CN111964721B - Non-contact temperature and humidity sensor and detection method - Google Patents
Non-contact temperature and humidity sensor and detection method Download PDFInfo
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Abstract
The invention discloses a non-contact temperature and humidity sensor and a detection method thereof, wherein the non-contact temperature and humidity sensor comprises an interdigital capacitor, a resistor, a spiral inductor and a flexible substrate, wherein the flexible substrate is provided with a through hole for installing the resistor, the interdigital capacitor and the spiral inductor are respectively installed on two side surfaces of the flexible substrate, the resistor is installed in the through hole, and the interdigital capacitor, the resistor and the spiral inductor are connected in series. The sensor utilizes the LC wireless passive sensing technology to realize simultaneous monitoring of temperature and humidity, has the advantages of simple manufacturing process, good linearity, high sensitivity, simple circuit, low energy consumption, long service life and the like, has small volume, simple structure, is convenient to install, is easily connected to various surfaces, is very suitable for wearable equipment and portable electronic products, and can also normally run under dangerous or special conditions.
Description
Technical Field
The invention belongs to the technical field of sensors, relates to a passive sensor, and particularly relates to a non-contact temperature and humidity sensor and a detection method.
Background
Temperature and humidity have been important environmental factors of concern and are also important in physicochemical experiments and substance production activities. Therefore, the temperature and humidity sensor is widely applied to industrial and agricultural production, cold-chain logistics, food preservation, health care, wearable equipment, environment monitoring and other occasions. However, in some special cases, wired active temperature and humidity sensors have some problems and challenges. For example, the temperature and humidity are measured in a closed container, if a wired active sensor is adopted, a punching mode is required for measurement, and the air tightness of the closed container cannot be guaranteed by the mode; in paint or dye workshops, gases harmful to human bodies, such as formaldehyde, and the like, exist often, and the gases also easily cause the aging of the wired active sensor line, so that the line needs to be maintained frequently, and the possibility that workers are exposed to danger is increased. The traditional wired active temperature and humidity sensor has the problems of low working efficiency, complex wiring, high maintenance cost, high energy consumption and the like. Furthermore, conventional sensors are generally rigid and cannot be easily deformed. The existing flexible sensor can only monitor one stimulus at a time when detecting temperature, pressure, strain, humidity, position and the like.
The LC sensor consists of two parts, namely a resonant circuit and an external reading device, wherein the resonant circuit mainly consists of a capacitance element, a resistance element and an inductance coil. The capacitance and the resistance of the sensor environment sensitive element are correspondingly changed due to different temperature and humidity, so that the change of resonance frequency and impedance is caused, the impedance and frequency curve of the reading end is analyzed, the frequency of a resonance circuit and the amplitude of an impedance real part can be deduced according to the resonance phenomenon when an external frequency scanning source is consistent with the scanning frequency of inductive coupling, and the wireless detection of a sensor signal is realized. The LC sensor has the advantages of simple design, cheap equipment and materials, simple structure, flexible design, stable performance and low power consumption, and the frequency spectrum reflecting the information of the sensor can provide information of the sensor in various aspects, so that the LC sensor has great prospects in functional design and multi-parameter design.
Some temperature or humidity sensors designed by using an LC wireless passive technology have been disclosed at home and abroad. Such as: (1) an LC wireless passive humidity sensor (Lvwen, Tanking, preparation and test [ J ] micro-nano electronic technology for an LC wireless passive sensor for humidity monitoring is designed in Lujun university and the like, and the LC wireless passive humidity sensor is based on MoS2/PI (polyimide) [ J ] micro-nano electronic technology is 2019,56 (3): 211-; (2) the Zhanclen of southeast university designs an LC wireless passive humidity sensor with graphene and polyimide as sensitive materials (Zhanclen, theory and experimental research of LC type passive humidity sensor, doctor's paper 2014); (3) an LC wireless passive humidity sensor research based on a two-dimensional sulfide material is designed in Luwen university and the like (Luwen, an LC wireless passive humidity sensor research based on a two-dimensional sulfide material [ D ]. Shanxi: university of Central and North instruments science and technology.2019); (4) LC temperature sensors based on ferroelectric ceramics (Ratao, Tankian, Wentangong, bear Jun.) developed by Rotao et al, Chongqing university, etc. (summary of research status and development trends of passive LC sensors [ J ]. Sensors and microsystems, 2014,33 (9): 11-14.); the problems of the developed LC wireless passive sensing material mainly include: resulting in an excessively long response time; the detection range is too narrow; too long an adsorption time and desorption time results in too slow a corresponding time. In addition, the LC passive wireless sensor involved at present can only detect one parameter of temperature or humidity.
