CN111946592A - Vacuum exhaust device and vacuum exhaust method - Google Patents
Vacuum exhaust device and vacuum exhaust method Download PDFInfo
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- CN111946592A CN111946592A CN202010840728.0A CN202010840728A CN111946592A CN 111946592 A CN111946592 A CN 111946592A CN 202010840728 A CN202010840728 A CN 202010840728A CN 111946592 A CN111946592 A CN 111946592A
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- 238000005086 pumping Methods 0.000 claims abstract description 15
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- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
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- 238000009413 insulation Methods 0.000 claims description 16
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- 239000000523 sample Substances 0.000 claims description 8
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- 230000007246 mechanism Effects 0.000 claims description 5
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
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- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B51/00—Testing machines, pumps, or pumping installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H7/00—Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release
- F24H7/002—Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release using electrical energy supply
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/02—Casings; Cover lids; Ornamental panels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/20—Arrangement or mounting of control or safety devices
- F24H9/2064—Arrangement or mounting of control or safety devices for air heaters
- F24H9/2071—Arrangement or mounting of control or safety devices for air heaters using electrical energy supply
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention relates to the technical field of vacuumizing, and particularly discloses a vacuum exhaust device and a vacuum exhaust method, wherein the vacuum exhaust device comprises a main pipeline piece, a dry-type scroll pump, a leak detector, a molecular pump, a vacuum detector and a plurality of first valve bodies, wherein the dry-type scroll pump is communicated with the main pipeline piece through the molecular pump, and the main pipeline piece is communicated with a plurality of external exhaust devices through the plurality of first valve bodies; the leak detector is respectively communicated with the dry scroll pump and the molecular pump, the vacuum detector is used for measuring the vacuum degree of the exhaust device, and the leak detector is used for measuring whether air leakage occurs or not; the vacuum exhaust device has simple structure and convenient use, and can complete the exhaust and vacuum pumping of a plurality of exhaust devices at one time; through the arrangement of the leak detector, the first valve body is used for conveniently and quickly closing the air leaking exhaust device; the accuracy and consistency of the vacuum degrees of a plurality of exhaust devices are ensured by means of a vacuum detector; the vacuum-pumping efficiency and the vacuum-pumping yield of the exhaust device are improved.
Description
Technical Field
The invention relates to the technical field of vacuumizing, and particularly discloses a vacuum exhaust device and a vacuum exhaust method.
Background
Infrared radiation is everywhere around people, an infrared thermal image is used for observing an object without an external light source, the infrared thermal image has better smoke penetrating capability compared with visible light, and the infrared thermal image is an important supplementary means for a visible light image. The infrared radiation detection and utilization can penetrate into various aspects of modern military, industry and life, and can be widely applied to a plurality of fields such as infrared guidance, infrared night vision, security monitoring, vision enhancement and the like.
Because human eyes do not respond to infrared radiation, a special infrared detector is required to be used for sensing and detecting infrared radiation, a microbolometer uncooled infrared focal plane array detector is a commonly-used infrared detector, the research on the microbolometer uncooled infrared focal plane array detector starts at the end of the 20 th century, the 21 st century starts to enter large-scale mass production and application, and particularly with the large-scale application in the fields of security, automobiles and the like of commercial and civil use outside the application in the military field, the explosive growth is expected with the increase of product pixels and the reduction of price after 2020.
The uncooled infrared focal plane array detector of the microbolometer is made by utilizing the sensitivity of the body resistance of an object to the temperature, in order to increase the thermal insulation property of a device as much as possible and reduce the thermal conductance so as to improve the sensitivity of the device, the problem is solved by adopting a suspension microbridge structure realized by adopting an MEMS technology at present, the microbridge mainly adopts two arms to support to realize the thermal insulation, Si and N are used as supporting films, a silicon substrate below the microbridge is hollowed out, polycrystalline germanium silicon Poly-Si07Ge03 is manufactured on the bridge surface of the microbridge, a film resistor is used as a thermal detection source, and in order to improve the absorption of infrared, composite films such as SiO/SiN and the like are also arranged as an infrared absorption layer.
The detector is made by using the sensitivity of the resistance of an object to temperature, and the heat conduction must be reduced to improve the sensitivity of the device, the density of gas molecules must be reduced in the device to be encapsulated in a vacuum environment, and the heat conduction of the gas molecules is reduced to the minimum, so the ultrahigh vacuum exhaust technology is a key process for producing the non-refrigerated infrared focal plane array detector of the microbolometer and is a restricted bottleneck for increasing the yield.
