driving cavity, the threaded rod (27) is transversely arranged in the driving cavity, and the two ends of the threaded rod (27) are fixedly connected in the inner ring of the fourth bearings; the inner end of the threaded rod (27) penetrates into the equipment cavity and is coaxially and fixedly connected with a motor shaft of a third motor (26) through a coupler; a threaded cylinder (28) is movably sleeved on the rod body of the threaded rod (27), and a connecting column (29) is vertically arranged at the top of the threaded cylinder (28); a strip-shaped opening is formed in the inner top surface of the driving cavity along the length direction, and the top end of the connecting column (29) extends out of the strip-shaped opening and is fixedly connected with the bottom surface of the sliding plate (5).
6. The polishing device for a member used in a thermal field of semiconductor graphite as claimed in claim 2, wherein: the moving assembly comprises a fourth motor (30), a screw rod (31), a threaded sleeve (32) and a vertical rod (33), the fourth motor (30) is transversely and fixedly arranged in the rectangular cavity, fifth bearings are fixedly arranged on the inner walls of the two sides of the moving cavity, the screw rod (31) is transversely arranged in the moving cavity, and the two ends of the screw rod (31) are fixedly connected in the inner ring of the fifth bearings; one end of the screw rod (31) penetrates into the rectangular cavity and is coaxially and fixedly connected with a motor shaft of a third motor (30) through a coupler; the activity cover is equipped with threaded sleeve (32) on the body of rod of lead screw (31) the equal vertical rigid coupling in bottom both sides of threaded sleeve (32) has montant (33) the banding rectangle opening has been seted up along length direction on the interior bottom surface of removal chamber, just the bottom of montant (33) all extends from the rectangle opening in with the top rigid coupling of sleeve pipe (10).
7. The polishing device for a member used in a thermal field of semiconductor graphite as claimed in claim 1, wherein: drive assembly includes fourth motor (34), drive pulley (35), driven pulley (36) and belt (37), fourth motor (34) transversely fixes the middle part that sets up in bottom plate (1) top surface one side the fixed cover in motor shaft top of fourth motor (34) is equipped with drive pulley (35), the outer end of first rotation post (7) runs through the outside of fixed column (2) the fixed cover in outer end of first rotation post (7) is equipped with driven pulley (36) the cover is equipped with belt (37) between drive pulley (35) and driven pulley (36), drive pulley (35) are connected with driven pulley (36) transmission through belt (37).
8. The method for polishing a polishing apparatus for a member used in a thermal field of semiconductor graphite according to any one of claims 1 to 7, characterized by comprising the steps of:
step one, an electric push rod (11), a first motor (14), a second motor (22), a third motor (26) and a fourth motor (30) are respectively and electrically connected with an external power supply through leads, and one end of a graphite thermal field using component to be polished is sleeved on a clamping plate (17) of a first rotating column (7);
step two, a third motor (26) is controlled to drive a threaded rod (27) to rotate, a threaded cylinder (28) is transversely moved through the rotation of the threaded rod (27), a sliding plate (5) at the top end of a connecting column (29) is transversely slid on a T-shaped sliding rail (4) through the transverse movement of the threaded cylinder (28), a movable column (6) is transversely moved through the transverse sliding of the sliding plate (5), and a second rotating column (8) is driven to be inserted into the other end of the graphite thermal field use component through the transverse movement of the movable column (6);
thirdly, a second motor (22) is controlled to drive a lead screw (23) to rotate, a threaded sleeve (24) is driven to transversely move on the rod body through the rotation of the lead screw (23), a second hinged support (19) at the outer end of a connecting rod (25) is driven to transversely move through the transverse movement of the threaded sleeve (24), the outer end of a clamping plate (17) at the other end of a hinged rod (20) is driven to outwards expand through the transverse movement of the second hinged support (19), and the two sides of a graphite thermal field using component are limited and clamped through the expansion of the outer end of the clamping plate (17);
fourthly, a screw rod (31) is driven to rotate by controlling a third motor (30), a threaded sleeve (32) is driven to transversely move on the rod body by the rotation of the screw rod (31), a sleeve (10) at the bottom end of a vertical rod (33) is driven to transversely move on the rod body of a guide rod (9) by the transverse movement of the threaded sleeve (32), and a mounting plate (12) at the bottom end of an electric push rod (11) and a polishing wheel (15) are driven to transversely move and adjust by the transverse movement of the sleeve (10);