Disclosure of Invention
The invention aims to solve the problems and provides a non-contact temperature and humidity sensor and a detection method thereof, wherein the sensor can normally operate under dangerous or special conditions, simultaneously monitors the temperature and the humidity, and has the advantages of simple manufacturing process, good linearity, high sensitivity, simple circuit, low energy consumption, long service life and the like.
PEDOT: PSS is a high molecular polymer aqueous solution composed of PEDOT and PSS. PEDOT (polyethylene dioxythiophene) is a high molecular polymer with EDOT (3, 4-ethylene dioxythiophene monomer) as a monomer, and PSS is polystyrene sulfonate. Due to the rapid reaction of PSS chains and moisture, PEDOT: PSS is able to respond to changes in external humidity. And the electrical conductivity of the polymer composite material is sensitive to temperature change. Therefore, the composite material can be used as an environmental information sensitive element to be manufactured into a temperature and humidity sensor. PEDOT: the PSS polymer has high light transmittance, high ductility, good mechanical property, good biocompatibility, excellent stability and solution processability. The conductivity of PEODT developed by Bayer corporation in the 80' S of the 20 th century can reach over 100S/cm. However, pure PEDOT itself is insoluble in water and cannot be melted. Its application has many limitations. PSS is a water-soluble polymer, and EDOT monomers and PSS are subjected to doping polymerization, so that the PSS can play a role of a doping agent, the stability of electric charge can be ensured, and the stable-performance PEDOT: aqueous PSS dispersion (PEDOT: PSS forms a dark blue colloidal dispersion in water), thus prepared PEDOT: the PSS film has higher conductivity. However, pure PEDOT: PSS is essentially rigid, very thin and brittle, with a strain at break of less than 10%, and very low sensitivity to moisture (about 0.2%/% RH) and temperature (about 0.1%/° c) without contact, indicating the need for further structural or molecular engineering to achieve high-ductility, high-performance contactless sensing.
For pure PEDOT: PSS, modified using PEDOT: PSS is assembled into a three-dimensional separable structure by an evaporation-induced assembly method, so that a novel conductive polymer material PEDOT is formed: PSS/latex with high performance contactless Sensing and ductility up to 340% (Zhiyong Wang, Tangdi Zhuang, and Hangxun xu. Stretchable Polymer Composite with a 3D segmented Structure of PEDOT: PSS for Multifunctional touch Sensing [ J ] ACS applied.
Modified PEDOT: PSS materials have mixed ionic/electronic conductivity and an inherent response capability to humidity and temperature. The invention designs and develops a non-contact temperature and humidity sensor based on a resistance-capacitance environment sensitive element based on the characteristics, so that the sensor has the advantages of higher response speed, higher sensitivity, lower detection limit, wider linear range, better selectivity and stability, and good application value in the aspect of non-contact flexible sensing.
In order to achieve the purpose, the non-contact temperature and humidity sensor provided by the invention comprises an interdigital capacitor, a resistor, a spiral inductor and a flexible substrate, wherein a through hole for installing the resistor is formed in the flexible substrate, the interdigital capacitor and the spiral inductor are respectively installed on two side surfaces of the flexible substrate, the resistor is installed in the through hole, and the interdigital capacitor, the resistor and the spiral inductor are connected in series.
According to the non-contact temperature and humidity sensor, the interdigital capacitor is used as an environment sensitive element of the temperature and humidity sensor, and the capacitance approximately forms a unidirectional linear relation to the change of temperature. The interdigital capacitor can be made of temperature and humidity sensitive materials commonly used in the field. In the present invention, the interdigital capacitor preferably employs PEDOT with a three-dimensional isolation structure: the PSS/Latex nano emulsion film is used for preparing a temperature sensitive capacitor, and the capacitor prepared from the material has a unidirectional linear relation to the temperature change. In the resonant circuit, a resonant frequency is generated, and the temperature monitoring can be realized by monitoring the resonant frequency of the real part of the impedance at the reading end. Furthermore, the flexible substrate is provided with a groove for mounting the interdigital capacitor, and the interdigital capacitor is mounted in the groove.