The exhaust vacuumizing structure for exhaust devices such as a microbolometer uncooled infrared focal plane array detector in the prior art is complex, time and labor are wasted in operation and use, the exhaust vacuumizing process is uncontrollable, the use is extremely inconvenient, and the exhaust vacuumizing efficiency of the exhaust devices is low and the yield is unstable.
Disclosure of Invention
In order to overcome the defects and shortcomings in the prior art, the invention aims to provide a vacuum exhaust device and a vacuum exhaust method, which have simple structure and convenient use, and can finish the exhaust and vacuum pumping of a plurality of exhaust devices at one time; through the arrangement of the leak detector, the first valve body is used for conveniently and quickly closing the air leaking exhaust device; the accuracy and consistency of the vacuum degrees of a plurality of exhaust devices are ensured by means of a vacuum detector; the vacuum-pumping efficiency and the vacuum-pumping yield of the exhaust device are improved.
In order to achieve the purpose, the vacuum exhaust device comprises a main pipeline part, a dry scroll pump, a leak detector, a molecular pump, a vacuum detector and a plurality of first valve bodies, wherein the dry scroll pump is communicated with the main pipeline part through the molecular pump, the main pipeline part is respectively communicated with a plurality of external exhaust devices through the plurality of first valve bodies, and the first valve bodies are used for regulating and controlling the connection and disconnection of the main pipeline part and the exhaust devices; the first valve bodies and the exhaust devices are in one-to-one correspondence, the leak detector is respectively communicated with the dry type scroll pump and the molecular pump, the dry type scroll pump is matched with the molecular pump and used for performing vacuum exhaust on the exhaust devices, the vacuum detector is used for measuring the vacuum degree of the exhaust devices, and the leak detector is used for measuring whether air leakage occurs or not.
Wherein, still include elevating system and with the case that toasts that elevating system cooperation was used, elevating system is used for driving toasting the case cover and establishes main pipeline spare and with the exhaust device of main pipeline spare intercommunication, toasts the case and is used for heating exhaust device, dry-type scroll pump and molecular pump cooperation and carry out vacuum exhaust to toasting the exhaust device of case heating.
The baking box comprises a heat conduction box, an outer shell box covered on the outer side of the heat conduction box, a heating electrode arranged between the heat conduction box and the outer shell box, a driving motor arranged on the outer shell box, and a fan arranged on an output shaft of the driving motor; an air passing gap is formed between the heat conduction box and the outer shell box, and the driving motor and the fan are both positioned in the air passing gap; the heat conduction box is provided with a containing blind cavity for containing the main pipeline part and the exhaust part, and the containing blind cavity penetrates through the bottom surface of the heat conduction box; the lifting mechanism is for connection to the upper end of the outer housing box.
The baking box also comprises a heat insulation layer and a temperature measuring probe, wherein the heat insulation layer is arranged on the inner side of the outer shell box, the heat insulation layer is positioned between the heat conduction box and the outer shell box, and the air passing gap is positioned between the heat conduction box and the heat insulation layer; the temperature measuring probe extends into the air passing gap; the outer casing has a ventilation hole communicated with the air passing gap and a second valve body for opening and closing the ventilation hole.
The main pipeline piece is communicated with the nitrogen charging device through the third valve body, the third valve body is used for regulating and controlling the connection and disconnection of the main pipeline piece and the nitrogen charging device, and the nitrogen charging device is used for charging nitrogen into the exhaust device.
The main pipeline piece is communicated with the air exhaust device through the first valve body, the second valve body is used for regulating the on-off state of the air exhaust device, and the air exhaust device is used for activating an air exhaust agent in the air exhaust device.
The dry type vortex pump is communicated with the molecular pump through the branch pipeline piece, and the fifth valve body is used for regulating and controlling the connection and disconnection between the branch pipeline piece and the dry type vortex pump; the leak detector is communicated with the branch pipeline piece through a sixth valve body, and the sixth valve body is used for regulating and controlling the on-off between the leak detector and the branch pipeline piece.
