CN103543175A - LC (Inductance-Capacitance) passive wireless micro humidity sensor applied to terminal of Internet of Things - Google Patents
LC (Inductance-Capacitance) passive wireless micro humidity sensor applied to terminal of Internet of Things Download PDFInfo
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- CN103543175A CN103543175A CN201310299010.5A CN201310299010A CN103543175A CN 103543175 A CN103543175 A CN 103543175A CN 201310299010 A CN201310299010 A CN 201310299010A CN 103543175 A CN103543175 A CN 103543175A
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Abstract
The invention discloses an LC (Inductance-Capacitance) passive wireless micro humidity sensor applied to the terminal of Internet of Things, wherein a first layer of the LC passive wireless micro humidity sensor is a flexible substrate, a second layer thereof is an LC metal layer, a third layer thereof is a humidity-sensitive medium layer, and a fourth layer thereof is a paraffin protective layer; the flexible substrate is made of flexible PCB (Printed Circuit Board) material and PI (Prodium Iodide) material; the LC metal layer is arranged on the upper part of the flexible substrate and made of copper metal material; the humidity-sensitive medium layer is arranged on the upper part of the LC metal layer; the paraffin protective layer is arranged on the upper part of the humidity-sensitive medium layer and used for insulating and isolating. Through the LC passive wireless micro humidity sensor, the thickness of the flexible substrate, the LC metal layer and the humidity-sensitive medium layer, the interdigital capacitor set number, the width, the length and the space of the interdigital capacitor electrode, the number of cycles of the inductor, and the structure size of the inductor are adjusted, so that the resonant frequency, the measurement range, the sensitivity and the precision of the humidity sensor can be controlled, and the functional requirements of different measuring environments on the humidity sensor are met.
Description
Technical field
The invention belongs to technical field of manufacturing semiconductors, relate in particular to a kind of LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal.
Background technology
Internet of Things is called as the third wave of information industry after computing machine, internet, for 21st century whole world industrialization, urbanization process provide revolutionary infotech and intellectual technology.Tower seat as Internet of Things " pyramid ", internet-of-things terminal node-sensor, to be total demand maximum and most basic link in whole Internet of Things industrial chain, the technical merit of internet-of-things terminal node and related industry thereof and speed of development be by the speed of development of direct ectocrine networking.
Sensor terminal is the application vector of Internet of Things, and sensor unit, except meeting the basic function requirements such as article code, physical quantity collection and storage, radio communication, also will be considered passive, idle or low-power consumption, volume miniaturization and microminiaturization etc.Thereby the sensor of novel low-cost, high reliability, wide purposes realizes the commanding elevation that technology is not only technology, also there are immeasurable market-oriented bright prospects simultaneously.
Passive wireless sensor is comprised of inductance and interpolation electric capacity, can be widely used in the measurement of sensing amount as humidity, gas concentration etc., and all capacitive effect based on to LC oscillatory circuit to be measured change sensor resonant frequency, extract related physical quantity.Current LC passive sensor comprises three layers, bottom conductor is placed on and on substrate, forms interdigital capacitor and inductance, intermediate insulating layer is in order to isolate two conductor layers, top conductor layer is for connecting the other end of electric capacity and inductance, current this traditional sensor construction and complex process, cost increases, and rigid substrates material has also limited the expanded application of sensor, and measurement range, sensitivity and precision await further raising.
Summary of the invention
The invention provides a kind of LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal, be intended to solve structure and the complicated process of preparation of existing LC passive sensor, manufacturing cost is higher, the use of rigid substrates material has simultaneously limited the expanded application of sensors with auxiliary electrode were, the problem that measurement range, sensitivity and precision are poor.
The object of the present invention is to provide a kind of LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal, this LC passive and wireless Miniature humidity sensor comprises:
Flexible base, board, adopts flexible PCB material and PI material to make;
LC metal level, is arranged on the top of described flexible base, board, adopts copper metal material to make;
Wet sensitive dielectric layer, is arranged on the top of described LC metal level;
Paraffin-protected layer, is arranged on the top of described wet sensitive dielectric layer, for the isolation of insulating.
Further, the length of flexible base, board, width and thickness are respectively 46.5 * 31.5 * 0.35mm.
Further, the length of described LC metal level is 38.2mm, and width is 23mm.