In the non-contact temperature and humidity sensor, the resistance is also an important component in the resonant circuit. The resistor can be made of temperature and humidity sensitive materials commonly used in the field. In the present invention, the resistor is preferably PEDOT: PSS/Latex nano emulsion film. Further preferred is PEDOT: PEDOT with PSS content of 1.6 wt%: PSS/Latex nano emulsion film. PEDOT: the PSS/Latex nano-Latex membrane material can deform under the action of temperature and humidity, and the conductivity can also be changed. The length, cross-sectional area and conductivity of the material are constant while the temperature and humidity are kept constant. By monitoring the resonance frequency of the real part of the impedance, the ambient temperature can be deduced, and then the amplitude of the real part of the impedance is monitored, so as to further determine the ambient humidity.
In the non-contact temperature and humidity sensor, the spiral inductor is not only a component of the resonant circuit of the invention, but also an important part for inductively coupling with the external coil and transmitting data. The spiral inductor is made of copper metal, and is preferably a square spiral inductor.
In the non-contact temperature and humidity sensor, the flexible substrate can be made of a flexible material commonly used in the field, and in the invention, the flexible substrate is preferably made of silicon.
The invention provides a non-contact temperature and humidity detection method, which uses the non-contact temperature and humidity sensor to detect temperature and humidity and comprises the following steps:
(1) temperature detection
Determining the change relation C (x) of capacitance values of the interdigital capacitors along with temperature;
determining a relation between the capacitance value of the interdigital capacitor and the resonant frequency f:
reading out the resonant frequency f according to an external reading device matched with the sensor, and combining the first step and the second step to obtain a detected temperature value;
(2) humidity detection
Determining the change relation R (x, y) of the resistance value of the resistor along with temperature and humidity;
determining a relation between the amplitude of the real impedance part of the external reading device and the quality factor of the sensor:
wherein: re (max) is the amplitude of the real part of the impedance at the output, r is the resistance of the external readout, f is the resonant frequency of the sensor, l is the inductance of the external readout, k is the coupling coefficient, Q is the quality factor,
combining the step I and the step II to obtain the following relational expression:
Re(max)＝Y(Q(R(x，y)，f))
and fourthly, substituting the resonance frequency f read by the external reading device and the amplitude Re (max) of the real impedance part of the output end and the temperature value obtained in the step (1) into the step (c) to obtain a detected humidity value.
The non-contact temperature and humidity sensor and the detection method provided by the invention have the following beneficial effects:
1. according to the non-contact temperature and humidity sensor, the interdigital capacitor, the resistor and the spiral inductor which are connected in series are arranged on the flexible substrate, the LC wireless passive sensing technology is utilized to realize simultaneous monitoring of temperature and humidity, and the non-contact temperature and humidity sensor has the advantages of good linearity, high sensitivity, simple circuit, low energy consumption and the like;
2. the non-contact temperature and humidity sensor is a flexible substrate, has small volume and simple structure, can be only about 1mm in size, is convenient to mount, is easily connected to various surfaces, is very suitable for wearable equipment and portable electronic products, and can normally operate under dangerous or special conditions.
3. Further, the invention makes full use of the PEDOT with the three-dimensional isolation structure: the PSS/XSB latex film has inherent response capability to humidity and temperature, so that the sensor disclosed by the invention has higher response speed and recovery time, higher sensitivity and wider temperature and humidity detection range.
Drawings
FIG. 1 is an exploded view of a non-contact temperature and humidity sensor according to the present invention;
FIG. 2 is a schematic view of a non-contact temperature and humidity sensor according to the present invention;
FIG. 3 is a schematic circuit diagram of the non-contact temperature and humidity sensor of the present invention;
FIG. 4 is a schematic diagram of a circuit for inductive coupling of an external readout device to a non-contact temperature and humidity sensor of the present invention;
description of reference numerals: 1. an interdigital capacitor; 2. a resistance; 3. a flexible substrate; 4. a spiral inductor.