In order to achieve the above object, a vacuum exhaust method of a vacuum exhaust apparatus according to the present invention includes the vacuum exhaust apparatus described above, and further includes:
starting the dry type scroll pump and the molecular pump, and performing exhaust and vacuum pumping on an exhaust device through a main pipeline piece by utilizing the matching of the dry type scroll pump and the molecular pump;
the vacuum degree of the exhaust device detected by the vacuum detector is equal to or more than 5 multiplied by 10-4Pa, a leak detector measures whether an exhaust device leaks air;
when the air leakage of the exhaust device occurs, the first valve body corresponding to the air leakage exhaust device is closed;
and when the exhaust device is airtight, sealing the exhaust device by using sealing equipment.
Wherein, still include the following step:
heating and baking the exhaust device by using a baking device, wherein the baking device heats and bakes for 48-72h, and the temperature of the exhaust device is heated to 150-;
the vacuum detector detects that the vacuum degree of the exhaust device is equal to or more than 1 x 10-5Pa, stopping heating the baking device, and reducing the temperature of the exhaust device to 100 ℃.
Wherein, still include the following step:
the vacuum degree of the exhaust device is detected by a vacuum detector to be equal to or more than 8 multiplied by 10-6Pa, activating the getter of the exhaust device by using getter equipment, wherein the activation time is 10 min;
when the getter device is used for activating the getter of the exhaust device, the vacuum detector detects that the vacuum degree of the exhaust device is higher than 5 multiplied by 10-4Pa；
After the getter equipment completes the activation of the exhaust device, the dry type scroll pump and the molecular pump are matched to exhaust and vacuumize the exhaust device, and the vacuum detector detects that the vacuum degree of the exhaust device is equal to or more than 8 multiplied by 10-6And Pa, mechanically sealing the exhaust device by using hydraulic pliers of sealing equipment.
The invention has the beneficial effects that: the invention has simple structure and convenient use, and can finish the exhaust and vacuum pumping of a plurality of exhaust devices at one time; through the arrangement of the leak detector, the first valve body is used for conveniently and quickly closing the air leaking exhaust device; the accuracy and consistency of the vacuum degrees of a plurality of exhaust devices are ensured by means of a vacuum detector; the vacuum-pumping efficiency and the vacuum-pumping yield of the exhaust device are improved.
Drawings
FIG. 1 is a schematic view showing the construction of a vacuum evacuation apparatus according to the present invention;
FIG. 2 is a schematic structural view of the lifting mechanism and the baking box of the present invention;
fig. 3 is a flowchart of a vacuum exhaust method of the vacuum exhaust apparatus of the present invention.
The reference numerals include:
1-dry type scroll pump 2-leak detector 3-molecular pump
4-vacuum detector 5-first valve body 6-baking oven
7-heat conduction box 8-outer shell box 9-heating electrode
11-driving motor 12-fan 13-air gap
14-heat insulation layer 15-temperature measuring probe 16-nitrogen filling equipment
17-third valve body 18-getter device 19-fourth valve body
21-fifth valve body 22-sixth valve body.
Detailed Description
For the understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
Referring to fig. 1 to 3, a vacuum exhaust apparatus according to the present invention includes a main pipe, a dry scroll pump 1, a leak detector 2, a molecular pump 3, a vacuum detector 4, and a plurality of first valve bodies 5, wherein the dry scroll pump 1 is communicated with the main pipe through the molecular pump 3. Preferably, the main pipeline piece is made of stainless steel, and the main pipeline piece is a hollow pipe piece. The dry scroll pump 1 communicates with the molecular pump 3 via a bellows, preferably made of stainless steel, according to actual needs. On one hand, the high strength of the stainless steel is utilized to prevent the deformation of the pipeline, and on the other hand, the corrosion resistance of the stainless steel is utilized to reduce the pollution of rust spots to the exhaust device. The dry scroll pump 1 and the molecular pump 3 are conventional and will not be described in detail herein.
The trunk line spare communicates with external a plurality of exhaust device via a plurality of first valve bodies 5 respectively, and trunk line spare is the T type roughly, and trunk line spare disposes a plurality of breeches of parallel, breeches and 5 one-to-ones of first valve body, and first valve body 5 is installed on the breeches, and exhaust device communicates with main line spare via first valve body 5, and first valve body 5 is used for regulating and controlling the break-make of trunk line spare and exhaust device, first valve body 5, exhaust device one-to-one.