Further, in described LC metal level, the thickness of copper metal is 0.02mm, and interdigital capacitor C is 18 groups, and interdigital length is 20.9mm, and interdigital width is 0.5mm, and interdigital spacing is 0.1mm, and the length of interdigital capacitor group is 23mm, and width is 13.2mm;
In spiral inductance coil, the length of side is 7.6mm, and the outer length of side is 23mm, and coil width is 0.5mm, and coil-span is 0.1mm, and the spacing of interdigital capacitor group and spiral inductance coil is 2mm;
Described wet sensitive dielectric layer is the film that wet sensitive PI material is made, and is evenly coated between the copper metal layer of interdigital capacitor group in described LC metal level, and the thickness of described wet sensitive dielectric layer is 0.001mm;
Described paraffin-protected layer covers the spiral inductance coiler part on described LC metal level completely, and thickness is 0.1mm.
Further, the specific inductive capacity of described wet sensitive dielectric layer is 3.6.
The LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal provided by the invention, this LC passive and wireless Miniature humidity sensor ground floor is flexible base, board, the second layer is LC metal level, the 3rd layer is wet sensitive dielectric layer, the 4th layer is paraffin-protected layer, flexible base, board adopts flexible PCB material and PI material to make, LC metal level is arranged on the top of flexible base, board, adopt copper metal material to make, wet sensitive dielectric layer is arranged on the top of LC metal level, paraffin-protected layer is arranged on the top of wet sensitive dielectric layer, for the isolation of insulating, preparation technology's flow process of humidity sensor has been simplified in the employing of flexible base, board, reduced production cost, and widened the applied environment of humidity sensor, the present invention simultaneously can be by adjusting flexible base, board, the thickness of LC metal level and wet sensitive dielectric layer, interdigital capacitor group number, interdigital capacitor electrode width, length and spacing, the number of turns of inductance, the physical dimension of inductance, make the resonance frequency of humidity sensor, measurement range, sensitivity, precision is controlled, thereby meet the functional requirement of different measuring environment to humidity sensor, simple in structure, practical, having stronger propagation and employment is worth.
Accompanying drawing explanation
Fig. 1 is the structural representation of the LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal that provides of the embodiment of the present invention;
Fig. 2 is the circuit model figure of the LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal that provides of the embodiment of the present invention;
Fig. 3 is the testing circuit illustraton of model that the embodiment of the present invention provides.
In figure: 11, flexible base, board; 12, LC metal level; 121, interdigital capacitor group; 122, spiral inductance coil; 13, wet sensitive dielectric layer; 14, paraffin-protected layer.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is described in further detail.Should be appreciated that specific embodiment described herein is only in order to explain the present invention, and be not used in restriction invention.
Fig. 1 shows the structure of the LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal that the embodiment of the present invention provides.For convenience of explanation, only show part related to the present invention.
This LC passive and wireless Miniature humidity sensor comprises:
Flexible base, board 11, adopts flexible PCB material and PI material to make;
Wet sensitive dielectric layer 13, is arranged on the top of LC metal level 12;
Paraffin-protected layer 14, is arranged on the top of wet sensitive dielectric layer 13, for the isolation of insulating.
In embodiments of the present invention, the length of flexible base, board 11, width and thickness are respectively 46.5 * 31.5 * 0.35mm.
In embodiments of the present invention, the length of LC metal level 12 is 38.2mm, and width is 23mm.
In embodiments of the present invention, in LC metal level 12, the thickness of copper metal is 0.02mm, and interdigital capacitor C is 18 groups, and interdigital length is 20.9mm, and interdigital width is 0.5mm, and interdigital spacing is 0.1mm, and the length of interdigital capacitor group 121 is 23mm, and width is 13.2mm;
The interior length of side of spiral inductance coil 122 is 7.6mm, and the outer length of side is 23mm, and coil width is 0.5mm, and coil-span is 0.1mm, and the spacing of interdigital capacitor group 121 and spiral inductance coil 122 is 2mm;
The film that wet sensitive dielectric layer 13 is made for wet sensitive PI material, and be evenly coated between the copper metal layer of interdigital capacitor group 121 in LC metal level 12, the thickness of wet sensitive dielectric layer 13 is 0.001mm;
Paraffin-protected layer 14 spiral inductance coil 122 part covering completely on LC metal level 12, thickness is 0.1mm.
In embodiments of the present invention, the specific inductive capacity of wet sensitive dielectric layer 13 is 3.6.
Below in conjunction with drawings and the specific embodiments, application principle of the present invention is further described.
The object of the present invention is to provide that a kind of volume is little, idle, measurement range are large, high precision, the individual layer LC passive and wireless Miniature humidity sensor of high sensitivity based on flexible base, board 11, to meet the functional requirement of internet-of-things terminal node to humidity sensor.