Detailed Description
So that the technical solutions of the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings, it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, belong to the present invention.
In this embodiment, the non-contact temperature and humidity sensor is shown in fig. 1-2, and includes an interdigital capacitor 1, a resistor 2, a spiral inductor 4, and a flexible substrate 3.
One side of the flexible substrate 3 is provided with a groove for mounting the interdigital capacitor 1 and a through hole for mounting the resistor 2. The interdigital capacitor 1 is arranged in the groove, and the spiral inductor 4 is arranged on the other side surface of the flexible substrate 3 opposite to the side surface where the interdigital capacitor 1 is arranged. The resistor 2 is mounted in the through hole. The interdigital capacitor 1, the resistor 2 and the spiral inductor 4 are connected in series.
In the present embodiment, the flexible substrate 3 is made of silicon. The interdigital capacitor 1 and the resistor 2 both adopt PEDOT with a three-dimensional isolation structure: PSS/Latex nano emulsion film. PEDOT: PEDOT in the PSS/Latex nano emulsion film: the PSS content was 1.6 wt%. The spiral inductor 4 is a square spiral inductor and is made of copper.
The detection principle of the non-contact temperature and humidity sensor according to the present invention will be briefly described below.
When two coils form a network, if the current or voltage of one coil changes, the current or voltage of the other coil will also change correspondingly through the electromagnetic coupling between the two coils. The electromagnetic coupling phenomenon provides a method for realizing wireless detection of the LC passive temperature and humidity sensor. In this embodiment, the wireless measurement of the non-contact temperature and humidity sensor of the present invention is realized by an external readout device. The external readout device comprises an external detection coil and a network analyzer which are connected.
As shown in fig. 3, the interdigital capacitor 1, the resistor 2, and the spiral inductor 4 are sequentially connected in series to form a resonant circuit. The spiral inductor 4 is not only a component of the resonant circuit, but also an important part for inductively coupling with an external detection coil and transferring data. The circuit schematic of the inductive coupling of the external readout (i.e., output) to the present sensor is shown in fig. 4. Wherein, L is the equivalent inductance of the sensor, R is the equivalent resistance of the sensor, and C is the equivalent capacitance of the sensor; l is the equivalent inductance of the external detection coil, and r is the equivalent resistance of the external detection coil.
By generating inductive coupling with an external detection coil, the impedance and frequency curve of the sensor is analyzed and read by the network analyzer, and the resonance frequency and the amplitude of the impedance real part of the sensor can be obtained according to the resonance phenomenon when the network analyzer is consistent with the scanning frequency of the inductive coupling, so that the detection of the sensor signal is realized, and the LC wireless passive function is realized.
The method for detecting the temperature and humidity of the sensor according to the present embodiment will be further described based on the above detection principle.
Temperature detection
The capacitance value of the interdigital capacitor 1 and the change of the temperature form a one-way linear relation, and the capacitance value of the interdigital capacitor 1 can be detected by monitoring the resonant frequency of the sensor, so that the temperature value is obtained.
The relationship between the resonance frequency and the capacitance value is shown in formula (1):
wherein: f-the resonant frequency of the sensor, the inductance of the L-sensor, and the capacitance of the C-sensor.
For a steady state, a constant humidity and temperature environment. Assume a temperature of x and a humidity of y. And measuring capacitance values of the interdigital capacitor 1 at different temperatures, and fitting to obtain a monotonic function C (x) of the capacitance value of the interdigital capacitor 1 along with the change of the temperature x.
The resonant circuit of the sensor generates a resonant frequency f, which is related to the temperature as shown in equation (2):
the above formula (2) can be transformed into formula (3):
the resonance frequency f can be read from an external reading device, so that a single temperature value can be determined from the value of the resonance frequency, and the temperature can be detected.
(II) humidity detection
The resistor 2 will deform under the action of different temperatures and humidities, the conductivity will change, and the resistance of the sensor will change accordingly. The resistance in the sensor resonant circuit affects the quality factor of the resonant circuit, which in turn affects the magnitude of the real part of the impedance at the output. Therefore, by monitoring the amplitude of the real part of the impedance at the output end, the quality factor of the resonance circuit can be obtained, and further the resistance of the resonance circuit can be obtained, wherein the resistance is a function of temperature and humidity, and the humidity value can be measured after the temperature is measured by the method provided above.