The leak detector 2 is respectively communicated with the dry type scroll pump 1 and the molecular pump 3, a three-way valve body can be configured according to actual requirements, the leak detector 2, the dry type scroll pump 1 and the molecular pump 3 are respectively communicated with three valve ports of the three-way valve body, the dry type scroll pump 1 is matched with the molecular pump 3 to be used for carrying out vacuum exhaust on a plurality of exhaust devices, the vacuum detector 4 is used for measuring the vacuum degree of the exhaust devices, and the leak detector 2 is used for measuring whether the exhaust devices leak gas or not.
When the leak detector 2 detects the leakage of one exhaust device, the first valve body 5 corresponding to the exhaust device is closed, and other exhaust devices are exhausted and vacuumized. Of course, the air-leaking exhaust device can be replaced, a new exhaust device is installed again, and then the corresponding first valve body 5 is opened again; until all the exhaust devices are leak-tight as detected by the leak detector 2. Preferably, the leak detector 2 is a helium mass spectrometer leak detector, which is prior art and will not be described herein again.
The invention has simple structure and convenient use, and can finish the exhaust and vacuum pumping of a plurality of exhaust devices at one time; the setting of the leak detector 2 is used for conveniently and quickly closing the air leakage exhaust device by the first valve body 5; the vacuum detector 4 is used for ensuring the accuracy and consistency of the vacuum degrees of a plurality of exhaust devices; the vacuum-pumping efficiency and the vacuum-pumping yield of the exhaust device are improved.
Still include elevating system and with elevating system cooperation use toast case 6, elevating system is prior art, for example, elevating system is the electric jar, elevating system is used for driving and toasts 6 covers of case and establishes main pipeline spare and with the exhaust device of main pipeline spare intercommunication, toasts case 6 and is used for heating exhaust device, dry-type scroll pump 1 and molecular pump 3 cooperation and carry out vacuum exhaust to toasting the exhaust device of case 6 heating.
When the vacuum exhaust device exhausts and evacuates the exhaust device, the baking box 6 is utilized to heat the exhaust device, so that other hidden parts in the exhaust device are fully released, the exhaust device can be fully exhausted and evacuated, and the exhaust vacuum yield of the exhaust device is improved.
The baking box 6 includes a heat conduction box 7, an outer case box 8 covering the heat conduction box 7, a heating electrode 9 arranged between the heat conduction box 7 and the outer case box 8, a driving motor 11 arranged on the outer side of the outer case box 8, and a fan 12 mounted on an output shaft of the driving motor 11. Preferably, the heat conducting box 7 is made of a material with good heat conducting performance, for example, the heat conducting box 7 is made of copper alloy, and the heat conducting box 7 is a substantially hollow box body.
An air gap 13 is formed between the heat conduction box 7 and the outer shell box 8, and the driving motor 11 and the fan 12 are both positioned in the air gap 13; in practical use, the driving motor 11 generates heat and heats air in the air passing gap 13, the driving motor 11 drives the fan 12 to rotate, and then the hot air flows uniformly in the air passing gap 13, so that the heat conduction box 7 is heated uniformly.
In this embodiment, the heat conducting box 7 has a containing blind cavity for containing the main pipeline part and the exhaust part, and the containing blind cavity penetrates through the bottom surface of the heat conducting box 7; the lifting mechanism is for connection to the upper end of the housing box 8. When the baking box 6 is needed to bake the exhaust device, the lifting mechanism drives the baking box 6 to descend until the exhaust device and the main pipeline part enter the accommodating blind cavity in the heat conduction box 7. Preferably, toast case 6 and dispose the bottom plate, main pipeline spare, first valve body 5 all install and set up on the bottom plate, and exhaust device is located the top of bottom plate, and during the in-service use, elevating system drive toasts 6 descendants of case and takes heat conduction case 7 to contradict on the bottom plate until outer case 8, covers the opening in the blind chamber of holding with the help of the bottom plate is sealed.
The baking box 6 further comprises a heat insulation layer 14 and a temperature measuring probe 15, the heat insulation layer 14 is arranged on the inner side of the outer shell box 8, the heat insulation layer 14 is located between the heat conduction box 7 and the outer shell box 8, and the air passing gap 13 is located between the heat conduction box 7 and the heat insulation layer 14; the temperature measuring probe 15 extends into the air passing gap 13; the outer case 8 has an air hole communicating with the air passing gap 13 and a second valve body for opening and closing the air hole.