fifthly, the polishing wheel (15) at the bottom end of the mounting plate (12) is driven to descend by controlling the extension and retraction of the electric push rod (11), the polishing wheel (15) at the bottom end of the transmission shaft is driven to rotate by controlling the first motor (14), and the graphite thermal field use component is polished by the rotation of the polishing wheel (15);
step six, a driving belt pulley (35) is driven to rotate by controlling a fourth motor (34), a driven belt pulley (36) at the other end of a belt (37) is driven to rotate by the rotation of the driving belt pulley (35), a first rotating column (7) is driven to rotate by the rotation of the driven belt pulley (36), a graphite thermal field using component fixedly clamped by a clamping plate (17) is driven to rotate by the rotation of the first rotating column (7), and a circle of the outer surface of the grinding wheel (15) is conveniently ground by the rotation of the graphite thermal field using component; and after the operation and grinding are finished, the graphite thermal field using component is taken down, and the power supply is turned off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010651322.8A CN111975558A (en) | 2020-07-08 | 2020-07-08 | Polishing device for semiconductor graphite thermal field used component and polishing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010651322.8A CN111975558A (en) | 2020-07-08 | 2020-07-08 | Polishing device for semiconductor graphite thermal field used component and polishing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111975558A true CN111975558A (en) | 2020-11-24 |
Family
ID=73438208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010651322.8A Pending CN111975558A (en) | 2020-07-08 | 2020-07-08 | Polishing device for semiconductor graphite thermal field used component and polishing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111975558A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11309643A (en) * | 1997-12-24 | 1999-11-09 | United Technol Corp <Utc> | Method of processing metal working fluid |
| CN206230243U (en) * | 2016-11-15 | 2017-06-09 | 如皋市欧通机械配件有限公司 | A kind of mechanical severing device |
| CN110216499A (en) * | 2019-04-25 | 2019-09-10 | 南京合信智能装备有限公司 | A kind of three-jaw inner support clamp component |
| CN210413315U (en) * | 2019-07-25 | 2020-04-28 | 北京方能机电有限公司 | Intersecting line cutting machine fixture |
| CN210499527U (en) * | 2019-08-22 | 2020-05-12 | 连云港指诺智能物联有限公司 | Bathroom hardware surface spraying processing equipment that polishes |
-
2020
- 2020-07-08 CN CN202010651322.8A patent/CN111975558A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11309643A (en) * | 1997-12-24 | 1999-11-09 | United Technol Corp <Utc> | Method of processing metal working fluid |
| CN206230243U (en) * | 2016-11-15 | 2017-06-09 | 如皋市欧通机械配件有限公司 | A kind of mechanical severing device |
| CN110216499A (en) * | 2019-04-25 | 2019-09-10 | 南京合信智能装备有限公司 | A kind of three-jaw inner support clamp component |
| CN210413315U (en) * | 2019-07-25 | 2020-04-28 | 北京方能机电有限公司 | Intersecting line cutting machine fixture |
| CN210499527U (en) * | 2019-08-22 | 2020-05-12 | 连云港指诺智能物联有限公司 | Bathroom hardware surface spraying processing equipment that polishes |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211414749U (en) | Polishing bed for polishing surface of quartz plate | |
| CN111975507A (en) | Grain processing device for semiconductor graphite wafer and operation method thereof | |
| CN113118696A (en) | Intelligent welding device and method for pipe fitting end flange | |
| CN112936020A (en) | Intelligent polishing device for forging die | |
| CN111975558A (en) | Polishing device for semiconductor graphite thermal field used component and polishing method thereof | |
| CN211414595U (en) | Quartz tube inner hole polishing equipment | |
| CN214723092U (en) | Pneumatic grinder with to material multi-angle clamping function | |
| CN211053296U (en) | Automatic polishing equipment | |
| CN210306866U (en) | Special-shaped metal processing device | |
| CN220408146U (en) | Burr removing device | |
| CN217224941U (en) | Grinding device for mold production and manufacturing | |
| CN218426842U (en) | Ball base surface grinding device for tapered roller production | |
| CN218926470U (en) | Display back shroud mills screw thread device | |
| CN214557587U (en) | Recyclable drilling device | |
| CN220112917U (en) | Grinding device is used in processing of electric smelting brick | |
| CN212683356U (en) | Bar copper grinding device | |
| CN220501906U (en) | Panel turnover mechanism for machining motor cover plate | |
| CN220944792U (en) | Clamping tool for polishing outer surface of large ring die | |
| CN218312403U (en) | Follow-on grinding device is used in processing of coal mine equipment machine parts | |
| CN219426362U (en) | Polishing device for stopper rod production | |
| CN219805695U (en) | Drill bit processingequipment with location structure | |
| CN218081972U (en) | Plastic mould surface milling device | |
| CN220575436U (en) | Double-end-face grinding machine fixture for magnetic steel production | |
| CN216265121U (en) | Positioning device for metal processing | |
| CN212886311U (en) | Strutting arrangement is used in bent axle processing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20201124 |