Object of the present invention is achieved through the following technical solutions:
A passive and wireless LC Miniature humidity sensor for internet-of-things terminal, as depicted in figs. 1 and 2, is characterized in that, comprising:
Ground floor is flexible base, board 11: select and have high temperature resistant, lightweight, outstanding mechanical property, permanance, outstanding radiation resistance, remarkable chemical resistance, excellent obstruct and electrical specification, high-purity, impermeabilisation, low cost, the material of the features such as easy processing;
The second layer is LC metal level 12: select good conductivity, resistance is low, the metal material of anti-moisture attacks;
The 3rd layer for wet sensitive dielectric layer 13: select humidity sensing characteristic good, stable performance, and with CMOS technique compatible humidity-sensitive material mutually;
The 4th layer is paraffin-protected layer 14: be used for protecting telefault to be short-circuited in the course of work, cause component failure;
Should be based on flexible base, board 11LC passive and wireless individual layer Miniature humidity sensor, the material that flexible base, board 11 is selected is: APTIV film 1000 series, thickness is 200 microns, and length is 45 millimeters, and width is 30 millimeters, and specific inductive capacity is 3.6; LC metal level 12 material selection copper, interdigital capacitor C is 18 groups.
The present invention compared with prior art, has following remarkable advantage:
(1) the present invention is owing to adopting flexible base, board 11, can simplification of flowsheet, and reduce costs, and greatly widened the applied environment of humidity sensor;
(2) the present invention, owing to having adopted single-layer metal layer to realize humidity sensor function, can effectively increase the capacitance of lc circuit, thereby reduces the resonance frequency of sensor, effectively reduces Computer-Assisted Design, Manufacture And Test flow process simultaneously, and has reduced production and application cost;
(3) the present invention, owing to adopting the mode of LC passive and wireless to carry out Humidity Detection, can be applied in special rugged surroundings and carry out remote monitoring, also can be applied to the harmless Humidity Detection of article in packing simultaneously;
(4) the present invention adopts and CMOS technique compatible preparation method mutually, can on a chip, prepare the senser element that other physical quantitys detect simultaneously, forms many physical quantity transducers system, meets the functional requirement of internet-of-things terminal node to physical quantity detection.
(5) the present invention can be by adjusting flexible base, board 11, LC metal level 12 and wet sensitive dielectric layer 13 thickness, interdigital capacitor group 121 numbers, interdigital capacitor electrode width, length and spacing, the number of turns of inductance are, these key factors of the physical dimension of inductance, make resonance frequency, measurement range, sensitivity, the precision of humidity sensor controlled, thereby meet the functional requirement of different measuring environment to humidity sensor.
With reference to Fig. 1, device of the present invention comprises four layers, and ground floor is flexible base, board 11, and the second layer is that 12, the three layers of LC metal levels are that 13, the four layers of wet sensitive dielectric layers are paraffin-protected layer 14.
Ground floor is flexible base, board 11, selects flexible PCB material and PI material, and length, width and thickness are respectively 46.5 * 31.5 * 0.35mm;
The second layer is LC metal level 12, adopts copper metal material, and the thickness of copper is 0.02mm, and interdigital capacitor C is 18 groups, and interdigital length is 20.9mm, and interdigital width is 0.5mm, and interdigital spacing is 0.1mm, and the length of interdigital capacitor group 121 is 23mm, and width is 13.2mm; The interior length of side of spiral inductance coil 122 is 7.6mm, and the outer length of side is 23mm, and coil width is 0.5mm, and coil-span is 0.1mm; The spacing of interdigital capacitor group 121 and spiral inductance coil 122 is 2mm, and the length of whole LC metal level 12 is 38.2mm, and width is 23mm;
The 3rd layer is wet sensitive dielectric layer 13, and the film that adopts wet sensitive PI material to form, is evenly coated in interdigital capacitor group 121 metal interlevels, and thickness is 0.001mm;
The 4th layer is paraffin-protected layer 14, covers upper spiral inductance coil 122 parts completely, and thickness is 0.1mm.
Effect of the present invention can further illustrate by following emulation:
Fig. 2 shows the circuit model of the LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal that the embodiment of the present invention provides, and after capacitor C is in parallel with resistance R, is connected in series with inductance L.
Adopt electromagnetic field simulation software Ansoft-HFSS and MATLAB to carry out simulation analysis to preferred embodiment, obtain the electromagnetic coupled field analogous diagram of device of the present invention.