By means of the arrangement of the heat insulation layer 14, on one hand, heat loss of the baking box 6 is avoided, and the utilization efficiency of heat is improved; on the other hand, the user is prevented from being scalded by touching the high-temperature casing box 8. Through the setting of temperature probe 15, realize the accurate control to toasting 6 temperatures of case, avoid toasting 6 high temperatures or the temperature is too low and use badly. Through the setting of second valve body, realize opening and close and the control of aperture size to the bleeder vent, and then make things convenient for the hot-air in the air gap 13 to escape through the bleeder vent, realize the convenient control regulation to toasting 6 temperatures of case.
The device further comprises a nitrogen charging device 16 and a third valve 17, wherein the nitrogen charging device 16 is communicated with the main pipeline piece through the third valve 17, the third valve 17 is used for regulating and controlling the connection and disconnection of the main pipeline piece and the nitrogen charging device 16, and the nitrogen charging device 16 is used for charging nitrogen into the exhaust device. Through the matching of the nitrogen charging device 16 and the third valve body 17, nitrogen can be charged into the exhaust device for protective use, and the stability of the service performance of the exhaust device is ensured.
The exhaust device also comprises a getter device 18 and a fourth valve body 19, wherein the getter device 18 is communicated with the main pipeline piece through the fourth valve body 19, the fourth valve body 19 is used for regulating and controlling the on-off of the getter device 18 and the main pipeline piece, and the getter device 18 is used for activating a getter in the exhaust piece. By means of the matching of the getter device 18 and the fourth valve body 19, the activation of the getter in the exhaust device is realized, the latent gas in the exhaust device is absorbed by the getter, and the yield of exhaust and vacuum pumping of the exhaust device is improved.
The dry-type vortex pump further comprises a branch pipeline part, a fifth valve body 21 and a sixth valve body 22, wherein the branch pipeline part is a corrugated pipe, the dry-type vortex pump 1 is communicated with the molecular pump 3 through the branch pipeline part, and the fifth valve body 21 is used for regulating and controlling the on-off between the branch pipeline part and the dry-type vortex pump 1; the leak detector 2 is communicated with the branch pipeline piece through a sixth valve body 22, and the sixth valve body 22 is used for regulating and controlling the on-off between the leak detector 2 and the branch pipeline piece. The branch pipe piece, the fifth valve body 21 and the sixth valve body 22 are matched, so that the dry type scroll pump 1 and the molecular pump 3 can be controlled quickly and independently, the fifth valve body 21 can be used for quickly regulating and controlling the connection or separation of the branch pipe piece and the dry type scroll pump 1, and the sixth valve body 22 can be used for quickly controlling the connection or separation of the branch pipe piece and the leak detector 2.
In order to achieve the above object, a vacuum exhaust method of a vacuum exhaust apparatus according to the present invention includes the vacuum exhaust apparatus described above, and further includes:
the dry type scroll pump 1 and the molecular pump 3 are started, all exhaust devices communicated with the main pipeline piece are exhausted and vacuumized through the main pipeline piece by utilizing the matching of the dry type scroll pump 1 and the molecular pump 3, the one-time exhaust and vacuumization of a plurality of exhaust devices is realized, and the vacuumization efficiency of the exhaust devices is improved;
the vacuum degree of the exhaust device detected by the vacuum detector 4 is equal to or more than 5 multiplied by 10-4Pa, i.e. degree of vacuum in the exhaust device, equal to or greater than 5X 10-4When Pa, the leak detector 2 measures whether the exhaust device leaks air;
when the leak detector 2 detects air leakage of the exhaust device, the first valve body 5 corresponding to the air-leaking exhaust device is closed, and other air-leaking exhaust devices are exhausted and vacuumized; of course, according to actual needs, the air-leaking exhaust device can be detached, a new exhaust device is installed and connected to the corresponding first valve body 5, and then the first valve body 5 is opened again, so that the exhaust device is communicated with the main pipeline;
when the leak detector 2 detects that the exhaust device is airtight, the exhaust device is sealed by using sealing equipment.
The vacuum exhaust method of the vacuum exhaust apparatus further comprises the steps of:
heating and baking the exhaust device by using a baking device, wherein the baking device heats and bakes for 48-72h, and the temperature of the exhaust device is heated to 150-; the temperature in the exhaust device is ensured to be uniformly maintained in a required temperature range, so that the gas in the exhaust device can be fully exhausted;
the vacuum detector 4 detects that the vacuum degree of the exhaust device is equal to or more than 1 x 10-5And Pa, stopping heating by the baking device, reducing the temperature of the exhaust device to 100 ℃, detecting whether the vacuum degree measured by the vacuum detector 4 changes by using the temperature change, and obtaining that the exhaust vacuumizing of the exhaust device meets the required requirement when the vacuum degree measured by the vacuum detector 4 does not change due to the temperature change.