The amplitude of the real impedance part of the output end can be obtained at the output end of the real impedance part, and the relation between the amplitude of the real impedance part of the output end and the quality factor is shown as the formula (3):
wherein: re (max) is the amplitude of the real part of the impedance at the output end, r is the resistance of the external readout device, f is the resonant frequency of the sensor, l is the inductance of the external readout device, k is the coupling coefficient, and Q is the quality factor.
The magnitude re (max) of the real part of the impedance at the output can be read directly from an external readout device and is therefore a known value, as are r and l. The coupling coefficient k is related to the coupling distance and the effective radius of the external detection coil, and is unrelated to temperature and humidity, and k is also a constant value because the effective radius and the coupling distance of the external detection coil can be determined. Re (max) is thus a unary function of the quality factor Q for the resonant circuit, and since Q is small, re (max) is a monotonic function of Q, it can be derived from the known maximum value re (max) of the real part of the impedance.
The quality factors of the sensor resonant circuit are:
wherein: q is the quality factor, L is the inductance of the sensor circuit, f is the resonant frequency of the sensor circuit, and R is the resistance of the sensor circuit.
Since the resistance value is affected by temperature and humidity, a functional relationship of the resistance value with respect to temperature x and humidity y is defined as R (x, y). The quality factor Q, the temperature x and the humidity y are shown as the formula (6):
from equations (4) and (6):
Re(max)＝Y(Q(R(x，y)，f)) (7)。
the resistance values of the resistor 2 under different temperatures and humidities are measured, and a function R (x, y) of the resistance value of the resistor 2 along with the change of the temperature x and the humidity y can be obtained through curve fitting.
The amplitude re (max) of the real part of the impedance at the output, the resonance frequency f, can be read directly from an external reading device, and the temperature x can also be determined by the method given above, whereby a single humidity can be determined and thus the humidity.
The environmental temperature can be obtained by monitoring the resonance frequency of the real part of the impedance, then the amplitude of the real part of the impedance is monitored, the environmental humidity is further determined, and the function of simultaneously measuring the temperature and the humidity is achieved.
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.
Claims (6)
1. A non-contact temperature and humidity detection method is characterized by comprising the following steps: the temperature and humidity detection is carried out by using a non-contact temperature and humidity sensor, the non-contact temperature and humidity sensor comprises an interdigital capacitor, a resistor, a spiral inductor and a flexible substrate, a through hole for installing the resistor is formed in the flexible substrate, the interdigital capacitor and the spiral inductor are respectively installed on two side surfaces of the flexible substrate, the resistor is installed in the through hole, and the interdigital capacitor, the resistor and the spiral inductor are connected in series;
the detection method specifically comprises the following steps:
(1) temperature detection
Determining the change relation C (x) of capacitance values of the interdigital capacitors along with temperature;
determining a relation between the capacitance value of the interdigital capacitor and the resonant frequency f:
wherein: f is the resonant frequency of the sensor, and L is the inductance of the sensor;
reading out the resonant frequency f according to an external reading device matched with the sensor, and combining the first step and the second step to obtain a detected temperature value;
(2) humidity detection
Determining the change relation R (x, y) of the resistance value of the resistor along with temperature and humidity;
determining a relation between the amplitude of the real impedance part of the external reading device and the quality factor of the sensor:
wherein: re (max) is the amplitude of the real part of the impedance at the output, r is the resistance of the external readout, f is the resonant frequency of the sensor, l is the inductance of the external readout, k is the coupling coefficient, Q is the quality factor,
l is the inductance of the sensor;
combining the step I and the step II to obtain the following relational expression:
Re(max)＝Y(Q(R(x,y)，f))
and fourthly, substituting the resonance frequency f read by the external reading device and the amplitude Re (max) of the real impedance part of the output end and the temperature value obtained in the step (1) into the step (c) to obtain a detected humidity value.
2. The non-contact temperature and humidity detecting method according to claim 1, comprising: the interdigital capacitor adopts PEDOT with a three-dimensional isolation structure: PSS/Latex nano emulsion film.
3. The non-contact temperature and humidity detecting method according to claim 1, comprising: the resistor adopts PEDOT with a three-dimensional isolation structure: PSS/Latex nano emulsion film.