The LC passive and wireless Miniature humidity sensor that is applied to internet-of-things terminal that the embodiment of the present invention provides, this LC passive and wireless Miniature humidity sensor ground floor is flexible base, board 11, the second layer is LC metal level 12, the 3rd layer is wet sensitive dielectric layer 13, the 4th layer is paraffin-protected layer 14, flexible base, board 11 adopts flexible PCB material and PI material to make, LC metal level 12 is arranged on the top of flexible base, board 11, adopt copper metal material to make, wet sensitive dielectric layer 13 is arranged on the top of LC metal level 12, paraffin-protected layer 14 is arranged on the top of wet sensitive dielectric layer 13, isolation is used for insulating, preparation technology's flow process of humidity sensor has been simplified in the employing of flexible base, board 11, reduced production cost, and widened the applied environment of humidity sensor, the present invention simultaneously can be by adjusting flexible base, board 11, the thickness of LC metal level 12 and wet sensitive dielectric layer 13, interdigital capacitor group 121 numbers, interdigital capacitor electrode width, length and spacing, the number of turns of inductance, the physical dimension of inductance, make the resonance frequency of humidity sensor, measurement range, sensitivity, precision is controlled, thereby meet the functional requirement of different measuring environment to humidity sensor, simple in structure, practical, having stronger propagation and employment is worth.
These are only preferred embodiment of the present invention, not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (5)
1. be applied to a LC passive and wireless Miniature humidity sensor for internet-of-things terminal,
It is characterized in that, this LC passive and wireless Miniature humidity sensor comprises:
Flexible base, board, adopts flexible PCB material and PI material to make;
LC metal level, is arranged on the top of described flexible base, board, adopts copper metal material to make;
Wet sensitive dielectric layer, is arranged on the top of described LC metal level;
Paraffin-protected layer, is arranged on the top of described wet sensitive dielectric layer, for the isolation of insulating.
2. LC passive and wireless Miniature humidity sensor as claimed in claim 1, is characterized in that, the length of flexible base, board, width and thickness are respectively 46.5 * 31.5 * 0.35mm.
3. LC passive and wireless Miniature humidity sensor as claimed in claim 1, is characterized in that, the length of described LC metal level is 38.2mm, and width is 23mm.
4. LC passive and wireless Miniature humidity sensor as claimed in claim 1, it is characterized in that, in described LC metal level, the thickness of copper metal is 0.02mm, interdigital capacitor C is 18 groups, interdigital length is 20.9mm, and interdigital width is 0.5mm, and interdigital spacing is 0.1mm, the length of interdigital capacitor group is 23mm, and width is 13.2mm;
In spiral inductance coil, the length of side is 7.6mm, and the outer length of side is 23mm, and coil width is 0.5mm, and coil-span is 0.1mm, and the spacing of interdigital capacitor group and spiral inductance coil is 2mm;
Described wet sensitive dielectric layer is the film that wet sensitive PI material is made, and is evenly coated between the copper metal layer of interdigital capacitor group in described LC metal level, and the thickness of described wet sensitive dielectric layer is 0.001mm;
Described paraffin-protected layer covers the spiral inductance coiler part on described LC metal level completely, and thickness is 0.1mm.
5. LC passive and wireless Miniature humidity sensor as claimed in claim 1, is characterized in that, the specific inductive capacity of described wet sensitive dielectric layer is 3.6.
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Cited By (8)
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| CN107121444A (en) * | 2017-03-28 | 2017-09-01 | 东南大学 | A kind of passive and wireless humidity sensor detected based on RCS |
| CN110006978A (en) * | 2018-01-05 | 2019-07-12 | 张家港万众一芯生物科技有限公司 | A kind of arrays of interdigitated electrodes sensor applied to chlorine residue in quantitative detection water |
| CN110110836A (en) * | 2019-05-20 | 2019-08-09 | 上海优比科电子科技有限公司 | Radio frequency anti-theft tag |
| CN111060230A (en) * | 2019-12-27 | 2020-04-24 | 天津大学 | Manufacturing method of wireless passive flexible pressure sensor based on LC resonance |
| US10782259B2 (en) | 2017-11-23 | 2020-09-22 | At&S Austria Technologie & Systemtechnik Aktiengesellschaft | Determining a physical quantity with a native component carrier |
| CN112034019A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Passive wireless humidity sensor based on cantilever beam structure |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN115128702A (en) * | 2022-06-07 | 2022-09-30 | 江南大学 | Composite microwave sensor and detection method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107121444A (en) * | 2017-03-28 | 2017-09-01 | 东南大学 | A kind of passive and wireless humidity sensor detected based on RCS |
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| CN111060230A (en) * | 2019-12-27 | 2020-04-24 | 天津大学 | Manufacturing method of wireless passive flexible pressure sensor based on LC resonance |
| CN112034019A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Passive wireless humidity sensor based on cantilever beam structure |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN115128702A (en) * | 2022-06-07 | 2022-09-30 | 江南大学 | Composite microwave sensor and detection method |
| CN115128702B (en) * | 2022-06-07 | 2023-07-04 | 江南大学 | Composite microwave sensor and detection method |
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Application publication date: 20140129 |