The vacuum exhaust method of the vacuum exhaust apparatus further comprises the steps of:
the dry type scroll pump 1 and the molecular pump 3 are matched to vacuumize the exhaust device which is reduced to 100 ℃, and the vacuum detector 4 detects that the vacuum degree of the exhaust device is equal to or more than 8 multiplied by 10-6Pa, activating the getter of the exhaust device by using getter activating equipment, wherein the activating time is 10 min; the degassing agent activating equipment is used for activating the degassing agent for the exhaust equipment, so that the exhaust vacuumizing of the exhaust device is assisted, and the exhaust vacuumizing yield of the exhaust device is improved.
When the getter activating device is used for activating the getter of the exhaust device, the vacuum detector 4 detects that the vacuum degree of the exhaust device is higher than 5 multiplied by 10-4Pa; avoid the vacuum degree of the exhaust device being lower than 5 multiplied by 10-4Pa to cause poor exhaust of the exhaust device.
After the activation of the exhaust device is completed by the getter activating equipment, the exhaust device is exhausted and vacuumized by the cooperation of the dry type scroll pump 1 and the molecular pump 3, and the vacuum degree of the exhaust device detected by the vacuum detector 4 is equal to or more than 8 multiplied by 10-6And Pa, mechanically sealing the exhaust device by using a hydraulic clamp of the sealing equipment, thereby ensuring that the exhaust device is in a vacuum packaging state and prolonging the service life of the exhaust device.
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.
Claims (10)
1. A vacuum exhaust apparatus, characterized in that: the dry type vortex pump is communicated with the main pipeline piece through the molecular pump, the main pipeline piece is communicated with a plurality of external exhaust devices through the plurality of first valve bodies respectively, and the first valve bodies are used for regulating and controlling the connection and disconnection of the main pipeline piece and the exhaust devices; the first valve bodies and the exhaust devices are in one-to-one correspondence, the leak detector is respectively communicated with the dry type scroll pump and the molecular pump, the dry type scroll pump is matched with the molecular pump and used for performing vacuum exhaust on the exhaust devices, the vacuum detector is used for measuring the vacuum degree of the exhaust devices, and the leak detector is used for detecting whether the exhaust devices leak air or not.
2. The vacuum exhaust apparatus according to claim 1, characterized in that: still include elevating system and with the case that toasts that elevating system cooperation was used, elevating system is used for driving toasts the case cover and establishes the exhaust device with main pipeline spare intercommunication, toasts the case and is used for heating exhaust device, and dry-type scroll pump and molecular pump cooperation carry out vacuum exhaust to toasting the exhaust device of case heating.
3. The vacuum exhaust apparatus according to claim 2, characterized in that: the baking box comprises a heat conduction box, an outer shell box covered on the outer side of the heat conduction box, a heating electrode arranged between the heat conduction box and the outer shell box, a driving motor arranged on the outer shell box, and a fan arranged on an output shaft of the driving motor; an air passing gap is formed between the heat conduction box and the outer shell box, and the driving motor and the fan are both positioned in the air passing gap; the heat conduction box is provided with a containing blind cavity for containing the main pipeline part and the exhaust part, and the containing blind cavity penetrates through the bottom surface of the heat conduction box; the lifting mechanism is for connection to the upper end of the outer housing box.
4. The vacuum exhaust apparatus according to claim 3, characterized in that: the baking box also comprises a heat insulation layer and a temperature measurement probe, the heat insulation layer is arranged on the inner side of the outer shell box, the heat insulation layer is positioned between the heat conduction box and the outer shell box, and the air gap is positioned between the heat conduction box and the heat insulation layer; the temperature measuring probe extends into the air passing gap; the outer casing has a ventilation hole communicated with the air passing gap and a second valve body for opening and closing the ventilation hole.
5. The vacuum exhaust apparatus according to claim 1, characterized in that: the nitrogen charging device is communicated with the main pipeline piece through the third valve body, the third valve body is used for regulating and controlling the connection and disconnection of the main pipeline piece and the nitrogen charging device, and the nitrogen charging device is used for charging nitrogen into the exhaust device.