4. The non-contact temperature and humidity detection method according to any one of claims 1 to 3, characterized in that: the spiral inductor is made of metal copper.
5. The non-contact temperature and humidity detection method according to any one of claims 1 to 3, characterized in that: the flexible substrate is made of silicon.
6. The non-contact temperature and humidity detection method according to claim 2 or 3, characterized in that: the flexible substrate is provided with a groove for mounting the interdigital capacitor, and the interdigital capacitor is mounted in the groove.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19644290A1 (en) * | 1996-10-24 | 1998-05-07 | Fraunhofer Ges Forschung | Sensor for simultaneous measurement of two properties of substance in fluid |
| JP3982182B2 (en) * | 2001-02-01 | 2007-09-26 | セイコーエプソン株式会社 | Surface acoustic wave device and manufacturing method thereof |
| CN102944325A (en) * | 2012-11-29 | 2013-02-27 | 东南大学 | Passive wireless temperature and humidity integrated sensor |
| CN105806393A (en) * | 2014-12-31 | 2016-07-27 | 青岛中科软件股份有限公司 | Humiture sensor |
| CN105809921A (en) * | 2014-12-31 | 2016-07-27 | 青岛中科软件股份有限公司 | Temperature and humidity acquiring system based on wireless sensor network |
| CN106197537A (en) * | 2016-06-29 | 2016-12-07 | 东南大学 | The passive wireless sensor that a kind of humiture is integrated |
| CN107144370A (en) * | 2012-03-26 | 2017-09-08 | 泰克年研究发展基金会公司 | For combination sensing pressure, the platform unit of temperature and humidity |
| CN108507621A (en) * | 2018-05-18 | 2018-09-07 | 中国科学院上海硅酸盐研究所 | Passive and wireless pressure, temperature integrated sensor based on LTCC and preparation method thereof |
| CN209605973U (en) * | 2019-04-26 | 2019-11-08 | 南京邮电大学 | A kind of LC formula Temperature Humidity Sensor |
-
2020
- 2020-08-17 CN CN202010824911.1A patent/CN111964721B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19644290A1 (en) * | 1996-10-24 | 1998-05-07 | Fraunhofer Ges Forschung | Sensor for simultaneous measurement of two properties of substance in fluid |
| JP3982182B2 (en) * | 2001-02-01 | 2007-09-26 | セイコーエプソン株式会社 | Surface acoustic wave device and manufacturing method thereof |
| CN107144370A (en) * | 2012-03-26 | 2017-09-08 | 泰克年研究发展基金会公司 | For combination sensing pressure, the platform unit of temperature and humidity |
| CN102944325A (en) * | 2012-11-29 | 2013-02-27 | 东南大学 | Passive wireless temperature and humidity integrated sensor |
| CN105806393A (en) * | 2014-12-31 | 2016-07-27 | 青岛中科软件股份有限公司 | Humiture sensor |
| CN105809921A (en) * | 2014-12-31 | 2016-07-27 | 青岛中科软件股份有限公司 | Temperature and humidity acquiring system based on wireless sensor network |
| CN106197537A (en) * | 2016-06-29 | 2016-12-07 | 东南大学 | The passive wireless sensor that a kind of humiture is integrated |
| CN108507621A (en) * | 2018-05-18 | 2018-09-07 | 中国科学院上海硅酸盐研究所 | Passive and wireless pressure, temperature integrated sensor based on LTCC and preparation method thereof |
| CN209605973U (en) * | 2019-04-26 | 2019-11-08 | 南京邮电大学 | A kind of LC formula Temperature Humidity Sensor |
Non-Patent Citations (3)
| Title |
|---|
| CMOS工艺兼容的温湿度传感器;彭韶华等;《半导体学报》;20050731;第26卷(第7期);第1428-1432页 * |
| Stretchable Polymer Composite with a 3D Segregated Structure of PEDOT:PSS for Multifunctional Touchless Sensing;Zhiyong Wang等;《ACS A pplied Materials & interfaces》;20191231;全文 * |
| 无源无线温湿度传感器研究;任青颖;《中国博士学位论文全文数据库 信息科技辑》;20170915(第9期);第I140-37页 * |
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