6. The vacuum exhaust apparatus according to claim 1, characterized in that: the main pipeline piece is communicated with the air exhaust device through the first valve body, the second valve body is used for regulating and controlling the on-off of the air exhaust device and the main pipeline piece, and the air exhaust device is used for activating the air exhaust agent in the air exhaust device.
7. The vacuum exhaust apparatus according to claim 1, characterized in that: the dry type scroll pump is communicated with the molecular pump through the branch pipeline piece, and the fifth valve body is used for regulating and controlling the on-off between the branch pipeline piece and the dry type scroll pump; the leak detector is communicated with the branch pipeline piece through a sixth valve body, and the sixth valve body is used for regulating and controlling the on-off between the leak detector and the branch pipeline piece.
8. A vacuum exhaust method of a vacuum exhaust apparatus, comprising the vacuum exhaust apparatus according to any one of claims 1 to 7, further comprising the steps of:
starting the dry type scroll pump and the molecular pump, and performing exhaust and vacuum pumping on an exhaust device through a main pipeline piece by utilizing the matching of the dry type scroll pump and the molecular pump;
the vacuum degree of the exhaust device detected by the vacuum detector is equal to or more than 5 multiplied by 10-4Pa, a leak detector measures whether an exhaust device leaks air;
when the air leakage of the exhaust device occurs, the first valve body corresponding to the air leakage exhaust device is closed;
and when the exhaust device is airtight, sealing the exhaust device by using sealing equipment.
9. The vacuum exhaust method of a vacuum exhaust apparatus according to claim 8, further comprising the steps of:
heating and baking the exhaust device by using a baking device, wherein the baking device heats and bakes for 48-72h, and the temperature of the exhaust device is heated to 150-;
the vacuum detector detects that the vacuum degree of the exhaust device is equal to or more than 1 x 10-5Pa, stopping heating the baking device, and reducing the temperature of the exhaust device to 100 ℃.
10. The vacuum exhaust method of a vacuum exhaust apparatus according to claim 9, further comprising the steps of:
the vacuum degree of the exhaust device is detected by a vacuum detector to be equal to or more than 8 multiplied by 10-6Pa, activating the getter of the exhaust device by using getter equipment, wherein the activation time is 10 min; when the getter device is used for activating the getter of the exhaust device, the vacuum detector detects that the vacuum degree of the exhaust device is higher than 5 multiplied by 10-4Pa; after the getter equipment completes the activation of the exhaust device, the dry type scroll pump and the molecular pump are matched to exhaust and vacuumize the exhaust device, and the vacuum detector detects that the vacuum degree of the exhaust device is equal to or more than 8 multiplied by 10-6And Pa, mechanically sealing the exhaust device by using hydraulic pliers of sealing equipment.
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|---|---|---|---|
| CN202010840728.0A CN111946592A (en) | 2020-08-20 | 2020-08-20 | Vacuum exhaust device and vacuum exhaust method |
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| CN202010840728.0A CN111946592A (en) | 2020-08-20 | 2020-08-20 | Vacuum exhaust device and vacuum exhaust method |
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| CN111946592A true CN111946592A (en) | 2020-11-17 |
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| CN202010840728.0A Pending CN111946592A (en) | 2020-08-20 | 2020-08-20 | Vacuum exhaust device and vacuum exhaust method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114439731A (en) * | 2021-12-30 | 2022-05-06 | 武汉亿贝达科技有限公司 | Leak detection method for KY molecular pump unit vacuum system |
| CN114720803A (en) * | 2022-04-05 | 2022-07-08 | 苏州中科科美科技有限公司 | Environment forming method and test system |
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| CN212615235U (en) * | 2020-08-20 | 2021-02-26 | 东莞市德派精密机械有限公司 | Vacuum exhaust device |
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| JP2003139055A (en) * | 2001-10-31 | 2003-05-14 | Ulvac Japan Ltd | Evacuation device |
| CN103742386A (en) * | 2013-12-27 | 2014-04-23 | 中国兵器工业集团第二一一研究所 | Exhaust method for obtaining ultrahigh vacuum |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114439731A (en) * | 2021-12-30 | 2022-05-06 | 武汉亿贝达科技有限公司 | Leak detection method for KY molecular pump unit vacuum system |
| CN114720803A (en) * | 2022-04-05 | 2022-07-08 | 苏州中科科美科技有限公司 | Environment forming method and test system |
| CN114720803B (en) * | 2022-04-05 | 2023-01-31 | 苏州中科科美科技有限公司 | Environment forming method and test system |
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